With Complementary Field Effect Transistor Patents (Class 257/338)
-
Patent number: 8643113Abstract: A process is disclosed of forming metal replacement gates for NMOS and PMOS transistors with oxygen in the PMOS metal gates and metal atom enrichment in the NMOS gates such that the PMOS gates have effective work functions above 4.85 eV and the NMOS gates have effective work functions below 4.25 eV. Metal work function layers in both the NMOS and PMOS gates are oxidized to increase their effective work functions to the desired PMOS range. An oxygen diffusion blocking layer is formed over the PMOS gate and an oxygen getter is formed over the NMOS gates. A getter anneal extracts the oxygen from the NMOS work function layers and adds metal atom enrichment to the NMOS work function layers, reducing their effective work functions to the desired NMOS range. Processes and materials for the metal work function layers, the oxidation process and oxygen gettering are disclosed.Type: GrantFiled: November 21, 2008Date of Patent: February 4, 2014Assignee: Texas Instruments IncorporatedInventors: James Joseph Chambers, Hiroaki Niimi
-
Patent number: 8637370Abstract: A high voltage trench MOS and its integration with low voltage integrated circuits is provided. Embodiments include forming, in a substrate, a first trench with a first oxide layer on side surfaces, a narrower second trench, below the first trench with a second oxide layer on side and bottom surfaces, and spacers on sides of the first and second trenches; removing a portion of the second oxide layer from the bottom surface of the second trench between the spacers; filling the first and second trenches with a first poly-silicon to form a drain region; removing the spacers, exposing side surfaces of the first poly-silicon; forming a third oxide layer on side and top surfaces of the first poly-silicon; and filling a remainder of the first and second trenches with a second poly-silicon to form a gate region on each side of the drain region.Type: GrantFiled: January 19, 2012Date of Patent: January 28, 2014Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Purakh Raj Verma, Yi Liang, Dong Yemin
-
Patent number: 8633540Abstract: An integrated circuit with a transistor advantageously embodied in a laterally diffused metal oxide semiconductor device having a gate located over a channel region recessed into a semiconductor substrate and a method of forming the same. In one embodiment, the transistor includes a source/drain including a lightly or heavily doped region adjacent the channel region, and an oppositely doped well extending under the channel region and a portion of the lightly or heavily doped region of the source/drain. The transistor also includes a channel extension, within the oppositely doped well, under the channel region and extending under a portion of the lightly or heavily doped region of the source/drain.Type: GrantFiled: August 15, 2012Date of Patent: January 21, 2014Assignee: Enpirion, Inc.Inventors: Ashraf W. Lotfi, William W. Troutman, Douglas Dean Lopata, Tanya Nigam
-
Patent number: 8619169Abstract: A solid-state image sensor including a plurality of pixels formed on a semiconductor substrate, each pixel comprising a photoelectric conversion element including a charge accumulation region of a first conductivity type, a floating diffusion of the first conductivity type, and a transfer transistor which transfers charge in the charge accumulation region to the floating diffusion, comprises an element isolation region made of an insulator and arranged to isolate adjacent pixels from each other, and an impurity diffusion region of a second conductivity type arranged inside the semiconductor substrate to isolate adjacent pixels from each other, wherein a peak position of an impurity concentration of the impurity diffusion region of one pixel is disposed within a width of the floating diffusion, of the one pixel, along a straight line passing through the photoelectric conversion element, a gate electrode of the transfer transistor, and the floating diffusion which are of the one pixel.Type: GrantFiled: November 18, 2010Date of Patent: December 31, 2013Assignee: Canon Kabushiki KaishaInventor: Junji Iwata
-
Patent number: 8614468Abstract: A device includes a first source/drain region of a first conductivity type over a silicon substrate, wherein the first source/drain region is at a higher step of a two-step profile. The first source/drain region includes a germanium-containing region. A second source/drain region is of a second conductivity type opposite the first conductivity type, wherein the second source/drain region is at a lower step of the two-step profile. A gate dielectric includes a vertical portion in contact with a side edge the silicon substrate, and a horizontal portion in contact with a top surface of the silicon substrate at the lower step. The horizontal portion is connected to a lower end of the vertical portion. A gate electrode is directly over the horizontal portion, wherein a sidewall of the gate electrode is in contact with the vertical portion of the gate dielectric.Type: GrantFiled: June 16, 2011Date of Patent: December 24, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Mark van Dal, Krishna Kumar Bhuwalka
-
Patent number: 8604543Abstract: An integrated circuit with a core PMOS transistor formed in a first n-well and an isolated DENMOS (iso-DENMOS) transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same. A method of forming an integrated circuit with a core PMOS transistor formed in a first n-well and an iso-DENMOS transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same.Type: GrantFiled: June 29, 2012Date of Patent: December 10, 2013Assignee: Texas Instruments IncorporatedInventors: Kamel Benaissa, Greg C. Baldwin, Vineet Mishra, Ananth Kamath
-
Patent number: 8592900Abstract: An integrated circuit containing a diode with a drift region containing a first dopant type plus scattering centers. An integrated circuit containing a DEMOS transistor with a drift region containing a first dopant type plus scattering centers. A method for designing an integrated circuit containing a DEMOS transistor with a counter doped drift region.Type: GrantFiled: November 3, 2011Date of Patent: November 26, 2013Assignee: Texas Instruments IncorporatedInventors: Philipp Steinmann, Amitava Chatterjee, Sameer Pendharkar
-
Publication number: 20130299904Abstract: According to one embodiment, a one-time programmable (OTP) device having a lateral diffused metal-oxide-semiconductor (LDMOS) structure comprises a pass gate including a pass gate electrode and a pass gate dielectric, and a programming gate including a programming gate electrode and a programming gate dielectric. The programming gate is spaced from the pass gate by a drain extension region of the LDMOS structure. The LDMOS structure provides protection for the pass gate when a programming voltage for rupturing the programming gate dielectric is applied to the programming gate electrode. A method for producing such an OTP device comprises forming a drain extension region, fabricating a pass gate over a first portion of the drain extension region, and fabricating a programming gate over a second portion of the drain extension region.Type: ApplicationFiled: July 18, 2013Publication date: November 14, 2013Inventors: Akira Ito, Xiangdong Chen
-
Publication number: 20130292765Abstract: An inventive semiconductor device includes a semiconductor layer, a source region provided in a surface layer portion of the semiconductor layer, a drain region provided in the surface of the semiconductor layer in spaced relation from the source region, a gate insulation film provided in opposed relation to a portion of the surface of the semiconductor layer present between the source region and the drain region, a gate electrode provided on the gate insulation film, and a drain-gate isolation portion provided between the drain region and the gate insulation film for isolating the drain region and the gate insulation film from each other in non-contact relation.Type: ApplicationFiled: July 13, 2013Publication date: November 7, 2013Inventors: Mitsuo KOJIMA, Shoji TAKEI
-
Patent number: 8546890Abstract: An inverter structure is disclosed. The inverter structure includes an NMOS transistor and a PMOS transistor. Preferably, the NMOS transistor includes an n-type gate electrode and an n-type source/drain region, and the PMOS transistor includes a p-type gate electrode and a p-type source/drain region. Specifically, the n-type gate electrode and the p-type gate electrode are physically separated and electrically connected by a conductive contact.Type: GrantFiled: November 27, 2008Date of Patent: October 1, 2013Assignee: United Microelectronics Corp.Inventors: Chien-Li Kuo, Chia-Chun Sun, Chuan-Hsien Fu, Chun-Liang Hou, Yun-San Huang
-
Publication number: 20130249000Abstract: A short channel semiconductor device is formed with halo regions that are separated from the bottom of the gate electrode and from each other. Embodiments include implanting halo regions after forming source/drain regions and source/drain extension regions. An embodiment includes forming source/drain extension regions in a substrate, forming source/drain regions in the substrate, forming halo regions under the source/drain extension regions, after forming the source drain regions, and forming a gate electrode on the substrate between the source/drain regions. By forming the halo regions after the high temperature processing involved informing the source/drain and source/drain extension regions, halo diffusion is minimized, thereby maintaining sufficient distance between halo regions and reducing short channel NMOS Vt roll-off.Type: ApplicationFiled: May 20, 2013Publication date: September 26, 2013Applicant: GLOBALFOUNDRIES Inc.Inventors: Bin Yang, Man Fai Ng
-
Patent number: 8536654Abstract: A CMOS device having an NMOS transistor with a metal gate electrode comprising a mid-gap metal with a low work function/high oxygen affinity cap and a PMOS transistor with a metal gate electrode comprising a mid gap metal with a high work function/low oxygen affinity cap and method of forming.Type: GrantFiled: January 13, 2011Date of Patent: September 17, 2013Assignee: Texas Instruments IncorporatedInventors: James Joseph Chambers, Hiroaki Niimi
-
Publication number: 20130234248Abstract: A manufacturing method of a semiconductor device including a DMOS transistor, an NMOS transistor and a PMOS transistor arranged on a semiconductor substrate, the DMOS transistor including a first impurity region and a second impurity region formed to be adjacent to each other, the first impurity region being of the same conductivity type as a drain region and a source region of the DMOS transistor, forming to enclose the drain region, and the second impurity region being of a conductivity type opposite to the first impurity region, forming to enclose the source region, the manufacturing method of the semiconductor device comprising forming the first impurity region and one of the NMOS transistor and the PMOS transistor, and forming the second impurity region and the other of the NMOS transistor and the PMOS transistor.Type: ApplicationFiled: February 25, 2013Publication date: September 12, 2013Applicant: CANON KABUSHIKI KAISHAInventors: Nobuyuki Suzuki, Satoshi Suzuki, Masanobu Ohmura
-
Patent number: 8524564Abstract: Semiconductor devices are formed without full silicidation of the gates and with independent adjustment of silicides in the gates and source/drain regions. Embodiments include forming a gate on a substrate, forming a nitride cap on the gate, forming a source/drain region on each side of the gate, forming a first silicide in each source/drain region, removing the nitride cap subsequent to the formation of the first silicide, and forming a second silicide in the source/drain regions and in the gate, subsequent to removing the nitride cap. Embodiments include forming the first silicide by forming a first metal layer on the source/drain regions and performing a first RTA, and forming the second silicide by forming a second metal layer on the source/drain regions and on the gate and performing a second RTA.Type: GrantFiled: August 5, 2011Date of Patent: September 3, 2013Assignee: GLOBALFOUNDRIES Inc.Inventors: Peter Javorka, Stefan Flachowsky, Thilo Scheiper
-
Patent number: 8513766Abstract: An inventive semiconductor device includes a semiconductor layer, a source region provided in a surface layer portion of the semiconductor layer, a drain region provided in the surface of the semiconductor layer in spaced relation from the source region, a gate insulation film provided in opposed relation to a portion of the surface of the semiconductor layer present between the source region and the drain region, a gate electrode provided on the gate insulation film, and a drain-gate isolation portion provided between the drain region and the gate insulation film for isolating the drain region and the gate insulation film from each other in non-contact relation.Type: GrantFiled: June 19, 2008Date of Patent: August 20, 2013Assignee: Rohm Co., Ltd.Inventors: Mitsuo Kojima, Shoji Takei
-
Publication number: 20130200453Abstract: Semiconductor devices having a bipolar transistor, a CMOS transistor, a drain extension MOS transistor and a double diffused MOS transistor are provided. The semiconductor device includes a semiconductor substrate including a logic region in which a logic device is formed and a high voltage region in which a high power device is formed, trenches in the semiconductor substrate, isolation layers in respective ones of the trenches, and at least one field insulation layer disposed at a surface of the semiconductor substrate in the high voltage region. Related methods are also provided.Type: ApplicationFiled: December 6, 2012Publication date: August 8, 2013Applicant: SK HYNIX INC.Inventor: SK hynix Inc.
-
Publication number: 20130175614Abstract: Semiconductor devices and methods of fabricating the same are provided. The semiconductor device includes a substrate having a first region including a first element and a second region including a second element and including a lower substrate and an upper substrate bonded to each other, an epitaxial layer and an insulating layer disposed between the lower substrate and the upper substrate, the epitaxial layer disposed in the first region, and the insulating layer disposed in the second region, a device isolation pattern separating the first element from the second element, and a doped pattern disposed between the upper substrate and the insulating layer and between the upper substrate and the epitaxial layer. The first element is electrically connected to the lower substrate through the doped pattern and the epitaxial layer. The second element is electrically insulated from the lower substrate by the doped pattern and the insulating layer.Type: ApplicationFiled: September 10, 2012Publication date: July 11, 2013Applicant: Electronics and Telecommunications Research InstituteInventor: KYOUNG IL NA
-
Patent number: 8482075Abstract: A plurality of gate structures are formed on a substrate. Each of the gate structures includes a first gate electrode and source and drain regions. The first gate electrode is removed from each of the gate structures. A first photoresist is applied to block gate structures having source regions in a source-down direction. A first halo implantation is performed in gate structures having source regions in a source-up direction at a first angle. The first photoresist is removed. A second photoresist is applied to block gate structures having source regions in a source-up direction. A second halo implantation is performed in gate structures having source regions in a source-down direction at a second angle. The second photoresist is removed. Replacement gate electrodes are formed in each of the gate structures.Type: GrantFiled: May 10, 2012Date of Patent: July 9, 2013Assignee: International Business Machines CorporationInventors: Hasan M. Nayfeh, Andres Bryant, Arvind Kumar, Nivo Rovedo, Robert Robison
-
Patent number: 8476706Abstract: A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer.Type: GrantFiled: January 4, 2012Date of Patent: July 2, 2013Assignee: International Business Machines CorporationInventors: Dureseti Chidambarrao, Brian J. Greene, Yue Liang, Xiaojun Yu
-
Patent number: 8476678Abstract: A CMOS device with transistors having different gate dielectric materials and a method of manufacture thereof. A CMOS device is formed on a workpiece having a first region and a second region. A first gate dielectric material is deposited over the second region. A first gate material is deposited over the first gate dielectric material. A second gate dielectric material comprising a different material than the first gate dielectric material is deposited over the first region of the workpiece. A second gate material is deposited over the second gate dielectric material. The first gate material, the first gate dielectric material, the second gate material, and the second gate dielectric material are then patterned to form a CMOS device having a symmetric Vt for the PMOS and NMOS FETs.Type: GrantFiled: April 11, 2012Date of Patent: July 2, 2013Assignee: Infineon Technologies AGInventor: Hong-Jyh Li
-
Patent number: 8471335Abstract: A semiconductor structure includes a semiconductor substrate, formed on which are a first layer and a second layer, and an alignment-control mask. The alignment-control mask includes a first direction reference element, formed in a first region of the first layer and extending in a first alignment direction, and first position reference elements, formed in a first region of the second layer that corresponds to the first region of the first layer accommodating the first direction reference element. The first position reference elements are arranged in succession in the first alignment direction and in respective staggered positions with respect to a second alignment direction perpendicular to the first alignment direction.Type: GrantFiled: June 20, 2011Date of Patent: June 25, 2013Assignee: STMicroelectronics S.r.l.Inventor: Emanuele Brenna
-
Patent number: 8471336Abstract: A semiconductor integrated circuit device includes a gate electrode of at least one of a P-channel MISFET (metal-insulator-semiconductor field-effect transistor) and an N-channel MISFET provided in a direction parallel to a direction of a well isolation boundary phase between the P-channel MISFET and the N-channel MISFET, a first diffusion layer having a same conductivity type as that of a drain diffusion layer of one of a plurality of ones of the MISFET provided in two regions with a drain diffusion layer of the MISFET therebetween through an isolation respectively in a direction orthogonal to the gate electrode, and a second diffusion layer having a conductivity type different from that of the drain diffusion layer of the one of the plurality of ones of the MISFET provided between the well isolation boundary phase and one of a source diffusion layer and the drain diffusion layer.Type: GrantFiled: April 2, 2012Date of Patent: June 25, 2013Assignee: Renesas Electronics CorporationInventors: Hiroshi Furuta, Shouzou Uchida, Muneaki Matsushige, Junji Monden
-
Patent number: 8450800Abstract: In one aspect, a semiconductor device includes a semiconductor substrate; and a transistor element including a parallel structure of a first-conductivity-type drift region and a second-conductivity-type column region, and a second-conductivity-type base region, the transistor element being formed on the semiconductor substrate. An outer peripheral region located outside an element forming region has a parallel structure of a first-conductivity-type drift region and a second-conductivity-type column region, and a second-conductivity-type annular diffusion region which is formed at a side of the base region and which is spaced apart from the base region. An innermost end and a neighboring portion thereof of the annular diffusion region are located on the column region, and an outermost end of the annular diffusion region is located outside an outermost peripheral column region. A field insulating film that covers the annular diffusion region is stacked on the semiconductor layer in the outer peripheral region.Type: GrantFiled: March 10, 2011Date of Patent: May 28, 2013Assignee: Renesas Electronics CorporationInventor: Hisao Inomata
-
Patent number: 8410568Abstract: A substrate section that is at least partially fabricated to include contact elements and materials. The substrate section includes doped regions that have a heavily doped N-type region and a heavily doped P-type region adjacent to one another. An exterior surface of the substrate has a topography that includes a light-transparent region in which light, from a light source, is able to reach a surface of the substrate. An application of light onto the light transparent region is sufficient to cause a voltage potential to form across a junction of the heavily doped regions. The substrate section may further comprise one or more electrical contacts, positioned on the substrate section to conduct current, resulting from the voltage potential created with application of light onto the light transparent region, to a circuit on the semiconductor substrate.Type: GrantFiled: August 25, 2009Date of Patent: April 2, 2013Assignee: Tau-Metrix, Inc.Inventors: Gary Steinbrueck, James S. Vickers, Mario M. Pelella, Majid Aghababazadeh, Nader Pakdaman
-
Patent number: 8368120Abstract: A hybrid device including a silicon based MOSFET operatively connected with a GaN based device.Type: GrantFiled: September 2, 2011Date of Patent: February 5, 2013Assignee: International Rectifier CorporationInventors: Alexander Lidow, Daniel M. Kinzer, Srikant Sridevan
-
Publication number: 20130020639Abstract: Some structures and methods to reduce power consumption in devices can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. Some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors. Additional structures, configurations, and methods presented herein can be used alone or in conjunction with the DDC to yield additional and different benefits.Type: ApplicationFiled: September 14, 2012Publication date: January 24, 2013Applicant: Suvolta, IncInventors: Scott E. Thompson, Damodar R. Thummalapally
-
Publication number: 20130020638Abstract: Some structures and methods to reduce power consumption in devices can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. Some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors. Additional structures, configurations, and methods presented herein can be used alone or in conjunction with the DDC to yield additional and different benefits.Type: ApplicationFiled: September 14, 2012Publication date: January 24, 2013Applicant: SUVOLTA, INC.Inventors: Scott E. Thompson, Damodar R. Thummalapally
-
Publication number: 20130015522Abstract: A semiconductor device includes an active region formed in a semiconductor substrate made of silicon, and surrounded by an isolation region; and a gate electrode formed on the active region and the isolation region with a gate insulating film interposed between the gate electrode and the active region or the isolation region. P-type silicon alloy layers are formed in recess regions formed in regions of the active region located laterally outward of the gate electrode, and an upper end of a portion of each of the silicon alloy layers in contact with the isolation region is located below a portion of an upper surface of the active region under the gate insulating film.Type: ApplicationFiled: September 15, 2012Publication date: January 17, 2013Applicant: Panasonic CorporationInventors: Toshie KUTSUNAI, Satoru Ito
-
SEMICONDUCTOR DEVICES HAVING VERTICAL DEVICE AND NON-VERTICAL DEVICE AND METHODS OF FORMING THE SAME
Publication number: 20120319201Abstract: In a semiconductor device, a vertical transistor comprises: a first diffusion region on a substrate; a channel region on the first diffusion region and extending in a vertical direction; a second diffusion region on the channel region; and a gate electrode at a sidewall of, and insulated from, the channel region. A horizontal transistor is positioned on the substrate, the horizontal transistor comprising: a first diffusion region and a second diffusion region on the substrate and spaced apart from each other; a channel region on the substrate between the first diffusion region and the second diffusion region; and a gate electrode on the channel region and isolated from the channel region. A portion of a gate electrode of the vertical transistor and a portion of the gate electrode of the horizontal transistor are at a same vertical position in the vertical direction relative to the substrate.Type: ApplicationFiled: March 6, 2012Publication date: December 20, 2012Applicants: SNU R & DB FOUNDATION, SAMSUNG ELECTRONICS CO., LTD.Inventors: Min-Chul Sun, Byung-Gook Park -
Publication number: 20120306013Abstract: Metal oxide semiconductor (MOS) protection circuits and methods of forming the same are disclosed. In one embodiment, an integrated circuit includes a pad, a p-type MOS (PMOS) transistor, and first and second n-type MOS (NMOS) transistors. The first NMOS transistor includes a drain, a source and a gate electrically connected to the pad, a first supply voltage, and a drain of the PMOS transistor, respectively. The second NMOS transistor includes a gate, a drain, and a source electrically connected to a bias node, a second supply voltage, and a source of the PMOS transistor, respectively. The source of the second NMOS transistor is further electrically connected to a body of the PMOS transistor so as to prevent a current flowing from the drain of the PMOS transistor to the second supply voltage through the body of PMOS transistor when a transient signal event is received on the pad.Type: ApplicationFiled: June 3, 2011Publication date: December 6, 2012Applicant: Analog Devices, Inc.Inventors: Colm Donovan, Javier A. Salcedo
-
Patent number: 8319277Abstract: A semiconductor device that includes multiple logic circuit cells having respective logic circuits formed therein and multiple interconnects connected to the corresponding logic circuit cells. At least one of the interconnects has an opening formed therein so as to have an opening ratio different from one or more of the opening ratios of the remaining interconnects.Type: GrantFiled: January 22, 2010Date of Patent: November 27, 2012Assignee: Fujitsu LimitedInventors: Hideki Kitada, Takahiro Kimura
-
Patent number: 8319255Abstract: In an ultra high voltage lateral DMOS-type device (UHV LDMOS device), a central pad that defines the drain region is surrounded by a racetrack-shaped source region with striations of alternating n-type and p-type material radiating outwardly from the pad to the source to provide for an adjustable snapback voltage.Type: GrantFiled: April 1, 2010Date of Patent: November 27, 2012Assignee: Texas Instruments IncorporatedInventor: Vladislav Vashchenko
-
Patent number: 8304780Abstract: A method for making an electronic device, such as a MOS transistor, including the steps of forming a plurality of semiconductor islands on an electrically functional substrate, printing a first dielectric layer on or over a first subset of the semiconductor islands and optionally a second dielectric layer on or over a second subset of the semiconductor islands, and annealing. The first dielectric layer contains a first dopant, and the (optional) second dielectric layer contains a second dopant different from the first dopant. The dielectric layer(s), semiconductor islands and substrate are annealed sufficiently to diffuse the first dopant into the first subset of semiconductor islands and, when present, the second dopant into the second subset of semiconductor islands.Type: GrantFiled: June 9, 2010Date of Patent: November 6, 2012Assignee: Kovio, Inc.Inventors: Arvind Kamath, James Montague Cleeves, Joerg Rockenberger, Patrick Smith, Fabio Zürcher
-
Patent number: 8299493Abstract: Provided are a semiconductor light emitting device and a method of fabricating the same. The semiconductor light emitting device includes a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer. The first conductive type semiconductor layer includes an insulation layer including protrusions having a predetermined interval and a void between the protrusions of the insulation layer. The active layer is disposed on the first conductive type semiconductor layer. The second conductive type semiconductor layer is disposed on the active layer.Type: GrantFiled: September 5, 2008Date of Patent: October 30, 2012Assignee: LG Innotek Co., Ltd.Inventor: Hyo Kun Son
-
Publication number: 20120261715Abstract: A power semiconductor device includes: a drain region of a first conductive type; a drift region of a first conductive type formed on the drain region; a first body region of a second conductive type formed below an upper surface of the drift region; a second body region of a second conductive type formed below the upper surface of the drift region and in the first body region; a third body region of a second conductive type formed by protruding downwards from a lower end of the first body region; a source region of a first conductive type formed below the upper surface of the drift region and in the first body region; and a gate insulating layer formed on channel regions of the first body region and on the drift region between the first body regions.Type: ApplicationFiled: April 10, 2012Publication date: October 18, 2012Inventors: Jin-myung KIM, Se-woong OH, Jae-gil LEE, Young-chul CHOI, Ho-cheol JANG
-
Publication number: 20120241860Abstract: A semiconductor integrated circuit device includes a gate electrode of at least one of a P-channel MISFET (metal-insulator-semiconductor field-effect transistor) and an N-channel MISFET provided in a direction parallel to a direction of a well isolation boundary phase between the P-channel MISFET and the N-channel MISFET, a first diffusion layer having a same conductivity type as that of a drain diffusion layer of one of a plurality of ones of the MISFET provided in two regions with a drain diffusion layer of the MISFET therebetween through an isolation respectively in a direction orthogonal to the gate electrode, and a second diffusion layer having a conductivity type different from that of the drain diffusion layer of the one of the plurality of ones of the MISFET provided between the well isolation boundary phase and one of a source diffusion layer and the drain diffusion layer.Type: ApplicationFiled: April 2, 2012Publication date: September 27, 2012Applicant: Renesas Electronics CorporationInventors: Hiroshi Furuta, Shouzou Uchida, Muneaki Matsushige, Junji Monden
-
Publication number: 20120241859Abstract: The present invention relates to a switch circuit, and more particularly, to a switch circuit that uses an LDMOS (lateral diffusion metal oxide semiconductor) device inside an IC (Integrated Circuit). In the switch circuit that uses the LDMOS device according to an embodiment of the present invention, a gate-source voltage (VGS) of the LDMOS device may be stably controlled through a current source and resistances, the characteristics of a switch may be maintained regardless of the voltages of both terminals (A and B) by using an N-type LDMOS and a P-type LDMOS in a complementary manner, and the current generated by the current source is offset inside the switch without flowing to the outside of the switch.Type: ApplicationFiled: March 20, 2012Publication date: September 27, 2012Applicant: SILICON WORKS CO., LTDInventors: Young-Jin WOO, Kong-Soon Park, Young-Sik Kim
-
Publication number: 20120235712Abstract: A high voltage semiconductor device is provided and includes an n?-type region encompassed by a p? well region and is provided on a p?-type silicon substrate. A drain n+-region is connected to a drain electrode. A p base region is formed so as to be separate from and encompass the drain n+-region. A source n+-region is formed in the p base region. Further, a p?-region is provided that passes through the n?-type region to the silicon substrate. The n?-type region is divided, by the p?-region, into a drift n?-type region having the drain n+-region and a floating n?-type region having a floating electric potential.Type: ApplicationFiled: September 29, 2010Publication date: September 20, 2012Applicant: Fuji Electri Co., Ltd.Inventor: Masaharu Yamaji
-
Patent number: 8232158Abstract: An integrated circuit with a core PMOS transistor formed in a first n-well and an isolated DENMOS (iso-DENMOS) transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same. A method of forming an integrated circuit with a core PMOS transistor formed in a first n-well and an iso-DENMOS transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same.Type: GrantFiled: June 28, 2010Date of Patent: July 31, 2012Assignee: Texas Instruments IncorporatedInventors: Kamel Benaissa, Greg C. Baldwin, Vineet Mishra, Ananth Kamath
-
Patent number: 8227861Abstract: A semiconductor device includes a substrate, a source region formed over the substrate, a drain region formed over the substrate, a first gate electrode over the substrate adjacent to the source region and between the source and drain regions, and a second gate electrode over the substrate adjacent to the drain region and between the source and drain regions.Type: GrantFiled: December 22, 2010Date of Patent: July 24, 2012Assignee: Freescale Semiconductor, Inc.Inventors: Hongning Yang, Xin Lin, Jiang-Kia Zuo
-
Patent number: 8212316Abstract: An integrated circuit with a transistor advantageously embodied in a laterally diffused metal oxide semiconductor device having a gate located over a channel region recessed into a semiconductor substrate and a method of forming the same. In one embodiment, the transistor includes a source/drain including a lightly or heavily doped region adjacent the channel region, and an oppositely doped well extending under the channel region and a portion of the lightly or heavily doped region of the source/drain. The transistor also includes a channel extension, within the oppositely doped well, under the channel region and extending under a portion of the lightly or heavily doped region of the source/drain.Type: GrantFiled: August 28, 2009Date of Patent: July 3, 2012Assignee: Enpirion, Inc.Inventors: Ashraf W. Lotfi, William W. Troutman, Douglas Dean Lopata, Tanya Nigam
-
Patent number: 8198154Abstract: Lateral DMOS devices having improved drain contact structures and methods for making the devices are disclosed. A semiconductor device comprises a semiconductor substrate; an epitaxial layer on top of the substrate; a drift region at a top surface of the epitaxial layer; a source region at a top surface of the epitaxial layer; a channel region between the source and drift regions; a gate positioned over a gate dielectric on top of the channel region; and a drain contact trench that electrically connects the drift layer and substrate. The contact trench includes a trench formed vertically from the drift region, through the epitaxial layer to the substrate and filled with an electrically conductive drain plug; electrically insulating spacers along sidewalls of the trench; and an electrically conductive drain strap on top of the drain contact trench that electrically connects the drain contact trench to the drift region.Type: GrantFiled: September 27, 2010Date of Patent: June 12, 2012Assignee: Alpha and Omega Semiconductor IncorporatedInventor: François Hébert
-
Patent number: 8193583Abstract: A voltage converter can include an output circuit having a vertical high-side device and a vertical low-side device which can be formed on a single die (i.e. a “PowerDie”). The high side device can be a PMOS transistor, while the low side device can be an NMOS transistor. The source of the PMOS transistor and the source of the NMOS transistor can be formed from the same metal structure, with the source of the high side device electrically connected to VIN and the source of the low side device electrically connected to ground. A drain of the high side PMOS transistor can be electrically shorted to the drain of the low side NMOS transistor during device operation using a metal layer which is interposed between the transistors and a semiconductor substrate.Type: GrantFiled: March 5, 2010Date of Patent: June 5, 2012Assignee: Intersil Americas, Inc.Inventor: François Hébert
-
Patent number: 8178902Abstract: A CMOS device with transistors having different gate dielectric materials and a method of manufacture thereof. A CMOS device is formed on a workpiece having a first region and a second region. A first gate dielectric material is deposited over the second region. A first gate material is deposited over the first gate dielectric material. A second gate dielectric material comprising a different material than the first gate dielectric material is deposited over the first region of the workpiece. A second gate material is deposited over the second gate dielectric material. The first gate material, the first gate dielectric material, the second gate material, and the second gate dielectric material are then patterned to form a CMOS device having a symmetric Vt for the PMOS and NMOS FETs.Type: GrantFiled: June 17, 2004Date of Patent: May 15, 2012Assignee: Infineon Technologies AGInventor: Hong-Jyh Li
-
Patent number: 8169030Abstract: In a static memory cell composed of four MOS transistors, the transistors composing a memory cell are formed on a substrate and have a drain, gate, and source arranged vertically with the gate surrounding a columnar semiconductor layer. In this memory cell, the first diffusion layers (second diffusion layers) functioning as a first memory node (second memory node) are connected via a first silicide layer (second silicide layer) formed on their surfaces, whereby an SRAM cell having a small area is realized. Furthermore, a first anti-leak diffusion layer (second anti-leak diffusion layer) having the conductivity type opposite to the first well is formed between the first well and the first diffusion layer (second diffusion layer) having the same conductivity type as the first well so as to prevent leak to the substrate.Type: GrantFiled: September 14, 2010Date of Patent: May 1, 2012Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Shintaro Arai
-
Patent number: 8159001Abstract: A graded junction space decreasing an implant concentration gradient between n-well and p-well regions of a semiconductor device is provided for enhancing breakdown voltage in high voltage applications. Split or unified FOX regions may be provided overlapping with the graded junction space. By using a p-well blocking layer to separate the p-well(s) and the n-well, breakdown voltage characteristic is improved without the cost of an additional mask or process change.Type: GrantFiled: July 19, 2006Date of Patent: April 17, 2012Assignee: Synopsys, Inc.Inventor: Bin Wang
-
Patent number: 8154078Abstract: A semiconductor structure is provided. A second conductivity type well region is disposed on a first conductivity type substrate. A gate structure comprising a first sidewall and second sidewall is provided. The first sidewall is disposed on the second conductivity type well region. A second conductivity type diffused source is disposed on the first conductivity type substrate outside of the second sidewall. A second conductivity type diffused drain is disposed on the second conductivity type well region outside of the first sidewall. First conductivity type buried rings are arranged in a horizontal direction, separated from each other, and formed in the second conductivity type well region. Doped profiles of the first conductivity type buried rings gradually become smaller in a direction from the second conductivity type diffused source to the second conductivity type diffused drain.Type: GrantFiled: February 17, 2010Date of Patent: April 10, 2012Assignee: Vanguard International Semiconductor CorporationInventors: Yih-Jau Chang, Shang-Hui Tu, Gene Sheu
-
Publication number: 20120074492Abstract: Methods and systems for monolithically fabricating a lateral double-diffused MOSFET (LDMOS) transistor having a source, drain, and a gate on a substrate, with a process flow that is compatible with a CMOS process flow are described.Type: ApplicationFiled: December 5, 2011Publication date: March 29, 2012Applicant: VOLTERRA SEMICONDUCTOR CORPORATIONInventors: Budong Yu, Marco A. Zuniga
-
Patent number: 8139362Abstract: A power module located on a conductive substrate including power conversion circuitry. The power conversion circuitry includes a magnetic device and at least one switch. The magnetic device includes a magnetic core having a surface facing the conductive substrate and a conductive clip facing a surface of the magnetic core with ends of the conductive clip electrically coupled to the conductive substrate to cooperatively form a winding therewith about the magnetic core. The power module also includes an encapsulant about the power conversion circuitry.Type: GrantFiled: October 5, 2005Date of Patent: March 20, 2012Assignee: Enpirion, Inc.Inventors: Ashraf W. Lotfi, Mathew A. Wilkowski, Trifon M. Liakopoulos, John D. Weld
-
Patent number: RE43945Abstract: A semiconductor device is the semiconductor device which includes more than one field effect transistor having a gate electrode to which an electrical interconnect wire is connected and a gate insulation film with a thickness of 6.0 nm or less and which comprises a first transistor group made up of a plurality of field effect transistors that are the same in thickness of gate insulation film, a second transistor group made up of a plurality of field effect transistors that are the same in thickness of gate insulation film with the thickness of gate insulation film being less than the thickness of the gate insulation film of the first transistor group, and a semiconductor substrate on which the first and second transistor groups are mounted together in a mixed manner, wherein an antenna ratio which is a ratio of the area of a wire to the gate area of a gate electrode is such that the maximum value of the second transistor group is greater than the maximum value of the first transistor group.Type: GrantFiled: July 25, 2008Date of Patent: January 29, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Noriaki Matsunaga, Hitomi Yamaguchi