Forming Solder Bumps (epo) Patents (Class 257/E21.508)
  • Patent number: 9824991
    Abstract: Electronic assemblies and their manufacture are described. One embodiment relates to a method including depositing an organic thin film layer on metal bumps on a semiconductor wafer, the organic thin film layer also being formed on a surface adjacent to the metal bumps on the wafer. The wafer is diced into a plurality of semiconductor die structures, the die structures including the organic thin film layer. The semiconductor die structures are attached to substrates, wherein the attaching includes forming a solder bond between the metal bumps on a die structure and bonding pads on a substrate, and wherein the solder bond extends through the organic thin film layer. The organic thin film layer is then exposed to a plasma. Other embodiments are described and claimed.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: November 21, 2017
    Assignee: INTEL CORPORATION
    Inventors: Aleksandar Aleksov, Tony Dambrauskas, Danish Faruqui, Mark S. Hlad, Edward R. Prack
  • Patent number: 9812415
    Abstract: Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices are disclosed. In one embodiment, a method for forming a microelectronic device includes attaching a microelectronic die to a support member by forming an attachment feature on at least one of a back side of the microelectronic die and the support member. The attachment feature includes a volume of solder material. The method also includes contacting the attachment feature with the other of the microelectronic die and the support member, and reflowing the solder material to join the back side of the die and the support member via the attachment feature. In several embodiments, the attachment feature is not electrically connected to internal active structures of the die.
    Type: Grant
    Filed: October 3, 2014
    Date of Patent: November 7, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Matt E. Schwab, David J. Corisis, J. Michael Brooks
  • Patent number: 9806012
    Abstract: The present invention discloses an IC Carrier of a semiconductor package and its manufacturing method. The IC Carrier of the semiconductor package includes a dielectric layer and a patterned conductor layer. The dielectric layer has at least one opening groove. The patterned conductor layer is embedded in the dielectric layer, wherein a part of the patterned conductor layer is as a conductive pillar, which has two exposed ends, and a part of the patterned conductor layer is as a conductive wire, which only has one exposed end.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: October 31, 2017
    Assignee: PHOENIX PIONEER TECHNOLOGY CO., LTD.
    Inventors: Shih-Ping Hsu, Chao-Tsung Tseng
  • Patent number: 9786631
    Abstract: A device package includes a die and a molding compound around the die. The molding compound has a non-planar surface recessed from a top surface of the die. The device package also includes an interconnect structure over the die. The interconnect structure includes a redistribution layer extending onto the molding compound and conformal to the non-planar surface of the molding compound. The device package further includes a first connector disposed over the die and bonded to the interconnect structure.
    Type: Grant
    Filed: November 26, 2014
    Date of Patent: October 10, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Meng-Tse Chen, Ming-Da Cheng, Chung-Shi Liu
  • Patent number: 9779969
    Abstract: A package structure and a manufacturing method are provided. The package structure includes a semiconductor substrate and a first conductive feature over the semiconductor substrate. The package structure also includes a substrate and a second conductive feature over the substrate. The second conductive feature is bonded with the first conductive feature through a bonding structure. The package structure further includes a protection material surrounding the bonding structure, and the protection material is in direct contact with a side surface of the first conductive feature.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: October 3, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Patent number: 9780056
    Abstract: A solder ball includes a silver ball structure and a shell structure. The shell structure wraps a surface of the silver ball structure, and a material of the shell structure at least includes tin. When the solder ball is bonded to other devices, the ball height of the solder ball remains constant to avoid collapse.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: October 3, 2017
    Assignee: ChipMOS Technologies Inc.
    Inventors: Tung-Bao Lu, Tzu-Han Hsu
  • Patent number: 9780052
    Abstract: The present technology is directed to manufacturing collars for under-bump metal (UBM) structures for die-to-die and/or package-to-package interconnects and associated systems. A semiconductor die includes a semiconductor material having solid-state components and an interconnect extending at least partially through the semiconductor material. An under-bump metal (UBM) structure is formed over the semiconductor material and is electrically coupled to corresponding interconnects. A collar surrounds at least a portion of the side surface of the UBM structure, and a solder material is disposed over the top surface of the UBM structure.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: October 3, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Giorgio Mariottini, Sameer Vadhavkar, Wayne Huang, Anilkumar Chandolu, Mark Bossler
  • Patent number: 9772410
    Abstract: A high pixel density intraoral x-ray imaging sensor includes a direct conversion, fully depleted silicon detector bump bonded to a readout CMOS substrate by cu-pillar bump bonds.
    Type: Grant
    Filed: February 26, 2016
    Date of Patent: September 26, 2017
    Assignee: OY AJAT LTD.
    Inventors: Konstantinos Spartiotis, Henri Tapio Nykanen, Limin Lin, Tuomas Heikki Elmeri Lahtinen, Pasi Juhani Laukka
  • Patent number: 9735124
    Abstract: The present invention provides a semiconductor structure and a method of fabricating the same. The method includes: providing a chip having conductive pads, forming a metal layer on the conductive pads, forming a passivation layer on a portion of the metal layer, and forming conductive pillars on the metal layer. Since the metal layer is protected by the passivation layer, the undercut problem is solved, the supporting strength of the conductive pillars is increased, and the product reliability is improved.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: August 15, 2017
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Yi-Cheih Chen, Sung-Huan Sun, Cheng-An Chang, Chien-Hung Wu, Fu-Tang Huang
  • Patent number: 9721879
    Abstract: A device with pillar-shaped components, includes a substrate; a wiring layer disposed on the substrate; and pillar-shaped components disposed on any of the substrate and the wiring layer, each of the pillar-shaped components having a bottom part connected to the substrate and/or the wiring layer, a top part opposed to the bottom part, and a lateral face part extending from the bottom part and connected to the top part; wherein each of the pillar-shaped components includes a first pillar-shaped part formed by plating, a second pillar-shaped part formed on the first pillar-shaped part by plating, and a ring-like projection part formed on the lateral face part to project outward and extend in a circumferential direction, and to be in a position higher than a joint position between the first pillar-shaped part and the second pillar-shaped part.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: August 1, 2017
    Assignee: LAPIS SEMICONDUCTOR CO., LTD.
    Inventor: Osamu Koike
  • Patent number: 9721855
    Abstract: A method for aligning a chip onto a substrate is disclosed. The method includes, depositing a ferrofluid, onto a substrate that has one or more pads that electrically couple to a semiconductor layer. The method can include a chip with solder balls electrically coupled to the logic elements of the chip, which can be placed onto the deposited ferrofluid, where the chip is supported on the ferrofluid, in a substantially coplanar orientation to the substrate. The method can include determining if the chip is misaligned from a desired location on the substrate. The method can include adjusting the current location of the chip in response to determining that the solder balls of the chip are misaligned from the desired location on the pads of the substrate, until the chip is aligned in the desired location.
    Type: Grant
    Filed: December 12, 2014
    Date of Patent: August 1, 2017
    Assignee: International Business Machines Corporation
    Inventors: Joseph Kuczynski, Phillip V. Mann, Kevin M. O'Connell, Arvind K. Sinha, Karl Stathakis
  • Patent number: 9685350
    Abstract: A semiconductor device has a first conductive layer and a semiconductor die disposed adjacent to the first conductive layer. An encapsulant is deposited over the first conductive layer and semiconductor die. An insulating layer is formed over the encapsulant, semiconductor die, and first conductive layer. A second conductive layer is formed over the insulating layer. A first portion of the first conductive layer is electrically connected to VSS and forms a ground plane. A second portion of the first conductive layer is electrically connected to VDD and forms a power plane. The first conductive layer, insulating layer, and second conductive layer constitute a decoupling capacitor. A microstrip line including a trace of the second conductive layer is formed over the insulating layer and first conductive layer. The first conductive layer is provided on an embedded dummy die, interconnect unit, or modular PCB unit.
    Type: Grant
    Filed: February 28, 2014
    Date of Patent: June 20, 2017
    Assignee: STATS ChipPAC, Pte. Ltd.
    Inventors: Yaojian Lin, Xu Sheng Bao, Kang Chen
  • Patent number: 9685478
    Abstract: An electrode of an electronic component element (1) is bonded to an electrode (5) of a substrate (4) via a bump (2) by: after applying, to the bump (2), only a first pressure which is not less than a yield stress of a bulk material of which the bump (2) is made, reducing or stopping the application of the first pressure; and while applying a given ultrasonic vibration to the bump (2), gradually applying a pressure to the bump (2) until the pressure reaches a second pressure which is not less than the yield stress of the bulk material of which the bump (2) is made.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: June 20, 2017
    Assignee: SHARP KABUSHIKI KAISHA
    Inventor: Naoki Sakota
  • Patent number: 9666530
    Abstract: A semiconductor device includes a semiconductor substrate, a conductive pad on the semiconductor substrate, and a first dielectric over the semiconductor substrate. The semiconductor device also includes a conductive layer disposed in the first dielectric and a second dielectric disposed on the conductive layer. In the semiconductor device, at least a portion of the conductive layer is exposed from the first dielectric and second dielectric. The semiconductor device further includes a conductive trace partially over the second dielectric and in contact with the exposed portion of the conductive layer. In the semiconductor device, the conductive trace is connected to the conductive pad at one end.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: May 30, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chen-Shien Chen, Yu-Chih Huang, Yu-Feng Chen, Kuo-Lung Pan, Yu-Jen Cheng, Mirng-Ji Lii, Han-Ping Pu, Wei-Sen Chang
  • Patent number: 9666550
    Abstract: A method for wafer-level packaging includes providing a substrate having a conductive metal pad formed on the surface of the substrate; forming a metal core on the top of the conductive metal pad with the metal core protruding from the surface of the substrate; then, forming an under bump metal layer on the top surface and the side surface of the metal core; and finally, forming a bump structure on the top of the under bump metal layer.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: May 30, 2017
    Assignee: TONGFU MICROELECTRONICS CO., LTD.
    Inventor: Guohua Gao
  • Patent number: 9659891
    Abstract: A semiconductor device includes a substrate and a first conductive pad on a top surface of the substrate. The semiconductor device further includes a boundary structure on the top surface of the substrate around the conductive pad.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: May 23, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien Ling Hwang, Yeong-Jyh Lin, Bor-Ping Jang, Hsiao-Chung Liang
  • Patent number: 9653390
    Abstract: A semiconductor device of the present invention includes a semiconductor element, a surface electrode formed on a surface of the semiconductor element, a metal film formed on the surface electrode so as to have a joining portion and a stress relieving portion formed so as to border on and surround the joining portion, solder joined to the joining portion while avoiding the stress relieving portion, and an external electrode joined to the joining portion through the solder.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: May 16, 2017
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yosuke Nakata, Masayoshi Tarutani
  • Patent number: 9646918
    Abstract: A semiconductor device and method utilizing a dummy structure in association with a redistribution layer is provided. By providing the dummy structure adjacent to the redistribution layer, damage to the redistribution layer may be reduced from a patterning of an overlying passivation layer, such as by laser drilling. By reducing or eliminating the damage caused by the patterning, a more effective bond to an overlying structure, such as a package, may be achieved.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: May 9, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Hui Cheng, Po-Hao Tsai, Jing-Cheng Lin
  • Patent number: 9640413
    Abstract: Provided is an etching-before-packaging horizontal chip three-dimensional system level metal circuit board structure comprising a metal substrate frame; the metal substrate frame is provided with base islands and pins therein; the front faces of the base islands are provided with chips; the front faces of the chips are connected to the front faces of the pins via metal wires; conductive posts are disposed on the front faces or back faces of the pins; the peripheral areas of the base islands, the areas between the base islands and the pins, the areas between the pins, the areas above the base islands and the pins, the areas below the base islands and the pins, and the exteriors of the chips, the metal wires and the conductive posts are all encapsulated with molding compound.
    Type: Grant
    Filed: December 2, 2013
    Date of Patent: May 2, 2017
    Assignee: Jiangsu Changjiang Electronics Technology Co., Ltd
    Inventors: Steve Xin Liang, Chih-Chung Liang, Yu-Bin Lin, Yaqin Wang, Youhai Zhang
  • Patent number: 9633958
    Abstract: A method of fabricating a Digital pattern generator (DPG) device is disclosed. The method includes forming an etch-stop-layer (ESL) over a bonding pad in a first region over a substrate, forming a pixel well in the second region over the substrate, forming an anti-charging layer over the bonding pad and along sidewalls of the pixel well. The bonding pad is covered by the ESL during the forming of the anti-charging layer over the bonding pad. The method also includes removing the anti-charging layer over the bonding pad. Therefore, after removing the anti-charging layer over the bonding pad, the bonding pad remains covered by the ESL.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: April 25, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih Wei Lu, Tsung-Chih Chien, Hui-Min Huang, Tien-I Bao
  • Patent number: 9633985
    Abstract: A first-etched and later-packaged three-dimensional system-in-package normal chip stack package structure and a processing method for manufacturing the same are provided. The structure includes: a die pad (1); a lead (2); a chip (4) provided on a top surface of the die pad (1) by a conductive or non-conductive adhesive material (3); a metal wire (5) via which a top surface of the chip (4) is connected to a top surface of the lead (2); a conductive pillar (6) provided on the surface of the lead (2); and a molding material (7).
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: April 25, 2017
    Assignee: Jiangsu Changjiang Electronics Technology Co., Ltd
    Inventors: Chih-Chung Liang, Yaqin Wang, Chunyan Zhang, Yu-Bin Lin, Youhai Zhang
  • Patent number: 9633962
    Abstract: Solder bump connections and methods for fabricating solder bump connections. A passivation layer is formed on a dielectric layer. Via openings extend through the passivation layer from a top surface of the passivation layer to a metal line in the passivation layer. A conductive layer is formed on the top surface of the passivation layer and within each via opening. When the passivation layer and the conductive layer are planarized, a plug is formed that includes sections in the via openings. Each section is coupled with the metal line.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: April 25, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Ekta Misra, Christopher D. Muzzy, Wolfgang Sauter
  • Patent number: 9627228
    Abstract: A method for manufacturing a chip package structure having a coating layer is provided. At least one chip package structure is mounted onto a terminal-protection film. The chip package structure has a top side, a back side opposite to the top side and a plurality of lateral sides. A plurality of terminals is disposed on the back side. The terminal-protection film at least partially seals the back side. A coating layer is formed over the top side, the lateral sides and a periphery region of the chip package structure, wherein the coating layer is not formed on the back side and the terminals. The terminal-protection film is debonded from the chip package structure.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: April 18, 2017
    Assignee: Powertech Technology Inc.
    Inventors: Shih-Chun Chen, Sheng-I Huang, Ying-Lin Chen, Ta-Hao Chang, I-Fong Wu, Chi-Chung Yu
  • Patent number: 9627290
    Abstract: Low stress bumps can be used to reduce stress and strain on bumps bonded to a substrate with different coefficients of thermal expansion (CTEs) from the die. The low stress bumps include multiple polymer layers. More than one type of bump is coupled to a die, with low stress bumps placed on areas subjected to high stress.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: April 18, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Hsien-Wei Chen
  • Patent number: 9627254
    Abstract: An exemplary method includes forming a vertical pillar overlying or laterally displaced from a bond pad overlying a semiconductor substrate, and applying a discrete solder sphere in combination with one of a solder paste or flux on a top surface of the pillar, wherein the one of the solder paste or flux is defined by at least one photoresist layer. The method may include applying a solder sphere and/or solder flux in different combinations on top surfaces of different first and second pillars.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: April 18, 2017
    Inventors: Guy F. Burgess, Anthony P. Curtis, Eugene A. Stout, Theodore G. Tessier, Lillian C. Thompson
  • Patent number: 9627303
    Abstract: Provided is an etching-before-packaging three-dimensional system-level metal circuit board structure inversely provided with a chip. The structure comprises a metal substrate frame, wherein a base island and pins are arranged in the metal substrate frame; a chip is inversely arranged on a front face of the base island and the pins; a conductive pillar is arranged on a front face of the pins; the region on the periphery of the base island, the region between the base island and the pins, the region between one pin and another, the region above the base island and the pins, the region below the base island and the pins, and the outside of the chip and the conductive pillar are all enveloped with a plastic packaging material.
    Type: Grant
    Filed: December 2, 2013
    Date of Patent: April 18, 2017
    Assignee: Jiangsu Changjiang Electronics Technology Co., Ltd
    Inventors: Youhai Zhang, Kai Zhang, Xiaojing Liao, Yaqin Wang, Sunyan Wang
  • Patent number: 9620460
    Abstract: Provided are a semiconductor chip, a semiconductor package and a fabricating method thereof, which can reduce or prevent cracks from being generated or propagated due to an external pressure. The semiconductor chip includes a semiconductor substrate including a first region and a second region, a plurality of interlayer insulation layers formed on the semiconductor substrate, a first crack stopper formed in the plurality of interlayer insulation layers of the first region, an interconnector formed in the plurality of interlayer insulation layers of the second region, a pad wire formed on the plurality of interlayer insulation layers, electrically connected to the interconnector in the second region and extending to the first region, a bonding pad on the plurality of interlayer insulation layers of the first region, electrically connected to the pad wire, and a protection layer covering the pad wire and exposing the bonding pad.
    Type: Grant
    Filed: February 13, 2015
    Date of Patent: April 11, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyun-Pil Noh, Jeong-Woon Kim, Seok-Ha Lee
  • Patent number: 9620468
    Abstract: Various embodiments provide semiconductor packaging structures and methods for forming the same. In an exemplary method, a chip having a metal interconnect structure thereon can be provided. An insulating layer can be formed on the chip to expose the metal interconnect structure. A columnar electrode can be formed on the metal interconnect structure. A portion of the metal interconnect structure surrounding a bottom of the columnar electrode can be exposed. A diffusion barrier layer can be formed on sidewalls and a top surface of the columnar electrode, and on the exposed portion of the metal interconnect structure surrounding the bottom of the columnar electrode. A solder ball can then be formed on the diffusion barrier layer. The solder ball can wrap at least the sidewalls and the top surface of the columnar electrode.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: April 11, 2017
    Assignee: TONGFU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Yu-Juan Tao
  • Patent number: 9601398
    Abstract: A method of attaching a microelectronic element to a substrate can include aligning the substrate with a microelectronic element, the microelectronic element having a plurality of spaced-apart electrically conductive bumps each including a bond metal, and reflowing the bumps. The bumps can be exposed at a front surface of the microelectronic element. The substrate can have a plurality of spaced-apart recesses extending from a first surface thereof. The recesses can each have at least a portion of one or more inner surfaces that are non-wettable by the bond metal of which the bumps are formed. The reflowing of the bumps can be performed so that at least some of the bond metal of each bump liquefies and flows at least partially into one of the recesses and solidifies therein such that the reflowed bond material in at least some of the recesses mechanically engages the substrate.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: March 21, 2017
    Assignee: Invensas Corporation
    Inventors: Charles G. Woychik, Se Young Yang, Pezhman Monadgemi, Terrence Caskey, Cyprian Emeka Uzoh
  • Patent number: 9589841
    Abstract: A method for fabricating an electronic package is provided, including the steps of: providing at least a packaging structure, wherein the packaging structure has a packaging substrate having opposite first and second sides, an electronic element disposed on the first side of the packaging substrate and a plurality of conductors formed on the first side of the packaging substrate; encapsulating the packaging structure with an insulating layer, wherein the insulating layer covers the packaging substrate; and forming an RDL (Redistribution Layer) structure on the insulating layer, wherein the RDL structure is electrically connected to the conductors. Therefore, the area of the insulating layer is not required to correspond to the area of the packaging substrate, thus allowing the area of the packaging substrate to be reduced according to the practical need so as to reduce the width of the electronic package.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: March 7, 2017
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Yan-Heng Chen, Yi-Feng Chang
  • Patent number: 9589946
    Abstract: According to one embodiment, a semiconductor device includes a first semiconductor chip; a first wiring and a second wiring which are provided above a first surface of the first semiconductor chip; a first terminal connected to one end of the first wiring and one end of the second wiring, and connected to an outside; a second terminal connected to the other end of the first wiring; and a third terminal connected to the other end of the second wiring, and connected to the second terminal.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: March 7, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Maya Inagaki, Masaru Koyanagi, Mikihiko Ito
  • Patent number: 9583470
    Abstract: An electronic device including a solder pad structure and methods of forming an electrical interconnection are shown. Solder pads including one or more projections extending from the pads are shown where the projections occupy only a fraction of a surface area of the pads. Processes such as thermal compression bonding using solder pads as described are also shown.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: February 28, 2017
    Assignee: Intel Corporation
    Inventors: Omkar Karhade, Nitin Deshpande
  • Patent number: 9559278
    Abstract: Embodiments provide light emitting device package including a package body, a first lead frame and a second lead frame disposed on the package body, and a light emitting device electrically connected to the first lead frame and the second lead frame via respective conductive adhesives. At least one of the conductive adhesives has the smallest width at a central region thereof.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: January 31, 2017
    Assignee: LG INNOTEK CO., LTD.
    Inventors: Sung Joo Oh, Keal Doo Moon, Dong Yong Lee
  • Patent number: 9559005
    Abstract: Methods of packaging and dicing semiconductor devices, and packaged semiconductor devices are disclosed. In some embodiments, a method of packaging and dicing semiconductor devices includes a first cutting process performed on a wafer to form a groove passing through a passivation layer and an interconnect structure on a scribe line region and a portion of a semiconductor substrate on the scribe line region. Next, a molding compound layer is formed on a frontside of the wafer to fill the groove. After performing a grinding process on a backside of the wafer to thin down the semiconductor substrate, a second cutting process is performed on the wafer to separate the individual dies. The second cutting process cuts through the molding compound layer in the groove and the semiconductor substrate underlying the groove.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: January 31, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Peng Tsai, Wen-Hsiung Lu, Hui-Min Huang, Wei-Hung Lin, Ming-Da Cheng, Chung-Shi Liu
  • Patent number: 9545016
    Abstract: A wiring substrate includes an insulating layer, and a connection terminal formed on the insulating layer. The connection terminal includes a metal layer formed on the insulating layer and including an upper surface, a metal post formed on the upper surface of the metal layer and including upper and side surfaces, and a surface plating layer that covers the upper and side surfaces of the metal post. The metal layer includes a material that is inactive with respect to a material included in the surface plating layer. The metal layer has an upper surface edge part that is exposed at an outside from the side surface of the metal post in a plan view. The surface plating layer is formed to expose the upper surface edge part of the metal layer.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: January 10, 2017
    Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Kei Imafuji, Noriyoshi Shimizu, Kiyoshi Ol, Hiromu Arisaka
  • Patent number: 9544998
    Abstract: A method and structure for an electrical device and a plurality of electrical circuits including a plurality of carbon nanotubes (CNTs). The method can include forming a first CNT catalyst layer including a plurality of first CNT catalyst plugs, a plurality of electrical circuits electrically coupled to the first CNT catalyst layer, and a second CNT catalyst layer including a plurality of second CNT catalyst plugs electrically coupled to the second CNT catalyst layer. CNTs may be simultaneously formed on the plurality of first and second CNT catalyst plugs within a chemical vapor deposition (CVD) furnace.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: January 10, 2017
    Assignee: THE BOEING COMPANY
    Inventor: Keith Daniel Humfeld
  • Patent number: 9515007
    Abstract: A substrate structure includes: a substrate body defined with a layout area, a sealing member and a cutting area, the sealing member being adjacent to the layout area, and the cutting area being adjacent to the sealing member; a wiring layer formed on the layout area; an insulating layer formed on the layout area and the wiring layer; and a metal layer formed on the insulating layer and the layout area. The insulating layer is prevented from being delaminated due to the formation of the metal layer.
    Type: Grant
    Filed: October 9, 2015
    Date of Patent: December 6, 2016
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Cheng-An Chang, Sung-Huan Sun, Chien-Hung Wu, Yi-Cheih Chen, Wen-Kai Liao
  • Patent number: 9484276
    Abstract: A semiconductor mounting device including a first substrate having insulation layers, conductor layers formed on the insulation layers, and via conductors connecting the conductor layers, a second substrate having insulation layers and conductor layers formed on the insulation layers of the second substrate, first bumps connecting the first substrate and the second substrate and formed on an outermost conductor layer of the first substrate formed on an outermost insulation layer of the first substrate, and second bumps positioned to mount a semiconductor element to the second substrate and formed on an outermost conductor layer of the second substrate formed on an outermost insulation layer of the second substrate. The second substrate has a thickness which is greater than a thickness of the first substrate.
    Type: Grant
    Filed: February 12, 2015
    Date of Patent: November 1, 2016
    Assignee: IBIDEN CO., LTD.
    Inventors: Hiroyuki Watanabe, Masahiro Kaneko
  • Patent number: 9455220
    Abstract: A method for selecting locations within an integrated circuit device for placing stressors to manage electromigration failures includes calculating an electric current for an interconnect within the integrated circuit device and determining an electromigration stress profile for the interconnect based on the electric current. The method further includes determining an area on the interconnect for placing a stressor to alter the electromigration stress profile for the interconnect.
    Type: Grant
    Filed: May 31, 2014
    Date of Patent: September 27, 2016
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Mehul D. Shroff, Douglas M Reber, Edward O. Travis
  • Patent number: 9449949
    Abstract: A first semiconductor chip has a first electrode pad, and a second semiconductor chip has a first through via and a second electrode pad joined to the via and aligned with the first electrode pad. A third semiconductor chip has a second through via, a third electrode pad joined to the via, wiring joined to the via, and a fourth electrode pad joined to the wiring and aligned with the second and third electrode pads. The semiconductor chips are stacked and electrically connected by joining the first to third electrode pads to one another, and gaps of the stacked body are filled with resin. The stacked body is secured to an adhesive material formed on a substrate and a solder bump formed on the substrate is joined to the fourth electrode. A molding resin encapsulates the stacked body and an adjacent surface of the substrate.
    Type: Grant
    Filed: September 2, 2014
    Date of Patent: September 20, 2016
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Naoyuki Komuta
  • Patent number: 9443797
    Abstract: A semiconductor device has a substrate and semiconductor die disposed over a first surface of the substrate. A wire stud is attached to the first surface of the substrate. The wire stud includes a base portion and stem portion. A bonding pad is formed over a second surface of the substrate. An encapsulant is deposited over the substrate, semiconductor die, and wire stud. A portion of the encapsulant is removed by LDA to expose the wire stud. A portion of the encapsulant is removed by LDA to expose the substrate. An interconnect structure is formed over the encapsulant and electrically connected to the wire stud and semiconductor die. A bump is formed over the interconnect structure. A semiconductor package is disposed over the encapsulant and electrically connected to the substrate. A discrete semiconductor device is disposed over the encapsulant and electrically connected to the substrate.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: September 13, 2016
    Assignee: STATS ChipPAC Pte. Ltd.
    Inventors: Pandi C. Marimuthu, Sheila Marie L. Alvarez, Yaojian Lin, Jose A. Caparas, Yang Kern Jonathan Tan
  • Patent number: 9443782
    Abstract: A method for protecting terminal elements on a wafer during wafer level fabrication processes entails applying a protective coating to the terminal elements prior to further processing operations. These processing operations may include back side grinding of the wafer and/or saw-to-reveal operations to expose the terminal elements from a cap wafer of a wafer structure. The protective coating can protect the terminal elements from potentially damaging contaminants, such as debris from the grinding or saw-to-reveal operations. Furthermore, the protective coating can protect the bond pads from coming into contact with a rapidly oxidizing environment when exposed to water. The protective coating may be a hot-water soluble thermoplastic material the melts from a solid form to a liquid form at a relatively low temperature to enable application of the protective coating in liquid form onto the terminal elements and clean removal of the protective coating from the terminal elements.
    Type: Grant
    Filed: August 11, 2015
    Date of Patent: September 13, 2016
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Robert F. Steimle, Dwight L. Daniels, Veera M. Gunturu
  • Patent number: 9431215
    Abstract: A method for treating a chip packaging structure includes providing a chip packaging structure having at least a first electrical connect structure and a second electrical connect structure, and an insulation layer exposing portions of the first electrical connect structure and the second electrical connect structure; selecting a plasma gas based on materials of the first electrical connect structure and the second electrical connect structure and a type of process forming the first electrical connect structure and the second electrical connect structure, wherein metal cations are left on the insulation layer; performing a plasma treatment process using the selected plasma gas on the first electrical connect structure, the second electrical connect structure and the insulation layer, causing reaction of the metal cations to substantially convert the metal cations into electrically neutral materials; and removing the reacted metal cations from the insulation layer.
    Type: Grant
    Filed: April 8, 2015
    Date of Patent: August 30, 2016
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventor: Qifeng Wang
  • Patent number: 9406598
    Abstract: An embodiment is a device comprising a semiconductor die, an adhesive layer on a first side of the semiconductor die, and a molding compound surrounding the semiconductor die and the adhesive layer, wherein the molding compound is at a same level as the adhesive layer. The device further comprises a first post-passivation interconnect (PPI) electrically coupled to a second side of the semiconductor die, and a first connector electrically coupled to the first PPI, wherein the first connector is over and aligned to the molding compound.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: August 2, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chao Mao, Chin-Chuan Chang, Jui-Pin Hung, Jing-Cheng Lin
  • Patent number: 9329284
    Abstract: A high pixel density intraoral x-ray imaging sensor includes a direct conversion, fully depleted silicon detector bump bonded to a readout CMOS substrate by cu-pillar bump bonds.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: May 3, 2016
    Assignee: OY AJAT LTD.
    Inventors: Konstantinos Spartiotis, Henri Tapio Nykanen, Limin Lin, Tuomas Heikki Elmeri Lahtinen, Pasi Juhani Laukka
  • Patent number: 9245862
    Abstract: An electronic component structure includes a primary redistribution structure having a primary redistribution structure terminal. A secondary redistribution structure is formed on the primary redistribution structure terminal. A buildup dielectric layer encloses the primary redistribution structure, where a cushion pad of the secondary redistribution structure is supported by the buildup dielectric layer. An interconnection ball is mounted to the secondary redistribution structure. Stress imparted upon the interconnection ball is transferred through the secondary redistribution structure and dissipated to the buildup dielectric layer through the cushion pad. The buildup dielectric layer is readily able to absorb this stress thus minimizing the probability of failure of the secondary redistribution structure including the interconnection ball formed thereon.
    Type: Grant
    Filed: February 12, 2013
    Date of Patent: January 26, 2016
    Inventors: Sundeep Nand Nangalia, Richard Raymond Green, Robert Lanzone, Dean Alan Zehnder, Riki Whiting
  • Patent number: 9214579
    Abstract: A manufacturing method of a semiconductor structure includes the following steps. A wafer structure having a silicon substrate and a protection layer is provided. An electrical pad on the protection layer is exposed through the concave region of the silicon substrate. An isolation layer is formed on the sidewall of the silicon substrate surrounding the concave region and a surface of the silicon substrate facing away from the protection layer. A redistribution layer is formed on the isolation layer and the electrical pad. A passivation layer is formed on the redistribution layer. The passivation layer is patterned to form a first opening therein. A first conductive layer is formed on the redistribution layer exposed through the first opening. A conductive structure is arranged in the first opening, such that the conductive structure is in electrical contact with the first conductive layer.
    Type: Grant
    Filed: November 6, 2014
    Date of Patent: December 15, 2015
    Assignee: XINTEC INC.
    Inventors: Wei-Ming Chien, Po-Han Lee, Tsang-Yu Liu, Yen-Shih Ho
  • Patent number: 9006097
    Abstract: A method of forming a bump structure includes providing a semiconductor substrate and forming an under-bump-metallurgy (UBM) layer on the semiconductor substrate. The method further includes forming a mask layer on the UBM layer, wherein the mask layer has an opening exposing a portion of the UBM layer. The method further includes forming a copper layer in the opening of the mask layer and removing a portion of the mask layer to form a space between the copper layer and the mask layer. The method further includes performing an electrolytic process to fill the space with a metal layer and removing the mask layer.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: April 14, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Hsiung Lu, Ming-Da Cheng, Chih-Wei Lin, Jacky Chang, Chung-Shi Liu, Chen-Hua Yu
  • Patent number: 8994173
    Abstract: A layer of material can protect a surface of a passivation layer against damage during a final via plug process. The protective layer can be a conductive bump limiting metallurgy (BLM) base layer and can include titanium tungsten (TiW), though other materials can be employed. Examples include applying the protective layer after formation of a via opening and prior to formation of a via opening, and can include applying more protective material after conductor plug formation to enhance protection. Photosensitive and non-photosensitive passivation layers can be so protected.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: March 31, 2015
    Assignee: International Business Machines Corporation
    Inventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter
  • Patent number: 8987922
    Abstract: A semiconductor device includes a substrate, a bond pad above the substrate, a guard ring above the substrate, and an alignment mark above the substrate, between the bond pad and the guard ring. The device may include a passivation layer on the substrate, a polymer layer, a post-passivation interconnect (PPI) layer in contact with the bond pad, and a connector on the PPI layer, wherein the connector is between the bond pad and the guard ring, and the alignment mark is between the connector and the guard ring. The alignment mark may be at the PPI layer. There may be multiple alignment marks at different layers. There may be multiple alignment marks for the device around the corners or at the edges of an area surrounded by the guard ring.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: March 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Yuan Yu, Hsien-Wei Chen, Wen-Hsiung Lu, Hung-Jen Lin