Including Fusion Of Conductor Patents (Class 438/615)
  • Patent number: 6936500
    Abstract: A description is given of a method for the lateral contacting of a semiconductor chip in which, in the case of a first semiconductor chip (11), which has an electrical contact (17) in a side face (14), a layer (27) of an adhesive material (2) is applied to an exposed contact area (17a) and a preformed particle (23) of an electrically conductive material which can be made to melt by supplying heat is applied to the layer (27). A second semiconductor chip (12) is placed against the first semiconductor chip (11) in such a way that the particle (23) adhering to the first semiconductor chip (11) touches an electrical contact (18) of the second semiconductor chip, and both the semiconductor chips (11, 12) and the particle are heated until the particle (23) fuses onto the electrical contacts (17, 18) of the first and second semiconductor chips.
    Type: Grant
    Filed: July 29, 2004
    Date of Patent: August 30, 2005
    Assignee: Infineon Technologies AG
    Inventor: Reidar Lindstedt
  • Patent number: 6936532
    Abstract: A plurality of bumps is formed on a substrate. At first, a hole having a bottom is formed in a sheet, and the hole is filled with a metallic paste. Then, the sheet is stacked and positioned on the substrate so that the hole of the sheet faces an electrode of the substrate. The substrate with the sheet is heated and pressurized so that the metallic paste is sintered and bonded to the electrode so as to form the bump. Then, the sheet is separated from the substrate having the bump, so that the bump is formed on the substrate. A part of each bump does not lack, and all of the bumps are formed surely. Therefore, the bump can be formed uniformly.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: August 30, 2005
    Assignee: Denso Corporation
    Inventor: Atusi Sakaida
  • Patent number: 6930031
    Abstract: A bumping process is disclosed. The bumping process comprises the steps of: providing a wafer having a plurality of bonding pads and a passivation layer, wherein the passivation layer exposes the bonding pads; forming an UBM layer over the wafer to cover the bonding pads; forming two or more photoresist layers over the wafer, wherein the photoresist layers have different exposure and development characteristics; forming at least one or more stair-shaped openings in the photoresist layers by a single exposure corresponding to the bonding pads; filling solder into the stair-shaped openings to form a plurality of solder bumps; removing the entire photoresist layer. The bumping process can provide bumps with higher heights, so that the connection between chips and carriers becomes more reliable.
    Type: Grant
    Filed: July 26, 2004
    Date of Patent: August 16, 2005
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventor: Min-Lung Huang
  • Patent number: 6921018
    Abstract: A multi-chip stack structure and method of fabrication are provided utilizing self-aligning electrical contact arrays. Two or more arrays of interconnection contacts are provided, with one array being a rough aligned contact array, and a second array being a high bandwidth contact array. The rough aligned contact array has larger contacts and at least a portion thereof which melts at a substantially lower temperature than the melting temperature of the contacts of the high bandwidth contact array. By positioning two integrated circuit chips in opposing relation with the arrays mechanically aligned therebetween, and applying heat to melt the contacts of the rough aligned array, the two chips will rotate to align the respective contacts of the high bandwidth contact arrays, thereby achieving improved connection reliability between the structures.
    Type: Grant
    Filed: December 4, 2003
    Date of Patent: July 26, 2005
    Assignee: International Business Machines Corporation
    Inventors: Thomas George Ference, Wayne John Howell
  • Patent number: 6921713
    Abstract: An active microelectronic element such as a semiconductor chip or wafer is bonded to an interconnect element having substantially the same coefficient of thermal expansion as the active element using small, rigid bonds, desirably made by a solid-phase bonding technique, which accommodate numerous closely-spaced interconnections. The assembly is provided with terminals movable with respect to the active element and interconnect element. The interconnect element desirably provides low-impedance conductive paths interconnecting active electronic devices within the active element.
    Type: Grant
    Filed: October 14, 2003
    Date of Patent: July 26, 2005
    Assignee: Tessera, Inc.
    Inventors: John W. Smith, Belgacem Haba
  • Patent number: 6919216
    Abstract: On a mount surface portion of a semiconductor laser device, a first bonding layer is so formed that a first region near a light-emitting area is exposed. On a mount surface portion of a sub mount is formed a second bonding layer having a melting point T2 lower than a melting point T1 of the first bonding layer. The first and second bonding layers are heated in a mutually pressed state at a temperature T lower than the melting point T1 of the first bonding layer but higher than the melting point T2 of the second bonding layer (T1>T>T2) to bond the semiconductor laser device to the sub mount. When the semiconductor laser device is bonded to the sub mount, the first region serves as the non-bonding area.
    Type: Grant
    Filed: May 7, 2004
    Date of Patent: July 19, 2005
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Satofumi Kinei
  • Patent number: 6916684
    Abstract: A process for underfilling a bumped die surface using a lamination step and compound film such that solder bumps on the die are exposed during lamination. The compound film comprises a first layer containing an underfill material and a second layer on the first layer. The underfill material and the second layer comprise polymer materials that differ from each other. The compound film is laminated to the die, preferably at the wafer level, so that the underfill material is forced between the solder bumps and fills spaces between the bumps but does not cover the bumps. In contrast, the second layer covers the solder bumps, but is then selectively removed to re-expose the solder bumps and the underfill material therebetween.
    Type: Grant
    Filed: March 18, 2003
    Date of Patent: July 12, 2005
    Assignee: Delphi Technologies, Inc.
    Inventors: Frank Stepniak, Matthew R. Walsh, Arun K. Chaudhuri, Michael J. Varnau
  • Patent number: 6916731
    Abstract: Balls are sucked onto a carrier board so as to be temporarily arranged in a ball arrangement region of the board, and then the balls are transferred and bonded onto an objective substance with their positions being adjusted. Gas blow is applied to the temporarily arranged balls or alternatively the temporarily arranged balls are sucked, so as to remove excess balls other than balls that have been exactly sucked onto the ball arrangement region. Cooperation with application of fine vibration to the carrier board makes the removal of the excess balls more efficient.
    Type: Grant
    Filed: January 12, 2001
    Date of Patent: July 12, 2005
    Assignee: Nippon Steel Corporation
    Inventors: Kenji Shimokawa, Eiji Hashino, Kohei Tatsumi
  • Patent number: 6905915
    Abstract: A method of manufacturing a semiconductor device includes mounting of a semiconductor chip on a substrate. In the mounting step, electrodes of the semiconductor chip and leads formed on the substrate are disposed to face each other. Each of the electrodes has a bump including a soldering or brazing material in at least part of a bonding section bonded to corresponding one of the leads. After providing an insulating material around the electrodes and leads, the soldering or brazing material is melted, and the electrodes are respectively bonded to the leads.
    Type: Grant
    Filed: February 6, 2003
    Date of Patent: June 14, 2005
    Assignee: Seiko Epson Corporation
    Inventor: Hideki Yuzawa
  • Patent number: 6902098
    Abstract: A device including a first solder pad and a second solder pad comprised of a post-soldering alloy composition on a substrate is provided. The alloy composition comprises two or more elements, and the post soldering alloy composition of the first solder pad has different amounts of the two or more elements than the alloy composition of the second solder pad. A method of making a solder pad comprises masking a substrate comprising at least a first solder pad and a second solder pad, wherein the mask exposes a greater area of the first solder pad so that the deposited element becomes part of an alloy composition of the first solder pad upon soldering thereby changing the melting point of the first solder pad.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: June 7, 2005
    Assignee: Shipley Company, L.L.C.
    Inventor: Mindaugas F. Dautartas
  • Patent number: 6897142
    Abstract: A method of forming a solder ball includes the steps of forming an electrode pad on a substrate, forming an insulating layer having a first opening at a position of the electrode pad, filling the first opening with solder paste that include solder and first resin, and applying a heating process to the solder paste so as to form a solder ball on the electrode pad and to form a cured resin member of the first resin across a border between the electrode pad and the substrate.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: May 24, 2005
    Assignee: Fujitsu Limited
    Inventors: Joji Fujimori, Ichiro Yamaguchi
  • Patent number: 6890844
    Abstract: Methods and apparatus for forming a plurality of uniformly sized solder balls utilize a stencil having a plurality of holes of uniform volume disposed on a substrate. Solder is disposed in the holes of the stencil on the substrate. Typically, the solder is in the form of solder paste which is distributed into the holes using a squeegee. While within the holes of the stencil on the substrate, the solder is melted to form solder balls. The stencil may then be removed to leave the solder balls on the substrate, or the solder balls may be removed while the stencil remains on the substrate.
    Type: Grant
    Filed: July 30, 2003
    Date of Patent: May 10, 2005
    Assignee: Micron Technology, Inc.
    Inventor: Warren M. Farnworth
  • Patent number: 6859303
    Abstract: The present invention is directed to a method for enhancing functionality for photonic devices each including at least one operable surface. This method includes stacking the photonic devices such that each of the operable surfaces are aligned to form a composite surface, applying a film adapted to receive a replication to the composite surface and replicating a pattern of nanostructures in the applied film. Substantially, each of the operable surfaces is replicated with a sufficient portion of the replicated pattern of nanostructures to enhance operation of the devices by performing a given function associated with the nanostructures.
    Type: Grant
    Filed: June 17, 2003
    Date of Patent: February 22, 2005
    Assignee: NanoOpto Corporation
    Inventors: Jian Wang, Hubert Kostal
  • Patent number: 6855573
    Abstract: An integrated circuit package, and manufacturing method therefor, is provided. A substrate is provided having solder openings therein and a conductive layer thereon. The conductive layer is processed to form a plurality of pads over the solder openings in the substrate. A mask is formed over the plurality of pads and openings formed in the mask over at least two pads of the plurality of pads. An integrated circuit die is bonded over the substrate using a conductive adhesive where the conductive adhesive is placed in the openings in conductive contact with at least two pads of the plurality of pads.
    Type: Grant
    Filed: September 19, 2002
    Date of Patent: February 15, 2005
    Assignee: St Assembly Test Services Ltd.
    Inventors: Jian Jun Li, Il Kwon Shim, Guruprasad Badakere
  • Patent number: 6846701
    Abstract: A method for forming a fine-pitch flip chip assembly interconnects fine pitch devices after they have been connected to a carrier substrate. A die having a plurality of conductive sections, such as solder balls, is attached to a conductive layer of the substrate. An interconnect pattern is then formed in the conductive layer to connect the conductive sections and generate electronic functionality to the assembly. By forming the interconnect pattern after the device have been connected to the carrier, the invention provides precise alignment between the devices and the interconnect pattern without actually aligning the two components during the assembly process.
    Type: Grant
    Filed: April 11, 2003
    Date of Patent: January 25, 2005
    Assignee: Saturn Electronics & Engineering, Inc.
    Inventor: Timothy Patterson
  • Patent number: 6844254
    Abstract: A semiconductor device having bonding pad electrode or electrodes of a multi-layer structure. The bonding pad electrode comprises a lower electrode layer formed on a semiconductor substrate, and a cover insulating film formed on the lower electrode layer. The cover insulating film has an opening for exposing at least a portion of the lower electrode layer. A step portion is provided at a side wall of the opening of the cover insulating film. The size of the opening at the upside portion of a step surface of the step portion is larger than the size of the opening at the downside portion of the step surface. The bonding pad electrode further comprises an upper electrode layer formed on the portion of the lower electrode layer exposed via the opening. The upper electrode layer is made of material having corrosion resistance against the substance which is corrosive to the lower electrode layer, and the upper electrode layer overlaps the step surface of the step portion.
    Type: Grant
    Filed: December 17, 2001
    Date of Patent: January 18, 2005
    Assignee: NEC Electronics Corporation
    Inventor: Michiaki Maruoka
  • Patent number: 6841874
    Abstract: A wafer-level chip-scale package includes a semiconductor die having planar top and bottom surfaces and a plurality of metal pads formed at the top surface in an area array. A first protective layer is formed on the top surface of the semiconductor die, the first protective layer having a plurality of first apertures for allowing the metal pads to be opened upward. A second protective layer is formed on a surface of the first protective layer, the second protective layer having a plurality of second apertures which are larger than and overly corresponding first apertures of the first protective layer so that regions of the metal pads and the first protective layer are exposed to the outside of the semiconductor die. Solder balls are fused to each metal pad, which are opened to the outside through the first apertures of the first protective layer and the second apertures of the second protective layer.
    Type: Grant
    Filed: November 1, 2002
    Date of Patent: January 11, 2005
    Assignee: Amkor Technology, Inc.
    Inventors: Jong Sik Paek, In Bae Park, Seong Min Seo
  • Publication number: 20040238956
    Abstract: In one embodiment, an integrated circuit package includes a die associated with an integrated circuit and a die pad. The die has a bottom surface, and the pad has a top surface opposite the bottom surface of the die. Two or more bump pad traces are each coupled to the top surface of the pad, and one or more other traces are each coupled to the top surface of the pad in a corresponding inter-bump pad region between adjacent bump pad traces. A number of solder bumps each couple the die to the pad at a corresponding bump pad trace to provide electrical connectivity between circuitry associated with the die and circuitry associated with the die pad. Each inter-bump pad region is free from any solder mask material deposited to control collapse of the die towards the pad during a reflow process for bonding the die to the pad using the bumps, a supporting structure that contacts the die during the reflow process having been used instead.
    Type: Application
    Filed: May 30, 2003
    Publication date: December 2, 2004
    Inventors: Masood Murtuza, Muthiah Venkateswaran, Satyendra S. Chauhan
  • Patent number: 6818541
    Abstract: A method for fabricating metal bonding for a semiconductor circuit component employing prescribed feed of metal ball is disclosed. The method comprises the steps of, first, placing a metal ball at the metallization site on the surface of the circuit die of the component; then, melting the metal ball on the site; and subsequently solidifying the molten metal and forming a metal bump at the site. A circuit die having formed with one or more metal bumps can then be made into a circuit component featuring stable and reliable electrical leads and suitable to be utilized as large power rating yet with reduced component size in electronic equipment.
    Type: Grant
    Filed: April 21, 2003
    Date of Patent: November 16, 2004
    Assignee: Comchip Technology Co., Ltd.
    Inventors: Cheng-Chieh Yang, Wen-Long Chen, Yao-Huang Tsai, Chih-Liang Hu, Pan-Nan Chen
  • Patent number: 6803324
    Abstract: A wiring circuit block is produced by forming a release layer on one of planarized principal surfaces of a mother substrate, forming an insulating layer on the release layer, patterning the insulating layer and forming a wiring layer on the patterned insulating layer, and separating the insulating layer and wiring layer from the release layer on the mother substrate. The circuit block has components, and deposited on the wiring layer, and is mounted on a base circuit board to provide a wiring device. Also, semiconductor chips are mounted on the circuit block, and the circuit block is mounted on a base circuit board to provide a semiconductor device.
    Type: Grant
    Filed: March 6, 2003
    Date of Patent: October 12, 2004
    Assignee: Sony Corporation
    Inventors: Tsuyoshi Ogawa, Yuji Nishitani, Akihiko Okubora
  • Publication number: 20040180526
    Abstract: A method for depositing a solder layer or solder bump on a sloped surface. The method includes etching a sloped surface on a planar semiconductor substrate, depositing a solder-wettable layer on the sloped surface, masking the wettabler layer with a coating layer to control the position of the solder deposition, and using an organic film to prevent the solder from being deposited at regions not above either the wettable layer or the coating layer. Also, a semiconductor device structure on which a solder layer or solder bump is formed exclusively on a sloped surface.
    Type: Application
    Filed: October 30, 2003
    Publication date: September 16, 2004
    Inventors: Hubert Allen Vander Plas, Frank Berauer
  • Publication number: 20040180527
    Abstract: The resist film is provided on the surface of the substrate having electrodes, and openings are provided in the resist film at positions of the electrodes on the substrate. The first metal is supplied into the openings. The first metal is then heated to melt and coagulate it. The second metal is then supplied into the openings on the first metal. The first metal and the second metal are heated to melt and coagulate them. The resist film is finally removed. By this method, excellent solder bumps can be formed on the substrate without remnants of the resist film being left on the substrate.
    Type: Application
    Filed: February 5, 2004
    Publication date: September 16, 2004
    Applicant: FUJITSU LIMITED
    Inventors: Kozo Shimizu, Seiki Sakuyama
  • Patent number: 6784086
    Abstract: A method and structure for solderably coupling an electronic module (e.g. a ceramic or plastic ball grid array module) to a circuit board. A lead-free solder ball is soldered to the module without using a joining solder to effectuate the soldering. The solder ball comprises a tin-antimony alloy that includes about 3% to about 15% antimony by weight. The solder ball is soldered to the circuit board with a lead-free joiner solder. The joiner solder comprises a tin-silver-copper alloy that includes by weight about 95.5-96.0% tin, about 3.5-4.0% silver, and about 0.5-1.0% copper. The resultant solder connection between the module and the circuit board has a fatigue life of at least about 90% of a fatigue life of a reference structure. The reference structure has a 90Pb/10Sn solder ball joined to both the module and the circuit card by a 63Sn/37Pb joiner solder.
    Type: Grant
    Filed: February 8, 2001
    Date of Patent: August 31, 2004
    Assignee: International Business Machines Corporation
    Inventors: Sudipta K. Ray, Amit K. Sarkhel
  • Patent number: 6780750
    Abstract: Disclosed is a photodiode having a p-type electrode of a mushroom shape. The p-type electrode is formed in a mushroom shape, so that the contact area faced by the spreading region of a dopant for the photodiode and the electrode can be minimized and the capacitance of the photodiode can be reduced. Further, the p-type electrode is configured to have a broader width in its upper end, thus allowing the wire bonding to be performed easily.
    Type: Grant
    Filed: September 3, 2003
    Date of Patent: August 24, 2004
    Assignee: Samsung Electronics Co. Ltd.
    Inventor: Seung-Kee Yang
  • Patent number: 6774027
    Abstract: A semiconductor device includes a semiconductor chip having a bump electrode over its main surface. The bump electrode has at least one protrusion on the top surface thereof. A lead is electrically connected to the top surface of the bump electrode, and is positioned adjacent to the protrusion.
    Type: Grant
    Filed: March 11, 2003
    Date of Patent: August 10, 2004
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Kaname Kobayashi
  • Publication number: 20040152238
    Abstract: A flip chip method of joining a chip and a substrate is described. A thermo-compression bonder is utilized to align the chip and substrate and apply a contact force to hold solder bumps on the substrate against metal bumps on the chip. The chip is rapidly heated from its non-native side by a pulse heater in the head of the bonder until the re-flow temperature of the solder bumps is reached. Proximate with reaching the re-flow temperature at the solder bumps, the contact force is released. The solder is held above its re-flow temperature for several seconds to facilitate wetting of the substrate's metal protrusions and joining. A no-clean flux that has a volatilization temperature below the melting point of the solder bumps is utilized to minimize or eliminate the need for a post interconnection de-flux operation.
    Type: Application
    Filed: January 21, 2004
    Publication date: August 5, 2004
    Inventors: Michihisa Maeda, Kenji Takahashi
  • Patent number: 6764938
    Abstract: An integrated electronic device having an electric connection between a first electrode of a semiconductor chip and a second electrode of a circuit board. One embodiment according to the present invention is a method for fabricating an integrated electronic device having an electric connection between a first electrode of a semiconductor chip and a second electrode of a circuit board, both surfaces of the first and second electrodes having an adhesive tendency to molten metal, the method comprising the steps of forming a metal bump on the first electrode, the metal bump being made of a soldering metal alloy consisting of a solid phase component and a liquid phase component at an operating temperature; and forming an electric connection between the first electrode and the second electrode by heating the soldering metal alloy so as to adhere to the surface of the second electrode.
    Type: Grant
    Filed: September 9, 1999
    Date of Patent: July 20, 2004
    Assignee: Fujitsu Limited
    Inventors: Toshiya Akamatsu, Kazuaki Karasawa, Teru Nakanishi, Kozo Shimizu
  • Patent number: 6762117
    Abstract: A redistribution metallization scheme combines solder bumps and wire bond pads in addition to existing bond pads to enhance the connectivity of a semiconductor device, especially in flip-chip applications. The fabrication method includes forming the additional bond pads during the redistribution deposition step. The metals used in the redistribution layer provide a solderable surface for solder bumping and a bondable surface for wire bonding.
    Type: Grant
    Filed: January 27, 2003
    Date of Patent: July 13, 2004
    Assignee: Atmel Corporation
    Inventors: Ken M. Lam, Julius A. Kovats
  • Patent number: 6759268
    Abstract: An object of the present invention is to make it possible to effect a reliable and compact configuration for a semiconductor device when mounting a plurality of semiconductor elements in a single package, and achieve higher integration and higher functionality more effectively. In a multi-layer wiring board 20 in which wiring patterns (conductor layers) 22, 24, and 26, and insulating layers 23, 25, and 27, are formed alternately in multiple layers on a base substrate, and electrically connections are made between the wiring patterns through via holes VH1 and VH2, semiconductor elements 30 are imbedded and mounted inside the insulating layers 23, 25, and 27, and the semiconductor elements 30 are deployed so that they are electrically connected to wiring patterns that are covered by the insulating layers, and so that they are stacked up in a direction perpendicular to the planar dimension of the multi-layer wiring board 20.
    Type: Grant
    Filed: May 31, 2002
    Date of Patent: July 6, 2004
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventor: Masatoshi Akagawa
  • Patent number: 6756680
    Abstract: An electrical structure, and associated method of fabrication, for reducing thermally induced strain in a structure that couples a first conductive body of a first substrate to a second conductive body of a second substrate (e.g., a chip to a chip carrier; a chip carrier to a circuit card). The melting point of the first conductive body exceeds the melting point of the second conductive body. The second conductive body may include eutectic lead-tin alloy, while the first conductive body may include non-eutectic lead-tin alloy. A portion of the first conductive body is coated with, or volumetrically surrounded by, a material that is nonsolderable and nonconductive. The first and second conductive bodies are coupled mechanically and electrically by surface adhesion at an uncoated portion of the first conductive body, by application of a temperature that lies between the melting points of the first and second conductive bodies.
    Type: Grant
    Filed: February 12, 2001
    Date of Patent: June 29, 2004
    Assignee: International Business Machines Corporation
    Inventors: Miguel A. Jimarez, Cynthia S. Milkovich, Mark V. Pierson
  • Patent number: 6750135
    Abstract: A chip scale package design for a flip chip integrated circuit includes a redistribution metal layer upon the upper surface of a semiconductor wafer for simultaneously forming solder bump pads as well as the metal redistribution traces that electrically couple such solder bump pads with the conductive bond pads of the underlying integrated circuit. A patterned passivation layer is applied over the redistribution metal layer. Relatively large, ductile solder balls are placed on the solder bump pads for mounting the chip scale package to a circuit board or other substrate without the need for an underfill material. The back side of the semiconductor wafer can be protected by a coating for mechanical strength during handling. A method of forming such a chip scale package at the wafer processing level is also disclosed.
    Type: Grant
    Filed: June 20, 2001
    Date of Patent: June 15, 2004
    Assignee: Flip Chip Technologies, L.L.C.
    Inventors: Peter Elenius, Harry Hollack
  • Patent number: 6734093
    Abstract: The present invention provides a bonding pad structure for integrated circuit devices which allows the active circuits to be placed under bonding pads of the device without affecting the performance of the active circuits. The bonding pad structure is composed of at least two metal layers overlying the active circuits so that the bonding pad may be subjected to thermal and mechanical stresses without damaging the underlying active circuits. The metal layer underlying the bonding pad is patterned and etched forming an array of openings in the metal that may take any shape, e.g. slots, grid, circles. The present invention enables a reduction in the chip area and eliminates the parasitic resistance due to long interconnection wires between bonding pads and active regions.
    Type: Grant
    Filed: March 17, 1999
    Date of Patent: May 11, 2004
    Assignee: Intel Corporation
    Inventors: Gregory D. Sabin, William J. Gross, Jung-Yueh Chang
  • Patent number: 6720243
    Abstract: A method of fabricating bumps is disclosed. In the present method, prior to forming solder, layer pattern, the wetting layer and the barrier layer are removed, and after a solder layer pattern is formed, only the exposed adhesion layer is removed. The method can avoide etching the solder layer pattern in the course of etching the solder layer and the barrier layer, and therefore the volume of the required solder layer pattern can be maintained. Thus, the height of the bump after the re-flow process is maintained at an appropriate range and the required bonding force between the bump and the under ball metallurgy layer pattern can be maintained so as to improve the reliability.
    Type: Grant
    Filed: January 6, 2003
    Date of Patent: April 13, 2004
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventor: Chao-Fu Weng
  • Patent number: 6720246
    Abstract: A flip chip assembly process forming an underfill encapsulant. The method includes providing a chip having an active surface and a plurality of conductive bumps arranged in array with a predetermined bump pitch thereon, providing a substrate having a surface, having a die-attaching region, having a plurality of pads with previously formed solder paste thereon, arranged in array with a predetermined pad pitch the same as the active surface, forming an encapsulant in the die-attaching region excluding the pads, using a stencil and screen printing, and attaching the chip onto the substrate resulted from one-to-one joining the conductive bumps and the pads. A tool forming an underfill encapsulant is includes a stencil having at least one printing region, including a plurality of openings, a plurality of covers arranged in array with a predetermined cover pitch, and a plurality of connecting devices, connecting every two neighboring covers, or each cover with other regions of the stencil.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: April 13, 2004
    Assignee: Silicon Integrated Systems Corp.
    Inventors: Han-Kun Hsieh, Wei-Feng Lin
  • Patent number: 6713318
    Abstract: A flip chip method of joining a chip and a substrate is described. A thermo-compression bonder is utilized to align the chip and substrate and apply a contact force to hold solder bumps on the substrate against metal bumps on the chip. The chip is rapidly heated from its non-native side by a pulse heater in the head of the bonder until the re-flow temperature of the solder bumps is reached. Proximate with reaching the re-flow temperature at the solder bumps, the contact force is released. The solder is held above its re-flow temperature for several seconds to facilitate wetting of the substrate's metal protrusions and joining. A no-clean flux that has a volatilization temperature below the melting point of the solder bumps is utilized to minimize or eliminate the need for a post interconnection de-flux operation.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: March 30, 2004
    Assignee: Intel Corporation
    Inventors: Michihisa Maeda, Kenji Takahashi
  • Publication number: 20040053488
    Abstract: A ball electrode forming method comprises steps of: preparing a semiconductor apparatus having a plurality of electrode pads; arranging a mask having an upper surface and a lower surface, an area in the lower surface being larger than an area in the upper surface, and a plurality of openings extended from the upper surface to the lower surface, on a surface of the semiconductor apparatus having the electrode pads formed thereon so that the surface and the lower surface can face each other; arranging solder balls on the electrode pads arranged in the openings from the upper surface side of the mask; and electrically connecting the solder balls to the electrode pads to form ball electrodes. Thus, regarding a method for forming a ball electrode in a semiconductor apparatus having a BGA structure, an efficient ball electrode forming method is employed to prevent omission of a ball electrode.
    Type: Application
    Filed: July 31, 2003
    Publication date: March 18, 2004
    Inventor: Yasuhito Anzai
  • Patent number: 6689680
    Abstract: In accordance with one embodiment of the present invention, a semiconductor device underbump metallurgy (414) is formed over a semiconductor bond pad (128), wherein the underbump metallurgy (414) comprises a chromium, copper, and nickel phased-region (404), and wherein the presence of nickel in the phased-region (404) inhibits conversion of tin from the solder bump and other tin sources from forming spallable Cu6Sn5 copper-tin intermetallics.
    Type: Grant
    Filed: July 14, 2001
    Date of Patent: February 10, 2004
    Assignee: Motorola, Inc.
    Inventor: Stuart E. Greer
  • Patent number: 6686269
    Abstract: Within an interlayer dielectric film laid on a semiconductor substrate, a first conducting line is formed at a position lower than a second conducting line. Further, an etching stopper film, which has an etch selectivity differing from that of the interlayer dielectric films under a certain set of etching conditions, is formed at an intermediate position between the first conducting line and the second conducting line. A contact hole to reach the upper second conducting line is formed by etching under the condition that the interlayer dielectric film has a high etch selectivity with respect to the etching stopper film. The depth of a contact hole is controlled not to reach the lower first conducting line in the event the contact hole is offset from a upper conducting line.
    Type: Grant
    Filed: January 15, 2002
    Date of Patent: February 3, 2004
    Assignee: Renesas Technology Corp.
    Inventor: Shigenori Sakamori
  • Publication number: 20040007790
    Abstract: A method for producing semiconductor or metal particles comprises the steps of: storing a semiconductor or metal melt in a crucible having a nozzle; supplying a gas comprising at least one selected from the group consisting of He, Ne, Ar, Kr and Xe into the crucible such that the pressure of the supplied gas in a space over the melt in the crucible is higher than the pressure of a gaseous phase into which the melt is dropped; dropping the melt from the nozzle into the gaseous phase by the pressure of the gas to form liquid particles; and solidifying the liquid particles in the gaseous phase to obtain semiconductor or metal particles. The crucible comprises at least one selected from the group consisting of hexagonal BN, cubic BN, Si3N4, TiB2, ZrB2, zirconia and stabilized zirconia at least near the nozzle.
    Type: Application
    Filed: April 18, 2003
    Publication date: January 15, 2004
    Inventors: Kenji Kato, Yukio Yamaguchi, Seiichi Isomae, Masaki Miyazaki
  • Patent number: 6677229
    Abstract: The method for producing a solder bump transfer sheet of the invention includes the steps of: providing a sheet having a chromium oxide layer containing substantially no iron oxide as the outermost surface; and forming a plurality of solder bumps placed in a predetermined pattern on the chromium oxide layer.
    Type: Grant
    Filed: October 17, 2001
    Date of Patent: January 13, 2004
    Assignee: Sumitomo Special Metals Co., Ltd.
    Inventor: Masaharu Yamamoto
  • Publication number: 20040005772
    Abstract: The present invention discloses a method of producing a copper foil used for a printed circuit board (PCB). In this method of producing a copper foil for a solder bump, metal surfaces are activated by plasma or primer treatment and finally are clad using a pressing means in a process of cladding a copper foil constituting a bump and a copper foil forming a circuit. Therefore, it is possible to produce a copper foil for a PCB with excellent adhesion strength without carrying out any bump forming process.
    Type: Application
    Filed: May 8, 2003
    Publication date: January 8, 2004
    Inventors: Chang-hee Choi, Sang-yum Kim, Cha-Je Cho
  • Patent number: 6673711
    Abstract: A solder ball fabricating process for forming solder balls over a wafer having an active layer is provided. A patterned solder mask layer is formed over the active surface of the wafer. The patterned solder mask layer has an opening that exposes a bonding pad on the wafer. Solder material is deposited into the opening over the bonding pad. A reflow process is conducted to form a pre-solder body. The aforementioned steps are repeated so that various solder materials are fused together to form a solder ball over the bonding pad.
    Type: Grant
    Filed: February 26, 2003
    Date of Patent: January 6, 2004
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventors: Ho-Ming Tong, Chun-Chi Lee, Jen-Kuang Fang, Min-Lung Huang, Jau-Shoung Chen, Ching-Huei Su, Chao-Fu Weng, Yung-Chi Lee, Yu-Chen Chou
  • Publication number: 20030235976
    Abstract: The invention relates to a method for producing a substrate arrangement with the process steps:
    Type: Application
    Filed: May 8, 2003
    Publication date: December 25, 2003
    Inventors: Elke Zakel, Ghassem Azdasht
  • Patent number: 6642079
    Abstract: In a process of fabricating flip chip interconnection, a UBM layer is deposited on an I/O pad of a chip. The UBM layer includes a nickel layer. On the UBM layer is formed a tin-containing solder material. The chip is mounted on a carrier substrate by alignment of the bonding pad with a contact pad of the carrier substrate. A reflow process is performed to respectively turn the tin-containing solder material to a tin-containing solder bump and form a composite intermetallic compound on the nickel layer of the UBM to prevent its spalling.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: November 4, 2003
    Assignee: National Central University
    Inventors: Cheng-Yi Liu, Shen-Jie Wang, Cheng-Heng Kao
  • Patent number: 6617687
    Abstract: An insert is provided for testing a chip-scale-packaged microelectronic device having an encapsulant-protrusion and a ball-grid-array of outwardly-projecting contacts. The insert comprises a substrate of mono-crystalline silicon. Walls of the substrate define a plurality of pockets that are configured to receive and contact the outwardly-projecting contacts of the microelectronic device. Additional walls of the substrate define a recess disposed amongst the plurality of pockets. The recess has a width greater than the widths of any of the pockets. Additionally, the recess comprises a perimeter greater than that of the encapsulant-protrusion of the chip-scale-packaged microelectronic device, and a depth operative to clear the encapsulant-protrusion when the chip-scale package is seated upon the insert.
    Type: Grant
    Filed: July 27, 2001
    Date of Patent: September 9, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, David R. Hembree
  • Patent number: 6617237
    Abstract: A lead-free solder bump fabrication process for producing a plurality of lead-free solder bumps over a wafer is provided. The lead-free solder bump fabrication process includes forming a lead-free pre-formed solder bump over each bonding pad on the wafer and then forming a patterned solder mask layer over the active surface of the wafer. The openings in the solder mask layer expose the respective lead-free pre-formed solder bumps on the wafer. Thereafter, lead-free solder material is deposited into the opening. The material composition of the lead-free solder material differs from the material composition of the lead-free pre-formed solder bump. A reflow process is conducted so that the lead-free pre-formed solder bump fuses with the lead-free solder material to form a lead-free solder bump. Finally, the solder mask layer is removed.
    Type: Grant
    Filed: February 27, 2003
    Date of Patent: September 9, 2003
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventors: Ho-Ming Tong, Chun-Chi Lee, Jen-Kuang Fang, Min-Lung Huang, Jau-Shoung Chen, Ching-Huei Su, Chao-Fu Weng, Yung-Chi Lee, Yu-Chen Chou, Tsung-Hua Wu, Su Tao
  • Publication number: 20030162380
    Abstract: A solder ball fabricating process for forming solder balls over a wafer having an active layer is provided. A patterned solder mask layer is formed over the active surface of the wafer. The patterned solder mask layer has an opening that exposes a bonding pad on the wafer. Solder material is deposited into the opening over the bonding pad. A reflow process is conducted to form a pre-solder body. The aforementioned steps are repeated so that various solder materials are fused together to form a solder ball over the bonding pad.
    Type: Application
    Filed: February 26, 2003
    Publication date: August 28, 2003
    Inventors: HO-MING TONG, CHUN-CHI LEE, JEN-KUANG FANG, MIN-LUNG HUANG, JAU-SHOUNG CHEN, CHING-HUEI SU, CHAO-FU WENG, YUNG-CHI LEE, YU-CHEN CHOU
  • Patent number: 6605523
    Abstract: A semiconductor device and a manufacturing method thereof are provided, wherein both bumps of a semiconductor chip and leads on a tape substrate can be accurately connected at the time of performing thermocompression bonding of the two using a heating tool. The film tape carrier and semiconductor chip expand due to heat applied from the heating tool of the gang bonding apparatus, so setting the pitch of the bumps and the pitch of the inner leads, taking into consideration beforehand the difference in linear expansion coefficient of the two at the time of gang bonding, solves the problem.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: August 12, 2003
    Assignee: Seiko Epson Corporation
    Inventor: Michiyoshi Takano
  • Publication number: 20030143831
    Abstract: The present invention is directed to a method and an apparatus where the standard wire bonding of TBGA's is replaced using a solid intermediate subcarrier on which the die may be flip chipped and which may then be flip chipped onto the substrate. The subcarrier has a number of conductors replacing the wire bond. In this manner, a better reflection suppression, better impedance matching, smaller conductor pitch and other advantages are achieved. The subcarrier may also be used for mounting multiple dies in a single substrate.
    Type: Application
    Filed: December 2, 2002
    Publication date: July 31, 2003
    Inventors: Robert J. McDonough, Weimin Sun
  • Publication number: 20030139030
    Abstract: Dielectric rings are configured to be disposed around contact pads on a surface of a semiconductor device or another substrate and methods of fabricating and disposing the rings on semiconductor devices and other substrates. The rings may be disposed around the contact pads before or after conductive structures, such as solder balls, are secured to the contact pads. Upon connecting the semiconductor device face-down to a higher level substrate and establishing electrical communication between contact pads of the semiconductor device and contacts pads of the substrate, the rings prevent the material of solder balls protruding from the semiconductor device from contacting regions of the surface of the semiconductor device that surround the contact pads thereof. The rings may be preformed structures or fabricated on the surface of the semiconductor device or other substrate. For example, stereolithographic techniques may be used to form the rings.
    Type: Application
    Filed: January 9, 2003
    Publication date: July 24, 2003
    Inventor: Ford B. Grigg