Abstract: A ruggedized pressure sensor is described for high pressure applications having a top part of hard material with a surface adapted to deform when exposed to pressure, transducers to transform deformation of the surface into a signal proportional to the pressure, and a base part of hard material, wherein the base part has one or more openings.

Abstract: A pressure sensor for detecting pressure includes: a metallic diaphragm for receiving the pressure; four strain gauges providing a Wheatstone bridge, wherein each strain gauge outputs an electric signal corresponding to deformation of the diaphragm when the diaphragm is deformed by the pressure; and four semiconductor chips corresponding to four strain gauges, wherein each strain gauge is disposed in the semiconductor chip. Each semiconductor chip is mounted on the diaphragm.

Abstract: A sensor is described, which basically consists of a leadless high sensitivity differential transducer chip which responds to both static and dynamic pressure. Located on the transducer are two sensors. One sensor has a thicker diaphragm and responds to both static and dynamic pressure to produce an output indicative of essentially static pressure, the static pressure being of a much higher magnitude than dynamic pressure. The other sensor has a thinner diaphragm and has one side or surface responsive to both static and dynamic pressure. The other side of the differential sensor or transducer structure has a long serpentine reference tube coupled to the underneath of the diaphragm. The tube only allows static pressure to be applied on the underside of the diaphragm and because of the natural resonance frequency of the tube, the dynamic pressure is suppressed and does not, in any manner, interface with the sensor or transducer having a thinned diaphragm.

Abstract: A pressure sensor is provided which may be employed in measuring the combustion pressure in an internal combustion engine. The pressure sensor is equipped with a pressure sensing diaphragm assembly which includes a first diaphragm, a second diaphragm, and liquid or gel. The first diaphragm is flexible when exposed to pressure to be measured and joined to the second diaphragm to define a closed chamber filled with the liquid or gel to transmit the pressure to the second diaphragm. A pressure transmitting member is disposed in abutment with the second diaphragm to transmit the pressure, as transmitted from the first diaphragm, to a pressure sensing device. The inclusion of the liquid or gel in the closed chamber between the first and second diaphragms results in an increase in heat capacity of the diaphragm assembly to decrease the thermal distortion thereof without sacrificing the sensitivity of the pressure sensor.

Abstract: A method of fabricating a pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details.

Abstract: A capacitative pressure sensor (30) for harsh environments such as vehicle tires. The sensor has two opposing electrodes (36 and 50). One electrode is a membrane (50) that extends between fluid at a reference pressure and fluid at the pressure to be sensed. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry converts the deflection into a signal indicative of the pressure to be sensed. The membrane is a laminate at least partially formed from a transition metal nitride because transition metal nitrides are a metal ceramics with high yield strength and metallic bonding that makes it suitable for use in extreme environments. They can also readily include an oxidizing component such as aluminium so that the membrane form a passivating surface oxide layer to protect it from oxidative failure.

Abstract: A non-contact pressure switch assembly for sensing pressure in, e.g., a vehicle. A piston with integrated magnet in a sensor body is moved under fluid pressure to change a magnetic field in which a Hall sensor is disposed inside the sensor body. The field changes polarity at the Hall sensor at a predetermined piston position.

Abstract: The invention relates to a pressure determination device for determining the pressure in a fuel storage arrangement, with a connection element for connecting the pressure determination device to the fuel storage arrangement, a first chamber, a connecting line for communicating connection of the interior of the connection element to the first chamber, a second chamber, a membrane, and a switch, the interior of the connection element, the connecting line and the first chamber being made to accommodate throughflow of a fluid, the first chamber being made separated fluid-tight from the second chamber at least by means of the membrane, and the membrane being made for actuating the switch at least depending on the pressure of the fluid in the first chamber, and the connecting line being provided with a vibration damping element through which a fluid can flow.

Abstract: A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first resistor and may have associated electrodes. The polymer element includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. The pressure sensor may also include a second polymer element that includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.

Abstract: The present invention is system and method for providing a self-calibrating pressure sensor. A pressure sensor apparatus comprises a diaphragm, at least one driving element operably coupled to the diaphragm configured to induce deflection in the diaphragm, and at least one strain gauge coupled to the diaphragm. The at least one strain gauge measures the deflection of the diaphragm. Typically, the driving elements will be piezoelectric drivers and will be operably coupled to the diaphragm. A method for evaluating a pressure sensor comprises inducing deflection in a diaphragm, measuring the deflection, determining the frequency-dependent response, calculating mechanical characteristics of the diaphragm from the frequency-dependent response, and calculating a response coefficient for the diaphragm based in part on said mechanical characteristics. The response coefficient is used to evaluate the sensor. The sensor can then be re-calibrated or self-calibrated based on the response coefficient.

Abstract: Sensors, methods and systems detect physical effects (e.g., corrosion, erosion, scaling and/or oxidation) of a fluid in contact with a diaphragm associated with a sensor assembly. The diaphragm preferably exhibits a first mechanical response when initially placed into contact with a fluid and a second mechanical response different from the first mechanical response after exposure to the fluid for a predetermined period of time. A change in the diaphragm mechanical responses between at least the first and second mechanical responses is therefore indicative of physical effects on the diaphragm over time caused by the fluid in contact therewith. A mechanical response sensor is operatively associated with the diaphragm so as to measure the change in the diaphragm mechanical responses and thereby determine the physical effects over time of the fluid in contact with the diaphragm.

Abstract: The invention relates to a pressure sensor device comprising a membrane body in the form of a membrane whose first side is exposed to a working medium whereas the second side thereof is arranged oppositely to the first side. The inventive device also comprises at least one pressure sensor element (16, 18) for detecting the extension or compressive strain of the membrane body produced by the working medium pressure. A temperature sensor element (22) for detecting the membrane body temperature is mounted thereon.

Abstract: A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such that the first conductive membrane deflects from pressure differences between the reference and the fluid pressure; a second chamber including a second conductive membrane sealed from the fluid pressure, wherein the second membrane deflects in response to a change in temperature which the pressure sensor is exposed thereto; and a circuit in electrical communication with the first and second conductive membrane, the circuit being configured to obtain a first and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the fluid pressure.

Abstract: A diaphragm for a pressure sensor includes a central portion having a primary thickness and a surrounding secondary portion having a secondary thickness greater than the primary thickness. The pressure sensor includes the diaphragm, a fluid conduit capped by the diaphragm, and a piezoelectric bridge for each of the primary and secondary portions to generate a signal indicative of the displacement of the portions; and a method of producing the sensor.

Abstract: This invention aims to realize reduction in size without impairing measurement accuracy or connection reliability in a semiconductor pressure sensor in which a glass substrate is adhered to a rear-surface side of a pressure-sensitive chip in which piezoresistive pressure-sensitive gauges have been formed on a front surface of a diaphragm formed of a silicon single crystal to form a space between a rear surface of the diaphragm and the glass substrate, for measuring a pressure applied to the front surface of the diaphragm with reference to a pressure of the first space as a standard pressure. In order to achieve this object, the semiconductor pressure sensor includes resinous projections formed on pressure-sensitive gauge electrodes disposed on a front surface of the pressure-sensitive chip or on wiring from the pressure-sensitive gauge electrodes and bumps formed so as to partially or entirely cover the resinous projections.

Abstract: The invention refers to a pressure sensor comprising a membrane which separates a measuring device receiving the deformation of the membrane caused by pressure from the pressurised pressure space. The pressure sensor is formed by a basic body. The pressure sensor is set in a wall defining the pressure space. The membrane is orientated essentially parallel to the surface normal line of this opening.

Abstract: A modular fiber optic sensor that uses a light source to transmits light through at least one optical fiber to a sensor support. The sensor support is releasably attached to the optical fiber(s) allowing the use of both a single and multiple fibers. Diaphragms are exchangably attached to the sensor support allowing numerous diaphragm configurations to be attached to the sensor support. The different diaphragm configurations allow the sensor to detect a wide range of physical phenomena. A detection system is coupled to the optical fiber(s) that determines the change in light intensity which is reflected from the diaphragm's reflector.

Abstract: An insulin pump and an infusion set adapter having a membrane which can be acted upon by a liquid flow path associated with the pump, wherein the pump comprises a sensor by which a change in shape or location of at least a portion of the membrane caused by a change in the liquid pressure in the flow path can be detected in a contact-free manner to identify an occlusion in the flow path.

Abstract: The inventive pressure transmitting connector, in particular for an endoscopy system includes a fluid transporting channel, a blind compartment which opens towards the transport channels by a pipe and closed by a membrane which is deformable according to a pressure in the transport channels and a device for transmitting a representative quantity of the pressure in the transport channel according to the membrane deformation. The transport channel, the pipe and the blind compartment are embodied in the same rigid part to which the membrane is attached. In a preferred embodiment, the membrane simultaneously closes the blind compartment and a pressure transmitting chamber attached to the rigid part.

Abstract: A pressure gauge, or transducer, for high-temperature applications, comprising a sensor module with a sensor body having a measuring cell chamber containing a pressure measuring cell. The pressure measuring cell can be subjected to the action of a pressure via a first hydraulic path filled with a transmission liquid. The pressure gauge also comprises a transmission module for transmitting a pressure to the first hydraulic path. The transmission module has a second hydraulic path, which is filled with a transmission liquid and extends from a process diaphragm, through a transmission body and to a transmission diaphragm. The transmission diaphragm is attached to the transmission body in a pressure-tight manner, and the sensor body is joined to the transmission body in a pressure-tight manner, whereby the transmission diaphragm communicates with the first hydraulic path so that the pressure of the second hydraulic path can be transmitted via the transmission diaphragm to the first hydraulic path.

Abstract: The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller arranged in signal communication with a charge amplifier, a charge injector and two switches. The charge amplifier is connected to the switches via a sensor capacitor in parallel with a reference capacitor in parallel with a parasitic capacitance to ground. The charge injector and charge amplifier are arranged in parallel connection between the capacitors and the controller. The controller operates the circuit to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.

Abstract: A measuring device for detecting and indicating changes in fluid pressure of a test environment relative to ambient fluid conditions, wherein the measuring device includes a linear gear rack having an alignment spur, an indicator needle associated pinion gear, calibrated indicia for visual measure of a pressure change event, and a deflectable diaphragm element. The alignment spur acts upon the pinion gear by maintaining close relationship of the linear gear rack and the needle associated pinion gear and counteracts torque and off-center forces created by the linear rack gear upon deflection of the deflectable diaphragm, thus providing improved resolution of small pressure changes and increased accuracy of measurement as the measuring device operates through a cycling period.

Abstract: A pressure difference transducer includes a hydraulic body, in which is formed an overload chamber containing an overload membrane. The overload chamber divides the overload chamber into a high-pressure chamber portion and a low-pressure chamber portion. The high-pressure chamber portion communicates with a first hydraulic path, which extends between a first diaphragm seal and a high-pressure side of a pressure measuring cell, and the low-pressure chamber portion communicates with a second hydraulic path, which extends between a second diaphragm seal and a low-pressure side of the pressure measuring cell. The low-pressure chamber portion has an essentially convex membrane bed, against which the overload membrane lies in a rest position.

Abstract: A bioinformation detection device, comprising a three-layer structure having a base, an elastic body, and a cover body, wherein a closed space is formed by a load applied to the structure, a strain detection element is sealed in the closed space, and an air pressure variation caused by bioinformation is converted into an electric signal and taken out, whereby the detail bioinformation can be accurately provided for a long time.

Abstract: A micro electrical mechanical system (MEMS) pressure sensor includes a base structure defining an opening, a plurality of support members coupled to the base structure, a thin-film diaphragm supported by the support members, and at least one strain-sensitive member associated with the at least one support member.

Abstract: A capacitive pressure sensor is formed with sensor body and diaphragm components made of near net shapeable sintered ceramic. In one configuration, the differential pressure sensor has two sintered ceramic cell halves with an internal sintered ceramic diaphragm captured between the two cell halves. In another configuration, two side-by-side sintered ceramic cell halves have individual sintered ceramic diaphragms, and the chambers of the two cell halves are connected by metal tubing.

Abstract: In a pressure sensor comprising a diaphragm formed on a portion of a chip made of semiconductor material and that senses pressure on the diaphragm by electrically converting the displacement corresponding to that pressure, the provision of the diaphragm with an aspect ratio of at least a size such that the derivative of the characteristic curve of the allowable pressure resistance of the pressure sensor, defined by setting the aspect ratio obtained by dividing the length of one side of the diaphragm by the thickness of the diaphragm as the horizontal axis and by setting the allowable pressure resistance of the pressure sensor as the vertical axis, becomes nearly zero, enables a pressure sensor having high sensitivity and high pressure resistance.

Abstract: A pressure sensor has a diaphragm with a first layer and a second layer, a pressure transmitting member being in contact with the second layer, and a sensing element. The diaphragm is deformable in response to a pressure applied on a front surface of the first layer. The transmitting member transmits this pressure to the sensing element. The sensing element detects the pressure. A heat applied to the diaphragm induces the layers to be shifted toward the transmitting member or the opposite side of the transmitting member due to a shape of the diaphragm. The layers of the diaphragm have thermal expansion coefficients differing from each other. A thermal deformation of the layers caused by the thermal expansion difference between the layers cancels out the thermal deformation of the layers originated in the shape of the diaphragm.

Abstract: A pressure-difference pickup includes a hydraulic body, in which an overload chamber, with an overload membrane, or diaphragm, is formed, which divides the overload chamber into a first half-chamber and a second half-chamber, wherein the first half-chamber is in communication with a first hydraulic measuring path extending between a first pressure intermediary and a first side of a pressure-difference measuring cell, and the second half-chamber is in communication with a second hydraulic path extending between a second pressure intermediary and a second side of the pressure measuring cell. Additionally, between at least the first half-chamber and the first hydraulic measuring path, there are arranged, on the one hand, a first hydraulic overload element having a snap-disc behavior relative to an excess pressure from the first hydraulic measuring path, and, on the other hand, a first hydraulic balancing path extending parallel to the first hydraulic measuring path.

Abstract: A fluid pressure sensor package can be easily assembled to have different types of probe tubes depending upon different application environments. The sensor package includes a sealed casing accommodating a sensor chip for sensing a pressure of a fluid introduced into the casing. A probe tube extends from the casing for introducing the fluid into contact with the sensor chip. The casing has a top opening, and has a side wall formed on its interior surface with a stepped shoulder for bearing a flange at the lower end of the probe tube. The flange is sealingly bonded to the sidewall of the casing by a sealer. Since the probe tube is prepared as a separate member from the casing, the casing can be a common base for various probe tubes having fluid channels of different lengths or diameters.

Abstract: A micromechanical pressure sensor includes a substrate having a front side and a back side, the front side facing a medium and the back side being situated on the opposite side of the substrate. A sensor diaphragm having at least one sensor area is situated on the front side, and a recess or cavity is situated behind the sensor diaphragm, and electrical contacting is provided on the back side.

Abstract: Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. The backside cavity has an opening that is cross shaped, where the dimensions of the cross may be varied to adjust pressure sensor sensitivity. The cross may have one or more rounded corners to reduce peak stress, for example, the interior corners may be rounded. A sensing conductor may be routed over one or more corners including the interior corners to detect breakage.

Abstract: A microelectronic pressure sensor comprises a MOSFET transistor adapted with a mobile gate and a cavity between the mobile gate and a substrate. The sensor includes a gate actuator configured to move mobile gate in response to a pressure being exercised. A fingerprint recognition system includes a matrix of such sensors.

Abstract: A method for manufacturing a pressure detector includes the steps of: preparing a first member including a sensing portion, a second member including a pressure receiving diaphragm, and a pressure transmission member; inserting the pressure transmission member between the sensing portion and the pressure receiving diaphragm; applying a preliminary load to the sensing portion; connecting the first member and the second member under the preliminary load; monitoring a signal from the sensing portion, corresponding to the preliminary load; and determining the preliminary load on the basis of the electric signal monitored in the step of monitoring.

Abstract: A rotor blade of a wind energy installation has a wall forming an outer shell, and at least one pressure measurement device arranged inside the rotor blade. The pressure measurement device includes a hollow body that is closed in a gastight fashion and has at least one pressure-dependent deformable diaphragm. At least one optical strain sensor is non-positively connected to each diaphragm. In a method using the pressure measurement device, the wind force is determined at wind energy installations by an evaluation unit which determines a comparison value indicating the difference between the pressure at the side of the outer shell facing the wind and the pressure at the side of the outer shell averted from the wind. A measured value for the wind force acting on the rotor blade is determined from the comparison value. The method can be used for optimized operation and/or protection of wind energy installations.

Abstract: The invention relates to a pressure sensing die to be mounted on a base, comprising: a sensing structure comprising: a diaphragm structure with a deflectable sensing diaphragm whose deflection is representative of the pressure and sensing elements for detecting the deflection of the sensing diaphragm, a pedestal supporting the diaphragm structure, a linking structure for isolating at least some of the stresses caused by the mounting of the sensing die on the base from said deflectable sensing diaphragm, the linking structure being linked on one side to a bottom surface of the pedestal and to be linked, on an opposite side, to a top surface of the base, wherein the linking structure comprises at least one linking element extending between the base and the pedestal and having a mean cross-section smaller than the said bottom surface and top surface so as to constitute a small link between the base and the pedestal. The invention further relates to a method of manufacturing such a sensing die.

Abstract: A method for fabricating a wireless pressure sensor includes providing a first substrate. A portion of the first substrate is controllably displaced to form a cavity. A conducting material is patterned on the first substrate to form a first capacitor plate and a first inductor. A second substrate is provided. A conducting material is patterned on the second substrate to form a second capacitor plate. The second substrate is attached to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition. A hermetically sealed capacitive pressure sensor may reside in the cavity between the first substrate and second substrate.

Abstract: The invention relates to a pressure sensor (1), comprising a housing (2), a housing element (3) which may be exposed to a pressure chamber (10), mounted on the housing (2) by means of a metallic membrane (5) and a measuring cell (4) which can indirectly measure a pressure acting on the housing element (3) and transmitted to the measuring cell (4) as a force resulting therefrom. According to the invention, said pressure sensor (1) comprises a housing element (3) embodied as a pin and projects out of the housing (2). The advantage of such an arrangement is only a small drilling to a pressure chamber (10) need be provided, in order to carry out a pressure measurement. The pin (3) need only be so long that the front end thereof, in the assembled state, approximately reaches the wall (11) of the pressure chamber (10).

Abstract: An industrial pressure transmitter, for use in industrial process control systems, comprises a differential pressure sensor and an integrated process connector connected to the differential pressure sensor. A process fluid flow duct extends through the process connector and receives an industrial process fluid. A primary element is positioned in the process fluid flow duct for producing a pressure differential in the process fluid across the primary element. The differential pressure sensor is connected to the process fluid flow duct to sense the pressure differential across the primary element.

Abstract: A vacuum measuring cell with a membrane between two planar housing parts has a first housing part forming a reference vacuum volume and the second housing part forming a measuring vacuum volume with a connection for the medium to be measured and a mechanism for measuring the membrane deflection. The membrane surface exposed to the medium to be measured is a structured surface.

Abstract: Provided is a temperature compensating pressure sensor. The sensor includes a silicon substrate having sealed channels on which is deposited a CMOS layer, and a conductive layer and a passivation layer deposited on the CMOS layer, the conductive layer representing a first electrode. The sensor also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Also included is a cap which covers the membranes, said cap having a channel to expose the active membrane to an outside fluid pressure, with the membranes representing a second electrode. The active membrane deflects due to differential stresses so that the first and second electrodes develop a capacitance C between them depending on the electrical permittivity of the fluid, with the reference membrane providing a temperature compensating reference capacitance.

Abstract: A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer substrate has a conductive layer at least partially overlying the associated circuitry, the conductive layer forming a first electrode of the capacitative sensor. A conductive membrane at least partially overlies the conductive layer, and is spaced from it to form a second electrode of the capacitative sensor. The conductive membrane separates fluid at a reference pressure and fluid at the pressure to be sensed such that the associated circuitry is configured to convert the deflection of the conductive membrane into an output signal indicative of the fluid pressure. The conductive membrane is at least partially formed from a ceramic material to provide corrosion and wear resistance.

Abstract: A pressure monitoring system provides a pressure sensor and a body that has a first coefficient of thermal expansion and includes at least one opening for accessing a process fluid. At least one isolation diaphragm is coupled to the body and positioned in the at least one opening. The at least one isolation diaphragm has a first surface in communication with the process fluid. At least one passageway is located in the body and configured to contain a fill fluid in communication with a second surface of the first isolation diaphragm. The at least one passageway is positioned between the first isolation diaphragm and the pressure sensor. At least one expansion chamber is coupled to the first passageway and includes an insert having a second coefficient of thermal expansion. The first coefficient of thermal expansion of the body is greater than the second coefficient of thermal expansion of the insert.

Abstract: A pressure sensor includes a case with an air passageway having a first opening leading to an inside of the case and a second opening leading to an outside of the case, pressure sensing means that is placed inside the case and includes a pressure sensing surface for detecting pressure, and a breathable filter that is provided with the air passageway to cover at least one of the first and second openings. The pressure sensing means is fixed to the case through mounting means that allows the pressure sensing means to be spaced from the case to prevent stress that is applied to the pressure sensing means by the case.

Abstract: The method for promoting the size reduction, the performance improvement and the reliability improvement of a semiconductor device embedded with pressure sensor is provided. In a semiconductor device embedded with pressure sensor, a part of an uppermost wiring is used as a lower electrode of a pressure detecting unit. A part of a silicon oxide film formed on the lower electrode is a cavity. On a tungsten silicide film formed on the silicon oxide film, a silicon nitride film is formed. The silicon nitride film has a function to fill a hole or holes and suppress immersion of moisture from outside to the semiconductor device embedded with pressure sensor. A laminated film of the silicon nitride film and the tungsten silicide film forms a diaphragm of the pressure sensor.

Abstract: A pressure sensor for measuring an external pressure fabricated upon a ceramic substrate penetrated by a via extending from the top to the bottom of the ceramic substrate is disclosed. A sacrificial layer is deposited on a portion of the top of the ceramic substrate in communication with a via. A diaphragm material is then deposited on the sacrificial layer, thereby creating a diaphragm surface. A sensor element for transducing a mechanical deflection into an electrical signal is applied to the diaphragm surface. When the sacrificial layer is removed, the diaphragm is able to deflect in response to the external pressure, which is sensed by the sensor element in order to measure the external pressure.

Abstract: A pressure transducer for measuring pressures in high temperature environments employs a tube which is terminated at one end by an acoustic micro-filter. The acoustic filter or micro-filter has a plurality of apertures extending from one end to the other end, each aperture is of a small diameter as compared to the diameter of the transducer and the damper operates to absorb acoustic waves impinging on it with limited or no reflection. Mounted to the tube is a pressure transducer with a diaphragm flush with the inner wall of the tube. The tube is mounted in an aperture in a casing of a gas turbine operating at a high temperature. The hot gases propagate through the tube where the pressure of the gases are measured by the transducer coupled to the tube and where the acoustic filter operates to absorb acoustic waves impinging on it with little or no reflection, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation.

Abstract: A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

Abstract: A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to and around the diaphragm. The piezoresistive element is formed in the diaphragm and is electrically connected with the circuit. The conductive layer is electrically connected with the diaphragm.

Abstract: A pressure sensor comprises: a case; a detection unit attached to one end of the case; a housing member coupled with the one end of the case, the housing member including a first connection member, a second connection member, a passage and a pressure introduction hole; and a diaphragm fixed to the housing member so as to cover the detection unit, wherein the passage connects the first connection member with the second connection member, the pressure introduction hole introduces a pressure of the cooling medium to the diaphragm, and the detection unit is capable of detecting the pressure of the cooling medium.