Liner for plasma processing apparatus

- Tokyo Electron Limited
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Description

FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a sectional view taken along line 7-7 of FIG. 3 thereof; and,

FIG. 8 is a perspective view thereof.

Claims

The ornamental design for a liner for plasma processing apparatus, as shown and described.

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Patent History
Patent number: D658692
Type: Grant
Filed: Sep 7, 2011
Date of Patent: May 1, 2012
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Kouki Suzuki (Nirasaki), Daisuke Toriya (Nirasaki), Koichi Yamazaki (Nirasaki)
Primary Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/401,103
Classifications
Current U.S. Class: Element Or Attachment (D15/138)