Vacuum contact pad
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Description
The broken line showing of the environment forms no part of the claimed design.
Claims
The ornamental design for a vacuum contact pad, as shown and described.
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Patent History
Patent number: D859331
Type: Grant
Filed: Jul 19, 2017
Date of Patent: Sep 10, 2019
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Satoru Yamamoto (Tokyo), Masayuki Nakanishi (Tokyo), Kenji Kodera (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/611,219
Type: Grant
Filed: Jul 19, 2017
Date of Patent: Sep 10, 2019
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Satoru Yamamoto (Tokyo), Masayuki Nakanishi (Tokyo), Kenji Kodera (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/611,219
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)