Abstract: A display system includes a light source 110 and a spatial light modulator 122 located to receive light from the light source. The spatial light modulator (e.g., a DMD) includes a number of independently controllable elements that are activated for a period of time to display light of a desired brightness. A light sensor 136 is located to determine a characteristic of light from the light source 110. A control circuit 126 is coupled to the spatial light modulator 122 and controls the period of time that the independently controllable elements are activated. This period of time is based at least in part by an input received from the light sensor 136.

Abstract: A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.

Abstract: An optical apparatus uses a variable-optical-characteristic optical element whereby focusing, zooming or the like can be effected without moving a lens or the like and the whole optical apparatus can be arranged in a lightweight structure. The user wears a power transmitting unit 303 by hanging it from his/her neck, for example. The power transmitting unit 303 may be put in a clothes pocket or the like. The power transmitting unit 303 may be placed somewhere around the user. In the power transmitting unit 303, a transmitting circuit 305 is driven by a power supply 304 to send an electromagnetic wave from a transmitting antenna 306 toward variable-focus eyeglasses 302. The variable-focus eyeglasses 302 have a receiving antenna 307 provided on eyeglass frames 308 to receive the electromagnetic wave sent from the power transmitting unit 303. The received electromagnetic wave is, for example, boosted in voltage and rectified to drive the variable-focus lenses.

Abstract: Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

Abstract: The two channel stereo display system with micro electromechanical systems (MEMS, e.g. DMDs from Texas Instruments) simultaneously generates a right and a left image in two discrete modulation channels, which differ by the polarization of their light beams. More specifically, the invention relates to the chirality (handedness) of MEMS and uncovers solutions for some of the geometric problems associated with this handedness in stereoscopic systems. Unpolarized light is split by a first PBS (5) and directed via two TIRs (3,4) onto two MEMSs (1,2) for spatial modulation. In some embodiments, mirror symmetric, compact light paths and complete superposition of the two subimages with a second PBS (6) are realized with two different MEMSs (1) and (2) which are a pair of stereo isomers. Furthermore we uncover solutions with two identical MEMSs.

Abstract: A compact and efficient optical illumination system featuring planar multi-layered LED light source arrays concentrating their polarized or un-polarized output within a limited angular range. The optical system manipulates light emitted by a planar light emitters such as electrically-interconnected LED chips. Each light emitting region in the array is surrounded by reflecting sidewalls whose output is processed by elevated prismatic films, polarization converting films, or both. The optical interaction between light emitters, reflecting sidewalls, and the elevated prismatic films create overlapping virtual images between emitting regions that contribute to the greater optical uniformity. Practical illumination applications of such uniform light source arrays include compact LCD or DMD video image projectors, as well as general lighting, automotive lighting, and LCD backlighting.

Abstract: A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action forces to the movable portion to rotationally displace the movable portion in the second direction, which is different from the first direction, and the movable portion reaches a final displacement position. An elastic force value of the elastic supporting portion and the transition time have such a relationship that when the elastic force value of the elastic supporting portion is equal to a certain value, the transition time takes a local maximum value. The elastic force value of the elastic supporting portion is equal to or less than the certain value at which the transition time takes the local maximum value.

Abstract: Methods of fabricating comb drive devices utilizing one or more sacrificial etch-buffers are disclosed. An illustrative fabrication method may include the steps of etching a pattern onto a wafer substrate defining one or more comb drive elements and sacrificial etch-buffers, liberating and removing one or more sacrificial etch-buffers prior to wafer bonding, bonding the etched wafer substrate to an underlying support substrate, and etching away the wafer substrate. In some embodiments, the sacrificial etch-buffers are removed after bonding the wafer to the support substrate. The sacrificial etch-buffers can be provided at one or more selective regions to provide greater uniformity in etch rate during etching. A comb drive device in accordance with an illustrative embodiment can include a number of interdigitated comb fingers each having a more uniform profile along their length and/or at their ends, producing less harmonic distortion during operation.

Abstract: An adaptive optics system is provided. The system includes a light source, a pair of deformable mirrors and a detection module. The light source is configured to provide an outgoing beam. The outgoing beam has an amplitude and a phase. The first deformable mirror is configured to reflect the outgoing beam and adjust its associated amplitude. The second deformable mirror is configured to reflect the outgoing beam reflected from the first deformable mirror and adjust its associated phase. The detection module is configured to detect an incoming beam and the reflected outgoing beam from the second deformable mirror and generate certain signals. The signals are used to control the first and second deformable mirrors such that the amplitude of the outgoing beam is the same as that of the incoming beam and the phase of the outgoing beam is opposite that of the incoming beam.

Abstract: A laser projector display module for a handheld device may include an electronics module, a miniaturized light source module electrically connected with the electronics module, a scanner module electrically connected with the electronics module, and an optical assembly configured to direct light from the light source onto the scanner module. The scanner module and the light source module may abut the electronics module.

Abstract: Improved apparatus and methods for spatial light modulation are disclosed which utilize optical cavities having both front and rear reflective surfaces. Light-transmissive regions are formed in the front reflective surface for spatially modulating light.

Abstract: An image display device is disclosed that has a simplified structure and is able to display a high quality image of high resolution at low cost. The image display device includes a light separation unit configured to extract a light beam having a predetermined wavelength band from light emitted from a light source; a light valve that controls a light beam incident thereon to form a plurality of sub frames of a target image; and a light path shift unit operable to shift a light path of an output light beam from the light valve having the predetermined wavelength band according to a frame period of the target image to locate one or more sub frame of the target image at different positions from other sub frames of the target image formed by the light valve.

Abstract: A display system includes a transparent tapered plate comprising a first face, a second face, and a third face. The first face is substantially smaller than the second face and the third face. The display system also includes a row of tiltable mirror plates each comprising a reflective surface. Each of the mirror plates is configured to tilt to an “on” position to reflect incident light in an “on” direction or to tilt to an “off” position to reflect incident light in an “off” direction. An optical scanning system is configured to control the direction of the light reflected by the mirror plates in the “on” direction. The row of the tiltable mirror plates, optical scanning system and the tapered plate are configured to allow the light reflected by the row of mirror plates in the “on” direction to enter the tapered plate at the first face, be reflected by the second face, and produce a line of image pixels on the third face.

Abstract: Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.

Abstract: The microscope (10) includes such main constructional parts as a light source assembly (12); and an optical system (16) configured according to the invention, and in the present example of microscope (generally imaging) system configuration includes also a detection unit (14) (shown in the figure in 5 dashed lines). The detection unit (14) may be configured to define an array of image pixels (e.g. CCD), may be configured for intensified or not intensified light detection, as well as for gated or not-gated light detection. It should be understood that the light source, as well as the detector, may or may not be accommodated in the same housing (15) enclosing the optical path of an input pulse of an initial profile, and system (16). For example, the light source and/or detector may be accommodated outside the housing (15) and light may be guided towards and/or away from a sample S via light guiding means (either in free space or in optical fibers).

Abstract: An apparatus is disclosed for projecting patterned electromagnetic waves onto an object. This apparatus includes: an electromagnetic-wave source; a modulating element allowing at least part of an electromagnetic wave incoming from the source to be modulated; and a selector for allowing a selected one of angular components of an electromagnetic wave outgoing from the modulating element, to pass through the selector. The modulating element is shaped to include at least one pair of two portions having different surface shapes. One of the two portions allows one of the angular components which has a radiant angle characteristic that achieves a predetermined entrance numerical aperture, to go out as a component which will be selected by the selector. The other allows one of the angular components which has a radiant angle characteristic that does not achieve the entrance numerical aperture, to go out as a component which will not be selected by the selector.

Abstract: A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output.

Abstract: “Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The elements are made by forming a sandwich of two layers and a sacrificial layer between them and removing the sacrificial layer.

Abstract: An illumination system includes a backlight housing, a plurality of light valves coupled to the backlight housing, and a plurality of light sources arranged in the backlight housing and optically coupled to the light valves. The illumination system may further include a light-scattering substrate optically coupled between the plurality of light sources and the light valves, and a plurality of light modulating dots patterned on the substrate to modulate transmitted intensity of light from the plurality of light sources to achieve increased luminance uniformity by decreasing banding caused by the separated light sources. The light modulating dots may include comprise reflective dots, transmissive dots, absorptive dots, or a combination thereof.

Abstract: An image display system includes an improved hinge for a micro-mirror device composed of a conductive doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.

Abstract: An image display device including a plurality of laser light sources arranged to produce angularly offset beams of light, and scanning optics configured to raster scan the angularly offset beams of light simultaneously across separate parallel lines of pixels of a display surface to form an image, wherein each beam of light scans substantially the entire display surface.

Abstract: The invention includes an apparatus for modulating an optical signal. The apparatus includes a spatial dispersion mechanism and a modulating mechanism. The spatial dispersion mechanism spatially disperses the optical signal. The spatially dispersed optical signal has a plurality of frequency components where each frequency component has an associated beam size. The modulating mechanism includes an array of modulating components where each modulating component has a pitch. The pitch of each modulating component is substantially equal to or less than the beam size of each frequency component.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

Abstract: There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including a plurality of electrodes fixed to the holding unit, a second fixed electrode group including a plurality of electrodes fixed to the holding unit, a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group, and a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group.

Abstract: An ornamental display device having an interferometric modulator for displaying an ornamental image. The ornamental device may have a patterned diffuser formed on a transparent substrate to provide an ornamental image. The ornamental device may also be a piece of jewelry or an article that may be worn. The image displayed may have an iridescent appearance. A controller may also be used to control images displayed on multiple ornamental device to provide coordinated images based on externals received or pre-programmed images.

Abstract: A method of tilting a micromirror includes forming a substrate, a micromirror outwardly from the substrate, and at least one electrode inwardly from the micromirror. The method further includes applying, by the at least one electrode, electrostatic forces sufficient to pivot the micromirror about a pivot point. In addition, the method includes providing the at least one electrode with a sloped outer surface. The sloped outer surface has a first end and a second end. The second end is closer to the pivot point than the first end, and the first end is closer to the substrate than the second end. The method also includes providing at least a portion of the at least one electrode with material properties that at least partially contribute to the sloped profile of the sloped outer surface.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: An image display medium comprising: a display layer; a pair of substrates that retain the display layer therebetween, with at least parts of the pair of substrates configuring a frame portion to which an electrical connection connector for electrical connection to the outside connects, and with at least one of the pair of substrates being transparent; a first scan electrode group; a second scan electrode group; a first electrical contact group; a second electrical contact group; a first connection wire group; and a second connection wire group, wherein the first electrical contact group and the second electrical contact group are disposed apart from each other a distance that is greater than the distance between two mutually adjacent contacts belonging to the first electrical contact group or the second electrical contact group along at least one of a thickness direction and a surface direction of the pair of substrates, is provided.

Abstract: A flat panel display is proposed wherein each pixel contains two membranes, covering the entire pixel area, which under the force of electrostatic attraction rotate from their original position parallel to the substrate plane into a final position normal to the substrate plane, thereby altering the optical state of the pixel. The electrostatic force is applied only to narrow conductive strips placed on the membrane sides and rotates the membranes around torsion hinges attached to the membranes through flexible and conductive belts. Two membranes per pixel, turned toward each other in their upright position, increase the viewing angle of the display. Further increase of the viewing angle is based on making both the bottom membrane surface and the pixel interior black. Another disclosed feature in the pixel design is placement of an additional pillar located in the area of the membrane hinges to both facilitate the membrane rotation under the electrostatic force and hold the membrane in the upright position.

Abstract: An optical element manufacturing method according to the present invention includes: disposing a mask on a transparent photosensitive resin; patterning said transparent resin by applying an exposure light to said transparent photosensitive resin through said mask to form a transparent layer; forming a light absorbing layer by filling a gap in the transparent layer with a black curable resin; and illuminating a mask surface of the mask with the exposure light at an angle.

Abstract: A transmission type spatial light modulatoris equipped with a minute transparent optical member for deflecting light in a direction different from an incident direction of incident light and emitting the light, a support member for supporting the minute transparent optical member at a midair position so that the light emission face can be inclined with respect to a plane perpendicular to a travel direction of incident light L1, and a driving member for obliquely displacing the minute transparent optical member by an electrical mechanical operation to vary the emission direction of light from the minute transparent optical member.

Abstract: A spatial light modulator (SLM) is disclosed that increases speed and efficiency of an SLM through the use of a perforated hinge. The hinge may take many forms, but generally includes an elongated body having holes therein along its longitudinal direction. One or more electrodes are charged with a predetermined voltage in order rotate a reflecting surface towards the electrodes through electrostatic attraction. The perforations within the hinge results in the hinge being made from less material so that it is less sensitive to hinge thickness variations that can occur during the manufacturing process. Consequently, the perforated hinge allows for more stable, uniform mirror rotation.

Abstract: Articles and methods for making capsules that include a cap of electrophoretic material suspended in a dielectric fluid are disclosed. The cap of electrophoretic material and dielectric fluid are encapsulated in a shell that forms the capsule. The cap may be moved to a viewable portion of an inner surface of the capsule shell, the cap proximate to the inner surface, when an electric field from of a pair of separated electrodes translates the cap of electrophoretic material in the capsule.

Abstract: An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.

Abstract: A line-imaging lens condenses a light beam from a light-source unit in one direction to form a line image. An optical deflecting unit deflects the light beam passing through the line-imaging lens. An imaging optical unit images the light beam deflected by the optical deflecting unit in a spot shape on a scanning surface to be scanned. An adjusting unit adjusts a position of irradiation of the light beam from the light-source unit on the optical deflecting unit.

Abstract: A spatial light modulator is disclosed that can be fabricated easily and is able to prevent degradation of a contrast ratio by suppressing a fringe effect. The spatial light modulator includes a light transmission substrate, a liquid crystal layer, a pixel array, and a phase difference generation unit provided between the light transmission substrate and the liquid crystal layer. A lens array is formed on the light transmission substrate, and the lens array has the same pitch as that of the pixel array.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A display system includes a transparent tapered plate comprising a first face, a second face, and a third face. The first face is substantially smaller than the second face and the third face. The display system also includes a row of tiltable mirror plates each comprising a reflective surface. Each of the mirror plates is configured to tilt to an “on” position to reflect incident light in an “on” direction or to tilt to an “off” position to reflect incident light in an “off” direction. An optical scanning system is configured to control the direction of the light reflected by the mirror plates in the “on” direction. The row of the tiltable mirror plates, optical scanning system and the tapered plate are configured to allow the light reflected by the row of mirror plates in the “on” direction to enter the tapered plate at the first face, be reflected by the second face, and produce a line of image pixels on the third face.

Abstract: Disclosed herein is an optical modulator module package structure. In the optical modulator module package structure, an optical modulator device and a drive integrated circuit device are flip-chip bonded to a substrate, and an opening of the substrate is blocked using a piece of glass.

Abstract: A nano-optic device comprises a plurality of subwavelength apertures in a metal film or between metal islands. The device is adapted to shape a radiation beam transmitted there through. For example, beam shaping includes at least one of beam focusing, beam bending and beam collimating.

Abstract: An optical interference display panel is disclosed that has a substrate, an optical interference reflection structure, and an opaque protection structure. The optical interference reflection structure has many color-changeable pixels and is formed on the substrate. The opaque protection structure is adhered and fixed onto the substrate with an adhesive and encloses the optical interference reflection structure between the substrate and the opaque protection structure. The opaque protection structure blocks and/or absorbs light, and light is thus not emitted outward by passing through defects in the optical interference reflection structure. Moreover, the opaque protection structure and the adhesive also prevent the optical interference reflection structure from being damaged by an external environment.

Abstract: Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

Abstract: Imaging, testing and/or analysis of subjects is facilitated with a micro-mirror-based access approach. According to an example embodiment, a micro-mirror is implemented to direct light to a live being such as a biological specimen or a living being. Light from the live being is detected and implemented for use in analyzing the live being. In certain applications, the micro-mirror is fastened to a live being, such as to a skull of a live mouse, while the live being is allowed to move in an unanesthetized state. Behavior of the live being and detected response from the live being are concurrently used to analyze the live being.

Abstract: A driving method of a spatial light modulator array having plural spatial light modulators of micro-electro-mechanical system, the plural spatial light modulators each including: a movable part supported to be capable of being elastically displaced and provided with a movable electrode; and a fixed electrode disposed to face the movable part, wherein in a case where the voltages are applied to the electrodes and the movable part is driven and displaced in a fixed electrode direction, an absolute value of an inter-electrode voltage between the movable electrode and the fixed electrode is decreased while the movable part is transitioning in a direction of the fixed electrode.

Abstract: An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.

Abstract: Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

Abstract: A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically transmissive substrate, a semiconductor substrate, and a member deflectable between a rest position and an operative position supported by one of the substrates. The deflectable member returns to an undeflected position by operation of the reset electrode.