With Means To Prevent Parasitic Conduction Channels Patents (Class 257/394)
  • Patent number: 7872316
    Abstract: Disclosed herein is a semiconductor device including a gate insulating film formed over a semiconductor substrate, and a gate electrode formed over the gate insulating film, wherein the gate insulating film is so provided as to protrude from both sides of the gate electrode, and the gate electrode includes a wholly silicided layer.
    Type: Grant
    Filed: May 13, 2008
    Date of Patent: January 18, 2011
    Assignee: Sony Corporation
    Inventor: Toshihiko Iwata
  • Patent number: 7867865
    Abstract: Methods of fabricating semiconductor devices are provided. A substrate having active patterns and isolating layer patterns is prepared. Each of the isolating layer patterns has an upper surface higher than that of each of the active patterns. A spacer layer having a uniform thickness is formed on the substrate. The spacer layer is etched to form a spacer on a sidewall of each of the isolating layer patterns. A gate structure is formed on each of the active patterns. A selective epitaxial growth (SEG) process is performed on the active patterns having the gate structure to form isolated epitaxial layers that have upper surfaces higher than those of the isolating layer patterns, on the active patterns. Related semiconductor devices are also provided.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: January 11, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-Bum Kim, Young-Pil Kim, Jung-Yun Won, Hion-Suck Baik, Jun-Ho Lee
  • Patent number: 7867835
    Abstract: An integrated circuit system that includes: providing a substrate including an active device with a gate and a gate dielectric; forming a first liner, a first spacer, a second liner, and a second spacer adjacent the gate; forming a material layer over the integrated circuit system; forming an opening between the material layer and the first spacer by removing a portion of the material layer, the second spacer, and the second liner to expose the substrate; and forming a source/drain extension and a halo region through the opening.
    Type: Grant
    Filed: February 29, 2008
    Date of Patent: January 11, 2011
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Jae Gon Lee, Elgin Kiok Boone Quek, Young Way Teh, Wenzhi Gao
  • Patent number: 7829959
    Abstract: In a semiconductor device having line type active regions and a method of fabricating the semiconductor device, the semiconductor device includes a device isolation layer which defines the line type active regions in a in a semiconductor substrate. Gate electrodes which are parallel to each other and intersect the line type active regions are disposed over the semiconductor substrate. Here, the gate electrodes include both a device gate electrode and a recessed device isolation gate electrode. Alternatively, each of the gate electrodes is constituted of a device gate electrode and a plan type device isolation gate electrode, and a width of the plan type device isolation gate electrode greater than a width of the device gate electrode.
    Type: Grant
    Filed: June 17, 2009
    Date of Patent: November 9, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kye-Hee Yeom
  • Patent number: 7804143
    Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: September 28, 2010
    Assignee: Intersil Americas, Inc.
    Inventors: Stephen Joseph Gaul, Michael D. Church, Brent R. Doyle
  • Patent number: 7755133
    Abstract: Embodiments of the invention provide a semiconductor integrated circuit device and a method for fabricating the device. The semiconductor device includes a semiconductor substrate having a cell region and a peripheral region, a cell active region formed in the cell region, and a peripheral active region formed in the peripheral region, wherein the cell active region and the peripheral active region are defined by isolation regions. The semiconductor device further includes a first gate stack formed on the cell active region, a second gate stack formed on the peripheral active region, a cell epitaxial layer formed on an exposed portion of the cell active region, and a peripheral epitaxial layer formed on an exposed portion of the peripheral active region, wherein the height of the peripheral epitaxial layer is greater than the height of the cell epitaxial layer.
    Type: Grant
    Filed: September 14, 2007
    Date of Patent: July 13, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-bum Kim, Young-pil Kim, Si-young Choi, Byeong-chan Lee, Jong-wook Lee
  • Patent number: 7723799
    Abstract: A semiconductor device includes a P-substrate, an N-well disposed in the P-substrate, an NMOS transistor disposed in the P-substrate and having one of a source and a drain connected to a ground voltage, a P-tap disposed in the P-substrate and connected to a low voltage so as to provide the P-substrate with the low voltage to be lower than the ground voltage, a PMOS transistor disposed in the N-well and having a source connected to a power supply voltage, an N-tap disposed in the N-well and connected to the power supply voltage so as to provide the N-well with the power supply voltage, and a depression-type PMOS transistor having a drain connected to the low voltage and a source connected to the ground voltage so as to prevent a parasitic transistor, which may exist among the PMOS transistor, the N-well, the NMOS transistor, and the P-substrate, from causing a latchup between the power supply voltage and the ground voltage due to the low voltage rising higher than the ground voltage, and for becoming in a cond
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: May 25, 2010
    Assignee: Seiko Epson Corporation
    Inventor: Motoaki Nishimura
  • Publication number: 20100102398
    Abstract: Devices having voids are producible by employing an electrochemical corrosion process. For example, an electrically conductive region is formed to have a surrounding chemically distinct region. Such formation is possible through conventional semiconductor processing techniques such as a copper damascene process. The surrounded conducting material is configured to be in electrical communication with a charge separation structure. The electrically conducting region is contacted with a fluid electrolyte and electromagnetic radiation is made to illuminate the charge separation region to induce separation of electrons and holes. The resulting separated charges are used to drive an electrochemical corrosion process at the conductive material/electrolyte interface resulting in the removal of at least a portion of the electrically conducting material.
    Type: Application
    Filed: October 27, 2008
    Publication date: April 29, 2010
    Inventors: Frank A. Baiocchi, James Thomas Cargo, John Michael DeLucca
  • Patent number: 7696546
    Abstract: A silicide layer (first silicide layer, second silicide layer) is laminated on top laminate surfaces of gates of a transmission transistor and a reset transistor, respectively. Each of the first silicide layer and the second silicide layer respectively formed on each of the gates extends in a direction along the main surface of the semiconductor substrate among at least a portion of a plurality of image pixels, connecting gates with one another among the respective image pixels. On the other hand, a signal outputter is not in contact with any silicide layers, has the top laminate surface that is covered with an insulating layer, and is connected with other transistors via a metal wiring layer.
    Type: Grant
    Filed: January 17, 2008
    Date of Patent: April 13, 2010
    Assignee: Panasonic Corporation
    Inventors: Tatsuya Hirata, Shouzi Tanaka, Ryohei Miyagawa
  • Patent number: 7675120
    Abstract: A composite integrated circuit incorporating two LDMOSFETs of unlike designs, with the consequent creation of a parasitic transistor. A multipurpose resistor is integrally built into the composite integrated circuit in order to prevent the parasitic transistor from accidentally turning on. In an intended application of the composite integrated circuit to a startup circuit of a switching-mode power supply, the multipurpose resistor serves as startup resistor for limiting the flow of rush current during the startup period of the switching-mode power supply.
    Type: Grant
    Filed: November 10, 2006
    Date of Patent: March 9, 2010
    Assignee: Sanken Electric Co., Ltd.
    Inventors: Keiichi Sekiguchi, Kazuya Aizawa
  • Patent number: 7671424
    Abstract: A metal oxide semiconductor field effect transistor includes a semiconductor substrate; a well region containing an impurity of a first conductivity type disposed on the semiconductor substrate, the well region including a source region and a drain region formed by adding an impurity of a second conductivity type, the source region and the drain region being separated from each other by a predetermined gap; an insulating film disposed on the surface of the well region in the gap between the source region and the drain region; and a gate electrode disposed on the insulating film. The well region is composed of an epitaxial layer, and the epitaxial layer includes an impurity layer of the first conductivity type having a different impurity concentration.
    Type: Grant
    Filed: September 18, 2007
    Date of Patent: March 2, 2010
    Assignee: Sony Corporation
    Inventor: Hiroki Maeda
  • Publication number: 20100038726
    Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.
    Type: Application
    Filed: February 18, 2009
    Publication date: February 18, 2010
    Applicant: INTERSIL AMERICAS INC.
    Inventors: Stephen J. GAUL, Michael D. Church, Brent R. Doyle
  • Publication number: 20100032772
    Abstract: A semiconductor device includes an element isolation film formed on a semiconductor substrate surface of one conductivity type, a gate electrode having one pair of end portions located on a boundary between an element isolation film and an element forming region, a source region and a drain region of a reverse conductivity type arranged to sandwich a region immediately below a gate electrode, and an impurity diffusion region of the one conductivity type formed in the element forming region. The source region is separated from a region on a boundary side between the element isolation film and the element forming region in the region immediately below the gate electrode in the element forming region. In the impurity diffusion region, a portion adjacent to the region on the boundary side is arranged between the source region and the element isolation film, and is in contact with the source region and the region on the boundary side.
    Type: Application
    Filed: July 31, 2009
    Publication date: February 11, 2010
    Applicant: NEC ELECTRONICS CORPORATION
    Inventor: Kouji Tanaka
  • Publication number: 20090289311
    Abstract: A MISFET includes a drain diffusion layer of a first conductivity type, a source diffusion layer of the first conductivity type, a gate electrode, and a substrate/well of a second conductivity type. In the MISFET, first diffusion layers of the first conductivity type are provided at two or more positions at predetermined intervals with an isolation therebetween respectively. The two or more positions are facing at least two sides of the element isolation insulation around the drain diffusion layer. A second diffusion layer of the second conductivity type is provided so as to be close to or to come in contact with the source diffusion layer.
    Type: Application
    Filed: April 30, 2009
    Publication date: November 26, 2009
    Applicant: NEC Electronics Corporation
    Inventors: Hiroshi Furuta, Shouzou Uchida, Muneaki Matsushige, Junji Monden
  • Patent number: 7595534
    Abstract: The invention relates to layers in substrate wafers. The aim of the invention is to provide layers in substrate wafers with which the drawbacks of conventional assemblies are overcome in order to achieve, on the one hand, an adequate resistance to latch-up in highly scaled, digital CMOS circuits with comparatively low costs and, on the other hand, to ensure low substrate losses/couplings for analog high-frequency circuits and, in addition, to influence the component behavior in a non-destructive manner.
    Type: Grant
    Filed: December 6, 2001
    Date of Patent: September 29, 2009
    Assignee: IHP GmbH-Innovations for High Performance Microelectronics/Institut fur Innovative Mikroelektronik
    Inventors: Bernd Heinemann, Karl-Ernst Ehwald, Dieter Knoll, Bernd Tillack, Dirk Wolansky, Peter Schley
  • Publication number: 20090218636
    Abstract: An integrated circuit system that includes: providing a substrate including an active device with a gate and a gate dielectric; forming a first liner, a first spacer, a second liner, and a second spacer adjacent the gate; forming a material layer over the integrated circuit system; forming an opening between the material layer and the first spacer by removing a portion of the material layer, the second spacer, and the second liner to expose the substrate; and forming a source/drain extension and a halo region through the opening.
    Type: Application
    Filed: February 29, 2008
    Publication date: September 3, 2009
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
    Inventors: Jae Gon Lee, Elgin Kiok Boone Quek, Young Way Teh, Wenzhi Gao
  • Patent number: 7563699
    Abstract: In a semiconductor device having line type active regions and a method of fabricating the semiconductor device, the semiconductor device includes a device isolation layer which defines the line type active regions in a in a semiconductor substrate. Gate electrodes which are parallel to each other and intersect the line type active regions are disposed over the semiconductor substrate. Here, the gate electrodes include both a device gate electrode and a recessed device isolation gate electrode. Alternatively, each of the gate electrodes is constituted of a device gate electrode and a plan type device isolation gate electrode, and a width of the plan type device isolation gate electrode greater than a width of the device gate electrode.
    Type: Grant
    Filed: February 14, 2006
    Date of Patent: July 21, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kye-Hee Yeom
  • Patent number: 7541627
    Abstract: The invention describes in detail the structure of a CMOS image sensor pixel that senses color of impinging light without having absorbing filters placed on its surface. The color sensing is accomplished by having a vertical stack of three-charge detection nodes placed in the silicon bulk, which collect electrons depending on the depth of their generation. The small charge detection node capacitance and thus high sensitivity with low noise is achieved by using fully depleted, potential well forming, buried layers instead of undepleted junction electrodes. Two embodiments of contacting the buried layers without substantially increasing the node capacitances are presented.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: June 2, 2009
    Assignee: Foveon, Inc.
    Inventors: Jaroslav Hynecek, Richard B. Merrill, Russel A. Martin
  • Patent number: 7511330
    Abstract: A semiconductor device includes a semiconductor substrate, a gate insulating film, gate electrodes, a first silicon oxide film, bit lines formed on the first silicon oxide film and including lower surfaces having respective recesses, a contact plug layer located between the gate electrodes and including a first portion, a second portion having a fourth side surface between the opposed second side surfaces of first silicon oxide film and a third portion having an upper surface and fifth side surfaces embedded in the respective recesses of the bit line, a first silicon nitride layer between a third side surface of the first portion of the contact plug and a first side surface of the gate electrode, and a second silicon oxide film. The entire upper surface and fifth side surface of the third portion of the contact plug directly contact with inner surfaces of the recesses respectively.
    Type: Grant
    Filed: March 31, 2005
    Date of Patent: March 31, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hisashi Watanobe, Tooru Hara
  • Patent number: 7495296
    Abstract: The present invention relates to a layout of a multi-channel semiconductor integrated circuit and provides a layout of a semiconductor integrated circuit having ternary circuits in order to increase a degree of integration in the semiconductor integrated circuit and stabilize output characteristics. A ternary circuit is formed by arranging a second high-side transistor, a diode, a second level shift circuit on one hand, and a low-side transistor, a first high-side transistor, a first level shift circuit, and a pre-driver on the other, so that each of cells are arranged in a row and an output bonding pad is placed between the second high-side transistor and the low-side transistor, wherein a cell width of the first level shift circuit, second level shift circuit and pre-driver corresponds to a cell width of the low-side transistor.
    Type: Grant
    Filed: May 31, 2005
    Date of Patent: February 24, 2009
    Assignee: Panasonic Corporation
    Inventors: Eisaku Maeda, Akihiro Maejima, Hiroki Matsunaga, Jinsaku Kaneda, Masahiko Sasada
  • Publication number: 20090032885
    Abstract: The present disclosed integrated circuit includes a substrate having a top surface, a buried N type layer in the substrate, N type contact region extending from the surface to the buried N type region, a buried P type region abutting and above the buried N type region in the substrate, a P type contact region extending from the surface to the buried P type region, and an N type device region in the surface and above the buried P type region. The P type impurity of the buried P type region including an impurity of a lower coefficient of diffusion than the coefficient of diffusion of the impurities of the P type contact region.
    Type: Application
    Filed: October 23, 2007
    Publication date: February 5, 2009
    Applicant: INTERSIL AMERICAS, INC.
    Inventor: Michael Church
  • Publication number: 20080230851
    Abstract: A semiconductor device with a metal oxide semiconductor (MOS) type transistor structure, which is used for, e.g. a static random access memory (SRAM) type memory cell, includes a part that is vulnerable to soft errors. In the semiconductor device with the MOS type transistor structure, an additional load capacitance is formed at the part that is vulnerable to soft errors.
    Type: Application
    Filed: May 31, 2008
    Publication date: September 25, 2008
    Inventor: Hironobu FUKUI
  • Patent number: 7420260
    Abstract: A power semiconductor device has a first region in which a transistor is formed, a third region in which a control element is formed, and a second region for separating the first region and the third region.
    Type: Grant
    Filed: May 6, 2005
    Date of Patent: September 2, 2008
    Assignee: Fairchild Korea Semiconductor, Ltd.
    Inventors: Tae-hun Kwon, Cheol-joong Kim, Young-sub Jeong
  • Publication number: 20080105930
    Abstract: Embodiments of the invention provide a semiconductor integrated circuit device and a method for fabricating the device. The semiconductor device includes a semiconductor substrate having a cell region and a peripheral region, a cell active region formed in the cell region, and a peripheral active region formed in the peripheral region, wherein the cell active region and the peripheral active region are defined by isolation regions. The semiconductor device further includes a first gate stack formed on the cell active region, a second gate stack formed on the peripheral active region, a cell epitaxial layer formed on an exposed portion of the cell active region, and a peripheral epitaxial layer formed on an exposed portion of the peripheral active region, wherein the height of the peripheral epitaxial layer is greater than the height of the cell epitaxial layer.
    Type: Application
    Filed: September 14, 2007
    Publication date: May 8, 2008
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Jin-bum KIM, Young-pil KIM, Si-young CHOI, Byeong-chan LEE, Jong-wook LEE
  • Patent number: 7329926
    Abstract: A semiconductor device including a gate located over a semiconductor substrate and a source/drain region located adjacent the gate. The source/drain region is bounded by an isolation structure that includes a constricted current passage between the gate and the source/drain region.
    Type: Grant
    Filed: April 1, 2003
    Date of Patent: February 12, 2008
    Assignee: Agere Systems Inc.
    Inventor: Yehuda Smooha
  • Patent number: 7271453
    Abstract: A structure of a semiconductor device and method for fabricating the same is disclosed. The semiconductor structure comprises first and second source/drain regions; a channel region disposed between the first and second source/drain regions; a buried well region in physical contact with the channel region; and a buried barrier region being disposed between the buried well region and the first source/drain region and being disposed between the buried well region and the second source/drain region, wherein the buried barrier region is adapted for preventing current leakage and dopant diffusion between the buried well region and the first source/drain region and between the buried well region and the second source/drain region.
    Type: Grant
    Filed: September 20, 2004
    Date of Patent: September 18, 2007
    Assignee: International Business Machines Corporation
    Inventors: Hussein I. Hanafi, Edward J. Nowak
  • Patent number: 7180142
    Abstract: The present invention provides a semiconductor device having an active region bent at right angles, wherein an interval between patterns for the active region and a gate is set larger than an arc radius of a curved portion (portion where a line is brought to arcuate form) formed inside the pattern for the bent active region. By defining and designing the pattern interval, the curved portion of the active region do not overlap the gate pattern, and the difference between a device characteristic and a designed value can be prevented from increasing.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: February 20, 2007
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Koichi Kishiro
  • Patent number: 7176527
    Abstract: A semiconductor device and a method of fabricating the same suppress a substrate floating effect without causing lowering of a degree of integration. The semiconductor device has a Silicon-On-Insulator structure which includes a semiconductor layer formed on an insulator, and has at least one MOSFET element. The MOSFET element includes a source region; a drain region which is opposed to the source region; a body region disposed between the source and drain regions; a gate region positioned on or close to a surface of the body region, so as to form an electrically conducting channel in the body region; and an extracting region being in contact with both of the body region and the source region. The extracting region has a conductivity type which is the same as a conductivity type of the body region and has a concentration higher than that of the body region.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: February 13, 2007
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Koichi Fukuda
  • Patent number: 7105901
    Abstract: An active area (1) is provided with a concave part in its corner portion in a shape along a plan view. An insulating film (7) encloses this active area. A gate electrode (30) is arranged on a depressed region (DR) having an edge portion which is located on a low position due to the concave part, while a gate electrode (20) is arranged on an ordinary region (OR) having an edge portion projecting beyond the depressed region. A gate end cap (margin part) of the gate electrode (20) has a length x, while that of the gate electrode (30) has a length x+?. Thus provided is a semiconductor device causing no current defect between source/drain regions even if the active area and an insulating film defining this active area fail to satisfy the layout design following refinement of the semiconductor device.
    Type: Grant
    Filed: July 13, 1998
    Date of Patent: September 12, 2006
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Miyanishi, Hisashi Matsumoto
  • Patent number: 7009255
    Abstract: A semiconductor device and a method of manufacturing the same is disclosed. A trench is formed in an active region of a semiconductor substrate. A doped layer is formed on the inner walls of the trench. The trench is filled up with a first semiconductor layer. A gate insulating layer is formed on the first semiconductor layer and the substrate. Two gate electrodes are formed on the gate insulating layer such that the trench is located in between two gate electrodes. First and second impurity regions are formed in the substrate on both sides of each of the gate electrodes. Since the doped layer is locally formed in the trench area, the source and drain regions are completely separated from the heavily doped layer to weaken the electric field of PN junction, thereby improving refresh and preventing punchthrough between the source and drain.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: March 7, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Nak-Jin Son, Ji-Young Kim
  • Patent number: 6995450
    Abstract: A ring-shaped P+ type diffusion region is formed on the top surface of a P type substrate in such a way as to surround a single internal circuit region. A shunt wiring is formed in an area including directly above the P+ type diffusion region on the P type substrate. The shunt wiring is connected to the P+ type diffusion region by a plurality of contacts. The shunt wiring is provided with an annular ring portion surrounding the internal circuit region. A meander inductor led out from the ring portion and the one end of the meander inductor is connected to a ground potential wiring. A resonance circuit is formed by a parasitic capacitor and the inductance of the shunt wiring. The parasitic capacitor is formed between the shunt wiring and the P+ type diffusion region on the P type substrate.
    Type: Grant
    Filed: April 27, 2004
    Date of Patent: February 7, 2006
    Assignee: NEC Electronics Corporation
    Inventor: Ryota Yamamoto
  • Patent number: 6982461
    Abstract: In one embodiment, a lateral FET structure (30) is formed in a body of semiconductor material (32). The structure (30) includes a plurality non-interdigitated drain regions (39) that are coupled together with a conductive layer (57), and a plurality of source regions (34) that are coupled together with a different conductive layer (51). One or more interlayer dielectrics (53,54) separate the two conductive layers (51,57). The individual source regions (34) are absent small radius fingertip regions.
    Type: Grant
    Filed: December 8, 2003
    Date of Patent: January 3, 2006
    Assignee: Semiconductor Components Industries, L.L.C.
    Inventors: Zia Hossain, Shanghui Tu, Takeshi Ishiguro, Rajesh S. Nair
  • Patent number: 6975018
    Abstract: In a fabrication method of a semiconductor device including a plurality of silicon-based transistors or capacitors, there exist hydrogen at least in a part of a silicon surface in advance, and the hydrogen is removed by exposing the silicon surface to a first inert gas plasma. Thereafter, plasma is generated by a mixed gas of a second inert gas and one or more gaseous molecules, and a silicon compound layer containing at least a part of the elements constituting the gaseous molecules is formed on the surface of the silicon gas.
    Type: Grant
    Filed: December 27, 2001
    Date of Patent: December 13, 2005
    Inventors: Tadahiro Ohmi, Shigetoshi Sugawa, Masaki Hirayama, Yasuyukil Shirai
  • Patent number: 6927451
    Abstract: A trench MIS device is formed in a semiconductor die that contains a P-epitaxial layer that overlies an N+ substrate and an N-epitaxial layer. In one embodiment, the device includes a drain-drift region that extends from the bottom of the trench to the N-epitaxial layer. A termination region of the die includes a half-trench at an edge of the die and an N-type region that extends from a bottom of the half-trench to the substrate. An insulating layer and an overlying metal layer extend from the surface of the epitaxial layer into the half-trench. Preferably, the elements of the termination region are formed during the same process steps that are used to form the active elements of the device.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: August 9, 2005
    Assignee: Siliconix Incorporated
    Inventor: Mohamed N. Darwish
  • Patent number: 6917076
    Abstract: A semiconductor device and a method for manufacturing the same and method for deleting information in use of the semiconductor device, in which field shield isolation or a trench type isolation between elements is used with suppression of penetration of field oxide into element active region of the device, that is, a defect involved in conventional LOCOS type process, are disclosed. A non-LOCOS insulating device isolation block is formed in a semiconductor substrate. The non-LOCOS insulating device isolation block uses a field shield element isolation structure or trench type element isolation structure.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: July 12, 2005
    Assignee: United Microelectronics Corporation
    Inventors: Kohei Eguchi, Yuichi Egawa, Shoichi Iwasa, Hideki Fujikake, Wataru Yokozeki, Tatsuya Kawamata
  • Patent number: 6897526
    Abstract: To provide a semiconductor device that can effectively suppress the short channel effect without deterioration of carrier migration, an impurity ion is added from a direction of the <110> axis with respect to a silicon substrate on forming a punch through stopper under the gate electrode. In this invention, because the addition of the impurity is conducted by utilizing the principal of channeling, the impurity can be added a small amount of scattering suppressing damages on the surface of the silicon substrate. A channel forming region having an extremely small impurity concentration and substantially no crystallinity disorder is formed.
    Type: Grant
    Filed: February 2, 1999
    Date of Patent: May 24, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Akiharu Miyanaga, Nobuo Kubo
  • Patent number: 6894346
    Abstract: A structure is provided that ensures a low on-resistance and a better blocking effect. In a lateral type SIT (Static Induction Transistor) in which a first region is used as a p+ gate and a gate electrode is formed on the bottom of the first region, the structure is built such that the p+ gate and an n+ source are contiguous. An insulating film is formed on the surface of an n? channel, and an auxiliary gate electrode is formed on the insulating film. In addition, the auxiliary gate electrode and the source electrode are shorted.
    Type: Grant
    Filed: August 13, 2003
    Date of Patent: May 17, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Hidekatsu Onose, Atsuo Watanabe
  • Patent number: 6882025
    Abstract: A semiconductor device includes a region of semiconductor material with first and second isolation trenches formed therein. The first isolation trench is lined with a first material having a low oxygen diffusion rate and is filled with an insulating material. The second isolation trench is not lined with the first material but is filled with an insulating material. A first transistor is formed adjacent the first isolation region and a second transistor formed adjacent the second isolation region.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: April 19, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yee-Chia Yeo, Chih-Hsin Ko, Wen-Chin Lee, Chenming Hu
  • Patent number: 6872990
    Abstract: A semiconductor device layout involving the following: arranging active regions of a plurality of transistors having at least more than one first and second electrodes disposed on a substrate; arranging a plurality of gates of transistors between more than one first and second electrodes of those active regions respectively by positioning at least more than one gates having predetermined width and length at a constant gap on the substrate; and arranging a plurality of dummy gates having predetermined width and length between a plurality of transistors (or between and outside transistors) at the same gap as that of the gates of transistors on the substrate, so that all the gates of transistors are arranged at a constant gap to minimize the variance of process deviations and accordingly reduce the difference of threshold voltage of transistors, thereby increasing reliability of the semiconductor device.
    Type: Grant
    Filed: December 9, 1999
    Date of Patent: March 29, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Tae-Gyoung Kang
  • Patent number: 6872991
    Abstract: Circuits within a logic domain use partitioned power supply buses. Selected of the power supply buses are coupled to the power supply voltage potentials with electronic switches with gradated conductivity and leakage current. When the circuits are actively switching during a logic operation, the power supply voltage potentials are coupled to the buses with maximum conductivity. At predetermined times later, selected of the electronic switches are switched OFF to reduce leakage current. Lower conductivity and thus lower leakage switches remain ON to ensure corresponding logic states are maintained during a controlled low leakage time period. Various logic configurations are used to switch OFF high leakage devices.
    Type: Grant
    Filed: May 6, 2004
    Date of Patent: March 29, 2005
    Assignee: International Business Machines Corporation
    Inventors: Hung C. Ngo, Jente B. Kuang, Kevin J. Nowka
  • Patent number: 6849905
    Abstract: An array of transistors includes a plurality of transistors, a plurality of word lines extending in a first direction and a plurality of bit lines extending in a second direction. Each transistor includes a source, a drain, a channel and a localized charge storage dielectric. A first transistor of the plurality of transistors and a second transistor of the plurality of transistors share a common source/drain. A first localized charge storage dielectric of the first transistor does not overlap the common source/drain and a second localized charge storage dielectric of the second transistor overlaps the common source/drain.
    Type: Grant
    Filed: December 23, 2002
    Date of Patent: February 1, 2005
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Alper Ilkbahar, Roy Scheuerlein, Andrew J. Walker, Luca Fasoli
  • Patent number: 6847058
    Abstract: ON resistance and leakage current of a vertical power MOSFET are to be diminished. In a vertical high breakdown voltage MOSFET with unit MOSFETs (cells) arranged longitudinally and transversely over a main surface of a semiconductor substrate, the cells are made quadrangular in shape, and in each of the cells, source regions whose inner end portions are exposed to the interior of a quadrangular source contact hole are arranged separately and correspondingly to each side of the quadrangle. Each source region is trapezoidal in shape, and a lower side of the trapezoid is positioned below a gate electrode (gate insulating film), while an upper side portion of the trapezoid is exposed to the interior of the source contact hole. The four source regions are separated from one another by diagonal regions of the quadrangle.
    Type: Grant
    Filed: August 15, 2003
    Date of Patent: January 25, 2005
    Assignee: Renesas Technology Corp.
    Inventors: Katuo Ishizaka, Tetsuo Iijima
  • Publication number: 20040245582
    Abstract: Provided is a field effect transistor. The field effect transistor includes an insulating vanadium dioxide (VO2) thin film used as a channel material, a source electrode and a drain electrode disposed on the insulating VO2 thin film to be spaced apart from each other by a channel length, a dielectric layer disposed on the source electrode, the drain electrode, and the insulating VO2 thin film, and a gate electrode for applying a predetermined voltage to the dielectric layer.
    Type: Application
    Filed: December 30, 2003
    Publication date: December 9, 2004
    Inventors: Hyun Tak Kim, Kwang Yong Kang, Doo Hyeb Youn, Byung Gyu Chae
  • Patent number: 6822300
    Abstract: A semiconductor memory device is provided with: first and second access PMOS transistors formed on N well regions; first and second driver NMOS transistors formed on a P well region; a word line connected to the gates of first and second access PMOS transistors; and first and second bit lines connected to the sources of first and second access PMOS transistors, respectively. Then, N-type diffusion regions and P-type diffusion regions extend in the same direction while polysilicon interconnections extend in the same direction.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: November 23, 2004
    Assignee: Renesas Technology Corp.
    Inventor: Koji Nii
  • Patent number: 6821857
    Abstract: A method for enhancing the on-current carrying capability of a MOSFET device is disclosed. In an explanary embodiment, the method includes recessing fill material formed within a shallow trench isolation (STI) adjacent the MOSFET so as to expose a desired depth of a sidewall of the STI, thereby increasing the effective size of a parasitic corner device of the MOSFET. The threshold voltage of the parasitic corner device is then adjusted so as to substantially equivalent to the threshold voltage of the MOSFET device.
    Type: Grant
    Filed: June 10, 2003
    Date of Patent: November 23, 2004
    Assignee: International Business Machines Corporation
    Inventors: Babar A. Khan, Rama Divakaruni, Subramanian S. Iyer, Tzyy-Ming Cheng
  • Patent number: 6815777
    Abstract: A semiconductor device is provided with a memory cell. The semiconductor device includes a first gate-gate electrode layer, a second gate-gate electrode layer, a first drain-drain wiring layer, a second drain-drain wiring layer, a first drain-gate wiring layer and a second drain-gate wiring layer. The first drain-gate wiring layer and an upper layer and a lower layer of the second drain-gate wiring layer are located in different layers, respectively.
    Type: Grant
    Filed: March 5, 2002
    Date of Patent: November 9, 2004
    Assignee: Seiko Epson Corporation
    Inventors: Junichi Karasawa, Kunio Watanabe
  • Patent number: 6806123
    Abstract: The invention includes a DRAM array having a structure therein which includes a first material separated from a second material by an intervening insulative material. The first material is doped to at least 1×1017 atoms/cm3 with n-type and p-type dopant. The invention also includes a semiconductor construction in which a doped material is over a segment of a substrate. The doped material has a first type majority dopant therein, and is electrically connected with an electrical ground. A pair of conductively-doped diffusion regions are adjacent the segment, and spaced from one another by at least a portion of the segment. The conductively-doped diffusion regions have a second type majority dopant therein. The invention also encompasses methods of forming semiconductor constructions.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: October 19, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Mark McQueen, Luan C. Tran, Chandra Mouli
  • Patent number: 6806522
    Abstract: The invention provides a CMOS image sensor that can decrease the influence of the noise charge on the OB cells that determine the darkness level and can prevent the deterioration of the image quality. A region that absorbs the noise charge in a substrate is formed at the periphery of the cell array portion. As in the photodiode, a PN junction is formed in the noise charge absorption region, and one end thereof is connected to a power source voltage. This noise charge absorption region is formed between the cell array portion and the peripheral circuit portion.
    Type: Grant
    Filed: September 26, 2001
    Date of Patent: October 19, 2004
    Assignee: NEC Electronics Corporation
    Inventor: Hiroaki Ohkubo
  • Publication number: 20040188774
    Abstract: A semiconductor device capable of improving the operating speed and inhibiting the threshold voltage from fluctuation is obtained. In this semiconductor device, fluorine is introduced into at least any of regions extending over the junction interfaces between a first conductivity type semiconductor region and second conductivity type source/drain regions, at least the interface between the gate insulator film and the central region of a channel region as well as a gate insulator film, and side wall insulator films.
    Type: Application
    Filed: March 30, 2004
    Publication date: September 30, 2004
    Applicant: Sanyo Electric Co., Ltd.
    Inventors: Yasuhiro Takeda, Isao Nakano, Kazuhiro Kaneda, Masahiro Oda
  • Patent number: 6787862
    Abstract: The present invention relates to a gas insulated gate field effect transistor and a fabricating method thereof which provides an improved insulator between the gate and the source-drain channel of a field effect transistor. The insulator is a vacuum or a gas filled trench. As compared to a conventional MOSFET, the gas insulated gate device provides reduced capacitance between the gate and the source/drain region, improved device reliability and durability, and improved isolation from interference caused by nearby electric fields. The present invention includes the steps of forming a doped source region and drain region on a substrate, forming a gate, forming a gaseous gate insulating trench and forming terminals upon the gate, the source region and the drain region. A plurality of the devices on a single substrate may be combined to form an integrated circuit.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: September 7, 2004
    Inventor: Mark E. Murray