Capacitor For Signal Storage In Combination With Non-volatile Storage Means Patents (Class 257/298)
  • Publication number: 20090303797
    Abstract: A semiconductor device includes a semiconductor substrate, a gate insulating film formed on the substrate, a first gate electrode formed on the gate insulating film, source and drain regions formed in the substrate so as to sandwich the first gate electrode, an intergate insulating film formed on the first gate electrode and including an opening, a second gate electrode formed on the intergate insulating film and electrically connected to the first gate electrode through the opening, and a boost electrode formed on the intergate insulating film and electrically isolated from the first gate electrode and the second gate electrode.
    Type: Application
    Filed: June 5, 2009
    Publication date: December 10, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Kikuko SUGIMAE, Yasushi Kameda
  • Publication number: 20090302365
    Abstract: Some embodiments include memory cells that contain a dynamic random access memory (DRAM) element and a nonvolatile memory (NVM) element. The DRAM element contains two types of DRAM nanoparticles that differ in work function. The NVM contains two types of NVM nanoparticles that differ in trapping depth. The NVM nanoparticles may be in vertically displaced charge-trapping planes. The memory cell contains a tunnel dielectric, and one of the charge-trapping planes of the NVM may be further from the tunnel dielectric than the other. The NVM charge-trapping plane that is further from the tunnel dielectric may contain larger NVM nanoparticles than the other NVM charge-trapping plane. The DRAM element may contain a single charge-trapping plane that has both types of DRAM nanoparticles therein. The memory cells may be incorporated into electronic systems.
    Type: Application
    Filed: October 15, 2007
    Publication date: December 10, 2009
    Inventor: Arup Bhattacharyya
  • Patent number: 7612400
    Abstract: An MIM device includes a lower electrode of a metal nitride film, a hysteresis film of an oxide film containing Nb formed on the lower electrode, and an upper electrode of a metal nitride film formed on the hysteresis film.
    Type: Grant
    Filed: November 26, 2007
    Date of Patent: November 3, 2009
    Assignee: Fujitsu Limited
    Inventors: Teruo Kurahashi, Hideharu Shido, Kenji Ishikawa, Takeo Nagata, Yasuyoshi Mishima, Yukie Sakita
  • Patent number: 7612398
    Abstract: A semiconductor storage device wherein a plurality of ferroelectric capacitors are sufficiently covered with a hydrogen barrier film formed thereon comprises a field effect transistor formed on one surface side of a semiconductor substrate, a plurality of ferroelectric capacitors formed close to each other above the field effect transistor, an insulting film configured to cover the plurality of ferroelectric capacitors and planarised a space between adjacent ferroelectric capacitors in a self-aligned manner during formation thereof, and a hydrogen barrier film formed on the insulating film.
    Type: Grant
    Filed: September 1, 2004
    Date of Patent: November 3, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yoshinori Kumura, Yoshiro Shimojo, Iwao Kunishima, Tohru Ozaki
  • Patent number: 7612397
    Abstract: A nonvolatile memory cell that can be mounted in a CMOS manufacturing process, and is capable of implementing high level of programming, reading and erasing ability. The memory cell is configured by a MOS transistor including two N-type first impurity diffusion layers formed separately on a P-type semiconductor substrate, and a first gate electrode formed above a first cannel region sandwiched by both diffusion layers through a first gate insulation film, a first capacitor comprising P-type second impurity diffusion layers formed on a well, and a second gate electrode formed above the diffusion layer through a second gate insulation film, and a second capacitor comprising the well adjacent to the second impurity diffusion layer, and a third gate electrode formed above the well through a third gate insulation film, wherein a different voltage can be applied to each of the capacitors.
    Type: Grant
    Filed: November 12, 2007
    Date of Patent: November 3, 2009
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Naoki Ueda, Yoshimitsu Yamauchi
  • Publication number: 20090261396
    Abstract: In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a method includes forming a portion of the unidirectional transistor and a portion of a bidirectional transistor in or over a semiconductor material simultaneously. Other embodiments are described and claimed.
    Type: Application
    Filed: October 21, 2008
    Publication date: October 22, 2009
    Inventor: Bishnu P. Gogoi
  • Publication number: 20090256184
    Abstract: A nonvolatile memory integrated circuit has a semiconductor substrate and a nonvolatile memory device on the semiconductor substrate. The device has a transistor and a capacitor on the semiconductor substrate, and a shared floating gate connecting the gate regions of the transistor and the capacitor. The transistor has at least a doping region defining the source and drain regions, as well as three other doping regions overlapping the source and drain regions. Also disclosed are a nonvolatile memory circuit with multiple such nonvolatile memory device, and methods for making the nonvolatile memory circuit with one or more such nonvolatile memory devices.
    Type: Application
    Filed: April 14, 2008
    Publication date: October 15, 2009
    Applicant: Macronix International Co., Ltd.
    Inventors: Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
  • Publication number: 20090256183
    Abstract: A nonvolatile memory integrated circuit has a semiconductor substrate and a nonvolatile memory device on the semiconductor substrate. The device has a transistor and a capacitor on the semiconductor substrate, and a shared floating gate connecting the gate regions of the transistor and the capacitor. The transistor has at least a doping region defining the source and drain regions, as well as three other doping regions overlapping the source and drain regions. Also disclosed are a nonvolatile memory circuit with multiple such nonvolatile memory device, and methods for making the nonvolatile memory circuit with one or more such nonvolatile memory devices.
    Type: Application
    Filed: April 14, 2008
    Publication date: October 15, 2009
    Applicant: Macronix International Co., Ltd
    Inventors: Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
  • Publication number: 20090251966
    Abstract: A semiconductor memory cell, semiconductor memory devices comprising a plurality of the semiconductor memory cells, and methods of using the semiconductor memory cell and devices are described. A semiconductor memory cell includes a substrate having a first conductivity type; a first region embedded in the substrate at a first location of the substrate and having a second conductivity type; a second region embedded in the substrate at a second location of the substrate and have the second conductivity type, such that at least a portion of the substrate having the first conductivity type is located between the first and second locations and functions as a floating body to store data in volatile memory; a trapping layer positioned in between the first and second locations and above a surface of the substrate; the trapping layer comprising first and second storage locations being configured to store data as nonvolatile memory independently of one another; and a control gate positioned above the trapping layer.
    Type: Application
    Filed: April 8, 2009
    Publication date: October 8, 2009
    Inventor: Yuniarto Widjaja
  • Patent number: 7598556
    Abstract: A semiconductor device includes: first and second conductive layers; a first insulating film; a first plug; a second insulating film; a first opening; and a capacitor constituted by a lower electrode made of a first metal film formed on the wall and bottom of the first opening and electrically connected to the upper end of the first plug, a capacitive dielectric film made of a ferroelectric film formed on the lower electrode, and an upper electrode made of a second metal film formed on the capacitive dielectric film. The second conductive layer and the upper electrode are electrically connected to each other in the first and second insulating films.
    Type: Grant
    Filed: April 8, 2005
    Date of Patent: October 6, 2009
    Assignee: Panasonic Corporation
    Inventors: Takumi Mikawa, Yuji Judai
  • Patent number: 7598558
    Abstract: In a complete CMOS SRAM having a memory cell composed of six MISFETs formed over a substrate, a capacitor element having a stack structure is formed of a lower electrode covering the memory cell, an upper electrode, and a capacitor insulating film (dielectric film) interposed between the lower electrode and the upper electrode. One electrode (the lower electrode) of the capacitor element is connected to one storage node of a flip-flop circuit, and the other electrode (the upper electrode) is connected to the other storage node. As a result, the storage node capacitance of the memory cell of the SRAM is increased to improve the soft error resistance.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: October 6, 2009
    Assignee: Renesas Technology Corp.
    Inventors: Naotaka Hashimoto, Yutaka Hoshino, Shuji Ikeda
  • Patent number: 7595522
    Abstract: According to the invention, there is provided a nonvolatile semiconductor memory having: a floating gate electrode formed on a gate insulating film on an element region isolated by an element isolation region on a semiconductor substrate; an inter-gate insulating film formed to cover a portion from an upper surface to a middle of a side surface of the floating gate electrode; and a control gate electrode formed on the floating gate electrode via the inter-gate insulating film, wherein a portion from the upper surface of the floating gate electrode to at least a middle of the portion of the side surface which is covered with the inter-gate insulating film has a tapered shape largely inclined to a direction perpendicular to a surface of the semiconductor substrate, compared to the other portion of the side surface.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: September 29, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yuji Takeuchi
  • Publication number: 20090230449
    Abstract: A non-volatile semiconductor storage device has: a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series; and a capacitor element area including capacitor elements. Each of the memory strings includes: a plurality of first conductive layers laminated on a substrate; and a plurality of first interlayer insulation layers formed between the plurality of first conductive layers. The capacitor element area includes: a plurality of second conductive layers laminated on a substrate and formed in the same layer as the first conductive layers; and a plurality of second interlayer insulation layers formed between the plurality of second conductive layers and formed in the same layer as the first interlayer insulation layers. A group of the adjacently-laminated second conductive layers is connected to a first potential, while another group thereof is connected to a second potential.
    Type: Application
    Filed: March 16, 2009
    Publication date: September 17, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Takeshi SAKAGUCHI, Hiroyuki Nitsuta
  • Patent number: 7586141
    Abstract: A semiconductor device including a semiconductor substrate having a logic formation region in which a memory device is formed and a logic formation region in which a logic device is formed; a first impurity region formed in an upper surface of said semiconductor substrate in the logic formation region; a second impurity region formed in an upper surface of the semiconductor substrate in said logic formation region; a third impurity region formed in an upper surface of the first impurity region and having a conductivity type different from that of the second impurity region; a fourth region formed in an upper surface of the second impurity region and having a conductivity type different from that of the second impurity region; a first silicide film formed in an upper surface of the third impurity region; a capacitor formed above the first silicide film and electrically connected to the first silicide film; and a second silicide film formed in an upper surface of the fourth impurity region and having a larger t
    Type: Grant
    Filed: December 11, 2007
    Date of Patent: September 8, 2009
    Assignee: Renesas Technology Corp.
    Inventor: Hiroki Shinkawata
  • Publication number: 20090201742
    Abstract: A single polycrystalline silicon floating gate nonvolatile memory cell has a MOS capacitor and a storage MOS transistor fabricated with dimensions that allow fabrication using current low voltage logic integrated circuit process. The MOS capacitor has a first plate connected to a gate of the storage MOS transistor to form a floating gate node. The physical size of the MOS capacitor is relatively large (approximately 10 time greater) when compared to a physical size of the storage MOS transistor to establish a large coupling ratio (approximately 90% between the second plate of the MOS capacitor and the floating gate node. When a voltage is applied to the second plate of the MOS capacitor and a voltage applied to the source region or drain region of the MOS transistor establishes a voltage field within the gate oxide of the MOS transistor such that Fowler-Nordheim edge tunnel is initiated.
    Type: Application
    Filed: February 10, 2009
    Publication date: August 13, 2009
    Inventors: Peter Wung Lee, Fu-Chang Hsu
  • Patent number: 7566620
    Abstract: DRAM memory cells having a feature size of less than about 4F2 include vertical surround gate transistors that are configured to reduce any short channel effect on the reduced size memory cells. In addition, the memory cells may advantageously include reduced resistance word line contacts and reduced resistance bit line contacts, which may increase a speed of the memory device due to the reduced resistance of the word line and bit line contacts.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: July 28, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Todd R. Abbott
  • Patent number: 7566926
    Abstract: The present invention provides a nonvolatile semiconductor memory that allows simultaneous implementation of high performance transistors in a low-voltage circuit region and transistors with high withstand voltages in a high-voltage circuit region.
    Type: Grant
    Filed: June 19, 2006
    Date of Patent: July 28, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yasuhiko Matsunaga
  • Publication number: 20090179246
    Abstract: A semiconductor device comprises a memory cell region, a peripheral circuit region and a boundary region. In the memory cell region, a concave lower electrode and a foundation layer have a same uppermost surface positioned in a height of H above the plane-A. In the boundary region, one concave lower conductive region and a foundation layer have a same uppermost surface positioned in a height of H above the plane-A.
    Type: Application
    Filed: January 7, 2009
    Publication date: July 16, 2009
    Inventors: Yoshitaka NAKAMURA, Kenji KOMEDA, Ryota SUEWAKA, Noriaki IKEDA
  • Patent number: 7560760
    Abstract: A ferroelectric memory device includes a microelectronic substrate and a plurality of ferroelectric capacitors on the substrate, arranged as a plurality of row and columns in respective row and column directions. A plurality of parallel plate lines overlie the ferroelectric capacitors and extend along the row direction, wherein a plate line contacts ferroelectric capacitors in at least two adjacent rows. The plurality of plate lines may include a plurality of local plate lines, and the ferroelectric memory device may further include an insulating layer disposed on the local plate lines and a plurality of main plate lines disposed on the insulating layer and contacting the local plate lines through openings in the insulating layer. In some embodiments, ferroelectric capacitors in adjacent rows share a common upper electrode, and respective ones of the local plate lines are disposed on respective ones of the common upper electrodes.
    Type: Grant
    Filed: September 24, 2007
    Date of Patent: July 14, 2009
    Assignee: Samung Electronics Co., Ltd.
    Inventors: Hyun-Ho Kim, Dong-Jin Jung, Ki-Nam Kim, Sang-Don Nam, Kyu-Mann Lee
  • Patent number: 7547933
    Abstract: There are provided a capacitor lower electrode formed on an adhesive layer, whose surface roughness is 0.79 nm or less, and having a (111) orientation that is inclined from a perpendicular direction to an upper surface of a substrate by 2.3° or less, a ferroelectric layer having a structure the (111) orientation of which is inclined from the perpendicular direction to the upper surface of the substrate by 3.5° or less, and a capacitor upper electrode.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: June 16, 2009
    Assignee: Fujitsu Microelectronics Limited
    Inventors: Tomohiro Takamatsu, Junichi Watanabe, Ko Nakamura, Wensheng Wang, Naoyuki Sato, Aki Dote, Kenji Nomura, Yoshimasa Horii, Masaki Kurasawa, Kazuaki Takai
  • Publication number: 20090147580
    Abstract: Disclosed herein is a one-transistor (1T) floating-body Dynamic Random Access Memory (DRAM) cell device with a non-volatile function for implementing the high integration/high performance DRAM. The 1T floating-body DRAM cell device includes a floating body for storing information of the DRAM cell device, a source and a drain formed on respective sides of the floating body, a gate insulating layer formed on a top of the floating body, a gate electrode formed on a top of the gate insulating layer, a gate stack formed under the floating body and configured to have a charge storage node for storing electric charges, and a control electrode formed on a lower side of the gate stack or partially or completely surrounded by the gate stack. The DRAM cell device performs “write0” and “write1” operations or a read operation. The DRAM cell device performs a non-volatile program operation or a non-volatile erase operation.
    Type: Application
    Filed: November 19, 2008
    Publication date: June 11, 2009
    Applicant: KYUNGPOOK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
    Inventor: Jong-Ho Lee
  • Publication number: 20090146701
    Abstract: A semiconductor device includes MOS transistors, capacitor elements, a voltage generating circuit, a contact plug, and a memory cell. The MOS transistor and the capacitor element are formed on a first one of the element regions and a second one of the element regions, respectively. In the voltage generating circuit, current paths of the MOS transistors are series-connected and the capacitor elements are connected to the source or drain of the MOS transistors. The contact plug is formed on the source or the drain to connect the MOS transistors or one of the MOS transistors and one of the capacitor elements. A distance between the gate and the contact plug both for a first one of the MOS transistors located in the final stage in the series connection is larger than that for a second one of the MOS transistors located in the initial stage in the series connection.
    Type: Application
    Filed: December 2, 2008
    Publication date: June 11, 2009
    Inventors: Mitsuhiro NOGUCHI, Kenji GOMIKAWA
  • Publication number: 20090140310
    Abstract: A semiconductor device and a method for manufacturing the semiconductor device in which a micro controller unit (MCU) and a flash memory having the same structure as that of a logic circuit of the MCU are formed in the same chip.
    Type: Application
    Filed: December 3, 2008
    Publication date: June 4, 2009
    Inventors: In-Hee Jang, Kun-Hyuk Lee
  • Patent number: 7541633
    Abstract: A PRAM and a fabricating method thereof are provided. The PRAM includes a transistor and a data storage capability. The data storage capability is connected to the transistor. The data storage includes a top electrode, a bottom electrode, and a porous PCM layer. The porous PCM layer is interposed between the top electrode and the bottom electrode.
    Type: Grant
    Filed: November 23, 2005
    Date of Patent: June 2, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-mock Lee, Jin-heong Yim, Yoon-ho Khang, Jin-seo Noh, Dong-seok Suh
  • Patent number: 7537991
    Abstract: A method of fabricating a salicided MOS and a one-sided salicided MOS device on a semiconductor substrate. A conformal oxide layer and an organic layer are sequentially formed on first and second MOS devices and the substrate. The first MOS has a first gate structure, a first spacer and first and second doped regions. The second MOS has a second gate structure, a second spacer and third and fourth doped regions. Anisotropic etching is performed to remove part of the organic layer until the oxide layer on the first and the second gate structures is exposed, wherein a remaining organic layer is left above the substrate. The oxide layer on the first and the second gate structures is removed. The remaining organic layer is removed. The oxide layer on the first, second, and third doped regions is removed. Thus, a silicide layer cannot form on the fourth doped region.
    Type: Grant
    Filed: March 18, 2005
    Date of Patent: May 26, 2009
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Dun-Nian Yaung, Sou-Kuo Wu, Ho-Ching Chen
  • Patent number: 7535051
    Abstract: A example embodiment may provide a memory device that may include an active pattern on a semiconductor substrate, a first charge trapping layer pattern on the active pattern, a first gate electrode on the first charge trapping layer pattern, a second charge trapping layer pattern on a sidewall of the active pattern in a first direction, a second gate electrode on the second charge trapping layer pattern in the first direction, and/or a source/drain region in the active pattern. The memory device may have improved integration by forming a plurality of charge trapping layer patterns on the same active pattern.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: May 19, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Na-Young Kim, Chang-Woo Oh, Sung-Hwan Kim, Yong-Lack Choi
  • Patent number: 7531861
    Abstract: Trench capacitors that have insulating layer collars in undercut regions and methods of fabricating such trench capacitors are provided. Some methods of fabricating a trench capacitor include forming a first layer on a substrate. A second layer is formed on the first layer opposite to the substrate. A mask is formed that has an opening on top of the first and second layers. A first trench is formed by removing a portion of the first and second layers through the opening in the mask. A portion of the first layer under the second layer is removed to form an undercut region under the second layer. An insulating layer collar is formed in the undercut region under the second layer. A second trench is formed that extends from the first trench by removing a portion of the substrate through the opening in the mask. A buried plate is formed in the substrate along the second trench. A dielectric layer is formed on an inner wall and bottom of the second trench.
    Type: Grant
    Filed: February 19, 2008
    Date of Patent: May 12, 2009
    Assignee: Samsung Electronics Co., Ltd
    Inventors: Suk-jin Chung, Seung-hwan Lee, Sung-tae Kim, Young-sun Kim, Jae-soon Lim, Young-geun Park
  • Patent number: 7528468
    Abstract: A capacitor assembly (82) is formed on a substrate (20). The capacitor assembly a first conductive plate (38) and a second conductive plate (60) formed over the substrate such that the second conductive plate is separated from the first conductive plate by a distance. A conductive trace (40) is formed over the substrate that is connected to the first conductive plate and extends away from the capacitor assembly. A conductive shield (62) is formed over at least a portion of the conductive trace that is separated from the first and second conductive plates to control a fringe capacitance between the second conductive plate and the conductive trace.
    Type: Grant
    Filed: September 25, 2006
    Date of Patent: May 5, 2009
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Andrew C. McNeil, Dubravka Bilic, Stephen R. Hooper
  • Patent number: 7521746
    Abstract: A ferroelectric random access memory (FRAM) includes a semiconductor substrate and an interlayer insulating layer on the substrate. A diffusion preventive layer is on the interlayer insulating layer. The diffusion preventive layer and the interlayer insulating layer have two node contact holes formed therein. Node conductive layer patterns are aligned with the node contact holes, respectively, and are disposed so as to protrude upward from the diffusion preventive layer. Lower electrodes are disposed on the diffusion preventive layer that cover the node conductive layer patterns, respectively. Thicknesses of the lower electrodes are gradually reduced from a line extending from upper surfaces of the node conductive layer patterns toward the diffusion preventive layer.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: April 21, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Moon-Sook Lee
  • Patent number: 7521743
    Abstract: Disclosed is a nonvolatile magnetic memory device including a magntoresistance device having a recording layer formed of a ferromagnetic material for storing information by use of variation in resistance depending on the magnetization inversion state. The plan-view shape of the recording layer includes a pseudo-rhombic shape having four sides, at least two of the four sides each include a smooth curve having a central portion curved toward the center of the pseudo-rhombic shape. The easy axis of magnetization of the recording layer is substantially parallel to the longer axis of the pseudo-rhombic shape. The hard axis of magnetization of the recording layer is substantially parallel to the shorter axis of the pseudo-rhombic shape. The sides constituting the plan-view shape of the recording layer are smoothly connected to each other.
    Type: Grant
    Filed: June 8, 2005
    Date of Patent: April 21, 2009
    Assignee: Sony Corporation
    Inventor: Hajime Yamagishi
  • Patent number: 7514318
    Abstract: A method for fabricating non-volatile memory cells is provided. The method includes providing a substrate, forming a first dopant region in the substrate, forming a second dopant region in the first dopant region, growing a first isolation region over a first portion of the substrate, the first dopant region, and the second dopant region, growing a second isolation region over a second portion of the substrate, the first dopant region, and the second dopant region, defining a contact region in the second dopant region, the contact region extending between the first isolation region and the second isolation region, depositing a gate oxide layer to form a first gate dielectric atop the first isolation region and a portion of the contact region, and overlaying a gate conductive layer on top of the gate oxide layer to form a first gate conductor atop the first gate dielectric.
    Type: Grant
    Filed: January 18, 2008
    Date of Patent: April 7, 2009
    Assignee: Micrel, Inc.
    Inventor: Paul M. Moore
  • Patent number: 7514704
    Abstract: In a method of forming a phase-change memory device, a variable resistance member may be formed on a s semiconductor substrate having a contact region, and a first electrode may be formed to contact a first portion of the variable resistance member and to be electrically connected to the contact region. A second electrode may be formed so as to contact a second portion of the variable resistance member.
    Type: Grant
    Filed: January 4, 2005
    Date of Patent: April 7, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-Tae Kim, Young-Nam Hwang, Tai-Kyung Kim, Won-Young Chung, Keun-Ho Lee
  • Publication number: 20090072289
    Abstract: A semiconductor device capable of reducing a thickness, an electronic product employing the same, and a method of fabricating the same are provided. The method of fabricating a semiconductor device includes preparing a semiconductor substrate having first and second active regions. A first transistor in the first active region includes a first gate pattern and first impurity regions. A second transistor the second active region includes a second gate pattern and second impurity regions. A first conductive pattern is on the first transistor, wherein at least a part of the first conductive pattern is disposed at a same distance from an upper surface of the semiconductor substrate as at least a part of the second gate pattern. The first conductive pattern may be formed on the first transistor while the second transistor is formed.
    Type: Application
    Filed: September 18, 2008
    Publication date: March 19, 2009
    Inventors: Dae-Ik Kim, Yong-Il Kim
  • Patent number: 7504683
    Abstract: A non-volatile memory element includes a transistor for selecting the element and a capacitor for recording a binary value by electrical breakdown of an insulating layer (13) of the capacitor. A structure of the memory element is modified in order to allow a higher degree of integration of the element within an electronic circuit of the MOS type. In addition, the memory element is made more robust with respect to a high electrical voltage (VDD) used for recording the binary value. The transistor includes a drain in the substrate with electric field drift in a longitudinal direction extending towards the capacitor. The electric field drift region for the drain includes a first extension underneath the gate of the transistor opposite the source and a second extension underneath the insulating layer of the capacitor. Doping of the substrate for the electric field drift region is limited to a region substantially corresponding to a distance between the gate and an electrode of the capacitor.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: March 17, 2009
    Assignees: STMicroelectronics S.A., STMicroelectronics (Crolles 2) SAS
    Inventors: Philippe Candelier, Thierry Devoivre, Emmanuel Josse, Sébastien Lefebvre
  • Publication number: 20090065838
    Abstract: An improved semiconductor memory device having a silicon on insulator (SOI) structure. Exemplary devices provide improved charge injection into the device's floating gate electrode. Exemplary devices may include a semiconductor substrate including a transistor forming region and a capacitor forming region; a MOSFET; a MOS capacitor; a projection formed within a periphery of the capacitor electrode of the MOS capacitor; and a floating gate electrode extending from the channel region of the MOSFET to overlap the projection of the capacitor electrode, with a gate insulating film interposed therebetween. The projection may include an inclined surface which may have a concave shape and/or the projection may extend above a capacitor groove having a undercut portion beneath the projection.
    Type: Application
    Filed: July 11, 2008
    Publication date: March 12, 2009
    Inventor: Takeshi Nagao
  • Patent number: 7485915
    Abstract: A semiconductor device includes a capacitor which includes a capacitor insulating film at least including a first insulating film and a ferroelectric film formed in contact with the first insulating film, containing a compound of a preset metal element and a constituent element of the first insulating film as a main component and having a dielectric constant larger than that of the first insulating film, a first capacitor electrode formed of one of Cu and a material containing Cu as a main component, and a second capacitor electrode formed to sandwich the capacitor insulating film in cooperation with the first capacitor electrode.
    Type: Grant
    Filed: May 5, 2006
    Date of Patent: February 3, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hayato Nasu, Takamasa Usui, Hideki Shibata
  • Publication number: 20090014766
    Abstract: In one embodiment, a non-volatile memory device includes an isolation film defining an active region in a semiconductor substrate; a tunnel insulating film located on the active region; a control gate located on the isolation film; an inter-gate dielectric film parallel to the control gate and located between the control gate and the isolation film; an electrode overlapped by the control gate and the inter-gate dielectric film, wherein the electrode extends over the tunnel insulating film on the active region to form a floating gate; and a source region and a drain region formed in the active region on both sides of the floating gate.
    Type: Application
    Filed: June 10, 2008
    Publication date: January 15, 2009
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Myoung-Soo KIM
  • Patent number: 7476924
    Abstract: A semiconductor device having a recessed landing pad includes a semiconductor substrate and a lower interlayer dielectric layer disposed on the semiconductor substrate. A first landing pad is disposed through the lower interlayer dielectric layer to be in contact with the semiconductor substrate. A second landing pad is disposed through the lower interlayer dielectric layer to also be in contact with the semiconductor substrate. A metal silicide layer is disposed on the second landing pad. The metal silicide layer is disposed lower than a top surface of the first landing pad. An intermediate interlayer dielectric layer is disposed on the lower interlayer dielectric layer. A conductive line is disposed on the intermediate interlayer dielectric layer. A contact plug is disposed between the conductive line and the metal silicide layer. A designed contact area between the metal silicide layer and the contact plug is protected against inadvertent etching.
    Type: Grant
    Filed: October 18, 2006
    Date of Patent: January 13, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Je-Min Park, Ho-Jin Oh
  • Publication number: 20090008690
    Abstract: The data retention characteristics of a nonvolatile memory circuit are improved. In a memory cell array on a main surface of a semiconductor substrate, a floating gate electrode for accumulating charges for information is arranged. The floating gate electrode is covered with a cap insulating film and a pattern of an insulating film 4a formed thereon. Further, over the entire main surface of the semiconductor substrate, an insulating film 2a is deposited so that it covers the pattern of the insulating film 4a and a gate electrode. The insulating film 2a is formed by a silicon nitride film formed by the plasma CVD method. The insulating film 4a is formed by a silicon nitride film formed by the low-pressure CVD method. By the provision of such an insulating film 4a, it is possible to suppress or prevent water or hydrogen ions from diffusing to the floating gate electrode, and therefore, the data retention characteristics of a flash memory can be improved.
    Type: Application
    Filed: June 12, 2008
    Publication date: January 8, 2009
    Inventors: Kazuyoshi SHIBA, Hideyuki Yashima
  • Patent number: 7473968
    Abstract: A semiconductor device having high reliability, in which TFTs with appropriate structures for the circuit functions are arranged, is provided. Gate insulating films (115) and (116) of a driver TFT are designed thinner than a gate insulating film (117) of a pixel TFT in a semiconductor device having a driver circuit and a pixel section on the same substrate. In addition, the gate insulating films (115) and (116) of the driver TFT and a dielectric (118) of a storage capacitor are formed at the same time, so that the dielectric (118) may be extremely thin, and a large capacity can be secured.
    Type: Grant
    Filed: May 2, 2005
    Date of Patent: January 6, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama, Hiroshi Shibata, Takeshi Fukunaga
  • Patent number: 7473955
    Abstract: A fabricated cylinder capacitor having two or more layers is provided, each layer having a bottom plate and top plate portions. A first set of vias connect the bottom plate portions and a second set of vias connect the top plate portions. The bottom plate portions and the first set of vias comprise a bottom plate and the top plate portions and the second set of vias comprise a top plate of the capacitor. The layers may comprise five metal layers and may be produced using semiconductor fabrication methods. Also provided is a capacitor array having two or more cylinder capacitors where a set of connectors connect all top plates of the capacitors. The capacitor array may be used in a capacitive DAC, the capacitors being connected according to the architecture of the DAC. The capacitive DAC may be used in a SAR ADC.
    Type: Grant
    Filed: March 7, 2006
    Date of Patent: January 6, 2009
    Assignee: Alvand Technologies, Inc.
    Inventors: Mehrdad Heshami, Mansour Keramat
  • Patent number: 7470947
    Abstract: A semiconductor memory includes memory cell transistors comprising a tunnel insulating film, a floating gate electrode, a first insulating film, a control gate electrode, and a first metal salicide film; low-voltage transistors comprising a first p-type source region and a first p-type drain region, a first gate insulating film, and a first gate electrode of an n conductivity type having the same dose of a first p-type impurity as with the first p-type source region; and high-voltage transistors comprising a second p-type source region and a second p-type drain region, a second gate insulating film thicker than the first gate insulating film, and a second gate electrode of an n conductivity type having the same dose of a second p-type impurity as with the second p-type source region.
    Type: Grant
    Filed: September 15, 2005
    Date of Patent: December 30, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masato Endo
  • Publication number: 20080316826
    Abstract: In a semiconductor device, a first transistor of an SOI structure has a source region, a drain region, a body region positioned between the source region and the drain region, and a gate electrode positioned above the body region. A first capacitor of the SOI structure has a first terminal electrically connected to a gate electrode of the first transistor, and a second terminal. The semiconductor device stores data in a nonvolatile manner in accordance with carriers accumulated in a first node electrically connecting the gate electrode of the first transistor and the first terminal of the first capacitor.
    Type: Application
    Filed: June 3, 2008
    Publication date: December 25, 2008
    Inventor: Tadaaki Yamauchi
  • Patent number: 7468527
    Abstract: A thin film transistor substrate and a fabricating method simplify a process and enlarge a capacitance value of a storage capacitor without any reduction of aperture ratio. A transparent first conductive layer and an opaque second conductive layer of a double-layer structured gate line are formed having a step coverage. A pixel electrode is provided on the gate insulating film within a pixel hole of said pixel area passing through the passivation film to be connected to the thin film transistor. A storage capacitor overlaps with the pixel electrode with having the gate insulating film therebetween and has a lower storage electrode protruded from the first conductive layer.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: December 23, 2008
    Assignee: LG Display Co., Ltd.
    Inventor: Byung Chul Ahn
  • Patent number: 7465971
    Abstract: A configuration memory cell (“CRAM”) for a field programmable gate array (“FPGA”) integrated circuit (“IC”) device is given increased resistance to single event upset (“SEU”). A portion of the gate structure of the input node of the CRAM is increased in size relative to the nominal size of the remainder of the gate structure. Part of the enlarged gate structure is located capacitively adjacent to an N-well region of the IC, and another part is located capacitively adjacent to a P-well region of the IC. This arrangement gives the input node increased capacitance to resist SEU, regardless of the logical level of the input node. The invention is also applicable to any node of any type of memory cell for which increased resistance to SEU is desired.
    Type: Grant
    Filed: December 5, 2007
    Date of Patent: December 16, 2008
    Assignee: Altera Corporation
    Inventors: Lakhbeer S. Sidhu, Irfan Rahim, Jeffrey Watt, John Turner
  • Publication number: 20080296647
    Abstract: The present invention provides a semiconductor memory device comprising a semiconductor substrate formed of a support substrate, an insulating film formed over the support substrate and a semiconductor layer formed over the insulating film; a MOSFET having a source layer and a drain layer both formed in the semiconductor layer of a transistor forming area set to the semiconductor substrate, and a channel region provided between the source and drain layers; a MOS capacitor having a capacitor electrode which is formed in the semiconductor layer of a capacitor forming area set to the semiconductor substrate and in which an impurity of the same type as the source layer is diffused; and a device isolation layer which insulates and separates between the semiconductor layer formed with the MOSFET and the semiconductor layer formed with the MOS capacitor, wherein the capacitor electrode of the MOS capacitor is formed in polygon and slanting faces enlarged toward the insulating film are provided therearound, and where
    Type: Application
    Filed: April 18, 2008
    Publication date: December 4, 2008
    Applicant: OKI ELECTRIC INDUSTRY CO., LTD
    Inventor: Tomohiko Tatsumi
  • Patent number: 7459741
    Abstract: A semiconductor memory device excellent in data holding characteristics even when a cell area is reduced is disclosed. According to one aspect of the present invention, a semiconductor memory device comprises a transistor including a source, a drain and a channel region disposed in a semiconductor substrate, and including a gate electrode disposed through a gate insulator on a surface of the semiconductor substrate of the channel region, a capacitor connected to the channel region, a first wiring line electrically connected to the gate electrode, and a second wiring line electrically connected to the drain.
    Type: Grant
    Filed: March 28, 2006
    Date of Patent: December 2, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masaru Kidoh, Hideaki Aochi, Ryota Katsumata, Masaru Kito
  • Publication number: 20080291728
    Abstract: A non-volatile memory cell is provided that includes: a substrate including diffusion regions for a read-out transistor; a capacitor formed in a poly-silicon layer adjacent the substrate, the capacitor including a floating gate for the read-out transistor and a control gate, the floating gate and the control gate each having finger extensions, the finger extensions from the floating gate interdigitating with the finger extensions from the control gate; and a programming line coupled to the control gate.
    Type: Application
    Filed: April 24, 2008
    Publication date: November 27, 2008
    Inventors: Esin Terzioglu, Gil I. Winograd, Morteza Cyrus Afghahi
  • Publication number: 20080290386
    Abstract: Methods and apparatus for increasing the coupling coefficient of a floating gate memory device includes an MOS capacitors with self-aligning gate structures that provide increased capacitance per unit area over conventional MOS capacitors.
    Type: Application
    Filed: May 22, 2008
    Publication date: November 27, 2008
    Inventor: Fredrick Jenne
  • Patent number: 7456462
    Abstract: A layered capacitor having top and bottom plates formed from multiple layers. The capacitor has a bottom layer comprising a bottom plate portion and at least one upper layer, each upper layer comprising top and bottom plate portions. A first set of vias connect the bottom plate portions and a second set of vias connect the top plate portions. The bottom plate portions and the first set of vias comprise a U-shaped bottom plate and the top plate portions and the second set of vias comprise a top plate of the capacitor device. The layers may comprise metal layers produced using semiconductor fabrication methods. Also provided is a capacitor array having two or more capacitors where connectors connect all top plate portions of the capacitors. The capacitor array may be used in a capacitive DAC, which may be used in a SAR ADC.
    Type: Grant
    Filed: March 7, 2006
    Date of Patent: November 25, 2008
    Assignee: Alvand Technologies, Inc.
    Inventors: Mehrdad Heshami, Mansour Keramat