Target profile for a physical vapor deposition chamber target

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a front elevation view thereof;

FIG. 7 is a back elevation view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

The broken lines in FIGS. 1-8 represent unclaimed matter that forms no part of the claimed design.

Claims

The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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Patent History
Patent number: D837755
Type: Grant
Filed: Sep 21, 2017
Date of Patent: Jan 8, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Yu Liu (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/618,506