Dimensional Determination Patents (Class 702/155)
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Patent number: 7475581Abstract: A method of increasing control precision of a path of a product in a leveling machine including: a fixed support cage; two leveling assemblies with parallel rollers, which are placed above and below the strip respectively; devices necessary to adjust the interlocking of the rollers; a mechanism for measuring leveling forces at least of two sides of the machine; and a theoretical pre-setting model. The method directly measures at least one value for the spacing of the leveling rollers, which is compared to reference values, and uses the members for adjusting the position of the leveling rollers to maintain the measured values equal to the reference values. The method is particularly suitable for machines used to level flat metal products.Type: GrantFiled: September 28, 2004Date of Patent: January 13, 2009Assignee: Siemens VAI Metals Technologies SASInventor: Andrzej Farnik
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Publication number: 20080319709Abstract: A dimension of a specific part of a semiconductor device is measured with high accuracy and at a high speed. The invention provides a dimension measuring apparatus used for measuring a dimension of a semiconductor device having a first pattern of repeated structure and a second pattern that is linear and formed on the first pattern to extend over the repeated structure.Type: ApplicationFiled: May 28, 2008Publication date: December 25, 2008Inventors: Masaru KURIHARA, Masaru Izawa, Junichi Tanaka
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Publication number: 20080320434Abstract: A photomask is washed and at least one physical amount of transmittance and phase difference of the photomask, dimension of a pattern, height of the pattern and a sidewall shape of the pattern is measured. After this, the two-dimensional shape of a borderline pattern previously determined for the photomask is measured. Lithography tolerance is derived by performing a lithography simulation for the measured two-dimensional shape by use of the measured physical amount. Then, whether the photomask can be used or not is determined based on the derived lithography tolerance.Type: ApplicationFiled: April 30, 2008Publication date: December 25, 2008Inventors: Hidefumi MUKAI, Shinji Yamaguchi, Yukiyasu Arisawa, Toshiya Kotani
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Publication number: 20080312866Abstract: One of the objects is to provide a three-dimensional measuring equipment for measuring a three-dimensional surface shape of an object efficiently with high accuracy. A three-dimensional data acquisition device comprises an object position measuring sensor for detecting the position of the object in a space, a measuring camera for capturing the object, and a measuring camera position measuring sensor for detecting the position of the measuring camera in the space.Type: ApplicationFiled: September 11, 2003Publication date: December 18, 2008Inventors: Katsunori Shimomura, Isohachi Okamura, Tetsuya Kajitani, Keishin Okamura
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Patent number: 7463996Abstract: Disclosed is a scanner for the scanning of articles including a scanning apparatus (10) having a scanning device (18) and a rotatable sample mount (14,420) whereby, the scanning device and mount are relatively displaceable along the rotary axis (48) of the mount, a receptacle (40,140,240,400) mounted on the sample mount, the receptacle being capable of securely accommodating an article (30), and an actuator (146,246) for linearly displacing the receptacle whereby, actuation of the actuator displaces the receptacle and any article secured thereto, with respect to the sample mount. The article may be elongate and the displacement by the actuator is along an axis defined by the elongate axis of the elongate article. Also disclosed is a method of scanning.Type: GrantFiled: November 24, 2004Date of Patent: December 9, 2008Assignee: Renishaw PLCInventors: David Roberts McMurtry, Peter John Wells
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Patent number: 7460981Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, a presence of macro and micro defects. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.Type: GrantFiled: October 26, 2004Date of Patent: December 2, 2008Assignee: KLA-Tencor Technologies Corp.Inventors: Gary Bultman, Ady Levy, Kyle A. Brown, Mehrdad Nikoonahad, Dan Wack, John Fielden
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Patent number: 7457721Abstract: Without using an interferometer, small displacement and/or three-dimensional shape of an object is detected in a noncontact way with high accuracy using pseudo-phase information calculated from e.g., a speckle pattern having a spatially random structure. A speckle image of the test object of the before displacement is obtained, and a spatial frequency spectrum is calculated by executing an N-dimensional Fourier transform for this. The complex analytic signal is obtained by setting the amplitude of frequency spectrum in the half plane including zero frequency in this amplitude distribution to zero, and executing the frequency spectrum amplitude in the half plane of the remainder in the inverse Fourier transform. And then, the amplitude value of this complex analytic signal is replaced with the constant value, a part of the obtained analytic signal domain is clipped, the phase information is calculated by the phase-only correlation function, and the cross-correlation peak in N-dimension is obtained.Type: GrantFiled: April 22, 2005Date of Patent: November 25, 2008Assignee: The University of Electro-CommunicationsInventors: Mitsuo Takeda, Wei Wang, Nobuo Ishii, Yoko Miyamoto
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Patent number: 7453584Abstract: A structure formed on a semiconductor wafer is examined by obtaining a first diffraction signal measured from the structure using an optical metrology device. A first profile is obtained from a first machine learning system using the first diffraction signal obtained as an input to the first machine learning system. The first machine learning system is configured to generate a profile as an output for a diffraction signal received as an input. A second profile is obtained from a second machine learning system using the first profile obtained from the first machine learning system as an input to the second machine learning system. The second machine learning system is configured to generate a diffraction signal as an output for a profile received as an input. The first and second profiles include one or more parameters that characterize one or more features of the structure.Type: GrantFiled: October 9, 2007Date of Patent: November 18, 2008Assignee: Timbre Technologies, Inc.Inventors: Shifang Li, Junwei Bao
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Patent number: 7454300Abstract: Exemplary impedance extraction methods, systems, and apparatus are described herein. In one exemplary embodiment, at least a portion of a circuit description indicative of a circuit layout is loaded. A signal-wire segment is selected. Loop inductance values and loop resistance values for the signal-wire segment are determined at at least a first frequency of operation and a second frequency of operation. Values for one or more inductance components and one or more resistance components of a broadband representation of the signal-wire segment are computed and stored. In this embodiment, the broadband representation comprises at least one but no more than two parallel-coupled resistance components and inductance components. Computer-readable media storing computer-executable instructions for causing a computer to perform any of the disclosed methods or storing data or information created or modified using any of the disclosed techniques are also disclosed.Type: GrantFiled: February 8, 2007Date of Patent: November 18, 2008Inventors: Roberto Suaya, Rafael Escovar, Shrinath Thelapurath, Salvador Ortiz
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Publication number: 20080281556Abstract: An apparatus is for evaluating optical characteristics of an optical system based on an image forming position of a point image formed through the optical system. The apparatus includes a point image producing unit that forms a point image through the optical system in each point light source; an imaging unit that images the point images to produce a point image distribution image; and a moving unit that changes relative distance between the optical system and the point light source or the imaging unit in an optical axis direction. The apparatus also performs processing of detecting an image forming position in each different relative distance of the point image based on image information of the point image distribution images, the processing including calculating a regression expression for the detected image forming positions to obtain a shape parameter of the image axis in each of the point images.Type: ApplicationFiled: May 8, 2008Publication date: November 13, 2008Applicant: OLYMPUS CORPORATIONInventor: Toshiaki MATSUZAWA
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Patent number: 7450232Abstract: An optical metrology system includes a photometric device with a source configured to generate and direct light onto a structure, and a detector configured to detect light diffracted from the structure and to convert the detected light into a measured diffraction signal. A processing module of the optical metrology system is configured to receive the measured diffraction signal from the detector to analyze the structure. The optical metrology system also includes a generic interface disposed between the photometric device and the processing module. The generic interface is configured to provide the measured diffraction signal to the processing module using a standard set of signal parameters. The standard set of signal parameters includes a reflectance parameter, a first polarization parameter, a second polarization parameter, and a third polarization parameter.Type: GrantFiled: September 17, 2007Date of Patent: November 11, 2008Assignee: Timbre Technologies, Inc.Inventors: Shifang Li, Junwei Bao, Nickhil Jakatdar, Xinhui Niu
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Publication number: 20080262788Abstract: The present invention relates to a method and a device (11) using a physical token (14), which provides measurable parameters, to derive at least one data set. A plurality of values of one or more of the parameters are measured. From these measured values, a measure of variance is calculated. Quantization intervals into which a measured value is to be quantized are then determined. A possible value of a data set, which subsequently can be derived from a measured value provided by the physical token, is associated with each quantization interval. Further, information which subsequently enables determination of these quantization intervals is stored. Hence, an enrolling phase has been completed. When the preparing phase has been completed, a deriving phase may commence. When a data set is to be derived, for example to be used as a cryptographic key, a value of any one of the parameters provided by the PUF is measured.Type: ApplicationFiled: December 12, 2006Publication date: October 23, 2008Applicant: NXP B.V.Inventors: Geert Jan Schrijen, Boris Skoric
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Patent number: 7440878Abstract: A method of generating a virtual model of an object, comprising the step of constructing a fused model to represent the variation of the shape of the object in a plurality of configurations. In the method, position variation vectors may be calculated which describe the variation of a plurality of points in the fused model from their mean positions over all the configurations of the object; the position variation vectors may be assigned a weighting factor which represents a measure of their probabilistic confidence; a weighted covariance matrix may be constructed to represent the variations; the weighted covariance matrix may be operated on to obtain shape variation vectors representing the weighted direction and magnitude of variations; such that the fused model may describe how the shape of the object varies as a function of the shape variation vectors scaled by a shape parameter.Type: GrantFiled: May 5, 2005Date of Patent: October 21, 2008Assignee: The University Court of the University of EdinburghInventors: Robert Burns Fisher, III, Petko Faber, Timothy Campbell Lukins
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Patent number: 7437263Abstract: A method and a relevant apparatus for controlling the machining of a piece (18,38) rotating in a numerical control machine tool (33) includes the steps of detecting instantaneous values (V(i)) indicative of the dimensions of the piece during the machining, performing dynamic processing of the detected instantaneous values and controlling at least one machining phase on the basis of the processing. The method includes dynamic calculation of average values (M(j)) of sequences of the detected values, acquisition of a variation index (P) indicative of the average values trend during the machining and of a correction coefficient (K) that allows for the delay of the calculated average values with respect to the actual dimensions of the piece, and processing of an instantaneous dimension (RI) of the piece that is transmitted to the numerical control of the machine tool for controlling the machining.Type: GrantFiled: June 1, 2005Date of Patent: October 14, 2008Assignee: Marposs Societa′ per AzioniInventor: William Montanari
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Patent number: 7430052Abstract: A method for correlating line width roughness of gratings first performs a step (a) generating a characteristic curve of a predetermined grating having a known line width, and a step (b) performing a comparing process to select a matching spectrum from a plurality of simulated diffraction spectrum of known line width, and setting the known line width of the matching spectrum as the virtual line width of the predetermined grating. Subsequently, the method performs a step (c) changing a measuring angle and repeating the steps (a) and (b) to generate a virtual line width curve, and calculating the deviation of the virtual line width curve. The method then performs a step (d) changing the line width roughness of the predetermined grating and repeating the steps (a), (b) and (c), and a step (e) correlating the line width roughness and the deviation of the virtual line width curve to generate a correlating curve.Type: GrantFiled: April 4, 2007Date of Patent: September 30, 2008Assignee: Industrial Technology Research InstituteInventors: Deh Ming Shyu, Yi Sha Ku
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Publication number: 20080234972Abstract: An optical image measurement device is configured to form a tomographic image at each of a plurality of cross sections of a measurement object, and the optical image measurement device comprises: an image processor configured to execute an arithmetic operation based on a tomographic image at one cross section of the plurality of cross sections and another tomographic image at each of one or more cross sections other than the one cross section, thereby forming a new tomographic image at the one cross section.Type: ApplicationFiled: March 20, 2008Publication date: September 25, 2008Applicant: Kabushi Kaisha TopconInventors: Hisashi TSUKADA, Hiroyuki AOKI, Yasufumi FUKUMA, Tsutomu KIKAWA
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Publication number: 20080227462Abstract: A system obtains a plurality of locations respectively associated with a plurality of mobile devices that are in communication with the stationary access device. For each of the plurality of mobile devices, the system obtains a relative distance metric associated with that mobile device. Based on the plurality of locations and the relative distance metric, the computes a relative location of the stationary access device.Type: ApplicationFiled: March 13, 2007Publication date: September 18, 2008Applicant: GENERAL INSTRUMENT CORPORATIONInventors: Phillip Kent Freyman, Gordon B. Beacham, Robert C. Stein
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Publication number: 20080224036Abstract: A method and device for determining, in a non-destructive way, at least the active carrier profile from an unknown semiconductor substrate are disclosed. In one aspect, the method comprises generating 2m independent measurement values from the m reflected signals and correlating these 2m measurement values with 2m independent carrier profile values. The method further comprises generating additional 2m measurement values to allow determining the active carrier profile and a second parameter profile by correlating the 4m measurement values with the 4m profile values. The method further comprises generating a total of 2m[n.k] measurement values to allow determining [n.k] independent material parameter depth profiles, each material parameter profile having m points.Type: ApplicationFiled: March 6, 2008Publication date: September 18, 2008Applicants: Interuniversitair Microelektronica Centrum vzw (IMEC), Katholieke Universiteit LeuvenInventors: Trudo Clarysse, Janusz Bogdanowicz
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Patent number: 7426451Abstract: A surface coordinate measuring device (1) includes a computing unit (8) arranged in a handheld housing (9), a positioning device (2) for positioning the coordinate measuring device at a surface point (P) on a wall surface (3), a display device (6) for displaying a measurement calculated by the computing unit (8), an electronic distance measuring system (7) for determining a longitudinal distance along a longitudinal measurement direction, and a transverse measuring device for additional determination of a transverse distance along a transverse measurement direction oriented transverse to the longitudinal measurement direction, with the computing unit (8) having a program-controlled algorithm for carrying out the necessary measurements and calculations.Type: GrantFiled: April 10, 2006Date of Patent: September 16, 2008Assignee: Hilti AktiengesellschaftInventor: Albert Binder
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Patent number: 7424822Abstract: A micro-hardness measurement method for calculating the hardness of a test sample by pushing an indenter in the test sample and forming an indentation thereon, including: a loading step for extracting load data showing the relationship between load L applied to the indenter and a depth ? to which the indenter is pushed in from the surface of the test sample; an unloading step of extracting unloading data showing the relationship between the load L applied to the indenter after the load is unloaded and the depth ?; a first step of judging, by comparing the unloading data with the load data, the load fluctuation amount from the maximum depth ?0 when unloading the load; and a second step of judging the load at the depth ?1(?1<?0) when unloading the load or the load fluctuation amount in the vicinity of the depth ?1.Type: GrantFiled: December 19, 2006Date of Patent: September 16, 2008Assignee: Renias Co. Ltd.Inventor: Yoshinori Isomoto
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Publication number: 20080221828Abstract: Comprehensive closed-loop intelligent Object Transport System with Object Behavioral Pattern analysis, recognition. System establishes Objects Behavioral Patterns, analyzes them with application-specific program, generating Expected Behavioral Pattern ranges for each Object or Group of Objects, used by System to recognize Object, to apply controls to ensure each Object is Processed according to established criteria. Design principals provide flexibility to assemble hi-throughput Object Processing System, accurate detection of Behavioral Patterns of Objects during Transactions, execution of respective control functions. System performs real-time Object traffic management, preventing collisions between Objects, or damage to Objects, or System components. Closed-loop optimization—System improves its performance efficiency automatically, based on past and/or real-time performance feedback analyses.Type: ApplicationFiled: January 18, 2008Publication date: September 11, 2008Inventor: Zachary Leonid Braunstein
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Patent number: 7424388Abstract: Acceleration data which is output from an acceleration sensor is obtained. A rotation motion of an input device around a predetermined direction as a rotation axis is determined by comparing a start point in a two-dimensional coordinate system which is represented by the first acceleration data obtained in a predetermined period, and an end point in the two-dimensional coordinate system which is represented by the last acceleration data obtained in the predetermined period. Coordinate axes of the two-dimensional coordinate system are defined based on components of the two axial directions of the acceleration data, and an origin of the two-dimensional coordinate system represents a value of the acceleration data in the state where no acceleration including the acceleration of gravity acts upon the acceleration sensor. Motion data including at least the determined rotation motion is output.Type: GrantFiled: April 19, 2006Date of Patent: September 9, 2008Assignee: Nintendo Co., Ltd.Inventor: Kenta Sato
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Publication number: 20080208523Abstract: A method of determining geometric parameters of a wafer (16) is disclosed. For this purpose, the wafer (16) is inserted in a wafer holder (30). The wafer holder (30) is equipped with at least three mechanical contacting elements (22). The wafer is in mechanical contact with the contacting elements (22). The contacting elements (22) are distributed on the wafer holder (30) in such a way that they define a geometric figure which is configured such that the center point (40) of the wafer (16) comes to lie within the geometric figure. The position of each contacting element (22) is determined. Each desired geometric parameter of the wafer (16) is then calculated from the position of the contacting elements (22).Type: ApplicationFiled: February 25, 2008Publication date: August 28, 2008Applicant: VISTEC Semiconductor Systems GmbHInventors: Rene Schenck, Ralf Friedrich, Thomas Iffland, Daniel Skiera
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Patent number: 7417750Abstract: Structures formed on a semiconductor wafer are consecutively measured by obtaining first and second measured diffraction signals of a first structure and a second structure formed abutting the first structure. The first and second measured diffraction signals were consecutively measured using an angle-resolved spectroscopic scatterometer. The first measured diffraction signal is compared to a first simulated diffraction signal generated using a profile model of the first structure. The profile model has profile parameters, characterize geometries of the first structure, and an azimuth angle parameter, which define the angle between the plane of incidence beam and direction of periodicity of the first or second structure. One or more features of the first structure are determined based on the comparison.Type: GrantFiled: November 7, 2006Date of Patent: August 26, 2008Assignee: Tokyo Electron LimitedInventors: Vi Vuong, Junwei Bao, Manuel Madriaga
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Patent number: 7414732Abstract: The invention relates to a method for determining the 3D profile of an object. In order to improve a method of this type, several sections of the object (5) are measured. During at least one measuring operation, at least one reference object (4) is measured. The measured sections of the object (5) are combined (1).Type: GrantFiled: May 16, 2001Date of Patent: August 19, 2008Assignee: Steinbichler Optotechnik GmbHInventors: Armin Maidhof, Peter Andrā, Manfred Adlhart, Michael Kaus, Markus Basel, Frank Thoss, Markus Lazar, Thomas Nasswetter, Hans Steinbichler
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Patent number: 7412348Abstract: A game system includes a game apparatus and a controller. The controller is furnished with an acceleration sensor for detecting accelerations in at least two axis directions. Game processing corresponding to the kind of an acceleration input by means of the controller is executed. For determining the kind, reference timing when acceleration in a first-axis direction is below a threshold value to take on a minimum value is detected. Then, it is determined whether or not an angle between acceleration change vectors before and after the reference timing is equal to or more than a predetermined angle. When the angle is not equal to or more than the predetermined angle, it is determined that the acceleration input is an acceleration input in any one of the two-axis directions, and when the angle is equal to or more than the predetermined angle, it is determined that the acceleration input is an acceleration input in a direction including the two-axis directions as components.Type: GrantFiled: February 2, 2007Date of Patent: August 12, 2008Assignee: Nintendo Co., Ltd.Inventor: Yuichiro Okamura
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Patent number: 7409256Abstract: Foot measurement and footwear manufacture systems and methods. A three-dimensional foot frame of a foot and pressure data corresponding to a bottom of the foot are measured, and a first and a second group of characteristic points are respectively determined accordingly. A preset foot skeleton template model is adjusted according to the second group of characteristic points, and merged into the three-dimensional foot frame according to the first group of characteristic points and protrusion points of the adjusted foot skeleton template model. The protrusion points and/or joint points of the adjusted foot skeleton template model are connected to generate at least one line and at least one plane, intersecting the three-dimensional foot frame at contact points and contact planes, respectively. The foot frame size is determined according to the distance between the contact points and the girth of the contact planes.Type: GrantFiled: December 16, 2005Date of Patent: August 5, 2008Assignee: Industrial Technology Research InstituteInventors: Ming-Hui Lin, Tung-Wu Lu, Shang-Yuan Cheng, Chien-Lin Lien
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Publication number: 20080183419Abstract: A processor operatively coupled to a speed sensor adapted to generate a measure of a longitudinal speed of a vehicle on a roadway, and to a source of a measure of yaw rate of the vehicle, provides for selecting a most likely roadway model of a plurality of different roadway models and for outputting a corresponding associated at least one curvature parameter as an estimate of curvature of the roadway, wherein the processor incorporates a plurality of curvature estimators associated with the corresponding plurality of different roadway models.Type: ApplicationFiled: April 1, 2008Publication date: July 31, 2008Applicant: AUTOMOTIVE SYSTEMS LABORATORY, INC.Inventors: Shan CONG, Shi SHEN, Lang HONG
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Publication number: 20080175465Abstract: An optical imaging system includes an optical radiation source (410, 510), a frequency clock module outputting frequency clock signals (420), an optical interferometer (430), a data acquisition (DAQ) device (440) triggered by the frequency clock signals, and a computer (450) to perform multi-dimensional optical imaging of the samples. The frequency clock signals are processed by software or hardware to produce a record containing frequency-time relationship of the optical radiation source (410, 510) to trigger the sampling process of the DAQ device (440). The system may employ over-sampling and various digital signal processing methods to improve image quality. The system further includes multiple stages of routers (1418, 1425) connecting the light source (1410) with a plurality of interferometers (1420a-1420n) and a DAQ system (1450) triggered by frequency clock signals to perform high-speed multi-channel optical imaging of samples.Type: ApplicationFiled: January 18, 2008Publication date: July 24, 2008Applicant: THORLABS, INC.Inventors: James Y. Jiang, Scott Barry, Alex E. Cable
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Patent number: 7400992Abstract: Measurement data collected within a measurement frame of reference is fitted to geometric tolerance zones having regard for the uncertainties of the measurement. Geometric freedoms for fitting the measurement data are exploited to fit uncertainty zones associated with the measurement data within the tolerance zones. Typically, the measurement data is multidimensional and the uncertainty zones have different sizes.Type: GrantFiled: June 1, 2006Date of Patent: July 15, 2008Assignee: Quality Vision International, Inc.Inventor: Kostadin Doytchinov
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Patent number: 7398178Abstract: In a method of calculating irregularities of a hole, a center coordinate of an actual hole is set. Inner wall coordinates of the actual hole are obtained from the center coordinate of the actual hole. An area of the actual hole is determined based on the inner wall coordinates of the actual hole. A radius of a virtual hole is determined based on the area of the actual hole. A center coordinate of the virtual hole is determined based on the inner wall coordinates of the actual hole to obtain a circumference line of the virtual hole. A standard deviation of the inner wall coordinates of the actual hole relative to the circumference line of the virtual hole is calculated, thereby obtaining the irregularities of the actual hole.Type: GrantFiled: September 29, 2004Date of Patent: July 8, 2008Assignee: Samsung Electronics Co., Ltd.Inventor: Hyo-Cheon Kang
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Patent number: 7398179Abstract: A system, method, and apparatus are provided for prioritizing the measurements made on manufactured parts while maintaining specified part quality standards. According to the method, system and apparatus, the process used by the CMM is modified so that the number of measurements made is reduced in accordance with the results of the analysis provided herein. A CMM apparatus is modified in accordance with the analysis results. A method for part measurement prioritization in a measuring system and method includes describing a set of features to be measured on a plurality of substantially identical parts, separating the set of features into sensitive features and non-sensitive features, dividing the non-sensitive features into a plurality of groups, and prioritizing the part measurements to measure the sensitive features and provide alternating measurements of the non-sensitive features.Type: GrantFiled: August 15, 2005Date of Patent: July 8, 2008Assignee: GM Global Technology Operations, Inc.Inventors: John S. Agapiou, Robert K. Aas, Pulak Bandyopadhyay
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Publication number: 20080162075Abstract: The present invention aims at surely and efficiently calculating size tolerances of a plurality of parts constituting a structure with the configuration that includes a tentative size tolerance setting section setting tentative size tolerances of the plurality of parts based on design data of the structure and part information of the plurality of parts; a primary analyzing section calculating a quality of the structure and sensitivities of the plurality of parts based on the tentative size tolerances set by the tentative size tolerance setting section; a judging section judging whether or not the quality satisfies a desired quality which the structure demands; and a secondary analyzing section calculating, if the judging section judges that the quality does not satisfy the desired quality, the size tolerances of the plurality of parts using the sensitivities such that the structure satisfies the desired quality.Type: ApplicationFiled: February 1, 2008Publication date: July 3, 2008Applicant: Fujitsu LimitedInventor: Kazuhiko HAMAZOE
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Patent number: 7395181Abstract: Tracking a motion of a body by obtaining two types of measurements associated with the motion of the body, one of the types including acoustic measurement. An estimate of either an orientation or a position of the body is updated based on one of the two types of measurement, for example based on inertial measurement. The estimate is then updated based on the other of the two types of measurements, for example based on acoustic ranging. The invention also features determining range measurement to selected reference devices that are fixed in the environment of the body.Type: GrantFiled: December 23, 2003Date of Patent: July 1, 2008Assignee: Massachusetts Institute of TechnologyInventor: Eric M. Foxlin
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Patent number: 7392154Abstract: Reference coordinates in a coordinate system and designated coordinates in the coordinate system based on coordinate information outputted by a pointing device are set. A distance and direction between the reference coordinates and the designated coordinates are calculated. When the distance has a value smaller than a predetermined threshold value, the distance is converted into a game parameter using a first conversion function is determined. On the other hand, when the distance has a value greater than the predetermined threshold value, the distance is converted into a game parameter using a second conversion function for converting the distance into a value greater than a value into which the distance is converted using the first conversion function. The game is processed using the direction and the game parameter.Type: GrantFiled: November 4, 2005Date of Patent: June 24, 2008Assignee: Nintendo Co., Ltd.Inventors: Keigo Nakanishi, Hiroshi Matsunaga, Shinichi Ikematsu
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Patent number: 7389200Abstract: An incremental encoding and decoding apparatus and method are provided. The incremental encoding and decoding apparatus comprises current converters, which respectively receive the pair of analog signals and convert the received analog signals into current signals each having a predetermined magnitude and phase; and frequency multipliers, which respectively convert the current signals into voltage signals each having an increased frequency compared to the frequencies of the current signals.Type: GrantFiled: January 3, 2005Date of Patent: June 17, 2008Assignee: Samsung Electronics Co., Ltd.Inventor: Young-Sun Chun
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Publication number: 20080140342Abstract: Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.Type: ApplicationFiled: January 29, 2008Publication date: June 12, 2008Inventors: Charles N. Archie, G. William Banke
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Publication number: 20080140341Abstract: Methods and apparatus for three-dimensional imaging of a sample. A source is provided of a beam of substantially collimated light characterized by a temporally dependent spectrum. The beam is focused in a plane characterized by a fixed displacement along the propagation axis of the beam, and scattered light from the sample is superposed with a reference beam derived from the substantially collimated source onto a focal plane detector array to provide an interference signal.Type: ApplicationFiled: July 10, 2007Publication date: June 12, 2008Applicant: The Board of Trustees of the University of IllinoisInventors: Tyler S. Ralston, Daniel L. Marks, Paul Scott Carney, Stephen A. Boppart
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Patent number: 7386416Abstract: The wall thickness and ovality of a tubular are simultaneously determined. The theoretical radius of a pipe is computed from a measurement of its circumference. An ultrasonic device conventionally used to measure the wall thickness of tubulars is adapted to also measure the maximum and minimum diameters and ovality by equipping or utilizing existing ultrasound inspection device with contact surfaces which contact the tubular at a fixed distance apart and at a known distance from the surface of the ultrasonic transducer. The contact surfaces define a chord of known length on the tubular under test. The mean radius of the tubular may be computed from multiple water path measurements around the circumference relative to a known fixture. The maximum and minimum diameter and ovality are calculated from the measured differences in distance from the surface of the tubular to the ultrasonic transducer and the theoretical circle.Type: GrantFiled: May 4, 2007Date of Patent: June 10, 2008Assignee: Cudd Pressure Control, Inc.Inventor: David Glasscock
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Publication number: 20080133173Abstract: A system for measuring an image of an object is provided. The system includes a measuring machine and an application server. The application server includes: an edge searching module for finding outlines of an image of an under-measurement object based on gray scale of points in the image and around the image; a measuring module for constructing an applicable coordinate system for the image, and computing structural data of structural patterns of the image using the constructed coordinate system; and a process recording module for recording measuring process as a corresponding procedure instruction while measuring the under-measurement object and generating an automatic measurement program according to the procedure instruction. A related method is also disclosed.Type: ApplicationFiled: September 5, 2007Publication date: June 5, 2008Applicants: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.Inventors: CHIH-KUANG CHANG, ZHONG-KUI YUAN, LI JIANG, XIAO-CHAO SUN
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Patent number: 7383162Abstract: The present invention relates to an apparatus for carrying out a harness design in a short time while taking a physical characteristic of a harness at the design and development of equipment incorporating the harness. The apparatus comprises a component information preserving unit for preserving three-dimensional model data on a component other than the harness in an apparatus which is an object of design, a harness information setting unit for setting information on the harness as harness information, a characteristic information setting unit, a three-dimensional model constructing unit for constructing a three-dimensional model of each of the harness and the component on the basis of the harness information set in the harness information setting unit, the three-dimensional model data on the component in the component information preserving unit and the characteristic information set in the characteristic information setting unit, and a display control unit.Type: GrantFiled: June 14, 2005Date of Patent: June 3, 2008Assignee: Fujitsu LimitedInventors: Masayoshi Hashima, Yuichi Sato
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Patent number: 7375828Abstract: A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media based on a modal function expansion is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The eigenvalues of the modal functions are computed recursively by recasting the eigenvalue equation in the following form: ?ni+1=F(?ni) where ?ni=the eigenvalue of the ith recursion and F is a function such that ?n=F(?n) is mathematically identical to the eigenvalue equation.Type: GrantFiled: May 25, 2005Date of Patent: May 20, 2008Assignee: KLA-Tencor CorporationInventors: Paul Aoyagi, Leonid Poslavsky
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Publication number: 20080091381Abstract: In the present invention, substrates in a plurality of lots are successively processed in a coating and developing treatment system, and line width measurement is performed for some of substrates of the substrate which have been through processing in each lot. The line width measurement of two successive lots is performed such that the last line width measurement in the previous lot of the two successive lots has been completed at the time of completion of processing of a substrate which is first subjected to the line width measurement in the subsequent lot. According to the present invention, the measurement of product substrates can be performed without decreasing the throughput of the product substrates.Type: ApplicationFiled: October 9, 2007Publication date: April 17, 2008Applicant: TOKYO ELECTRON LIMITEDInventors: Kunie OGATA, Shinichi Shinozuka, Yoshihiro Kondo
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Patent number: 7359817Abstract: A re-calibration method and device for a three-dimensional visual sensor of a robot system, whereby the work load required for re-calibration is mitigated. While the visual sensor is normal, the visual sensor and a measurement target are arranged in one or more relative positional relations by a robot, and the target is measured to acquire position/orientation information of a dot pattern etc. by using calibration parameters then held. During re-calibration, each relative positional relation is approximately reproduced, and the target is again measured to acquire feature amount information or position/orientation of the dot pattern etc. on the image. Based on the feature amount data and the position information, the parameters relating to calibration of the visual sensor are updated. At least one of the visual sensor and the target, which are brought into the relative positional relation, is mounted on the robot arm.Type: GrantFiled: July 28, 2005Date of Patent: April 15, 2008Assignee: Fanuc LtdInventors: Kazunori Ban, Ichiro Kanno
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Patent number: 7353141Abstract: A method for monitoring consumption of a component, including the steps of emitting a radiation beam onto a first area of the component and detecting a portion of the radiation beam that is refracted by the component. A radiation level signal is generated based at least on a strength of the detected portion of the radiation beam, and a thickness of the component is determined based on the radiation level signal. The thickness of the component is compared to a predetermined thickness value, and a status signal is generated when the comparing step determines that the thickness of the component is substantially equal to or below the predetermined thickness value. When the comparing step determines that the thickness of the component is greater than the predetermined thickness value, the component is exposed to a process that can erode at least a portion of the component.Type: GrantFiled: April 18, 2007Date of Patent: April 1, 2008Assignee: Tokyo Electron LimitedInventors: Andrej S. Mitrovic, Eric J. Strang
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Publication number: 20080077352Abstract: The present invention provides methods and system for improving the accuracy of measurements made using optical metrology. The present invention relates to methods and systems for changing the optical properties of tunable resists that can be used in the production of electronic devices such as integrated circuits. Further, the invention provides methods and systems for using a modifiable resist layer that provides a first set of optical properties before exposure and a second set of optical properties after exposure.Type: ApplicationFiled: September 26, 2006Publication date: March 27, 2008Applicant: TOKYO ELECTRON LIMITEDInventors: James E. Willis, James E. Klekotka
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Patent number: 7349820Abstract: The invention relates to a method for determining the position (x, y) of at least one point of reflection (R1-2) on an obstacle. According to traditional methods of this kind a first distance (r1) between the point of reflection (R1-2) and a first position (x1) of a distance measuring device is calculated by evaluating a time period between the emission of a transmission signal and reception of a reflection signal. In order to state the unsharp position of the point of reflection thereby obtained even more precisely, in addition to the first distance (r1), a second distance (r2) of the point of reflection is calculated with respect to a second position (x2) of the distance measuring device in analogy to the calculation of the first distance (r1) and then a defined position (x, y) is calculated from the pair of variates (x1, r1) (x2, r2) so obtained using the triangulation method.Type: GrantFiled: December 2, 2004Date of Patent: March 25, 2008Assignee: Valeo Shalter und Sensoren GmbHInventors: Heinrich Gotzig, Oliver Eckstein, Marion Henry, Thomas Jung, Nicolas Jecker
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Publication number: 20080065347Abstract: The invention relates to a method of scanning a complex surface (202) defined at least partially by a physical barrier and/or comprising obstacles. The inventive method comprises the following steps: (a) a step consisting in sufficiently scanning a first zone such as to obtain absolute location data in said zone, thereby enabling same to be exhaustively scanned; (b) a step consisting in selecting a second zone (206i+1) of the complex surface, having a reduced size and a suitable shape, and repeating step (a) for said second zone; and (c) a step consisting in repeating step (b) as many times as is necessary for the whole complex surface to be scanned.Type: ApplicationFiled: October 19, 2004Publication date: March 13, 2008Inventors: Erwann Lavarec, Frederic Vautard
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Publication number: 20080065351Abstract: Thickness measurement based navigation apparatus and methods are described. An apparatus includes a thickness sensor system and a processing system. The thickness sensor system produces a respective set of measurements of thickness of an object at six or more locations through a surface of the object during each of multiple thickness measurement cycles. The processing system produces motion measures indicative of movement in relation to the object from ones of the sets of thickness measurements. In accordance with a method, a respective set of measurements of thickness of an object is generated at six or more locations through a surface of the object during each of multiple thickness measurement cycles. Motion measures indicative of movement in relation to the object are generated from ones of the sets of thickness measurements.Type: ApplicationFiled: September 11, 2006Publication date: March 13, 2008Inventors: George Panotopoulos, David W. Dolfi
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Publication number: 20080065348Abstract: A measurement tool for use in creating a customized duct segment for connecting existing adjacent HVAC ducts. The tool includes a handheld unit and a flag, each of which is configured for mounting to a respective duct. A measuring unit, such as a laser rangefinder, of the tool is capable of measuring a linear distance between the unit and the flag, and thus between reference points on the HVAC ducts, such as corners, to which the handheld unit and flag are mounted. The tool is configured to measure and store in its memory multiple distance measurements between multiple reference points. A method of using the tool involves gathering enough measurements between enough reference points, such as corners, that the required configuration for the customized duct segment can be determined, e.g. by CAD/CAM equipment. The tool may include a data port for transmitting gathered data for CAD/CAM purposes.Type: ApplicationFiled: September 11, 2007Publication date: March 13, 2008Inventor: Joseph F. Dowd