Seal member for semiconductor production apparatus
Latest Valqua, Ltd. Patents:
Description
Claims
The ornamental design for a seal member for semiconductor production apparatus, as shown and described.
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- “High Performance FKM” found by RMS on the internet at: https://valqua-america.com/products/semiconductor_b.html reference dated Mar. 24, 2021.
Patent History
Patent number: D933033
Type: Grant
Filed: Sep 21, 2020
Date of Patent: Oct 12, 2021
Assignee: Valqua, Ltd. (Tokyo)
Inventors: Nobuhiro Yoshida (Gojo), Ippei Nakagawa (Gojo)
Primary Examiner: Rhea Shields
Application Number: 29/751,348
Type: Grant
Filed: Sep 21, 2020
Date of Patent: Oct 12, 2021
Assignee: Valqua, Ltd. (Tokyo)
Inventors: Nobuhiro Yoshida (Gojo), Ippei Nakagawa (Gojo)
Primary Examiner: Rhea Shields
Application Number: 29/751,348
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)