Confinement plate for a substrate processing chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top, isometric view of a confinement plate for a substrate processing chamber, showing my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a front elevation view thereof;

FIG. 5 is a rear elevation view thereof;

FIG. 6 is a right side elevation view thereof;

FIG. 7 is a left side elevation view thereof; and,

FIG. 8 is an enlarged cross-sectional view taken along line 16-16 of FIG. 10.

Claims

The ornamental design for a confinement plate for a substrate processing chamber, as shown and described.

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Patent History
Patent number: D943539
Type: Grant
Filed: Mar 19, 2020
Date of Patent: Feb 15, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventor: Joseph Perry (San Jose, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/728,616