Including Organic Insulating Material Between Metal Levels Patents (Class 257/759)
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Patent number: 8188590Abstract: An integrated circuit package system including: providing an integrated circuit die, forming a first layer over the integrated circuit die, forming a bridge on and in the first layer, forming a second layer on the first layer, and forming bump pads on and in the second layer, the bump pads connected to ends of the bridge.Type: GrantFiled: August 23, 2007Date of Patent: May 29, 2012Assignee: STATS ChipPAC Ltd.Inventors: Yaojin Lin, Pandi Chelvam Marimuthu
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Patent number: 8188577Abstract: The present invention provides a production method of a semiconductor device, involving formation of a flattening layer and easy process for layers formed on a semiconductor layer, and also provides a semiconductor device preferably produced by such a production method. The present invention further provides an exposure apparatus preferably used in such a production method.Type: GrantFiled: July 14, 2008Date of Patent: May 29, 2012Assignee: Sharp Kabushiki KaishaInventors: Seiichi Uchida, Hiroyuki Ogawa
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Patent number: 8188602Abstract: To provide a semiconductor device having copper wiring layers and organic insulating resin layers with less separation and its manufacture method. A semiconductor device has: a semiconductor substrate formed with a number of semiconductor elements; a first interlayer insulating film formed above the semiconductor substrate and having a first wiring recess; a first copper wiring embedded in the first wiring recess; a second interlayer insulating film having a second wiring recess, the second interlayer insulating film including a copper diffusion preventing layer formed on the first copper wiring and the first interlayer insulating film, an oxide film formed on the copper diffusion preventing layer, and an organic insulating resin layer formed on the oxide film; and a second copper wiring embedded in the second wiring recess.Type: GrantFiled: January 24, 2003Date of Patent: May 29, 2012Assignee: Fujitsu Semiconductor LimitedInventors: Satoshi Otsuka, Shun-ichi Fukuyama
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Patent number: 8174189Abstract: A white Light Emitting Diode (LED) device that enables the adjustment of a Correlated Color temperature to realize emotional illumination is provided. The white LED device includes a package body for accommodating a plurality of light source units; a first light source unit accommodated in the package body, configured to have one or more first LED chips and a first phosphor, and configured to emit white light having a first Correlated Color Temperature (CCT); a second light source unit accommodated in the package body, configured to have one or more second LED chips and a second phosphor, and configured to emit white light having a second CCT; and a current control unit for varying current, to be supplied to at least one of the first and second LED chips, so as to adjust the first and second CCTs.Type: GrantFiled: March 5, 2008Date of Patent: May 8, 2012Assignee: Lumimicro Corp., Ltd.Inventors: Han Do Kim, Hyun Min Kim, Jung Hyun Yoon
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Patent number: 8168975Abstract: A wiring line is electrically connected in parallel to an auxiliary wiring line via a plurality of contact holes. The contact holes are formed through an insulating film and arranged in vertical direction to the wiring line. Since the auxiliary wiring line is formed in the same layer as an electrode that constitutes a TFT, the electric resistance of the wiring line can be reduced effectively without increasing the number of manufacturing steps.Type: GrantFiled: May 28, 2009Date of Patent: May 1, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Jun Koyama, Hisashi Ohtani, Yasushi Ogata, Shunpei Yamazaki
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Patent number: 8158521Abstract: A method of lowering the dielectric constant of an organosilicon low k dielectric layer while improving the hardness and thermal stability is provided. A deposited layer of carbon doped oxide, HSQ, or MSQ is cured and treated with a He plasma which improves hardness for a subsequent CMP step and lowers the dielectric constant. There is no loss of H2O or CH4 during the He treatment. The low k dielectric layer is then treated with a H2 plasma which converts some of the Si—O and Si—CH3 bonds near the surface to Si—H bonds, thereby further lowering the dielectric constant and increasing thermal stability that improves breakdown resistance. Moisture uptake is also reduced. The method is especially useful for interconnect schemes with deep sub-micron ground rules. Surprisingly, the k value obtained from two different plasma treatments is lower than when two He treatments or two H2 treatment are performed.Type: GrantFiled: July 23, 2007Date of Patent: April 17, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hui-Lin Chang, Chung-Chi Ko, Tien I Bao, Yun-Chen Lu
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Patent number: 8138502Abstract: To prevent a point defect and a line defect in forming a light-emitting device, thereby improving the yield. A light-emitting element and a driver circuit of the light-emitting element, which are provided over different substrates, are electrically connected. That is, a light-emitting element and a driver circuit of the light-emitting element are formed over different substrates first, and then electrically connected. By providing a light-emitting element and a driver circuit of the light-emitting element over different substrates, the step of forming the light-emitting element and the step of forming the driver circuit of the light-emitting element can be performed separately. Therefore, degrees of freedom of each step can be increased, and the process can be flexibly changed. Further, steps (irregularities) on the surface for forming the light-emitting element can be reduced than in the conventional technique.Type: GrantFiled: July 25, 2006Date of Patent: March 20, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Osamu Nakamura, Miyuki Higuchi, Yasuko Watanabe, Yasuyuki Arai
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Patent number: 8134149Abstract: The present invention has an object of providing a light emitting device including an OLED formed on a plastic substrate, which can prevent the degradation due to penetration of moisture or oxygen. On a plastic substrate, a plurality of films for preventing oxygen or moisture from penetrating into an organic light emitting layer in the OLED (hereinafter, referred to as barrier films) and a film having a smaller stress than that of the barrier films (hereinafter, referred to as a stress relaxing film), the film being interposed between the barrier films, are provided. Owing to a laminate structure of a plurality of barrier films, even if a crack occurs in one of the barrier films, the other barrier film(s) can effectively prevent moisture or oxygen from penetrating into the organic light emitting layer. Moreover, the stress relaxing film, which has a smaller stress than that of the barrier films, is interposed between the barrier films, thereby making it possible to reduce a stress of the entire sealing film.Type: GrantFiled: May 16, 2011Date of Patent: March 13, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Toru Takayama, Mai Akiba
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Patent number: 8129828Abstract: A wiring substrate assembly includes a resin wiring substrate and a reinforcement member. The resin wiring substrate does not have a core substrate, and includes a substrate main surface, a substrate back surface, a laminate structure comprised of resin insulation layers and conductive layers, and connection terminals disposed on the substrate main surface, to which a chip component is connectable. The reinforcement member is bonded to the substrate main surface and defines an opening portion extending through the reinforcement member so as to expose the main-surface-side connection terminals. The reinforcement member comprises a composite material including a resin material containing an inorganic material.Type: GrantFiled: September 28, 2009Date of Patent: March 6, 2012Assignee: NGK Spark Plug Co., Ltd.Inventor: Shinnosuke Maeda
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Patent number: 8129823Abstract: Highly reliable interconnections for microelectronic packaging. In one embodiment, dielectric layers in a build-up interconnect have a gradation in glass transition temperature; and the later applied dielectric layers are laminated at temperatures lower than the glass transition temperatures of the earlier applied dielectric layers. In one embodiment, the glass transition temperatures of earlier applied dielectric films in a build-up interconnect are increased through a thermosetting process to exceed the temperature for laminating the later applied dielectric films. In one embodiment, a polyimide material is formed with embedded catalysts to promote cross-linking after a film of the polyimide material is laminated (e.g., through photo-chemical or thermal degradation of the encapsulant of the catalysts).Type: GrantFiled: November 27, 2007Date of Patent: March 6, 2012Assignee: Intel CorporationInventor: Ravindra V. Tanikella
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Patent number: 8120067Abstract: An integrated circuit chip includes a semiconductor substrate having thereon a plurality of IMD layers and first conductive layers embedded in the IMD layers; a first insulating layer overlying the IMD layers and the first conductive layers; a plurality of first power/ground mesh wiring lines, in a second conductive layer overlying the first insulating layer, for distributing power signal or ground signal; and a second insulating layer covering the second conductive layer and the first insulating layer.Type: GrantFiled: October 26, 2011Date of Patent: February 21, 2012Assignee: Mediatek Inc.Inventors: Ching-Chung Ko, Tao Cheng, Tien-Yueh Liu, Dar-Shii Chou, Peng-Cheng Kao
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Patent number: 8120019Abstract: An organic light-emitting element has an anode, a cathode, and a layer including an organic compound between the anode and the cathode. The layer including the organic compound has at least one tetracyano compound represented by at least one of Formula (1) or (2) below. In Formula (1), R1 to R4 are each a hydrogen atom, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted aralkyl group, a substituted or unsubstituted aromatic group, a nitro group, or a cyano group. In Formula (2), n represents an integer of 1 to 2, Mn+ is a metal ion or an onium cation, and R1 to R4 are as defined in formula (1).Type: GrantFiled: December 15, 2008Date of Patent: February 21, 2012Assignee: Canon Kabushiki KaishaInventors: Koichi Nakata, Kazunori Ueno, Koichi Suzuki
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Patent number: 8115318Abstract: In a semiconductor device, an insulating interlayer having a groove is formed on an insulating underlayer. A silicon-diffused metal layer including no metal silicide is buried in the groove. A metal diffusion barrier layer is formed on the silicon-diffused metal layer and the insulating interlayer.Type: GrantFiled: May 4, 2010Date of Patent: February 14, 2012Assignee: Renesas Electronics CorporationInventors: Koichi Ohto, Toshiyuki Takewaki, Tatsuya Usami, Nobuyuki Yamanishi
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Patent number: 8084863Abstract: A circuitized substrate including a dielectric layer having a p-aramid paper impregnated with a halogen-free, low moisture absorptivity resin and not including continuous or semi-continuous fiberglass fibers as part thereof, and a first circuitized layer positioned on the dielectric layer. A method of making this substrate is also provided.Type: GrantFiled: April 10, 2008Date of Patent: December 27, 2011Assignee: Endicott Interconnect Technologies, Inc.Inventors: Robert M. Japp, Voya R. Markovich, Kostas I. Papathomas, Mark D. Poliks
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Patent number: 8084142Abstract: The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.Type: GrantFiled: September 21, 2006Date of Patent: December 27, 2011Assignee: Micron Technology, Inc.Inventors: Cem Basceri, Gurtej S. Sandhu, H. Montgomery Manning
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Patent number: 8080878Abstract: Provided is a semiconductor device, which includes an interlayer insulating film formed on a semiconductor substrate, a wiring layer filled in a recess formed in the interlayer insulating film, and a cap insulating film. The interlayer insulating film includes a first SiOCH film and a surface modification layer including an SiOCH film formed by modifying a surface layer of the first SiOCH film, the SiOCH film having a lower carbon concentration and a higher oxygen concentration than the first SiOCH film has. The cap insulating film contacts with surfaces of the metal wiring and the surface modification layer.Type: GrantFiled: September 11, 2009Date of Patent: December 20, 2011Assignee: Renesas Electronics CorporationInventors: Makoto Ueki, Takahiro Onodera, Yoshihiro Hayashi
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Patent number: 8076681Abstract: A high-efficiency, white organic electroluminescent device has such a structure that its emission layer is obtained by laminating sub-emission layers of red, green, and blue, respectively. The green sub-emission layer contacting a hole transport layer has a delayed fluorescent material, and the red sub-emission layer has a phosphorescent light emitting material.Type: GrantFiled: October 5, 2009Date of Patent: December 13, 2011Assignee: Canon Kabushiki KaishaInventors: Toshifumi Mori, Koichi Suzuki, Akira Tsuboyama, Satoru Shiobara, Kenichi Ikari
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Patent number: 8072004Abstract: An integrated circuit chip includes a semiconductor substrate having thereon a plurality of inter-metal dielectric (IMD) layers and a plurality of first conductive layers embedded in respective the plurality of IMD layers, wherein the first conductive layers comprise copper; a first passivation layer overlying the plurality of IMD layers and the plurality of first conductive layers; a plurality of first power/ground mesh wiring lines, formed in a second conductive layer overlying the first passivation layer, for distributing power signal or ground signal, wherein the second conductive layer comprise aluminum; and a second passivation layer covering the second conductive layer and the first passivation layer.Type: GrantFiled: September 15, 2010Date of Patent: December 6, 2011Assignee: Mediatek Inc.Inventors: Ching-Chung Ko, Tao Cheng, Tien-Yueh Liu, Dar-Shii Chou, Peng-Cheng Kao
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Patent number: 8072070Abstract: A barrier layer is deposited over a layer of passivation including in an opening to a contact pad created in the layer of passivation. A column of three layers of metal is formed overlying the barrier layer and aligned with the contact pad and having a diameter that is about equal to the surface of the contact pad. The three metal layers of the column comprise, in succession when proceeding from the layer that is in contact with the barrier layer, a layer of pillar metal, a layer of under bump metal and a layer of solder metal. The layer of pillar metal is reduced in diameter, the barrier layer is selectively removed from the surface of the layer of passivation after which reflowing of the solder metal completes the solder bump of the invention.Type: GrantFiled: June 29, 2009Date of Patent: December 6, 2011Assignee: Megica CorporationInventors: Jin-Yuan Lee, Mou-Shiung Lin, Ching-Cheng Huang
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Publication number: 20110285022Abstract: A method for fabricating an integrated circuit (IC) chip includes forming a metal trace having a thickness of between 5 ?m and 27 ?m over a semiconductor substrate, and forming a passivation layer on the metal trace, wherein the passivation layer includes a layer of silicon nitride on the metal trace and a layer of silicon oxide on the layer of silicon nitride, or includes a layer of silicon oxynitride on the metal trace and a layer of silicon oxide on the layer of silicon oxynitride.Type: ApplicationFiled: August 3, 2011Publication date: November 24, 2011Applicant: MEGICA CORPORATIONInventors: Mou-Shiung Lin, Jin-Yuan Lee
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Patent number: 8062979Abstract: The object of the present invention is to embed an insulating film in a hole having a high aspect ratio and a small width without the occurrence of a void. The thickness of a polishing stopper layer is reduced by making separate layers respectively serve as a mask during forming the hole in a semiconductor substrate, and a stopper during removing the insulating film filled in the hole.Type: GrantFiled: March 12, 2008Date of Patent: November 22, 2011Assignee: Elpida Memory, Inc.Inventor: Toshiyuki Hirota
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Publication number: 20110278727Abstract: A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer.Type: ApplicationFiled: July 26, 2011Publication date: November 17, 2011Applicant: MEGICA CORPORATIONInventors: Jin-Yuan Lee, Mou-Shiung Lin, Ching-Cheng Huang
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Patent number: 8053861Abstract: Provided are methods and apparatuses for depositing barrier layers for blocking diffusion of conductive materials from conductive lines into dielectric materials in integrated circuits. The barrier layer may contain copper. In some embodiments, the layers have conductivity sufficient for direct electroplating of conductive materials without needing intermediate seed layers. Such barrier layers may be used with circuits lines that are less than 65 nm wide and, in certain embodiments, less than 40 nm wide. The barrier layer may be passivated to form easily removable layers including sulfides, selenides, and/or tellurides of the materials in the layer.Type: GrantFiled: January 26, 2009Date of Patent: November 8, 2011Assignee: Novellus Systems, Inc.Inventors: Thomas W. Mountsier, Roey Shaviv, Steven T. Mayer, Ronald A. Powell
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Patent number: 8053892Abstract: A method and system is provided for efficiently varying the composition of the metal interconnects for a semiconductor device. A metal interconnect according to the present disclosure has an intermediate layer on a dielectric material, the intermediate layer having a relatively higher concentration of an impurity metal along with a primary metal, the impurity metal having a lower reduction potential than the primary metal. The metal interconnect has a main layer of the metal alloy interconnect on top of the intermediate layer and surrounded by the intermediate layer, the main layer having a relatively higher concentration of the primary metal than the intermediate layer, wherein the intermediate and main layers of the metal alloy interconnect each maintains a material uniformity.Type: GrantFiled: January 27, 2006Date of Patent: November 8, 2011Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ting-Chu Ko, Ming-Hsing Tsai, Chien-Hsueh Shih
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Patent number: 8053777Abstract: A detector including an electrode formed from a first layer of conductive material, a readout line formed from a second layer of conductive material, and a via electrically connecting the readout line and the electrode. In one embodiment, the detector includes a source electrode and a drain electrode formed from the first layer of conductive material, and a data line formed from the second layer of conductive material, such that the source and drain electrodes are vertically offset from the data line. Alternatively, in another embodiment, the detector includes a gate electrode formed from the first layer of conductive material, and a scan line formed from the second layer of conductive material, such that the gate electrode is vertically offset from the scan line.Type: GrantFiled: March 31, 2005Date of Patent: November 8, 2011Assignee: General Electric CompanyInventors: Douglas Albagli, William Andrew Hennessy
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Patent number: 8044387Abstract: Disclosed are semiconductor memory devices containing a plastic substrate and at least one active device supported by the plastic substrate, the active device containing an organic semiconductor material. The semiconductor memory devices containing a plastic substrate may further contain a polymer dielectric and/or a conductive polymer.Type: GrantFiled: July 7, 2004Date of Patent: October 25, 2011Assignee: Spansion LLCInventors: Matthew S. Buynoski, Uzodinma Okoroanyanwu, Suzette K. Pangrle, Nicholas H. Tripsas
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Patent number: 8030775Abstract: A chip assembly includes a semiconductor chip and a wirebonded wire. The semiconductor chip includes a passivation layer over a silicon substrate and over a thin metal structure, a first thick metal layer over the passivation layer and on a contact point of the thin metal structure exposed by an opening in the passivation layer, a polymer layer over the passivation layer and on the first thick metal layer, and a second thick metal layer on the polymer layer and on the first thick metal layer exposed by an opening in the polymer layer. The first thick metal layer includes a copper layer with a thickness between 3 and 25 micrometers. The wirebonded wire is bonded to the second thick metal layer.Type: GrantFiled: August 27, 2008Date of Patent: October 4, 2011Assignee: Megica CorporationInventor: Mou-Shiung Lin
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Patent number: 8030644Abstract: Example embodiments of the present invention relate to an organic insulator composition, an organic insulating film having the organic insulator composition, an organic thin film transistor having the organic insulating film, an electronic device having the organic thin film transistor and methods of forming the same. Other example embodiments of the present invention relate to an organic insulator composition including a fluorinated silane compound that may be used to improve the charge carrier mobility and hysteresis of an organic thin film transistor. An organic insulator composition including a fluorinated silane compound and an organic thin film transistor using the same is provided. The hysteresis and physical properties, e.g., threshold voltage and/or charge carrier mobility, of the organic thin film transistor may be improved by the use of the organic insulator composition.Type: GrantFiled: July 7, 2006Date of Patent: October 4, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Jung Han Shin, Eun Kyung Lee, Eun Jeong Jeong, Joo Young Kim, Hyun Sik Moon, Sang Yoon Lee
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Patent number: 8030125Abstract: The present invention is a method for manufacturing an organic thin-film transistor substrate including an organic thin-film transistor as a transistor element, and an object of the invention is to provide a manufacturing method capable of forming a bank in a smaller number of steps.Type: GrantFiled: March 25, 2008Date of Patent: October 4, 2011Assignee: Sumitomo Chemical Company, LimitedInventor: Kenji Kasahara
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Patent number: 8026606Abstract: A structure and a method for forming the same. The structure includes (a) an interlevel dielectric (ILD) layer; (b) a first electrically conductive line and a second electrically conductive line both residing in the ILD layer; (c) a diffusion barrier region residing in the ILD layer. The diffusion barrier region (i) physically isolates, (ii) electrically couples together, and (iii) are in direct physical contact with the first and second electrically conductive lines. The first and second electrically conductive lines each comprises a first electrically conductive material. The diffusion barrier region comprises a second electrically conductive material different from the first electrically conductive material. The diffusion barrier region is adapted to prevent a diffusion of the first electrically conductive material through the diffusion barrier region.Type: GrantFiled: August 25, 2009Date of Patent: September 27, 2011Assignee: International Business Machines CorporationInventors: Stephen Ellinwood Luce, Thomas Leddy McDevitt, Anthony Kendall Stamper
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Patent number: 8021918Abstract: An integrated circuit chip includes a silicon substrate, a first circuit in or over said silicon substrate, a second circuit device in or over said silicon substrate, a dielectric structure over said silicon substrate, a first interconnecting structure in said dielectric structure, a first pad connected to said first node of said voltage regulator through said first interconnecting structure, a second interconnecting structure in said dielectric structure, a second pad connected to said first node of said internal circuit through said second interconnecting structure, a passivation layer over said dielectric structure, wherein multiple opening in said passivation layer exposes said first and second pads, and a third interconnecting structure over said passivation layer and over said first and second pads.Type: GrantFiled: September 29, 2007Date of Patent: September 20, 2011Assignee: Megica CorporationInventors: Mou-Shiung Lin, Jin-Yuan Lee, Chien-Kang Chou
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Patent number: 8017522Abstract: A mechanically robust semiconductor structure with improved adhesion strength between a low-k dielectric layer and a dielectric-containing substrate is provided. In particular, the present invention provides a structure that includes a dielectric-containing substrate having an upper region including a treated surface layer which is chemically and physically different from the substrate; and a low-k dielectric material located on a the treated surface layer of the substrate. The treated surface layer and the low-k dielectric material form an interface that has an adhesion strength that is greater than 60% of the cohesive strength of the weaker material on either side of the interface. The treated surface is formed by treating the surface of the substrate with at least one of actinic radiation, a plasma and e-beam radiation prior to forming of the substrate the low-k dielectric material.Type: GrantFiled: January 24, 2007Date of Patent: September 13, 2011Assignee: International Business Machines CorporationInventors: Qinghuang Lin, Terry A. Spooner, Darshan D. Gandhi, Christy S. Tyberg
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Patent number: 8018060Abstract: A system and method for forming post passivation metal structures is described. Metal interconnections and high quality electrical components, such as inductors, transformers, capacitors, or resistors are formed on a layer of passivation, or on a thick layer of polymer over a passivation layer.Type: GrantFiled: January 16, 2008Date of Patent: September 13, 2011Assignee: Megica CorporationInventors: Mou-Shiung Lin, Chiu-Ming Chou, Chien-Kang Chou
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Patent number: 8018058Abstract: A method of forming a circuit includes providing a substrate; providing an interconnect region positioned on the substrate; bonding a device structure to a surface of the interconnect region; and processing the device structure to form a first stack of layers on the interconnect region and a second stack of layers on the first stack. The width of the first stack is different than the width of the second stack.Type: GrantFiled: March 29, 2005Date of Patent: September 13, 2011Assignee: BeSang Inc.Inventor: Sang-Yun Lee
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Patent number: 8017937Abstract: The invention relates to a semiconductor component having a metal-insulator structure (MIS) which contains as basic components a substrate, a layer made of an organic semiconductor material and a dielectric layer as insulator. The substrate and/or the dielectric layer made of an inorganic-organic hybrid polymer is chosen from these basic components. In addition, the invention relates to a method for the production of semiconductor components of this type and also to the use of inorganic-organic hybrid polymers for the production of semiconductor components.Type: GrantFiled: October 21, 2005Date of Patent: September 13, 2011Assignees: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V., Joanneum Research ForSchungsgesellschaft MBHInventors: Ruth Houbertz-Krauss, Angelika Schmitt, Gerhard Domann, Michael Popall, Barbara Stadlober, Ursula Haas, Anja Haase
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Patent number: 8008775Abstract: A system and method for forming post passivation metal structures is described. Metal interconnections and high quality electrical components, such as inductors, transformers, capacitors, or resistors are formed on a layer of passivation, or on a thick layer of polymer over a passivation layer.Type: GrantFiled: December 20, 2004Date of Patent: August 30, 2011Assignee: Megica CorporationInventors: Mou-Shiung Lin, Chiu-Ming Chou, Chien-Kang Chou
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Patent number: 8008776Abstract: A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer.Type: GrantFiled: February 2, 2008Date of Patent: August 30, 2011Assignee: Megica CorporationInventors: Jin-Yuan Lee, Mou-Shiung Lin, Ching-Cheng Huang
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Patent number: 8003976Abstract: An organic light-light conversion device excellent in device characteristics, comprising a light sensing unit having a layer including a photo-conductive organic semiconductor developing a photo-current multiplication phenomenon by light irradiation, and a light emitting unit having a layer including an electroluminescent organic semiconductor emitting light by current injection, characterized in that at least one of the photo-conductive organic semiconductor and an electroluminescent organic semiconductor is polymer semiconductor. An imaging intensifier consisting of a plurality of arranged above organic light-light conversion devices. An optical sensor provided with a means of measuring and outputting voltages applied to the above organic light-light conversion device and to the opposite ends of a layer including the electroluminescent organic semiconductor.Type: GrantFiled: December 16, 2004Date of Patent: August 23, 2011Assignee: Sumitomo Chemical Company, LimitedInventors: Kenichi Nakayama, Masaaki Yokoyama, Masato Ueda
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Patent number: 7999386Abstract: A semiconductor device contains a semiconductor substrate, an insulating film formed on the semiconductor substrate, an inductor formed over the semiconductor substrate while placing a portion of the insulating film in between, and a guard ring surrounding the inductor in a plan view, and isolating the inductor from other regions, wherein the guard ring contains an annular impurity diffused layer provided in the surficial portion of the semiconductor substrate, and an annular electro-conductor connected to the impurity diffused layer, and extended across a plurality of interconnect layers, up to a layer having a level of height not lower than the layer having the inductor provided therein.Type: GrantFiled: November 24, 2008Date of Patent: August 16, 2011Assignee: Renesas Electronics CorporationInventors: Shinichi Uchida, Yasutaka Nakashiba
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Patent number: 7982313Abstract: By dividing a single chip area into individual sub-areas, a thermally induced stress in each of the sub-areas may be reduced during operation of complex integrated circuits, thereby enhancing the overall reliability of complex metallization systems comprising low-k dielectric materials or ULK material. Consequently, a high number of stacked metallization layers in combination with increased lateral dimensions of the semiconductor chip may be used compared to conventional strategies.Type: GrantFiled: July 22, 2009Date of Patent: July 19, 2011Assignee: Advanced Micro Devices, Inc.Inventors: Michael Grillberger, Matthias Lehr
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Patent number: 7982314Abstract: Circuit elements and wirings constituting a circuit, and first electrodes electrically connected to such a circuit are provided on one main surface of a semiconductor substrate. An organic insulating film is formed on the circuit except for openings on the surfaces of the first electrodes. First and second external connecting electrodes are provided on the organic insulating film. At least one conductive layer for electrically connecting the first and second external connecting electrodes and the first electrodes is placed on the organic insulating film.Type: GrantFiled: July 21, 2010Date of Patent: July 19, 2011Assignees: Renesas Electronics Corporation, Hitachi ULSI Systems Co., Ltd.Inventors: Masao Shinozaki, Kenji Nishimoto, Takashi Akioka, Yutaka Kohara, Sanae Asari, Shusaku Miyata, Shinji Nakazato
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Patent number: 7977796Abstract: A gas or an insulating material having a relative dielectric constant of not more than 2.5 on average is interposed between a first wiring layer and a second wiring layer included in a multilayer wiring structure. Between a wiring of the first wiring layer and a wiring of the second wiring layer, a conductive connector is arranged. Between a predetermined wiring of the first wiring layer and a predetermined wiring of the second wiring layer, an insulating heat conductor having a relative dielectric constant of not more than 5 is arranged.Type: GrantFiled: August 24, 2007Date of Patent: July 12, 2011Assignees: National University Corporation Tohoku University, Foundation for Advancement of International ScienceInventor: Tadahiro Ohmi
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Patent number: 7968471Abstract: The present invention provides a process of producing a porous insulating film effective as an insulating film constituting a semiconductor device and a process of producing a porous insulating film having high adhesion to a semiconductor material, which is in contact with the upper and lower interfaces of the insulating film. Gas containing molecule vapor of at least one or more organic silica compounds, which have a cyclic silica skeleton in its molecule and have at least one or more unsaturated hydrocarbon groups bound with the cyclic silica skeleton is introduced into plasma to grow a porous insulating film on a semiconductor substrate.Type: GrantFiled: November 29, 2004Date of Patent: June 28, 2011Assignee: NEC CorporationInventors: Yoshimichi Harada, Yoshihiro Hayashi, Fuminori Itoh, Kenichiro Hijioka, Tsuneo Takeuchi
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Patent number: 7968873Abstract: The present invention relates to an organic light emitting device and a manufacturing method thereof. The organic light emitting device according to an exemplary embodiment of the present invention includes a first thin film transistor disposed on a substrate, an organic layer disposed on the first thin film transistor, a pixel electrode disposed on the organic layer and connected to the first thin film transistor, a partition disposed on the pixel electrode and the organic layer, and an organic emission layer disposed on the pixel electrode and contacting the partition. The partition has an organic layer exposing hole that exposes a portion of the organic layer and an opening that exposes a portion of the pixel electrode.Type: GrantFiled: December 8, 2008Date of Patent: June 28, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Sang-Pil Lee, Chang-Woong Chu, Jin-Koo Chung, Chang-Mo Park
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Patent number: 7956466Abstract: A design structure is provided for interconnect structures containing various capping materials for electrical fuses and other related applications. The structure includes a first interconnect structure having a first interfacial structure and a second interconnect structure adjacent to the first structure. The second interconnect structure has second interfacial structure different from the first interfacial structure.Type: GrantFiled: May 9, 2008Date of Patent: June 7, 2011Assignee: International Business Machines CorporationInventors: Louis L. Hsu, William R. Tonti, Chih-Chao Yang
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Patent number: 7956472Abstract: A packaging substrate having an electrical connection structure and a method for fabricating the same are provided. The packaging substrate have a substrate body with a plurality of conductive pads on a surface thereof; a solder mask layer disposed on the substrate body with a plurality of openings corresponding to the conductive pads, the size of each of the openings being larger than each of the conductive pads; and electroplated solder bumps for covering the conductive pads to provide better bond strength and reliability.Type: GrantFiled: August 8, 2008Date of Patent: June 7, 2011Assignee: Unimicron Technology Corp.Inventor: Shih-Ping Hsu
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Patent number: 7951729Abstract: A passivating coupling material for, on the one hand, passivating a dielectric layer in a semiconductor device, and on the other hand, for permitting or at least promoting liquid phase metal deposition thereon in a subsequent process step. In a particular example, the dielectric layer may be a porous material having a desirably decreased dielectric constant k, and the passivating coupling material provides steric shielding groups that substantially block the adsorption and uptake of ambient moisture into the porous dielectric layer. The passivating coupling materials also provides metal nucleation sides for promoting the deposition of a metal thereon in liquid phase, in comparison with metal deposition without the presence of the passivating coupling material. The use of a liquid phase metal deposition process facilitates the subsequent manufacture of the semiconductor device.Type: GrantFiled: February 12, 2010Date of Patent: May 31, 2011Assignee: NXP B.V.Inventors: Janos Farkas, Srdjan Kordic, Cindy Goldberg
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Patent number: 7952188Abstract: A module is described having a semiconductor chip which has at least one contact pad. A first dielectric layer, which contains a fluorocarbon compound, as well as a first wiring layer are applied to the semiconductor chip.Type: GrantFiled: January 8, 2007Date of Patent: May 31, 2011Assignee: Infineon Technologies AGInventors: Markus Brunnbauer, Joachim Mahler, Manfred Mengel
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Patent number: 7947978Abstract: A semiconductor chip comprises a metal pad exposed by an opening in a passivation layer, wherein the metal pad has a testing area and a bond area. During a step of testing, a testing probe contacts with the testing area for electrical testing. After the step of testing, a polymer layer is formed on the testing area with a probe mark created by the testing probe. Alternatively, a semiconductor chip comprises a testing pad and a bond pad respectively exposed by two openings in a passivation layer, wherein the testing pad is connected to the bond pad. During a step of testing, a testing probe contacts with the testing pad for electrical testing. After the step of testing, a polymer layer is formed on the testing pad with a probe mark created by the testing probe.Type: GrantFiled: December 5, 2006Date of Patent: May 24, 2011Assignee: Megica CorporationInventors: Mou-Shiung Lin, Huei-Mei Yen, Chiu-Ming Chou, Hsin-Jung Lo, Ke-Hung Chen
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Patent number: 7948083Abstract: The present invention relates to methods of improving the fabrication of interconnect structures of the single or dual damascene type, in which there is no problem of hard mask retention or of conductivity between the metal lines after fabrication. The methods of the present invention include at least steps of chemical mechanical polishing and UV exposure or chemical repair treatment which steps improve the reliability of the interconnect structure formed. The present invention also relates to an interconnect structure which include a porous ultra low k dielectric of the SiCOH type in which the surface layer thereof has been modified so as to form a gradient layer that has both a density gradient and a C content gradient.Type: GrantFiled: June 14, 2007Date of Patent: May 24, 2011Assignee: International Business Machines CorporationInventors: Christos D. Dimitrakopoulos, Stephen M. Gates, Vincent J. McGahay, Sanjay C. Mehta