Elastic membrane for semiconductor wafer polishing apparatus
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The broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for an elastic membrane for semiconductor wafer polishing apparatus, as shown and described.
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Type: Grant
Filed: Feb 25, 2010
Date of Patent: Mar 22, 2011
Assignee: Ebara Corporation (Tokyo)
Inventors: Hozumi Yasuda (Ohta-ku), Keisuke Namiki (Ohta-ku), Makoto Fukushima (Ohta-ku), Osamu Nabeya (Ohta-ku), Koji Saito (Ohta-ku), Satoru Yamaki (Ohta-ku), Tomoshi Inoue (Ohta-ku), Shingo Togashi (Ohta-ku), Tetsuji Togawa (Ohta-ku)
Primary Examiner: Selina Sikder
Attorney: Sughrue Mion, PLLC
Application Number: 29/356,450