Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

- Applied Materials, Inc.
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Description

This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.

FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.

FIG. 2 is a top plan view of the cleaning plate of FIG. 1.

FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1.

FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1.

FIG. 5 is a side perspective view of the cleaning plate of 1; and,

FIG. 6 is an enlarged partial view of FIG. 3.

The broken lines in the figures form no part of the claimed design.

Claims

The ornamental design for a cleaning plate for inducing turbulent flow of a processing chamber cleaning glass, as shown.

Referenced Cited
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Foreign Patent Documents
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Other references
  • International Search Report dated Feb. 9, 2012 for International Application No. PCT/US2011/040197.
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Patent History
Patent number: D664170
Type: Grant
Filed: Mar 4, 2011
Date of Patent: Jul 24, 2012
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Hua Chung (San Jose, CA), Xizi Dong (Sunnyvale, CA), Kyawwin Jason Maung (Daly City, CA), Hiroji Hanawa (Sunnyvale, CA), Sang Won Kang (San Jose, CA), David H. Quach (San Jose, CA), Donald J. K. Olgado (Palo Alto, CA), David Bour (Cupertino, CA), Wei-Yung Hsu (San Jose, CA), Alexander Tam (Union City, CA), Anzhong Chang (San Jose, CA), Sumedh Acharya (Pune)
Primary Examiner: Patricia Palasik
Attorney: Patterson & Sheridan, LLP
Application Number: 29/386,850
Classifications
Current U.S. Class: Heat Treatment, Welding Or Brazing (D15/144)