Forming Solder Bumps (epo) Patents (Class 257/E21.508)
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Patent number: 8987898Abstract: According to one embodiment, a semiconductor wafer comprises a plurality of solder bumps for providing device contacts formed over a functional region of the semiconductor wafer, and one or more support rings surrounding the functional region. The one or more support rings and the plurality of solder bumps are formed so as to have substantially matching heights. The presence of the one or more support rings causes the semiconductor wafer to have a substantially uniform thickness in the functional region after a thinning process is performed on the semiconductor wafer. A method for fabricating the semiconductor wafer comprises forming the plurality of solder bumps over the functional region, and forming the one or more support rings surrounding the functional region before performing the thinning process on the semiconductor wafer.Type: GrantFiled: June 6, 2011Date of Patent: March 24, 2015Assignee: International Rectifier CorporationInventors: Rupert Burbidge, David Paul Jones, Amarjit Dhadda, Robert Montgomery
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Patent number: 8975177Abstract: Embodiments of the present disclosure are directed to laser removal of resist material from integrated circuit (IC) packaging components, as well as package assemblies and systems incorporating such material and removal methods. A resist layer may be applied to one or more components of a package assembly. The resist layer may be subsequently removed by applying laser radiation and a flow of fluid to the resist layer. The laser radiation may cause cracking, delamination, and/or polymer chain scission, and the flow of fluid may enhance mechanical separation of the resist material from the package assembly components.Type: GrantFiled: March 14, 2013Date of Patent: March 10, 2015Assignee: Intel CorporationInventor: Motohiko Sasagawa
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Patent number: 8975734Abstract: A semiconductor package without a chip carrier formed thereon and a fabrication method thereof. A metallic carrier is half-etched to form a plurality of grooves and metal studs corresponding to the grooves. The grooves are filled with a first encapsulant and a plurality of bonding pads are formed on the metal studs. The first encapsulant is bonded with the metal studs directly. Each of the bonding pads and one of the metal studs corresponding to the bonding pad form a T-shaped structure. Therefore, bonding force between the metal studs and the first encapsulant is enhanced such that delamination is avoided. Die mounting, wire-bonding and molding processes are performed subsequently. Since the half-etched grooves are filled with the first encapsulant, the drawback of having pliable metallic carrier that makes transportation difficult to carry out as encountered in prior techniques is overcome, and the manufacturing cost is educed by not requiring the use of costly metals as an etching resist layer.Type: GrantFiled: December 14, 2010Date of Patent: March 10, 2015Assignee: Siliconware Precision Industries Co., Ltd.Inventors: Yueh-Ying Tsai, Fu-Di Tang, Chien-Ping Huang, Chun-Chi Ke
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Patent number: 8975117Abstract: A method includes providing a semiconductor chip having a first main surface and a second main surface. A semiconductor chip is placed on a carrier with the first main surface of the semiconductor chip facing the carrier. A first layer of solder material is provided between the first main surface and the carrier. A contact clip including a first contact area is placed on the semiconductor chip with the first contact area facing the second main surface of the semiconductor chip. A second layer of solder material is provided between the first contact area and the second main surface. Thereafter, heat is applied to the first and second layers of solder material to form diffusion solder bonds between the carrier, the semiconductor chip and the contact clip.Type: GrantFiled: February 8, 2012Date of Patent: March 10, 2015Assignee: Infineon Technologies AGInventors: Ralf Otremba, Fong Lim, Abdul Rahman Mohamed, Chooi Mei Chong, Ida Fischbach, Xaver Schloegel, Juergen Schredl, Josef Hoeglauer
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Patent number: 8969143Abstract: A light-emitting device package including a lead frame formed of a metal and on which a light-emitting device chip is mounted; and a mold frame coupled to the lead frame by injection molding. The lead frame includes: a mounting portion on which the light-emitting device chip is mounted; and first and second connection portions that are disposed on two sides of the mounting portion in a first direction and connected to the light-emitting device chip by wire bonding, wherein the first connection portion is stepped with respect to the mounting portion, and a stepped amount is less than a material thickness of the lead frame.Type: GrantFiled: August 7, 2013Date of Patent: March 3, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Daniel Kim, Jae-sung You, Jong-kil Park
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Patent number: 8969134Abstract: A tape capable of laser ablation may be used in the formation of microelectronic interconnects, wherein the tape may be attached to bond pads on a microelectronic device and vias may be formed by laser ablation through the tape to expose at least a portion of corresponding bond pads. The microelectronic interconnects may be formed on the bond pads within the vias, such as by solder paste printing and solder reflow. The laser ablation tape can be removed after the formation of the microelectronic interconnects.Type: GrantFiled: May 10, 2013Date of Patent: March 3, 2015Assignee: Intel CorporationInventors: Xavier F. Brun, Takashi Kumamoto, Sufi Ahmed
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Patent number: 8969135Abstract: A semiconductor device includes a lead frame having a down bond area, a die attach area and a dam formed between the down bond area and the die attach area. A bottom of the dam is attached on a surface of the lead frame. The dam prevents contamination of the down bond area from die attach material, which may occur during a die attach process.Type: GrantFiled: November 11, 2013Date of Patent: March 3, 2015Assignee: Freescale Semiconductor, Inc.Inventors: Peng Liu, Qingchun He, Zhaobin Qi, Liqiang Xu, Tong Zhao
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Patent number: 8952452Abstract: Semiconductor devices, and a method of manufacturing the same, include a gate insulating film pattern over a semiconductor substrate. A gate electrode is formed over the gate insulating film pattern. A spacer structure is formed on at least one side of the gate electrode and the gate insulating film pattern. The spacer structure includes a first insulating film spacer contacting the gate insulating film pattern, and a second insulating film spacer on an outer side of the first insulating film spacer. The semiconductor device has an air gap between the first insulating film spacer and the second insulating film spacer.Type: GrantFiled: December 3, 2012Date of Patent: February 10, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Hong-Seong Kang, Yoon-Hae Kim, Jong-Shik Yoon
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Patent number: 8951840Abstract: A manufacturing method for Flip Chip on Chip (FCoC) package based on multi-row Quad Flat No-lead (QFN) package is provided wherein the lower surface of plate metallic base material are half-etched to form grooves. Insulation filling material is filled in the half-etched grooves. The upper surface of plate metallic base material is half-etched to form chip pad and multi-row of leads. Encapsulating first IC chip, second IC chip, solder bumps, underfill material, and metal wire to form an array of FCoC package based on the type of multi-row QFN package. Sawing and separating the FCoC package array, and forming FCoC package unit.Type: GrantFiled: December 4, 2012Date of Patent: February 10, 2015Assignee: Beijing University of TechnologyInventors: Fei Qin, Guofeng Xia, Tong An, Chengyan Liu, Wei Wu, Wenhui Zhu
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Patent number: 8952550Abstract: The invention relates to a ball-limiting metallurgy stack for an electrical device that contains at least one copper layer disposed upon a Ti adhesion metal layer. The ball-limiting metallurgy stack resists Sn migration toward the upper metallization of the device.Type: GrantFiled: January 12, 2010Date of Patent: February 10, 2015Assignee: Intel CorporationInventors: Madhav Datta, Dave Emory, Subhash M. Joshi, Susanne Menezes, Doowon Suh
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Patent number: 8941222Abstract: A semiconductor package includes at least one semiconductor die having an active surface, an interposer element having an upper surface and a lower surface, a package body, and a lower redistribution layer. The interposer element has at least one conductive via extending between the upper surface and the lower surface. The package body encapsulates portions of the semiconductor die and portions of the interposer element. The lower redistribution layer electrically connects the interposer element to the active surface of the semiconductor die.Type: GrantFiled: November 11, 2010Date of Patent: January 27, 2015Assignee: Advanced Semiconductor Engineering Inc.Inventor: John Richard Hunt
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Patent number: 8937386Abstract: The formation of the conductive wire of a chip package consists of a plurality of steps. Coat a first dielectric layer on the pad-mounting surface and a slot is formed on each bonding pad correspondingly. Then coat a second dielectric layer and produce a wiring slot corresponding to each bonding pad and the slot thereof. Next each wiring slot is filled with electrically conductive metal so as to form a conductive wire. Later Coat a third dielectric layer and a corresponding slot is formed on one end of each conductive wire while this slot is filled with electrically conductive metal to form a solder point. The above steps can further be repeated so as to form an upper-layer and a lower-layer conductive wire. Thereby precision of the chip package, use efficiency of the wafer and yield rate of manufacturing processes are all improved.Type: GrantFiled: March 7, 2012Date of Patent: January 20, 2015Assignee: Aflash Technology Co., Ltd.Inventors: Tse-Ming Chu, Sung-Chuan Ma
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Patent number: 8937009Abstract: Disclosed are a method for metallization during semiconductor wafer processing and the resulting structures. In this method, a passivation layer is patterned with first openings aligned above and extending vertically to metal structures below. A mask layer is formed and patterned with second openings aligned above the first openings, thereby forming two-tier openings extending vertically through the mask layer and passivation layer to the metal structures below. An electrodeposition process forms, in the two-tier openings, both under-bump pad(s) and additional metal feature(s), which are different from the under-bump pad(s) (e.g., a wirebond pad; a final vertical section of a crackstop structure; and/or a probe pad). Each under-bump pad and additional metal feature initially comprises copper with metal cap layers thereon.Type: GrantFiled: April 25, 2013Date of Patent: January 20, 2015Assignee: International Business Machines CorporationInventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Karen P. McLaughlin, Ekta Misra, Christopher D. Muzzy, Eric D. Perfecto, Wolfgang Sauter
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Patent number: 8921221Abstract: A photoresist layer is applied over a solder resist layer on a substrate such as a wafer. Openings in the solder resist and photoresist layers are filled with flux-free molten solder using IMS. The process is applicable to fine pitch applications and chip size packaging substrates. A protection layer may be employed to facilitate removal of the photoresist layer from the substrate. An oversized substrate including an adhesive layer on a peripheral area may be employed for providing greater adhesion of a dry film layer to the peripheral area of the substrate than the central portion thereof. The peripheral area is removed following IMS.Type: GrantFiled: June 20, 2011Date of Patent: December 30, 2014Assignee: International Business Machines CorporationInventors: Mark H. McLeod, Jae-Woong Nah
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Patent number: 8922010Abstract: Disclosed is a semiconductor device suppressed in decrease of reliability. The semiconductor device comprises an electrode pad portion (2) formed on the upper surface of a semiconductor substrate (1), a passivation layer (3) so formed on the upper surface of the semiconductor substrate (1) as to overlap a part of the electrode pad portion (2) and having a first opening portion (3a) where the upper surface of the electrode pad portion (2) is exposed, a barrier metal layer (5) formed on the electrode pad portion (2), and a solder bump (6) formed on the barrier metal layer (5). The barrier metal layer (5) is formed such that an outer peripheral end (5b) lies within the first opening portion (3a) of the passivation layer (3) when viewed in plan.Type: GrantFiled: April 4, 2013Date of Patent: December 30, 2014Assignee: Rohm Co., Ltd.Inventors: Tadahiro Morifuji, Shigeyuki Ueda
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Patent number: 8912088Abstract: The present invention provides a transfer substrate for transferring a metal wiring material to a transfer-receiving object, the transfer substrate comprising a substrate, at least one metal wiring material formed on the substrate and an underlying metal film formed between the substrate and the metal wiring material, wherein the metal wiring material is a molded article prepared by sintering, e.g., gold powder having a purity of 99.9% by weight or more and an average particle size of 0.01 ?m to 1.0 ?m and the underlying metal film is composed of a metal such as gold or an alloy. The transfer substrate is capable of transferring a metal wiring material to the transfer-receiving object even at a temperature for heating the transfer-receiving object of 80 to 300° C.Type: GrantFiled: November 18, 2011Date of Patent: December 16, 2014Assignee: Tanaka Kikinzoku Kogyo K.K.Inventors: Toshinori Ogashiwa, Masaaki Kurita, Takashi Nishimori, Yukio Kanehira
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Patent number: 8912659Abstract: A stacked semiconductor package includes a first semiconductor chip having a first surface and a second surface which faces away from the first surface and including first bonding pads which are formed on the first surface and first through electrodes which pass through the first surface and the second surface; a second semiconductor chip stacked over the second surface of the first semiconductor chip, and including second bonding pads which are formed on a third surface facing the first semiconductor chip and second through electrodes which pass through the third surface and a fourth surface facing away from the third surface and are electrically connected with the first through electrodes; and a molding part formed to substantially cover the stacked first and second semiconductor chips and having openings which expose one end of the first through electrodes disposed on the first surface of the first semiconductor chip.Type: GrantFiled: December 4, 2012Date of Patent: December 16, 2014Assignee: SK Hynix Inc.Inventor: Hyeong Seok Choi
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Patent number: 8907501Abstract: A method of attaching a die to a substrate is disclosed. A major surface of the die has an array of electrical contacts, and is covered with a tape segment having an array of apertures in register with the contacts. Solder balls are inserted into the apertures. The die is positioned against a substrate with the solder balls in register with the die pads on the surface of the substrate, and a heat treatment process is performed to bond the conductive elements to the corresponding bond pads.Type: GrantFiled: September 18, 2013Date of Patent: December 9, 2014Assignee: Infineon Technologies AGInventor: Chee Chian Lim
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Patent number: 8907478Abstract: An embodiment is a bump bond pad structure that comprises a substrate comprising a top layer, a reinforcement pad disposed on the top layer, an intermediate layer above the top layer, an intermediate connection pad disposed on the intermediate layer, an outer layer above the intermediate layer, and an under bump metal (UBM) connected to the intermediate connection pad through an opening in the outer layer. Further embodiments may comprise a via mechanically coupling the intermediate connection pad to the reinforcement pad. The via may comprise a feature selected from the group consisting of a solid via, a substantially ring-shaped via, or a five by five array of vias. Yet, a further embodiment may comprise a secondary reinforcement pad, and a second via mechanically coupling the reinforcement pad to the secondary reinforcement pad.Type: GrantFiled: March 5, 2013Date of Patent: December 9, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hao-Yi Tsai, Hsien-Wei Chen, Yu-Wen Liu, Ying-Ju Chen, Hsiu-Ping Wei
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Patent number: 8906740Abstract: A method of manufacture of an integrated circuit packaging system includes: mounting an integrated circuit, having a device through via and a device interconnect, over a substrate with the device through via traversing the integrated circuit and the device interconnect attached to the device through via; attaching a conductive support over the substrate with the conductive support adjacent to the integrated circuit; providing a pre-formed interposer, having an interposer through via and a pre-attached interconnect, with the pre-attached interconnect attached to the interposer through via; mounting the pre-formed interposer over the integrated circuit and the conductive support with the pre-attached interconnect over the device through via; and forming an encapsulation over the substrate covering the integrated circuit, the conductive support, and partially covering the pre-formed interposer.Type: GrantFiled: April 12, 2011Date of Patent: December 9, 2014Assignee: STATS ChipPAC Ltd.Inventors: Chan Hoon Ko, Soo-San Park, YoungChul Kim
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Patent number: 8901949Abstract: There is provided a probe card comprising a plurality of probe tips, each being ball-shaped or pillar-shaped and having a top end in contact with each of target chip pads to be tested; a first space converting unit; a second space converting unit; a frame configured to support the second space converting unit; an interposer unit; and a circuit board.Type: GrantFiled: June 1, 2012Date of Patent: December 2, 2014Assignee: Gigalane, Co., Ltd.Inventors: Duk Kyu Kwon, Kyu Han Lee, Yong Goo Lee
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Patent number: 8901733Abstract: In accordance with the objectives of the invention a new method is provided for the creation of metal bumps over surfaces of I/O pads. Contact pads are provided over the surface of a layer of dielectric. The aluminum of the I/O pads, which have been used as I/O pads during wafer level semiconductor device testing, is completely or partially removed over a surface area that is smaller than the surface area of the contact pad using methods of metal dry etching or wet etching. The contact pad can be accessed either by interconnect metal created in a plane of the contact pad or by via that are provided through the layer of dielectric over which the contact pad has been deposited. The process can be further extended by the deposition, patterning and etching of a layer of polyimide over the layer of passivation that serves to protect the contact pad.Type: GrantFiled: July 30, 2008Date of Patent: December 2, 2014Assignee: Qualcomm IncorporatedInventors: Ching-Cheng Huang, Chuen-Jye Lin, Ming-Ta Lei, Mou-Shiung Lin
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Patent number: 8901753Abstract: A microelectronic package is provided. The microelectronic package includes a substrate having a plurality of solder bumps disposed on a top side of the substrate and a die disposed adjacent to the top side of the substrate. The die includes a plurality of glassy metal bumps disposed on a bottom side of the die wherein the plurality of glassy metal bumps are to melt the plurality of solder bumps to form a liquid solder layer. The liquid solder layer is to attach the die with the substrate.Type: GrantFiled: January 18, 2013Date of Patent: December 2, 2014Assignee: Intel CorporationInventor: Daewoong Suh
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Patent number: 8895430Abstract: A semiconductor device has a semiconductor wafer with a plurality of semiconductor die including a plurality of contact pads. An insulating layer is formed over the semiconductor wafer and contact pads. An under bump metallization (UBM) is formed over and electrically connected to the plurality of contact pads. A mask is disposed over the semiconductor wafer with a plurality of openings aligned over the plurality of contact pads. A conductive bump material is deposited within the plurality of openings in the mask and onto the UBM. The mask is removed. The conductive bump material is reflowed to form a plurality of bumps with a height less than a width. The plurality of semiconductor die is singulated. A singulated semiconductor die is mounted to a substrate with bumps oriented toward the substrate. Encapsulant is deposited over the substrate and around the singulated semiconductor die.Type: GrantFiled: March 29, 2012Date of Patent: November 25, 2014Assignee: Great Wall Semiconductor CorporationInventors: Samuel J. Anderson, Gary Dashney, David N. Okada
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Patent number: 8884343Abstract: A system in package and a method for manufacturing the same is provided. The system in package comprises a laminate body having a substrate arranged inside a laminate body. A semiconductor die is embedded in the laminate body and the semiconductor is bonded to contact pads of the substrate by help of a sintered bonding layer, which is made from a sinter paste. Lamination of the substrate and further layers providing the laminate body and sintering of the sinter paste may be performed in a single and common curing step.Type: GrantFiled: February 19, 2013Date of Patent: November 11, 2014Assignee: Texas Instruments IncorporatedInventors: Bernhard Lange, Juergen Neuhaeusler
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Patent number: 8847391Abstract: Some exemplary embodiments of this disclosure pertain to a semiconductor package that includes a packaging substrate, a die and a set of under bump metallization (UBM) structures coupled to the packaging substrate and the die. Each UBM structure has a non-circular cross-section along its respective lateral dimension. Each UBM structure includes a first narrower portion and a second wider portion. The first narrower portion has a first width. The second wider portion has a second width that is greater than the first width. Each UBM structure is oriented towards a particular region of the die such that the first narrower portion of the UBM structure is closer than the second wider portion of the UBM structure to the particular region of the die.Type: GrantFiled: February 26, 2013Date of Patent: September 30, 2014Assignee: QUALCOMM IncorporatedInventors: Zhongping Bao, Lily Zhao, Michael Kim-Kwong Han
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Patent number: 8844125Abstract: A method of making an electronic device includes forming a circuit layer on a liquid crystal polymer (LCP) substrate and having at least one solder pad. The method also includes forming an LCP solder mask having at least one aperture therein alignable with the at least one solder pad. The method further includes aligning and laminating the LCP solder mask and the LCP substrate together, then positioning solder paste in the at least one aperture. At least one circuit component may then be attached to the at least one solder pad using the solder paste.Type: GrantFiled: January 14, 2011Date of Patent: September 30, 2014Assignee: Harris CorporationInventors: Louis Joseph Rendek, Jr., Travis L. Kerby, Casey Philip Rodriguez
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Patent number: 8846519Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has an active surface. The semiconductor device includes at least a connecting element and at least a bump. The connecting element is disposed on the activate surface and has a minimum dimension smaller than 100 microns. The bump is disposed on the connecting element and is electrically connected to the active surface by the connecting element. The bump includes a pillar part disposed on the connecting element and a top part disposed on the top of the pillar part. The pillar part has a first dimension and a second dimension both parallel to the active surface. The first dimension is more than 1.2 times the second dimension. The top part is composed of solder and will melt under a pre-determined temperature. The pillar part will not melt under the pre-determined temperature.Type: GrantFiled: May 9, 2012Date of Patent: September 30, 2014Assignee: Advanpack Solutions Pte Ltd.Inventors: Hwee-Seng Jimmy Chew, Chee Kian Ong
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Patent number: 8836146Abstract: A chip package includes a semiconductor substrate, a first metal pad over the semiconductor substrate, and a second metal pad over the semiconductor substrate. In a case, the first metal pad is tape automated bonded thereto, and the second metal pad is solder bonded thereto. In another case, the first metal pad is tape automated bonded thereto, and the second metal pad is wirebonded thereto. In another case, the first metal pad is solder bonded thereto, and the second metal pad is wirebonded thereto. In another case, the first metal pad is bonded to an external circuitry using an anisotropic conductive film, and the second metal pad is solder bonded thereto. In another case, the first metal pad is bonded to an external circuitry using an anisotropic conductive film, and the second metal pad is wirebonded thereto.Type: GrantFiled: March 2, 2007Date of Patent: September 16, 2014Assignee: Qualcomm IncorporatedInventors: Chien-Kang Chou, Chiu-Ming Chou, Li-Ren Lin, Hsin-Jung Lo
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Patent number: 8822324Abstract: A structure and method of forming passivated copper chip pads is described. In various embodiments, the invention describes a substrate that includes active circuitry and metal levels disposed above the substrate. A passivation layer is disposed above a last level of the metal levels. A conductive liner is disposed in the sidewalls of an opening disposed in the passivation layer, wherein the conductive liner is also disposed over an exposed surface of the last level of the metal levels.Type: GrantFiled: April 1, 2013Date of Patent: September 2, 2014Assignee: Infineon Technologies AGInventors: Thomas Goebel, Erdem Kaltalioglu, Markus Naujok
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Patent number: 8823166Abstract: Apparatus and methods for providing solder pillar bumps. Pillar bump connections are formed on input/output terminals for integrated circuits by forming a pillar of conductive material using plating of a conductive material over terminals of an integrated circuit. A base portion of the pillar bump has a greater width than an upper portion. A cross-section of the base portion of the pillar bump may make a trapezoidal, rectangular or sloping shape. Solder material may be formed on the top surface of the pillar. The resulting solder pillar bumps form fine pitch package solder connections that are more reliable than those of the prior art.Type: GrantFiled: August 30, 2010Date of Patent: September 2, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Chung Lin, Chung-Shi Liu, Meng-Wei Chou, Kuo Cheng Lin, Wen-Hsiung Lu, Chien Ling Hwang, Ying-Jui Huang, De-Yuan Lu
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Patent number: 8822326Abstract: Provided is a method for manufacturing an Sn alloy bump, wherein composition of the Sn alloy bump can be readily controlled. The method for manufacturing an Sn alloy bump formed of an alloy composed of Sn and other one or more types of metals has a step of forming an Sn layer on an electrode pad in a resist opening formed on a substrate by electrolytic plating; a step of laminating Sn and an alloy layer on the Sn layer by electrolytic plating; and a step of forming an Sn alloy bump by melting the Sn layer and the laminated alloy layer after removal of a resist.Type: GrantFiled: January 16, 2012Date of Patent: September 2, 2014Assignee: Mitsubishi Materials CorporationInventors: Takeshi Hatta, Akihiro Masuda
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Patent number: 8815731Abstract: A semiconductor package and a method for fabricating the same. The semiconductor package includes a first substrate including a first pad, a second substrate spaced apart from the first substrate and where a second pad is formed to face the first pad, a first bump electrically connecting the first pad to the second pad, and a second bump mechanically connecting the first substrate to the second substrate is disposed between the first substrate where the first pad is not formed and the second substrate where the second pad is not formed. A coefficient of thermal expansion (CTE) of the second bump is smaller than that of the first bump.Type: GrantFiled: July 1, 2011Date of Patent: August 26, 2014Assignee: SAMSUNG Electronics Co., Ltd.Inventors: Young Lyong Kim, Hyeongseob Kim, Jongho Lee, Eunchul Ahn
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Patent number: 8816404Abstract: A semiconductor device has a first conductive layer formed over a first substrate. A second conductive layer is formed over a second substrate. A first semiconductor die is mounted to the first substrate and electrically connected to the first conductive layer. A second semiconductor die is mounted to the second substrate and electrically connected to the second conductive layer. The first semiconductor die is mounted over the second semiconductor die. An encapsulant is deposited over the first and second semiconductor die and the first and second substrates. A conductive interconnect structure is formed through the encapsulant to electrically connect the first and second semiconductor die to the second surface of the semiconductor device. Forming the conductive interconnect structure includes forming a plurality of conductive vias through the encapsulant and the first substrate outside a footprint of the first and second semiconductor die.Type: GrantFiled: September 16, 2011Date of Patent: August 26, 2014Assignee: STATS ChipPAC, Ltd.Inventors: YoungJoon Kim, SangMi Park, YongHyuk Jeong
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Patent number: 8786083Abstract: A microelectronic assembly is disclosed that is capable of achieving a desired impedance for raised conductive elements. The microelectronic assembly may include an interconnection element, a surface conductive element, a microelectronic device, a plurality of raised conductive elements, and a bond element. The microelectronic device may overlie the dielectric element and at least one surface conductive element attached to the front surface. The plurality of raised conductive elements may connect the device contacts with the element contacts. The raised conductive elements may have substantial portions spaced a first height above and extending at least generally parallel to at least one surface conductive element, such that a desired impedance may be achieved for the raised conductive elements. A bond element may electrically connect at least one surface conductive element with at least one reference contact that may be connectable to a source of reference potential.Type: GrantFiled: September 16, 2010Date of Patent: July 22, 2014Assignee: Tessera, Inc.Inventors: Belgacem Haba, Ellis Chau, Wael Zohni, Philip Damberg, Richard Dewitt Crisp
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Patent number: 8779587Abstract: An electronic device, comprising a semiconductor substrate having a first metal pad formed thereover, a device package substrate having a second metal pad formed thereover, and, a doped solder bump. The doped solder bump is located between and in contact with said first and second metal pads. The doped solder bump consisting of Sn, one or both of Ag and Cu, and a fourth row transition metal dopant in a concentration range from 0.35 wt. % to 2 wt. %.Type: GrantFiled: September 16, 2008Date of Patent: July 15, 2014Assignee: Agere Systems LLCInventors: Mark Bachman, John W. Osenbach
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Patent number: 8772151Abstract: A method includes forming a passivation layer over an electrically conductive pad. A stress buffer layer is formed over the passivation layer. An opening is formed through the stress buffer layer over the electrically conductive pad wherein the opening does not reach the electrically conductive pad. The stress buffer layer is cured. The opening is extended through the passivation layer to reach the electrically conductive pad after the curing.Type: GrantFiled: September 27, 2012Date of Patent: July 8, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Hsien-Wei Chen
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Patent number: 8765529Abstract: A semiconductor device includes a semiconductor chip, a connection electrode including a first land electrode electrically coupled with the semiconductor chip, and a through electrode formed on an upper surface of the first land electrode to be electrically coupled with the first land electrode using a stud bump, and a sealing resin, through which the connection electrode passes, for sealing the semiconductor chip.Type: GrantFiled: October 30, 2013Date of Patent: July 1, 2014Assignee: Spansion LLCInventor: Naomi Masuda
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Patent number: 8765593Abstract: Aspects of the present invention relate to a controlled collapse chip connection (C4) structures. Various embodiments include a method of forming a controlled collapse chip connection (C4) structure. The method can include: providing a precursor structure including: a substrate, a dielectric over the substrate, the dielectric including a plurality of trenches exposing a portion of the substrate, and a metal layer over the dielectric and the portion of the substrate in each of the plurality of trenches, forming a resist layer over the metal layer, forming a rigid liner over a surface of the resist layer and the metal layer, and forming solder over the rigid liner between portions of the resist layer.Type: GrantFiled: August 8, 2012Date of Patent: July 1, 2014Assignee: International Business Machines CorporationInventors: Stephen P. Ayotte, Timothy H. Daubenspeck, David J. Hill, Glen E. Richard, Timothy M. Sullivan
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Patent number: 8759973Abstract: A microelectronic assembly is disclosed that includes a semiconductor wafer with contacts, compliant bumps of dielectric material overlying the first surface of the semiconductor wafer, and a dielectric layer overlying the first surface of the semiconductor wafer and edges of the compliant bumps. The compliant bumps have planar top surfaces which are accessible through the dielectric layer. Conductive traces may be electrically connected with contacts and extend therefrom to overlie the planar top surfaces of the compliant bumps. Conductive elements may overlie the planar top surfaces in contact with the conductive traces.Type: GrantFiled: December 22, 2011Date of Patent: June 24, 2014Assignee: Tessera, Inc.Inventors: Vage Oganesian, Guilian Gao, Belgacem Haba, David Ovrutsky
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Patent number: 8754524Abstract: An interconnect structure comprises a solder including nickel (Ni) in a range of 0.01 to 0.20 percent by weight. The interconnect structure further includes an intermetallic compound (IMC) layer in contact with the solder. The IMC layer comprises a compound of copper and nickel.Type: GrantFiled: February 16, 2012Date of Patent: June 17, 2014Assignee: FlipChip International, LLCInventors: Anthony Curtis, Guy F. Burgess, Michael Johnson, Ted Tessier, Yuan Lu
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Patent number: 8742578Abstract: An integrated circuit (IC) chip including solder structures for connection to a package substrate, an IC chip package, and a method of forming the same are disclosed. In an embodiment, an IC chip is provided comprising a wafer having a plurality of solder structures disposed above the wafer. A ball limiting metallurgy (BLM) layer is disposed between each of the plurality of solder structures and the wafer. At least one of the plurality of solder structures has a first diameter and a first height, and at least one other solder structure has a second diameter and a second height. The differing heights and volumes of solder structures facilitate solder volume compensation for chip join improvement on the IC chip side rather than the package side.Type: GrantFiled: July 19, 2012Date of Patent: June 3, 2014Assignee: International Business Machines CorporationInventors: Charles L. Arvin, Eric D. Perfecto, Wolfgang Sauter, Jennifer D. Schuler
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Patent number: 8741764Abstract: A semiconductor device has a semiconductor die and conductive pillar with a recess or protrusion formed over a surface of the semiconductor die. The conductive pillar is made by forming a patterning layer over the semiconductor die, forming an opening with a recess or protrusion in the patterning layer, depositing conductive material in the opening and recess or protrusion, and removing the patterning layer. A substrate has bump material deposited over a conductive layer formed over a surface of the substrate. The bump material is melted. The semiconductor die is pressed toward the substrate to enable the melted bump material to flow into the recess or over the protrusion if the conductive pillar makes connection to the conductive layer. A presence or absence of the bump material in the recess or protrusion of the conductive pillar is detected by X-ray or visual inspection.Type: GrantFiled: December 13, 2011Date of Patent: June 3, 2014Assignee: STATS ChipPAC, Ltd.Inventors: Jen Yu Chen, Ting Yu Fu, Men Hsien Li, Chien Chen Lee
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Patent number: 8742580Abstract: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.Type: GrantFiled: February 25, 2007Date of Patent: June 3, 2014Assignee: Megit Acquisition Corp.Inventors: Jin-Yuan Lee, Ying-Chih Chen, Mou-Shiung Lin
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Patent number: 8736062Abstract: A method of making contact pad sidewall spacer and pad sidewall spacers are disclosed. An embodiment includes forming a plurality of contact pads on a substrate, each contact pad having sidewalls, forming a first photoresist over the substrate, and removing the first photoresist from the substrate thereby forming sidewall spacers along the sidewalls of the plurality of the contact pads.Type: GrantFiled: August 16, 2012Date of Patent: May 27, 2014Assignee: Infineon Technologies AGInventor: Johann Gatterbauer
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Patent number: 8735275Abstract: After a plurality of pads (2) are formed on an insulation film (1), a passivation film (3) is formed on the entire surface thereof, and opening parts (3a) which exposes all the pads (2) are formed in the passivation film (3). Next, another passivation film is formed on the entire surface and, for each of the pads (2), an opening part is formed in this passivation film to expose the central portion of the pad (2). According to the above method, the probing test can be performed with the opening parts (3a) formed in the passivation film (3). Performing the probing test in such a state increases the probability that the probe contacts the pad (2) since the entire surface of the pad (2) is exposed, thereby providing the test with a higher accuracy. Thus, the pad can be miniaturized and/or the pitch can be narrowed without requiring a higher accuracy of the probe.Type: GrantFiled: May 7, 2010Date of Patent: May 27, 2014Assignee: Fujitsu Semiconductor LimitedInventor: Nobuo Satake
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Patent number: 8735221Abstract: Provided are a stacked package, method of fabricating a stacked package, and method of mounting a stacked package. A method includes providing an upper semiconductor package including an upper package substrate, upper semiconductor chips formed on a top surface of the upper package substrate, and first solders formed on a bottom surface of the upper package substrate and having a first melting temperature, providing a lower semiconductor package including a lower package substrate, lower semiconductor chips formed on a top surface of the lower package substrate, and solder paste nodes formed on the top surface of the lower package substrate and having a second melting temperature lower than the first melting temperature, and forming inter-package bonding units by attaching respective first solders and solder paste nodes to each other by performing annealing at a temperature higher than the second melting temperature and lower than the first melting temperature.Type: GrantFiled: September 23, 2011Date of Patent: May 27, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Jae-Wook Yoo, Sun-Kyoung Seo
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Patent number: 8723325Abstract: A semiconductor substrate is provided having a first metal layer formed over a first insulating layer. A second insulating layer is formed having a first damascene opening, the first opening having a second insulating layer portion formed therein. A resist layer is deposited to fill the first opening and the resist layer is thereafter patterned to form an etching mask for etching a second damascene opening. The second opening is etched into a portion of the second insulating layer, the second opening exposing a portion of the first metal layer. A second metal layer is formed to include filling the first and second damascene openings embedding the second insulating layer portion in the second metal layer. The second metal layer is planarized and a passivation layer is formed above the second insulating layer and the second metal layer, wherein the passivation layer partially covers the second metal layer.Type: GrantFiled: April 19, 2010Date of Patent: May 13, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, Ying-Ju Chen
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Patent number: 8722528Abstract: Standoff structures that can be used on the die backside of semiconductor devices and methods for making the same are described. The devices contain a silicon substrate with an integrated circuit on the front side of the substrate and a backmetal layer on the backside of the substrate. Standoff structures made of Cu of Ni are formed on the backmetal layer and are embedded in a Sn-containing layer that covers the backmetal layer and the standoff structures. The standoff structures can be isolated from each other so that they are not connected and can also be configured to substantially mirror indentations in the leadframe that is attached to the Sn-containing layer. Other embodiments are described.Type: GrantFiled: August 29, 2012Date of Patent: May 13, 2014Assignee: Fairchild Semiconductor CorporationInventors: Michael Gruenhagen, Thomas P. Welch, Eric J. Woolsey
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Publication number: 20140117532Abstract: The disclosure is directed to a device and method for manufacture thereof. The device includes a first workpiece bonded to a second workpiece by a bump interconnection structure. The bump interconnection structure allows for optimized packaging assembly yield and bond integrity.Type: ApplicationFiled: October 25, 2012Publication date: May 1, 2014Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chita Chuang, Yao-Chun Chuang, Yu-Chen Hsu, Ming Hung Tseng, Chen-Shien Chen