Optical Or Photoactive Patents (Class 204/192.26)
  • Patent number: 10629581
    Abstract: The present invention generally comprises a semiconductor film and the reactive sputtering process used to deposit the semiconductor film. The sputtering target may comprise pure zinc (i.e., 99.995 atomic percent or greater), which may be doped with aluminum (about 1 atomic percent to about 20 atomic percent) or other doping metals. The zinc target may be reactively sputtered by introducing nitrogen and oxygen to the chamber. The amount of nitrogen may be significantly greater than the amount of oxygen and argon gas. The amount of oxygen may be based upon a turning point of the film structure, the film transmittance, a DC voltage change, or the film conductivity based upon measurements obtained from deposition without the nitrogen containing gas. The reactive sputtering may occur at temperatures from about room temperature up to several hundred degrees Celsius. After deposition, the semiconductor film may be annealed to further improve the film mobility.
    Type: Grant
    Filed: December 3, 2013
    Date of Patent: April 21, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Yan Ye
  • Patent number: 10605596
    Abstract: The disclosure discloses a method and apparatus for measuring a size of a crystal grain, and a method for fabricating a poly-silicon thin film. The method for measuring the size of the crystal grain includes: obtaining a grain morphology image of a crystalline region of a crystal, and drawing a grain interface diagram according to the grain morphology image; measuring at least one crystal grain in the grain interface diagram, and determining a transverse size and a longitudinal size of each measured crystal grain; and determining a transverse size and a longitudinal size of a crystal grain of the crystal according to the transverse size and the longitudinal size of each measured crystal grain.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: March 31, 2020
    Assignees: BOE Technology Group Co., Ltd., Chengdu BOE Optoelectronics Technology Co., Ltd.
    Inventors: Cheng Zhou, Zhilong Yuan, Xiaodong Yang, Chunpeng Zhang, Fei Li, Yan Hu, Hongguang Yuan, Chengshih Huang, Guowei Su, Yu Zhang, Zubin Lv
  • Patent number: 10583630
    Abstract: Provided is a method for producing a glass unit. The method comprises a step (A) of obtaining a glass plate comprising a glass substrate and a Low-E layer placed on the glass substrate; a step (B) of applying a protective sheet to the Low-E layer surface of the glass plate; an optional step (C) of subjecting the glass plate to at least one process selected from the group consisting of transportation, storage, processing, washing and handling; a step (D) of removing the protective sheet from the glass plate; and a step (E) of assembling a glass unit using the glass plate. The protective sheet comprises a substrate layer, and a PSA layer provided to at least one face of the substrate layer. The PSA layer comprises, as a corrosion inhibitor, a surfactant free of sulfur atoms.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: March 10, 2020
    Assignees: NITTO DENKO CORPORATION, NITTO BELGIUM NV
    Inventors: Kousuke Yonezaki, Hakaru Horiguchi, Peter Gruyters, Donald Pinxten
  • Patent number: 10480058
    Abstract: A coated article includes a low emissivity (low-E) coating supported by a glass substrate. The low-E coating includes at least one silver (Ag) based infrared (IR) reflecting layer(s) that is provided adjacent to and contacting at least one protective metallic or substantially metallic doped silver layer in order to improve chemical durability characteristics of the low-E coating. The silver based IR reflecting layer and adjacent protective doped silver layer are part of a low emissivity (low-E) coating, and may be sandwiched between at least transparent dielectric layers. A barrier layer including Ni and/or Cr may be provided over and directly contacting the protective doped silver layer in order to further improve durability of the low-E coating.
    Type: Grant
    Filed: March 6, 2019
    Date of Patent: November 19, 2019
    Assignee: GUARDIAN GLASS, LLC.
    Inventors: Yiwei Lu, Brent Boyce, Guowen Ding, Scott Jewhurst, Cesar Clavero, Daniel Schweigert, Guizhen Zhang, Daniel Lee
  • Patent number: 10444485
    Abstract: A contrast-amplifying support for the observation of a sample, comprises a transparent substrate carrying at least one absorbing layer whose complex refractive index N1=n1?jk1 and thickness are chosen in such a way that the layer behaves in the guise of antireflection layer when it is illuminated under normal incidence at an illumination wavelength ? through the substrate, the face of the layer opposite to the d substrate being in contact with a transparent so-called ambient medium whose refractive index n3 is less than that of the refractive index n0 of the substrate. Methods for producing a contrast-amplifying support and for observing a sample, or for detecting or assaying at least one chemical or biological species, using such a contrast-amplifying support are provided.
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: October 15, 2019
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE DU MAINE
    Inventors: Dominique Ausserre, Claude Amra, Myriam Zerrad, Refahi Abou Khachfe
  • Patent number: 10301717
    Abstract: An antistatic article including a substrate having a first surface, a sputtered conductive layer arranged on the first surface and having a thickness ranging from approximately 0.5 nanometers to approximately 10 nanometers, and an outer layer or a series of layers arranged atop the sputtered conductive layer, wherein, the antistatic article exhibits a surface resistivity of less than approximately 1012 ohms/square. A method of making an antistatic article includes pretreating a surface of the substrate, sputtering the conductive layer onto the surface to a thickness ranging from approximately 0.5 nanometers to approximately 10 nanometers, and sputtering the outer layer and one or more additional layers atop the conductive layer, wherein, the antistatic article exhibits a surface resistivity of less than approximately 1012 ohms/square.
    Type: Grant
    Filed: June 24, 2014
    Date of Patent: May 28, 2019
    Assignee: Tru Vue, Inc.
    Inventors: James DeCoux, Roger Gave
  • Patent number: 10287209
    Abstract: A coated article is provided which may be heat treated (e.g., thermally tempered) in certain example instances. In certain example embodiments, the coated article includes a low-emissivity (low-E) coating having a zinc stannate based layer provided over a silver-based infrared (IR) reflecting layer, where the zinc stannate based layer is preferably located between first and second silver based IR reflecting layers. The zinc stannate based layer may be provided between and contacting (i) an upper contact layer of or including Ni and/or Cr (or Ti, or TiOx), and (ii) a layer of or including silicon nitride.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: May 14, 2019
    Assignee: Guardian Europe S.A.R.L.
    Inventors: Pierre Pallotta, Jose Ferreira, Herbert Lage, Marcus Frank
  • Patent number: 10233531
    Abstract: A coated article includes a low emissivity (low-E) coating supported by a glass substrate. The low-E coating includes at least one silver (Ag) based infrared (IR) reflecting layer(s) that is provided adjacent to and contacting at least one protective metallic or substantially metallic doped silver layer in order to improve chemical durability characteristics of the low-E coating. The silver based IR reflecting layer and adjacent protective doped silver layer are part of a low emissivity (low-E) coating, and may be sandwiched between at least transparent dielectric layers. A barrier layer including Ni and/or Cr may be provided over and directly contacting the protective doped silver layer in order to further improve durability of the low-E coating.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: March 19, 2019
    Assignee: Guardian Glass, LLC
    Inventors: Yiwei Lu, Brent Boyce, Guowen Ding, Scott Jewhurst, Cesar Clavero, Daniel Schweigert, Guizhen Zhang, Daniel Lee
  • Patent number: 10209419
    Abstract: The disclosure is directed to broadband, glass optical polarizers and to methods for making the glass optical polarizers. The glass optical polarizer includes a substantially bubble free fusion drawn glass having two pristine glass surfaces and a plurality of elongated zero valent metallic particle polarizing layers.
    Type: Grant
    Filed: September 11, 2014
    Date of Patent: February 19, 2019
    Assignee: Corning Incorporated
    Inventors: Nicholas Francis Borrelli, Nakia Leigh Heffner, Joseph Michael Matusick, Joseph Francis Schroeder, III, Thomas Philip Seward, III, Natesan Venkataraman
  • Patent number: 10204782
    Abstract: A method for forming a film with an annealing step and a deposition step is disclosed. The method comprises an annealing step for inducing self-assembly or alignment within a polymer. The method also comprises a selective deposition step in order to enable selective deposition on a polymer.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: February 12, 2019
    Assignees: IMEC vzw, ASM IP HOLDING B.V.
    Inventors: Jan Willem Maes, Werner Knaepen, Roel Gronheid, Arjun Singh
  • Patent number: 10151041
    Abstract: A mask manufacturing method, including manufacturing a first mold, including forming first patterns having inclined surfaces by patterning a silicon substrate; manufacturing a second mold, including forming second patterns that correspond to the first patterns by coating and curing a hardener on a surface of the first mold in which the first patterns are formed; separating the second mold from the first mold; forming a mask pattern by coating a metal layer on the second mold; and separating the metal layer from the second mold.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: December 11, 2018
    Assignee: Samsung Display Co., Ltd.
    Inventor: Jeong Won Han
  • Patent number: 10139523
    Abstract: A display substrate, a method for manufacturing the display substrate, a display panel and a display device are disclosed. The display substrate includes a base substrate. At least two refractive layers are provided on the base substrate, and a gate electrode is provided on the refractive layers. A refractive index of the refractive layer of two adjacent refractive layers close to the base substrate is less than a refractive index of the refractive layer of two adjacent refractive layers away from the base substrate, and thicknesses of the refractive layers are n?+?/4, where ? is a wavelength of incident light, and n is a nonnegative integer.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: November 27, 2018
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Kui Liang
  • Patent number: 10100164
    Abstract: A manufacturing method that forms a multilayer thin film on the inner surface of a housing forming a transparent appearance of an electronic product to provide a deep metal texture and an electronic product having a metal texture provided at the inner surface of the housing. The multilayer thin film manufacturing method includes reforming an inner surface of a housing having an outer surface and the inner surface through plasma processing, depositing at least one hardness reinforcement layer on the inner surface, and depositing a color layer on the hardness reinforcement layer.
    Type: Grant
    Filed: October 31, 2014
    Date of Patent: October 16, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seo Joon Lee, Jin Sub Kim, Hyong Jun Yoo, Min Chul Jung, Jin Hyun Cho
  • Patent number: 10067274
    Abstract: The invention provides a glazing sheet and a low-emissivity coating on the glazing sheet. The low-emissivity coating comprises, in sequence moving outwardly from the glazing sheet, a layer comprising oxide film, nitride film, or oxynitride film, an infrared-reflective film, a nickel-aluminum blocker film, and an oxide film. Also provided are methods of depositing such a low-emissivity coating.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: September 4, 2018
    Assignee: CARDINAL CG COMPANY
    Inventors: Kari B. Myli, Gary L. Pfaff, Daniel J. Plaggemeyer
  • Patent number: 10025189
    Abstract: A single lithography process for multi-layer metal/dielectric coatings using a series of developing, baking, and lifting steps to coat two or more thin films without re-patterning that results in the encapsulation and profile optimization of multi-spectral patterned thin film coatings is disclosed.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: July 17, 2018
    Assignee: Ocean Optics, Inc.
    Inventors: Heather Lovelady, Ronnie Varghese
  • Patent number: 10020195
    Abstract: The disclosure herein describes methods for Photosensitized Chemically Amplified Resist Chemicals (PS-CAR) to pattern light sensitive films (e.g., photoresist on anti-reflective coatings) on a semiconductor substrate. In one embodiment, a two-step exposure process may generate higher acid concentration regions within a photoresist layer. The PS-CAR chemicals may include photoacid generators (PAGs) and photosensitizer elements that enhance the decomposition of the PAGs into acid. The first exposure may be a patterned EUV or UV exposure that generates an initial amount of acid and photosensitizer. The second exposure may be a non-EUV flood exposure that excites the photosensitizer which increases the acid generation rate where the photosensitizer is located in the film stack. The distribution of energy during the exposures may be optimized by using certain characteristics (e.g., thickness, index of refraction, doping) of the photoresist layer, an underlying layer, and/or an overlying layer.
    Type: Grant
    Filed: February 24, 2015
    Date of Patent: July 10, 2018
    Assignee: Tokyo Electron Limited
    Inventors: Steven Scheer, Michael A. Carcasi, Benjamen M. Rathsack, Mark H. Somervell, Joshua S. Hooge
  • Patent number: 9995950
    Abstract: A spectacle lens having a front surface intended to be fitted away from the eye. The spectacle lens includes a substrate made from mineral glass or an organic material. The spectacle lens has selective light wavelength filter properties. The selective light wavelength filter properties include a spectral transmittance between 80% and 95% for all wavelengths in a wavelength range between 428 nm and 452 nm for a light ray entering the spectacle lens on the front surface at an angle of incidence of 0°, a spectral transmittance between 95% and 100% for all wavelengths in a wavelength range between 500 nm and 700 nm for a light ray entering the spectacle lens on the front surface with an angle of incidence of 0° and a yellowness index of no more than 10 for a standard illuminant D65 and a standard observer function of 2° (D65/2°).
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: June 12, 2018
    Assignee: Carl Zeiss Vision International GmbH
    Inventors: Stefan Kraus, Bernhard von Blanckenhagen, Frank Mielich
  • Patent number: 9989684
    Abstract: An interference filter includes a layers stack comprising a plurality of layers of at least: layers of amorphous hydrogenated silicon with added nitrogen (a-Si:H,N) and layers of one or more dielectric materials, such as SiO2, SiOx, SiOxNy, a dielectric material with a higher refractive index in the range 1.9 to 2.7 inclusive, or so forth. The interference filter is designed to have a passband center wavelength in the range 750-1000 nm inclusive. Layers of a dielectric material with a higher refractive index in the range 1.9 to 2.7 inclusive provide a smaller angle shift compared with a similar interference filter using SiO2 as the low index layers.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: June 5, 2018
    Assignee: MATERION CORPORATION
    Inventor: Robert Sprague
  • Patent number: 9898972
    Abstract: A field-sequential display panel, a field-sequential display apparatus and a driving method are provided. The field-sequential display apparatus includes a liquid crystal display panel and an OLED light source arranged at one side of the liquid crystal display panel where light is incident to provide trichromatic light for pixel cells of the liquid crystal display panel. The OLED light source includes multiple groups of trichromatic light sources, each of the groups of trichromatic light sources includes a first color sub-light source, a second color sub-light source and a third color sub-light source, and each sub-light source includes an anode, a cathode and a light emitting layer between the anode and the cathode.
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: February 20, 2018
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Peng Liu, Ming Yang, Pengcheng Lu, Qian Wang, Xiaochuan Chen, Xue Dong
  • Patent number: 9874806
    Abstract: A color splitting/combining prism splits apart illumination light from a projector and combines together projection light from the projector. A part of the illumination light that is not used as the projection light passes through the color splitting/combining prism as OFF-light via an image display element in a direction different from the projection light. The color splitting/combining prism includes a dichroic film of which a cutoff wavelength, at which the dichroic film exhibits a transmittance of 50% when splitting two different colors between reflection and transmission, is provided in a wavelength range in which wavelength separation is possible for all of the illumination light, the projection light, and the OFF-light that are incident at different incidence angles respectively.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: January 23, 2018
    Assignee: Konica Minolta, Inc.
    Inventors: Koji Takahara, Yasumasa Sawai
  • Patent number: 9873633
    Abstract: A coated article is provided which may be heat treated (e.g., thermally tempered) in certain example instances. In certain example embodiments, the coated article includes a low-emissivity (low-E) coating having a zinc stannate based layer provided over a silver-based infrared (IR) reflecting layer, where the zinc stannate based layer is preferably located between first and second silver based IR reflecting layers. The zinc stannate based layer may be provided between and contacting (i) an upper contact layer of or including Ni and/or Cr (or Ti, or TiOx), and (ii) a layer of or including silicon nitride.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: January 23, 2018
    Assignee: Guardian Europe S.a.r.l.
    Inventors: Pierre Pallotta, Jose Ferreira, Herbert Lage, Marcus Frank
  • Patent number: 9842533
    Abstract: The present disclosure provides a display device, a device and a method for gamma compensation. The device for gamma compensation includes: a flexure recording module, provided in a flexible display panel, and configured to acquire a flexure count of the flexible display panel; a parameter inquiring module, connected to the flexure recording module, and configured to inquire a corresponding gamma correction value from a comparison table involving a correspondence between flexure counts of the flexible display panel and gamma correction values according to the flexure count of the flexible display panel; and a voltage output module, connected to the parameter inquiring module, and configured to provide a gamma compensation voltage to the flexible display panel according to the gamma correction value.
    Type: Grant
    Filed: June 24, 2016
    Date of Patent: December 12, 2017
    Assignee: EverDisplay Optronics (Shanghai) Limited
    Inventors: Jiahao Lu, Pengtao Kang, Sisi Zhou
  • Patent number: 9819918
    Abstract: Provided are a color separating and combining prism and an optical system using the same for a projector. A color separating and combining prism (DP) includes dichroic films (B, R) that reflect the light of the wavelength range of either a first or third range from among the first wavelength range of a blue region, a second wavelength range of a green region, and a third wavelength range of a red region, and pass the light of the remaining two adjacent wavelength ranges, and at a specific angle of incidence, the average reflectance in the two wavelength ranges which the films pass is lower than the wavelength average reflectance of the wavelength region sandwiched by the two wavelength ranges.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: November 14, 2017
    Assignee: Konica Minolta, Inc.
    Inventor: Koji Takahara
  • Patent number: 9804310
    Abstract: In a method of manufacturing a one-dimensionally varying optical filter, a substrate is coated to form a stack of layers of two or more different types. The coating may, for example, employ sputtering, electron-beam evaporation, or thermal evaporation. During the coating, the time-averaged deposition rate is varied along an optical gradient direction by generating reciprocation between a shadow mask and the substrate in a reciprocation direction that is transverse to the optical gradient direction. In some approaches, the shadow mask is periodic with a mask period defined along the direction of reciprocation, and the generated reciprocation has a stroke equal to or greater than the mask period along the direction of reciprocation. The substrate and the shadow mask may also be rotated together as a unit during the coating. Also disclosed are one-dimensionally varying optical filters, such as linear variable filters, made by such methods.
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: October 31, 2017
    Assignee: Materion Corporation
    Inventor: Robert Sprague
  • Patent number: 9712128
    Abstract: In a MEMS device having a substrate and a moveable micromachined member, a mechanical structure secures the moveable micromachined member to the substrate, thermally isolates the moveable micromachined member from the substrate and provides a conduction path to enable heating of the moveable micromachined member to a temperature of at least 300 degrees Celsius.
    Type: Grant
    Filed: June 19, 2016
    Date of Patent: July 18, 2017
    Assignee: SiTime Corporation
    Inventors: Joseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill
  • Patent number: 9588606
    Abstract: The present invention is a transparent conductive film having a flexible transparent base and a transparent conductive layer made of a crystalline conductive metal oxide that is formed on one surface of the flexible transparent base, in which the thickness of the flexible transparent base is 80 ?m or less, and the difference H1?H2 between the dimensional change rate H1 when the transparent conductive film is heated at 140° C. for 30 minutes and the dimensional change rate H2 when the transparent conductive layer is removed from the transparent conductive film by etching and the transparent conductive film is heated at 140° C. for 30 minutes is ?0.02 to 0.043%. Because of that, the level difference at the pattern boundary when the film is assembled into a touch panel, etc. is decreased and the deterioration of the appearance can be also suppressed.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: March 7, 2017
    Assignee: NITTO DENKO CORPORATION
    Inventors: Yuka Yamazaki, Tomotake Nashiki, Hideo Sugawara
  • Patent number: 9570242
    Abstract: The present invention relates to a flexible transparent electrode for a dye-sensitized solar cell and a manufacturing method for same, and more specifically, to a flexible Ti—In—Zn—O transparent electrode for a dye-sensitized solar cell and a manufacturing method for same, and to a metal-inserted three-layer transparent electrode with high conductivity using the flexible transparent electrode and a manufacturing method for same, wherein compared with the conventional fluorine-doped tin oxide (FTO) and indium-tin oxide (ITO) transparent electrodes with a high deposition temperature, the flexible transparent electrode, despite being deposited at room or low temperature, has low surface resistance, high conductivity and transmittance, superior resistance against external bending, improved surface characteristics and better surface roughness performance.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: February 14, 2017
    Assignee: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
    Inventors: Gi Seok Heo, Tae Won Kim, Jae Cheol Park, Kwang Young Kim
  • Patent number: 9469097
    Abstract: One object is to provide a structure including a thin primer film formed by a dry process and tightly bound to a fluorine-containing silane coupling agent. In accordance with one aspect, a structure according to an embodiment of the present disclosure includes: a substrate; and a thin primer film containing at least one substance selected from the group consisting of silicon, titanium, aluminum, aluminum oxide, and zirconium and formed on a surface of the substrate by a dry process.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: October 18, 2016
    Assignee: TAIYO YUDEN CHEMICAL TECHNOLOGY CO., LTD.
    Inventor: Kunihiko Shibusawa
  • Patent number: 9469566
    Abstract: The invention provides a glazing sheet and a low-emissivity coating on the glazing sheet. The low-emissivity coating comprises, in sequence moving outwardly from the glazing sheet, a layer comprising oxide film, nitride film, or oxynitride film, an infrared-reflective film, a nickel-aluminum blocker film, and an oxide film. Also provided are methods of depositing such a low-emissivity coating.
    Type: Grant
    Filed: March 20, 2015
    Date of Patent: October 18, 2016
    Assignee: Cardinal CG Company
    Inventors: Kari B. Myli, Gary L. Pfaff, Daniel J. Plaggemeyer
  • Patent number: 9255030
    Abstract: The invention provides a substrate bearing a low-emissivity coating. The low-emissivity coating comprises at least one graded film region. In certain embodiments, at least one graded film region is provided between the two infrared-reflective layers of a double-type low-emissivity coating. The graded film region has a substantially continuously decreasing concentration of a first dielectric material and a substantially continuously increasing concentration of a second dielectric material. Also provided are methods of depositing such low-emissivity coatings and substrates bearing these coatings.
    Type: Grant
    Filed: February 7, 2007
    Date of Patent: February 9, 2016
    Assignee: Cardinal CG Company
    Inventor: Klaus Hartig
  • Patent number: 9199874
    Abstract: A method of obtaining a substrate coated on a first face with at least one transparent and electrically conductive thin layer based on at least one oxide, including depositing the at least one thin layer on the substrate and subjecting the at least one thin layer to a heat treatment in which the at least one layer is irradiated with aid of radiation having a wavelength between 500 and 2000 nm and focused on a zone of the at least one layer, at least one dimension of which does not exceed 10 cm. The radiation is delivered by at least one radiation device facing the at least one layer, a relative displacement being created between the radiation device and the substrate to treat the desired surface, the heat treatment being such that resistivity of the at least one layer is reduced during the treatment.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: December 1, 2015
    Assignee: SAINT-GOBAIN GLASS FRANCE
    Inventors: Emmanuelle Peter, Andriy Kharchenko, Nicolas Nadaud
  • Patent number: 9136423
    Abstract: A method to deposit CIGS thin film for solar panel construction comprising: providing a first chamber; providing a substrate and placing said substrate inside said first chamber; providing a metallic target wherein said metallic target is made with elements and/or compounds selected from the group consisting of Cu, CuGa, In, CuIn and CuInGa; placing said metallic target inside said first chamber; reducing pressure within said first chamber to a pressure of less than 1×10?6 Torr; adding sputtering gas into said first chamber after reducing pressure within said first chamber to a pressure of less than 1×10?6 Torr until said pressure in said chamber is increased to about 100 mTorr or less, sputtering said elements and/or compounds from said metallic target to said substrate; providing a second chamber; transferring said substrate from said first chamber to said second chamber after said substrate is sputtered with said elements; proving a Se vapor into said second chamber; perform vapor deposition as to allow sa
    Type: Grant
    Filed: March 15, 2014
    Date of Patent: September 15, 2015
    Inventor: Jehad A. Abushama
  • Patent number: 9121094
    Abstract: The objective of the present invention is to provide a technique capable of easily forming an alloy layer containing an additive metal on an object to provide a concentration gradient in a thickness direction by sputtering in one treatment vessel. That is, the present invention can form a film with the desired concentration, and includes a first film forming process and a second film forming process that changes at least one of, the pressure in the treatment vessel, and the electric power so they are different from the first film forming process, so that the concentration of the additive metal is different from the concentration of the additive metal of the first alloy film.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: September 1, 2015
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kaoru Maekawa, Hiroyuki Nagai, Tatsuo Hatano, Takashi Sakuma
  • Patent number: 9061481
    Abstract: Certain example embodiments relate to robust semi-transparent coatings that are suitable for use in a wide variety of display-on-demand mirror applications, and methods of making the same. In certain example embodiments, a coated article includes a coating supported by a glass substrate. A reflective metal-inclusive layer is formed, directly or indirectly, on the glass substrate. A silicon oxide inclusive layer is formed, directly or indirectly, on the reflective metallic layer. A titanium oxide inclusive layer is formed, directly or indirectly, on the silicon oxide inclusive layer. The metal-inclusive layer is formed so as to reflect incoming light away from the glass substrate such that substantially less incoming light would be reflected away from the glass substrate if lighting were provided on a side of the glass substrate opposite the coating than if no lighting were provided. The surface of the coated article need not necessarily be conductive.
    Type: Grant
    Filed: October 9, 2012
    Date of Patent: June 23, 2015
    Assignee: Guardian Industires Corp.
    Inventors: Desaraju V. Varaprasad, Yiwei Lu
  • Publication number: 20150132551
    Abstract: A method for forming an anti-reflective coating (ARC) includes positioning a substrate below a target and flowing a first gas to deposit a first portion of the graded ARC onto the substrate. The method includes gradually flowing a second gas to deposit a second portion of the graded ARC, and gradually flowing a third gas while simultaneously gradually decreasing the flow of the second gas to deposit a third portion of the graded ARC. The method also includes flowing the third gas after stopping the flow of the second gas to form a fourth portion of the graded ARC. In another embodiment a film stack having a substrate having a graded ARC disposed thereon is provided. The graded ARC includes a first portion, a second portion disposed on the first portion, a third portion disposed on the second portion, and a fourth portion disposed on the third portion.
    Type: Application
    Filed: November 3, 2014
    Publication date: May 14, 2015
    Inventors: Yong CAO, Daniel Lee DIEHL, Rongjun WANG, Xianmin TANG, Tai-Chou Papo CHEN, Tingjun XU
  • Patent number: 9017525
    Abstract: In a method for forming a metal fluoride film, a metal fluoride film is formed on a substrate by sputtering using a metal target and a mixed gas containing O2 gas and a reactive gas being a fluorocarbon gas.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: April 28, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hideo Akiba
  • Publication number: 20150104894
    Abstract: A light-emitting panel includes: a substrate and a light-emitting functional multilayer formed on the substrate, wherein the light-emitting functional multilayer including a first functional layer and a second functional layer, a thickness of part of the first functional layer positioned in a first light-emitting region is smaller than a thickness of part of the first functional layer positioned in a second light-emitting region, a thickness of part of the second functional layer positioned in the first light-emitting region is greater than a thickness of part of the second functional layer positioned in the second light-emitting region, and when the light-emitting functional multilayer is viewed in a layering direction, the first light-emitting region and the second light-emitting region are adjacent or distant from each other in a direction perpendicular to the layering direction, and each include a plurality of pixels that are each composed of a plurality of adjacent sub-pixels.
    Type: Application
    Filed: December 22, 2014
    Publication date: April 16, 2015
    Applicant: PANASONIC CORPORATION
    Inventor: Seiji NISHIYAMA
  • Publication number: 20150076234
    Abstract: This invention relates to a transparent or translucent transaction card having a base comprising a core of substantially transparent or translucent material with a plurality of coats, including optically recognizable ink comprising one or more infrared blocking dyes and other nanoparticles, such as rare earth nanophosphors and other metal nanoparticles, and/or optically recognizable film comprising nanoparticles, such as rare earth nanophosphors, and other metal oxide and/or non-oxide complexes, and methods for their preparation.
    Type: Application
    Filed: July 28, 2014
    Publication date: March 19, 2015
    Inventors: Joshua E. COLLINS, Howard Y. BELL
  • Publication number: 20150060264
    Abstract: Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition.
    Type: Application
    Filed: November 7, 2014
    Publication date: March 5, 2015
    Inventors: Mark Kozlowski, Eric Kurman, Zhongchun Wang, Mike Scobey, Jeremy Dixon, Anshu Pradhan, Robert Rozbicki
  • Patent number: 8969114
    Abstract: A method of manufacturing an organic light emitting display apparatus, the method includes loading a substrate on a moving unit, determining an angle formed between a side of the substrate and an opening in a patterning slit sheet, rotating the patterning slit sheet by two X motors so that the side of the substrate and the opening in a patterning slit sheet extend along the same direction and forming a layer on the substrate while conveying the substrate on the moving unit in the first direction in a chamber. The patterning slit sheet moves along a direction perpendicular to the first direction during the forming the layer on the substrate so that a deposition layer having a linear pattern that extends along the first direction is formed on the substrate.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: March 3, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventor: Joo-Nyung Jang
  • Patent number: 8956511
    Abstract: A method for reducing the optical loss of the multilayer coating below a predetermined value in a zone by producing coating on a displaceable substrate in a vacuum chamber with the aid of a residual gas using a sputtering device. Reactive depositing a coating on the substrate by adding a reactive component with a predetermined stoichiometric deficit in a zone of the sputtering device. Displacing the substrate with the deposited coating into the vicinity of a plasma source, which is located in the vacuum chamber at a predetermined distance from the sputtering device. The plasma action of the plasma source modifying the structure and/or stoichiometry of the coating, preferably by adding a predetermined quantity of the reactive component to reduce the optical loss of the coating.
    Type: Grant
    Filed: December 3, 2003
    Date of Patent: February 17, 2015
    Assignee: Leybold Optics GmbH
    Inventors: Michael Scherer, Jurgen Pistner, Walter Lehnert, Harro Hagedorn, Gerd Deppisch, Mario Roder
  • Publication number: 20150014151
    Abstract: A method of fabricating a sputtering target includes preparing a first powder material including at least one of a tin oxide and a mesh-forming oxide; mixing the first powder material and a second powder material comprising carbon or a tin oxide to prepare a mixture; simultaneously performing a primary compression and primary sintering on the mixture in a reduction atmosphere; and simultaneously performing a secondary compression and secondary sintering on the mixture in the reduction atmosphere to prepare the sputtering target.
    Type: Application
    Filed: March 12, 2014
    Publication date: January 15, 2015
    Inventors: Sang-Wook Shin, Sun-Young Jung, Il-Sang Lee, Jin-Woo Park, Dong-Jin Kim
  • Patent number: 8932436
    Abstract: The subject of the invention is an essentially ceramic target for a sputtering device, especially for magnetically enhanced sputtering, said target comprising predominantly nickel oxide, the nickel oxide NiOx being oxygen-deficient with respect to the stoichiometric composition.
    Type: Grant
    Filed: February 4, 2003
    Date of Patent: January 13, 2015
    Assignee: Saint-Gobain Glass France
    Inventors: Xavier Fanton, Jean-Christophe Giron
  • Publication number: 20150009556
    Abstract: In forming an optical thin film on a curved surface of a material to be deposited, a specific space, which is part of a space in a processing chamber and is a space between an arrangement part and a target, is surrounded by a shielding part. In this state, when deposition is performed by a sputtering step in which a voltage is applied to the target in the processing chamber which is in a vacuum state and supplied with an active gas and an inert gas, an optical thin film of a substantially equal optical thickness is formed on the curved surface.
    Type: Application
    Filed: December 28, 2012
    Publication date: January 8, 2015
    Inventors: Shuichiro Kawagishi, Teruo Yamashita
  • Publication number: 20140377483
    Abstract: A device housing includes a substrate and a color layer formed on the substrate. The color layer consists substantially of titanium zirconium carbonitride. The color layer has an L* value between about 70 to about 80, an a* value between about 10 to about 15, and an b* value between about 22 to about 30 in the CIE LAB color space. The color layer provides a yellow color for the device housing. A method for making the device housing is also described.
    Type: Application
    Filed: November 14, 2013
    Publication date: December 25, 2014
    Applicants: FIH (HONG KONG) LIMITED, SHENZHEN FUTAIHONG PRECISION INDUSTRY CO., LTD.
    Inventor: CHUN-JIE ZHANG
  • Patent number: 8906206
    Abstract: The invention provides a coater, and methods of using the coater, for depositing thin films onto generally-opposed major surfaces of a sheet-like substrate. The coater has a substrate transport system adapted for supporting the substrate in a vertical-offset configuration wherein the substrate is not in a perfectly vertical position but rather is offset from vertical by an acute angle. The transport system defines a path of substrate travel extending through the coater. The transport system is adapted for conveying the substrate along the path of substrate travel. Preferably, the transport system includes a side support for supporting a rear major surface of the substrate. The preferred side support bounds at least one passage through which coating material passes when such coating material is deposited onto the substrate's rear major surface. Preferably, the coater includes at least one coating apparatus (e.g.
    Type: Grant
    Filed: February 26, 2010
    Date of Patent: December 9, 2014
    Assignee: Cardinal CG Company
    Inventor: Klaus Hartig
  • Publication number: 20140356601
    Abstract: A translucent hard thin film having high transmissivity and film strength is provided. The translucent hard thin film can be composed of a laminated film formed on a substrate surface, wherein the laminated film has a superlattice structure obtained by stacking a plurality of SiO2 layer and SiC layers alternately and the entire film thickness is 3000 nm or more. A film thickness per layer is 5 to 30 nm in a SiC layer and 30% to 60% of that of the SiO2 layer in a SiC layer.
    Type: Application
    Filed: February 16, 2012
    Publication date: December 4, 2014
    Inventors: Takuya Sugawara, Hikaru Aoshima, Yousong Jiang, Ichiro Shiono
  • Patent number: 8900423
    Abstract: A method for forming boron oxide films formed using reactive sputtering. The boron oxide films are candidates as an anti-reflection coating. Boron oxide films with a refractive index of about 1.38 can be formed. The boron oxide films can be formed using power densities between 2 W/cm2 and 11 W/cm2 applied to the target. The oxygen in the reactive sputtering atmosphere can be between 40 volume % and 90 volume %.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: December 2, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Guowen Ding, Mohd Fadzli Anwar Hassan, Minh Huu Le, Zhi-Wen Sun, Yu Wang
  • Patent number: 8894826
    Abstract: A method and apparatus for forming a thin film of a copper indium gallium selenide (CIGS)-type material are disclosed. The method includes providing first and second targets in a common sputtering chamber. The first target includes a source of CIGS material, such as an approximately stoichiometric polycrystalline CIGS material, and the second target includes a chalcogen, such as selenium, sulfur, tellurium, or a combination of these elements. The second target provides an excess of chalcogen in the chamber. This can compensate, at least in part, for the loss of chalcogen from the CIGS-source in the first target, resulting in a thin film with a controlled stoichiometry which provides effective light absorption when used in a solar cell.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: November 25, 2014
    Inventors: Jesse A. Frantz, Jasbinder S. Sanghera, Robel Y. Bekele, Vinh Q Nguyen, Ishwar D. Aggarwal, Allan J. Bruce, Michael Cyrus, Sergey V. Frolov
  • Patent number: 8894827
    Abstract: A deposition method for electrochromic WOx films involves cyclic deposition of very thin poisoned and metallic tungsten oxide layers to build up a film with a desired general stoichiometry with x in the range of 3>x>2.75. The method may include: charging a deposition chamber with oxygen gas to poison a tungsten metal target; initiating sputtering of the target while reducing the oxygen partial pressure being supplied to the chamber and pumping the chamber; sputtering target for time t1+t2 to form first and second tungsten oxide layers, where the first layer is deposited during time t1 from a poisoned target and the second layer is deposited during time t2 from a metallic target, and where the stoichiometry of the film comprising the first and second layers is a function of t1 and t2; and, repeating until a desired film thickness is achieved.
    Type: Grant
    Filed: January 18, 2012
    Date of Patent: November 25, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Chong Jiang, Byung Sung Leo Kwak