Abstract: The present invention relates to an optical manipulation system (10) for generation of a plurality of optical traps for manipulation of micro-objects including nano-objects using electromagnetic radiation forces in a micro-object manipulation volume (14), the system comprising a spatially modulated light source (16) for emission of a first light beam (24) with a spatially an adjustable spatial light modulator (26) for generating a second (28) and a third (30) modulated light beam, the second intensity modulated light beam propagating towards a first deflector (32) for deflection of the second light beam towards the micro-object manipulation volume (14), and the third intensity modulated light beam propagating towards a second deflector (34) for deflection of the third light beam towards the same volume (14).

Abstract: A multiplanar volumetric three-dimensional display apparatus is disclosed. In one embodiment, the apparatus includes a variable lens and an object source. The variable lens is capable of switching its radius of curvature between a number of states, thereby varying its focal power. The object source provides light for the generation of three-dimensional images. Light from the object source is transmitted through the variable lens and focused at an image plane. As the focal power of the variable lens is varied, the location of the image plane is changed. The object source and variable lens are synchronized and refreshed at a sufficient rate such that an observer may perceive light focused at multiple image plane locations simultaneously, thereby creating the appearance of a three-dimensional image. A reflective pointer may be positioned at the image plane locations wherein light from the object source may be reflected by the pointer back through the variable lens and directed to a detector array.

Abstract: A mirror assembly including an active lens and a reflective surface. The mirror assembly may change its refractive index when a voltage is applied to the active lens, thereby changing the field of view in the lens. Exemplary applications include a blind spot system in a motor vehicle, in which, upon sensing another vehicle in a driver's blind spot, the mirror assembly changes the driver's field of view to include the blind spot. Additional applications include a magnifying mirror for shaving or applying cosmetics.

Abstract: A light modulator device includes a bottom charge plate, a top charge plate, and a pixel plate supported by at least one flexure, wherein the flexure is a piece-wise linear flexure.

Abstract: A three-dimensional optical mouse device with a Micromirror Array Lens (MMAL) is provided. To have the three-dimensional optical mouse system, a three-dimensional imaging device is used for detecting the motion of optical pointer or fingers of the user and gives a location of the pointer to computer working as a pointing device in three-dimension. This three-dimensional pointing system uses three-dimensional imaging device using MMAL with variable focal length.

Abstract: Improved apparatus and methods for displays are disclosed that utilize light concentration array between mechanical light modulators and the viewing surface of the display. The light concentration array includes an array of optical elements that concentrate light on respective ones of the light modulators to maximize the contrast ratio and off axis viewing of the display.

Abstract: A laser light source includes a fundamental laser generator that generates a fundamental laser light, a wavelength conversion element that is made of a ferroelectric crystal with a periodically poled structure and converts the fundamental laser light to a laser light having a different wavelength, a holding member that holds at least a part of an element surface of the wavelength conversion element that crosses a polarization direction of the periodically poled structure, and an insulation layer that is provided between the holding member and the element surface. Electric resistivity of the insulation layer is 1×108 ?·cm or higher.

Abstract: A light-guiding article has a film substrate that has at least one patterned surface having a plurality of discrete surface features and an incident edge that is substantially orthogonal to the at least one patterned surface. Each surface feature in the plurality of discrete surface features extends along a length direction that is substantially parallel to the incident edge. Taken in cross-section along the length direction, each surface feature has a positively sloped portion, a substantially flat portion, and a negatively sloped portion. A first widthwise cross-section taken at a first position through the positively sloped portion has the same shape as a second widthwise cross-section taken at a second position through the negatively sloped portion.

Abstract: A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.

Abstract: An article includes an optical device. The optical device includes a first prism and a second prism. The first prism includes an optically active material that responds to an external stimulus that affects a refractive index of at least a portion of the first prism. A method for making a method of use of the article is also provided.

Abstract: The present invention provides an image-guided microsurgery system comprising a real-time three-dimensional microscopic imaging device and a three-dimensional display device. The imaging device generates an all-in-focus image or in-focus depthwise images with depth information in various fields of view, and the display device shows realistic three-dimensional images with features including reducing eye fatigue, watching by multiple viewers, two-dimensional/three-dimensional compatibility, color expression and high depth resolution, low manufacturing cost, and no significant data amount increase.

Abstract: In accordance with the teachings of the present invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the present invention, a light processing system includes a light source operable to provide a light beam along a light path and a spatial light modulator positioned in the light path, the spatial light modulator comprising an array of pixel elements, each pixel element comprising a deformable micro-mirror operable to reflect the light beam in at least one direction. At least a portion of each deformable micro-mirror comprises an Al—Cu alloy. A controller electrically connected to the spatial light modulator is operable to provide electrical signals to the spatial light modulator to cause the spatial light modulator to selectively deform the pixel elements, thereby selectively reflecting incident light beams along a projection light path.

Abstract: Simultaneous amplitude and phase control of ultrafast laser pulses using a single, linear (one-dimensional) liquid crystal spatial light modulator is described. Amplitude shaping is accomplished by writing a high-frequency phase grating having a spatial period much smaller than the spectral focus (over-sampling), onto the modulator, and diffracting away selected frequencies in a controllable manner, while spectral phase control is imparted by adding an appropriate slow phase bias to the modulator. The close pixel spacing, large number of pixels, and small footprint of the reflective spatial light modulator employed with an angular wavelength dispersive element in a folded Martinez stretcher, enables a simple and compact apparatus to be achieved. The high reflectivity of the spatial light modulator results in a highly efficient pulse shaper when either a prism or diffractive grating is used for the angular dispersive element.

Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract: The display system separates reflected and transmitted light from a color wheel of the display system; and modulates the separated reflected and transmitted light components using separate spatial light modulators so as to achieve high brightness.

Abstract: A laser material processing system and method are provided. A further aspect of the present invention employs a laser for micromachining. In another aspect of the present invention, the system uses a hollow waveguide. In another aspect of the present invention, a laser beam pulse is given broad bandwidth for workpiece modification.

Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Abstract: A lithographic scanning apparatus includes a light projection device for seamlessly and uniformly projecting a scanning light onto a light exposing area. The light projecting device further includes an array of micromirrors having a predefined distribution pattern of reflectance variations for reflecting an incident light onto the light exposing area to seamlessly and uniformly scanning a reflecting light over the light exposing area. In one of a lithographic scanning apparatus, the micromirrors of the micromirror array are coated with a reflective coating of different reflectance to provide the predefined distribution pattern of reflectance variations. In another lithographic scanning apparatus, the micromirrors of the micromirror array are coated with stripes of reduced reflectance whereby each micromirror may have predefined total reflectance to provide the predefined distribution pattern of reflectance variations.

Abstract: Methods and apparatus for reducing back-glass deflection in an interferometric modulator display device are provided. In one embodiment, an interferometric modulator display is provided that includes a including a substrate, an optical stack formed on the substrate, a moveable reflective layer formed over the optical stack, and a backplate attached to the substrate. The moveable reflective layer includes one or more first posts extending therefrom, in which one or more of the first posts are operable to protect the moveable reflective layer by contacting at least a portion of the backplate if the backplate is deflected.

Abstract: An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.

Abstract: A system and method for increasing contrast in displays using micromechanical light modulators. Contrast is enhanced by an optical system that uses polarization to discriminate unmodulated light. Contrast obtained from polarization sensitive components of an optical system has a multiplicative effect on contrast already available.

Abstract: A projection system includes a modulator and an Offner relay. The modulator is to modulate light in accordance with sub-frames of a frame of image data. The Offner relay is to differently aim, in accordance with each sub-frame, the light as modulated.

Abstract: A system and method for increasing display brightness in laser illuminated display systems. An illumination source comprises a light source to produce colored light and a scanning optics unit optically coupled to the light source. The scanning optics unit scans the colored light along a direction orthogonal to a light path of the illumination source. The scanning optics unit comprises a diffuser to transform the colored light in beams of colored light, a scan optics element positioned in the light path after the diffuser, the scan optics element to move beams of colored light in a direction orthogonal to the light path with distinct beams of colored light separated by unilluminated space, and a lens element positioned in the light path after the scan optics element, the lens element to convert an angular refraction of the beams of colored light into a spatial deflection.

Abstract: A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure.

Abstract: This invention relates to an illumination optical apparatus capable of forming a pupil intensity distribution of a desired shape and desired illuminance and, in turn, capable of realizing illumination conditions of great variety. The illumination optical apparatus has a spatial light modulation unit composed of a first spatial light modulator and a second spatial light modulator arranged in an order of incidence of light, and a distribution forming optical system to form a predetermined light intensity distribution on an illumination pupil, based on a beam having traveled via the first spatial light modulator and the second spatial light modulator. The first spatial light modulator has a plurality of first optical elements which are two-dimensionally arranged and postures of which each are individually controlled.

Abstract: An optical device and a wavelength selector switch are provided. The optical device includes a diffraction grating having first and second planes and first and second reflecting planes located on a first plane side of the diffraction grating. In the optical device, light input to the second plane of the diffraction grating is diffracted, and then an optical path of the diffracted light is re-input to the first plane of the diffraction grating newly via the first and the second reflecting planes.

Abstract: The invention relates to a micro-mechanical thermal structure for modulating a light beam and a method for manufacturing such a structure. The micro-mechanical structure comprises two layers of material with different thermal expansion coefficients in a first direction and a second direction respectively, in which the first direction is transverse to the second direction and the two layers comprise an oriented polymer and the director of the molecules of the oriented polymer of the first layer is transverse to the director of the molecules of the oriented polymer of the second layer. An array of such micro-mechanical structures may form a thermo-optical modulator for modulating light. The method comprises a step of providing a mold with an orientation-inducing layer to obtain a molecular orientation in a mono-meric state of liquid crystalline monomers and a step of fixing the molecular orientation by photo-polymerization.

Abstract: A display apparatus is provided. A light beam emitted from a light source is applied through a light modulator and a projecting optical system to a scanning mirror. The light beam is reflected and scanned by the scanning mirror, and applied to a magnifying projection system entrance unit. A detection light beam emitted from a mirror angle detecting light source is reflected and scanned by the scanning mirror, and applied to a linear detector. Operation of the scanning mirror is controlled based on the position of the detection light beam which is detected by the linear detector. The present invention is applicable to a front projector or a rear projector.

Abstract: A projection optical system has first to fourth lens groups (51) to (54) provided in this order from a SLM, a mirror (32) having an opening is provided between the first lens group (51) and the second lens group (52), and an aperture plate (132) is provided between the third lens group (53) and the fourth lens group (54). Zeroth order light which is signal light from the SLM passes through each opening of the mirror (32) and the aperture plate (132) to be guided to a recording medium, and a part of first order diffracted light is reflected by the mirror (32) to be guided outside and received by an external light-block water-cooling jacket. The rest of the first order diffracted light is blocked by the aperture plate (132), and heat generated by light blocking is removed by a cooling mechanism connected to the aperture plate (132).

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: The present invention relates to an apparatus (100) for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation, comprising a source emitting electromagnetic radiation onto an object plane and at least two spatial light modulators each comprising numerous of object pixels, adapted to receive said electromagnetic radiation at said object plane and to relay said electromagnetic radiation toward said workpiece, wherein said electromagnetic radiation is split into at least two beams, which beams will impinge on different spatial light modulators, by a beam splitting device arranged at an optical plane between said spatial light modulators and an illuminator pupil or a conjugate optical plane. The invention also relates to a method for patterning a workpiece with a plurality of spatial light modulators.

Abstract: A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

Abstract: An optical modulator module package includes a substrate having a through-hole through which light passes and having a circuit formed on at least one of its inner and outer surfaces; a transparent lid held in the through-hole for transmitting incident light inputted to an optical modulator element and diffracted light emitted from the optical modulator element; and a metal connection part attached to a surface of the substrate for mounting the optical modulator element and driver integrated circuits. With an optical modulator module package according to embodiments of the present disclosure, the size of the module package may be minimized, as a transparent lid installed with a displacement from the optical modulator element is embedded within the substrate.

Abstract: Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the color white through the use of reflected light at two wavelengths. In one embodiment, a display device displays the color white. The color white is generated by reflecting light from two pluralities of interferometric modulator types. The first modulator type reflects colored light at a specific wavelength. The second modulator type reflects colored light selected to be at a wavelength complementary to the first. The combined light reflected from the two types appears white in the display.

Abstract: A solid tunable micro optical device for an micro-optical system is provided. The sold tunable micro optical device includes a first annular piece, a micro-lens with a spherical surface configured on the first annular piece, and a deforming device coupled to the first annular piece for deforming the micro-lens.

Abstract: A spatial optic modulating system with speckle reduction and a method thereof are disclosed. According to an embodiment of the present invention, a spatial optic modulating system includes a spatial optic modulator, which modulates and reflects an image transferred in accordance with an upward or downward movement of a ribbon that is operated according to a contraction or expansion of a piezoelectric element, an image lens unit, which transfers an image modulated from the spatial optic modulator as a diffraction image to a scanner, and a phase modulator, which modulates a phase of the diffraction image transferred from the image lens unit. With the present invention, an image, from which a speckle is removed, can be displayed by modulating a phase of an image projected by using a spatial optic modulator.

Abstract: A micro-mirror light modulator and associated projection display system. The projection display system includes a light source, a linear light source illumination system that transforms a light emitted from the light source into a thin linear light, a micro-mirror light modulator that selectively diverts the direction of the incident thin linear light to create reflected light, a light transmitting layer that selectively transmits or filters out the reflected light, a condenser lens that focuses the light transmitted by the light transmitting layer, and a scanner that scans the focused light such that the light forms a projected image. The micro-mirror light modulator includes a reflection electrode that deflects toward an electrode when a voltage is applied. The reflection electrode reflects light depending on its deflection state. The micro-mirror light modulator is driven by low voltage, is easily fabricated such that the cost is reduced, and exhibits enhanced image contrast.

Abstract: A spatial light modulation unit can be arranged in an optical system and can be arranged along an optical axis of the optical system. The spatial light modulation unit includes a first folding surface which folds light incident in parallel with the optical axis of the optical system; a reflective spatial light modulator which folds the light folded on the first folding surface; and a second folding surface which folds the light folded on the spatial light modulator, to emit the light into the optical system. The spatial light modulator applies spatial modulation to the light, according to a position where the light folded on the first folding surface is incident to the spatial light modulator.

Abstract: A laser beam is modulated at a very high frequency to produce uniform radiant flux densities on substrate surface processing regions during thermal processing. Beam modulation is achieved by passing the laser beam through a plasma which causes phase randomization within the laser beam. This method may be used for any application where intense, uniform illumination is desired, such as pulsed laser annealing, ablating, and wafer stepper illuminating.

Abstract: A system for, and method of resolving reset conflicts in a phased-reset SLM system and a projection visual display system incorporating the system or the method. In one embodiment, the system includes a reset conflict arbiter configured to receive reset instructions containing conflicts from a sequence generator and resolve the conflicts by shifting an execution time of a selected one of the reset instructions according to a conflict resolution method.

Abstract: Illumination exposure control systems comprising reflective pixelated spatial light modulators that reflect substantially all of the light impinging on them into at least two different light paths. At least one of the light paths acts as a propagating light path and transmits the light beam out of the lighting system. At least one other light path acts as a non-propagating light path and prevents the light beam from being transmitted out the system. The illumination exposure control systems provide high speed of exposure actuation and precision control of exposure duration and frequency or exposure sequences.

Abstract: A polyvinyl alcohol polymer film includes a polyvinyl alcohol polymer and a plasticizer selected from the group consisting of ethylene glycol, glycerin, propylene glycol, diethylene glycol, diglycerin, triethylene glycol, tetraethylene glycol, and trimethylolpropane. The amount of the polyvinyl alcohol polymer eluted when a 10 cm square of the polyvinyl alcohol polymer film is left in 1 liter of water of 50° C. for 4 hours is from 1 to 100 ppm. The film has only a small number of defects and is useful as raw material for producing a polarization film.

Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

Abstract: A miniature waveform modulator is provided to modulate an infrared laser. The miniature waveform modulator outputs a pulse train having different and specified pulse widths, with the pulse train used to modulate the laser. In one embodiment, the pulse train extends over a significant period of time without resorting to generating short pulse trains and combining them. The subject architecture permits the miniature waveform modulator to be compact and implementable on an electronic circuit card. It is significant that the pulse train is generated without software intervention by automatically copying a timing table to a buffer that is automatically read out to a pulse generator. If the buffer size is smaller than that required by the timing table, slices or segments of the timing table are sequentially read out or copied to the buffer, with the next timing table segment transferred to the buffer upon read out of a prior segment.

Abstract: According to one embodiment of the present invention, a semiconductor device includes a first layer of dielectric material disposed upon an upper surface of a substrate of a semiconductor device and a first non-conductive layer of metal disposed upon an upper surface of the dielectric material. The first layer of dielectric material and the first non-conductive layer of metal act as an optical trap for electromagnetic radiation received by the first non-conductive layer of metal. In particular embodiments, the semiconductor device may further comprise a second layer of dielectric material disposed upon an upper surface of the first non-conductive layer of metal and a second non-conductive layer of metal disposed upon an upper surface of the second layer of dielectric material.

Abstract: In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target radiation onto an edge surface of a wafer, the radiation targeting assembly comprising a first expanded paraboloid or expanded ellipsoid reflector positioned adjacent the edge surface of the wafer, a reflected radiation collecting assembly that collects radiation reflected from the surface, a signal processing module to generate surface parameter data from the reflected radiation, and a defect detection module to analyze the surface parameter data to detect a defect on the surface.

Abstract: An electro-optical modulator device and method are provided. The device comprises a light modulator unit having a first Cathode for exposing to input light; and an electric field source configured to create an electric field affecting a change in the refractive index of the first Cathode, thereby effecting a change in the propagation of light reflected from or transmitted through the first Cathode, said light from the first Cathode enabling to affect the operation of an external light sensitive electronic device.

Abstract: An image reading apparatus includes a display section for displaying image information by being subjected to a voltage and/or an electric field, a writing section for writing the image information into the display section, and a reading section for optically reading the image information displayed on the display section. As the display section, a flexible display section such as an electronic sheet is adopted in the image reading apparatus.

Abstract: In a microelectromechanical device array including an array of devices arranged at least one of one-dimensionally and two-dimensionally each of which includes a movable portion that is supported to be elastically deformed and that has a movable electrode on at least one part thereof and fixed electrodes that are disposed to face the movable portion and by which the movable portion is moved to one of at least two different positions, hold electrodes are disposed beside the fixed electrodes, and a hold voltage is applied to the hold electrodes and before rewriting an address voltage that is applied to the fixed electrodes so as to fix the position state of the movable portion.