With Complementary Field Effect Transistor Patents (Class 257/338)
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Patent number: 8120023Abstract: The present invention is directed to novel front side illuminated, back side contact photodiodes and arrays thereof. In one embodiment, the photodiode has a substrate with at least a first and a second side and a plurality of electrical contacts physically confined to the second side. The electrical contacts are in electrical communication with the first side through a doped region of a first type and a doped region of a second type, each of the regions substantially extending from the first side through to the second side. In another embodiment, the photodiode comprises a wafer with at least a first and a second side; and a plurality of electrical contacts physically confined to the second side, where the electrical contacts are in electrical communication with the first side through a diffusion of a p+ region through the wafer and a diffusion of an n+ region through the wafer.Type: GrantFiled: June 5, 2006Date of Patent: February 21, 2012Assignee: UDT Sensors, Inc.Inventors: Peter Steven Bui, Narayan Dass Taneja
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Patent number: 8119487Abstract: A Semiconductor device and method for fabricating the same are disclosed. The method includes implanting first conduction type impurities into a semiconductor substrate to form a first well, implanting second conduction type impurities into the first well to form a second well, implanting second conduction type impurities into the second well to form an impurity region, forming a gate on the semiconductor substrate, and implanting second conduction type impurities to form a drain region in the impurity region on one side of the gate.Type: GrantFiled: December 4, 2009Date of Patent: February 21, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Jong Min Kim
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Patent number: 8110878Abstract: There is provided a technology which allows improvements in manufacturing yield and product reliability in a semiconductor device having a triple well structure. A shallow p-type well is formed in a region different from respective regions in a p-type substrate where a deep n-type well, a shallow p-type well, and a shallow n-type well are formed. A p-type diffusion tap formed in the shallow p-type well is wired to a p-type diffusion tap formed in a shallow n-type well in the deep n-type well using an interconnection in a second layer. The respective gate electrodes of an nMIS and a pMIS each formed in the deep n-type well are coupled to the respective drain electrodes of an nMIS and a pMIS each formed in the substrate using an interconnection in a second or higher order layer.Type: GrantFiled: July 8, 2011Date of Patent: February 7, 2012Assignee: Renesas Electronics CorporationInventors: Naozumi Morino, Atsushi Hiraiwa, Kazutoshi Oku, Toshiaki Ito, Motoshige Igarashi, Takayuki Sasaki, Masao Sugiyama, Hiroshi Yanagita, Shinichi Watarai
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Patent number: 8110873Abstract: A high voltage transistor that includes a substrate where an active region is defined, a first impurity region and a second impurity region in the active region and a third impurity region between the first and second impurity regions, and a first gate electrode on the active region between the first impurity region and the third impurity region and a second gate electrode on the active region between the second impurity region and the third impurity region.Type: GrantFiled: December 19, 2008Date of Patent: February 7, 2012Assignee: SAMSUNG Electronics Co., Ltd.Inventors: Sung-Gon Choi, Hee-Seog Jeon
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Publication number: 20110309441Abstract: An integrated semiconductor device is provided. The integrated semiconductor device has a first semiconductor region of a second conductivity type, a second semiconductor region of a first conductivity type forming a pn-junction with the first semiconductor region, a non-monocrystalline semiconductor layer of the first conductivity type arranged on the second semiconductor region, a first well and at least one second well of the first conductivity type arranged on the non-monocrystalline semiconductor layer and an insulating structure insulating the first well from the at least one second well and the non-monocrystalline semiconductor layer. Further, a method for forming a semiconductor device is provided.Type: ApplicationFiled: June 21, 2010Publication date: December 22, 2011Applicant: INFINEON TECHNOLOGIES AGInventors: Matthias Stecher, Hans Weber, Lincoln O'Riain, Birgit von Ehrenwall
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Patent number: 8076736Abstract: A semiconductor device according to the present invention comprises a silicon carbide semiconductor substrate (1) including a silicon carbide layer (2); a high-concentration impurity region (4) provided in the silicon carbide layer (2); an ohmic electrode (9) electrically connected with the high-concentration impurity region (4); a channel region electrically connected with the high-concentration impurity region; a gate insulating layer (14) provided on the channel region; and a gate electrode (7) provided on the gate insulating layer (14). The ohmic electrode (9) contains an alloy of titanium, silicon and carbon, and the gate electrode (7) contains titanium silicide.Type: GrantFiled: February 12, 2008Date of Patent: December 13, 2011Assignee: Panasonic CorporationInventors: Masashi Hayashi, Shin Hashimoto
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Patent number: 8063443Abstract: An MOS-bipolar hybrid-mode LDMOS device has a main gate input and a control gate input wherein the device operates in an MOS mode when both gate inputs are enabled, and operates in a bipolar mode when the main gate input is enabled and the control gate input is disabled. The device can drive the gate of a power MOSFET to deliver the high current required by the power MOSFET while in the bipolar mode, and provide a fully switching between supply voltage and ground to the gate of the power MOSFET while in the MOS mode.Type: GrantFiled: October 30, 2007Date of Patent: November 22, 2011Assignee: Fairchild Semiconductor CorporationInventor: Jun Cai
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Patent number: 8012842Abstract: An integrated semiconductor structure that has first and second bipolar transistor structures. The first bipolar transistor structure has a doped tank region in contact with a doped tank region located underneath a contacting sinker. The second bipolar transistor structure has a doped buried region that is the same dopant type as its doped tank region. A method for fabricating an integrated semiconductor structure in a bulk semiconductor wafer. A first patterned photomask is used to form a doped buried region and a doped tank region within the first bipolar transistor structure. A second patterned photomask is used to form a doped buried region and a doped tank region within the second bipolar transistor, plus a doped buried region and a doped tank region underneath a contacting sinker adjacent to the first bipolar transistor.Type: GrantFiled: June 12, 2008Date of Patent: September 6, 2011Assignee: Texas Instruments IncorporatedInventors: Scott Balster, Badih El-Kareh, Hiroshi Yasuda
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Patent number: 8008667Abstract: A semiconductor device includes a first semiconductor layer and a first semiconductor element located in the first semiconductor layer. The semiconductor device also includes a second semiconductor layer of a transparent semiconductor material. The second semiconductor layer is disposed on the first semiconductor layer covering the first semiconductor element. The semiconductor device also includes a second semiconductor element located in the second semiconductor layer. The semiconductor device also includes a wire extending within the second semiconductor layer and electrically connecting the first and second semiconductor elements.Type: GrantFiled: December 13, 2007Date of Patent: August 30, 2011Assignee: Mitsubishi Electric CorporationInventors: Hidetoshi Koyama, Yoshitaka Kamo
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Patent number: 7999325Abstract: An example process to remove spacers from the gate of a NMOS transistor. A stress creating layer is formed over the NMOS and PMOS transistors and the substrate. In an embodiment, the spacers on gate are removed so that stress layer is closer to the channel of the device. The stress creating layer is preferably a tensile nitride layer. The stress creating layer is preferably a contact etch stop liner layer. In an embodiment, the gates, source and drain region have a silicide layer thereover before the stress creating layer is formed. The embodiment improves the performance of the NMOS transistors.Type: GrantFiled: September 30, 2008Date of Patent: August 16, 2011Assignee: Globalfoundries Singapore Pte. Ltd.Inventors: Young Way Teh, Yong Meng Lee, Chung Woh Lai, Wenhe Lin, Khee Yong Lim, Wee Leng Tan, John Sudijono, Hui Peng Koh, Liang Choo Hsia
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Patent number: 7989882Abstract: A transistor structure optimizes current along the A-face of a silicon carbide body to form an AMOSFET that minimizes the JFET effect in the drift region during forward conduction in the on-state. The AMOSFET further shows high voltage blocking ability due to the addition of a highly doped well region that protects the gate corner region in a trench-gated device. The AMOSFET uses the A-face conduction along a trench sidewall in addition to a buried channel layer extending across portions of the semiconductor mesas defining the trench. A doped well extends from at least one of the mesas to a depth within the current spreading layer that is greater than the depth of the trench. A current spreading layer extends between the semiconductor mesas beneath the bottom of the trench to reduce junction resistance in the on-state. A buffer layer between the trench and the deep well further provides protection from field crowding at the trench corner.Type: GrantFiled: December 7, 2007Date of Patent: August 2, 2011Assignee: Cree, Inc.Inventors: Qingchun Zhang, Anant Agarwal, Charlotte Jonas
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Patent number: 7982271Abstract: There is provided a technology which allows improvements in manufacturing yield and product reliability in a semiconductor device having a triple well structure. A shallow p-type well is formed in a region different from respective regions in a p-type substrate where a deep n-type well, a shallow p-type well, and a shallow n-type well are formed. A p-type diffusion tap formed in the shallow p-type well is wired to a p-type diffusion tap formed in a shallow n-type well in the deep n-type well using an interconnection in a second layer. The respective gate electrodes of an nMIS and a pMIS each formed in the deep n-type well are coupled to the respective drain electrodes of an nMIS and a pMIS each formed in the substrate using an interconnection in a second or higher order layer.Type: GrantFiled: October 11, 2010Date of Patent: July 19, 2011Assignee: Renesas Electronics CorporationInventors: Naozumi Morino, Atsushi Hiraiwa, Kazutoshi Oku, Toshiaki Ito, Motoshige Igarashi, Takayuki Sasaki, Masao Sugiyama, Hiroshi Yanagita, Shinichi Watarai
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Publication number: 20110156144Abstract: An integrated circuit with a core PMOS transistor formed in a first n-well and an isolated DENMOS (iso-DENMOS) transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same. A method of forming an integrated circuit with a core PMOS transistor formed in a first n-well and an iso-DENMOS transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same.Type: ApplicationFiled: June 28, 2010Publication date: June 30, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Kamel Benaissa, Greg C. Baldwin, Vineet Mishra, Ananth Kamath
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Publication number: 20110147837Abstract: A semiconductor chip having a transistor is described. The transistor having a gate electrode disposed over a gate dielectric. The gate electrode comprised of first gate material disposed on the gate dielectric and second gate material disposed on the gate dielectric. The first gate material being different than the second gate material. The second gate material also located at a source region or drain region of said gate electrode.Type: ApplicationFiled: December 23, 2009Publication date: June 23, 2011Inventors: Walid M. Hafez, Anisur Rahman
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Patent number: 7943456Abstract: A method for fabricating a CMOS integrated circuit (IC) and ICs therefrom includes providing a substrate having a semiconductor surface including PMOS regions for PMOS devices and NMOS regions for NMOS devices. A gate stack including a gate electrode layer is formed on a gate dielectric layer in or on both the PMOS regions and the NMOS regions. An n-type doping is used to create n-type wet etch sensitized regions on opposing sides of the gate stack in both the PMOS and said NMOS regions. Wet etching removes the n-type wet etch sensitized regions in (i) at least a portion of said PMOS regions to form a plurality of PMOS source/drain recesses or (ii) in at least a portion of said NMOS regions to form a plurality of NMOS source/drain recesses, or (i) and (ii). At least one of a compressive strain inducing epitaxial layer is formed in the plurality of PMOS source/drain recesses and a tensile strain inducing epitaxial layer is formed in the plurality of NMOS source/drain recesses.Type: GrantFiled: December 31, 2008Date of Patent: May 17, 2011Assignee: Texas Instruments IncorporatedInventors: Shaofeng Yu, Freidoon Mehrad, Brian K. Kirkpatrick
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Publication number: 20110074493Abstract: An integrated circuit containing a configurable dual n/p-channel 3-D resurf high voltage MOS field effect transistor (MOSFET) is disclosed. An n-channel drain is coterminous with a p-channel source in an n-well, and a p-channel drain is coterminous with an n-channel source in a p-well. A lateral drift region including n-type drift lanes and p-type drift lanes extends between the n and p wells. A resurf layer abuts the lateral drift region. The n-channel MOS gate is separate from the p-channel MOS gate. The p-channel MOS gate may be operated as a field plate in the n-channel mode, and vice versa. An n-channel MOS transistor may be integrated into the n-channel MOS source to provide an n-channel cascode transistor configuration, and similarly for a p-channel cascode configuration, to debias parasitic bipolar transistors under the MOS gates. Circuits using the MOSFET with various loads are also disclosed.Type: ApplicationFiled: September 16, 2010Publication date: March 31, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Hannes Estl
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Publication number: 20110049621Abstract: An integrated circuit with a transistor advantageously embodied in a laterally diffused metal oxide semiconductor device having a gate located over a channel region recessed into a semiconductor substrate and a method of forming the same. In one embodiment, the transistor includes a source/drain including a lightly or heavily doped region adjacent the channel region, and an oppositely doped well extending under the channel region and a portion of the lightly or heavily doped region of the source/drain. The transistor also includes a channel extension, within the oppositely doped well, under the channel region and extending under a portion of the lightly or heavily doped region of the source/drain.Type: ApplicationFiled: August 28, 2009Publication date: March 3, 2011Applicant: Enpirion Incorporated, A Delaware CorporationInventors: Ashraf W. Lotfi, William W. Troutman, Douglas Dean Lopata, Tanya Nigam
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Patent number: 7898028Abstract: A process for fabricating a MOSFET device featuring a channel region comprised with a silicon-germanium component is provided. The process features employ an angled ion implantation procedure to place germanium ions in a region of a semiconductor substrate underlying a conductive gate structure. The presence of raised silicon shapes used as a diffusion source for a subsequent heavily-doped source/drain region, the presence of a conductive gate structure, and the removal of dummy insulator previously located on the conductive gate structure allow the angled implantation procedure to place germanium ions in a portion of the semiconductor substrate to be used for the MOSFET channel region. An anneal procedure results in the formation of the desired silicon-germanium component in the portion of semiconductor substrate to be used for the MOSFET channel region.Type: GrantFiled: August 23, 2007Date of Patent: March 1, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Sun-Jay Chang, Shien-Yang Wu
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Patent number: 7875511Abstract: A CMOS structure includes an n-FET device comprising an n-FET channel region and a p-FET device comprising a p-FET channel region. The n-FET channel region includes a first silicon material layer located upon a silicon-germanium alloy material layer. The p-FET channel includes a second silicon material layer located upon a silicon-germanium-carbon alloy material layer. The silicon-germanium alloy material layer induces a desirable tensile strain within the n-FET channel. The silicon-germanium-carbon alloy material layer suppresses an undesirable tensile strain within the p-FET channel region. A silicon-germanium-carbon alloy material from which is comprised the silicon-germanium-carbon alloy material layer may be formed by selectively incorporating carbon into a silicon-germanium alloy material from which is formed the silicon-germanium alloy material layer.Type: GrantFiled: March 13, 2007Date of Patent: January 25, 2011Assignee: International Business Machines CorporationInventors: Liu Yaocheng, Ricardo A. Donaton, Kern Rim
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Patent number: 7868396Abstract: A power semiconductor component includes a drift zone in a semiconductor body, a component junction and a compensation zone. The component junction is disposed between the drift zone and a further component zone, which is configured such that when a blocking voltage is applied to the component junction, a space charge zone forms extending generally in a first direction in the drift zone. The compensation zone is disposed adjacent to the drift zone in a second direction and includes at least one high-dielectric material having a temperature-dependent dielectric constant. The temperature dependence of the compensation zone varies in the second direction.Type: GrantFiled: January 31, 2007Date of Patent: January 11, 2011Assignee: Infineon Technologies Austria AGInventors: Michael Rueb, Franz Hirler
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Patent number: 7868391Abstract: A 3-D (Three Dimensional) inverter having a single gate electrode. The single gate electrode has a first gate dielectric between the gate electrode and a body of a first FET (Field Effect transistor) of a first doping type, the first FET having first source/drain regions in a semiconductor substrate, or in a well in the semiconductor substrate. The single gate electrode has a second gate dielectric between the gate electrode and a body of a second FET of opposite doping to the first FET. Second source/drain regions of the second FET are formed from epitaxial layers grown over the first source/drain regions.Type: GrantFiled: June 4, 2009Date of Patent: January 11, 2011Assignee: International Business Machines CorporationInventors: Phil Christopher Felice Paone, David P. Paulsen, John E. Sheets, II, Kelly L. Williams
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Publication number: 20100320537Abstract: Provided are a semiconductor device and a method of fabricating the semiconductor device.Type: ApplicationFiled: August 30, 2010Publication date: December 23, 2010Applicant: Fairchild Korea Semiconductor, Ltd.Inventors: Jong-ho Park, Chang-ki Jeon, Hyi-Jeong Park, Hye-mi Kim
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Patent number: 7851883Abstract: This invention aims at providing an inexpensive semiconductor device having a parasitic diode and lowering an hfe of a parasitic PNP transistor and a manufacturing method thereof. Such semiconductor device includes a P-type silicon substrate and a gate electrode formed above the P-type silicon substrate. The P-type silicon substrate includes an N-type well layer, an N-type buried layer, a P-type body layer, an N-type source layer formed in the P-type body layer, and a drain contact layer formed in the N-type well layer. The P-type body layer and the N-type source layer are formed by self alignment that uses the gate electrode as a mask. The N-type drain contact layer is formed opposite the N-type source layer across the P-type body layer formed below the gate electrode. The N-type buried layer is formed below the P-type body layer.Type: GrantFiled: March 10, 2005Date of Patent: December 14, 2010Assignee: Panasonic CorporationInventors: Masaki Inoue, Akira Ohdaira
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Patent number: 7847349Abstract: In accordance with exemplary embodiments, a Fast Fourier Transform (FFT) architecture includes elements that perform a radix-2 FFT butterfly in one processor clock cycle at steady state. Some exemplary implementations of the FFT architecture incorporate register and data path elements that relieve memory bandwidth limitations by pairing operands consumed by and results generated by two adjacent butterflies in the overall N-point FFT operation.Type: GrantFiled: October 31, 2007Date of Patent: December 7, 2010Assignee: Agere Systems Inc.Inventor: Matthew R. Henry
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Patent number: 7843006Abstract: A semiconductor component arrangement includes a power transistor and a temperature measurement circuit. The power transistor includes a gate electrode, a source zone, a drain zone and a body zone. The body zone is arranged in a first semiconductor zone of a first conduction type. The temperature measuring circuit comprises a temperature-dependent resistor and an evaluation circuit coupled to the temperature-dependent resistor. The resistor is formed by a portion of said first semiconductor zone.Type: GrantFiled: February 1, 2007Date of Patent: November 30, 2010Assignee: Infineon Technologies AGInventors: Rainald Sander, Markus Zundel
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Publication number: 20100276752Abstract: A voltage converter can include an output circuit having a vertical high-side device and a vertical low-side device which can be formed on a single die (i.e. a “PowerDie”). The high side device can be a PMOS transistor, while the low side device can be an NMOS transistor. The source of the PMOS transistor and the source of the NMOS transistor can be formed from the same metal structure, with the source of the high side device electrically connected to VIN and the source of the low side device electrically connected to ground. A drain of the high side PMOS transistor can be electrically shorted to the drain of the low side NMOS transistor during device operation using a metal layer which is interposed between the transistors and a semiconductor substrate.Type: ApplicationFiled: March 5, 2010Publication date: November 4, 2010Inventor: François Hébert
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Patent number: 7821076Abstract: There is provided a technology which allows improvements in manufacturing yield and product reliability in a semiconductor device having a triple well structure. A shallow p-type well is formed in a region different from respective regions in a p-type substrate where a deep n-type well, a shallow p-type well, and a shallow n-type well are formed. A p-type diffusion tap formed in the shallow p-type well is wired to a p-type diffusion tap formed in a shallow n-type well in the deep n-type well using an interconnection in a second layer. The respective gate electrodes of an nMIS and a pMIS each formed in the deep n-type well are coupled to the respective drain electrodes of an nMIS and a pMIS each formed in the substrate using an interconnection in a second or higher order layer.Type: GrantFiled: April 12, 2009Date of Patent: October 26, 2010Assignee: Renesas Electronics CorporationInventors: Naozumi Morino, Atsushi Hiraiwa, Kazutoshi Oku, Toshiaki Ito, Motoshige Igarashi, Takayuki Sasaki, Masao Sugiyama, Hiroshi Yanagita, Shinichi Watarai
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Patent number: 7812394Abstract: This invention adds to the art of replacement source-drain cMOS transistors. Processes may involve etching a recess in the substrate material using one equipment set, then performing deposition in another. Disclosed is a method to perform the etch and subsequent deposition in the same reactor without atmospheric exposure. In-situ etching of the source-drain recess for replacement source-drain applications provides several advantages over state of the art ex-situ etching. Transistor drive current is improved by: (1) Eliminating contamination of the silicon-epilayer interface when the as-etched surface is exposed to atmosphere and (2) Precise control over the shape of the etch recess. Deposition may be done by a variety of techniques including selective and non-selective methods. In the case of blanket deposition, a measure to avoid amorphous deposition in performance critical regions is also presented.Type: GrantFiled: October 13, 2008Date of Patent: October 12, 2010Assignee: Intel CorporationInventors: Anand Murthy, Glenn A. Glass, Andrew N. Westmeyer, Michael L. Hattendorf, Jeffrey R. Wank
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Publication number: 20100252883Abstract: This invention provides a lateral high-voltage semiconductor device, which is a three-terminal one with two types of carriers for conduction and consists of a highest voltage region and a lowest voltage region referring to the substrate and a surface voltage-sustaining region between the highest voltage region and the lowest voltage region. The highest voltage region and the lowest region have an outer control terminal and an inner control terminal respectively, where one terminal is for controlling the flow of majorities of one conductivity type and another for controlling the flow of majorities of the other conductivity type. The potential of the inner control terminal is regulated by the voltage applied to the outer control terminal.Type: ApplicationFiled: April 2, 2010Publication date: October 7, 2010Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGYInventor: Xingbi Chen
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Patent number: 7786518Abstract: Semiconductor devices and fabrication methods are provided in which disposable gates are formed over isolation regions. Sidewall structures, including disposable sidewall structures, are formed on sidewalls of the disposable gates. An epitaxially grown silicon germanium is formed in recesses defined by the sidewalls. The process provides a compressive strained channel in the device without faceting of the epitaxially grown silicon germanium.Type: GrantFiled: September 17, 2008Date of Patent: August 31, 2010Assignee: Texas Instruments IncorporatedInventors: Srinivasan Chakravarthi, Periannan Chidambaram
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Publication number: 20100187606Abstract: A manufacturing method of a semiconductor device including an LDMOS transistor includes: a process (a) of forming a first conductive well diffusion layer in the semiconductor substrate; a process (b) of sequentially forming a gate insulator film, a gate conductive film, and a photoresist film on a region on the semiconductor substrate corresponding to the well diffusion layer; a process (c) of performing photolithography to remove a part of the photoresist film formed in a predetermined region, and etching the gate conductive film using a remaining part of the photoresist film as a mask so as to form an opening in the predetermined region; a process (d) of doping second conductive impurity ions using a remaining part of the gate conductive film and the remaining part of the photoresist film as a mask so as to form the body layer; and a process (e) of removing the remaining part of the gate conductive film except a part corresponding to the gate electrode formed based on a part that constitutes a lateral surfaType: ApplicationFiled: January 20, 2010Publication date: July 29, 2010Inventors: Yasushi KOBAYASHI, Masaki Inoue, Kohei Miyagawa
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Patent number: 7763945Abstract: A semiconductor device pair is provided. The semiconductor device pair comprises a semiconductor substrate comprising a first gate structure with a first type polarity and a second gate structure with a second type polarity, the first and the second gate structures comprise a high-K gate dielectric. A plurality of oxygen-free offset spacer portions are adjacent either side of the respective first and second gate structures, each comprising a stressed dielectric layer, to induce a desired strain on a respective channel region while sealing respective high-K gate dielectric sidewall portions, wherein the oxygen-free offset spacer portions adjacent either side of the first gate structure and the oxygen-free offset spacer portions adjacent either side of the second gate structure are formed with different shapes.Type: GrantFiled: April 18, 2007Date of Patent: July 27, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Hao Wang, Shang-Chih Chen
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Patent number: 7759744Abstract: A semiconductor device 100 includes a silicon substrate 102, an N-type MOSFET 118 including a first high dielectric constant film 111 and a polycrystalline silicon film 114 on the silicon substrate 102, and a P-type MOSFET 120 including a second high dielectric constant film 12 and a polycrystalline silicon film 114 juxtaposed to N-type MOSFET 118 on the silicon substrate 102. The second high dielectric constant film 112 is formed to have the film thickness thinner than the film thickness of the first high dielectric constant film 111. The first high dielectric constant film 111 and the second high dielectric constant film 112 contains one or more element(s) selected from Hf and Zr.Type: GrantFiled: May 16, 2005Date of Patent: July 20, 2010Assignees: NEC Electronics Corporation, NEC CorporationInventors: Naohiko Kimizuka, Kiyotaka Imai, Yuri Masuoka, Toshiyuki Iwamoto, Motofumi Saitoh, Hirohito Watanabe, Masayuki Terai
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Patent number: 7750411Abstract: Provided is a semiconductor integrated circuit device, which includes: a low-voltage MOS transistor having a source/drain region formed of a low impurity concentration region and a high impurity concentration region; and a high-voltage MOS transistor similarly having a source/drain region formed of a low impurity concentration region and a high impurity concentration region, in which, the source/drain high impurity concentration region of the low-voltage NMOS transistor is doped with arsenic, while the source/drain high impurity concentration region of the high-voltage NMOS transistor is doped with phosphorus.Type: GrantFiled: June 26, 2007Date of Patent: July 6, 2010Assignee: Seiko Instruments Inc.Inventors: Hirofumi Harada, Hisashi Hasegawa, Hideo Yoshino
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Patent number: 7745890Abstract: A semiconductor device and system for a hybrid metal fully silicided (FUSI) gate structure is disclosed. The semiconductor system comprises a PMOS gate structure, the PMOS gate structure including a first high-? dielectric layer, a P-metal layer, a mid-gap metal layer, wherein the mid-gap metal layer is formed between the high-? dielectric layer, the P-metal layer and a fully silicided layer formed on the P-metal layer. The semiconductor system further comprises an NMOS gate structure, the NMOS gate structure includes a second high-? dielectric layer, the fully silicided layer, and the mid-gap metal layer, wherein the mid-gap metal layer is formed between the high-? dielectric and the fully silicided layer.Type: GrantFiled: September 28, 2007Date of Patent: June 29, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Cheng-Tung Lin, Cheng-Hung Chang, Hsiang-Yi Wang, Chen-Nan Yeh
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Patent number: 7737495Abstract: The present invention provides a semiconductor device including an N channel MIS type transistor and a P channel MIS type transistor. The semiconductor device includes a first inter-layer film formed on the NMIS transistor and having a tensile stress, and a second inter-layer film formed on the first inter-layer film and a PMIS transistor and having a compressive stress, and the compressive stress in the second inter-layer film is relaxed on the upper side of the first inter-layer film.Type: GrantFiled: May 10, 2006Date of Patent: June 15, 2010Assignee: Sony CorporationInventor: Kiyota Hachimine
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Publication number: 20100109081Abstract: A semiconductor device and an IC chip are described. The deep N-well region is configured in a substrate. The P-well region surrounds a periphery of the deep N-well region. The gate structure is disposed on the substrate of the deep N-well region. The P-body region is configured in the deep N-well region at one side of the gate structure. The first N-type doped region is configured in the P-body region. The second N-type doped region is configured pin the deep N-well region at the other side of the gate structure. The first isolation structure is disposed between the gate structure and the second N-type doped region. The N-type isolation ring is configured in the deep N-well region and corresponding to an edge of the deep N-well region, wherein a doping concentration of the N-type isolation ring is higher than that of the deep N-well region.Type: ApplicationFiled: October 31, 2008Publication date: May 6, 2010Applicant: United Microelectronics Corp.Inventors: Chin-Lung Chen, Chun-Ching Yu, Jung-Ching Chen, Ming-Tsung Tung
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Publication number: 20100102387Abstract: An inventive semiconductor device includes a semiconductor layer, a source region provided in a surface layer portion of the semiconductor layer, a drain region provided in the surface of the semiconductor layer in spaced relation from the source region, a gate insulation film provided in opposed relation to a portion of the surface of the semiconductor layer present between the source region and the drain region, a gate electrode provided on the gate insulation film, and a drain-gate isolation portion provided between the drain region and the gate insulation film for isolating the drain region and the gate insulation film from each other in non-contact relation.Type: ApplicationFiled: June 19, 2008Publication date: April 29, 2010Applicant: ROHM COL, LTD.Inventor: Mitsuo Kojima
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Publication number: 20100078721Abstract: A field-effect transistor (142) includes a lowly p-doped region 110 formed on a surface of a substrate (102), an n-doped drain region 112 and n-doped source region 114 arranged on a surface of the lowly p-doped region 110, and a device isolation insulating film 132 and device isolation insulating film 134. Here, the device isolation insulating film 132 is formed greater in film thickness than the device isolation insulating film 134; and in the n-doped source region 114, the peak concentration section having a highest dopant concentration is formed in a deeper position than in the n-doped drain region 112.Type: ApplicationFiled: September 29, 2009Publication date: April 1, 2010Applicant: NEC ELECTRONICS CORPORATIONInventor: Hiroki FUJII
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Patent number: 7687906Abstract: A connecting terminal provided on a substrate and a connector provided on an electronic device are connected via a bump formed of a first member, which is formed of an anisotropic conductive paste including particles of a conductive material, and a second member which is different in conductivity from the first member. According to such a structure, since the anisotropic conductive paste which is softer as compared to a solder bump is used, stress applied to an interface between the bump and the connecting terminal is relaxed. Accordingly, reliability of connection can be assured even when using a substrate with large surface irregularities and/or bending, in which stress occurs relatively easily in a connection part of the bump and the connecting terminal.Type: GrantFiled: March 28, 2007Date of Patent: March 30, 2010Assignee: Brother Kogyo Kabushiki KaishaInventor: Masanori Tsuruko
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Patent number: 7687862Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a first transistor having a first active area, and a second transistor having a second active area. A top surface of the first active area is elevated or recessed with respect to a top surface of the second active area, or a top surface of the first active area is elevated or recessed with respect to a top surface of at least portions of an isolation region proximate the first transistor.Type: GrantFiled: May 13, 2008Date of Patent: March 30, 2010Assignee: Infineon Technologies AGInventors: Frank Huebinger, Richard Lindsay
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Publication number: 20100052049Abstract: An integrated circuit with a transistor advantageously embodied in a laterally diffused metal oxide semiconductor device having a gate located over a channel region recessed into a semiconductor substrate and a method of forming the same. In one embodiment, the transistor includes a source/drain including a lightly or heavily doped region adjacent the channel region, and an oppositely doped well extending under the channel region and a portion of the lightly or heavily doped region of the source/drain. The transistor also includes a channel extension, within the oppositely doped well, under the channel region and extending under a portion of the lightly or heavily doped region of the source/drain.Type: ApplicationFiled: August 28, 2009Publication date: March 4, 2010Applicant: Enpirion, Incorporated, A Delaware CorporationInventors: Ashraf W. Lotfi, William W. Troutman, Douglas Dean Lopata, Tanya Nigam
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Publication number: 20100051946Abstract: A poly-emitter type bipolar transistor includes a buried layer formed over an upper portion of a semiconductor substrate, an epitaxial layer formed on the semiconductor substrate, a collector area formed on the epitaxial layer and connected to the buried layer, a base area formed at a part of an upper portion of the epitaxial layer, and a poly-emitter area formed on a surface of the semiconductor substrate in the base area and including a polysilicon material. A BCD device includes a poly-emitter type bipolar transistor having a poly-emitter area including a polysilicon material and at least one of a CMOS and a DMOS formed on a single wafer together with the poly-emitter type bipolar transistor.Type: ApplicationFiled: August 24, 2009Publication date: March 4, 2010Inventor: Bon-Keun Jun
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Publication number: 20100025761Abstract: Design structures, structures and methods of manufacturing structures for providing latch-up immunity for mixed voltage integrated circuits. The structure includes a diffused N-Tub structure embedded in a P-wafer and provided below a retrograde N-well to a non-isolated CMOS logic.Type: ApplicationFiled: July 31, 2008Publication date: February 4, 2010Inventor: Steven H. Voldman
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Patent number: 7645692Abstract: In one embodiment of the present invention, provided is a semiconductor device having a silicon substrate provided with a DRAM region containing first transistors and capacitor elements, and with a logic region containing second transistors. A minimum gate length of the second transistors provided in the logic region is smaller than a minimum gate length of the first transistors provided in the DRAM region. One of a cobalt silicide layer and a titanium silicide layer is provided on source/drain regions and on gate electrodes of the first transistors provided in the DRAM region, and a nickel-containing silicide layer is provided on source/drain regions and on gate electrodes of the second transistors provided in the logic region.Type: GrantFiled: November 27, 2007Date of Patent: January 12, 2010Assignee: NEC Electronics CorporationInventors: Yoshihisa Matsubara, Hiroki Shirai
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Patent number: 7646067Abstract: A CMOS transistor and a method of manufacturing the CMOS transistor are disclosed. An NMOS transistor is formed on a first region of a semiconductor substrate. A PMOS transistor is formed on a second region of a semiconductor substrate. The NMOS transistor includes a first gate conductive layer. The PMOS transistor includes a second gate conductive layer. The first gate conductive layer includes a metal having a nitrogen concentration increasing in a direction from a lower portion toward an upper portion. In addition, the metal has a work function of about 4.0 eV to about 4.3 eV. The third gate conductive layer includes a metal having a nitrogen concentration increasing in a direction from a lower portion toward an upper portion. In addition, the metal has a work function of about 4.7 eV to about 5.0 eV.Type: GrantFiled: August 10, 2007Date of Patent: January 12, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Gab-Jin Nam, Myoung-Bum Lee
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Publication number: 20100001342Abstract: A method for manufacturing a semiconductor device is disclosed. The method includes: forming a LDMOS region, an offset drain MOS region, and a CMOS region; simultaneously forming a first well in the LDMOS region and the offset drain MOS region; simultaneously forming a second well in the first well of the LDMOS region and the CMOS region; and forming a second well in the CMOS region, wherein a depth of the first well is larger than a depth of the second well and the second well is a retrograde well formed by a high energy ion implantation method.Type: ApplicationFiled: June 25, 2009Publication date: January 7, 2010Applicant: SEIKO EPSON CORPORATIONInventors: Tomoyuki Furuhata, Hideyuki Akanuma, Hiroaki Nitta
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Publication number: 20090321825Abstract: A semiconductor device fabricating method is described. The semiconductor device fabricating method comprises forming an epitaxial layer on a substrate, wherein the epitaxial layer is the same conductive type as the substrate. A first doped region having the different conductive type from the epitaxial layer is formed in the epitaxial layer. An annealing process is performed to diffuse dopants in the first doped region. A second doped region and an adjacent third doped region are formed in the first doped region. The second doped region is a different conductive type from that of the first doped region, and the third doped region is the same conductive type as that of the first doped region. A gate structure is formed on the epitaxial layer covering a portion of the second and the third doped regions.Type: ApplicationFiled: June 29, 2009Publication date: December 31, 2009Applicant: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Chu-Feng CHEN, Chung-Ren LAO, Pai-Chun KUO, Chien-Hsien SONG, Hua-Chun CHIUE, An-Hung LIN
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Patent number: 7638837Abstract: A stress-enhanced semiconductor device is provided which includes a substrate having an inactive region and an active region, a first-type stress layer overlying at least a portion of the active region, and a second-type stress layer. The active region includes a first lateral edge which defines a first width of the active region, and a second lateral edge which defines a second width of the active region. The second-type stress layer is disposed adjacent the second lateral edge of the active region.Type: GrantFiled: September 25, 2007Date of Patent: December 29, 2009Assignee: GlobalFoundries Inc.Inventors: Akif Sultan, Mark Michael, Donna Michael, legal representative, David Wu
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Patent number: RE42776Abstract: An integrated circuit biases the substrate and well using voltages other than those used for power and ground. Tap cells inside the standard cell circuits are removed. New tap cells used to bias the substrate and well reside outside the standard cell circuits. The location of the new voltage power rails is designated prior to placement of the tap cells in the integrated circuit. The tap cells are then strategically placed near the power rails such that metal connections are minimized. Circuit density is thus not adversely impacted by the addition of the new power rails. Transistors are also placed inside the tap cells to address electrostatic discharge issues during fabrication.Type: GrantFiled: May 23, 2007Date of Patent: October 4, 2011Assignee: Marvell International Ltd.Inventors: Lawrence T. Clark, Vikas R. Amrelia, Raphael A. Soetan, Eric J. Hoffman, Tuan X. Do