Abstract: An active optical filter transmits or blocks light according to whether or not a magnetic field is applied, and functions as an optical filter transmitting light having a predetermined wavelength when light is transmitted according to a magnetic field. The active optical filter includes: an optical filter layer for transmitting or blocking light according to whether or not a magnetic field is applied; and a magnetic field applying unit surrounding the optical filter layer for applying a magnetic field to the optical filter layer. The optical filter layer has a multi-layer thin layer structure which is formed of two kinds of thin layers having different respective refractive indices and sequentially and periodically stacked on a substrate.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: A light pulse positioning apparatus with dispersion compensation includes an acousto-optical device and a dispersive element optically coupled thereto. The dispersive element is placed and oriented in relation to the acousto-optical device to spatially and temporally disperse the light pulse and thus compensate, respectively, a spatial dispersion and a temporal dispersion caused by the acousto-optical device. The acousto-optical device can include one or more acousto-optical deflectors for one-dimensional or two-dimensional laser pulse positioning. The dispersive element can be a prism placed in front of the acousto-optical device. In a two-dimensional configuration, a single prism, if properly oriented, is sufficient for dispersion compensation of both acousto-optical deflectors.

Abstract: The 2-channel display system with micro electromechanical systems (MEMS, e.g. DMDs from Texas Instruments) simultaneously generates a right and a left image in two discrete modulation channels, which differ by the polarization of their light beams. More specifically, the invention relates to the chirality (handedness) of MEMS and the geometric problems associated with this handedness in superposition systems. In this application we uncover a solution to superpose the images modulated by identical MEMSs which have their mirror deflection axes oriented parallel to an axis of symmetry of the image raster of the MEMSs.

Abstract: A projection apparatus includes a light source for emitting a light including at least two different wavelengths; a light source control circuit for controlling a light source to emit the light as pulse emissions with a pulse modulation control; at least two spatial light modulators each comprises plurality of pixel elements are arranged in an array; a spatial light modulator control circuit for selectively controlling a modulation state of the respective pixel elements in each of the spatial light modulators in accordance with image data corresponding to the respective pixel elements; and the light source control circuit controls the light source so that a starting time of a pulse emission period of the pulse emissions of at least one of the wavelengths emitted from the light source is different from a modulation control timing of the pixel element of the spatial light modulator.

Abstract: Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is applied to conductive leads in the display and the resulting current is measured. The voltage may be controlled so as to ensure that interferometric modulators do not actuate during the resistance measurements. Also disclosed are methods for conditioning interferometric modulator display by applying a voltage waveform that causes actuation of interferometric modulators in the display.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: A method of manufacturing oscillator devices each having an oscillator and a resilient supporting member for supporting the oscillator for oscillatory motion, includes a step of processing one and the same substrate to form oscillators and resilient supporting members of oscillator devices so that oscillators of adjacent oscillator devices are connected to each other, a step of forming or placing a magnetic material so that it extends across the connected oscillators of the adjacent oscillator devices, and a step of simultaneously cutting and separating the connected oscillators and the magnetic material formed or placed to extend across the connected oscillators, whereby oscillator devices, such as oscillatory type actuators having good reliability and performance evenness can be manufactured with high productivity.

Abstract: A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure.

Abstract: A magnetic field may be applied to a plasmon path to affect plasmon propagation.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: The present invention provides a projection apparatus, that includes: a light source; a light source control unit for controlling the output of the light source; at least one spatial light modulator for modulating the illumination light from the light source by a plurality of pixel elements; and an optical system for projecting, onto a screen, the illumination light deflected by the spatial light modulator, wherein: the light source control unit performs a gamma (?) correction on input image data by a modulation control of the light source.

Abstract: A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least two of the sizes of the active areas are different with respect to each other, e.g., they are non-uniform in size. The interferometric modulators have a plurality of states, wherein selected ones of the interferometric modulators are configured to be actuated depending differing electrostatic forces in the interferometric modulators. The electrostatic forces in the interferometric modulators are different at least in part due to variations in the sizes of the active areas of the electrodes.

Abstract: A display device, generating light flux containing image information and making the light flux incident to one-eye of an image viewer by controlling an angle of divergence of the light flux is provided. The device includes a first lens, a second lens and an angle of divergence control device provided between the first lens and the second lens, the angle of divergence control device being configured to control the angle of divergence of the light flux.

Abstract: Systems and apparatus enhance transmission of electromagnetic energy through a sub-wavelength aperture. A metal film has an input surface and an output surface and forms the sub-wavelength aperture between the input and output surfaces, a first plurality of grooves on the input surface, and a cavity around the sub-wavelength aperture. The width of the cavity determines a resonant wavelength of electromagnetic energy transmitted through the sub-wavelength aperture. The patterned metal film provides plasmon coupling of electromagnetic energy incident upon the input surface transmit electromagnetic energy through the sub-wavelength aperture.

Abstract: A system comprises a spatial light modulator comprising a plurality of modulation elements, the spatial light modulator operable to receive an optical signal comprising one or more optical channels, wherein the elements are operable to perform an optical function on at least one of the one or more optical channels. The system further comprises two or more reset groups associated with the spatial light modulator, wherein each reset group comprises one or more elements, and wherein at least one of the one or more optical channels resides on at least two of the two or more reset groups. The system also comprises a controller operable to actuate the elements of at least one of the at least two reset groups associated with the optical channel at a different time than any one or more other reset group of the at least two reset groups.

Abstract: The invention relates to methods and apparatus for forming images on a display utilizing a control matrix to control the movement of MEMs-based light modulators.

Abstract: Disclosed herein are a system and apparatus for operating a device that comprises an array of micromirrors. The system and apparatus are usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation can be applied independently to the micromirrors. Alternatively, the reparation can be incorporated with a bias inversion process.

Abstract: The invention relates to methods and apparatus for forming images on a display utilizing a control matrix to control the movement of MEMs-based light modulators.

Abstract: A magnetic field may be applied to a plasmon path to affect plasmon propagation.

Abstract: An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, at least one of the optical states being tunable and the other not tunable.

Abstract: The present invention provides an optical device comprising a pair of specifically designed plate-like diffractive optical elements successively arranged in parallel to each other.,. Placing the two diffractive optical elements in succession and in parallel to each other in a certain distance, the combination optically corresponds to a single diffractive optical element, and it can perform similar tasks, acting as a lens, an axicon, a phase shifter, or a spiral phase plate. If one of the diffractive optical elements is rotated with respect to the other around a common central axis, the property of the optical device, like the focal length, the refractive power, helical index, or phase shift changes continuously.

Abstract: An electrophoretic display device includes; a first substrate having a plurality of pixel electrodes in a display region thereof; and an electrophoretic sheet that includes a second substrate on which a common electrode, an electrophoretic layer, and an adhesive layer are laminated. The electrophoretic sheet is bonded to the display region of the first substrate via the adhesive layer. The distance between neighboring pixel electrodes among the plurality of pixel electrodes is 5 ?m or more.

Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.

Abstract: A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms on the substrate. The first set of arms and the second set of arms can be interdigitated when the mirror plate is tilted. The micro mirror device includes a first lateral guard on the substrate (or the mirror plate). The first lateral guard can limit movement of the mirror plate to a position in a first direction substantially parallel to an upper surface of the substrate to prevent the first set of arms from contacting the second set of arms when the arms are in the interdigitated position.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: A microelectromechanical systems device having an electrical interconnect connected to at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a movable layer of the device. A thin film, particularly formed of molybdenum, is provided underneath the electrical interconnect. The movable layer preferably comprises aluminum.

Abstract: A display medium includes a pair of substrates, an electrophoretic medium, and a partitioning medium. The pair of substrates is disposed in spaced-apart relation and substantially parallel to each other. The electrophoretic medium is disposed between the pair of substrates and contains charged particles. An electric field generated between the pair of substrates causes the charged particles contained in the electrophoretic medium to migrate for switching a display state. The partitioning medium has fluidity and is phase-separated from the electrophoretic medium at least at room temperature. The partitioning medium is in a phase-separated state phase-separated from the electrophoretic medium. The partitioning medium is disposed between the pair of substrates as a partition to partition the electrophoretic medium.

Abstract: A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light. The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.

Abstract: An image display apparatus and method are disclosed.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A projection apparatus has a spatial light modulator to modulate illumination from a laser light source. A base projection lens has, from its long conjugate side to its short conjugate side, a first lens group with negative focal length and with a first lens element that has a negative focal length and a second lens element of positive focal length, a second lens group of negative focal length and spaced apart from the first lens group and having one or more cemented lens elements, and a third lens group spaced apart from the second lens group and having a lens with a positive focal length. The base projection lens has a first field of view and is telecentric in its short conjugate. An afocal attachment to the base projection lens alters the first field of view by the same amount in both of two orthogonal directions.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: In various embodiments of the invention, an anti-stiction coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide an anti-stiction on one or mirror surfaces of an interferometric light modulation device, also known as an iMoD in some embodiments. In other embodiments, an interferometric light modulation device is encapsulated within a package and the anti-stiction coating is applied after the package is fabricated. In one embodiment, one or more orifices are defined in the package, e.g., in a seal, a substrate or a backplate and the anti-stiction coating material is supplied into the interior of the package via the orifice(s). In one embodiment, the anti-stiction coating material includes a self-aligned (or self-assembled) monolayer. In yet another embodiment, the anti-stiction layer coating can be incorporated into a release process where a sacrificial layer of an interferometric light modulation device is etched away with the use of a gas.

Abstract: The present invention relates to an optical parametric oscillator. In particular, the present invention relates to a more optimal rotating image optical parametric oscillator. More specifically, there is described an optical parametric oscillator comprising six mirrored surfaces; wherein two of the mirrored surfaces are provided by a penta prism and the sequence of mirrors is operable to provide a predetermined rotation of a beam passing therethrough.

Abstract: A cost-effective photosensor system for rotor position detection includes securing an aperture assembly to an off-the-shelf infrared radiation-emitting component and/or an off-the-shelf infrared radiation-detecting component. The application discloses an aperture assembly that may be stamped from a thin, opaque, elongated piece of plastic having an aperture window through which a radiation beam may pass and be focused. The aperture assembly also has a locking system for securing the assembly to the off-the-shelf photosensor system component, and an alignment system to direct the infrared radiation beam. A replaceable stamped aperture assembly for use in a rotor-sensing system and a method of providing a replaceable aperture assembly and securing it to an infrared component of a photosensor system are also disclosed.

Abstract: To provide an optical gating system capable of performing single-shot, parallel, and ultrafast gating equal to or less than a subpicosecond, without depending on coherence. The optical gating system converts signal light to spatial characteristic signal light whose intensity distribution has spatial periodicity, and emits the spatial characteristic signal light to a gate region (13) so as to be obliquely incident on the gate region (13). In a closed state in an opening and closing operation of the gate region (13), a closed moiré fringe pattern (graph 11) is created in the gate region (13) by overlaying the spatial characteristic signal light and spatial characteristic closed light acting in a direction in which an intensity of the spatial characteristic signal light is decreased in the gate region (13).

Abstract: A line-like laser beam flux irradiating apparatus comprising a laser source which emits a divergent laser beam flux, a conversion lens which converts the divergent laser beam flux to a parallel laser beam flux, a first lens which forms a first line-like laser beam flux, a second lens which forms a second line-like laser beam flux intersecting the first line-like laser beam flux, a reflective optical system comprised of a first reflective surface which reflects the parallel laser beam flux toward the first lens and a second reflective surface which reflects the parallel laser beam flux toward the second lens, wherein the parallel laser beam flux is simultaneously guided to the first and second reflective surfaces so as to form a cross-wise line-like laser beam flux is formed on the same plane by the cooperation of the first line-like laser beam flux and the second line-like laser beam flux.

Abstract: A method and system for reducing speckle in an image produced from a coherent source of radiation is provided. The method includes coupling a source beam received from a coherent optical source into an optical fiber. A position of at least a portion of the fiber may be modulated using a ditherer. The source beam may be refracted by a lens after it is decoupled from the optical fiber, such that the source beam is aimed at a microlens diffuser. In accordance with a particular embodiment, the source beam may be projected from the microlens diffuser onto a spatial modulator. The spatial modulator may be positioned to project the source beam via an imaging lens, to a target.

Abstract: The use of spatial light modulators to steer light beams is disclosed. A dual frequency liquid crystal spatial light modulator can be controlled so as to form a blazed phase grating thereon that effects desire deflection of incident light.

Abstract: A light scanning device that projects light beams modulated in response to image signals. The light scanning device includes: a light source that emits the light beams; a scanner that scans the light beams from the light source in a first direction and a second direction substantially perpendicular to the first direction; a pixel-timing-signal generating section that generates a pixel timing signal indicative of a timing at which the light beam enters for every pixel region to be formed in response to the image signals; a pulse-signal generating section that generates a pulse signal having a pulse width corresponding to time shorter than the shortest of the time during which the light beam passes through the pixel region on the basis of the pixel timing signal; and a driving-signal generating section that generates a driving signal for driving the light source in accordance with the pulse signal and the image signal.

Abstract: Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.

Abstract: At least one exemplary embodiment is directed to an optical scanning apparatus which includes a Vertical Cavity Surface Emitting Laser including a plurality of light-emitting portions that are spaced from each other in at least a sub-scanning direction, a first optical system including a light-condensing element that converts each of light beams from the laser into a light beam in another state; a deflector that reflects and deflects the light beams from the first optical system, and a second optical system that focuses the light beams deflected by the deflecting member on a surface to be scanned, where the second optical system includes at least an imaging optical element having an optical surface with a non-arc shape in a sub-scanning cross section.

Abstract: A method and apparatus for controlling a gap between conductors in an electro-mechanical device by controlled displacement of a displaceable conductor within the electro-mechanical device is provided. The apparatus includes a current controller configured to generate a controlled current output for the electro-mechanical device in response to a control signal, the current controller selectively routing a voltage to an array element including control circuitry and the electro-mechanical device.

Abstract: In particles for image displaying used in an image display device, in which one or more kind of particles are sealed between opposed substrates, at least one substrate being transparent, and, in which the particles are made to fly and move so as to display an image, each particle has a micro-irregularity at its surface. Moreover, in an image display device, in which one or more kind of particles are sealed between opposed substrates, at least one substrate being transparent, and, in which the particles, to which an electrostatic field produced by two kinds of electrodes having different potentials is applied, are made to fly and move so as to display an image, use is made of each particle having a micro-irregularity at its surface.

Abstract: Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.

Abstract: A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output.

Abstract: A lid structure, apparatus and method for displaying graphical information uses beams of coherent light that are emitted in a scanning manner to project the beams of coherent light onto a display surface to form the graphical information on the display surface.

Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.