Target profile for a physical vapor deposition chamber target
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Description
The broken lines in
Claims
The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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Patent History
Patent number: D837755
Type: Grant
Filed: Sep 21, 2017
Date of Patent: Jan 8, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Yu Liu (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/618,506
Type: Grant
Filed: Sep 21, 2017
Date of Patent: Jan 8, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Yu Liu (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/618,506
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)