With Means To Prevent Parasitic Conduction Channels Patents (Class 257/394)
  • Patent number: 11955555
    Abstract: A field effect transistor (FET) includes an active region including a source region, a drain region, and a channel region. The channel region is under a gate and situated between the source region and the drain region. A field region is next to the active region. The channel region has an interface with the field region. The gate has a wide outer gate segment proximate to the interface and a narrow inner gate segment distant from the interface. The wide outer gate segment produces an outer channel length greater than an inner channel length that is produced from the narrow inner gate segment, thereby reducing a leakage current of the FET during an OFF state.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: April 9, 2024
    Assignee: Newport Fab, LLC
    Inventors: Rula Badarneh, Roda Kanawati, Kurt Moen, Paul D. Hurwitz
  • Patent number: 11587848
    Abstract: Semiconductor structure and its fabrication method are provided. The method includes providing a substrate, where the substrate includes a first region having a first metal structure and a second region having a second metal structure; forming a device layer on each of top surfaces of the substrate, the first metal structure and the second metal structure; forming a first through hole in the device layer at the first region, where the first through hole exposes at least a portion of surfaces of the first metal structure, and forming a second through hole in the device layer at the second region, where the second through hole passes through the first device and exposes at least a portion of surfaces of the second metal structure; and using a selective metal growth process, forming a first plug in the first through hole and forming a second plug in the second through hole.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: February 21, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Yi Lu, Xiaohui Zhuang, Yihui Lin, Liang Wang, Le Li, Kaige Gao, Wenjie Zhu, Jialin Zhao
  • Patent number: 11411087
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a high impedance semiconductor material between a substrate and transistor. The IC structure may include: a substrate, a high impedance semiconductor material on a portion of the substrate, and a transistor on a top surface of the high impedance semiconductor material. The transistor includes a semiconductor channel region horizontally between a first source/drain (S/D) region and a second S/D region. The high impedance semiconductor material is vertically between the transistor and the substrate; a first insulator region is on the substrate and horizontally adjacent the first S/D region; and a first doped well is on the substrate and horizontally adjacent the first insulator region. The first insulator region is horizontally between the first doped well and the transistor.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: August 9, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: John J. Ellis-Monaghan, Anupam Dutta, Satyasuresh V. Choppalli, Venkata N. R. Vanukuru, Michel Abou-Khalil
  • Patent number: 11024582
    Abstract: A semiconductor device includes a substrate, a carbon-containing diffusion barrier, a phosphorus-containing source/drain feature, a gate structure, and a gate spacer. The substrate has a channel region. The carbon-containing diffusion barrier is present in the substrate. The phosphorus-containing source/drain feature is present in the substrate, and the carbon-containing diffusion barrier is between the channel region and the phosphorus-containing source/drain feature. The gate is present over the channel region of the substrate. The gate spacer abuts the gate structure and is present over a portion of the phosphorus-containing source/drain feature.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: June 1, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Ming Chen, Yu-Chang Lin, Chung-Ting Li, Jen-Hsiang Lu, Hou-Ju Li, Chih-Pin Tsao
  • Patent number: 10553687
    Abstract: A semiconductor device includes a substrate having an active region, a drain region in the active region, a source region in the active region, a gate structure, and a conductive field plate. The gate structure extends in a first direction over the active region. The gate structure is arranged between the drain region and the source region in a second direction transverse to the first direction. The conductive field plate extends in the second direction over an edge of the active region.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: February 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Yu Chen, Wan-Hua Huang, Jing-Ying Chen
  • Patent number: 10224891
    Abstract: RF PA circuitry includes an RF signal path, an adjustable component, a distortion compensation feedback loop including distortion compensation circuitry, RF noise filtering circuitry, and baseband noise filtering circuitry. The adjustable component is located in the RF signal path. The distortion compensation feedback loop is coupled in parallel with at least a portion of the RF signal path, and includes the distortion compensation circuitry. Further, the distortion compensation circuitry is configured to adjust one or more parameters of the adjustable component via a component adjustment signal based on a measurement of a signal at an output of the RF signal path. The RF noise filtering circuitry is coupled in the RF signal path and configured to attenuate noise therein. The baseband noise filtering circuitry is coupled between the distortion compensation circuitry and the adjustable component and configured to attenuate noise in the component adjustment signal.
    Type: Grant
    Filed: December 12, 2014
    Date of Patent: March 5, 2019
    Assignee: Qorvo US, Inc.
    Inventors: George Maxim, Baker Scott, Dirk Robert Walter Leipold
  • Patent number: 10014174
    Abstract: Embodiments of the disclosure relate to deposition of a conformal organic material over a feature formed in a photoresist or a hardmask, to decrease the critical dimensions and line edge roughness. In various embodiments, an ultra-conformal carbon-based material is deposited over features formed in a high-resolution photoresist. The conformal organic layer formed over the photoresist thus reduces both the critical dimensions and the line edge roughness of the features.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: July 3, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Bencherki Mebarki, Pramit Manna, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim, Christopher Dennis Bencher
  • Patent number: 10002800
    Abstract: Methods and systems method for checking a semiconductor device for compliance with a rule include determining one or more device type categories to which a fully depleted semiconductor on insulator (FDSOI) device in a chip layout belongs based on which, if any, of a gate, a source/drain region, and a well of the FDSOI device are connected to each other or to a substrate. It is determined whether the FDSOI device complies with a first design rule that considers antenna area connected to the gate and the source/drain region of the FDSOI device. It is determined whether the FDSOI device complies with a second design rule that considers antenna area connected to the well and the source/drain region of the FDSOI device. The chip layout is modified, if the FDSOI devices fails to comply with the first and second design rules, to bring the non-compliant FDSOI device into compliance.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: June 19, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: Terence B. Hook
  • Patent number: 9647107
    Abstract: A vertical transistor and the fabrication method. The transistor comprises a first surface and a second surface that is opposite to the first surface. A drift region of the first doping type, this drift region is located between the first surface and the second surface; at least one source region of the first doping type and the source region being located between the drift region and the first surface, with a first dielectric layer located between adjacent source regions; at least one drain region with said first doping type and said drain region being located between said drift region and said second surface, a gate being provided between adjacent drain regions. Said gate includes a gate electrode and a gate dielectric layer disposed between said gate electrode and said drift region, and the second dielectric layer being positioned between said gate electrode and said second surface.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: May 9, 2017
    Assignee: ZING SEMICONDUCTOR CORPORATION
    Inventors: Deyuan Xiao, Richard Chang
  • Patent number: 9496181
    Abstract: A fin-based structure may include fins on a surface of a semiconductor substrate. Each of the fins may include a doped portion proximate to the surface of the semiconductor substrate. The fin-based structure may also include an isolation layer disposed between the fins and on the surface of the semiconductor substrate. The fin-based structure may also include a recessed isolation liner on sidewalls of the doped portion of the fins. An unlined doped portion of the fins may extend from the recessed isolation liner to an active portion of the fins at a surface of the isolation layer. The isolation layer is disposed on the unlined doped portion of the fins.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: November 15, 2016
    Assignee: QUALCOMM INCORPORATED
    Inventors: Stanley Seungchul Song, Jeffrey Junhao Xu, Vladimir Machkaoutsan, Mustafa Badaroglu, Choh Fei Yeap
  • Patent number: 9461053
    Abstract: Disclosed embodiments relate to a semiconductor device having a plurality of unit transistors that include element isolation regions formed on a semiconductor substrate and a gate electrode formed in the shape of a frame and disposed on an active region sandwiched between the element isolation regions in such a way that the two ends of the outer periphery of the gate electrode extend onto the element isolation regions and the inner periphery thereof closes the active region. The active regions of unit transistors adjacent to one another in a first direction are electrically isolated from one another by means of the element isolation regions, and the active regions of unit transistors adjacent to one another in a second direction which intersects the first direction are linked to one another.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: October 4, 2016
    Assignee: PS4 LUXCO S.A.R.L.
    Inventor: Kanta Saino
  • Patent number: 9437448
    Abstract: A hydrofluoric acid is supplied to a surface of a substrate, and a native oxide film formed on the surface is corroded to be removed, exposing silicon in the surface of the substrate. Then, a rinse solution such as alcohols is supplied to the surface of the substrate, and then, the hydrofluoric acid is washed off from the surface. After that, a dopant solution, which is a dopant-containing chemical solution, is supplied to the surface of the substrate. The dopant solution comes into contact with the surface of the substrate, which is not hydrogen-terminated and has silicon exposed, thereby forming a dopant-containing monolayer thin film on the surface in a short period of time.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: September 6, 2016
    Assignee: SCREEN Holdings Co., Ltd.
    Inventor: Hiroki Kiyama
  • Patent number: 9425251
    Abstract: A thin film transistor substrate and an organic light-emitting diode (OLED) display are disclosed. In one aspect, the OLED includes a thin film transistor substrate. The thin film transistor substrate includes a substrate, a source electrode formed over the substrate, a drain electrode formed over the substrate and spaced apart from the source electrode, an oxide semiconductor layer, and a gate electrode. The oxide semiconductor layer includes a source area at least partially overlapping the source electrode, a drain area at least partially overlapping the drain electrode, and a channel area formed between the source area and the drain area. The gate electrode, which is insulated from the oxide semiconductor layer, has a first width at a first end thereof, a second width at a second end opposite to the first end thereof and the first width is different from the second width.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: August 23, 2016
    Assignee: Samsung Display Co., Ltd.
    Inventors: Donghan Kang, Sunkwang Kim, Jaesik Kim, Hyeonsik Kim, Woonghee Jeong, Chaungi Choi
  • Patent number: 9318621
    Abstract: A diode includes a first plurality of combo fins having lengthwise directions parallel to a first direction, wherein the first plurality of combo fins comprises portions of a first conductivity type. The diodes further includes a second plurality of combo fins having lengthwise directions parallel to the first direction, wherein the second plurality of combo fins includes portions of a second conductivity type opposite the first conductivity type. An isolation region is located between the first plurality of combo fins and the second plurality of combo fins. The first and the second plurality of combo fins form a cathode and an anode of the diode. The diode is configured to have a current flowing in a second direction perpendicular to the first direction, with the current flowing between the anode and the cathode.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: April 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sun-Jay Chang, Ming-Hsiang Song, Jen-Chou Tseng, Wun-Jie Lin, Bo-Ting Chen
  • Publication number: 20150129978
    Abstract: A semiconductor integrated circuit device includes a TSV (Through Silicon Via) extending through a substrate, a first well in the substrate adjacent a first surface of the substrate, a gate of an active device on the first well, a charging protection well, and a charging protection gate on the charging protection well. The charging protection well is disposed in the substrate adjacent the first surface of the substrate, is interposed between the TSV hole and the first well, and surrounds the TSV hole. The charging protection gate prevents the gate of the active device from being damaged when the TSV is formed especially when using a plasma etch process to form a TSV hole in the substrate.
    Type: Application
    Filed: July 8, 2014
    Publication date: May 14, 2015
    Inventors: KWANG-JIN MOON, BYUNG-LYUL PARK, JAE-HWA PARK
  • Publication number: 20150102424
    Abstract: An integrated circuit device includes a semiconductor substrate, isolation regions extending into the semiconductor substrate, a semiconductor strip, and a semiconductor fin overlapping and joined to the semiconductor strip. A first dielectric layer and a second dielectric layer are disposed on opposite sidewalls of the semiconductor strip. The integrated circuit device further includes a first conductive liner and a second conductive liner, wherein the semiconductor strip, the first dielectric layer, and the second dielectric layer are between the first conductive liner and the second conductive line. The first conductive liner and the second conductive liner are between, and in contact with, sidewalls of a first portion and a second portion of the isolation regions.
    Type: Application
    Filed: October 11, 2013
    Publication date: April 16, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Jean-Pierre Colinge
  • Publication number: 20140306293
    Abstract: The semiconductor memory device including a first sense amplifier region including first metal-oxide-semiconductor (MOS) transistors disposed in a well on a semiconductor substrate, a second sense amplifier region adjacent to the well and including second MOS transistors disposed on the semiconductor substrate, a guard band having a bar type structure and provided between the first MOS transistors in the well, and a guard ring partially or fully enclosing the second sense amplifier region in the semiconductor substrate may be provided.
    Type: Application
    Filed: February 21, 2014
    Publication date: October 16, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang Hum BAEK, Hyuckjoon KWON
  • Publication number: 20140264627
    Abstract: Disclosed is a multi-gate transistor which includes a plurality of gates that is branched from one port, that is alternately formed to face each other, and in which currents flow in the adjacent gates in an opposite direction to each other; a source that is formed on one side or the other side of each of the plurality of gates; and a drain that is formed on the other side or the one side of each of the plurality of gates.
    Type: Application
    Filed: March 22, 2012
    Publication date: September 18, 2014
    Applicant: SOONGSIL UNIVERSITY RESEARCH CONSORTIUM TECHNO-PARK
    Inventors: Jong Hoon Park, Chang Kun Park
  • Publication number: 20140239411
    Abstract: In accordance with an embodiment of the present invention, a semiconductor chip includes a device region disposed in or over a substrate, a doped region disposed in the device region, and a through via disposed in the substrate. The through via extends through the doped region.
    Type: Application
    Filed: February 25, 2013
    Publication date: August 28, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Helmut Brech, Albert Birner
  • Patent number: 8779521
    Abstract: In one preferred form shown in FIGS. 2a to 2c there is provided a field effect transistor (24). The field effect transistor includes an off switch gate (42) and a switch bridge semiconductor (44). The switch bridge (44) is provided for charging the off switch gate (42) such that the off switch gate (42) is able to screen the electric field of the control gate (32) of the field effect transistor.
    Type: Grant
    Filed: October 3, 2011
    Date of Patent: July 15, 2014
    Inventor: Dac Thong Bui
  • Patent number: 8755219
    Abstract: In a loadless 4T-SRAM constituted using vertical-type transistor SGTs, a small SRAM cell area is realized. In a static memory cell constituted using four MOS transistors, the MOS transistors are SGTs formed on a bulk substrate in which the drains, gates, and sources are arranged in the vertical direction. The gates of access transistors are shared, as a word line, among a plurality of cells adjacent to one another in the horizontal direction. One contact for the word line is formed for each group of cells, thereby realizing a CMOS-type loadless 4T-SRAM with a very small memory cell area.
    Type: Grant
    Filed: February 8, 2013
    Date of Patent: June 17, 2014
    Assignee: Unisantis Electronics Singapore Pte. Ltd.
    Inventors: Fujio Masuoka, Shintaro Arai
  • Publication number: 20140159163
    Abstract: A method for forming a fin transistor in a bulk substrate includes forming a super steep retrograde well (SSRW) on a bulk substrate. The well includes a doped portion of a first conductivity type dopant formed below an undoped layer. A fin material is grown over the undoped layer. A fin structure is formed from the fin material, and the fin material is undoped or doped. Source and drain regions are provided adjacent to the fin structure to form a fin field effect transistor.
    Type: Application
    Filed: August 16, 2013
    Publication date: June 12, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: JIN CAI, KEVIN K. CHAN, ROBERT H. DENNARD, BRUCE B. DORIS, BARRY P. LINDER, RAMACHANDRAN MURALIDHAR, GHAVAM G. SHAHIDI
  • Publication number: 20140159162
    Abstract: A method for forming a fin transistor in a bulk substrate includes forming a super steep retrograde well (SSRW) on a bulk substrate. The well includes a doped portion of a first conductivity type dopant formed below an undoped layer. A fin material is grown over the undoped layer. A fin structure is formed from the fin material, and the fin material is undoped or doped. Source and drain regions are provided adjacent to the fin structure to form a fin field effect transistor.
    Type: Application
    Filed: December 7, 2012
    Publication date: June 12, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: JIN CAI, KEVIN K. CHAN, ROBERT H. DENNARD, BRUCE B. DORIS, BARRY P. LINDER, RAMACHANDRAN MURALIDHAR, GHAVAM G. SHAHIDI
  • Patent number: 8716807
    Abstract: A semiconductor device includes a first field effect transistor (FET) and a second FET located on a substrate, the first FET comprising a first interfacial oxide layer, and the second FET comprising a second interfacial oxide layer, wherein the second interfacial oxide layer of the second FET is thicker than the first interfacial oxide layer of the first FET; and a recess located in the substrate adjacent to the second FET.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: May 6, 2014
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Eduard A. Cartier, Martin M. Frank, Marwan H. Khater
  • Publication number: 20140103415
    Abstract: A charge pump circuit includes a substrate and first well region formed in the substrate. A first transistor includes first and second conduction regions disposed in the first well region. A second well region is formed in the substrate. A third well region is formed within the second well region. A second transistor includes first and second conduction regions disposed in the third well region. The second well region and third well region are coupled to a common terminal. The common terminal receives a local potential and the first well region and second well region are commonly maintained at the local potential. The first transistor and second transistor operate within the charge pump cell. A plurality of charge pump cells can be cascaded together with an output of a first charge pump cell coupled to an input of a second charge pump cell.
    Type: Application
    Filed: September 13, 2013
    Publication date: April 17, 2014
    Applicant: Semtech Corporation
    Inventors: Daniel Aebischer, Michel Chevroulet
  • Patent number: 8614490
    Abstract: A semiconductor device of the present invention includes: transistor Tr1 arranged on a semiconductor substrate; transistor Tr2 arranged such that a carrier drift direction thereof viewed on the semiconductor substrate is identical to a carrier drift direction of transistor Tr1; diffusion layer 51c connecting diffusion layers 51a and 51b on carrier supply sides of transistors Tr1 and Tr2; and contact plug 61 that is connected to a surface of diffusion layers 51a and 51b on the carrier supply sides of transistors Tr1 and Tr2 or that is connected to a surface of diffusion layer 51c connecting the diffusion layers to each other, and that supplies diffusion layers 51a and 51b with electricity.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: December 24, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Masaki Yoshimura
  • Patent number: 8610221
    Abstract: Disclosed is a low mismatch semiconductor device that comprises a lightly doped channel region having a first conductivity type and a first dopant concentration in a semiconductor body, and a high-k metal gate stack including a gate metal layer formed over a high-k gate dielectric without having a dielectric cap on the high-k dielectric. The high-k metal gate stack being formed over the lightly doped channel region. The lightly doped channel region may be a P- or N-conductivity region, for example, and may be part of a corresponding P- or N-semiconductor substrate, or a P- or N-well formed in a substrate of the respectively opposite conductivity type. The disclosed semiconductor device, which may be an NMOS or PMOS analog device, for example, can be fabricated as part of an integrated circuit including one or more CMOS logic devices.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: December 17, 2013
    Assignee: Broadcom Corporation
    Inventors: Xiangdong Chen, Akira Ito
  • Patent number: 8569860
    Abstract: In a semiconductor device having line type active regions and a method of fabricating the semiconductor device, the semiconductor device includes a device isolation layer which defines the line type active regions in a in a semiconductor substrate. Gate electrodes which are parallel to each other and intersect the line type active regions are disposed over the semiconductor substrate. Here, the gate electrodes include both a device gate electrode and a recessed device isolation gate electrode. Alternatively, each of the gate electrodes is constituted of a device gate electrode and a planar type device isolation gate electrode, and a width of the planar type device isolation gate electrode greater than a width of the device gate electrode.
    Type: Grant
    Filed: October 15, 2010
    Date of Patent: October 29, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kye-Hee Yeom
  • Patent number: 8552494
    Abstract: Methods of fabricating semiconductor devices are provided. A substrate having active patterns and isolating layer patterns is prepared. Each of the isolating layer patterns has an upper surface higher than that of each of the active patterns. A spacer layer having a uniform thickness is formed on the substrate. The spacer layer is etched to form a spacer on a sidewall of each of the isolating layer patterns. A gate structure is formed on each of the active patterns. A selective epitaxial growth (SEG) process is performed on the active patterns having the gate structure to form isolated epitaxial layers that have upper surfaces higher than those of the isolating layer patterns, on the active patterns. Related semiconductor devices are also provided.
    Type: Grant
    Filed: December 7, 2010
    Date of Patent: October 8, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-Bum Kim, Young-Pil Kim, Jung-Yun Won, Hion-Suck Baik, Jun-Ho Lee
  • Publication number: 20130234258
    Abstract: Provided are a semiconductor device having a high breakdown voltage and attaining the restraint of the action of a parasite bipolar transistor, and a method for producing the device. A high-breakdown-voltage p-channel-type transistor included in the semiconductor device has a first n-type semiconductor layer arranged in a semiconductor substrate and at a main-surface-side (upside) of a p-type region in the semiconductor substrate, and a local n-type buried region arranged just below a first p-type dopant region to contact the first n-type semiconductor layer.
    Type: Application
    Filed: March 5, 2013
    Publication date: September 12, 2013
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventor: Hirokazu SAYAMA
  • Patent number: 8507338
    Abstract: A fabricating method of semiconductor structure is provided. First, a substrate with a dielectric layer formed thereon is provided. The dielectric layer has a first opening and a second opening exposing a portion of the substrate. Further, a gate dielectric layer including a high-k dielectric layer and a barrier layer stacked thereon had been formed on the bottoms of the first opening and the second opening. Next, a sacrificial layer is formed on the portion of the gate dielectric layer within the second opening. Next, a first work function metal layer is formed to cover the portion of the gate dielectric layer within the first opening and the sacrificial layer. Then, the portion of the first work function metal layer and the sacrificial layer within the second opening are removed.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: August 13, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Duan-Quan Liao, Yi-Kun Chen, Xiao-Zhong Zhu
  • Patent number: 8487349
    Abstract: The invention describes in detail the structure of a CMOS image sensor pixel that senses color of impinging light without having absorbing filters placed on its surface. The color sensing is accomplished by having a vertical stack of three-charge detection nodes placed in the silicon bulk, which collect electrons depending on the depth of their generation. The small charge detection node capacitance and thus high sensitivity with low noise is achieved by using fully depleted, potential well forming, buried layers instead of undepleted junction electrodes. Two embodiments of contacting the buried layers without substantially increasing the node capacitances are presented.
    Type: Grant
    Filed: April 24, 2009
    Date of Patent: July 16, 2013
    Assignee: Foveon, Inc.
    Inventors: Jaroslav Hynecek, Richard B. Merrill, Russel A. Martin
  • Patent number: 8471336
    Abstract: A semiconductor integrated circuit device includes a gate electrode of at least one of a P-channel MISFET (metal-insulator-semiconductor field-effect transistor) and an N-channel MISFET provided in a direction parallel to a direction of a well isolation boundary phase between the P-channel MISFET and the N-channel MISFET, a first diffusion layer having a same conductivity type as that of a drain diffusion layer of one of a plurality of ones of the MISFET provided in two regions with a drain diffusion layer of the MISFET therebetween through an isolation respectively in a direction orthogonal to the gate electrode, and a second diffusion layer having a conductivity type different from that of the drain diffusion layer of the one of the plurality of ones of the MISFET provided between the well isolation boundary phase and one of a source diffusion layer and the drain diffusion layer.
    Type: Grant
    Filed: April 2, 2012
    Date of Patent: June 25, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Hiroshi Furuta, Shouzou Uchida, Muneaki Matsushige, Junji Monden
  • Patent number: 8421163
    Abstract: A power module comprises: first and second terminals; first and second switching elements having a first electrode and a second electrode which is connected to the second terminal; first and second wirings respectively connecting the first electrodes of the first and second switching elements to the first terminal; and a third wiring directly connecting the first electrode of the first switching element to the first electrode of the second switching element, wherein parasitic inductances of the first and second wiring are different or switching characteristics of the first and second switching elements are different.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: April 16, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventor: Kazuaki Hiyama
  • Patent number: 8415749
    Abstract: Leakage current can be substantially reduced by the formation of a seal dielectric in place of the conventional junction between source/drain region(s) and the substrate material. Trenches are formed in the substrate and lined with a seal dielectric prior to filling the trenches with semiconductor material. Preferably, the trenches are overfilled and a CMP process planarizes the overfill material. An epitaxial layer can be grown atop the trenches after planarization, if desired.
    Type: Grant
    Filed: April 19, 2007
    Date of Patent: April 9, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huan-Tsung Huang, Kou-Cheng Wu, Carlos H. Diaz
  • Patent number: 8350335
    Abstract: A method of manufacturing a semiconductor device that includes forming a dummy gate insulating film and a dummy gate electrode on a semiconductor substrate having a channel-forming region. An etching treatment including a first treatment of treating the surface of the exposed surface of the insulating layer with an etching gas containing ammonia and hydrogen fluoride and a second treatment of decomposing and evaporating the product formed in the first treatment are included in removal step of the dummy gate insulating film.
    Type: Grant
    Filed: April 11, 2008
    Date of Patent: January 8, 2013
    Assignee: Sony Corporation
    Inventor: Yoshiaki Kikuchi
  • Patent number: 8334566
    Abstract: The present invention provides a semiconductor power device including a substrate, an epitaxial layer disposed on the substrate and having at least a first trench and a second trench, a gate structure disposed in the first trench, and a termination structure disposed in the second trench. The gate structure includes a gate electrode, a gate dielectric layer disposed on an upper sidewall of the first trench and between the gate electrode and the epitaxial laver, and a shield electrode disposed under the gate electrode. The termination structure includes a termination electrode and a dielectric layer disposed between the termination electrode and a sidewall of the second trench. The termination electrode and the shield electrode are connected to each other. In addition, a body region is disposed in the epitaxial layer, and the second trench is only surrounded by the body region.
    Type: Grant
    Filed: July 1, 2010
    Date of Patent: December 18, 2012
    Assignee: Sinopower Semiconductor Inc.
    Inventor: Sung-Shan Tai
  • Patent number: 8273620
    Abstract: Embodiments of the invention provide a semiconductor integrated circuit device and a method for fabricating the device. The semiconductor device includes a semiconductor substrate having a cell region and a peripheral region, a cell active region formed in the cell region, and a peripheral active region formed in the peripheral region, wherein the cell active region and the peripheral active region are defined by isolation regions. The semiconductor device further includes a first gate stack formed on the cell active region, a second gate stack formed on the peripheral active region, a cell epitaxial layer formed on an exposed portion of the cell active region, and a peripheral epitaxial layer formed on an exposed portion of the peripheral active region, wherein the height of the peripheral epitaxial layer is greater than the height of the cell epitaxial layer.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: September 25, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-bum Kim, Young-pil Kim, Si-young Choi, Byeong-chan Lee, Jong-wook Lee
  • Patent number: 8169037
    Abstract: A MISFET includes a drain diffusion layer of a first conductivity type, a source diffusion layer of the first conductivity type, a gate electrode, and a substrate/well of a second conductivity type. In the MISFET, first diffusion layers of the first conductivity type are provided at two or more positions at predetermined intervals with an isolation therebetween respectively. The two or more positions are facing at least two sides of the element isolation insulation around the drain diffusion layer. A second diffusion layer of the second conductivity type is provided so as to be close to or to come in contact with the source diffusion layer.
    Type: Grant
    Filed: April 30, 2009
    Date of Patent: May 1, 2012
    Assignee: Renesas Electronics Corporation
    Inventors: Hiroshi Furuta, Shouzou Uchida, Muneaki Matsushige, Junji Monden
  • Patent number: 8164138
    Abstract: A recessed channel transistor includes an isolation layer provided in a semiconductor substrate to define an active region. A trench is provided in the semiconductor substrate to extend across the active region. A gate insulation layer covers a sidewall and a bottom face of the trench and an upper face of the semiconductor substrate adjacent to an upper edge of the trench, wherein a portion of the gate insulation layer on the upper surface of the semiconductor substrate adjacent to the upper edge of the trench and on the sidewall of the trench extending to a first distance downwardly from the upper edge of the trench has a thickness greater than that of a portion of the gate insulation layer on the remaining sidewall and the bottom face of the trench. A gate electrode fills up the trench having the gate insulation layer formed therein.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: April 24, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Jin-Woo Lee
  • Publication number: 20120056274
    Abstract: A semiconductor device of the present invention includes: transistor Tr1 arranged on a semiconductor substrate; transistor Tr2 arranged such that a carrier drift direction thereof viewed on the semiconductor substrate is identical to a carrier drift direction of transistor Tr1; diffusion layer 51c connecting diffusion layers 51a and 51b on carrier supply sides of transistors Tr1 and Tr2; and contact plug 61 that is connected to a surface of diffusion layers 51a and 51b on the carrier supply sides of transistors Tr1 and Tr2 or that is connected to a surface of diffusion layer 51c connecting the diffusion layers to each other, and that supplies diffusion layers 51a and 51b with electricity.
    Type: Application
    Filed: September 2, 2011
    Publication date: March 8, 2012
    Inventor: Masaki YOSHIMURA
  • Patent number: 8120107
    Abstract: The semiconductor device includes a P-type semiconductor region and an MOS transistor. MOS transistor includes a gate electrode, a collector electrode, a drain electrode, an N-type impurity region and a P-type impurity region. N-type impurity region is electrically connected to the drain electrode. P-type impurity region is electrically connected to the collector electrode. P-type impurity region is electrically connected to the drain electrode. The semiconductor device further includes an N-type impurity region and an electrode. N-type impurity region is electrically connected to the gate electrode. The electrode is formed on the P-type semiconductor region with an insulating film therebetween, and is electrically connected to gate electrode. Thereby, an element footprint can be reduced while maintaining characteristics.
    Type: Grant
    Filed: January 13, 2011
    Date of Patent: February 21, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 8084831
    Abstract: A semiconductor device according to one embodiment includes: an n-type transistor comprising a first gate electrode formed on a semiconductor substrate via a first gate insulating film, a first channel region formed in the semiconductor substrate under the first gate insulating film, and first source/drain regions formed in the semiconductor substrate on both sides of the first channel region, the first gate electrode comprising a first metal layer and a first conductive layer thereon; and a p-type transistor comprising a second gate electrode formed on the semiconductor substrate via a second gate insulating film, a second channel region formed in the semiconductor substrate under the second gate insulating film, and second source/drain regions formed in the semiconductor substrate on both sides of the second channel region, the second gate electrode comprising a second metal layer and a second conductive layer thereon, the second metal layer being thicker than the first metal layer and having the same const
    Type: Grant
    Filed: August 13, 2009
    Date of Patent: December 27, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masakazu Goto, Shigeru Kawanaka
  • Patent number: 8039879
    Abstract: A semiconductor has an IGBT active section and a control circuit section for detecting an IGBT abnormal state. A collector region is formed on the back surface side (i.e., on the IGBT collector side) in a selective manner, namely right under the IGBT active section.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: October 18, 2011
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Katsunori Ueno
  • Patent number: 8039903
    Abstract: In various embodiments, a tiered gate structure transistor is provided including a source, a drain, and a gate between the source and the drain. The tiered gate structure transistor including a gate foot having a top portion and sidewalls. A gate head is attached to the top portion of the gate foot. A passivation layer extends along and directly contacts an uppermost surface of the source, and extends along and directly contacts an uppermost surface of the drain, the passivation layer surrounds the sidewalls of the gate foot such that the top portion is not covered by the passivation layer and such that the passivation layer surrounding the sidewalls supports the gate head.
    Type: Grant
    Filed: September 3, 2009
    Date of Patent: October 18, 2011
    Assignee: HRL Laboratories, LLC
    Inventors: Ivan Milosavljevic, Adele Schmitz, Michael Antcliffe, Ming Hu, Lorna Hodgson
  • Publication number: 20110169101
    Abstract: A Fin FET whose fin (12) has an upper portion (30) doped with a first conductivity type and a lower portion (32) doped with a second conductivity type, wherein the junction (34) between the upper portion (30) and the lower portion (32) acts as a diode; and the FinFET further comprises: at least one layer (26, 28) of high-k dielectric material (for example Si3N4) adjacent at least one side of the fin (12) for redistributing a potential drop more evenly over the diode, compared to if the at least one layer of high-k dielectric material were not present, when the upper portion (30) is connected to a first potential and the lower portion (32) is connected to a second potential thereby providing the potential drop across the junction (34). Examples of the k value for the high-k dielectric material are k?5, k?7.5, and k?20.
    Type: Application
    Filed: September 10, 2009
    Publication date: July 14, 2011
    Inventors: Gerben Doornbos, Robert Lander
  • Patent number: 7972873
    Abstract: Devices having voids are producible by employing an electrochemical corrosion process. For example, an electrically conductive region is formed to have a surrounding chemically distinct region. Such formation is possible through conventional semiconductor processing techniques such as a copper damascene process. The surrounded conducting material is configured to be in electrical communication with a charge separation structure. The electrically conducting region is contacted with a fluid electrolyte and electromagnetic radiation is made to illuminate the charge separation region to induce separation of electrons and holes. The resulting separated charges are used to drive an electrochemical corrosion process at the conductive material/electrolyte interface resulting in the removal of at least a portion of the electrically conducting material.
    Type: Grant
    Filed: October 27, 2008
    Date of Patent: July 5, 2011
    Assignee: Agere Systems Inc.
    Inventors: Frank A. Baiocchi, James Thomas Cargo, John Michael DeLucca
  • Patent number: 7932167
    Abstract: A memory cell in an integrated circuit is fabricated in part by forming a lower electrode feature, an island, a sacrificial feature, a gate feature, and a phase change feature. The island is formed on the lower electrode feature and has one or more sidewalls. It comprises a lower doped feature, a middle doped feature formed above the lower doped feature, and an upper doped feature formed above the middle doped feature. The sacrificial feature is formed above the island, while the gate feature is formed along each sidewall of the island. The gate feature overlies at least a portion of the middle doped feature of the island and is operative to control an electrical resistance therein. Finally, the phase feature is formed above the island at least in part by replacing at least a portion of the sacrificial feature with a phase change material. The phase change material is operative to switch between lower and higher electrical resistance states in response to an application of an electrical signal.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: April 26, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, John G. Gaudiello, Mark Charles Hakey, Steven J. Holmes, David V. Horak, Charles William Koburger, III, Chung Hon Lam
  • Patent number: 7898029
    Abstract: The semiconductor device includes a P-type semiconductor region and an MOS transistor. MOS transistor includes a gate electrode, a collector electrode, a drain electrode, an N-type impurity region and a P-type impurity region. N-type impurity region is electrically connected to the drain electrode. P-type impurity region is electrically connected to the collector electrode. P-type impurity region is electrically connected to the drain electrode. The semiconductor device further includes an N-type impurity region and an electrode. N-type impurity region is electrically connected to the gate electrode. The electrode is formed on the P-type semiconductor region with an insulating film therebetween, and is electrically connected to gate electrode. Thereby, an element footprint can be reduced while maintaining characteristics.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: March 1, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 7880226
    Abstract: An integrated circuit device with a semiconductor body and a method for the production of a semiconductor device a provided. The semiconductor body comprises a cell field with a drift zone of a first conduction type. In addition, the semiconductor device comprises an edge region surrounding the cell field. Field plates with a trench gate structure are arranged in the cell field, and an edge trench surrounding the cell field is provided in the edge region. The front side of the semiconductor body is in the edge region provided with an edge zone of a conduction type complementing the first conduction type with doping materials of body zones of the cell field. The edge zone of the complementary conduction type extends both within and outside the edge trench.
    Type: Grant
    Filed: January 25, 2008
    Date of Patent: February 1, 2011
    Assignee: Infineon Technologies Austria AG
    Inventors: Uli Hiller, Oliver Blank, Ralf Siemieniec, Maximilian Roesch