Abstract: A user terminal apparatus is disclosed. A user terminal apparatus according to various exemplary embodiments includes a communication unit which communicates with an external apparatus, an image sensor unit which photographs an image being displayed on the display apparatus at a photographing speed above a frame rate of the display apparatus, and a control unit which controls to identify pattern information based on a placement of a pattern frame included in the image photographed by the image sensor unit, and to receive data related to the display apparatus from the external apparatus based on the identified pattern information.

Abstract: The present invention provides a defect inspection method and device for a display panel.

Abstract: An inspection method and inspection apparatus comprising, acquiring an optical image of a pattern formed in a sample, generating a reference image corresponding to the optical image, comparing the optical image and the reference image using a die-to-database method to detect a defect in the optical image and storing information on the defect; regenerating a reference image by reflecting a dimension distribution of a pattern in the surface of the sample on the reference image, and re-comparing an optical image in which a defect is detected by the comparison using the die-to-database method and the regenerated reference image which corresponds to the optical image using the die-to-database method to detect the defect in the optical image in which the defect has been detected, storing information on the defect when the defect is redetected, and determining that the optical image has no defect.

Abstract: A lens-attached matter detector includes an edge extractor configured to create an edge image based on an input image, divide the edge image into a plurality of areas including a plurality of pixels, and extract an area whose edge intensity is a threshold range as an attention area, a brightness distribution extractor configured to obtain a brightness value of the attention area and a brightness value of a circumference area, a brightness change extractor configured to obtain the brightness value of the attention area and the brightness value of the circumference area for a predetermined time interval, and obtain a time series variation in the brightness value of the attention area based on the brightness value of the attention area, and an attached matter determiner configured to determine the presence or absence of attached matter based on the time series variation in the brightness value of the attention area.

Abstract: Evaluating ground surface hardness for a site involves using a mobile data collection device to automatically drop an object including an accelerometer onto a ground surface at sample locations spaced at regular intervals within the site. The acceleration of the object is detected with the accelerometer as the object impacts the ground surface at the sample locations. A value is generated representative of ground surface hardness for each of the sample locations. Evaluation using a handheld hardness measurement device is also disclosed.

Abstract: Disclosed are an integrated drug management system and a method of providing prescription drugs by using the same. The integrated drug management system includes a drug information managing module to manage a basic information and a pattern information of an individual drug by performing an image processing scheme for the individual drug, an integrated management control module to control a drug management work and a prescription drug management work, a prescription drug making module to provide the drug by preparing a drug according to a prescription information, a prescription drug inspecting module to inspect a defect state of the drug, a prescription drug reinspecting module connected to the integrated management control module to reinspect the defect state of the drug which has been determined as a defective drug, and a drug pack providing module to provide a drug pack to each ward or each patient.

Abstract: An autofocus (AF) system and method is provided that maps the topography of a substrate such as a semiconductor wafer, in a manner that corrects for Goos Hanchen (GH) effect. In addition, a new and useful detector is provided that is particularly useful in an AF system and method. The detector preferably has both color and polarization filtering integrally associated with the detector, so that polarization and color filtering is provided at the detector, on a pixel by pixel basis.

Abstract: In order to provide a pattern dimension measurement method with a small measured error and excellent reproducibility even though defocus occurs and a charged particle beam microscope used in the same, in a method for applying a charged particle beam to a specimen formed with a pattern to measure a pattern dimension from a signal intensity distribution of signal charged particles from the specimen, edge index positions (X1) and (X2) on the right and left of the maximum point of signal intensity corresponding to a pattern edge are calculated by a threshold method, and a pattern edge position (Xe) is found from a mean value between the positions. Thus, it is possible to reduce the influence of defocus on the pattern edge position (Xe).

Abstract: A defect detection method comprising, irradiating light from a light source in an optical system and obtaining a plurality of optical images of a sample having a repeated pattern of a size smaller than a resolution of the optical system; while changing the conditions of the optical system, performing correction processing for the optical images with the use of at least one of a noise filter and a convolution filter; shifting a position of the other optical images based on any of the plurality of optical images, obtaining a relationship between shift amounts of the other optical images and a change of correlation of a gray scale value between the plurality of optical images, and performing positional alignment of the optical images based on the shift amount obtained when the correlation is highest, performing defect detection of the sample with the use of the optical images after the positional alignment.

Abstract: The present disclosure is directed to a system for, and method operating latency measurement including an event generation device that generates an initial event used to measure system latency. A component test system receives the event and in response outputs a test component output signal and a zero-latency indicator. An electronics system including a multifunction display unit receives the test component output signal and displays a visible element on the multifunction display unit. A camera generates a series of recorded images, where each recorded image contains an image of the zero-latency indicator and an image of the visible element. A processor then determines the system latency by determining a time difference in the series of recorded images between a representation of an occurrence of the event in the image of the zero-latency indicator and a representation of the occurrence of the event in the image of the visible element.

Abstract: Methods and systems for detecting defects on a wafer are provided. One method includes creating a searchable database for a design for a wafer, which includes assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the searchable database. Different portions of the design having substantially the same patterns are assigned the same values in the searchable database. The searchable database is configured such that searching of the database can be synchronized with generation of output for the wafer by one or more detectors of a wafer inspection system. Therefore, as the wafer is being scanned, design information for the output can be determined as fast as the output is generated, which enables multiple, desirable design based inspection capabilities.

Abstract: Disclosed are systems and methods for configuring a vision detector, wherein a training image is obtained from a production line operating in continuous motion so as to provide conditions substantially identical to those that will apply during actual manufacturing and inspection of objects. A training image can be obtained without any need for a trigger signal, whether or not the vision detector might use such a signal for inspecting the objects. Further disclosed are systems and methods for testing a vision detector by selecting, storing, and displaying a limited number of images from a production run, where those images correspond to objects likely to represent incorrect decisions.

Abstract: Provided is a method of producing prepreg including: inspecting, with an optical device, in a resin sheet made of a release paper and a resin film which is formed by coating the release paper with a resin to be impregnated into a carbon fiber bundle, the surface of the resin film, detecting a defect in the surface of the resin film which would be the cause of a defect in the prepreg to be produced, and judging the type of the detected defect; or inspecting, with an optical device, the surface of the prepreg after the release paper is separated from the prepreg sheet which is formed by impregnating a resin forming the resin film into the carbon fiber bundle, detecting defects in the surface of the prepreg, and judging the type of the detected defect.

Abstract: A light-projecting unit irradiates a scale with non-parallel light. The non-parallel light having passed through a plurality of slits on the scale is received by a light-receiving unit, and a light reception signal indicating a light-receiving amount distribution is outputted. Based on the light reception signal, a plurality of positions where a light-receiving amount is at maximum or minimum in the light-receiving amount distribution on the light-receiving unit are detected as a plurality of peak positions. Based on correction information and the detected plurality of peak positions, a distance between a reference position and a position of at least one slit corresponding to at least one detected peak position is calculated. The correction information shows a relation of a distance between a plurality of peak positions and a distance between a plurality of slits on the scale which respectively correspond to the plurality of peak positions.

Abstract: A method to ensure the dependable representation of a safety-related information includes: entry of at least one input parameter into a processor, computerized processing of the input parameter transforming it into a sequence of image data that represents the input parameter, transmittance of the sequence of image data on to a display and representing the sequence of image data on the display. It is proposed to fead the sequence of image data and to a test unit and to perform a safety test in the form of computerized generation of a test code for the sequence of image data, comparing the test code with several existing reference codes, assigning the identified reference code to a corresponding possible value of the input parameter and comparing it with the value of the input parameter to generate either a positive or negative test result to initiate a safety-focused reaction.

Abstract: A testing system for examining the coating and open cooling-air holes of turbine blades includes a positioning device for an infrared camera with two degrees of freedom, a rotating-pivoting device for positioning the turbine blade, and a rotatable air duct arranged on the rotating-pivoting device. The rotatable air duct is configured for introducing into the turbine blade air at a temperature higher or lower in comparison with the turbine blade.

Abstract: A method for deformable expression detection is disclosed. For each pixel in a preprocessed image, a sign of a first directional gradient component and a sign of a second directional gradient component are combined to produce a combined sign. Each combined sign is coded into a coded value. An expression in an input image is detected based on the coded values.

Abstract: Inputs of a plurality of images constituting a group of images of items regarded as non-defective items are previously accepted and stored, and a defect threshold for detecting a defective portion of an inspection object is set based on the plurality of stored images. A defect amount to be compared with a determination threshold for making a non-defective/defective determination on the inspection object is calculated with respect to each of the plurality of stored images based on the set defective threshold, and whether or not each of the calculated defect amounts is an outlier is tested by use of at least one of a parametric technique and a non-parametric technique. Outlier information for specifying an image whose defect amount has been tested to be the outlier is displayed and outputted.

Abstract: A lens module testing method includes the following steps: providing a lens module having a lens and a barrel; determining whether a modulation transfer function value of the lens is in a predetermined range; if not, separating the lens and the barrel, and forming a first coating layer and a second coating layer on the lens to obtain a coated lens having a number of dots; capturing a first image of the coated lens; placing the coated lens in the barrel to obtain the lens module, and capturing a second image of the coated lens; randomly choosing one dot from the dots, and determining an actual moving distance of the chosen dot using a 3D-Digital Image Correlation according to the first image and the second image; adjusting a size of the lens according to the actual moving distance; and displaying the adjusted size of the lens to a user.

Abstract: In a defective-workpiece discharging device, a defective workpiece is discharged to a discharge path from a conveyance path that conveys a plurality of workpieces related to absorbent articles at a predetermined conveyance pitch. The conveyance path has a first path and a second path downstream of the first path. A sorting mechanism between the first and second paths sorts workpieces into either the second path or the discharge path. A defect detection sensor detects a defect and outputs a defect detection signal. A passage detection sensor detects passage of the workpieces at a predetermined position on the first path and outputs a passage detection signal. A controller controls the sorting mechanism based on the defect and passage detection signals. An end of the first path on the sorting mechanism side and the predetermined position are separated by a distance greater than or equal to the conveyance pitch.

Abstract: An embodiment in accordance with the present invention provides a system and method for image analysis and processing. The present invention provides a software package for processing AFM data. More particularly it can be used for characterizing carbon nanotubes found within AFM images, though it does offer editing features that are general in nature. Its features are split amongst five menus, one button, and four data panels. The software package can be used to determine physical characteristics related to the imaged subject, such as, for instance length data for imaged carbon nanotubes.

Abstract: Integrating a plurality of security imaging units for an airport security checkpoint into networked common workstations, including: scanning items with a first security imaging unit at a primary inspection area, wherein the first security imaging unit is coupled to a first networked common workstation; displaying the scanned items as a displayed image on a display of the first networked common workstation located at the primary inspection area; re-scanning the items with a second security imaging unit coupled to the first networked common workstation when a possible concealment is observed, wherein the first networked common workstation includes a conversion unit which converts outputs of the first and second security imaging units into a common format for the displayed image; routing the displayed image to a second networked common workstation located at a secondary inspection area when the possible concealment is observed, wherein the secondary inspection area is remote from the primary inspection area.

Abstract: This disclosure describes an optical method of detecting the presence of pressure-sensitive labels, using the reflective properties of their edges. Labels that are removably attached to a liner are moved through a light beam that is directed across their direction of motion so the light impinges on the labels at a predetermined angle of incidence. The light remains in its initial incidence and reflection plane when it reflects off all parts of the liner and labels except the labels' edges. Due to the angularity of the labels' edges, the light beam is deflected out of the plane of incidence upon reflection off the edges, thus enabling detection of the label edges by light reflected out of the plane of incidence.

Abstract: A system for authenticity verification includes: a unique product identity generation system (UPIDGS) configured for generating a unique product identity (UPID) code corresponding to a product; an anomaly generation and identification system (AGIS) connected with the UPIDGS and configured for generating an anomaly to be inserted into a standard pattern attached to the product; a database and information management system (DBIMS) connected with the UPIDGS and the AGIS; and a unique product identity verification system (UPIDVS) connected with the DBIMS and configured for receiving information from the DBIMS and verifying the authenticity of the product based on the authenticity of the 2D codes and the anomaly. The 2D codes are attached to the product and captured by the DBIMS. The AGIS is configured to locate and identify the anomaly from the product. The DBIMS is configured to determine the authenticity of the 2D codes and the anomaly.

Abstract: This invention provides a system and method for automatic runtime determination of calibration and alignment of multiple cameras in a cross surface inspection arrangement. A plurality of flags each move into and out of a field of view of each of the cameras. These flags actuate at predetermined times. When actuated, the flags present a known geometric shape to the region of interest, which can be used to determine whether a camera has drifted in calibration or alignment with respect to a previously calibrated, trained image of the flags. The flags can be mounted on rotary actuators that are placed at predetermined intervals along an illumination bar. The illumination bar can be located on a side of a moving web opposite a side facing the cameras. The illumination bar projects a light line through the translucent web that is momentarily interrupted at periodic intervals by the actuated flags. In operation, the cameras operate a runtime inspection process.

Abstract: The present disclosure provides a semiconductor lithography system. The lithography system includes a projection optics component. The projection optics component includes a curved aperture. The lithography system includes a photo mask positioned over the projection optics component. The photo mask contains a plurality of elongate semiconductor patterns. The semiconductor patterns each point in a direction substantially perpendicular to the curved aperture of the projection optics component. The present disclosure also provides a method. The method includes receiving a design layout for a semiconductor device. The design layout contains a plurality of semiconductor patterns each oriented in a given direction. The method includes transforming the design layout into a mask layout. The semiconductor patterns in the mask layout are oriented in a plurality of different directions as a function of their respective location.

Abstract: A self-contained pill dispenser is disclosed. A housing is provided and a hopper for containing a plurality of pills is supported by the housing. A transport tube receives pills from the hopper. The transport tube has a controllable aperture for facilitating or inhibiting delivery of pills to the transport tube. A microcontroller is also operatively connected to the hopper, the transport tube, and the input aperture. Optionally, a feed chute can be operatively connected between the hopper and the transport tube. The system can self-calibrate the mechanism for counting and dispensing pills by dynamically adjusting the input aperture based upon the stored information representative of the pulse width signal and the amplitude signal.

Abstract: Prior to a mark imaging process executed for the purpose of detecting a position of recognition marks for positioning the substrate and the mask, an optical axis calibration processing process of detecting a horizontal relative position between imaging optical axes, and a surface correction data creation processing process of detecting a local positional deviation of the imaging optical axes, which is caused by the travel of the imaging unit, are executed. Before starting production, a production pre-start precision evaluation process for evaluating a substrate positioning precision is executed by using a verification substrate and a verification mask, and after starting the production, a production post-start precision evaluation process for evaluating a substrate positioning precision after starting the production is executed by using a commercial production substrate and a commercial production mask.

Abstract: A platelike workpiece having an alignment mark formed on the front side thereof and adapted to be recognized by an imaging unit included in an alignment apparatus for performing alignment. The platelike workpiece includes a plurality of direction indicating marks formed at given intervals so as to surround the alignment mark. Each of the direction indicating marks is pointed toward the alignment mark. The space of the direction indicating marks is set so that at least two of the plural direction indicating marks fall in the visual field of the imaging unit in viewing the platelike workpiece from the imaging unit.

Abstract: A method for vision machine inspection comprises providing depth information of a target acquired by an image capturing system, determining real-time three-dimensional information of a target object in a predetermined inspecting area based on depth information of at least one real-time image of the target. The method further comprises projecting color pixel information of a real-time color image of the target object to a three-dimensional virtual model based on the real-time three-dimensional information. The real-time color image may be acquired by a color camera system. The method further comprises generating a color three-dimensional virtual model. The color three-dimensional virtual model may comprise the color pixel information.

Abstract: An optical method of inspecting containers comprises taking an image of each container and determining a search zone in each image of the container, a visible pattern appearing in the search zone. A digital mask is prepared for a treatment zone of the images including the visible pattern and at least each pixel of the treatment zone of the images is compared with a digital mask. A visible pattern is selected belonging to the container and the position and the orientation of the selected visible pattern in said search zone is determined. A geometrical transformation is applied to the digital mask or to the treatment zone to place the mask and the treatment zone in a position in which they coincide. Image treatment is applied to each pixel of the treatment zone, which treatment depends on the intensity value of the coincident pixel of the digital mask.

Abstract: Aspects of the invention provide a solution for analyzing an object, such as a part of a turbo machine. A planar surface is generated using a curved reformat function based on a surface of a three-dimensional (3D) image of an object. A peel of the 3D image that is adjacent to the surface is determined. Based on the peel, a second planar surface is generated. These two, and/or other similarly generated planar surfaces can be analyzed to determine characteristics of the original object.

Abstract: A system, that includes a hybrid sensor that comprises: a monochromatic portion that is arranged to obtain a monochromatic image of a first area of an object; a multiple-color portion that is arranged to obtain a multi-colored image of a second area of the object; wherein the monochromatic portion comprises monochromatic sensing elements that sense radiation of a same frequency band; wherein the multiple-color portion comprises color sensing elements of different types, wherein different types of color sensing elements are associated with different frequency bands.

Abstract: A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.

Abstract: Systems and methods for entering data acquired from a non-destructive testing (NDT) system may include obtaining information related to an inspection using a non-destructive testing (NDT) inspection device. After obtaining the information, the method may include generating an inspection template, a report, metadata, or any combination thereof based on the information related to the inspection.

Abstract: A composite repair system and method for assisting in the repair of a cured composite part in which a damaged portion has been cut out and removed, exposing a plurality of composite plies and their cut edges, which are then taper sanded to expose a plurality of taper-sanded surfaces and their corresponding ply boundaries. The ply boundaries may be traced by a user with a marking device. The composite repair system may comprise an image capturing device to obtain an image of the traced ply boundaries and a computing device for processing creating a map of the traced ply boundaries based on the image. The map may be used to manufacture filler plies having peripheral edges shaped to correspond with the ply boundaries for replacing the damaged portion of the composite part.

Abstract: Provided is a tire defect detection method capable of accurately detecting a thinly extending convex defect of a tire surface. Prior to the start of Step S1, two-dimensional images including a slit light image are successively obtained in advance. In Step S1, a slit light image is extracted from data of a plurality of shot two-dimensional images. In Step S2, an eccentricity component which is deviation resulting from eccentricity is eliminated from the extracted slit light image. In Step S3, a feature quantity is calculated based on the light image from which the eccentricity component is eliminated, and in Step S4, a thinly extending convex defect is detected based on the calculated feature quantity.

Abstract: A system and method of generating and comparing a fingerprint for an integrated circuit is provided. A sensor module captures electromagnetic emissions from the integrated circuit. A feature extraction module extracts discriminating features from the captured electromagnetic emissions. A classifier training module generates a plurality of authentication fingerprints of the integrated circuit from the extracted discriminating features creating a reference fingerprint template for the integrated circuit. The reference template for the integrated circuit is stored in a database. For authentication, the reference fingerprint template from the database is compared to the generated authentication fingerprint.

Abstract: A method of providing a unique identifier for a manufactured part includes defining a boundary area on at least one surface of the manufactured part, recording surface properties within a portion of the boundary area, interpreting the recorded surface properties with a pattern recognition algorithm to create the unique identifier, and storing the unique identifier in a database.

Abstract: The present invention relates to a method and system for monitoring and controlling a glass container forming process. The radiation emitted by each hot glass container is measured with measurement unit immediately after the forming machine. The described method normalizes the measurement from glass container to glass container and thereby removes the effects of overall temperature variations between glass containers, changing ambient conditions, and other variations affecting the measurements, which provides a unique quality reference for each glass container. By reviewing this reference for each produced glass container, the quality of the produced containers can be improved.

Abstract: A method of inspecting a wafer includes performing a fabricating process on a wafer, irradiating broadband light on the wafer, such that the light is reflected from the wafer, generating a spectral cube by using the light reflected from the wafer, extracting a spectrum of a desired wafer inspection region from the spectral cube, and inspecting the desired wafer inspection region by analyzing the extracted spectrum.

Abstract: Disclosed is a method for manufacturing a conductive film in which a mesh pattern comprising a wire material is provided on a base material. Also disclosed are a conductive film and a recording medium. Image data representing a mesh pattern is created on the basis of a plurality of selected positions. On the basis of said image data, an evaluation value which quantifies noise characteristics of the mesh pattern is computed. On the basis of the computed evaluation value and prescribed evaluation conditions, one image datum is chosen as an output image datum.

Abstract: The entire surface of a photomask 101 is inspected after data and parameters of the lithography simulator are set in the operation setting screen of a control computer 110 and after the inspection system 100 is calibrated. The coordinates of a portion or portions determined in the inspection to be a defect are written into an XML file. When the inspection system 100 is in the die-to-database inspection mode, the control computer 110 reads pattern data from the database, which data is used by the inspection system 100 to generate reference data, and then converts the read pattern data into OASIS format, which is highly versatile. The optical image captured by the inspection system 100 is converted into a bitmap. These data are sent to the lithography simulator, together with simulation operating conditions and the image data that was used to calibrate the inspection system 100.

Abstract: A method and apparatus for identifying a position of a surface on an aircraft. Image data for an image of the surface on the aircraft is received. The image data is processed to determine whether the position of the surface on the aircraft is a desired position. A surface position identification report comprising information identifying whether the position of the surface on the aircraft is the desired position is generated.

Abstract: In one aspect, in general, a measurement system includes a projector for illuminating a pattern on a surface of the object, at least two imaging devices for obtaining images of a portion of an object, wherein at least some of the images include representations of one or more illuminated reference markers, an instrument for identifying a predetermined feature of the object, and a computing device for determining first position information associated with the illuminated reference markers represented in the images, determining second position information associated with the instrument, and based on the first position information and the second position information, assigning a predetermined coordinate system of the object to the object.

Abstract: A computerized inspection system is described for detecting the presence of non-uniformity defects and providing output indicative of a severity of each type of non-uniformity defect. Techniques are described that increase the throughput of the inspection system. Algorithmic and hardware approaches are described to significantly decrease the average amount of time required to inspect a given quantity of material that is expected to be mostly uniform. The techniques described herein involve dynamic selection of which image features to compute by starting with a base feature set and only triggering additional feature computations as needed until the features are sufficient to compute a severity for each type of non-uniformity defect. The number of features extracted and the order in which the features are extracted is dynamically determined in real-time to reduce a cost associated with the feature extraction.

Abstract: In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.

Abstract: A method of determining relief markings on a tire's sidewall surface includes assigning, to each pixel of a three-dimensional image of the surface, a grey-level value proportional to an elevation point corresponding to the pixel, to obtain a starting image. Using linear structuring elements of successively increasing sizes and oriented circumferentially, a series of successive morphological openings is performed iteratively on the starting surface. An image value obtained after a morphological opening using a structuring element is subtracted from an image value obtained after a morphological opening using a structuring element of an immediately lower size, to obtain a succession of images flattened by differencing. A thresholding operation is performed on the images flattened by differencing, to obtain binary images. A set-theoretic union of values of each of the binary images is performed, to obtain a final binary image in which markings appear in relief.

Abstract: An image examination method includes an acquisition step of acquiring a to-be-examined object image obtained by capturing an image of a to-be-examined object, a setting reading step of reading an examination region definition information from a storage device in which the examination region definition information is previously stored, an examination region extracting step of extracting a portion constituting the examination region as an examination region image from the to-be-examined object image based on the examination region definition information, and an examination process step of examining the to-be-examined object by analyzing the examination region image. The examination region definition information is a parameter used as a constraint condition in an optimum solution search process.

Abstract: Disclosed are methods and apparatus for inspecting an extreme ultraviolet (EUV) reticle is disclosed. An inspection tool for detecting electromagnetic waveforms is used to obtain a phase defect map for the EUV reticle before a pattern is formed on the EUV reticle, and the phase defect map identifies a position of each phase defect on the EUV reticle. After the pattern is formed on the EUV reticle, a charged particle tool is used to obtain an image of each reticle portion that is proximate to each position of each phase defect as identified in the phase defect map. The phase defect map and one or images of each reticle portion that is proximate to each position of each phase defect are displayed or stored so as to facilitate analysis of whether to repair or discard the EUV reticle.