Abstract: According to one embodiment, a semiconductor memory includes: a first member extending in a first direction perpendicular to a surface of a substrate, and including a first semiconductor layer; first and second interconnects extending in a second direction parallel to the surface of the substrate, the second interconnect neighboring the first interconnect in a third direction; a second member extending in the first direction and above the first member, the second member including a second semiconductor layer; third and a fourth interconnects extending in the second direction, the fourth interconnect neighboring the third interconnect in the third direction; and a third semiconductor layer between the first and the second members, the third semiconductor layer being continuous with the first and the second semiconductor layers.

Abstract: A volatile memory device and a self-refresh method thereof are provided. The volatile memory device includes a dynamic memory array. The self-refresh method includes transmit a self-refresh request signal when entering a power saving mode. A voltage boost signal is periodically enabled according to the self-refresh request signal. When the enabled voltage boost signal is detected, an operating voltage for driving a self-refresh operation is pulled up to a self-refresh level. When the operating voltage is pulled up to the self-refresh level, the dynamic memory array is self-refreshed. When the self-refresh operation is completed, the operating voltage is floated.

Abstract: A memory device includes a plurality of sub-word line drivers with, each sub-word line driver configured to receive a main word line signal and configured to drive a respective local word line to at least one of an active state, a soft-landing state, an off state based on the main word line signal and a phase signal. The memory device also includes a plurality of phase drivers with each phase driver configured to generate the respective phase signal. The memory device can further include a processing device configured to drive the respective local word line to the soft-landing state prior to entering the off state when transitioning from the active state to the off state so as to provide row hammer stress mitigation between adjacent local word lines corresponding to the plurality of sub-word line drivers. Each sub-word line driver includes a diode-connected transistor.

Abstract: A semiconductor memory device includes a plurality of memory cell arrays accessed through a plurality of row lines and a plurality of bit lines; a pass transistor coupled to one of the plurality of row lines and configured to transfer an operating voltage to the one of the plurality of row lines; and a plurality of wiring lines disposed in a wiring line layer over the pass transistor. The wiring line layer includes a wiring inhibition interval which overlaps a source and a drain of the pass transistor. One or more of the plurality of wiring lines is disposed outside of the wiring inhibition interval.

Abstract: A semiconductor device includes a first pattern comprising first lines at a first interval and second pattern at the first interval. The second lines are between the first lines. A third pattern is above the first and the second patterns in a first and second areas. The third pattern includes third portions spaced from each other at the first interval in the first area and fourth portions spaced from each other at the first interval in the second area. The third portions are directly above the second lines in the first area and the fourth portions are directly above the first lines in the second area. A first contact is between third portions in the first area and connected to a first line of the first pattern. A second contact is between the fourth portions in the second area and connected to a second line of the second pattern.

Abstract: Techniques for remapping portions of an array of non-volatile memory (NVM) resident on a die, in which the die is one of a plurality of NVM dice forming a memory device. A processing device partitions the NVM into a plurality of subslice elements comprising respective physical portions of non-volatile memory having proximal disturb relationships. The NVM has a first portion of the subslice elements allocated as user subslice elements and a second portion as spare subslice elements and the processing device performs an error analysis to identify a predetermined number of subslice elements having highest error rates for a memory domain on the die. For the identified subslice elements having the highest error rates, the processing device remaps user subslice elements to spare subslice elements that were not identified as having the highest error rates to remove subslice element or elements having highest error rates from a user space of the NVM.

Abstract: Methods, systems, and devices that supports dual-mode modulation in the context of memory access are described. A system may include a memory array coupled with a buffer, and a multiplexer may be coupled with the buffer, where the multiplexer may be configured to output a bit pair representative of data stored within the memory array. The multiplexer may also be coupled with a driver, where the driver may be configured to generate a symbol representative of the bit pair that is output by the multiplexer.

Abstract: SRAM structures are provided. A SRAM structure includes multiple SRAM cells arranged in multiple rows and multiple columns. A first SRAM cell is adjacent to a second SRAM cell in the same row. A third SRAM cell is adjacent to the first SRAM cell in the same column. A fourth SRAM cell is adjacent to the second SRAM in the same column. A contact plug is positioned between the first, second, third and fourth SRAM cells. A VSS line is electrically coupled to the first, second, third and fourth SRAM cells through the contact plug. The contact plug is free of the barrier layer.

Abstract: Various semiconductor fabrication methods and structures are disclosed for cost effectively fabricating a self-aligned contact. A source-drain active region is on a substrate and horizontally extends to sidewall spacers of two adjacent gate stacks on the substrate. A conductive material layer including Titanium is formed by selective deposition on the source-drain active area. An interlevel dielectric (ILD) layer is deposited over the source-drain active area and the two gate stacks. Vertical directional etching in the ILD layer forms a vertical trench contacting the conductive material layer. Selective wet etching in the vertical trench selectively etches the conductive material layer and forms a void therein. Deposition of a second conductive material in the vertical trench fills the vertical trench, including the void, and the second conductive material contacts the top surface of the source-drain active area to form a source-drain self-aligned contact.

Abstract: According to one embodiment, a memory device includes: a first chip including a first circuit, first and second terminals; a second chip including a second circuit and a third terminal; and an interface chip including first and second voltage generators. The first chip is between the second chip and the interface chip. The first terminal is connected between the first circuit and the first voltage generator. A third end of the second terminal is connected to the third terminal and a fourth end of the second terminal is connected to the second voltage generator. A fifth end of the third terminal is connected to the second circuit and a sixth end of the third terminal is connected to the second voltage generator via the second terminal. The third end overlaps with the sixth end, without overlapping with the fourth end.

Abstract: An integrated circuit device having a plurality of stacked dies is described. The integrated circuit device comprises a first die of the plurality of stacked dies having an input/output element configured to receive an input signal, the first die comprising a signal driver circuit configured to provide the input signal to each die of the plurality of stacked dies and a chip select circuit for generating a plurality of chip select signals for the plurality of stacked dies; and a second die of the plurality of stacked dies coupled to the first die, the second die having a function block configured to the receive the input signal; wherein the second die receives the input signal in response to a chip select signal of the plurality of chip select signals that corresponds to the second die. A method of implementing an integrated circuit device having a plurality of stacked dies is also described.

Abstract: A storage device, connected to a computer including a processor and first memory, and executing a program, stores data processed under the program. The computer includes a protocol processing unit that accesses data in the storage device, an accelerator that includes an arithmetic unit executing a part of a process of the program, and a second memory storing data, and executes the part of the process. The first memory receives a processing request for processing data, and causes the accelerator to execute a command to process data, corresponding to the processing request for the processing request including a process to be executed by the arithmetic unit. The accelerator requests the protocol processing unit to provide target data indicated by a command received from the program, reads data from the storage device via the protocol processing unit, and stores the data in the second memory. The arithmetic unit executes the command.

Abstract: A technique relates a resistive processing unit (RPU) array. A set of conductive column wires are configured to form cross-points at intersections between the set of conductive row wires and a set of conductive column wires. Two-terminal RPUs are hysteretic such that the two-terminal RPUs each have a conductance state defined by hysteresis, where a two-terminal RPU of the two-terminal RPUs is located at each of the cross-points.

Abstract: Apparatuses and methods for transferring data from memory on a data path are described. An example apparatus includes: one or more data terminals; a plurality of memory banks, one of the plurality of memory banks being selected responsive, at least in part, to a bank address; and a data path including a plurality of data path routes and a plurality of switching buffers on the plurality of data path routes. The plurality of switching buffers are arranged such that one or more of the plurality of switching buffers are selected responsive, at least in part, to the bank address and activates one of the plurality of data path routes.

Abstract: The present invention provides a layout of a semiconductor transistor device including a first and a second active area, a first and a second gate, and a metal line. The first active and the second active area are extended along a first direction. The first gate and the second gate are extended along a second direction and crossed the first active area, to define two transistors. The two transistors are electrically connected with each other through a conductive layer. The metal line is disposed on the conductive layer and is electrically connected the two transistors respectively.

Abstract: A memory device includes a plurality of memory cells connected to a plurality of word lines and a plurality of bit lines, each of the plurality of memory cells including a switching element and an information storage element connected to the switching element and containing a phase-change material, a decoder unit configured to determine a selected word line and a selected bit line connected to a selected memory cell to read data, among the plurality of memory cells, and a current compensation circuit configured to remove a leakage current from the selected word line, the leakage current corresponding to a sun of off-currents flowing in unselected bit lines, excluding the selected bit line, among the plurality of bit lines, from the selected word line.

Abstract: Memory controllers, devices, modules, systems and associated methods are disclosed. In one embodiment, a memory module includes a pin interface for coupling to a bus. The bus has a first width. The module includes at least one storage class memory (SCM) component and at least one DRAM component. The memory module operates in a first mode that utilizes all of the first width, and in a second mode that utilizes less than all of the first width.

Abstract: Some embodiments of the invention provide a three-dimensional (3D) circuit that is formed by stacking two or more integrated circuit (IC) dies to at least partially overlap and to share one or more interconnect layers that distribute power, clock and/or data-bus signals. The shared interconnect layers include interconnect segments that carry power, clock and/or data-bus signals. In some embodiments, the shared interconnect layers are higher level interconnect layers (e.g., the top interconnect layer of each IC die). In some embodiments, the stacked IC dies of the 3D circuit include first and second IC dies. The first die includes a first semiconductor substrate and a first set of interconnect layers defined above the first semiconductor substrate. Similarly, the second IC die includes a second semiconductor substrate and a second set of interconnect layers defined above the second semiconductor substrate.

Abstract: There is provided, for example, a write assist circuit for controlling the voltage level of a memory cell power supply line coupled to an SRAM memory cell to be written in the write operation. The write assist circuit reduces the voltage level of the memory cell power supply line to a predetermined voltage level, in response to a write assist enable signal that is enabled in the write operation. At the same time, the write assist circuit controls the reduction speed of the voltage level of the memory cell power supply line, according to the pulse width of a write assist pulse signal. The pulse width of the write assist pulse signal is defined in such a way that the greater the number of rows (or the longer the length of the memory cell power supply line), the greater the pulse width.

Abstract: System, apparatuses, and methods for performing automated reagent-based analysis are provided. Also provided are methods for automated attachment of a cap to a reaction receptacle, and automated removal of a cap from a capped reaction receptacle.

Abstract: Methods of operating semiconductor memory devices with floating body transistors, using a silicon controlled rectifier principle are provided, as are semiconductor memory devices for performing such operations.

Abstract: A binary CIM circuit enables all memory cells in a memory array to be effectively accessible simultaneously for computation using fixed pulse widths on the wordlines and equal capacitance on the bitlines. The fixed pulse widths and equal capacitance ensure that a minimum voltage drop in the bitline represents one least significant bit (LSB) so that the bitline voltage swing remains safely within the maximum allowable range. The binary CIM circuit maximizes the effective memory bandwidth of a memory array for a given maximum voltage range of bitline voltage.

Abstract: A memory system for storing and retrieving data may include a controller, a first switch, a second switch connected to the first switch via an interconnecting bus, and a plurality of memory devices. The controller may have a first serial interface. The first switch may have one or more serial interfaces and one or more memory ports. The first serial interface of the controller may be communicatively connected to a first serial interface of the one or more serial interfaces of the first switch via a first serial bus. Each of the one or more memory ports of the first switch may be communicatively connected to a subset of the plurality of memory devices via a memory bus. The first switch may transfer data between the controller and the subsets of the plurality of memory devices via the one or more memory ports.

Abstract: To increase the number of selectable chips without adding a signal line to a general purpose memory controller. A semiconductor storage device includes a memory controller, a plurality of memory chips, a selection unit which is connected to the memory controller and is connected with the plurality of memory chips to be able to select any one of the plurality of memory chips, and a switch unit which is connected to the memory controller and the selection unit. The memory controller and the selection unit are connected by a signal line for transmitting a first signal outputted from the memory controller and configured to select the memory chips. The memory controller and the switch unit are connected by a signal line for transmitting a second signal outputted from the memory controller and configured to select the memory chips.

Abstract: A memory device includes a first dynamic random access memory (DRAM) integrated circuit (IC) chip including first memory core circuitry, and first input/output (I/O) circuitry. A second DRAM IC chip is stacked vertically with the first DRAM IC chip. The second DRAM IC chip includes second memory core circuitry, and second I/O circuitry. Solely one of the first DRAM IC chip or the second DRAM IC chip includes a conductive path that electrically couples at least one of the first memory core circuitry or the second memory core circuitry to solely one of the first I/O circuitry or the second I/O circuitry, respectively.

Abstract: Some embodiments of the invention provide a three-dimensional (3D) circuit that is formed by stacking two or more integrated circuit (IC) dies to at least partially overlap and to share one or more interconnect layers that distribute power, clock and/or data-bus signals. The shared interconnect layers include interconnect segments that carry power, clock and/or data-bus signals. In some embodiments, the shared interconnect layers are higher level interconnect layers (e.g., the top interconnect layer of each IC die). In some embodiments, the stacked IC dies of the 3D circuit include first and second IC dies. The first die includes a first semiconductor substrate and a first set of interconnect layers defined above the first semiconductor substrate. Similarly, the second IC die includes a second semiconductor substrate and a second set of interconnect layers defined above the second semiconductor substrate.

Abstract: Some embodiments of the invention provide a three-dimensional (3D) circuit that is formed by stacking two or more integrated circuit (IC) dies to at least partially overlap and to share one or more interconnect layers that distribute power, clock and/or data-bus signals. The shared interconnect layers include interconnect segments that carry power, clock and/or data-bus signals. In some embodiments, the shared interconnect layers are higher level interconnect layers (e.g., the top interconnect layer of each IC die). In some embodiments, the stacked IC dies of the 3D circuit include first and second IC dies. The first die includes a first semiconductor substrate and a first set of interconnect layers defined above the first semiconductor substrate. Similarly, the second IC die includes a second semiconductor substrate and a second set of interconnect layers defined above the second semiconductor substrate.

Abstract: Some embodiments of the invention provide a three-dimensional (3D) circuit that is formed by stacking two or more integrated circuit (IC) dies to at least partially overlap and to share one or more interconnect layers that distribute power, clock and/or data-bus signals. The shared interconnect layers include interconnect segments that carry power, clock and/or data-bus signals. In some embodiments, the shared interconnect layers are higher level interconnect layers (e.g., the top interconnect layer of each IC die). In some embodiments, the stacked IC dies of the 3D circuit include first and second IC dies. The first die includes a first semiconductor substrate and a first set of interconnect layers defined above the first semiconductor substrate. Similarly, the second IC die includes a second semiconductor substrate and a second set of interconnect layers defined above the second semiconductor substrate.

Abstract: A memory device includes: a plurality of data pads; a data distribution circuit suitable for distributing data received through some data pads of the plurality of data pads to a first data bus, and distributing data received through the other data pads to a second data bus, in a first mode; a first channel region suitable for storing data obtained by copying the data of the first data bus at a predetermined ratio of 1:N where N is an integer equal to or more than 2; and a second channel region suitable for storing data obtained by copying the data of the second data bus at the predetermined ratio of 1:N.

Abstract: Some embodiments of the invention provide a three-dimensional (3D) circuit that is formed by stacking two or more integrated circuit (IC) dies to at least partially overlap and to share one or more interconnect layers that distribute power, clock and/or data-bus signals. The shared interconnect layers include interconnect segments that carry power, clock and/or data-bus signals. In some embodiments, the shared interconnect layers are higher level interconnect layers (e.g., the top interconnect layer of each IC die). In some embodiments, the stacked IC dies of the 3D circuit include first and second IC dies. The first die includes a first semiconductor substrate and a first set of interconnect layers defined above the first semiconductor substrate. Similarly, the second IC die includes a second semiconductor substrate and a second set of interconnect layers defined above the second semiconductor substrate.

Abstract: The invention relates to an integrated circuit comprising: a row of sink cells, a first driver cell, a second driver cell, an interconnect line connecting the first driver cell to the sink cells of the row; and a shunt line connecting the second driver cell to a point between ends of the interconnect line, wherein a segment of the interconnect line between the point and the first driver cell is bigger than 60% of a length the interconnect line and less than 80% of the length of the interconnect line.

Abstract: According to one embodiment, a semiconductor memory device includes a memory cell having a variable resistance unit, a first selector, and a second selector. The first and second selectors are connected in series with the variable resistance unit and have different switching characteristics from one another. A control unit is provided to write data to the memory cell by setting a resistance state of the variable resistance unit and to read data from the memory cell according to the resistance state of the variable resistance unit.

Abstract: Techniques and mechanisms for providing data to be used in an in-memory computation at a memory device. In an embodiment a memory device comprises a first memory array and circuitry, coupled to the first memory array, to perform a data computation based on data stored at the first memory array. Prior to the computation, the first memory array receives the data from a second memory array of the memory device. The second memory array extends horizontally in parallel with, but is offset vertically from, the first memory array. In another embodiment, a single integrated circuit die includes both the first memory array and the second memory array.

Abstract: A memory device includes a first volatile memory chip that includes a first volatile memory cell array storing first data and that receives or outputs the first data at a first bandwidth, and a second volatile memory chip that includes a second volatile memory cell array storing second data and that receives or outputs the second data at a second bandwidth different from the first bandwidth.

Abstract: Reducing the runtime overhead needed for testing of an integrated circuit design. A determination may be made of parameters that clock routing and data routing in an integrated circuit are dependent upon. A determination is made of whether the parameters are suitable for compaction, such as by determining whether the parameters are utilized in only one of clock routing or data routing. The parameters suitable for compaction are defined or redefined into at least one proxy compacted parameter. A timing analysis for the integrated circuit is performed using the proxy compacted parameter instead of performing the timing analysis using the parameters suitable for compaction.

Abstract: A method is described. The method includes configuring first register space to establish ODT values of a data strobe signal trace of a DDR data bus. The method also includes configuring second register space to establish ODT values of a data signal trace of the DDR data bus. The ODT values for the data strobe signal trace are different than the ODT values for the data signal trace. The ODT values for the data strobe signal do not change when consecutive write operations of the DDR bus write to different ranks of a same DIMM.

Abstract: A memory network includes a first local memory group, a second local memory group, and multiple first channels. The first local memory group includes multiple first memory devices that are not directly connected to each other. The second local memory group includes multiple second memory devices that are not directly connected to each other. The first channels are configured to connect the first memory devices to the second memory devices in a one to one relationship.

Abstract: The invention relates to an integrated circuit comprising: a row of sink cells, a first driver cell, a second driver cell, an interconnect line connecting the first driver cell to the sink cells of the row; and a shunt line connecting the second driver cell to a point between ends of the interconnect line, wherein a segment of the interconnect line between the point and the first driver cell is bigger than 60% of a length the interconnect line and less than 80% of the length of the interconnect line.

Abstract: A non-volatile memory (NVM) includes at least one memory unit region, each including a memory array and having first memory cells in the odd columns and second memory cells in the even columns. Corresponding to each memory unit region, the NVM includes a multiplexer including first bit line decoders and second bit line decoders, a comparator circuit including a first input terminal and a second input terminal, and a bias generation circuit generating a bias voltage. When reading a data information from a first memory cell, a first output voltage of the first memory cell is sent to the first input terminal and the bias voltage is sent to the second input terminal. When reading a data information from a second memory cell, a second output voltage of the second memory cell is sent to the second input terminal and the bias voltage is sent to the first input terminal.

Abstract: A memory module includes data memories and at least one parity memory. Each of the data memories includes a first memory cell array with a first memory region to store data set corresponding to a plurality of burst lengths and a second memory region to store first parity bits to perform error detection/correction associated with the data set. The at least one parity memory includes a second memory cell array with a first parity region to store parity bits associated with user data set corresponding to all of the data set stored in each of the data memories and a second parity region to store second parity bits for error detection/correction associated with the parity bits.

Abstract: The present disclosure includes apparatuses and methods for compute in data path. An example apparatus includes an array of memory cells. Sensing circuitry is coupled to the array of memory cells. A shared input/output (I/O) line provides a data path associated with the array. The shared I/O line couples the sensing circuitry to a compute component in the data path of the shared I/O line.

Abstract: A contact level silicon oxide layer and a silicon nitride layer is formed over a semiconductor device on a semiconductor substrate. A contact via cavity extending to the semiconductor device is formed. A lower contact via structure portion is formed and recessed between top and bottom surface of the silicon nitride layer. An upper contact via structure portion including a hydrogen diffusion barrier material is formed in a remaining volume of the contact via cavity to provide a contact via structure. A three-dimensional memory array is formed over the silicon nitride layer. Metal interconnect structures are formed to provide electrical connection between the contact via structure and a node of the three-dimensional memory array. The hydrogen diffusion barrier material and the silicon nitride layer block downward diffusion of hydrogen.

Abstract: Reducing the runtime overhead needed for testing of an integrated circuit design. A determination may be made of parameters that clock routing and data routing in an integrated circuit are dependent upon. A determination is made of whether the parameters are suitable for compaction, such as by determining whether the parameters are utilized in only one of clock routing or data routing. The parameters suitable for compaction are defined or redefined into at least one proxy compacted parameter. A timing analysis for the integrated circuit is performed using the proxy compacted parameter instead of performing the timing analysis using the parameters suitable for compaction.

Abstract: This disclosure generally relates to repeaters, and, in particular, repeaters for open-drain systems. In one embodiment, an apparatus comprises a first port, a second port, a current detector, a transistor, and a control logic circuit. A current detector input of the current detector is coupled to the first port. A transistor channel electrode of the transistor is coupled to the second port. A control logic circuit input of the control logic circuit is coupled to the current detector output, and a control logic circuit output of the control logic circuit is coupled to a transistor control electrode of the transistor.

Abstract: According to an embodiment, a semiconductor device includes a substrate, a connector, a volatile semiconductor memory element, multiple nonvolatile semiconductor memory elements, and a controller. A wiring pattern includes a signal line that is formed between the connector and the controller and that connects the connector to the controller. On the opposite side of the controller to the signal line, the multiple nonvolatile semiconductor memory elements are aligned along the longitudinal direction of the substrate.

Abstract: A memory module is operatable in a memory system with a memory controller. The memory module comprises a module control device to receive command signals from the memory controller and to output module C/A signals and data buffer control signals. The module C/A signals are provided to memory devices organized in groups, each group including at least one memory device, while the data buffer control signals are provided to a plurality of buffer circuits to control data paths in the buffer circuits, a respective buffer circuit corresponding to a respective group of memory devices. The plurality of buffer circuits are distributed across a surface of the memory module such that each data buffer control signal arrives at the plurality of buffer circuits at different points in time. The plurality of buffer circuits include clock regeneration circuits to regenerate a clock signal received from the module control device and to provide regenerated clock signals to respective groups of memory devices.

Abstract: A semiconductor device includes first and second select lines, first and second vertical pillars, and first and second subsidiary lines. The select lines are spaced apart and include a first separating insulation layer therebetween. Each of the first and second vertical pillars is connected to a corresponding one of the first or second select lines. The first vertical pillars are closer to the first separating insulation layer. The second vertical pillars arranged in an oblique direction from the first vertical pillars. Each of the first subsidiary lines connects a pair of the first vertical pillars. Each of the second subsidiary lines connects a pair of the second vertical pillars adjacent. The first and second subsidiary lines are alternately disposed along a first direction, and ends of the first and second subsidiary lines are aligned along the first direction.

Abstract: According to one embodiment, a memory system includes a first memory, a second memory, a third memory, a data transmission controller, and a processing unit. The second memory is configured to store first management information to manage the first memory. The third memory is configured to be accessed at a speed higher than the second memory. The processing unit causes the data transmission controller to transmit second management information and third management information from the second memory to the third memory in a burst mode before a read process is performed on the first memory. The second management information and the third management information are related to the read process and are included in the first management information. The processing unit performs the read process on the first memory using the second management information and the third management information stored in the third memory.

Abstract: Reducing the runtime overhead needed for testing of an integrated circuit design. A determination may be made of parameters that clock routing and data routing in an integrated circuit are dependent upon. A determination is made of whether the parameters are suitable for compaction, such as by determining whether the parameters are utilized in only one of clock routing or data routing. The parameters suitable for compaction are defined or redefined into at least one proxy compacted parameter. A timing analysis for the integrated circuit is performed using the proxy compacted parameter instead of performing the timing analysis using the parameters suitable for compaction.

Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and a drive circuit. The stacked body is provided on the substrate. The stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films. A through-hole is made in the stacked body to align in a stacking direction. The semiconductor pillar is buried in an interior of the through-hole. The charge storage film is provided between the electrode film and the semiconductor pillar. The drive circuit supplies a potential to the electrode film. The diameter of the through-hole differs by a position in the stacking direction. The drive circuit supplies a potential to reduce a potential difference with the semiconductor pillar as a diameter of the through-hole piercing the electrode film decreases.