Particular Type Of Scanning Probe Microscopy [spm] Or Microscope; Essential Components Thereof (epo) Patents (Class 850/21)
  • Patent number: 7735147
    Abstract: A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.
    Type: Grant
    Filed: October 10, 2006
    Date of Patent: June 8, 2010
    Assignee: The Regents of the University of California
    Inventors: Sungho Jin, Li-Han Chen, I-Chen Chen
  • Patent number: 7730547
    Abstract: The present invention is directed toward devices comprising carbon nanotubes that are capable of detecting displacement, impact, stress, and/or strain in materials, methods of making such devices, methods for sensing/detecting/monitoring displacement, impact, stress, and/or strain via carbon nanotubes, and various applications for such methods and devices. The devices and methods of the present invention all rely on mechanically-induced electronic perturbations within the carbon nanotubes to detect and quantify such stress/strain. Such detection and quantification can rely on techniques which include, but are not limited to, electrical conductivity/conductance and/or resistivity/resistance detection/measurements, thermal conductivity detection/measurements, electroluminescence detection/measurements, photoluminescence detection/measurements, and combinations thereof. All such techniques rely on an understanding of how such properties change in response to mechanical stress and/or strain.
    Type: Grant
    Filed: January 23, 2004
    Date of Patent: June 1, 2010
    Assignee: William Marsh Rice University
    Inventors: Enrique V. Barrera, Satish Nagarajaiah, Prasad Dharap, Li Zhiling, Jong Dae Kim
  • Publication number: 20100132076
    Abstract: The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or nanotoolâ„¢ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. The invention can also produce electrical current for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).
    Type: Application
    Filed: March 6, 2009
    Publication date: May 27, 2010
    Applicant: General Nanotechnology LLC
    Inventor: Victor B. Kley
  • Patent number: 7721347
    Abstract: A method and device are provided for determining, without contact, the physical and electrical properties of nanotube materials. The device includes a scanning probe configured to generate a signal of certain frequency onto the nanotube material and measure a reflected signal from the nanotube material, and a processor coupled to the scanning probe and configured to determine the physical and electrical properties of the nanotube material from the measured reflected signal. The method includes positioning a scanning probe relative to the nanotube material, generating a signal of certain frequency onto the nanotube material, and measuring a reflected signal from the nanotube material.
    Type: Grant
    Filed: May 22, 2008
    Date of Patent: May 18, 2010
    Assignee: RF Nano Corporation
    Inventor: Peter J. Burke
  • Publication number: 20100108881
    Abstract: A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.
    Type: Application
    Filed: November 4, 2008
    Publication date: May 6, 2010
    Applicant: FEI COMPANY
    Inventors: MILOS TOTH, Rae Knowles, William Ralph Knowles
  • Patent number: 7696996
    Abstract: A laser scanning microscope capable of quickly and accurately setting control values of control items for a microscope apparatus is provided. The control items and a time line are displayed along a vertical axis and a horizontal axis, respectively. The laser scanning microscope includes a graphical user interface configured to set the control values of the control items along the time line and a control unit configured to acquire luminance information of a specimen by irradiating the specimen with a laser beam in accordance with the control values set by the graphical user interface.
    Type: Grant
    Filed: December 5, 2005
    Date of Patent: April 13, 2010
    Assignee: Olympus Corporation
    Inventors: Toshiyuki Hattori, Mitsuhiro Nakano, Yusuke Yamashita, Hiroshi Hirayama, Tatsuo Nakata
  • Patent number: 7694347
    Abstract: A measuring device with a daisy type cantilever wheel enabling easier setting of a measuring head and modification head by rotating the daisy type cantilever wheel, enabling modification, adhesion of a sample, and application of a force to a sample specimen by using centrifugal force, and also enabling an easier measurement of a variation of characteristic vibration frequency and vibration amplitude of a cantilever array is provided.
    Type: Grant
    Filed: October 27, 2005
    Date of Patent: April 6, 2010
    Assignee: Japan Science and Technology Agency
    Inventor: Hideki Kawakatsu
  • Publication number: 20100071098
    Abstract: A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
    Type: Application
    Filed: May 13, 2009
    Publication date: March 18, 2010
    Applicants: NORTHWESTERN UNIVERSITY, Nanolnk, Inc.
    Inventors: Chad A. Mirkin, Chang Liu, Yuhuang Wang, Adam B. Braunschweig, Xing Liao, Louise R. Giam, Byung Y. Lee, Shifeng Li, Joseph S. Fragala, Albert K. Henning
  • Publication number: 20100058499
    Abstract: A displacement detection portion is provided in a lever portion of a cantilever or between the lever portion and a main body portion. The displacement detection portion is provided by laminating two conductor electrodes to sandwich an insulating portion. A thickness of the insulating portion (electrode interval) is set to a value capable of detecting a variation in tunnel current due to a change in electrode interval which corresponds to a displacement of the lever portion while a predetermined voltage is applied. When the lever portion is slightly displaced, the interval between the conductor electrodes changes. Therefore, the displacement may be detected as the variation in tunnel current at high resolution with sensitivity of an exponential multiple of the change in interval.
    Type: Application
    Filed: August 27, 2009
    Publication date: March 4, 2010
    Inventor: Masatsugu Shigeno
  • Publication number: 20100017923
    Abstract: Aspects of the invention are directed to piezoresponse force analysis of a material. A stimulus signal including a first frequency component is applied to a contact point on the material such that the stimulus signal actuates a portion of the material to experience a motion as a result of a piezoelectric effect. A resonant device is coupled to the contact point such that the resonant device experiences a resonant motion at the first frequency component in response to the motion of the material, the resonant motion having a greater displacement than a displacement of the motion of the material, and is substantially unaffected by mechanical properties of the material at the contact point. The resonant motion of the resonant device is detected and processed to produce a measurement representing the piezoresponse of the material at the contact point.
    Type: Application
    Filed: May 26, 2009
    Publication date: January 21, 2010
    Inventors: Bede Pittenger, Kumar Virwani, Benedikt Zeyen
  • Publication number: 20100017922
    Abstract: Briefly described, embodiments of this disclosure include integrated sensing probes, sensing systems, methods of detecting a target compound, and the like. One exemplary integrated sensing probe, among others, includes: a substrate, a circular corrugated reflective surface, and a coaxial waveguide structure, wherein the corrugated reflective surface and the coaxial waveguide structure are disposed on the substrate, wherein the coaxial waveguide structure is positioned at the center of the circular corrugated reflective surface.
    Type: Application
    Filed: May 31, 2007
    Publication date: January 21, 2010
    Inventors: Heungjoo Shin, Boris Mizaikoff, Dustin Polke
  • Publication number: 20100011471
    Abstract: Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation).
    Type: Application
    Filed: September 1, 2006
    Publication date: January 14, 2010
    Inventors: Stephen Jesse, Sergei V. Kalinin
  • Patent number: 7644447
    Abstract: Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.
    Type: Grant
    Filed: November 17, 2006
    Date of Patent: January 5, 2010
    Assignee: Park Systems Corp.
    Inventors: Sang-il Park, Yong-Seok Kim, Jitae Kim, Sang Han Chung, Hyun-Seung Shin, Jung-Rok Lee, Euichul Hwang
  • Publication number: 20090313729
    Abstract: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.
    Type: Application
    Filed: May 26, 2006
    Publication date: December 17, 2009
    Applicant: National University Corporation Kanazawa University
    Inventors: Toshio Ando, Takayuki Uchihashi, Noriyuki Kodera, Hayato Yamashita
  • Patent number: 7631548
    Abstract: With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: December 15, 2009
    Assignee: Hitachi, Ltd.
    Inventors: Shuichi Baba, Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Yukio Kembo, Manabu Edamura
  • Publication number: 20090293160
    Abstract: Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples.
    Type: Application
    Filed: May 29, 2008
    Publication date: November 26, 2009
    Inventors: Haiwon Lee, Chung Choo Chung, Cheolsu Han
  • Publication number: 20090265819
    Abstract: The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern.
    Type: Application
    Filed: April 1, 2009
    Publication date: October 22, 2009
    Inventors: Naoya Watanabe, Masatsugu Shigeno, Masato Iyoki
  • Patent number: 7605368
    Abstract: A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body.
    Type: Grant
    Filed: November 9, 2006
    Date of Patent: October 20, 2009
    Assignee: SII NanoTechnology Inc.
    Inventors: Masatsugu Shigeno, Masato Iyoki
  • Patent number: 7597717
    Abstract: A scanning probe microscopy head may include a base portion, cantilevers coupled to the base portion, and at least one tip coupled to each of the cantilevers. At least two of the cantilevers and associated tips may be configured to perform a different scanning probe microscopy technique. The cantilevers may be positioned perpendicular to the base portion and may be coupled to the perimeter of the base portion. The base portion may include circuitry coupled thereto for providing electricity to the tips. The cantilevers may each be placed into a recessed slot along the perimeter of the base and secured to the base by a securing mechanism, such as a spring clip. The cantilevers may be operatively coupled to a linear positioner, such as a piezoelectric motor, coupled to the perimeter of the base for controlling the amount of protrusion of the cantilevers from the perimeter of the base.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: October 6, 2009
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Ryan P. Lu, Stephen D. Russell, Ayax D. Ramirez
  • Publication number: 20090217426
    Abstract: A scanning measurement instrument is capable of simultaneously achieving both higher accuracy and higher speed in autonomous scanning measurement. The instrument includes a path information holding unit for holding information about the path of the center position of a tip of a scanning probe at past tip center positions with respect to the current tip center position curing autonomous scanning measurement performed with the scanning probe; a path reference direction setting unit for setting an approximate straight line direction of the path as a pith reference direction; a traveling direction setting unit for setting the path reference direction as a traveling direction; a movement control unit for controlling a moving unit such that the scanning probe is moved in the traveling direction; and a normal direction setting unit for setting the normal direction of a measurement surface according to the traveling directior.
    Type: Application
    Filed: February 19, 2009
    Publication date: August 27, 2009
    Applicant: MITUTOYO CORPORATION
    Inventors: Takashi Noda, Hiroshi Kamitani, Naoya Kikuchi
  • Publication number: 20090205088
    Abstract: The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light reflected from the object surface, the scanning probe comprising (a) stripe generating means (14) for generating and emitting a light stripe (55); (b) a camera (16) comprising an imaging sensor having an array of pixels to detect the light stripe reflected from the object surface: (c) means for adjusting the intensity of the light stripe (55) during acquisition of the frame, in dependence upon the intensities detected by the camera (16). It also relates to a means to modify the stripe length, a scanner with separate compartment for the processing means, and an attachable dust cover for a scanner.
    Type: Application
    Filed: April 26, 2007
    Publication date: August 13, 2009
    Applicant: Metris N.V.
    Inventors: Stephen James Crampton, Peter Champ
  • Patent number: 7553335
    Abstract: A scanning probe microscope probe is produced by depositing a raw-material film on the surface of a cone made of Si, etc. and growing a needle-like crystal by using the raw-material film by irradiating an energy beam to a point on the cone at a predetermined distance along the side surface from the cone tip under such conditions as not to melt the cone. Also, a charge density wave quantum phase microscope is provided which uses a probe made of a charge density wave crystal. Also, a charge density wave quantum interferometer is provided which uses the needle-like crystal formed from the charge density wave crystal. Also, the scanning probe microscope probe is formed from a pressure-induced superconducting substance.
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: June 30, 2009
    Assignee: Japan Science and Technology Agency
    Inventors: Satoshi Tanda, Migaku Oda, Katsuhiko Inagaki, Hiroyuki Ohkawa, Takeshi Toshima, Naoki Momono, Munehiro Nishida, Masayuki Ido
  • Publication number: 20090138994
    Abstract: A measuring device with a daisy type cantilever wheel enabling easier setting of a measuring head and modification head by rotating the daisy type cantilever wheel, enabling modification, adhesion of a sample, and application of a force to a sample specimen by using centrifugal force, and also enabling an easier measurement of a variation of characteristic vibration frequency and vibration amplitude of a cantilever array is provided.
    Type: Application
    Filed: October 27, 2005
    Publication date: May 28, 2009
    Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY
    Inventor: Hideki Kawakatsu
  • Publication number: 20090077697
    Abstract: A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.
    Type: Application
    Filed: September 12, 2008
    Publication date: March 19, 2009
    Inventors: Chanmin Su, Sergey Belikov
  • Publication number: 20090066963
    Abstract: System(s) and method(s) to probe electromagnetic fields at the surface of a solid-state material are provided. The technique combines ultrafast (e.g., less than 10 fs) optical excitation and electron microscopy to generate electronic excitations and image the ensuing electromagnetic fields with nanometer-scale spatial resolution and femtosecond time-scale resolution. In addition, time-of-flight energy analysis facilitates imaging of relaxation a generated electronic excitation. The dynamics of the electromagnetic fields can be probed interferometrically through generation of multi-frame imaging, with inter-frame frequency of the order of a few hundreds of attoseconds, of interference patterns among an electric field associated with an excitation in a sample or device and the electromagnetic field of a probe pulse coherent with an excitation pulse.
    Type: Application
    Filed: August 27, 2008
    Publication date: March 12, 2009
    Applicant: University of Pittsburgh - of the Commonwealth System of Higher Education
    Inventors: Hrvoje Petek, Atsushi Kubo, Nikolaus Johannes Pontius