Introducing Electrical Active Impurities In Local Oxidation Region Solely For Forming Channel Stoppers (epo) Patents (Class 257/E21.557)
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Patent number: 10403624Abstract: The present disclosure is directed to a plurality of waffle gate parallel transistors having a shared gate on a surface of a semiconductor substrate. The shared gate has connected lines that form a plurality of frames, lines of each of the frames being over the perimeter of a respective source or drain region. The shared gate includes frames of a first size and shape and frames of a second size and shape, such as squares, rectangles and octagons. The frames having the first size and shape are each over a respective source region and the frames having the second size and shape are each over a respective drain region. Each of the frames having a first size and shape share at least one side with one of the frames having the second size and shape.Type: GrantFiled: May 26, 2017Date of Patent: September 3, 2019Assignee: STMICROELECTRONICS DESIGN AND APPLICATION S.R.O.Inventors: Patrik Vacula, Milos Vacula, Miroslav Husak
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Patent number: 10354880Abstract: Embodiments herein describe techniques for forming sidewalls on vertical structures on a semiconductor substrate. In one embodiment, the semiconductor substrate includes a first layer (e.g., a conductive layer such as an electrode) on which a second layer (e.g., an insulator) is disposed. An undercut etch is performed which selectively etches the sides of the material in the first layer but not the material in the second layer. A conformal deposition process is used to deposit the material of the sidewall into the undercut regions. Further etches can be performed to shape the sidewalls disposed on the sides of the material in the first layer.Type: GrantFiled: April 5, 2017Date of Patent: July 16, 2019Assignee: International Business Machines CorporationInventors: Joel P. De Souza, Yun Seog Lee, Devendra K. Sadana
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Patent number: 8994181Abstract: Mechanisms of forming a bond pad structure are provided. The bond pad has a recess region, which is formed by an opening in the passivation layer underneath the bond pad. An upper passivation layer covers at least the recess region of the bond pad to reduce trapping of patterning and/or etching residues in the recess region. As a result, the likelihood of bond pad corrosion is reduced.Type: GrantFiled: August 18, 2011Date of Patent: March 31, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ying-Ju Chen, Hsien-Wei Chen, Tsung-Yuan Yu, Shih-Wei Liang
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Patent number: 8941182Abstract: Generally, the subject matter disclosed herein relates to modern sophisticated semiconductor devices and methods for forming the same, wherein electrical interconnects between circuit elements based on a buried sublevel metallization may provide improved transistor density. One illustrative method disclosed herein includes forming a contact dielectric layer above first and second transistor elements of a semiconductor device, and after forming the contact dielectric layer, forming a buried conductive element below an upper surface of the contact dielectric layer, the conductive element providing an electrical connection between the first and second transistor elements.Type: GrantFiled: June 7, 2011Date of Patent: January 27, 2015Assignee: GLOBALFOUNDRIES Inc.Inventors: Kai Frohberg, Dominik Olligs, Jens Heinrich, Katrin Reiche
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Patent number: 8822330Abstract: A method for providing an oxide layer on a semiconductor substrate is disclosed. In one aspect, the method includes obtaining a semiconductor substrate. The substrate may have a three-dimensional structure, which may comprise at least one hole. The method may also include forming an oxide layer on the substrate, for example, on the three-dimensional structure, by anodizing the substrate in an acidic electrolyte solution.Type: GrantFiled: October 18, 2010Date of Patent: September 2, 2014Assignee: IMECInventors: Philippe Soussan, Eric Beyne, Philippe Muller
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Patent number: 8785306Abstract: A method for manufacturing a semiconductor power device on a semiconductor substrate supporting a drift region composed of an epitaxial layer by growing a first epitaxial layer followed by forming a first hard mask layer on top of the epitaxial layer; applying a first implant mask to open a plurality of implant windows and applying a second implant mask for blocking some of the implant windows to implant a plurality of dopant regions of alternating conductivity types adjacent to each other in the first epitaxial layer; repeating the first step and the second step by applying the same first and second implant masks to form a plurality of epitaxial layers then carrying out a device manufacturing process on a top side of the epitaxial layer with a diffusion process to merge the dopant regions of the alternating conductivity types as doped columns in the epitaxial layers.Type: GrantFiled: September 27, 2011Date of Patent: July 22, 2014Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Lingpeng Guan, Madhur Bobde, Anup Bhalla, Yeeheng Lee, John Chen, Moses Ho
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Patent number: 8373271Abstract: An interconnect structure is provided that includes at least one patterned and cured photo-patternable low k material located on a surface of a patterned and cured oxygen-doped SiC antireflective coating (ARC). A conductively filled region is located within the at least one patterned and cured photo-patternable low k material and the patterned and cured oxygen-doped SiC ARC. The oxygen-doped SiC ARC, which is a thin layer (i.e., less than 400 angstroms), does not produce standing waves that may degrade the diffusion barrier and the electrically conductive feature that are embedded within the patterned and cured photo-patternable low k dielectric material and, as such, structural integrity is maintained. Furthermore, since a thin oxygen-doped SiC ARC is employed, the plasma etch process time used to open the material stack of the ARC/dielectric cap can be reduced, thus reducing potential plasma damage to the patterned and cured photo-patternable low k material.Type: GrantFiled: May 27, 2010Date of Patent: February 12, 2013Assignee: International Business Machines CorporationInventors: Dario L. Goldfarb, Ranee W. Kwong, Qinghuang Lin, Deborah A. Neumayer, Hosadurga Shobha
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Patent number: 8227853Abstract: A semiconductor integrated circuit device includes a semiconductor substrate; a dummy pattern extending in one direction on the semiconductor substrate; a junction region electrically connecting the dummy pattern to the semiconductor substrate; and a voltage applying unit that is configured to apply a bias voltage to the dummy pattern.Type: GrantFiled: October 27, 2010Date of Patent: July 24, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Bong-Hyun Lee, Jung-Yun Choi
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Patent number: 8125036Abstract: The Examiner objected to the abstract of the disclosure because it contains the phrase “comprising.” The Abstract does not include the phrase “comprising,” however, please amend the abstract as follows: An integrated circuit having a semiconductor component arrangement and production method is disclosed. The integrated circuit as described includes an oxide layer region is provided as a protection against oxidation in the edge region on the surface region of an underlying semiconductor material region.Type: GrantFiled: March 14, 2007Date of Patent: February 28, 2012Assignee: Infineon Technologies Austria AGInventor: Gerhard Schmidt
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Patent number: 8110911Abstract: A first wiring pattern is formed on a surface of a first support plate; a semiconductor chip is disposed on the first wiring pattern; and electrode terminals of the semiconductor chip are electrically connected to the first wiring pattern at required positions. Post electrodes connected to a second wiring pattern of a wiring-added post electrode component integrally connected by a second support plate are collectively fixed and electrically connected to the first wiring pattern formed on the first support plate at predetermined positions. After sealing with resin, the first and second support plates are separated; a glass substrate is affixed on a front face side; and external electrodes connected to the second wiring pattern are formed on a back face side.Type: GrantFiled: January 16, 2009Date of Patent: February 7, 2012Assignee: Kyushu Institute of TechnologyInventors: Masamichi Ishihara, Hirotaka Ueda
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Patent number: 8022553Abstract: A mounting substrate and a method of manufacturing the mounting substrate. The mounting substrate can include an insulation layer, a bonding pad buried in one side of the insulation layer in correspondence with a mounting position of a chip, and a circuit pattern electrically connected to the bonding pad. By utilizing certain embodiments of the invention, the process for stacking a solder resist layer can be omitted, as the bonding pads can be implemented in a form recessed from the surface of the insulation layer. In this way, the manufacturing process can be simplified and manufacturing costs can be reduced. Since the surface of the mounting-substrate on which to mount a chip can be kept flat without any protuberances, the occurrence of voids in the underfill can be minimized. This is correlated to obtaining a high degree of reliability, and leads to a greater likelihood of successful mounting.Type: GrantFiled: June 5, 2008Date of Patent: September 20, 2011Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Jin-Yong Ahn, Chang-Sup Ryu, Byung-Youl Min, Myung-Sam Kang
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Patent number: 8013381Abstract: A semiconductor device has a semiconductor substrate of a first conductivity type; first to third high-voltage insulated-gate field effect transistors formed on a principal surface of the semiconductor substrate; a first device isolation insulating film that is formed in the semiconductor substrate and isolates the first high-voltage insulated-gate field effect transistor and the second high-voltage insulated-gate field effect transistor from each other; a second device isolation insulating film that is formed in the semiconductor substrate and isolates the first high-voltage insulated-gate field effect transistor and the third high-voltage insulated-gate field effect transistor from each other; a first impurity diffusion layer of the first conductivity type that is formed below the first device isolation insulating film; and a second impurity diffusion layer of the first conductivity type that is formed below the second device isolation insulating film.Type: GrantFiled: January 28, 2009Date of Patent: September 6, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Norio Magome, Toshifumi Minami, Tomoaki Hatano, Norihisa Arai
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Patent number: 7998823Abstract: By forming an additional doped region with increased junction depth at areas in which contact regions may connect to drain and source regions, any contact irregularities may be embedded into the additional doped region, thereby reducing the risk for leakage currents or short circuits between the drain and source region and the well region that may be conventionally caused by the contact irregularity. Moreover, additionally or alternatively, the surface topography of the semiconductor region and the adjacent isolation trench may be modified prior to the formation of metal silicide regions and contact plugs to enhance the lithography procedure for forming respective contact openings in an interlayer dielectric material. For this purpose, the isolation trench may be brought to an equal or higher level compared to the adjacent semiconductor region.Type: GrantFiled: September 21, 2006Date of Patent: August 16, 2011Assignee: Advanced Micro Devices, Inc.Inventors: Carsten Peters, Kai Frohberg, Ralf Richter
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Patent number: 7847339Abstract: A semiconductor integrated circuit device includes a semiconductor substrate; a dummy pattern extending in one direction on the semiconductor substrate; a junction region electrically connecting the dummy pattern to the semiconductor substrate; and a voltage applying unit that is configured to apply a bias voltage to the dummy pattern.Type: GrantFiled: July 1, 2008Date of Patent: December 7, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Bong-Hyun Lee, Jung-Yun Choi
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Publication number: 20090221133Abstract: Methods of fabricating SOI wafers are provided including providing a donor wafer and forming a hydrogen ion implantation layer in the donor wafer. A circumference portion of one side of the donor wafer is recessed to form a height difference. The one side of the donor wafer and a handle wafer are bonded to form a bonded wafer. The bonded wafer is heat treated to separate the bonded wafer along the hydrogen ion implantation layer.Type: ApplicationFiled: February 13, 2009Publication date: September 3, 2009Inventors: Seung-Woo Choi, Dae-Lok Bae, Jong-Wook Lee, Yong-Won Cha, Pil-Kyu Kang, Jung-Ho Kim
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Publication number: 20090023268Abstract: An isolation method of active area for semiconductor forms an isolated active area in a substrate. The substrate is a p-type silicon substrate. A pad oxide layer is formed on the substrate. A patterned sacrificial layer and an upper mask layer are formed on the pad oxide layer, where the upper mask layer is formed over the isolation region of the substrate. A gap is formed between the patterned sacrificial layer and the upper mask layer. An implantation process is performed to dope ions into the substrate through the gap, which forms an n-type barrier to surround the active areas. Lastly, the patterned sacrificial layer is stripped, and an anodization process is utilized to convert p-type bulk silicon into porous silicon. Then, an oxidation process is performed to oxidize the porous silicon to form a silicon dioxide isolation region for the active areas.Type: ApplicationFiled: April 23, 2008Publication date: January 22, 2009Inventors: Hsiao-Che WU, Ming-Yen Li, Wen-Li Tsai
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Patent number: 6660595Abstract: A method of fabricating different transistor structures with the same mask. A masking layer (214) has two openings (204, 202) that expose two transistor areas (304,302). The width of the second opening (202) is adjusted such that the angled implant is substantially blocked from the second transistor area (302). The angled implant forms pocket regions in the first transistor area (304). The same masking layer (214) may then be used to implant source and drain extension regions in both the first and second transistor areas (304, 302).Type: GrantFiled: April 20, 2001Date of Patent: December 9, 2003Assignee: Texas Instruments IncorporatedInventor: Mark S. Rodder