Epitaxial Deposition Of Group Iii-v Compound (epo) Patents (Class 257/E21.117)
  • Publication number: 20080194085
    Abstract: A synthesis route to grow textured thin film of gallium nitride on amorphous quartz substrates and on single crystalline substrates such as c-sapphire and polycrystalline substrates such as pyrolytic boron nitride (PBN), alumina and quartz using the dissolution of atomic nitrogen rather than molecular nitrogen to allow for growth at subatmospheric pressure.
    Type: Application
    Filed: July 3, 2007
    Publication date: August 14, 2008
    Inventors: Mahendra Kumar Sunkara, Hari Chandrasekaran, Hongwei Li
  • Patent number: 7407865
    Abstract: An epitaxial growth method for forming a high-quality epitaxial growth semiconductor wafer is provided. The method includes forming a single crystalline layer on a single crystalline wafer; forming a mask layer having nano-sized dots on the single crystalline layer; forming a porous buffer layer having nano-sized pores by etching the mask layer and the surface of the single crystalline layer; annealing the porous buffer layer; and forming an epitaxial material layer on the porous buffer layer using an epitaxial growth process.
    Type: Grant
    Filed: January 5, 2006
    Date of Patent: August 5, 2008
    Assignee: Samsung Corning Co., Ltd.
    Inventor: Sung-soo Park
  • Publication number: 20080169532
    Abstract: A III nitride single-crystal manufacturing method in which a liquid layer (3) of 200 ?m or less thickness is formed in between a substrate (1) and a III nitride source-material baseplate (2), and III nitride single crystal (4) is grown onto the face (1s) on the liquid-layer side of the substrate (1). Herein, the substrate (1) in at least a superficial layer (1a) on the liquid-layer side may be formed of a III nitride single crystal, while the III nitride source-material baseplate (2) can be formed of a III nitride polycrystal. Further, the substrate (1) in at least a superficial layer (1a) on the liquid-layer side, and the III nitride source-material baseplate (2) can be formed of a III nitride single crystal, while the face (1s) on the liquid-layer side of the substrate (1) can be made a III-atom surface, and the face (2s) on the liquid-layer side of the III nitride source-material baseplate (2) can be made a nitrogen-atom surface.
    Type: Application
    Filed: July 13, 2005
    Publication date: July 17, 2008
    Applicant: Sumitomo Electric Industries
    Inventor: Seiji Nakahata
  • Patent number: 7384869
    Abstract: A method for protecting exposed silicon from attack by phosphoric acid during wet etching and stripping processes is provided. According to various embodiments of the method, a thick chemical oxide layer can be formed on the exposed silicon to protect the exposed portion from etching by phosphoric acid. The method can include exposing the silicon to at least one of a hot ozonated sulfuric acid and a hot peroxide sulfuric acid to form the thick chemical oxide.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: June 10, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Deborah J. Riley, Brian M. Trentman, Brian K. Kirkpatrick
  • Patent number: 7288430
    Abstract: An efficient method of fabricating a high-quality heteroepitaxial microstructure having a smooth surface. The method includes detaching a layer from a base structure to provide a carrier substrate having a detached surface, and then forming a heteroepitaxial microstructure on the detached surface of the carrier substrate by depositing an epitaxial layer on the detached surface of a carrier substrate. Also included is a heteroepitaxial microstructure fabricated from such method.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: October 30, 2007
    Assignee: S.O.I.Tec Silicon on Insulator Technolgoies
    Inventors: Bruce Faure, Fabrice Letertre, Bruno Ghyselen
  • Publication number: 20070178620
    Abstract: The present invention relates to methods of preparing polycrystalline thin films of semiconductors for radiation detectors and solar cells and the films resulting therefrom. In one aspect, the present invention provides a first type of particles and a second type of particles, wherein the first type of particles have a Cu/(In+Ga) molar ratio of at least 1.38. In another aspect the present invention provides a first type of particles containing a Cu-Group IIIA alloy wherein a molar ratio of Cu to Group IIIA material within each of the particles is at least 1.38.
    Type: Application
    Filed: February 2, 2007
    Publication date: August 2, 2007
    Inventor: BULENT BASOL
  • Patent number: 7245017
    Abstract: The liquid discharge head has a three-dimensional structure which defines a space including a pressure chamber filled with liquid and a flow channel for supplying the liquid to the pressure chamber, the three-dimensional structure being formed by depositing a composition material on a substrate according to a deposition method, and a drive element which causes discharge of the liquid from the pressure chamber through a nozzle.
    Type: Grant
    Filed: March 3, 2005
    Date of Patent: July 17, 2007
    Assignee: Fujifilm Corporation
    Inventors: Yasukazu Nihei, Tsuyoshi Mita
  • Patent number: 7132351
    Abstract: A method of fabricating a compound semiconductor layer has steps of forming a first layer made of an oxidizable material on a substrate, forming a second layer made of a compound semiconductor on the first layer, oxidizing the first layer made of the oxidizable material to an oxide layer and forming a third layer made of compound semiconductor that constitutes a semiconductor element on the second layer.
    Type: Grant
    Filed: July 23, 2004
    Date of Patent: November 7, 2006
    Assignee: Rohm Co., Ltd.
    Inventor: Hironobu Sai