Defect And Dislocati On Suppression Due To Lattice Mismatch, E.g., Lattice Adaptation (epo) Patents (Class 257/E21.125)
  • Patent number: 8017415
    Abstract: Thin freestanding nitride films are used as a growth substrate to enhance the optical, electrical, mechanical and mobility of nitride based devices and to enable the use of thick transparent conductive oxides. Optoelectronic devices such as LEDs, laser diodes, solar cells, biomedical devices, thermoelectrics, and other optoelectronic devices may be fabricated on the freestanding nitride films. The refractive index of the freestanding nitride films can be controlled via alloy composition. Light guiding or light extraction optical elements may be formed based on freestanding nitride films with or without layers. Dual sided processing is enabled by use of these freestanding nitride films. This enables more efficient output for light emitting devices and more efficient energy conversion for solar cells.
    Type: Grant
    Filed: November 4, 2009
    Date of Patent: September 13, 2011
    Assignee: Goldeneye, Inc.
    Inventors: Scott M. Zimmerman, Karl W. Beeson, William R. Livesay
  • Patent number: 7943494
    Abstract: The present invention provides a method for blocking the dislocation propagation of a semiconductor. A semiconductor layer is formed by epitaxial process on a substrate. A plurality of recesses is formed on the semiconductor layer by etching fragile locations of the semiconductor layer where dislocation occurs. Thereafter, a blocking layer is formed on each of the plurality of recesses. The aforesaid semiconductor layer undergoes epitaxial process again on the aforesaid semiconductor layer, and laterally overgrows to redirect the dislocation defects.
    Type: Grant
    Filed: October 15, 2009
    Date of Patent: May 17, 2011
    Assignee: Advanced Optoelectronic Technology, Inc.
    Inventors: Peng Yi Wu, Shih Cheng Huang, Po Min Tu, Ying Chao Yeh, Wen Yu Lin, Shih Hsiung Chan
  • Patent number: 7923273
    Abstract: An optoelectronics chip-to-chip interconnects system is provided, including at least one packaged chip to be connected on the printed-circuit-board with at least one other packaged chip, optical-electrical (O-E) conversion mean, waveguide-board, and (PCB). Single to multiple chips interconnects can be interconnected provided using the technique disclosed in this invention. The packaged chip includes semiconductor die and its package based on the ball-grid array or chip-scale-package. The O-E board includes the optoelectronics components and multiple electrical contacts on both sides of the O-E substrate. The waveguide board includes the electrical conductor transferring the signal from O-E board to PCB and the flex optical waveguide easily stackable onto the PCB to guide optical signal from one chip-to-other chip. Alternatively, the electrode can be directly connected to the PCB instead of including in the waveguide board. The chip-to-chip interconnections system is pin-free and compatible with the PCB.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: April 12, 2011
    Assignee: Banpil Photonics, Inc.
    Inventor: Achyut Kumar Dutta
  • Patent number: 7915636
    Abstract: The present disclosure relates to a III-nitride semiconductor light emitting device which improves external quantum efficiency by using a p-type nitride semiconductor layer with a rough surface, the p-type nitride semiconductor layer including: a first nitride semiconductor layer with a first doping concentration, a second nitride semiconductor layer with a second doping concentration lower than the first doping concentration and with the rough surface, and a third nitride semiconductor layer with a higher doping concentration than a second doping concentration.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: March 29, 2011
    Assignee: Epivalley Co., Ltd.
    Inventor: Chang Myung Lee
  • Patent number: 7868335
    Abstract: A bipolar junction transistor having an emitter, a base, and a collector includes a stack of one or more layer sets adjacent the collector. Each layer set includes a first material having a first band gap, wherein the first material is highly doped, and a second material having a second band gap narrower than the first band gap, wherein the second material is at most lightly doped.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: January 11, 2011
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Marko Sokolich, Tahir Hussain, David H. Chow
  • Patent number: 7858450
    Abstract: An optic mask for crystallizing amorphous silicon comprises a first slit region including a plurality of slits regularly arranged for defining incident region of laser beam, wherein the slits of the first slit region are formed to slope by a predetermined angle to the direction of transfer of the optic mask in crystallization process, and wherein the slits of the first slit region includes a first slit having a first length and a second slit having a second length which is longer than the first length.
    Type: Grant
    Filed: January 5, 2005
    Date of Patent: December 28, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ui-Jin Chung, Myung-Koo Kang, Jae-Bok Lee
  • Patent number: 7858424
    Abstract: A method for producing a sensor array including a monolithically integrated circuit is described as well as a sensor array. This sensor array has a micromechanical sensor structure, in which a first partial structure which is associated with the sensor structure is produced at the same time as a second partial structure which is associated with the circuit, a process variation of the first partial structure being performed in order to adjust a structure property of the sensor structure while the second partial structure remains the same.
    Type: Grant
    Filed: September 25, 2006
    Date of Patent: December 28, 2010
    Assignee: Robert Bosch GmbH
    Inventors: Hubert Benzel, Simon Armbruster
  • Patent number: 7829442
    Abstract: Dislocation pile-ups in compositionally graded semiconductor layers are reduced or eliminated, thereby leading to increased semiconductor device yield and manufacturability. This is accomplished by introducing a semiconductor layer having a plurality of threading dislocations distributed substantially uniformly across its surface as a starting layer and/or at least one intermediate layer during growth and relaxation of the compositionally graded layer. The semiconductor layer may include a seed layer disposed proximal to the surface of the semiconductor layer and having the threading dislocations uniformly distributed therein.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: November 9, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Richard Westhoff, Vicky K. Yang, Matthew T. Currie, Christopher Vineis, Christopher Leitz
  • Patent number: 7812374
    Abstract: A semiconductor device includes a first MIS transistor on a first active region of a semiconductor substrate, the first MIS transistor including: a first gate insulating film provided on the first active region; a first gate electrode provided on the first gate insulating film; a first stressor insulating film provided on an upper face and side faces facing in a gate length direction of the first gate electrode such that first stress acts on a channel of the first MIS transistor in the gate length direction; and a first base insulating film provided on side faces of the first gate electrode facing in a gate width direction, wherein the side faces of the first gate electrode facing in the gate width direction are not covered with the first stressor insulating film.
    Type: Grant
    Filed: June 27, 2007
    Date of Patent: October 12, 2010
    Assignee: Panasonic Corporation
    Inventors: Nobuyuki Tamura, Ken Suzuki, Katsuhiro Ootani
  • Patent number: 7812340
    Abstract: A method of forming a semiconductor structure (and the resulting structure), includes straining a free-standing semiconductor, and fixing the strained, free-standing semiconductor to a substrate.
    Type: Grant
    Filed: June 13, 2003
    Date of Patent: October 12, 2010
    Assignee: International Business Machines Corporation
    Inventors: Guy Moshe Cohen, Patricia May Mooney
  • Patent number: 7790489
    Abstract: A III-V group nitride system semiconductor self-standing substrate has: a first III-V group nitride system semiconductor crystal layer that has a region with dislocation lines gathered densely, the dislocation lines being gathered substantially perpendicular to a surface of the substrate, and a region with dislocation lines gathered thinly; and a second III-V group nitride system semiconductor crystal layer that is formed up to 10 ?m from the surface of the substrate on the first III-V group nitride system semiconductor crystal layer and that has a dislocation density distribution that is substantially uniform.
    Type: Grant
    Filed: April 23, 2007
    Date of Patent: September 7, 2010
    Assignee: Hitachi Cable, Ltd.
    Inventor: Masatomo Shibata
  • Patent number: 7790563
    Abstract: A semiconductor device of the present invention is manufactured by the following steps: forming a single-crystal semiconductor layer over a substrate having an insulating surface; irradiating a region of the single-crystal semiconductor layer with laser light; forming a circuit of a pixel portion using a region of the single-crystal semiconductor layer which is not irradiated with the laser light; and forming a driver circuit for driving the circuit of the pixel portion using the region of the single-crystal semiconductor layer which is irradiated with the laser light. Thus, a semiconductor device using a single-crystal semiconductor layer which is suitable for a peripheral driver circuit region and a single-crystal semiconductor layer which is suitable for a pixel region can be provided.
    Type: Grant
    Filed: July 8, 2008
    Date of Patent: September 7, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Tetsuya Kakehata
  • Patent number: 7741146
    Abstract: A method of forming a multifunction solar cell including an upper subcell, a middle subcell, and a lower subcell by providing a first substrate for the epitaxial growth of semiconductor material; forming a first solar subcell on the substrate having a first band gap; forming a second solar subcell over the first solar subcell having a second band gap smaller than the first band gap; forming a graded interlayer over the second subcell, the graded interlayer having a third band gap greater than the second band gap; forming a third solar subcell over the graded interlayer having a fourth band gap smaller than the second band gap such that the third subcell is lattice mismatched with respect to the second subcell; attaching a surrogate second substrate over the third solar subcell and removing the first substrate; and etching a first trough around the periphery of the solar cell to the surrogate second substrate so as to form a mesa structure on the surrogate second substrate and facilitate the removal of said so
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: June 22, 2010
    Assignee: Emcore Solar Power, Inc.
    Inventors: Arthur Cornfeld, Tansen Varghese, Jacqueline Diaz
  • Patent number: 7696071
    Abstract: The invention provides a method for producing a group III nitride based semiconductor having a reduced number of crystal defects. A GaN layer 2 is epitaxially grown on a sapphire substrate 1 having C-plane as a main plane (FIG. 1A). Then, the layer is wet-etched by use of a 25% aqueous TMAH solution at 85° C. for one hour, to thereby form an etch pit 4 (FIG. 1B). Then, a GaN layer 5 is grown on the GaN layer 2 through the ELO method (FIG. 1C). The thus-formed GaN layer 5 has a screw dislocation density lower than that of the GaN layer 2.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: April 13, 2010
    Assignees: Kabushiki Kaisha Toyota Chuo Kenkyusho, Toyota Jidosha Kabushiki Kaisha
    Inventors: Masahito Kodama, Eiko Hayashi, Masahiro Sugimoto
  • Patent number: 7670928
    Abstract: A multi-layered substrate with bulk substrate characteristics and processes for the fabrication of such substrates are herein disclosed. The multi-layered substrate can include a first layer, a second layer and an interfacial layer therebetween. The first and second layers can be silicon, germanium, or any other suitable material of the same or different crystal orientations. The interfacial layer can be an oxide layer from about 5 Angstroms to about 50 Angstroms.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: March 2, 2010
    Assignee: Intel Corporation
    Inventors: Mohamad A. Shaheen, Willy Rachmady, Peter Tolchinsky
  • Patent number: 7615420
    Abstract: The method for manufacturing the indium gallium aluminium nitride (InGaAlN) thin film on silicon substrate, which comprises the following steps: introducing magnesium metal for processing online region mask film, that is, or forming one magnesium mask film layer or metal transition layer; then forming one metal transition layer or magnesium mask layer, finally forming one layer of indium gallium aluminium nitride semiconductor layer; or firstly forming one layer of metal transition layer on silicon substrate and then forming the first indium gallium aluminium nitride semiconductor layer, magnesium mask layer and second indium gallium aluminium nitride semiconductor layer in this order. This invention can reduce the dislocation density of indium gallium aluminium nitride materials and improve crystal quality.
    Type: Grant
    Filed: September 26, 2006
    Date of Patent: November 10, 2009
    Assignee: Lattice Power (Jiangxi) Corporation
    Inventors: Fengyi Jiang, Li Wang, Wenqing Fang
  • Patent number: 7566940
    Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.
    Type: Grant
    Filed: July 21, 2006
    Date of Patent: July 28, 2009
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Teruo Sasagawa, SuryaPrakash Ganti, Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung
  • Publication number: 20080315255
    Abstract: A method is provided for forming a matching thermal expansion interface between silicon (Si) and gallium nitride (GaN) films. The method provides a (111) Si substrate with a first thermal expansion coefficient (TEC), and forms a silicon-germanium (SiGe) film overlying the Si substrate. A buffer layer is deposited overlying the SiGe film. The buffer layer may be aluminum nitride (AlN) or aluminum-gallium nitride (AlGaN). A GaN film is deposited overlying the buffer layer having a second TEC, greater than the first TEC. The SiGe film has a third TEC, with a value in between the first and second TECs. In one aspect, a graded SiGe film may be formed having a Ge content ratio in a range of about 0% to 50%, where the Ge content increases with the graded SiGe film thickness.
    Type: Application
    Filed: August 27, 2008
    Publication date: December 25, 2008
    Inventors: Jer-Shen Maa, Tingkai Li, Douglas J. Tweet, Gregory M. Stecker, Sheng Teng Hsu
  • Patent number: 7459718
    Abstract: A FET includes a nitride semiconductor in which leak current is reduced and breakdown voltage is improved. The FET is formed from a substrate, a buffer layer made of a nitride semiconductor, a first semiconductor layer made of a nitride semiconductor, and a second semiconductor layer made of a nitride semiconductor, wherein at least the buffer layer and the first semiconductor layer include a p-type dopant. The concentration of the p-type dopant is higher in the buffer layer than that in the first semiconductor layer, and the concentration of the p-type dopant is higher in the first semiconductor layer than that in the second semiconductor layer.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: December 2, 2008
    Assignee: Nichia Corporation
    Inventors: Mitsuo Hayamura, Shiro Akamatsu
  • Patent number: 7396747
    Abstract: The present invention provides semiconductor structures and a method of fabricating such structures for application of MOSFET devices. The semiconductor structures are fabricated in such a way so that the layer structure in the regions of the wafer where n-MOSFETs are fabricated is different from the layer structure in regions of the wafers where p-MOSFETs are fabricated. The structures are fabricated by first forming a damaged region with a surface of a Si-containing substrate by ion implanting of a light atom such as He. A strained SiGe alloy is then formed on the Si-containing substrate containing the damaged region. An annealing step is then employed to cause substantial relaxation of the strained SiGe alloy via a defect initiated strain relaxation. Next, a strained semiconductor cap such as strained Si is formed on the relaxed SiGe alloy.
    Type: Grant
    Filed: August 16, 2007
    Date of Patent: July 8, 2008
    Assignee: International Business Machines Corporation
    Inventors: Diane C. Boyd, Juan Cai, Kevin K. Chan, Patricia M. Mooney, Kern Rim
  • Patent number: 7375385
    Abstract: Dislocation pile-ups in compositionally graded semiconductor layers are reduced or eliminated, thereby leading to increased semiconductor device yield and manufacturability. This is accomplished by introducing a semiconductor layer having a plurality of threading dislocations distributed substantially uniformly across its surface as a starting layer and/or at least one intermediate layer during growth and relaxation of the compositionally graded layer. The semiconductor layer may include a seed layer disposed proximal to the surface of the semiconductor layer and having the threading dislocations uniformly distributed therein.
    Type: Grant
    Filed: August 22, 2003
    Date of Patent: May 20, 2008
    Assignee: AmberWave Systems Corporation
    Inventors: Richard Westhoff, Vicky Yang, Matthew Currie, Christopher Vineis, Christopher Leitz
  • Patent number: 7368310
    Abstract: In a method of making a semiconductor light generating device, a GaN-based semiconductor portion is formed on a GaN or AlGaN substrate. The GaN-based semiconductor portion includes a light generating film. An electrode film is formed on the GaN-based semiconductor film. A conductive substrate is bonded to a surface of the electrode film using a conductive adhesive. After bonding the conductive substrate, the GaN or AlGaN substrate is separated from the GaN-based semiconductor portion to form the semiconductor light generating device.
    Type: Grant
    Filed: August 5, 2004
    Date of Patent: May 6, 2008
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventor: Katsushi Akita
  • Publication number: 20080070397
    Abstract: Misfit dislocations are selectively placed in layers formed over substrates. Thicknesses of layers may be used to define distances between misfit dislocations and surfaces of layers formed over substrates, as well as placement of misfit dislocations and dislocation arrays with respect to devices subsequently formed on the layers.
    Type: Application
    Filed: November 26, 2007
    Publication date: March 20, 2008
    Inventors: Anthony Lochtefeld, Christopher Leitz, Matthew Currie, Mayank Bulsara
  • Patent number: 7342261
    Abstract: A light emitting device includes a substrate having a patterned surface and formed with a plurality of spaced apart cavities, and an epitaxial layer formed on the patterned surface of the substrate, having a patterned surface that is in face-to-face contact with the patterned surface of the substrate, and formed with a plurality of protrusions that protrude from the patterned surface of the epitaxial layer and that are respectively received in the cavities. Each of the protrusions is polygonal in shape and defines a plurality of vertices. The vertices of each of the protrusions contact the cavity-defining wall of the respective one of the cavities so as to form a plurality of closed pores between each of the protrusions and the cavity-defining wall of the respective one of the cavities.
    Type: Grant
    Filed: May 16, 2005
    Date of Patent: March 11, 2008
    Inventors: Dong-Sing Wuu, Ray-Hua Horng, Woei-Kai Wang
  • Patent number: 7262485
    Abstract: A substrate 1 for growing an electro-optical single crystal thin film in which two or more layers of buffer layers 3, 4, and 5 for buffering lattice mismatch between Si and BTO are formed on an Si (001) substrate 2 is provided as a substrate for growing an electro-optical single crystal thin film which can obtain an electro-optical single crystal thin film of BTO single crystal thin film 6 etc. with a large size and a very high quality.
    Type: Grant
    Filed: July 6, 2005
    Date of Patent: August 28, 2007
    Assignee: Covalent Materials Corporation
    Inventors: Yoshihisa Abe, Shunichi Suzuki, Hideo Nakanishi, Jun Komiyama
  • Patent number: 7202102
    Abstract: A photodiode with a semiconductor intrinsic light absorption layer has at least one p-doped light absorption layer or an n-doped light absorption layer, and preferably both. The diode also has a cathode electrode and an anode electrode electrically coupled with the p-doped light absorption layer or the n-doped light absorption layer.
    Type: Grant
    Filed: December 16, 2003
    Date of Patent: April 10, 2007
    Assignee: JDS Uniphase Corporation
    Inventor: Jie Yao
  • Patent number: 7202512
    Abstract: A construction of thin strain-relaxed SiGe layers and method for fabricating the same is provided. The construction includes a semiconductor substrate, a SiGe buffer layer formed on the semiconductor substrate, a Si(C) layer formed on the SiGe buffer layer, and an relaxed SiGe epitaxial layer formed on the Si(C) layer. The Si(C) layer is employed to change the strain-relaxed mechanism of the relaxed SiGe epitaxial layer formed on the Si(C) layer. Therefore, a thin relaxed SiGe epitaxial layer with low threading dislocation density, smooth surface is available. The fabricating time for fabricating the strain-relaxed SiGe layers is greatly reduced and the surface roughness is also improved.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: April 10, 2007
    Assignee: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Sheng-Wei Lee, Kao-Feng Liao, Lih-Juann Chen, Chee-Wee Liu
  • Patent number: 7186580
    Abstract: Systems and methods are disclosed for fabricating a semiconductor light emitting diode (LED) device by forming an n-gallium nitride (n-GaN) layer on the LED device; and roughening the surface of the n-GaN layer to extract light from an interior of the LED device.
    Type: Grant
    Filed: January 11, 2005
    Date of Patent: March 6, 2007
    Assignee: Semileds Corporation
    Inventors: Chuong Anh Tran, Trung Tri Doan
  • Patent number: 7081410
    Abstract: A semiconductor structure including a semiconductor substrate, at least one first crystalline epitaxial layer on the substrate, the first layer having a surface which is planarized, and at least one second crystalline epitaxial layer on the at least one first layer. In another embodiment of the invention there is provided a semiconductor structure including a silicon substrate, and a GeSi graded region grown on the silicon substrate, compressive strain being incorporated in the graded region to offset the tensile strain that is incorporated during thermal processing. In yet another embodiment of the invention there is provided a semiconductor structure including a semiconductor substrate, a first layer having a graded region grown on the substrate, compressive strain being incorporated in the graded region to offset the tensile strain that is incorporated during thermal processing, the first layer having a surface which is planarized, and a second layer provided on the first layer.
    Type: Grant
    Filed: April 16, 2004
    Date of Patent: July 25, 2006
    Assignee: Massachusetts Institute of Technology
    Inventor: Eugene A. Fitzgerald