Sputter target for a physical vapor deposition chamber
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Description
The dashed lines in
Claims
We claim the ornamental design for a sputter target for a physical vapor deposition chamber, as shown and described.
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Patent History
Patent number: D970566
Type: Grant
Filed: Oct 26, 2021
Date of Patent: Nov 22, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Riker (Milpitas, CA), William Fruchterman (Sunnyvale, CA), Ilya Lavitsky (Santa Clara, CA), Srinivasa Rao Yedla (Bangalore), Kirankumar Neelasandra Savandaiah (Bangalore)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/813,065
Type: Grant
Filed: Oct 26, 2021
Date of Patent: Nov 22, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Riker (Milpitas, CA), William Fruchterman (Sunnyvale, CA), Ilya Lavitsky (Santa Clara, CA), Srinivasa Rao Yedla (Bangalore), Kirankumar Neelasandra Savandaiah (Bangalore)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/813,065
Classifications