Capacitor For Signal Storage In Combination With Non-volatile Storage Means Patents (Class 257/298)
-
Publication number: 20090303797Abstract: A semiconductor device includes a semiconductor substrate, a gate insulating film formed on the substrate, a first gate electrode formed on the gate insulating film, source and drain regions formed in the substrate so as to sandwich the first gate electrode, an intergate insulating film formed on the first gate electrode and including an opening, a second gate electrode formed on the intergate insulating film and electrically connected to the first gate electrode through the opening, and a boost electrode formed on the intergate insulating film and electrically isolated from the first gate electrode and the second gate electrode.Type: ApplicationFiled: June 5, 2009Publication date: December 10, 2009Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kikuko SUGIMAE, Yasushi Kameda
-
Publication number: 20090302365Abstract: Some embodiments include memory cells that contain a dynamic random access memory (DRAM) element and a nonvolatile memory (NVM) element. The DRAM element contains two types of DRAM nanoparticles that differ in work function. The NVM contains two types of NVM nanoparticles that differ in trapping depth. The NVM nanoparticles may be in vertically displaced charge-trapping planes. The memory cell contains a tunnel dielectric, and one of the charge-trapping planes of the NVM may be further from the tunnel dielectric than the other. The NVM charge-trapping plane that is further from the tunnel dielectric may contain larger NVM nanoparticles than the other NVM charge-trapping plane. The DRAM element may contain a single charge-trapping plane that has both types of DRAM nanoparticles therein. The memory cells may be incorporated into electronic systems.Type: ApplicationFiled: October 15, 2007Publication date: December 10, 2009Inventor: Arup Bhattacharyya
-
Patent number: 7612400Abstract: An MIM device includes a lower electrode of a metal nitride film, a hysteresis film of an oxide film containing Nb formed on the lower electrode, and an upper electrode of a metal nitride film formed on the hysteresis film.Type: GrantFiled: November 26, 2007Date of Patent: November 3, 2009Assignee: Fujitsu LimitedInventors: Teruo Kurahashi, Hideharu Shido, Kenji Ishikawa, Takeo Nagata, Yasuyoshi Mishima, Yukie Sakita
-
Patent number: 7612398Abstract: A semiconductor storage device wherein a plurality of ferroelectric capacitors are sufficiently covered with a hydrogen barrier film formed thereon comprises a field effect transistor formed on one surface side of a semiconductor substrate, a plurality of ferroelectric capacitors formed close to each other above the field effect transistor, an insulting film configured to cover the plurality of ferroelectric capacitors and planarised a space between adjacent ferroelectric capacitors in a self-aligned manner during formation thereof, and a hydrogen barrier film formed on the insulating film.Type: GrantFiled: September 1, 2004Date of Patent: November 3, 2009Assignee: Kabushiki Kaisha ToshibaInventors: Yoshinori Kumura, Yoshiro Shimojo, Iwao Kunishima, Tohru Ozaki
-
Patent number: 7612397Abstract: A nonvolatile memory cell that can be mounted in a CMOS manufacturing process, and is capable of implementing high level of programming, reading and erasing ability. The memory cell is configured by a MOS transistor including two N-type first impurity diffusion layers formed separately on a P-type semiconductor substrate, and a first gate electrode formed above a first cannel region sandwiched by both diffusion layers through a first gate insulation film, a first capacitor comprising P-type second impurity diffusion layers formed on a well, and a second gate electrode formed above the diffusion layer through a second gate insulation film, and a second capacitor comprising the well adjacent to the second impurity diffusion layer, and a third gate electrode formed above the well through a third gate insulation film, wherein a different voltage can be applied to each of the capacitors.Type: GrantFiled: November 12, 2007Date of Patent: November 3, 2009Assignee: Sharp Kabushiki KaishaInventors: Naoki Ueda, Yoshimitsu Yamauchi
-
Publication number: 20090261396Abstract: In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a method includes forming a portion of the unidirectional transistor and a portion of a bidirectional transistor in or over a semiconductor material simultaneously. Other embodiments are described and claimed.Type: ApplicationFiled: October 21, 2008Publication date: October 22, 2009Inventor: Bishnu P. Gogoi
-
Publication number: 20090256184Abstract: A nonvolatile memory integrated circuit has a semiconductor substrate and a nonvolatile memory device on the semiconductor substrate. The device has a transistor and a capacitor on the semiconductor substrate, and a shared floating gate connecting the gate regions of the transistor and the capacitor. The transistor has at least a doping region defining the source and drain regions, as well as three other doping regions overlapping the source and drain regions. Also disclosed are a nonvolatile memory circuit with multiple such nonvolatile memory device, and methods for making the nonvolatile memory circuit with one or more such nonvolatile memory devices.Type: ApplicationFiled: April 14, 2008Publication date: October 15, 2009Applicant: Macronix International Co., Ltd.Inventors: Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
-
Publication number: 20090256183Abstract: A nonvolatile memory integrated circuit has a semiconductor substrate and a nonvolatile memory device on the semiconductor substrate. The device has a transistor and a capacitor on the semiconductor substrate, and a shared floating gate connecting the gate regions of the transistor and the capacitor. The transistor has at least a doping region defining the source and drain regions, as well as three other doping regions overlapping the source and drain regions. Also disclosed are a nonvolatile memory circuit with multiple such nonvolatile memory device, and methods for making the nonvolatile memory circuit with one or more such nonvolatile memory devices.Type: ApplicationFiled: April 14, 2008Publication date: October 15, 2009Applicant: Macronix International Co., LtdInventors: Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
-
Publication number: 20090251966Abstract: A semiconductor memory cell, semiconductor memory devices comprising a plurality of the semiconductor memory cells, and methods of using the semiconductor memory cell and devices are described. A semiconductor memory cell includes a substrate having a first conductivity type; a first region embedded in the substrate at a first location of the substrate and having a second conductivity type; a second region embedded in the substrate at a second location of the substrate and have the second conductivity type, such that at least a portion of the substrate having the first conductivity type is located between the first and second locations and functions as a floating body to store data in volatile memory; a trapping layer positioned in between the first and second locations and above a surface of the substrate; the trapping layer comprising first and second storage locations being configured to store data as nonvolatile memory independently of one another; and a control gate positioned above the trapping layer.Type: ApplicationFiled: April 8, 2009Publication date: October 8, 2009Inventor: Yuniarto Widjaja
-
Patent number: 7598556Abstract: A semiconductor device includes: first and second conductive layers; a first insulating film; a first plug; a second insulating film; a first opening; and a capacitor constituted by a lower electrode made of a first metal film formed on the wall and bottom of the first opening and electrically connected to the upper end of the first plug, a capacitive dielectric film made of a ferroelectric film formed on the lower electrode, and an upper electrode made of a second metal film formed on the capacitive dielectric film. The second conductive layer and the upper electrode are electrically connected to each other in the first and second insulating films.Type: GrantFiled: April 8, 2005Date of Patent: October 6, 2009Assignee: Panasonic CorporationInventors: Takumi Mikawa, Yuji Judai
-
Patent number: 7598558Abstract: In a complete CMOS SRAM having a memory cell composed of six MISFETs formed over a substrate, a capacitor element having a stack structure is formed of a lower electrode covering the memory cell, an upper electrode, and a capacitor insulating film (dielectric film) interposed between the lower electrode and the upper electrode. One electrode (the lower electrode) of the capacitor element is connected to one storage node of a flip-flop circuit, and the other electrode (the upper electrode) is connected to the other storage node. As a result, the storage node capacitance of the memory cell of the SRAM is increased to improve the soft error resistance.Type: GrantFiled: October 29, 2007Date of Patent: October 6, 2009Assignee: Renesas Technology Corp.Inventors: Naotaka Hashimoto, Yutaka Hoshino, Shuji Ikeda
-
Patent number: 7595522Abstract: According to the invention, there is provided a nonvolatile semiconductor memory having: a floating gate electrode formed on a gate insulating film on an element region isolated by an element isolation region on a semiconductor substrate; an inter-gate insulating film formed to cover a portion from an upper surface to a middle of a side surface of the floating gate electrode; and a control gate electrode formed on the floating gate electrode via the inter-gate insulating film, wherein a portion from the upper surface of the floating gate electrode to at least a middle of the portion of the side surface which is covered with the inter-gate insulating film has a tapered shape largely inclined to a direction perpendicular to a surface of the semiconductor substrate, compared to the other portion of the side surface.Type: GrantFiled: December 1, 2006Date of Patent: September 29, 2009Assignee: Kabushiki Kaisha ToshibaInventor: Yuji Takeuchi
-
Publication number: 20090230449Abstract: A non-volatile semiconductor storage device has: a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series; and a capacitor element area including capacitor elements. Each of the memory strings includes: a plurality of first conductive layers laminated on a substrate; and a plurality of first interlayer insulation layers formed between the plurality of first conductive layers. The capacitor element area includes: a plurality of second conductive layers laminated on a substrate and formed in the same layer as the first conductive layers; and a plurality of second interlayer insulation layers formed between the plurality of second conductive layers and formed in the same layer as the first interlayer insulation layers. A group of the adjacently-laminated second conductive layers is connected to a first potential, while another group thereof is connected to a second potential.Type: ApplicationFiled: March 16, 2009Publication date: September 17, 2009Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Takeshi SAKAGUCHI, Hiroyuki Nitsuta
-
Patent number: 7586141Abstract: A semiconductor device including a semiconductor substrate having a logic formation region in which a memory device is formed and a logic formation region in which a logic device is formed; a first impurity region formed in an upper surface of said semiconductor substrate in the logic formation region; a second impurity region formed in an upper surface of the semiconductor substrate in said logic formation region; a third impurity region formed in an upper surface of the first impurity region and having a conductivity type different from that of the second impurity region; a fourth region formed in an upper surface of the second impurity region and having a conductivity type different from that of the second impurity region; a first silicide film formed in an upper surface of the third impurity region; a capacitor formed above the first silicide film and electrically connected to the first silicide film; and a second silicide film formed in an upper surface of the fourth impurity region and having a larger tType: GrantFiled: December 11, 2007Date of Patent: September 8, 2009Assignee: Renesas Technology Corp.Inventor: Hiroki Shinkawata
-
Publication number: 20090201742Abstract: A single polycrystalline silicon floating gate nonvolatile memory cell has a MOS capacitor and a storage MOS transistor fabricated with dimensions that allow fabrication using current low voltage logic integrated circuit process. The MOS capacitor has a first plate connected to a gate of the storage MOS transistor to form a floating gate node. The physical size of the MOS capacitor is relatively large (approximately 10 time greater) when compared to a physical size of the storage MOS transistor to establish a large coupling ratio (approximately 90% between the second plate of the MOS capacitor and the floating gate node. When a voltage is applied to the second plate of the MOS capacitor and a voltage applied to the source region or drain region of the MOS transistor establishes a voltage field within the gate oxide of the MOS transistor such that Fowler-Nordheim edge tunnel is initiated.Type: ApplicationFiled: February 10, 2009Publication date: August 13, 2009Inventors: Peter Wung Lee, Fu-Chang Hsu
-
Patent number: 7566620Abstract: DRAM memory cells having a feature size of less than about 4F2 include vertical surround gate transistors that are configured to reduce any short channel effect on the reduced size memory cells. In addition, the memory cells may advantageously include reduced resistance word line contacts and reduced resistance bit line contacts, which may increase a speed of the memory device due to the reduced resistance of the word line and bit line contacts.Type: GrantFiled: July 31, 2006Date of Patent: July 28, 2009Assignee: Micron Technology, Inc.Inventor: Todd R. Abbott
-
Patent number: 7566926Abstract: The present invention provides a nonvolatile semiconductor memory that allows simultaneous implementation of high performance transistors in a low-voltage circuit region and transistors with high withstand voltages in a high-voltage circuit region.Type: GrantFiled: June 19, 2006Date of Patent: July 28, 2009Assignee: Kabushiki Kaisha ToshibaInventor: Yasuhiko Matsunaga
-
Publication number: 20090179246Abstract: A semiconductor device comprises a memory cell region, a peripheral circuit region and a boundary region. In the memory cell region, a concave lower electrode and a foundation layer have a same uppermost surface positioned in a height of H above the plane-A. In the boundary region, one concave lower conductive region and a foundation layer have a same uppermost surface positioned in a height of H above the plane-A.Type: ApplicationFiled: January 7, 2009Publication date: July 16, 2009Inventors: Yoshitaka NAKAMURA, Kenji KOMEDA, Ryota SUEWAKA, Noriaki IKEDA
-
Patent number: 7560760Abstract: A ferroelectric memory device includes a microelectronic substrate and a plurality of ferroelectric capacitors on the substrate, arranged as a plurality of row and columns in respective row and column directions. A plurality of parallel plate lines overlie the ferroelectric capacitors and extend along the row direction, wherein a plate line contacts ferroelectric capacitors in at least two adjacent rows. The plurality of plate lines may include a plurality of local plate lines, and the ferroelectric memory device may further include an insulating layer disposed on the local plate lines and a plurality of main plate lines disposed on the insulating layer and contacting the local plate lines through openings in the insulating layer. In some embodiments, ferroelectric capacitors in adjacent rows share a common upper electrode, and respective ones of the local plate lines are disposed on respective ones of the common upper electrodes.Type: GrantFiled: September 24, 2007Date of Patent: July 14, 2009Assignee: Samung Electronics Co., Ltd.Inventors: Hyun-Ho Kim, Dong-Jin Jung, Ki-Nam Kim, Sang-Don Nam, Kyu-Mann Lee
-
Patent number: 7547933Abstract: There are provided a capacitor lower electrode formed on an adhesive layer, whose surface roughness is 0.79 nm or less, and having a (111) orientation that is inclined from a perpendicular direction to an upper surface of a substrate by 2.3° or less, a ferroelectric layer having a structure the (111) orientation of which is inclined from the perpendicular direction to the upper surface of the substrate by 3.5° or less, and a capacitor upper electrode.Type: GrantFiled: October 29, 2003Date of Patent: June 16, 2009Assignee: Fujitsu Microelectronics LimitedInventors: Tomohiro Takamatsu, Junichi Watanabe, Ko Nakamura, Wensheng Wang, Naoyuki Sato, Aki Dote, Kenji Nomura, Yoshimasa Horii, Masaki Kurasawa, Kazuaki Takai
-
Publication number: 20090147580Abstract: Disclosed herein is a one-transistor (1T) floating-body Dynamic Random Access Memory (DRAM) cell device with a non-volatile function for implementing the high integration/high performance DRAM. The 1T floating-body DRAM cell device includes a floating body for storing information of the DRAM cell device, a source and a drain formed on respective sides of the floating body, a gate insulating layer formed on a top of the floating body, a gate electrode formed on a top of the gate insulating layer, a gate stack formed under the floating body and configured to have a charge storage node for storing electric charges, and a control electrode formed on a lower side of the gate stack or partially or completely surrounded by the gate stack. The DRAM cell device performs “write0” and “write1” operations or a read operation. The DRAM cell device performs a non-volatile program operation or a non-volatile erase operation.Type: ApplicationFiled: November 19, 2008Publication date: June 11, 2009Applicant: KYUNGPOOK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATIONInventor: Jong-Ho Lee
-
Publication number: 20090146701Abstract: A semiconductor device includes MOS transistors, capacitor elements, a voltage generating circuit, a contact plug, and a memory cell. The MOS transistor and the capacitor element are formed on a first one of the element regions and a second one of the element regions, respectively. In the voltage generating circuit, current paths of the MOS transistors are series-connected and the capacitor elements are connected to the source or drain of the MOS transistors. The contact plug is formed on the source or the drain to connect the MOS transistors or one of the MOS transistors and one of the capacitor elements. A distance between the gate and the contact plug both for a first one of the MOS transistors located in the final stage in the series connection is larger than that for a second one of the MOS transistors located in the initial stage in the series connection.Type: ApplicationFiled: December 2, 2008Publication date: June 11, 2009Inventors: Mitsuhiro NOGUCHI, Kenji GOMIKAWA
-
Publication number: 20090140310Abstract: A semiconductor device and a method for manufacturing the semiconductor device in which a micro controller unit (MCU) and a flash memory having the same structure as that of a logic circuit of the MCU are formed in the same chip.Type: ApplicationFiled: December 3, 2008Publication date: June 4, 2009Inventors: In-Hee Jang, Kun-Hyuk Lee
-
Patent number: 7541633Abstract: A PRAM and a fabricating method thereof are provided. The PRAM includes a transistor and a data storage capability. The data storage capability is connected to the transistor. The data storage includes a top electrode, a bottom electrode, and a porous PCM layer. The porous PCM layer is interposed between the top electrode and the bottom electrode.Type: GrantFiled: November 23, 2005Date of Patent: June 2, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Sang-mock Lee, Jin-heong Yim, Yoon-ho Khang, Jin-seo Noh, Dong-seok Suh
-
Salicided MOS device and one-sided salicided MOS device, and simultaneous fabrication method thereof
Patent number: 7537991Abstract: A method of fabricating a salicided MOS and a one-sided salicided MOS device on a semiconductor substrate. A conformal oxide layer and an organic layer are sequentially formed on first and second MOS devices and the substrate. The first MOS has a first gate structure, a first spacer and first and second doped regions. The second MOS has a second gate structure, a second spacer and third and fourth doped regions. Anisotropic etching is performed to remove part of the organic layer until the oxide layer on the first and the second gate structures is exposed, wherein a remaining organic layer is left above the substrate. The oxide layer on the first and the second gate structures is removed. The remaining organic layer is removed. The oxide layer on the first, second, and third doped regions is removed. Thus, a silicide layer cannot form on the fourth doped region.Type: GrantFiled: March 18, 2005Date of Patent: May 26, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Dun-Nian Yaung, Sou-Kuo Wu, Ho-Ching Chen -
Patent number: 7535051Abstract: A example embodiment may provide a memory device that may include an active pattern on a semiconductor substrate, a first charge trapping layer pattern on the active pattern, a first gate electrode on the first charge trapping layer pattern, a second charge trapping layer pattern on a sidewall of the active pattern in a first direction, a second gate electrode on the second charge trapping layer pattern in the first direction, and/or a source/drain region in the active pattern. The memory device may have improved integration by forming a plurality of charge trapping layer patterns on the same active pattern.Type: GrantFiled: January 12, 2007Date of Patent: May 19, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Na-Young Kim, Chang-Woo Oh, Sung-Hwan Kim, Yong-Lack Choi
-
Patent number: 7531861Abstract: Trench capacitors that have insulating layer collars in undercut regions and methods of fabricating such trench capacitors are provided. Some methods of fabricating a trench capacitor include forming a first layer on a substrate. A second layer is formed on the first layer opposite to the substrate. A mask is formed that has an opening on top of the first and second layers. A first trench is formed by removing a portion of the first and second layers through the opening in the mask. A portion of the first layer under the second layer is removed to form an undercut region under the second layer. An insulating layer collar is formed in the undercut region under the second layer. A second trench is formed that extends from the first trench by removing a portion of the substrate through the opening in the mask. A buried plate is formed in the substrate along the second trench. A dielectric layer is formed on an inner wall and bottom of the second trench.Type: GrantFiled: February 19, 2008Date of Patent: May 12, 2009Assignee: Samsung Electronics Co., LtdInventors: Suk-jin Chung, Seung-hwan Lee, Sung-tae Kim, Young-sun Kim, Jae-soon Lim, Young-geun Park
-
Patent number: 7528468Abstract: A capacitor assembly (82) is formed on a substrate (20). The capacitor assembly a first conductive plate (38) and a second conductive plate (60) formed over the substrate such that the second conductive plate is separated from the first conductive plate by a distance. A conductive trace (40) is formed over the substrate that is connected to the first conductive plate and extends away from the capacitor assembly. A conductive shield (62) is formed over at least a portion of the conductive trace that is separated from the first and second conductive plates to control a fringe capacitance between the second conductive plate and the conductive trace.Type: GrantFiled: September 25, 2006Date of Patent: May 5, 2009Assignee: Freescale Semiconductor, Inc.Inventors: Andrew C. McNeil, Dubravka Bilic, Stephen R. Hooper
-
Patent number: 7521746Abstract: A ferroelectric random access memory (FRAM) includes a semiconductor substrate and an interlayer insulating layer on the substrate. A diffusion preventive layer is on the interlayer insulating layer. The diffusion preventive layer and the interlayer insulating layer have two node contact holes formed therein. Node conductive layer patterns are aligned with the node contact holes, respectively, and are disposed so as to protrude upward from the diffusion preventive layer. Lower electrodes are disposed on the diffusion preventive layer that cover the node conductive layer patterns, respectively. Thicknesses of the lower electrodes are gradually reduced from a line extending from upper surfaces of the node conductive layer patterns toward the diffusion preventive layer.Type: GrantFiled: April 23, 2008Date of Patent: April 21, 2009Assignee: Samsung Electronics Co., Ltd.Inventor: Moon-Sook Lee
-
Patent number: 7521743Abstract: Disclosed is a nonvolatile magnetic memory device including a magntoresistance device having a recording layer formed of a ferromagnetic material for storing information by use of variation in resistance depending on the magnetization inversion state. The plan-view shape of the recording layer includes a pseudo-rhombic shape having four sides, at least two of the four sides each include a smooth curve having a central portion curved toward the center of the pseudo-rhombic shape. The easy axis of magnetization of the recording layer is substantially parallel to the longer axis of the pseudo-rhombic shape. The hard axis of magnetization of the recording layer is substantially parallel to the shorter axis of the pseudo-rhombic shape. The sides constituting the plan-view shape of the recording layer are smoothly connected to each other.Type: GrantFiled: June 8, 2005Date of Patent: April 21, 2009Assignee: Sony CorporationInventor: Hajime Yamagishi
-
Patent number: 7514318Abstract: A method for fabricating non-volatile memory cells is provided. The method includes providing a substrate, forming a first dopant region in the substrate, forming a second dopant region in the first dopant region, growing a first isolation region over a first portion of the substrate, the first dopant region, and the second dopant region, growing a second isolation region over a second portion of the substrate, the first dopant region, and the second dopant region, defining a contact region in the second dopant region, the contact region extending between the first isolation region and the second isolation region, depositing a gate oxide layer to form a first gate dielectric atop the first isolation region and a portion of the contact region, and overlaying a gate conductive layer on top of the gate oxide layer to form a first gate conductor atop the first gate dielectric.Type: GrantFiled: January 18, 2008Date of Patent: April 7, 2009Assignee: Micrel, Inc.Inventor: Paul M. Moore
-
Patent number: 7514704Abstract: In a method of forming a phase-change memory device, a variable resistance member may be formed on a s semiconductor substrate having a contact region, and a first electrode may be formed to contact a first portion of the variable resistance member and to be electrically connected to the contact region. A second electrode may be formed so as to contact a second portion of the variable resistance member.Type: GrantFiled: January 4, 2005Date of Patent: April 7, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Young-Tae Kim, Young-Nam Hwang, Tai-Kyung Kim, Won-Young Chung, Keun-Ho Lee
-
Publication number: 20090072289Abstract: A semiconductor device capable of reducing a thickness, an electronic product employing the same, and a method of fabricating the same are provided. The method of fabricating a semiconductor device includes preparing a semiconductor substrate having first and second active regions. A first transistor in the first active region includes a first gate pattern and first impurity regions. A second transistor the second active region includes a second gate pattern and second impurity regions. A first conductive pattern is on the first transistor, wherein at least a part of the first conductive pattern is disposed at a same distance from an upper surface of the semiconductor substrate as at least a part of the second gate pattern. The first conductive pattern may be formed on the first transistor while the second transistor is formed.Type: ApplicationFiled: September 18, 2008Publication date: March 19, 2009Inventors: Dae-Ik Kim, Yong-Il Kim
-
Patent number: 7504683Abstract: A non-volatile memory element includes a transistor for selecting the element and a capacitor for recording a binary value by electrical breakdown of an insulating layer (13) of the capacitor. A structure of the memory element is modified in order to allow a higher degree of integration of the element within an electronic circuit of the MOS type. In addition, the memory element is made more robust with respect to a high electrical voltage (VDD) used for recording the binary value. The transistor includes a drain in the substrate with electric field drift in a longitudinal direction extending towards the capacitor. The electric field drift region for the drain includes a first extension underneath the gate of the transistor opposite the source and a second extension underneath the insulating layer of the capacitor. Doping of the substrate for the electric field drift region is limited to a region substantially corresponding to a distance between the gate and an electrode of the capacitor.Type: GrantFiled: November 15, 2006Date of Patent: March 17, 2009Assignees: STMicroelectronics S.A., STMicroelectronics (Crolles 2) SASInventors: Philippe Candelier, Thierry Devoivre, Emmanuel Josse, Sébastien Lefebvre
-
Publication number: 20090065838Abstract: An improved semiconductor memory device having a silicon on insulator (SOI) structure. Exemplary devices provide improved charge injection into the device's floating gate electrode. Exemplary devices may include a semiconductor substrate including a transistor forming region and a capacitor forming region; a MOSFET; a MOS capacitor; a projection formed within a periphery of the capacitor electrode of the MOS capacitor; and a floating gate electrode extending from the channel region of the MOSFET to overlap the projection of the capacitor electrode, with a gate insulating film interposed therebetween. The projection may include an inclined surface which may have a concave shape and/or the projection may extend above a capacitor groove having a undercut portion beneath the projection.Type: ApplicationFiled: July 11, 2008Publication date: March 12, 2009Inventor: Takeshi Nagao
-
Patent number: 7485915Abstract: A semiconductor device includes a capacitor which includes a capacitor insulating film at least including a first insulating film and a ferroelectric film formed in contact with the first insulating film, containing a compound of a preset metal element and a constituent element of the first insulating film as a main component and having a dielectric constant larger than that of the first insulating film, a first capacitor electrode formed of one of Cu and a material containing Cu as a main component, and a second capacitor electrode formed to sandwich the capacitor insulating film in cooperation with the first capacitor electrode.Type: GrantFiled: May 5, 2006Date of Patent: February 3, 2009Assignee: Kabushiki Kaisha ToshibaInventors: Hayato Nasu, Takamasa Usui, Hideki Shibata
-
Publication number: 20090014766Abstract: In one embodiment, a non-volatile memory device includes an isolation film defining an active region in a semiconductor substrate; a tunnel insulating film located on the active region; a control gate located on the isolation film; an inter-gate dielectric film parallel to the control gate and located between the control gate and the isolation film; an electrode overlapped by the control gate and the inter-gate dielectric film, wherein the electrode extends over the tunnel insulating film on the active region to form a floating gate; and a source region and a drain region formed in the active region on both sides of the floating gate.Type: ApplicationFiled: June 10, 2008Publication date: January 15, 2009Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventor: Myoung-Soo KIM
-
Patent number: 7476924Abstract: A semiconductor device having a recessed landing pad includes a semiconductor substrate and a lower interlayer dielectric layer disposed on the semiconductor substrate. A first landing pad is disposed through the lower interlayer dielectric layer to be in contact with the semiconductor substrate. A second landing pad is disposed through the lower interlayer dielectric layer to also be in contact with the semiconductor substrate. A metal silicide layer is disposed on the second landing pad. The metal silicide layer is disposed lower than a top surface of the first landing pad. An intermediate interlayer dielectric layer is disposed on the lower interlayer dielectric layer. A conductive line is disposed on the intermediate interlayer dielectric layer. A contact plug is disposed between the conductive line and the metal silicide layer. A designed contact area between the metal silicide layer and the contact plug is protected against inadvertent etching.Type: GrantFiled: October 18, 2006Date of Patent: January 13, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Je-Min Park, Ho-Jin Oh
-
Publication number: 20090008690Abstract: The data retention characteristics of a nonvolatile memory circuit are improved. In a memory cell array on a main surface of a semiconductor substrate, a floating gate electrode for accumulating charges for information is arranged. The floating gate electrode is covered with a cap insulating film and a pattern of an insulating film 4a formed thereon. Further, over the entire main surface of the semiconductor substrate, an insulating film 2a is deposited so that it covers the pattern of the insulating film 4a and a gate electrode. The insulating film 2a is formed by a silicon nitride film formed by the plasma CVD method. The insulating film 4a is formed by a silicon nitride film formed by the low-pressure CVD method. By the provision of such an insulating film 4a, it is possible to suppress or prevent water or hydrogen ions from diffusing to the floating gate electrode, and therefore, the data retention characteristics of a flash memory can be improved.Type: ApplicationFiled: June 12, 2008Publication date: January 8, 2009Inventors: Kazuyoshi SHIBA, Hideyuki Yashima
-
Patent number: 7473968Abstract: A semiconductor device having high reliability, in which TFTs with appropriate structures for the circuit functions are arranged, is provided. Gate insulating films (115) and (116) of a driver TFT are designed thinner than a gate insulating film (117) of a pixel TFT in a semiconductor device having a driver circuit and a pixel section on the same substrate. In addition, the gate insulating films (115) and (116) of the driver TFT and a dielectric (118) of a storage capacitor are formed at the same time, so that the dielectric (118) may be extremely thin, and a large capacity can be secured.Type: GrantFiled: May 2, 2005Date of Patent: January 6, 2009Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Hiroshi Shibata, Takeshi Fukunaga
-
Patent number: 7473955Abstract: A fabricated cylinder capacitor having two or more layers is provided, each layer having a bottom plate and top plate portions. A first set of vias connect the bottom plate portions and a second set of vias connect the top plate portions. The bottom plate portions and the first set of vias comprise a bottom plate and the top plate portions and the second set of vias comprise a top plate of the capacitor. The layers may comprise five metal layers and may be produced using semiconductor fabrication methods. Also provided is a capacitor array having two or more cylinder capacitors where a set of connectors connect all top plates of the capacitors. The capacitor array may be used in a capacitive DAC, the capacitors being connected according to the architecture of the DAC. The capacitive DAC may be used in a SAR ADC.Type: GrantFiled: March 7, 2006Date of Patent: January 6, 2009Assignee: Alvand Technologies, Inc.Inventors: Mehrdad Heshami, Mansour Keramat
-
Patent number: 7470947Abstract: A semiconductor memory includes memory cell transistors comprising a tunnel insulating film, a floating gate electrode, a first insulating film, a control gate electrode, and a first metal salicide film; low-voltage transistors comprising a first p-type source region and a first p-type drain region, a first gate insulating film, and a first gate electrode of an n conductivity type having the same dose of a first p-type impurity as with the first p-type source region; and high-voltage transistors comprising a second p-type source region and a second p-type drain region, a second gate insulating film thicker than the first gate insulating film, and a second gate electrode of an n conductivity type having the same dose of a second p-type impurity as with the second p-type source region.Type: GrantFiled: September 15, 2005Date of Patent: December 30, 2008Assignee: Kabushiki Kaisha ToshibaInventor: Masato Endo
-
Publication number: 20080316826Abstract: In a semiconductor device, a first transistor of an SOI structure has a source region, a drain region, a body region positioned between the source region and the drain region, and a gate electrode positioned above the body region. A first capacitor of the SOI structure has a first terminal electrically connected to a gate electrode of the first transistor, and a second terminal. The semiconductor device stores data in a nonvolatile manner in accordance with carriers accumulated in a first node electrically connecting the gate electrode of the first transistor and the first terminal of the first capacitor.Type: ApplicationFiled: June 3, 2008Publication date: December 25, 2008Inventor: Tadaaki Yamauchi
-
Patent number: 7468527Abstract: A thin film transistor substrate and a fabricating method simplify a process and enlarge a capacitance value of a storage capacitor without any reduction of aperture ratio. A transparent first conductive layer and an opaque second conductive layer of a double-layer structured gate line are formed having a step coverage. A pixel electrode is provided on the gate insulating film within a pixel hole of said pixel area passing through the passivation film to be connected to the thin film transistor. A storage capacitor overlaps with the pixel electrode with having the gate insulating film therebetween and has a lower storage electrode protruded from the first conductive layer.Type: GrantFiled: May 26, 2005Date of Patent: December 23, 2008Assignee: LG Display Co., Ltd.Inventor: Byung Chul Ahn
-
Patent number: 7465971Abstract: A configuration memory cell (“CRAM”) for a field programmable gate array (“FPGA”) integrated circuit (“IC”) device is given increased resistance to single event upset (“SEU”). A portion of the gate structure of the input node of the CRAM is increased in size relative to the nominal size of the remainder of the gate structure. Part of the enlarged gate structure is located capacitively adjacent to an N-well region of the IC, and another part is located capacitively adjacent to a P-well region of the IC. This arrangement gives the input node increased capacitance to resist SEU, regardless of the logical level of the input node. The invention is also applicable to any node of any type of memory cell for which increased resistance to SEU is desired.Type: GrantFiled: December 5, 2007Date of Patent: December 16, 2008Assignee: Altera CorporationInventors: Lakhbeer S. Sidhu, Irfan Rahim, Jeffrey Watt, John Turner
-
Publication number: 20080296647Abstract: The present invention provides a semiconductor memory device comprising a semiconductor substrate formed of a support substrate, an insulating film formed over the support substrate and a semiconductor layer formed over the insulating film; a MOSFET having a source layer and a drain layer both formed in the semiconductor layer of a transistor forming area set to the semiconductor substrate, and a channel region provided between the source and drain layers; a MOS capacitor having a capacitor electrode which is formed in the semiconductor layer of a capacitor forming area set to the semiconductor substrate and in which an impurity of the same type as the source layer is diffused; and a device isolation layer which insulates and separates between the semiconductor layer formed with the MOSFET and the semiconductor layer formed with the MOS capacitor, wherein the capacitor electrode of the MOS capacitor is formed in polygon and slanting faces enlarged toward the insulating film are provided therearound, and whereType: ApplicationFiled: April 18, 2008Publication date: December 4, 2008Applicant: OKI ELECTRIC INDUSTRY CO., LTDInventor: Tomohiko Tatsumi
-
Patent number: 7459741Abstract: A semiconductor memory device excellent in data holding characteristics even when a cell area is reduced is disclosed. According to one aspect of the present invention, a semiconductor memory device comprises a transistor including a source, a drain and a channel region disposed in a semiconductor substrate, and including a gate electrode disposed through a gate insulator on a surface of the semiconductor substrate of the channel region, a capacitor connected to the channel region, a first wiring line electrically connected to the gate electrode, and a second wiring line electrically connected to the drain.Type: GrantFiled: March 28, 2006Date of Patent: December 2, 2008Assignee: Kabushiki Kaisha ToshibaInventors: Masaru Kidoh, Hideaki Aochi, Ryota Katsumata, Masaru Kito
-
Publication number: 20080291728Abstract: A non-volatile memory cell is provided that includes: a substrate including diffusion regions for a read-out transistor; a capacitor formed in a poly-silicon layer adjacent the substrate, the capacitor including a floating gate for the read-out transistor and a control gate, the floating gate and the control gate each having finger extensions, the finger extensions from the floating gate interdigitating with the finger extensions from the control gate; and a programming line coupled to the control gate.Type: ApplicationFiled: April 24, 2008Publication date: November 27, 2008Inventors: Esin Terzioglu, Gil I. Winograd, Morteza Cyrus Afghahi
-
Publication number: 20080290386Abstract: Methods and apparatus for increasing the coupling coefficient of a floating gate memory device includes an MOS capacitors with self-aligning gate structures that provide increased capacitance per unit area over conventional MOS capacitors.Type: ApplicationFiled: May 22, 2008Publication date: November 27, 2008Inventor: Fredrick Jenne
-
Patent number: 7456462Abstract: A layered capacitor having top and bottom plates formed from multiple layers. The capacitor has a bottom layer comprising a bottom plate portion and at least one upper layer, each upper layer comprising top and bottom plate portions. A first set of vias connect the bottom plate portions and a second set of vias connect the top plate portions. The bottom plate portions and the first set of vias comprise a U-shaped bottom plate and the top plate portions and the second set of vias comprise a top plate of the capacitor device. The layers may comprise metal layers produced using semiconductor fabrication methods. Also provided is a capacitor array having two or more capacitors where connectors connect all top plate portions of the capacitors. The capacitor array may be used in a capacitive DAC, which may be used in a SAR ADC.Type: GrantFiled: March 7, 2006Date of Patent: November 25, 2008Assignee: Alvand Technologies, Inc.Inventors: Mehrdad Heshami, Mansour Keramat