Abstract: A method and structure therefor for the formation of lightly doped drain regions, typically used in the manufacture of a field effect devices. The method includes the steps of providing a semiconductor substrate with a P type well region and an N type well region. Gate electrodes are formed overlying gate dielectric over each P type well and N type well regions. The method then performs a blanket N type implant step at an angle being about 20 degrees and greater from a perpendicular to the gate electrodes into both the P type and N type well regions. The blanket N type implant forms an LDD region in the P type well, and a buried region in the N type well. Sidewall spacers are then formed on edges of the gate electrodes. An N type implant step is then performed on the P type well region to form the source/drain region of a NMOS device. The method then performs two separate P type implants into the N type well, each at different angles and dosages, to form the P type LDD source/drain region for a PMOS device.

Abstract: In a semiconductor device, a first conductive film made of, for example, polysilicon is formed on the element region of the semiconductor substrate. An insulation film is formed on the semiconductor substrate, for covering at least the first conductive film. A second conductive film covers at least the end portion of the insulation film. The first conductive film is used as a gate electrode of the MOS transistor, and the second conductive film is used as a protection film for covering and protecting the end portion of the insulation film and a lead-out electrode of the bipolar transistor. The end portion of the insulation film is covered and protected by the second conductive film obtained by patterning the conductive layer made of, for example, polysilicon. Further, the conductive layer is patterned so that stepped portions formed on the insulation film and the end portion of the insulation film are covered, and using this pattern, anisotropic etching is carried out.

Abstract: A recording head comprises a liquid emission member having an orifice through which an ink is emitted, an electro-thermal converter element for generating a thermal energy which is utilized to emit the ink introduced into the liquid emission member, and a functional element disposed on a same substrate on which the electro-thermal converter element is disposed for driving and controlling the electro-thermal converter element.The functional element includes an NPN bipolar transistor for driving the electrothermal converter element and a CMOS transistor composed of an NMOS transistor and a PMOS transisfor for controlling an operation of the bipolar transistor.The NMOS transistor being formed in a P well diffusion layer in an N.sup.- type epitaxial growth layer which is grown on a surface of a P type semiconductor substrate.The PMOS transistor being formed in an N well diffusion layer in the N.sup.- type epitaxial growth layer which is grown on the surface of the P type semiconductor substrate.

Abstract: A select MOS transistor and a data storage MOS transistor are formed in an element region. The transistor has floating-gate electrodes. The floating-gate electrodes are spaced apart above the element region and connected to each other above a field region. Only a tunnel insulating film much thinner than a gate insulating film of the transistor is placed between the floating-gate electrode and a drain region. Only the gate insulating film much thinner than the gate insulating film of the transistor is placed between the floating-gate electrode and the channel region of the transistor. In the element region, the shape of a control electrode is the same as that of the floating-gate electrodes.

Abstract: A BiCMOS manufacturing process for fabricating an emitter of a bipolar transistor includes the steps of forming footings on a silicon substrate for prospectively bearing edges of the emitter, forming a polysilicon emitter having a medial portion overlying the silicon substrate and lateral edges on the footings, removing the footings leaving notches at the lateral edges of the polysilicon emitter and refilling the notches with a thin polysilicon film. The bipolar transistor in a BiCMOS integrated circuit resulting from this process includes a silicon semiconductor substrate having a substantially flat surface, a field oxide film laterally bounding the silicon semiconductor substrate and a polysilicon emitter abutting the flat surface of the silicon semiconductor substrate.

Abstract: Bipolar transistor, potentially with monolithically integrated MOSFETs, in the body silicon layer having a thickness of approximately 0.6 .mu.m in a SOI substrate, have a collector region and a base region that are produced by implantation. An oxide layer provided for the gate oxide of the MOSFETs is applied surface-wide and is partially removed in the region of the bipolar transistor, a polysilicon layer (5) also employed for the gate electrodes of the MOSFETs is applied and structured. Implantation for highly doped termination regions (5, 10, 12) for emitter, base and collector ensue with masks (13). An emitter region (8) is driven out of the highly doped polysilicon layer as terminal region for the emitter in a temperature step. The doping degree of the collector region, as lowest doped region, can be selected so light that the collector region is completely depleted. The function corresponds to a vertical bipolar transistor with a lateral collector space-charged zone.

Abstract: A semiconductor device comprises a p-type semiconductor substrate, an n-type semiconductor well formed on the substrate and connected to a positive power supply, a p-type semiconductor source formed within the n-type semiconductor well, a p-type semiconductor layer formed within the n-type semiconductor well and having a lower impurity concentration than the p-type semiconductor source, a first gate electrode formed over a region between the p-type semiconductor source and the p-type semiconductor layer through an insulating film, an n-type semiconductor emitter formed over the p-type semiconductor layer within the n-type semiconductor well, a first conductive layer formed over the n-type semiconductor well to connect with said p-type semiconductor source.

Abstract: A semiconductor integrated circuit device, comprises: an n.sup.+ -type buried layer 12 formed on a surface of a p-type semiconductor substrate 11; an n-type semiconductor layer 71 formed on the n.sup.+ -type buried layer 12; a first p type well 16 formed in the semiconductor layer 71; a second p-type well 18 formed in the semiconductor layer 71 and electrically isolated from the first p-type well 16; an input-protecting N-type MOS transistor 102 formed in the first p-type well 16 and having a drain 22 grounded, a source 25 connected to an input terminal 101 to which an external signal is input, and a gate 23 grounded; and an n.sup.+ -type impurity region 27 grounded and formed in the second p-type well 18. Whenever a negative surge voltage is applied to the input terminal 101, a current path is formed from the ground V.sub.SS to the input terminal 101, by way of the impurity region 27 formed in the second p-type well 18, the n.sup.

Abstract: A lateral bipolar transistor comprising a self-aligned polysilicon base contact, and polysilicon emitter and collector contacts is provided. The self-aligned base contact significantly reduces the base width and therefore the base resistance compared with conventional lateral bipolar transistors, thus improving f.sub.t and f.sub.max. The polysilicon emitter and collector contacts improve the emitter efficiency and current gain, and allows for more flexible contact placement. The process is compatible with conventional double-poly bipolar processes.

Abstract: The present invention includes a BiMOS device having an MOS transistor that triggers a bipolar transistor, wherein the base and channel region are formed within a well region that electrically floats. The present invention also includes a BiMOS device having separate regions for the collector and drain regions and for the base and channel regions. The present invention further includes processes for forming the BiMOS devices. The BiMOS device may include a floating well region. The BiMOS device may include both low voltage MOS logic transistors and a high voltage or high power bipolar transistor. A low voltage or low power bipolar transistor may also be used. Separate drain, collector, base, and channel regions allow the bipolar transistor performance to be optimized independently of the MOS transistor, which may have its performance independently optimized, too. A plurality of MOS logic transistors, such as an AND or an OR gate may be used in the BiMOS device.

Abstract: Disclosed is an integrated transistor structure having increased conductance and operating speed including a complementary insulated gate field effect transistor pair, each including a source and a drain region with a gate contact positioned therebetween, ohmic contacts to the sources, and a rectifying junction contact to each of the drain regions. The gates of the two transistors are interconnected and function as the input terminal, and the two rectifying contacts are interconnected as the output of the device. The structure includes a semiconductor substrate having slow diffusant dopants therein or implanted metal ions of cobalt, molybdenum, or tungsten. The structure further includes an epitaxial semiconductor layer with resistance on the order of 0.5 to 1.0 ohm cm and a thickness of 1.5 to 5.0 .mu.m. The device regions for the field effect transistor pair are formed in the epitaxial semiconductor layer.

Abstract: In a MOS-type semiconductor device having a semiconductor substrate, a drain region, a source region, and a gate electrode between the drain region and the source region, a substrate contact region of a conductivity type the same as that of the semiconductor substrate is formed adjacent to the source region, and is wider than the source region and the drain region.

Abstract: A monolithic semiconductor device includes a field effect transistor and a bipolar junction transistor with an elevated emitter structure. An elevation structure raises the BJT emitter above the plane of the base. The elevation structure increases travel distance between a heavily doped base contact region and the emitter and protects against encroachment without increasing the total surface area allocated to the BJT device. A spacer oxide separates the polysilicon base contact and the elevation structure.

Abstract: A method in accordance with one embodiment of the present invention may be used to self-align isolation regions, sinkers, and wells. In this improved method, P+ isolation regions, N+ sinkers, and P-wells are defined using the same masking step used to define the N-wells. The use of a single masking step to initially define the P+ isolation regions, N+ sinkers, N-wells, and P-wells results in the self-alignment of these regions. Several critical mask alignments are thereby eliminated, thus avoiding/simplifying fabrication steps, conserving die area, and allowing increased component density.

Abstract: Dielectrically isolated semiconductor devices such as DMOS and ZGBT devices comprise a substrate having upper and lower surfaces. Source, drain and channel regions are disposed along the upper surface. The drain region extends downwardly to the lower surface of the substrate and laterally beneath the source and channel region. The drain merges with an underlying region of high conductivity. The underlying region is generally flat except for an upwardly extending portion thereof laterally disposed from the source region and providing a lower resistance path for current through the drain region. The DMOS devices can be included within an integrated circuit chip containing other types of semiconductor devices.

Abstract: In a memory cell array, memory cells are formed in a matrix. Bit lines are formed to be connected to prescribed memory cells. Emitters of bipolar transistors are connected to bit lines. Bipolar transistors have their bases connected to each other, and further to precharge signal control means. Collector regions of bipolar transistors are connected to a power supply node. Bipolar transistors have a base region formed by introducing a p type impurity to the entire main surface of the semiconductor substrate, and n type impurity concentration included in the collector region immediately below the base region is at most 5.times.10.sup.18 cm.sup.-1. Consequently, a semiconductor memory device having a bipolar transistor which is capable of high speed operation and having high reliability can be manufactured at low cost.

Abstract: In a bipolar or BiCMOS process, a heavily doped buried layer of a first conductivity type and a heavily doped channel stop region of a second conductivity type are formed in a lightly doped substrate of the second conductivity type. A lightly doped epitaxial layer of the first conductivity type is grown. An implant of the first conductivity type creates a guard ring around the bipolar transistor active region and also creates a higher-doped collector region inside the active region. In the BiCMOS process, during the formation of CMOS wells, a silicon nitride mask over the bipolar transistor inhibits oxidation of the epitaxial layer and the oxidation-enhanced diffusion of the buried layer. As a result, the epitaxial layer can be made thinner, reducing the collector resistance. The MOS transistor wells can be formed without an underlying buried layer, simplifying the process and decoupling the bipolar and MOS transistor characteristics from each other.

Abstract: Spacers are formed on the inside walls of a narrow silicon loss trench of a poly-emitter type bipolar transistor structure so that at most a narrow strip on the bottom of the trench receives high concentration doping when an extrinsic base region of the bipolar transistor is being doped. The narrowness of the exposed silicon surface which is etched to form the silicon loss trench slows vertical etching and thereby facilitates the formation of a shallow trench. The narrowness of the strip on the bottom of the trench which receives high concentration doping causes slow vertical diffusion of dopants. As a result, the highly doped link region which extends downward from the bottom of the trench does not extend downward much farther than the base region. A high cutoff frequency is therefore achievable by reducing the distance between the bottom of the base region and the top of the buried layer without decreasing the base-to-collector breakdown voltage.

Abstract: Bipolar transistors and MOS transistors on a single semiconductor substrate involves depositing a single layer of polysilicon on a substrate, including complementary transistors of either or both types, and a method for fabricating same. The devices are made by depositing a single layer of polysilicon on a substrate and etching narrow slots in the form of rings around every bipolar emitter area, which slots are thereafter filler with an insulating oxide. Then, emitters and extrinsic base regions are formed. The emitters are self-aligned to the extrinsic base regions. An optical cladding procedure produces a surface layer of a silicide compound, a low resistance conductor. The resulting structure yields a high-performance device in which the size constraints are at a minimum and contact regions may be made at the top surface of the device.

Abstract: A bipolar transistor module which can be implemented into existing CMOS processes without the use of buried layers of epitaxy is described. The transistor makes use of a synthesis of new ideas to achieve high performance. Extended polysilicon electrodes (2,4,6) are utilised to reduce device dimensions and a compatible well is described which maintains a p-channel MOS transistor electrical characteristics whilst lowering the collector series resistance.

Abstract: The invention relates to a method of making a monolithic integrated circuit with at least one CMOS field-effect transistor and one npn bipolar transistor wherein a thin oxide layer is covered with a protective polysilicon layer in both the bipolar-transistor area and the field-effect-transistor area.

Abstract: A multi-channel type intelligent power IC which solves the problems of parasitic transistor and increase in an area of isolation region, both of which are inherent problem in a pn junction isolation substrate. The power IC also enhances heat-radiation performance. An n type first semiconductor substrate and p type second semiconductor substrate are directly bonded, and a buried oxide film is formed in a portion of a bonding interface thereof. Subsequently, a plurality of isolation trenches are formed and the first semiconductor substrate is separated into an SOI isolation region and a pn isolation region. Logic elements are then formed in the SOI isolation region, and power elements are formed in the pn isolation region. In the case wherein two or more logic elements are hereby formed, the logic elements are isolated by isolation trenches. In the case wherein two or more power elements are formed, a parasitic current extracting portion is formed between mutual power elements.

Abstract: The invention relates to a combination of monolithically integrated semiconductor arrays each having a number of prefabricated standard elements that can be connected together using one or more metalization layers to form different signal processing units. The standard elements prefabricated on the semiconductor array comprise a number of base cells, a number of capacitors, a number of output transistors and a number of photodiodes arranged in rows and columns. The base cells each contain a number of npn and pnp transistors and a number of resistors. The common arrangement of base cells for signal processing and a photodiode array arranged in rows and columns in addition to the capacitors and output transistors permit low cost manufacture at short notice and in small production quantities of a wide variety of different photodetectors with integrated electronic circuits.

Abstract: There is disclosed a short-channel FET which is excellent in properties and adapted for mass production. FETs of this construction can be packed at a high density. There is also disclosed a method for forming this FET. The semiconductor substrate of this FET has a plateau-shaped portion protruding from the body of the substrate. This plateau-shaped portion is substantially identical in contour with a gate electrode formed over it. The gate electrode is in register with the plateau-shaped portion. With respect to the relation of doped regions of the substrate becoming the source and drain to the channel region, the narrowest portion in the channel region is not in contact with a gate-insulating film.

Abstract: A BiCMOS semiconductor device includes a pair of p-channel and n-channel MOS field effect transistors, a hetero-junction bipolar transistor including an epitaxial base layer made of a first compound semiconductor, and a homo-junction bipolar transistor including a base layer made of a second semiconductor. The hetero-junction bipolar transistor is operated in a low collector current region less than a critical collector current value at which the hetero-junction bipolar transistor has the maximum value of a cutoff frequency thereof. The homo-junction bipolar transistor is operated in a high collector current region more than a critical collector current value at which the homo-junction bipolar transistor has the maximum value of a cutoff frequency thereof.

Abstract: A semiconductor device with a non-volatile memory on a data processing block, having a semiconductor substrate (100); a data processing block (202) having active elements for performing data processing and formed directly on the semiconductor substrate (100); and a memory block (206, 302) for previously storing information necessary for performing the data processing. The passive memory cell array (302) is formed above the active data processing block (202) and the active peripheral circuit (206), with an insulating passivation film (110) interposed therebetween. The memory block includes a memory cell array (302) having a plurality of memory cells as passive elements and a peripheral circuit (206) having active elements for reading data from the memory cell array. The memory cell array (302) has a plurality of conductors (112) in the X direction and conductors (115) in the Y direction, respectively to be selected by the peripheral circuit (206).

Abstract: The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.

Abstract: A semiconductor device of this invention includes a bipolar transistor and MOS transistors which are formed on the same semiconductor substrate. The bipolar transistor is hetero-bipolar transistor having a hetero junction. The hetero-bipolar transistor is a bipolar transistor of double-hetero structure in which a material used for forming the base region thereof has a band gap narrower than a material used for forming the emitter and collector regions thereof.

Abstract: A semiconductor device has a transistor made of a semiconductor which has a source and drain regions, a channel region, a gate insulative film, and a gate electrode. The gate electrode is connected to a part of the channel region. The channel region has the same conductivity type as that of the source and drain regions and has an impurity concentration lower than that of the source and drain regions.

Abstract: In an integrated circuit, a diode is interposed between the semiconductor substrate and the contact pad to an external bias voltage, and the substrate is biased at an internal voltage reference. Between each contact pad of the integrated circuit and semiconductor substrate, there is positioned a protection device against permanent overloads and a protection device against electrostatic discharges. By isolating the semiconductor substrate from the external voltages source and by placing a protection device between each contact pad and the substrate, a broad, general protection of the integrated circuit is obtained against all the destructive phenomena such as overloads, positive and negative overvoltages, polarity reversal and electrostatic discharges.

Abstract: An improved arrangement is provided for forming a bipolar transistor on a substrate with CMOS elements. All of the transistors (i.e., the bipolar, P-MOS and N-MOS) are formed in regions having gradually decreasing impurity concentrations from the surface toward the substrate. In addition, a buried layer is provided under each of the regions of decreasing impurity concentration in which the transistors are formed. These buried layers have a significantly higher impurity concentration than the portion of the region of decreasing impurity concentration which they are respectively adjacent to. Using this arrangement, punch-through is prevented and excellent electrical operating characteristics are provided for both the bipolar transistors and the CMOS elements.

Abstract: A BiCMOS device 10 having a bipolar transistor 60, a PMOS transistor 64 and a p-type polysilicon resistor 70. Bipolar transistor 60 is comprised of an emitter electrode 30, base region 26, and collector region formed by well region 18. PMOS transistor 64 comprises source/drain regions 52, gate electrode 40, and gate oxide 28. PMOS transistor 64 may also comprises LDD regions 44. The emitter electrode 30 and gates 40 are formed out of the same polysilicon layer and thus have the same thickness. If desired, the emitter electrode 30 and gate electrodes 40 may be silicided.

Abstract: A semiconductor device includes a plurality of semiconductor regions of a first conductive type and a plurality of semiconductor regions of a second conductive type. AMOS transistor having a channel of the second conductive type is formed in the semiconductor regions of the first conductive type, and a bipolar transistor and a MOS transistor having a channel of the first conductive type are formed in the semiconductor regions of the second conductive type.

Abstract: A thick-oxide ESD transistor for a BiCMOS integrated circuit has its source/drain contacts formed of the BiCMOS base or emitter polysilicon and its source/drain formed by an outdiffusion of the respective polysilicon contact. In one embodiment the BiCMOS resistor doping deepens the ESD source/drains, and in another embodiment the BiCMOS collector reach through doping deepens the ESD source/drains. The entire ESD transistor is fabricated from a standard BiCMOS process without any additional steps, has an area of about 100 square microns, can shunt up to 6000 volts, and has a turn-on time of about 10 picoseconds.

Abstract: A method of fabricating BiCMOS devices, and the resultant BiCMOS device, are disclosed. According to the present invention, over-etching to the substrate on the deposited polysilicon emitter is prevented by providing additional oxide beneath a polysilicon layer as an etch stop. Despite inclusion of an oxide to define an end-point during patterning of an emitter, fabrication complexity is reduced by avoiding additional SAT masking and oxidation steps.

Abstract: Vertically stacked regions of n-type and p-type conductivity are formed around bipolar and field effect transistors to reduce parasitic capacitance between the semiconductor device and surrounding well regions. Under reverse bias a portion of the vertically stacked region is fully depleted and thus reduces the parasitic capacitance between the semiconductor device and the well region.

Abstract: The invention provides a Bi-CMOS gate array semiconductor integrated circuit chip including a peripheral region including an input/output circuit region and a bonding pad region and an internal cell structure provided within an internal cell region involved in the semiconductor integrated circuit chip. The internal cell structure comprises MOS transistor cell units including a plurality of MOS transistors and bipolar transistor cell units including a plurality of bipolar transistors wherein a distribution ratio in the number of the MOS transistor cell units to the bipolar transistor cell units has such a variation that the distributed ratio is high in a region that requires driving of almost no or a small load while the distributed ratio is low in a region that requires driving of a large load.

Abstract: In a semiconductor device having a bipolar transistor including, on a main surface of a semiconductor substrate, the bipolar transistor and an impurity region of a conductivity type which is different from that of a base region of this bipolar transistor, an impurity for forming the base region is implanted into the entire main surface of a semiconductor substrate to form the base region. Accordingly, the manufacturing costs can be reduced without degrading the performance of the device.

Abstract: A semiconductor device of this invention includes an N-type semiconductor region functioning as a collector of a bipolar transistor, a silicon dioxide film doped with boron and formed in contact with the surface of the N-type semiconductor region, a P-type semiconductor region formed in contact with the silicon dioxide film doped with boron in the N-type semiconductor region and functioning as a base of the bipolar transistor, and an N-type semiconductor region formed in the P-type semiconductor region and functioning as an emitter of the bipolar transistor.

Abstract: A semiconductor device having an electrostatic discharge protection device, in which the electrostatic discharge protection device comprises a vertical type bipolar transistor including, a semiconductor substrate, an epitaxial layer laminated on the semiconductor substrate, a buried collector of a first conductive type which is formed of the semiconductor substrate or which is formed from the surface of the semiconductor substrate to the epitaxial layer, a base of a second conductive type which is a lightly doped well and formed on the epitaxial layer, and an emitter of the first conductive type and formed on the surface layer of the base of the second conductive type; and in which the depth of the diffusion of the base being in the range from 0.8 to 2.3 microns, and the base and the emitter being shorted with each other.

Abstract: An n.sup.+ buried layer is formed on a surface of p.sup.- semiconductor substrate. An n.sup.- epitaxial growth layer and an n.sup.+ diffusion layer are formed on a surface of n.sup.+ buried layer. A p.sup.- base region and p.sup.+ external base region adjoining to each other are formed on a surface of n.sup.- epitaxial growth layer. An an n.sup.+ emitter region is formed at a surface of p.sup.- base region. An emitter electrode is formed adjacently to n.sup.+ emitter region. The emitter electrode is made of polycrystalline silicon doped with phosphorus at a concentration from 1.times.10.sup.20 cm.sup.-3 to 6.times.10.sup.20 cm.sup.-3.

Abstract: Disclosed is a semiconductor device including a bipolar transistor and a field effect transistor and allowing an increased operating speed, and a method of manufacturing such a semiconductor device. In the semiconductor device, a junction depth of an intrinsic base layer and a junction depth of an external base layer are made shallower than a junction depth of source/drain regions. Whereby a parasitic capacitance of the bipolar transistor portion is reduced, and at the same time, a driving current of the field effect transistor portion is increased to some extent. Consequently, an increased operating speed of the bipolar transistor portion and the field effect transistor portion is achieved.

Abstract: A well tap for a field effect device formed using a single polysilicon process and a silicide layer is provided. The polysilicon layer which makes contact to the well is doped the same way as the well but is doped opposite of the source or drain. The silicide layer is formed on the upper and sidewall surfaces of the source or drain, well tap, and gate contacts for a field effect device. The silicide layer extends from the sidewall silicide across the upper surface of the transistors and up to the sidewall oxide of the transistor gates. The structure makes it possible to eliminate laterally-spaced separate well taps used in previous devices. Elimination of the laterally-spaced well taps permits higher packing density, and lowers buried layer-to-substrate capacitance.

Abstract: The semiconductor electronic component comprises, within a semiconductor substrate (3), a first active region (2,4) having a first type of conductivity (n, n.sup.++), and a second active region (10), having a second type of conductivity (p, p.sup.++), opposite that of the first type, located between the first active region (2) and the upper face (5) of the substrate. A projecting region (6), containing a third active region (7, 8) having the first type of conductivity (n.sup.+, n.sup.++) and surmounting a first part (10a) of the second active region, is provided on the upper face of the substrate. Metallizations (13, 14, 15) are respectively located in contact with the three active regions (4, 10e, 7). The second active region includes a depletable semiconductor zone (Z) extending outside the first part (10a) of the second active region, and between the first active region (2) and the upper face (5) of the substrate.

Abstract: The present invention includes a BiMOS device having an MOS transistor that triggers a bipolar transistor, wherein the base and channel region are formed within a well region that electrically floats. The present invention also includes a BiMOS device having separate regions for the collector and drain regions and for the base and channel regions. The present invention further includes processes for forming the BiMOS devices. The BiMOS device may include a floating well region. The BiMOS device may include both low voltage MOS logic transistors and a high voltage or high power bipolar transistor. A low voltage or low power bipolar transistor may also be used. Separate drain, collector, base, and channel regions allow the bipolar transistor performance to be optimized independently of the MOS transistor, which may have its performance independently optimized, too. A plurality of MOS logic transistors, such as an AND or an OR gate may be used in the BiMOS device.

Abstract: An improved planarization process includes the steps of forming recessed regions (38) and elevated regions (34) in a semiconductor substrate (30). The substrate is oxidized to form an oxide liner (39) overlying the recessed regions, and a fill material (40) is deposited to overlie the substrate (30) filling the recessed regions (38). An etching process is used to remove portions of the fill material (40) and to expose portions of a first planarization layer (44) overlying the elevated regions (34) of the substrate (30). The fill material is etched and a second planarization layer (46) is deposited to overlie dielectric portions (42), and portions (44) of first planarization layer (32) exposed by the etching process. A chemical-mechanical-polishing process is then carried out to form a planar surface (47), and remaining portions of the planarization layers and fill material are removed.

Abstract: A temperature sensing insulated gate semiconductor device (10) and method of using the insulated the insulated gate semiconductor device (10) for sensing a surface temperature. A lateral PNP bipolar transistor (63) is connected to a drain conductor (58) of an insulated gate field effect transistor (56). The insulated gate field effect transistor (56) is turned on, thereby shorting a collector conductor (64) with a base conductor (62) to form a diode connected lateral PNP bipolar transistor (63). A forward voltage is measured across an emitter-base junction of the diode connected lateral PNP bipolar transistor (63). The surface temperature of the insulated gate semiconductor device (10) is derived using the diode equation in conjunction with the current (67) and the forward voltage drop.

Abstract: A semiconductor device comprises a half-bridge circuit, one of the two arms or elements of which is a thyrister, and the other is a bi-polar transistor. It is structured vertically as a single semiconductor chip with a primary conductor type cathode area of the thyrister and a primary conductor type collector area of the bi-polar transistor shared as common areas. A first isolation area is formed between a intermediate layer of the thyrister and the above described common area. A second isolation area is formed in the first isolation area provided between the intermediate layer of the thyrister and the base area of the bi-polar transistor. Because the upper and lower arms of the half-bridge are vertically structured, the circuit provides for excellent area efficiency, current amplification factor, and current capacity. No specific isolation layers are required to isolate the upper arm from the lower arm.

Abstract: In a semiconductor device, an emitter electrode has a polysilicon layer provided in a first contact hole and on a first insulating film. The polysilicon layer is in contact with an emitter region and is covered with a metal layer. A second contact hole is provided on a part of a second insulating film located on a substantially flat portion of the metal layer. A third contact hole is provided in those portions of the first insulating film and a second insulating layer which are located on a base region.

Abstract: A high density, mixed technology integrated circuit comprises CMOS structures and bipolar lateral transistors, the electrical efficiency and Early voltage of which are maintained high by forming "well" regions through the collector area. The operation determines the formation of a "collector extension region" extending relatively deep within the epitaxial layer so as to intercept the emitter current and gather it to the collector, subtracting it from dispersion toward the substrate through the adjacent isolation junctions surrounding the region of the lateral bipolar transistor. Under comparable conditions, the ratio between IcIsubstrate is incremented from about 8 to about 300 and the Early voltage from about 20V to about 100V. The V.sub.CEO, BV.sub.CBO and BV.sub.CES voltages are also advantageously increased by the presence of said "well" region formed in the collector zone.