Including Organic Insulating Material Between Metal Levels Patents (Class 257/759)
  • Patent number: 9142451
    Abstract: Interlayer fabrication methods and interlayer structure are provided having reduced dielectric constants. The methods include, for example: providing a first uncured insulating layer with an evaporable material; and disposing a second uncured insulating layer having porogens above the first uncured insulating layer. The interlayer structure includes both the first and second insulating layers, and the methods further include curing the interlayer structure, leaving air gaps in the first insulating layer, and pores in the second insulating layer, where the air gaps are larger than the pores, and where the air gaps and pores reduce the dielectric constant of the interlayer structure.
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: September 22, 2015
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sunil Kumar Singh, Matthew Herrick, Teck Jung Tang, Dewei Xu
  • Patent number: 9105727
    Abstract: A semiconductor having an active layer; a gate insulating film in contact with the semiconductor; a gate electrode opposite to the active layer through the gate insulating film; a first nitride insulating film formed over the active layer; a photosensitive organic resin film formed on the first nitride insulating film; a second nitride insulating film formed on the photosensitive organic resin film; and a wiring provided on the second, nitride insulating film. A first opening portion is provided in the photosensitive organic resin film, an inner wall surface of the first opening portion is covered with the second nitride insulating film, a second opening portion is provided in a laminate including the gate insulating film, the first nitride insulating film, and the second nitride insulating film inside the first opening portion, and the semiconductor is connected with the wiring through the first opening portion and the second opening portion.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: August 11, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Satoshi Murakami, Masahiko Hayakawa, Shunpei Yamazaki
  • Patent number: 9076532
    Abstract: A semiconductor memory device comprises a first-supplied-voltage-supplying pad, a second-supplied-voltage-supplying pad, a data input/output pad, a memory body, a buffer circuit and an impedance-controlling circuit. A first supplied voltage is supplied to the memory body. A second supplied voltage is supplied to the buffer circuit. The impedance-controlling circuit controls an impedance of the buffer circuit on a side connected to the data input/output pad. The semiconductor memory device comprises a voltage-generating circuit generating a first inner voltage. The impedance-controlling circuit comprises a first P-channel transistor. A source terminal of the first P-channel transistor is connected to the first-supplied-voltage-supplying pad, and the first inner voltage generated from the voltage-generating circuit is selectively supplied to a gate terminal of the first P-channel transistor.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: July 7, 2015
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yuui Shimizu, Satoshi Inoue
  • Patent number: 9061902
    Abstract: Electrodes, batteries, methods for use and manufacturing are implemented to provide ion-based electrical power sources and related devices. Consistent with one such method, a battery electrode is produced having nanowires of a first material. The electrode is produced using a single growth condition to promote growth of crystalline nanowires on a conductive substrate and of the first material, and promote, by maintaining the growth condition, growth of an amorphous portion that surrounds the crystalline nanowires.
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: June 23, 2015
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Li-Feng Cui, Candace K. Chan, Riccardo Ruffo, Hailin Peng, Yi Cui
  • Patent number: 9018740
    Abstract: A field effect transistor (1) including: a semiconducting substrate (2) having two areas doped with electric charge carriers forming a source area (3) and a drain area (4), respectively; a dielectric layer positioned above the semiconducting substrate (2) between the source (3) and the drain (4) and forming the gate dielectric (9) of the field effect transistor (1); a gate (11) consisting of a reference electrode (8) and of a conductive solution (10), the solution (10) being in contact with the gate dielectric (9); and the gate dielectric (9) consists of a layer of lipids (13) in direct contact with the semiconducting layer (2). The invention also relates to a method for manufacturing such a field effect transistor (1) is disclosed.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: April 28, 2015
    Assignee: Centre National de la Recherche Scientifique (C.N.R.S)
    Inventors: Anne Charrier, Hervé Dallaporta, Tuyen Nguyen Duc
  • Patent number: 9006715
    Abstract: A method of making an electronic device comprising a double bank well-defining structure, which method comprises: providing an electronic substrate; depositing a first insulating material on the substrate to form a first insulating layer; depositing a second insulating material on the first insulating layer to form a second insulating layer; removing a portion of the second insulating layer to expose a portion of the first insulating layer and form a second well-defining bank; depositing a resist on the second insulating layer and on a portion of the exposed first insulating layer; removing the portion of the first insulating layer not covered by the resist, to expose a portion of the electronic substrate and form a first well-defining bank within the second well-defining bank; and removing the resist. The method can provide devices with reduced leakage currents.
    Type: Grant
    Filed: December 6, 2010
    Date of Patent: April 14, 2015
    Assignee: Cambridge Display Technology Limited
    Inventors: Mark Crankshaw, Mark Dowling, Daniel Forsythe, Simon Goddard, Gary Williams, Ilaria Grizzi, Angela McConnell
  • Patent number: 9000594
    Abstract: A contiguous layer of graphene is formed on exposed sidewall surfaces and a topmost surface of a copper-containing structure that is present on a surface of a substrate. The presence of the contiguous layer of graphene on the copper-containing structure reduces copper oxidation and surface diffusion of copper ions and thus improves the electromigration resistance of the structure. These benefits can be obtained using graphene without increasing the resistance of copper-containing structure.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: April 7, 2015
    Assignee: International Business Machines Corporation
    Inventors: John A. Ott, Ageeth A. Bol
  • Patent number: 8981563
    Abstract: A semiconductor device includes a first interconnect, a porous dielectric layer formed over the first interconnect, a second interconnect buried in the porous dielectric layer and electrically connected to the first interconnect, and a carbon-containing metal film that is disposed between the porous dielectric layer and the second interconnect and isolates these layers.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: March 17, 2015
    Assignees: Renesas Electronics Corporation, Ulvac, Inc.
    Inventors: Shinichi Chikaki, Takahiro Nakayama
  • Patent number: 8975665
    Abstract: A method of manufacture of an integrated circuit packaging system includes: forming a first metal layer on a carrier; forming an insulation layer directly on the first metal layer; exposing a portion of the first metal layer for directly attaching to a die interconnect connecting to an integrated circuit; forming a second metal layer directly on the insulation layer opposite the side of the insulation layer exposed by removing the carrier; and forming a protective layer directly on the insulation layer and the second metal layer, the protective layer exposing a portion of the second metal layer for directly attaching an external interconnect.
    Type: Grant
    Filed: January 16, 2013
    Date of Patent: March 10, 2015
    Assignee: STATS ChipPAC Ltd.
    Inventors: JinHee Jung, YoungDal Roh, KyoungHee Park
  • Patent number: 8957523
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a substrate comprises a plurality of metal layers. The semiconductor device also includes dielectric posts disposed in the metal layers. The density of the dielectric posts in the metal layers is equal to about 15-25%.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: February 17, 2015
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Fan Zhang, Wei Shao, Juan Boon Tan, Yeow Kheng Lim, Mahesh Bhatkar, Soh Yun Siah
  • Patent number: 8952538
    Abstract: A semiconductor device includes: an integrated circuit having an electrode pad; a first insulating layer disposed on the integrated circuit; a redistribution layer including a plurality of wirings and disposed on the first insulating layer, at least one of the plurality of wirings being electrically coupled to the electrode pad; a second insulating layer having a opening on at least a portion of the plurality of wirings; a metal film disposed on the opening and on the second insulating layer, and electrically coupled to at least one of the plurality of wirings; and a solder bump the solder bump overhanging at least one of the plurality of wirings not electrically coupled to the metal film.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: February 10, 2015
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Hirohisa Matsuki
  • Patent number: 8946890
    Abstract: Embodiments of the present disclosure provide a chip that comprises a base metal layer formed over a first semiconductor die and a first metal layer formed over the base metal layer. The first metal layer includes a plurality of islands configured to route at least one of (i) a ground signal or (ii) a power signal in the chip. The chip further comprises a second metal layer formed over the first metal layer. The second metal layer includes a plurality of islands configured to route at least one of (i) the ground signal or (ii) the power signal in the chip.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: February 3, 2015
    Assignee: Marvell World Trade Ltd.
    Inventors: Sehat Sutardja, Chung Chyung Han, Weidan Li, Shuhua Yu, Chuan-Cheng Cheng, Albert Wu
  • Patent number: 8946884
    Abstract: A substrate-less interposer for a stacked silicon interconnect technology (SSIT) product, includes: a plurality of metallization layers, at least a bottom most layer of the metallization layers comprising a plurality of metal segments, wherein each of the plurality of metal segments is formed between a top surface and a bottom surface of the bottom most layer of the metallization layers, and the metal segments are separated by dielectric material in the bottom most layer; and a dielectric layer formed on the bottom surface of the bottom most layer, wherein the dielectric layer includes one or more openings for providing contact to the plurality of metal segments in the bottom most layer.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: February 3, 2015
    Assignee: Xilinx, Inc.
    Inventors: Woon-Seong Kwon, Suresh Ramalingam, Namhoon Kim, Joong-Ho Kim
  • Patent number: 8927414
    Abstract: A graphene structure and a method of manufacturing the graphene structure, and a graphene device and a method of manufacturing the graphene device. The graphene structure includes a substrate; a growth layer disposed on the substrate and having exposed side surfaces; and a graphene layer disposed on the side surfaces of the growth layer.
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: January 6, 2015
    Assignees: Samsung Electronics Co., Ltd., Sungkyunkwan University Foundation for Corporate Collaboration
    Inventors: Byoung-Iyong Choi, Eun-kyung Lee, Dong-mok Whang
  • Patent number: 8908345
    Abstract: In a stacked chip system, an IO circuit connected to a TSV pad for IO and a switch circuit constitute an IO channel in each chip, the IO channels as many as the maximum scheduled number of stacks are coupled together and connected to constitute an IO group, and the chip has one or more such IO groups. Each TSV pad for IO is connected with a through via to an IO terminal at the same position in a chip of another layer. On an interposer, if the actual number of stacks is less than the maximum scheduled number of stacks, connection pads for IO in adjacent IO groups on the interposer are connected via a conductor.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: December 9, 2014
    Assignee: Hitachi,Ltd.
    Inventors: Futoshi Furuta, Kenichi Osada
  • Patent number: 8901549
    Abstract: The present invention provides an organic light emitting diode touch display panel including a substrate, a plurality of first electrodes and a plurality of second electrodes disposed on the substrate, a plurality of light emitting layers, a plurality of dielectric layers, a plurality of first electrode stripes, and a plurality of second stripes. Each light emitting layer is disposed on each first electrode, and each dielectric layer is disposed on each second electrode. Each first electrode stripe is disposed on the light emitting layers in each row, and each second electrode stripe is disposed on the dielectric layers in each row. Each first electrode, each light emitting layer and each first electrode stripe form an organic light emitting diode, and each second electrode, each dielectric layer and each second electrode stripe form a touch sensing capacitor.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: December 2, 2014
    Assignee: HannStar Display Corp.
    Inventors: Chien-Hsiang Huang, Kun-Hua Tsai, Jun-Shih Chung, Chun-Hsi Chen
  • Patent number: 8889491
    Abstract: An electronic fuse structure having an Mx level including an Mx dielectric, a fuse line, an Mx cap dielectric above at least a portion of the Mx dielectric, and a modified portion of the Mx cap dielectric directly above at least a portion of the fuse line, where the modified portion of the Mx cap dielectric is chemically different from the remainder of the Mx cap dielectric, an Mx+1 level including an Mx+1 dielectric, a first Mx+1 metal, an Mx+1 cap dielectric above of the Mx+1 dielectric and the first Mx+1 metal, where the Mx+1 level is above the Mx level, and a first via electrically connecting the fuse line to the first Mx+1 metal.
    Type: Grant
    Filed: January 28, 2013
    Date of Patent: November 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ronald G. Filippi, John A. Fitzsimmons, Erdem Kaltalioglu, Ping-Chuan Wang, Lijuan Zhang
  • Patent number: 8890318
    Abstract: A contact structure includes a permanent antireflection coating formed on a substrate having contact pads. A patterned dielectric layer is formed on the antireflective coating. The patterned dielectric layer and the permanent antireflective coating form openings. The openings correspond with locations of the contact pads. Contact structures are formed in the openings to make electrical contact with the contacts pads such that the patterned dielectric layer and the permanent antireflective coating each have a conductively filled region forming the contact structures.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: November 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Qinghuang Lin, Ying Zhang
  • Patent number: 8884288
    Abstract: The present invention provides a semiconductor structure for testing MIM capacitors. The semiconductor structure comprises: a first metal layer comprising at least a first circuit area and a second circuit area; a second metal layer located below the first metal layer with a first dielectric layer lying therebetween and connected with the second circuit area; a top plate located within the first dielectric layer closer to the first metal layer and connected with the first circuit area; a bottom plate located within the first dielectric layer closer to the second metal layer and separated from the top plate with an insulation layer therebetween and connected with the second circuit area. The second metal layer is connected with the substrate through a first electric pathway so as to form a second electric pathway from the top plate to the substrate when an electric leakage region exists in the insulation layer.
    Type: Grant
    Filed: September 30, 2013
    Date of Patent: November 11, 2014
    Assignee: Shanghai Huali Microelectronics Corporation
    Inventors: Qiang Li, Zhuanlan Sun, Changhui Yang
  • Patent number: 8884433
    Abstract: A circuit structure includes a semiconductor substrate, first and second metallic posts over the semiconductor substrate, an insulating layer over the semiconductor substrate and covering the first and second metallic posts, first and second bumps over the first and second metallic posts or over the insulating layer. The first and second metallic posts have a height of between 20 and 300 microns, with the ratio of the maximum horizontal dimension thereof to the height thereof being less than 4. The distance between the center of the first bump and the center of the second bump is between 10 and 250 microns.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: November 11, 2014
    Assignee: Qualcomm Incorporated
    Inventors: Mou-Shiung Lin, Chien-Kang Chou, Ke-Hung Chen
  • Patent number: 8872338
    Abstract: A semiconductor device includes a substrate configured with a plurality of conductive traces. The traces are configured to electrically couple to an integrated circuit (IC) die and at least one of the plurality of conductive traces includes first electrically conductive portions in a first electrically conductive layer of the substrate, second electrically conductive portions in a second electrically conductive layer of the substrate, and first electrically conductive connections between the first electrically conductive portions and the second electrically conductive portions. The first and second electrically conductive portions and the first electrically conductive connections form a continuous path along at least a portion of the at least one of the conductive traces. Time delay of conducting a signal along the at least one of the conductive traces is within a specified amount of time of time delay of conducting a signal along another one of the plurality of conductive traces.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: October 28, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Brian D. Young
  • Patent number: 8860014
    Abstract: An organic electroluminescent member comprising: a positive electrode and a negative electrode on a substrate: multiple organic layers which include at least a positive hole transport layer, a light-emitting layer and an electron transport layer, and which are arranged between the positive electrode and the negative electrode; and an electron injection layer arranged between the electron transport layer and the negative electrode. The electron injection layer is formed from at least one selected from the group consisting of alkali metals and compounds containing alkali metals having a melting point of less than 90° C., and at least one selected from the group consisting of alkali metals, alkaline earth metals, compounds containing alkali metals, and compounds containing.
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: October 14, 2014
    Assignee: Konica Minolta Holdings, Inc.
    Inventors: Kenji Arai, Toshihiko Iwasaki
  • Patent number: 8860009
    Abstract: A device having an easy production process and capable of achieving a long lifetime. The device has a substrate, two or more electrodes facing each other disposed on the substrate and a positive hole injection transport layer disposed between two electrodes among the two or more electrodes. The positive hole injection transport layer contains a reaction product of a molybdenum complex or tungsten complex.
    Type: Grant
    Filed: April 28, 2009
    Date of Patent: October 14, 2014
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Shigehiro Ueno, Masato Okada, Keisuke Hashimoto
  • Patent number: 8853659
    Abstract: A switchable electronic device comprises a hole blocking layer and a layer comprising a conductive material between first and second electrodes, wherein the conductivity of the device may be irreversibly switched upon application of a current having a current density of less than or equal to 100 A cm?2 to a conductivity at least 100 times lower than the conductivity of the device before switching. The conductive material is a doped organic material such as doped optionally substituted poly(ethylene dioxythiophene).
    Type: Grant
    Filed: May 4, 2010
    Date of Patent: October 7, 2014
    Assignee: Cambridge Display Technology Limited
    Inventors: Neil Greenham, Jianpu Wang
  • Patent number: 8853858
    Abstract: An integrated circuit structure including reflective metal pads is provided. The integrated circuit structure includes a semiconductor substrate; a first low-k dielectric layer overlying the semiconductor substrate, wherein the first low-k dielectric layer is a top low-k dielectric layer; a second low-k dielectric layer immediately underlying the first low-k dielectric layer; and a reflective metal pad in the second low-k dielectric layer.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: October 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Joung-Wei Liou, Keng-Chu Lin, Shwang-Ming Jeng
  • Patent number: 8847367
    Abstract: Provided are a hole-injecting material for an organic electroluminescent device (organic EL device) exhibiting high luminous efficiency at a low voltage and having greatly improved driving stability, and an organic EL device using the material. The hole-injecting material for an organic EL device is selected from benzenehexacarboxylic acid anhydrides, benzenehexacarboxylic acid imides, or N-substituted benzenehexacarboxylic acid imides. Further, the organic EL device has at least one light-emitting layer and at least one hole-injecting layer between an anode and a cathode arranged opposite to each other, and includes the above-mentioned hole-injecting material for an organic EL device in the hole-injecting layer. The organic EL device may contain a hole-transporting material having an ionization potential (IP) of 6.0 eV or less in the hole-injecting layer or a layer adjacent to the hole-injecting layer.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: September 30, 2014
    Assignee: Nippon Steel & Sumikin Chemical Co., Ltd.
    Inventors: Takayuki Fukumatsu, Ikumi Ichihashi, Hiroshi Miyazaki, Atsushi Oda
  • Patent number: 8847215
    Abstract: An organic light-emitting diode includes an anode on a substrate; a first hole transporting layer on the anode; a second hole transporting layer on the first hole transporting layer and corresponding to the red and green pixel areas; a first emitting material pattern of a first thickness on the second hole transporting layer and corresponding to the red pixel area; a second emitting material pattern of a second thickness on the second hole transporting layer and corresponding to the green pixel area; a third emitting material pattern of a third thickness on the first hole transporting layer and corresponding to the blue pixel area; an electron transporting layer on the first, second and third emitting material patterns; and a cathode on the electron transporting layer, wherein the second thickness is less than the first thickness and greater than the third thickness.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: September 30, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: Jin-Ho Park, Kwang-Hyun Kim, Min-Na Kim
  • Patent number: 8835203
    Abstract: An organic light emitting diode (OLED) display and a method for manufacturing the same are provided. The OLED display includes a substrate, an active layer and a capacitor lower electrode positioned on the substrate, a gate insulating layer positioned on the active layer and the capacitor lower electrode, a gate electrode positioned on the gate insulating layer at a location corresponding to the active layer, a capacitor upper electrode positioned on the gate insulating layer at a location corresponding to the capacitor lower electrode, a first electrode positioned to be separated from the gate electrode and the capacitor upper electrode, an interlayer insulating layer positioned on the gate electrode, the capacitor upper electrode, and the first electrode, a source electrode and a drain electrode positioned on the interlayer insulating layer, and a bank layer positioned on the source and drain electrodes.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: September 16, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: Hyunho Kim, Seokwoo Lee, Heedong Choi, Sangjin Lee, Seongmoh Seo
  • Patent number: 8835973
    Abstract: Light-emitting elements in which an increase of driving voltage can be suppressed are provided. Light-emitting devices whose power consumption is reduced by including such light-emitting elements are also provided. In a light-emitting element having an EL layer between an anode and a cathode, a first layer in which carriers can be produced is formed between the cathode and the EL layer and in contact with the cathode, a second layer which transfers electrons produced in the first layer is formed in contact with the first layer, and a third layer which injects the electrons received from the second layer into the EL layer is formed in contact with the second layer.
    Type: Grant
    Filed: March 8, 2012
    Date of Patent: September 16, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hiromi Nowatari, Satoshi Seo, Nobuharu Ohsawa, Tetsuo Tsutsui
  • Patent number: 8809840
    Abstract: An organic light emitting device may include an emission layer between a reflecting electrode and one of a transmitting or transflective electrode, and an optical control layer formed with an organic material that is 5000 to 10,000 ? thick between the transmitting or transflective electrode and the emission layer.
    Type: Grant
    Filed: August 18, 2011
    Date of Patent: August 19, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventor: Sung-Soo Lee
  • Patent number: 8796825
    Abstract: Highly reliable interconnections for microelectronic packaging. In one embodiment, dielectric layers in a build-up interconnect have a gradation in glass transition temperature; and the later applied dielectric layers are laminated at temperatures lower than the glass transition temperatures of the earlier applied dielectric layers. In one embodiment, the glass transition temperatures of earlier applied dielectric films in a build-up interconnect are increased through a thermosetting process to exceed the temperature for laminating the later applied dielectric films. In one embodiment, a polyimide material is formed with embedded catalysts to promote cross-linking after a film of the polyimide material is laminated (e.g., through photo-chemical or thermal degradation of the encapsulant of the catalysts).
    Type: Grant
    Filed: January 18, 2012
    Date of Patent: August 5, 2014
    Assignee: Intel Corporation
    Inventor: Ravindra V. Tanikella
  • Patent number: 8786088
    Abstract: In complex semiconductor devices, sophisticated ULK materials may be used in metal line layers in combination with a via layer of enhanced mechanical stability by increasing the amount of dielectric material of superior mechanical strength. Due to the superior mechanical stability of the via layers, reflow processes for directly connecting the semiconductor die and a package substrate may be performed on the basis of a lead-free material system without unduly increasing yield losses.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: July 22, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Torsten Huisinga, Jens Heinrich, Kai Frohberg, Frank Feustel
  • Patent number: 8779561
    Abstract: Disclosed herein is a Light Emitting Diode (LED) backlight unit without a Printed Circuit board (PCB). The LED backlight unit includes a chassis, insulating resin layer, and one or more light source modules. The insulating resin layer is formed on the chassis. The circuit patterns are formed on the insulating resin layer. The light source modules are mounted on the insulating resin layer and are electrically connected to the circuit patterns. The insulating resin layer has a thickness of 200 ?m or less, and is formed by laminating solid film insulating resin on the chassis or by applying liquid insulating resin to the chassis using a molding method employing spin coating or blade coating. Furthermore, the circuit patterns are formed by filling the engraved circuit patterns of the insulating resin layer with metal material.
    Type: Grant
    Filed: May 13, 2010
    Date of Patent: July 15, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gi Ho Jeong, Si Young Yang, Jae Wook Kwon, Jeong Hoon Park, Hyun Ju Yi, Choon Keun Lee
  • Patent number: 8772941
    Abstract: A method for manufacturing a circuit includes the step of providing a first wiring level comprising first wiring level conductors separated by a first wiring level dielectric material. A first dielectric layer with a plurality of interconnect openings and a plurality of gap openings is formed above the first wiring level. The interconnect openings and the gap openings are pinched off with a pinching dielectric material to form relatively low dielectric constant (low-k) volumes in the gap openings. Metallic conductors comprising second wiring level conductors and interconnects to the first wiring level conductors are formed at the interconnect openings while maintaining the relatively low-k volumes in the gap openings. The gap openings with the relatively low-k volumes reduce parasitic capacitance between adjacent conductor structures formed by the conductors and interconnects.
    Type: Grant
    Filed: September 8, 2008
    Date of Patent: July 8, 2014
    Assignee: International Business Machines Corporation
    Inventors: Lawrence A. Clevenger, Matthew E. Colburn, Louis C. Hsu, Wai-Kin Li
  • Patent number: 8766449
    Abstract: Disclosed is a variable interconnect geometry formed on a substrate that allows for increased electrical performance of the interconnects without compromising mechanical reliability. The compliance of the interconnects varies from the center of the substrate to edges of the substrate. The variation in compliance can either be step-wise or continuous. Exemplary low-compliance interconnects include columnar interconnects and exemplary high-compliance interconnects include helix interconnects. A cost-effective implementation using batch fabrication of the interconnects at a wafer level through sequential lithography and electroplating processes may be employed.
    Type: Grant
    Filed: May 24, 2007
    Date of Patent: July 1, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Suresh K. Sitaraman, Karan Kacker, Thomas Sokol
  • Patent number: 8742579
    Abstract: A semiconductor device is made by providing a sacrificial substrate and depositing an adhesive layer over the sacrificial substrate. A first conductive layer is formed over the adhesive layer. A polymer pillar is formed over the first conductive layer. A second conductive layer is formed over the polymer pillar to create a conductive pillar with inner polymer core. A semiconductor die or component is mounted over the substrate. An encapsulant is deposited over the semiconductor die or component and around the conductive pillar. A first interconnect structure is formed over a first side of the encapsulant. The first interconnect structure is electrically connected to the conductive pillar. The sacrificial substrate and adhesive layers are removed. A second interconnect structure is formed over a second side of the encapsulant opposite the first interconnect structure. The second interconnect structure is electrically connected to the conductive pillar.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: June 3, 2014
    Assignee: STATS ChipPAC, Ltd.
    Inventors: Reza A. Pagaila, Byung Tai Do, Shuangwu Huang
  • Patent number: 8736058
    Abstract: A conductive structure includes a contact plug extending through an insulating layer on a substrate, and first and second conductive lines extending alongside one another on the insulating layer. The first conductive line extends on the contact plug. A connecting line on the insulating layer extends between and electrically connects the first and second conductive lines. Related integrated circuit devices and fabrication methods are also discussed.
    Type: Grant
    Filed: October 22, 2010
    Date of Patent: May 27, 2014
    Assignee: Samsung Electronics Corporation
    Inventors: Byoung-Ho Kwon, Bo-Un Yoon
  • Patent number: 8720048
    Abstract: A method of manufacturing a printed circuit board includes arranging a core layer in which a bending prevention portion of at least two layers that are metal layers having different thermal expansion coefficients is disposed between a plurality of insulating members; forming a circuit pattern so as to have a desired pattern on at least one of the inside of the core layer and an outer face of the core layer; and forming an insulating layer including an opening portion that exposes the circuit pattern on the core layer.
    Type: Grant
    Filed: September 18, 2013
    Date of Patent: May 13, 2014
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Mi Sun Hwang, Jae Joon Lee, Myung Sam Kang
  • Patent number: 8692379
    Abstract: A connector access region of an integrated circuit device includes a set of parallel conductors, extending in a first direction, and interlayer connectors. The conductors comprise a set of electrically conductive contact areas on different conductors which define a contact plane with the conductors extending below the contact plane. A set of the contact areas define a line at an oblique angle, such as less than 45° or 5° to 27°, to the first direction. The interlayer connectors are in electrical contact with the contact areas and extend above the contact plane. At least some of the interlayer connectors overlie but are electrically isolated from the electrical conductors adjacent to the contact areas with which the interlayer connectors are in electrical contact. The set of parallel conductors may include a set of electrically conductive layers with the contact plane being generally perpendicular to the electrically conductive layers.
    Type: Grant
    Filed: August 24, 2012
    Date of Patent: April 8, 2014
    Assignee: Macronix International Co., Ltd.
    Inventor: Shih-Hung Chen
  • Patent number: 8680680
    Abstract: Semiconductor devices with porous insulative materials are disclosed. The porous insulative materials may include a consolidated material with voids dispersed therethrough. The voids may be defined by shells of microcapsules. The voids impart the dielectric materials with reduced dielectric constants and, thus, increased electrical insulation properties.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: March 25, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Tongbi Jiang
  • Patent number: 8653629
    Abstract: A semiconductor device has a semiconductor substrate. The semiconductor device has a plurality of LSI regions that are formed on the semiconductor substrate and are provided with a first power supply wiring layer including a first power supply wire. The semiconductor device has a first power supply terminal formed on the semiconductor substrate. The semiconductor device has a second power supply wiring layer including a second power supply wire that electrically connects the first power supply wire and the first power supply terminal, the second power supply wiring layer is formed in a dicing region between the LSI regions along a dicing line that separates the LSI regions and the dicing line region. A first barrier metal film is formed at least in the LSI regions at a boundary between the first power supply wire and the second power supply wire.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: February 18, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shoji Seta, Yojiro Hamasaki
  • Patent number: 8652962
    Abstract: A method of forming a dual damascene metal interconnect for a semiconductor device. The method includes forming a layer of low-k dielectric, forming vias through the low-k dielectric layer, depositing a sacrificial layer, forming trenches through the sacrificial layer, filling the vias and trenches with metal, removing the sacrificial layer, then depositing an extremely low-k dielectric layer to fill between the trenches. The method allows the formation of an extremely low-k dielectric layer for the second level of the dual damascene structure while avoiding damage to that layer by such processes as trench etching and trench metal deposition. The method has the additional advantage of avoiding an etch stop layer between the via level dielectric and the trench level dielectric.
    Type: Grant
    Filed: June 19, 2012
    Date of Patent: February 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Sunil Kumar Singh, Chung-Ju Lee, Tien-I Bao
  • Patent number: 8647978
    Abstract: A contiguous layer of graphene is formed on exposed sidewall surfaces and a topmost surface of a copper-containing structure that is present on a surface of a substrate. The presence of the contiguous layer of graphene on the copper-containing structure reduces copper oxidation and surface diffusion of copper ions and thus improves the electromigration resistance of the structure. These benefits can be obtained using graphene without increasing the resistance of copper-containing structure.
    Type: Grant
    Filed: July 18, 2012
    Date of Patent: February 11, 2014
    Assignee: International Business Machines Corporation
    Inventors: John A. Ott, Ageeth A. Bol
  • Patent number: 8629560
    Abstract: An integrated circuit structure comprising an air gap and methods for forming the same are provided. The integrated circuit structure includes a conductive line; a self-aligned dielectric layer on a sidewall of the conductive line; an air-gap horizontally adjoining the self-aligned dielectric layer; a low-k dielectric layer horizontally adjoining the air-gap; and a dielectric layer on the air-gap and the low-k dielectric layer.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Shi Liu, Chen-Hua Yu
  • Patent number: 8618663
    Abstract: The present invention provides a method of fabricating an interconnect structure in which a patternable low-k material replaces the need for utilizing a separate photoresist and a dielectric material. Specifically, this invention relates to a simplified method of fabricating single-damascene and dual-damascene low-k interconnect structures with at least one patternable low-k dielectric and at least one inorganic antireflective coating. In general terms, a method is provided that includes providing at least one patternable low-k material on a surface of an inorganic antireflective coating that is located atop a substrate, said inorganic antireflective coating is vapor deposited and comprises atoms of M, C and H wherein M is at least one of Si, Ge, B, Sn, Fe, Ta, Ti, Ni, Hf and La; forming at least one interconnect pattern within the at least one patternable low-k material; and curing the at least one patternable low-k material.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: December 31, 2013
    Assignee: International Business Machines Corporation
    Inventors: Qinghuang Lin, Deborah A. Neumayer
  • Patent number: 8614510
    Abstract: A method for manufacturing a semiconductor device includes forming an insulating film including silicon, oxygen, carbon and hydrogen above a semiconductor substrate, forming a wiring trench in the insulating film, forming a metal film to be a metal wiring on the insulating film such that the metal film is provided in the wiring trench, forming the metal wiring by removing the metal film outside the wiring trench, performing a hydrophobic treatment to the surface of the insulating film after the forming the metal wiring, and forming a metal cap selectively on an upper surface of the metal wiring by plating after the performing the hydrophobic treatment.
    Type: Grant
    Filed: March 18, 2010
    Date of Patent: December 24, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideyuki Tomizawa, Noriaki Matsunaga, Tadayoshi Watanabe, Shiro Mishima, Masako Kodera
  • Patent number: 8614507
    Abstract: An interconnection structure for a semiconductor device may include lower interconnection patterns disposed in a checker board shape and upper interconnection patterns disposed in a checker board shape and connecting two adjacent lower interconnection patterns to each other.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: December 24, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Joong-ho Yoon, Tackyung Kim, Kang-Sup Roh, Jun-Seok Kim, Eun-Jung Lee
  • Patent number: 8610278
    Abstract: A contiguous layer of graphene is formed on exposed sidewall surfaces and a topmost surface of a copper-containing structure that is present on a surface of a substrate. The presence of the contiguous layer of graphene on the copper-containing structure reduces copper oxidation and surface diffusion of copper ions and thus improves the electromigration resistance of the structure. These benefits can be obtained using graphene without increasing the resistance of copper-containing structure.
    Type: Grant
    Filed: August 16, 2012
    Date of Patent: December 17, 2013
    Assignee: International Business Machines Corporation
    Inventors: John A. Ott, Ageeth A. Bol
  • Patent number: 8604618
    Abstract: A semiconductor device and a method of fabricating the same, includes vertically stacked layers on an insulator. Each of the layers includes a first dielectric insulator portion, a first metal conductor embedded within the first dielectric insulator portion, a first nitride cap covering the first metal conductor, a second dielectric insulator portion, a second metal conductor embedded within the second dielectric insulator portion, and a second nitride cap covering the second metal conductor. The first and second metal conductors form first vertically stacked conductor layers and second vertically stacked conductor layers. The first vertically stacked conductor layers are proximate the second vertically stacked conductor layers, and at least one air gap is positioned between the first vertically stacked conductor layers and the second vertically stacked conductor layers.
    Type: Grant
    Filed: September 22, 2011
    Date of Patent: December 10, 2013
    Assignee: International Business Machines Corporation
    Inventors: Edward C. Cooney, III, Jeffrey P. Gambino, Zhong-Xiang He, Xiao Hu Liu, Thomas L. McDevitt, Gary L. Milo, William J. Murphy
  • Patent number: 8598706
    Abstract: A method for forming an interlayer dielectric film by a plasma CVD method, including turning off a radio frequency power and purging with an inert gas simultaneously.
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: December 3, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Hironori Yamamoto, Fuminori Ito, Yoshihiro Hayashi