Cover for substrate holding chuck

Description

FIG. 1 is an enlarged perspective view of a cover for substrate holding chuck showing my new design;

FIG. 2 is a front view thereof, the back view thereof being the same image;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a right side view thereof, the left side view thereof being the same image;

FIG. 6 is an enlarged view of the section indicated by line 6-6 of FIG. 3; and,

FIG. 7 is an enlarged cross-sectional view thereof, taken along line 7-7 of FIG. 6.

The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for a cover for substrate holding chuck, as shown and described.