Responsive To Condition Of Coating Material Patents (Class 118/688)
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Patent number: 5534309Abstract: A method of providing particle deposition on a semiconductor wafer or other surface first provides a flow of clean gas into a deposition chamber that purges the chamber prior to introduction of the wafer, and after introduction, continues the flow of clean gas. An aerosol is mixed into the clean gas flow for a desired length of time, so that as the combined flow passes through the deposition chamber particles are deposited on the wafer supported in the chamber. After the deposition has continued for either a desired particle count or a length of time, the flow of aerosol is discontinued, and a clean gas flow sheath is provided over the wafer as it is removed from the chamber. The apparatus carries out this method by providing a source of a clean gas, valves for controlling aerosol introduction into the clean gas, and a support for the wafer in the path of gas introduced into the chamber.Type: GrantFiled: June 21, 1994Date of Patent: July 9, 1996Assignee: MSP CorporationInventor: Benjamin Y. H. Liu
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Patent number: 5521677Abstract: A solid area process control for scavengeless development using a transport roll-to-donor roll DC bias as a control parameter in an electrophotographic printing machine is disclosed. The process develops a latent image of a solid area toner patch on a photoconductive belt. Once the patch is developed, the patch is measured with an infrared reflectance type sensor. The measured development mass is compared to a target value stored in the machine memory. A test of the comparison is performed by the process. If the result of the test is less than the target value, the transport roll-to-donor roll bias is increased and the process ends. If the result is more than the target value, the transport roll-to-donor roll bias is decreased and the process ends, otherwise the process stops because the measured development is acceptable. The process is run at predetermined intervals to maintain constant output from the electrophotographic printing machine.Type: GrantFiled: July 3, 1995Date of Patent: May 28, 1996Assignee: Xerox CorporationInventors: Grace T. Brewington, Richard P. Germain
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Patent number: 5512980Abstract: Disclosed are a toner empty detecting method of and a toner empty detecting apparatus for detecting an empty state of toners in a toner hopper. The toner empty detecting method comprises: a step of taking in the output of the detecting element with every constant period; a step of comparing a detected value relative to a take-in value with an average value of the detected values during a detection period of last time; a step of counting the number of times when the detected value is smaller than the average value during a detection cycle of this time; and a step of generating a toner empty output when the count value is larger than the predetermined value.Type: GrantFiled: September 2, 1994Date of Patent: April 30, 1996Assignee: Fujitsu LimitedInventors: Yoshio Yamaguchi, Toshio Tooda
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Patent number: 5512978Abstract: An apparatus for measuring concentrations of a first vapor pressure carrier fluid component and a second vapor, pressure carrier fluid component in a carrier fluid mixture, including a supply vessel for holding the carrier fluid mixture. A light source is provided for transmitting an infrared light source to the carrier fluid mixture. Detector is provided for detecting infrared light intensity transmitted through the carrier fluid mixture, and, in response thereto, determining infrared absorption of carbon hydrogen stretching frequencies of the carrier fluid mixture. And means are provided for calculating concentrations of the first carrier fluid component and the second carrier fluid component in the mixture based on the infrared absorption of carbon hydrogen stretching frequencies of the carrier fluid mixture. This method can also be extended to a mixture of more than two fluids. A means for maintaining a predetermined ratio of the carrier fluids.Type: GrantFiled: June 5, 1995Date of Patent: April 30, 1996Assignee: Xerox CorporationInventors: Ralph A. Mosher, Rasin Moser, James R. Larson, John S. Berkes
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Patent number: 5510149Abstract: In the method described, a compound substantially in the form of a paste is fed by means of a pump from a storage container (1) to a metering device (3) which determines the amount of paste to be applied to a workpiece (B). From the metering device, the paste is fed to a spray head (S) where it is mixed with compressed air from a cylinder (4) or other suitable supply and sprayed on to the workpiece (B). The amount of compressed air supplied to the paste for spraying purposes is controlled by means of a control unit (6) in such a way that a strip of substantially constant width is applied to the workpiece (B).Type: GrantFiled: February 28, 1995Date of Patent: April 23, 1996Assignee: SCA Schucker GmbHInventor: Josef Schucker
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Patent number: 5509375Abstract: A coating system for detecting the presence of contaminants carried by a fluid that is applied as a coating on a workpiece. A tube guides the fluid along a flow path to the workpiece. A light source illuminates the fluid along at least a portion of the flow path, and this light is scattered by any contaminants present in the fluid. Light scattered by the contaminant particles is more intense than light scattered by the other fluid particles, and this brighter scattered light is detected by a light detector positioned adjacent to the fluid flow path. If one or more contaminant particles is detected in the fluid, a warning signal can be given and/or the flow of fluid can be stopped. This coating system is particularly well suited for use in a spin-on coating process that applies a liquid, such as a photoresist material or a dielectric material, to a semiconductor wafer or other workpiece that is secured to a rotating turntable.Type: GrantFiled: May 27, 1994Date of Patent: April 23, 1996Assignee: VLSI Technology, Inc.Inventors: Anthony Sayka, Patricia A. Vargas
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Patent number: 5510018Abstract: System to re-circulate the treatment material in processes of surface treatment and finishing, which can be employed in association with a pickling and/or acid washing plant (12) or in association with a plant (12) for metal-coating with heat, the plant (12) comprising at least one dip tank (13) containing the treatment material (11), which is caused to circulate advantageously in countercurrent to the material to be treated, which is advantageously strip (14), the treatment material (11) being able to consist of acid baths or molten metal, such as zinc or aluminum, the dip tank (13) comprising a discharge conduit (18) and a feeder conduit (17), the system comprising at least two vessels (16a-16b) which can be hermetically sealed and are of a type resistant to pressure and which are positioned in parallel and associated with the discharge conduit (18) and with the feeder conduit (17), each of the vessels (16a-16b) including an independent inlet closure (20) and an independent outlet closure (19), each of theType: GrantFiled: November 23, 1994Date of Patent: April 23, 1996Assignee: Danieli & C. Officine Meccaniche SpAInventor: Giorgio Rey
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Patent number: 5506664Abstract: A sensor measures the toner applying capability of a toning station. It includes a transparent conductive rotatable member which is rotated through a developer applying zone and a sensing position remote from the developer applying zone. Toner is applied by developer in the station to the exterior surface of the rotatable member as controlled by a bias applied to the rotatable member. The applied toner is sensed by a transmission densitometer at the sensing position. The output can be used to control toner concentration, an original charge on an image member or a development bias applied to the toner station.Type: GrantFiled: May 5, 1994Date of Patent: April 9, 1996Assignee: Eastman Kodak CompanyInventors: James C. Maher, Douglas C. Anderson, Richard A. Weitzel
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Patent number: 5496592Abstract: In controlling an ion implantation unit, a dose of ions is calculated for every lot, and it is determined whether or not the dose D of ions is within an allowable range. When the dose of ions is within the allowable range, the ion implantation unit is operated for the next lot. When the dose of ions is not within the allowable range, the ion implantation unit is stopped.Type: GrantFiled: December 14, 1994Date of Patent: March 5, 1996Assignee: NEC CorporationInventor: Yoshiyuki Saito
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Patent number: 5489338Abstract: An apparatus for manufacturing an oxide superconducting film employing laser ablation method having a thin film forming chamber having a laser-transparent laser entrance window, a target being provided in the thin film forming chamber and containing components of an oxide superconductor, a laser beam source for irradiating the target with a laser beam from the exterior of the thin film forming chamber through the laser entrance window, and a controller for controlling power of the laser beam which is applied to the target for preventing the power of the laser beam, being applied to the target, from reduction by contamination of the entrance window caused by scattered particles. According to the present invention, it is possible to form an oxide superconducting film having high and uniform characteristics even if a long time is required for film formation, thereby attaining a remarkable effect in improvement of superconductivity of a large area oxide superconducting film.Type: GrantFiled: July 26, 1993Date of Patent: February 6, 1996Assignee: Sumitomo Electric Industries, Ltd.Inventors: Kousou Fujino, Satoshi Takano, Noriyuki Yoshida, Tsukushi Hara, Hideo Ishii
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Patent number: 5484626Abstract: Methods and apparatus for controlling plating rates of electroless plating solutions. The invention provides for continuous monitoring and replenishment of a one or more components of an electroless plating solution on a real time basis. The invention can be characterized in part by use of a quartz crystal microbalance.Type: GrantFiled: April 6, 1992Date of Patent: January 16, 1996Assignee: Shipley Company L.L.C.Inventors: Donald E. Storjohann, Sven J. Wiberg
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Patent number: 5480488Abstract: An apparatus supplies CVD coating devices with coating gas and includes an intermediate reservoir for accommodation of the gaseous coating material arranged between a storage tank and a coating device. The volume of the reservoir is set to a predetermined, maximum pressure change in the intermediate reservoir upon withdrawal of the mass of gas required for a coating step. The intermediate reservoir can be connected to a gas recovery station.Type: GrantFiled: October 28, 1993Date of Patent: January 2, 1996Assignee: Schott GlaswerkeInventors: Hans J. Bittner, Hans-Jurgen Klein, Thomas Kupper, Ewald Morsen
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Patent number: 5470604Abstract: A station for coating a semiconductor wafer with a photoresist is provided with a detector for bubbles that may occur in the resist that is supplied to the wafer. The resist is carried to the coating apparatus by a plastic tube. A commercially available capacitance detector is positioned to detect the dielectric constant of the combination of the tube, the resist, and any bubbles in the resist. The dielectric constant of the bubbles is lower than the dielectric constant of the resist, but the difference is not sufficient for detecting the bubbles with the capacitance detector alone. A metal backing plate is located on the side of the tube opposite the detector and enhances the operation of the detector sufficiently to detect bubbles of various sizes.Type: GrantFiled: July 5, 1994Date of Patent: November 28, 1995Assignee: Chartered Semiconductor Manufacturing Pte Ltd.Inventor: Soon E. Neoh
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Patent number: 5459556Abstract: A toner meter for determining a rate of toner usage per print in a printing machine of the type having operator actuatable settings effecting the rate of toner usage per print. The meter has a controller for calculating the rate of toner usage per print responsive to actuation of an operator actuatable setting and a indicator in communication with the controller, for indicating the calculated rate of toner usage.Type: GrantFiled: January 12, 1994Date of Patent: October 17, 1995Assignee: Xerox CorporationInventors: Thomas Acquaviva, Michael A. Garofalo
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Patent number: 5453301Abstract: Continuous process for recovering the overspray of aqueous coating agents during spray application by collecting it in an aqueous washing liquid which is continuously circulated in a circuit (A) to the spray booth, where the solids concentration of said washing liquid is maintained within the range of 1-1.5 wt.-%, whereby a part of the washing liquid containing overspray is fed to a first ultrafiltration circuit (B) in which the solids concentration of the circulating liquid is maintained within a range of 8-15 wt.-%, a part of the circulating liquid from ultrafiltration circuit (B) being fed to a further ultrafiltration circuit (C) in which the solids concentration of the circulating liquid is maintained approximately constant within a range between 35 wt.Type: GrantFiled: October 28, 1994Date of Patent: September 26, 1995Assignee: Herberts Gesellschaft mit Beschrankter HaftungInventors: Dietrich Saatweber, Waltraud Krumm, Bernhard Richter, Dirk Holfter
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Patent number: 5443642Abstract: Apparatus for electrostatic spray painting having a painting chamber to which is connected a spray gun fed by a paint powder delivery system. A powder supply provides a high potential across the painting chamber and the spray gun to develop an electrostatic field to pull the paint powder ejected by the spray gun toward a workpiece positioned within the paint chamber. A humidity sensor is located in proximity with the paint powder delivery system for detection of an amount of moisture. A humidity signal is produced in response to the sensed humidity. A remote computer may be connected to receive a plurality of process condition signals including the humidity signal and to provide a display indicative thereof.Type: GrantFiled: October 22, 1993Date of Patent: August 22, 1995Assignee: Wagner Systems Inc.Inventor: Thomas J. Bienduga
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Patent number: 5443639Abstract: A glue application system (10) for applying glue to books (12) moving from a binder (16) along a predetermined path (14) includes a first roller (30) which rotates in the predetermined path to apply glue to the books. A heater (114) maintains the temperature of the first roller at a predetermined temperature. A second roller (32) rotates in the predetermined path, downstream of the first roller, to apply glue to the books. A second heater (130) maintains the temperature of the second roller at a temperature less than the temperature of the first roller. A glue reservoir (50) disposed below the first and second rollers contains a supply of liquid melted glue (56). A pump (70) pumps liquid melted glue up to the first and second rollers. An electric motor drive assembly (89) is selectively engageable to drive the pump when a binder drive assembly (79) is not driving the pump.Type: GrantFiled: November 22, 1994Date of Patent: August 22, 1995Assignee: AM International, Inc.Inventor: Richard B. Hawkes
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Patent number: 5435848Abstract: An apparatus for controlling thickness of a coated film of paint on a continuously moving sheet member. A paint in a paint pan is picked up through a gap h.sub.PA formed between a pickup roll and an applicator roll, part of the paint is attached to the applicator roll and delivered to a sheet as a supply flow rate q.sub.A. The film thickness coated on the sheet is controlled in accordance with a model equation: M={(q.sub.A -q.sub.L)'.gamma.'C}/LS which has evaluated a difference between the supply flow rate q.sub.A and a leak flow rate q.sub.L not transferred onto the sheet, remaining on the applicator roll and escaping through a gap h.sub.AS (.XI. is the specific gravity of the paint, C the concentration of a solid content of the paint and LS a moving speed of the sheet).Type: GrantFiled: December 17, 1993Date of Patent: July 25, 1995Assignee: Kawasaki Steel CorporationInventors: Ichiro Tanokuchi, Takao Ikenaga
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Patent number: 5431734Abstract: A method and apparatus for monitoring and controlling reactant vapors prior to chemical vapor deposition (CVD). The reactant vapors are monitored at full concentration without sampling as they are transported to a CVD reactor. Contaminants detected cause a process controller to switch the transport path to direct reactant vapors to a system pump.Type: GrantFiled: April 28, 1994Date of Patent: July 11, 1995Assignee: International Business Machines CorporationInventors: Jonathan D. Chapple-Sokol, Richard A. Conti, James A. O'Neill, Narayana V. Sarma, Donald L. Wilson, Justin W.-C. Wong
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Patent number: 5428427Abstract: A device for informing whether fresh toner should be newly supplied into a developer (20) into an electrophotography machine comprises a sleeve (22) for delivering toner (29) to a photosensitive drum, a blade (23) for regulating the distribution of the toner deposited on the sleeve (22), an agitator (24) for agitating the toner, a hopper (21) for loading the toner, a lever (25) with an upper projection (26) and lower support (27) pivotally moved with a pivot pin (25') attached on an inside wall (21') of the hopper (21) towards the sleeve (22), a metal plate (28) supported by the lower support (27), an actuator (32) with a magnet (36) and light shield (34) pivotally moved with another pivot pin (35), and a photosensor (31). Wherein, if the hopper (21) is devoid of the toner by consuming, the magnet (36) is attracted towards the metal plate (28) so as to cause the light shield (34) to block the photosensor (31).Type: GrantFiled: December 14, 1992Date of Patent: June 27, 1995Assignee: SamSung Electronics Co., Ltd.Inventor: Dong-Ho Lee
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Patent number: 5419930Abstract: In the method described, a compound substantially in the form of a paste is fed by means of a pump from a storage container (1) to a metering device (3) which determines the amount of paste to be applied to a workpiece (B). From the metering device, the paste is fed to a spray head (S) where it is mixed with compressed air from a cylinder (4) or other suitable supply and sprayed on to the workpiece (B). The amount of compressed air supplied to the paste for spraying purposes is controlled by means of a control unit (6) in such a way that a strip of substantially constant width is applied to the workpiece (B).Type: GrantFiled: September 22, 1993Date of Patent: May 30, 1995Assignee: SCA Schucker GmbHInventor: Josef Schucker
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Patent number: 5411589Abstract: The present invention is to provide an apparatus for coating an advancing web on a backup roller Using a coating roller, which enables one to measure and control a coating gap between a lip surface of a coating die and the coating roller. The apparatus includes an extended portion which extends outward from each end of a slit portion of the coating die and has a reference surface parallel to the lip surface, the coating die is slidably located on a frame, a distance sensing means is fixed on each side of the coating roller, a distance is measured from the distance sensing means to the surface of the extended portion and the coating gap is controlled by sliding the coating die in a radial direction of the coating roller. Coating material is thereby controllably transferred from the coating roller to the web.Type: GrantFiled: December 15, 1992Date of Patent: May 2, 1995Assignee: Konica CorporationInventors: Makoto Yoshida, Kazuyuki Shimizu, Eiichi Morita, Masato Fujimori, Hiromi Tanaka
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Patent number: 5409538Abstract: A method for irradiating a substrate such as a semiconductor substrate, coated with a photoresist, with light to measure variations in optical properties, such as reflectivity, refractive index, transmittance, polarization, spectral transmittance, for determining an optimum photoresist coating condition, an optimum photoresist baking condition, an optimum developing condition or an optimum exposure energy quantity, and forming a photoresist pattern according to the optimum condition. A system for the exposure method, a controlling method of forming a photoresist film by use of the exposure method, and a system for the controlling method, are useful for stabilization of the formation or treatment of the photoresist film, and ensure less variations in the pattern size.Type: GrantFiled: June 16, 1993Date of Patent: April 25, 1995Assignee: Hitachi, Ltd.Inventors: Yasuhiko Nakayama, Masataka Shiba, Susumu Komoriya
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Patent number: 5410388Abstract: A method of maintaining consistent large solid area development by developing a large area test patch covering the image area of a photorececptor and detecting the lead edge and trail edge density of the test patch using a densitometer to measure reflectance. If a density differential between lead and trail edge density is detected, electrostatic parameters such as toner concentration, developer bias, and photoreceptor potential are adjusted to maintain constant large solid area development.Type: GrantFiled: May 17, 1993Date of Patent: April 25, 1995Assignee: Xerox CorporationInventors: James M. Pacer, Brendan C. Casey, George F. Bergen, Patricia J. Weber, William M. OuYang, Vilmarie Lopez-Heroux
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Patent number: 5407482Abstract: A primer applicator which is movable along a surface of a workpiece such as an automobile window glass panel has a rotatable primer coating roller having an outer circumferential layer of soft resin. A robot arm which supports the primer applicator is actuated to move the primer applicator along the surface of the workpiece in rolling contact therewith to apply a primer to the surface of the workpiece. The primer is supplied to the outer circumferential layer of the primer coating roller when the primer coating roller rolls on the surface of the workpiece.Type: GrantFiled: November 27, 1992Date of Patent: April 18, 1995Assignee: Honda Giken Kogyo Kabushiki KaishaInventors: Masao Kuribayashi, Hajime Yoshino, Ryuichiro Furukawa
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Patent number: 5403397Abstract: The invention relates to a device and a method for manufacturing a mould for a disc-shaped registration carrier, said device being provided with a station for applying a photosensitive layer, such as a photoresist layer, to a substrate, with a station for exposing said photosensitive layer in accordance with the registration data to be stored, with a station for developing the photosensitive layer and metallizing the side of the substrate carrying the developed photoresist layer, and with a station for applying a metal coating, wherein the various stations are accommodated in a housing and means for receiving the substrates are provided in the various stations, whilst a transport mechanism disposed within the housing is provided with at least one transport means for gripping a substrate, which transport means is movable in a horizontal plane in two directions including an angle with each other, and which is also capable of moving upward and downward within the housing.Type: GrantFiled: October 20, 1993Date of Patent: April 4, 1995Assignee: OD & ME B.V.Inventors: Lodewijk J. M. Beckers, Christopher Jayne, Joseph P. De Nijs, Marcellus A. C. M. Geerts
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Patent number: 5387309Abstract: A process and apparatus for in situ measurement of the thickness of a thin ilm on a substrate using interference effects in the thin film. Thermal radiation of the substrate is utilized as a source of interfering bundles of electromagnetic radiation which intensity thereof is measured with a charge-coupled-device camera, and signal-processing electronics is utilized for determining in accordance with the Airy formula the thickness of the thin film on the substrate in the planar direction of the thin film and the index of refraction thereof. The low time constant for the measurement and evaluation enables the process for the recording of measurements be used for the control of coating or removal procedures.Type: GrantFiled: November 30, 1992Date of Patent: February 7, 1995Assignee: Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.v.Inventors: Friedrich Bobel, Norbert Bauer
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Patent number: 5380366Abstract: A beam of light is transmitted from a transmitter (30) which is broken as the moving fiber (22) passes through the beam. A receiver (32) receives the light and generates a signal in response thereto. The signal is processed to determine the status of the pattern generated by the moving fiber (22) of material. In response to changes in the status of the pattern, the rate at which the fiber is dispensed and/or the movement of the pattern can be adjusted as well as alarm conditions noted.Type: GrantFiled: April 22, 1993Date of Patent: January 10, 1995Assignee: Nordson CorporationInventors: Kevin C. Becker, Patrick J. O'Keefe, Jr., Eddie W. Dixson, Jr.
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Patent number: 5369476Abstract: Toner control system and method for an electrographic printer in which toner is delivered from a reservoir to a toner fountain and there applied to an electrostatically charged sheet to form an image. The visual quality of the image is monitored, and toner concentrate is added to the toner in response to the monitored quality to increase the amount of pigment particles in the toner and thereby maintain a substantially constant image quality. The concentrate is added to the toner in a return line between the fountain and the reservoir in relatively small, predetermined amounts, and it is mixed before being added. In the disclosed embodiments, a test image is formed outside the main image on the sheet, and the brightness of one or more predetermined colors in the test image is monitored. This system and method are applicable both to monochrome images and to multicolor images.Type: GrantFiled: January 28, 1992Date of Patent: November 29, 1994Assignee: CactusInventors: Harry Bowers, L. Douglas Clark
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Patent number: 5365319Abstract: The present invention provides an image forming apparatus wherein first information corresponding to toner density of two-component developer including toner and carrier particles is detected by a first sensor, second information corresponding to density of the two-component developer is detected by a second sensor, and an amount of toner to be replenished to the two-component developer is controlled on the basis of outputs of the first and second sensors.Type: GrantFiled: March 2, 1993Date of Patent: November 15, 1994Assignee: Canon Kabushiki KaishaInventors: Yuji Sakemi, Masami Izumizaki
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Patent number: 5338361Abstract: The present invention relates to apparatuses and methods for measuring and controlling the amount of multiple coating materials applied to a substrate, and in particular to an apparatus and method for monitoring and regulating the amount of multiple coating materials containing different compositions applied to a substrate, such as paperboard. The coating measurement is insensitive to changes in both the amount of substrate as well as in the amount of an interfering component associated with the substrate.Type: GrantFiled: November 4, 1991Date of Patent: August 16, 1994Assignee: Measurex CorporationInventors: Leonard M. Anderson, John J. Howarth
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Patent number: 5330576Abstract: A recirculating coating liquid supply system for continuous delivery of a supply of coating liquid to a coating apparatus includes a holding tank carrying coating liquid mixture, a main feed line having an intake at the holding tank and a discharge at an applicator trough associated with the coating apparatus. A branch of the main feed line discharges into the holding tank. The system also includes a return feed line having an intake at the applicator trough and a discharge at the holding tank. Pumps are associated with both the main feed line and the return line and a viscometer is connected to measure the viscosity of the coating liquid mixture flowing through the main feed line. Viscosity adjustments are made by infusing measured quantities of coating liquid base or coating liquid thinner into the main feed line.Type: GrantFiled: May 4, 1992Date of Patent: July 19, 1994Assignee: Baldwin-Gegenheimer GmbHInventor: Dieter Clauditz, deceased
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Patent number: 5328787Abstract: Sensitometric Quality Indicator Parameters (SQIP), including Color Radial Error (1), Average Density Error (2), Contrast Mismatch Error (3), HUE (4), and related Auxiliary Quality Parameters, are derived primarily from the deviations in aim values of the red, green, and blue density values over the standard range of exposure steps for a color photographic product. Normalized tolerance limit values common to SQIP 1-3 are established at one exposure reference level within the standard range of exposure steps. A composite graphical display of density deviations versus LOG H exposure, of SQIP 1-4 with associated tolerance limit values versus LOG H exposure, and of the Auxiliary Quality Parameters enables the rapid analysis and disposition of a batch of color photographic product with regard to sensitometric quality.Type: GrantFiled: May 24, 1993Date of Patent: July 12, 1994Assignee: Eastman Kodak CompanyInventors: James D. Clifford, Raymond J. Robbins
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Patent number: 5324359Abstract: A material deposition device places droplets on a substrate. A conveyer on a chassis moves the substrate relative to a plane so a deposition means on the chassis may release material onto the substrate moved by the conveyer. A movable support means attached between the chassis and the deposition means locates it with respect to the conveyer allowing relative motion therebetween. A supply of material connected to the deposition means sends pressurized material thereto. A control causes relative motion between the conveyer and the movable support means varying the position of the deposition means relative to the substrate. The control has a memory operatively connected to timely activate the deposition means. The deposition means has a body communicating with the supply of material and a valve means responsive to the control selectively delivers droplets to the substrate.Type: GrantFiled: February 25, 1992Date of Patent: June 28, 1994Assignee: Nouvas Manufacturing Technology Co.Inventors: Wade J. Cleveland, Norman Hays
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Patent number: 5312039Abstract: Method and apparatus for monitoring the fluid spray pattern of fluid sprayed by a nozzle onto a semiconductor wafer during processing of the wafer. A light source is positioned to illuminate the fluid sprayed in a pattern P from the nozzle, and one or more photodetectors are positioned to receive light scattered by the fluid spray. Each photodetector develops an electrical signal in response to receipt of the scattered light, and these electrical signals are received and analyzed by a comparison means. One or more reference signals representing a desired fluid spray pattern P.sub.0 is stored in the comparison means, and each electrical signal for the pattern P is compared with the corresponding reference signal for the pattern P.sub.0 by the comparison means. If one or more signal for the pattern P differs substantially from the corresponding reference signal for the desired pattern P.sub.0, an alarm may be generated and/or delivery of fluid by the nozzle may be terminated.Type: GrantFiled: June 22, 1992Date of Patent: May 17, 1994Assignee: VLSI Technology, Inc.Inventors: Anthony Sayka, Allen Page
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Patent number: 5304390Abstract: A process for delivering a predetermined ratio of a compressible fluid and a non-compressible fluid which comprises the measurement of only the flowrate of the compressible fluid, the activation of an air-driven positive displacement pump at appropriate times, the pumping of a non-compressible fluid with the air-driven pump, mixing the supercritical fluid and non-compressible fluid and depositing the mixture onto a substrate.Type: GrantFiled: June 30, 1992Date of Patent: April 19, 1994Assignee: Union Carbide Chemicals & Plastics Technology CorporationInventors: James A. Condron, Edmond J. Derderian, Alan E. Wang
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Patent number: 5289222Abstract: A photoresist drainage system for conducting the excess photoresist and solvents from a spin coating machine in a semiconductor fabrication unit is disclosed. The excess photoresist liquid and solvents are channeled directly to an exhaust manifold instead of being collected in a temporary storage tank. From the exhaust manifold the photoresist and solvents flow directly into a factory chemical reclaim system. This substantially reduces the amount of solvent vapors that are drawn into the factory exhaust system.Type: GrantFiled: June 26, 1992Date of Patent: February 22, 1994Assignee: Semiconductor Systems, Inc.Inventor: Roy E. Hurtig
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Patent number: 5263608Abstract: A method and apparatus for controlling the flow of adhesive onto a moving substrate is provided using a thermal flowmeter. It is particularly designed for the tobacco industry wherein the flow of adhesive onto a continuous ribbon of paper in forming the side seam on tobacco rods requires consistent, controlled flow independent of external factors.Type: GrantFiled: June 4, 1991Date of Patent: November 23, 1993Assignee: Philip Morris IncorporatedInventors: Bernard C. Kiernan, Bernard A. Semp, Dennis M. Driscoll, David L. Bilunas
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Patent number: 5253018Abstract: The present invention relates to a toner image density detecting mechanism for an image forming apparatus which includes an image bearing layer supported on a rotatable cylindrical member, a device for forming a plurality of toner reference patterns on the image bearing layer at respective positions which equally divide a circumference of the cylindrical member, a detector for detecting an image density of the toner image of the reference pattern, and a controller controlling an image forming condition in accordance with an output of the detector; wherein an average of the image densities is determined for use in a control operation of the controller. Preferably, the toner used has a reflective or absorbing rate not less than 1.5 times that of the image bearing layer.Type: GrantFiled: February 21, 1992Date of Patent: October 12, 1993Assignee: Canon Kabushiki KaishaInventors: Tatsuo Takeuchi, Koji Amemiya, Takao Ogata, Nobuatsu Sasanuma
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Patent number: 5225239Abstract: A spray coating apparatus (10) for applying a paint composed of a controlled mixture of two liquid components. A first gear pump (32) is disposed in a spray booth (30) and pumps the first component to an applicator (14). A second gear pump (36) in the spray booth (30) pumps the second component to the applicator (14). A manifold (44) is disposed between the two gear pumps (32, 36) and the applicator (14) for converging the two paint components. A variable speed motor (16, 20) controls the rate of fluid pumped by each of the gear pumps (32, 36). Each motor (16, 20) includes an encoder (27, 29) sending feedback signals to an adjustor module (24) which computes an instantaneous ratio between the volumetric flow rates of the first and second components and compares this instantaneous ratio with a reference ratio, then adjusts the instantaneous speed of each motor (16, 20) thereby adjusting the ratio between the volumetric flow rates of the first and second components with respect to the reference ratio.Type: GrantFiled: January 9, 1991Date of Patent: July 6, 1993Assignee: Behr Industrial EquipmentInventor: Richard M. Ostin
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Patent number: 5221350Abstract: A roll (30) of adhesive worked between two rollers (10, 12) of the gumming device is supplied by feed nozzles (34a, 34b) projecting fine streams of adhesive (35a, 35b) with monitored flow. In case of an increase in the measured viscosity of the adhesive or stopping of the machine on which the gumming device is used, a water-atomizing device (40) allows the viscosity to be reduced and prevents the adhesive from drying out. A dimension of the adhesive roll is monitored and controls regulation of the output of the adhesive-feeding nozzles. The gumming device thereby ensures proper gumming of a strip of paper (2).Type: GrantFiled: February 10, 1992Date of Patent: June 22, 1993Assignee: Fabriques de Tabac Reunies, S.A.Inventors: Bernard Tallier, David Vuilleumier
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Patent number: 5218409Abstract: An image forming apparatus is loaded with a developing device capable of being easily exchanged, and a toner sensor for detecting a toner density is provided in association with the developing device. An output signal of the toner sensor approaches 0 V as a weight of a developer becomes small. Therefore, when the output signal from the toner sensor is detected prior to an agitating screw is operated when a power source is turned-on, it is possible to determine whether a developing device attached at that time is an unused or used one in accordance with the output signal. In addition, the output of the toner sensor when the developing device is an unused one is stored in a backed-up memory as a reference value for controlling a toner density during an actual operation.Type: GrantFiled: September 17, 1990Date of Patent: June 8, 1993Assignee: Sanyo Electric Co., Ltd.Inventors: Masayuki Tanaka, Kunio Tsuboi
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Patent number: 5200021Abstract: A method for vapor deposition includes monitoring of growth of a semiconductor layer by way of in-situ monitoring. According to the invention, in-situ monitoring is performed by irradiating a light beam onto the surface of the growing layer in a direction nearly perpendicular to the surface. Growth parameters of the layer are detected by monitoring variation of the light reflected by the surface of the layer. A growth condition in a vapor deposition chamber is feedback controlled based on the detected growth parameter.Type: GrantFiled: October 31, 1988Date of Patent: April 6, 1993Assignee: Sony CorporationInventors: Hiroji Kawai, Syunji Imanaga, Ichiro Hase, Kunio Kaneko, Naozo Watanabe
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Patent number: 5190789Abstract: A method and apparatus for coating a surface of a continuously moving substrate with a continuously flowing curtain of coating composition comprises transmitting a sound or light wave toward the curtain and detecting the sound or light wave after the transmitting of the sound or light wave. The presence of the curtain is confirmed by either a positive receiving of a reflected sound or light on the smae side of the curtain as the transmitting of the sound or light wave, or a negative receiving of the transmitted sound or light wave on the other side of the curtain. The position of a continuously flowing curtain of coating composition is determined by measuring a time lapse between the time a sound or light wave is transmitted and the time a sound or light wave after reflection from the curtain is received. If the time lapse is outside a predetermined range of a control time period, a signal is generated to indicate that the curtain is defective.Type: GrantFiled: August 29, 1991Date of Patent: March 2, 1993Assignee: Eastman Kodak CompanyInventor: Douglas S. Finnicum
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Patent number: 5190913Abstract: An apparatus for producing a superconducting oxide film with stable properties by metal organic chemical vapor deposition, suitable for mass production, is provided with a gas analyzer comprising a differential pressure meter 38 between a raw material gas collector tube 35 provided in a transfer line 8 for leading a raw material gas to a film forming chamber 10 and a bypass line 37, a dilution gas line 49 interlocked with the differential pressure meter 38 and for leading a dilution gas to the raw material gas collector tube 35, a gas separation column 42 branched from the bypass line, a gas detector 31 connected to the gas separation column 42, flow rate controllers 50 for carrier gases 43 and 45 and a thermostat 13 for heating all the lines.Type: GrantFiled: March 25, 1992Date of Patent: March 2, 1993Assignees: Hitachi, Ltd., NGK Spark Plug Co., Ltd., International Superconductivity Technology CenterInventors: Kazutoshi Higashiyama, Takahisa Ushida, Izumi Hirabayashi, Shoji Tanaka
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Patent number: 5188670Abstract: Methods, compositions and apparatus are provided for coating a substrate with a strongly adherent hydroxyapatite coating, which allows for ingrowth of natural bone and strong bonding between the coating and the substrate. The procedure provides for coating under conditions which form sticky particles which bind to the substrate to form a crystalline hydroxyapatite coating. The coating has particular application for prostheses, where porous areas of the prostheses are completely coated with a thin sturdy coating of hydroxyapatite.The apparatus includes a coating trough in which the substrates are present and the reactive components added. The medium is recirculated in an outer circuit through a distribution tank solution preparation tank and coating trough. Means are provided for maintaining temperature and pH. The substrates are maintained in a line normal to the flow in the trough and can be rotated to ensure even coating.Type: GrantFiled: April 17, 1991Date of Patent: February 23, 1993Assignee: Norian CorporationInventor: Brent Constantz
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Patent number: 5187522Abstract: A monitor for sensing the concentration of toner particles in the development station of an electrostatographic machine, which has a curved sump inner wall surface, includes a solenoid having a coil-form with one end adapted to be positioned adjacent to the outer surface of the sump wall, and a shield at least partially surrounding the solenoid. The shield has an end adjacent to the wall, and the surfaces of the ends of the central coil-form and the shield define a substantially cylindrical surface which conforms to the shape of the inner wall of the sump. Preferably, the surfaces of the ends of the coil-form and the shield are adapted to be substantially equal distant for the inner wall of the sump of a received development station.Type: GrantFiled: December 5, 1991Date of Patent: February 16, 1993Assignee: Eastman Kodak CompanyInventor: William A. Resch, III
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Patent number: 5167714Abstract: A powder spray coating system has a controller configurable to a variety of different system configurations. Configuration data is keyed by an operator from menu prompts and stored for use by a microprocessor based operating program to operate the supply of powder and air to a powder spray gun. The microprocessor also presents information from monitored parameters of the system, including the supply air dew point which is monitored to provide warning signals of potential condensation in the system. Dew point detection is accomplished by measuring temperature and relative humidity and comparing the measurements with values for air at the maximum acceptable dew point. Alternatively, measurement of absolute humidity and supply air pressure are used to compute the dew point of the air which is compared with the actual temperature and maximum dew point temperature.Type: GrantFiled: September 29, 1989Date of Patent: December 1, 1992Assignee: Nordson CorporationInventors: Dale N. Gimben, Jeanne M. Leidy, William M. Rucki, Jeffrey Heimburger
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Patent number: 5151740Abstract: An image forming apparatus having a section detachably installed in the image forming apparatus, for performing development by supplying developer to an image carrier, a section for detecting the density of the developer on the image carrier so as to control the density of the developer to be a predetermined value when the developing section is installed in the image forming apparatus, the detecting section includes, a section for generating light so as to radiate the generated light to the image carrier, means for detecting the light radiated to and from the image carrier by the generating means, means for controlling an amount of the light from the generating means in response to a result of detection of the light detected by the detecting means.Type: GrantFiled: April 25, 1991Date of Patent: September 29, 1992Assignee: Kabushiki Kaisha ToshibaInventor: Hitoshi Fujimoto
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Patent number: RE35010Abstract: Changes in the flow characteristics of a fluid being dispensed from a nozzle under .[.then.]. .Iadd.the .Iaddend.control of a metering valve are compensated for in order to maintain the volume of fluid dispensed over a predetermined time interval substantially equal to a selected setpoint. The volume of fluid delivered to the metering valve during a predetermined interval is measured and a correction factor based on the difference between the measured volume and the setpoint is calculated. The correction factor is used to generate a driving signal from which a control signal applied to the metering valve is generated.Type: GrantFiled: September 27, 1993Date of Patent: August 8, 1995Assignee: Nordson CorporationInventor: Richard P. Price