Three-dimensional Integrated Circuits Stacked In Different Levels (epo) Patents (Class 257/E21.614)
  • Patent number: 7915667
    Abstract: In an embodiment, an integrated circuit having a memory cell arrangement is provided. The memory cell arrangement may include a substrate, a fin structure disposed above the substrate, and a memory cell contacting region. The fin structure may include a memory cell region having a plurality of memory cell structures being disposed above one another, each memory cell structure having an active region of a respective memory cell. Furthermore, the memory cell contacting region may be configured to electrically contact each of the memory cell structures, wherein the memory cell contacting region may include a plurality of contact regions, which are at least partially displaced with respect to each other in a direction parallel to the main processing surface of the substrate.
    Type: Grant
    Filed: June 11, 2008
    Date of Patent: March 29, 2011
    Assignee: Qimonda AG
    Inventors: Roman Knoefler, Michael Specht, Franz Hofmann, Florian Beug, Dirk Manger, Stephan Riedel
  • Patent number: 7915083
    Abstract: A layered chip package includes a main body, and wiring disposed on at least one side surface of the main body. The main body has: a main part having a top surface and a bottom surface and including a plurality of layer portions stacked; and a plurality of terminals arranged on at least one of the top and bottom surfaces of the main part and electrically connected to the wiring. A manufacturing method for the layered chip package includes: fabricating a plurality of first layered substructures each including a plurality of pre-separation main bodies arrayed; fabricating a second layered substructure by stacking the first layered substructures; cutting the second layered substructure into a block in which a plurality of pre-separation main bodies are arrayed in two directions; forming the wiring simultaneously for the plurality of pre-separation main bodies included in the block; and separating the pre-separation main bodies from each other.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: March 29, 2011
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Hiroshi Ikejima, Atsushi Iijima
  • Patent number: 7915079
    Abstract: A layered chip package includes a main body, and wiring disposed on at least one side surface of the main body. The main body includes a plurality of layer portions stacked. In a method of manufacturing the layered chip package, a plurality of structures are initially formed. Each structure includes at least one main-body-forming portion that is to be the main body and that has a pre-wiring surface. Next, the plurality of structures are surrounded with a jig and thereby aligned so that their pre-wiring surfaces face upward. The jig has a top surface that is lower in level than the pre-wiring surfaces. Next, a resin layer covering the jig and the structures is formed using a resin film. Next, the resin layer is polished until the pre-wiring surfaces are exposed. Next, the wiring is formed on the pre-wiring surfaces simultaneously. Next, the main-body-forming portions are separated from each other.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: March 29, 2011
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Atsushi Iijima
  • Patent number: 7902651
    Abstract: A multi-chip stack module provides increased circuit density for a given surface chip footprint. The multi-chip stack module comprises support structures alternating with standard surface mount type chips to form a stack wherein the support structures electrically interconnect the chips. Various embodiments disclose a structure and method for interconnecting a plurality of generally planar chips in a vertical stack such that common signals are connected in the stack and individually-accessed signals are separated within the stack.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: March 8, 2011
    Assignee: STEC, Inc.
    Inventor: Mark Moshayedi
  • Patent number: 7902595
    Abstract: In one embodiment of the present invention, a power IC device is disclosed containing a power MOS transistor with a low ON resistance and a surface channel MOS transistor with a high operation speed. There is also provided a method of manufacturing such a device. A chip has a surface of which the planar direction is not less than ?8° and not more than +8° off a silicon crystal face. The p-channel trench power MOS transistor includes a trench formed vertically from the surface of the chip, a gate region in the trench, an inversion channel region on a side wall of the trench, a source region in a surface layer of the chip, and a drain region in a back surface layer of the chip. The surface channel MOS transistor has an inversion channel region fabricated so that an inversion channel current flows in a direction not less than ?8° and not more than +8° off the silicon crystal direction.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: March 8, 2011
    Assignees: Sharp Kabushiki Kaisha, National University Corporation Tohoku University, Yazaki Corporation
    Inventors: Alberto O. Adan, Mitsuhiro Kikuta, Akinobu Teramoto, Tadahiro Ohmi, Hiroo Yabe, Takanori Watanabe
  • Patent number: 7898080
    Abstract: A power semiconductor device has a power field effect transistors connected in a bridge circuit (16), parallel circuit or series circuit (18), the power semiconductor device (30) having a base power semiconductor chip (1) with large-area external contacts (S1, D1) on the top side (31) and rear side (32) and carrying at least one stacked power semiconductor chip (2). The stacked power semiconductor chip (2) is surface-mounted with at least one large-area external electrode (D2) on a correspondingly large-area external electrode (S1) of the top side (31) of the base power semiconductor chip (1). At least one metallic structured spacer (33) is arranged between the surface-mounted external electrodes (S1, D2) of the base power semiconductor chip (1) and the stacked power semiconductor chip (2). The structure of the spacer (33) has at least one cutout (34) for a non-surface-mountable connecting element (35) of the base power semiconductor chip (1).
    Type: Grant
    Filed: August 16, 2006
    Date of Patent: March 1, 2011
    Assignee: Infineon Technologies AG
    Inventor: Ralf Otremba
  • Patent number: 7892904
    Abstract: A semiconductor device with an amorphous silicon (a-Si) metal-oxide-nitride-oxide-silicon (MONOS) or metal-aluminum oxide-silicon (MAS) memory cell structure with one-time programmable (OTP) function. The device includes a substrate, a first dielectric layer overlying the substrate, and one or more source or drain regions embedded in the first dielectric layer with a co-planar surface of n-type a-Si and the first dielectric layer. Additionally, the device includes a p-i-n a-Si diode junction. The device further includes a second dielectric layer on the a-Si p-i-n diode junction and a metal control gate overlying the second dielectric layer. Optionally the device with OTP function includes a conductive path formed between n-type a-Si layer and the metal control gate. A method of making the same memory cell structure is provided and can be repeated to integrate the structure three-dimensionally.
    Type: Grant
    Filed: October 27, 2008
    Date of Patent: February 22, 2011
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Mieno Fumitake
  • Patent number: 7888174
    Abstract: An embedded chip package process is disclosed. First, a first substrate having a first patterned circuit layer thereon is provided. Then, a first chip is disposed on the first patterned circuit layer and electrically connected to the first patterned circuit layer. A second substrate having a second patterned circuit layer thereon is provided. A second chip is disposed on the second patterned circuit layer and electrically connected to the second patterned circuit layer. Afterwards, a dielectric material layer is formed and covers the first chip and the first patterned circuit layer. Then, a compression process is performed to cover the second substrate over the dielectric material layer so that the second patterned circuit layer and the second chip on the second substrate are embedded into the dielectric material layer.
    Type: Grant
    Filed: September 21, 2008
    Date of Patent: February 15, 2011
    Assignee: Unimicron Technology Corp.
    Inventor: David C. H. Cheng
  • Patent number: 7884459
    Abstract: A semiconductor device is provided that forms a three-dimensional semiconductor device having semiconductor devices stacked on one another. In this semiconductor device, a hole is formed in a silicon semiconductor substrate that has an integrated circuit unit and an electrode pad formed on a principal surface on the outer side. The hole is formed by etching, with the electrode pad serving as an etching stopper layer. An embedded electrode is formed in the hole. This embedded electrode serves to electrically lead the electrode pad to the principal surface on the bottom side of the silicon semiconductor substrate.
    Type: Grant
    Filed: September 15, 2008
    Date of Patent: February 8, 2011
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Eiji Yoshida, Takao Ohno, Yoshito Akutagawa, Koji Sawahata, Masataka Mizukoshi, Takao Nishimura, Akira Takashima, Mitsuhisa Watanabe
  • Patent number: 7867824
    Abstract: Methods of fabricating a tiled transducer array are disclosed. Embodiments of the methods include fabricating a wafer comprising a plurality of transducers, dicing the wafer to form individual transducers, testing the individual transducers to identify a plurality of known good transducers, preparing a substrate having a front side and a backside wherein the backside of the substrate comprises a plurality of connectors, positioning the plurality of known good transducers on the front side of the substrate and aligning the plurality of transducers in a horizontal direction and a vertical direction to form a transducer array, and electrically coupling the connectors on the substrate to the plurality of known good transducers, wherein the connectors are arranged such that each of the plurality of known good transducers may be electrically coupled to an electronic device disposed on the backside of the substrate, through a respective one or more of the plurality of connectors.
    Type: Grant
    Filed: May 8, 2008
    Date of Patent: January 11, 2011
    Assignee: General Electric Company
    Inventors: Rayette Ann Fisher, William Edward Burdick, Jr., James Wilson Rose
  • Patent number: 7867819
    Abstract: A semiconductor package including a plurality of stacked semiconductor die, and methods of forming the semiconductor package, are disclosed. In order to ease wirebonding requirements on the controller die, the controller die may be mounted directly to the substrate in a flip chip arrangement requiring no wire bonds or footprint outside of the controller die. Thereafter, a spacer layer may be affixed to the substrate around the controller die to provide a level surface on which to mount one or more flash memory die. The spacer layer may be provided in a variety of different configurations.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: January 11, 2011
    Assignee: SanDisk Corporation
    Inventors: Suresh Upadhyayula, Hem Takiar
  • Patent number: 7863100
    Abstract: A method of manufacture of an integrated circuit packaging system includes: forming a base package having a base interposer; forming an intermediate package having an intermediate interposer and an intermediate package embedded link trace, the intermediate package embedded link trace being encapsulated in an intermediate package mold compound; forming a cap package having a cap interposer; and connecting the intermediate package to the cap package and the base package using the intermediate package embedded link trace.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: January 4, 2011
    Assignee: Stats Chippac Ltd.
    Inventors: Joungln Yang, Dongjin Jung, DongSam Park
  • Patent number: 7847415
    Abstract: A multichip module assembly includes a chipset of at least two chips. The chips have active sides, rear sides and chip contacts on their active sides adjacent each other and are embedded in a polymer matrix in a symmetrical manner relating to the top and the bottom surface of the chipset. Chip contacts are electrically connected by through polymer connectors that each extend from a chip contact to a surface of the polymer matrix. A film wiring line is arranged on a side of the polymer matrix for electrical connection of two through polymer connectors of two chips or a through polymer connector with an interconnect element arranged on a side of the polymer matrix.
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: December 7, 2010
    Assignee: Qimonda AG
    Inventors: Harry Hedler, Roland Irsigler
  • Patent number: 7847382
    Abstract: A method of manufacture of an integrated circuit packaging system includes: forming an encapsulation surrounding an integrated circuit having an inactive side and an active side exposed; forming a hole through the encapsulation with the hole not exposing the integrated circuit; forming a through conductor in the hole; and mounting a substrate with the integrated circuit surrounded by the encapsulation with the active side facing the substrate.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: December 7, 2010
    Assignee: Stats Chippac Ltd.
    Inventors: Reza Argenty Pagaila, Byung Tai Do
  • Patent number: 7847384
    Abstract: A semiconductor package 100 is constructed of a semiconductor chip 110, a sealing resin 106 for sealing this semiconductor chip 110, and wiring 105 formed inside the sealing resin 106. And, the wiring 105 is constructed of pattern wiring 105b connected to the semiconductor chip 110 and also formed so as to be exposed to a lower surface 106b of the sealing resin 106, and a post part 105a formed so as to extend in a thickness direction of the sealing resin 106, the post part in which one end is connected to the pattern wiring 105b and also the other end is formed so as to be exposed to an upper surface 106a of the sealing resin 106.
    Type: Grant
    Filed: August 17, 2006
    Date of Patent: December 7, 2010
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Tsuyoshi Kobayashi, Tetsuya Koyama, Takaharu Yamano
  • Patent number: 7829379
    Abstract: A method of manufacturing semiconductor devices by applying a pattern of adhesive pads on an active surface of a semiconductor wafer, the semiconductor wafer product so made and a stacked die package in which an adhesive wall leaves an air gap atop a bottom die. The wall may be in the form of a ring of adhesive about a central hollow area. The wafer carrying the pattern of adhesive pads on its active surface is singulated into individual dies, each die having an adhesive pad thereon. The bottom die is attached to a base with an adhesive which cures without curing the adhesive pad.
    Type: Grant
    Filed: October 17, 2007
    Date of Patent: November 9, 2010
    Assignee: Analog Devices, Inc.
    Inventor: Thomas M. Goida
  • Patent number: 7824971
    Abstract: A semiconductor device includes a PMOS transistor of a peripheral circuit region. The PMOS transistor is formed over a silicon germanium layer to have a compressive strain structure, thereby increasing hole mobility of a channel region in operation of the device. The semiconductor device may include a second active region including a silicon layer connected to a first active region of a semiconductor substrate, a silicon germanium layer formed over the silicon layer expected to be a PMOS region, and a PMOS gate formed over the silicon germanium layer.
    Type: Grant
    Filed: June 6, 2008
    Date of Patent: November 2, 2010
    Assignee: Hynix Semiconductor Inc.
    Inventor: Yun Taek Hwang
  • Patent number: 7821122
    Abstract: A method and system for fabricating a interconnect substrate for a multi-component package is disclosed. The multi-component package includes at least one die and a package substrate. The method and system include providing an insulating base and providing at least one conductive layer. The at least one conductive layer provides interconnects for at least one discrete component. The interconnect substrate is configured to be mounted on the at least one die and to have the at least one discrete component mounted on the interconnect substrate.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: October 26, 2010
    Assignee: Atmel Corporation
    Inventor: Ken Lam
  • Publication number: 20100244186
    Abstract: A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of stacked component units stacked in a first direction, each of the stacked component units including a first conducting film made of a semiconductor of a first conductivity type provided perpendicular to the first direction and a first insulating film stacked in the first direction with the first conducting film; a semiconductor pillar piercing the stacked structural unit in the first direction and including a conducting region of a second conductivity type, the semiconductor pillar including a first region opposing each of the first conducting films, and a second region provided between the first regions with respect to the first direction, the second region having a resistance different from a resistance of the first region; and a second insulating film provided between the semiconductor pillar and the first conducting film.
    Type: Application
    Filed: March 12, 2010
    Publication date: September 30, 2010
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Ryota KATSUMATA, Masaru KITO, Yoshiaki FUKUZUMI, Masaru KIDOH, Hiroyasu TANAKA, Yosuke KOMORI, Megumi ISHIDUKI, Hideaki AOCHI, Ryouhei KIRISAWA, Junya MATSUNAMI, Tomoko FUJIWARA
  • Patent number: 7795651
    Abstract: A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.
    Type: Grant
    Filed: February 1, 2008
    Date of Patent: September 14, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-Hun Jeong, Ki-Nam Kim, Soon-Moon Jung, Jae-Hoon Jang
  • Patent number: 7795716
    Abstract: An RF/microwave circuit is configured to eliminate the physical constraint that requires a sacrifice of one output series inductor wirebond for each shunt inductor wirebond. The circuit employs a multi-level metalized substrate as part of its output impedance matching network. The lower level of the multi-level substrate serves as an intermediate connection point for the output series inductor wirebonds as it extends from the output terminal of an active device to an output metallization pad. The upper level of the multi-level substrate serves to support a DC block capacitor and as an intermediate connection point for the shunt inductor wirebonds. The multi-level substrate allows the series inductor wirebonds to be positioned at a lower height, and the shunt inductor wirebonds at a greater height. Because they are at different heights, the physical constraint of sacrificing a series wirebond per a shunt inductor wirebond can be eliminated.
    Type: Grant
    Filed: March 21, 2008
    Date of Patent: September 14, 2010
    Assignee: Integra Technologies, Inc.
    Inventors: Jeffrey A. Burger, Fouad F. Boueri
  • Publication number: 20100227440
    Abstract: A phase change memory device resistant to stack pattern collapse is presented. The phase change memory device includes a silicon substrate, switching elements, heaters, stack patterns, bit lines and word lines. The silicon substrate has a plurality of active areas. The switching elements are connected to the active areas. The heaters are connected to the switching elements. The stack patterns are connected to the heaters. The bit lines are connected to the stack patterns. The word lines are connected to the active areas of the silicon substrate.
    Type: Application
    Filed: May 18, 2010
    Publication date: September 9, 2010
    Applicant: HYNIX SEMICONDUCTOR INC.
    Inventor: Heon Yong CHANG
  • Publication number: 20100219392
    Abstract: A three-dimensional memory cell array of memory cells with two terminals having a variable resistive element is formed such that: one ends of memory cells adjacent in Z direction are connected to one of middle selection lines extending in Z direction aligned in X and Y directions; the other ends of the memory cells located at the same point in Z direction are connected to one of third selection lines aligned in Z direction; a two-dimensional array where selection transistors are aligned in X and Y directions is adjacent to the memory cell array in Z direction; gates of selection transistors adjacent in X direction, drains of selection transistors adjacent in Y direction and sources of selection transistors are connected to same first selection line, second selection line, and different middle selection lines, respectively; and first, second and third selection lines are connected to X, Y and Z decoders, respectively.
    Type: Application
    Filed: February 26, 2010
    Publication date: September 2, 2010
    Inventors: Nobuyoshi Awaya, Yoshiji Ohta, Yoshiaki Tabuchi
  • Patent number: 7767494
    Abstract: A manufacturing method for a layered chip package including a stack of a plurality of layer portions includes the steps of: fabricating a layered substructure by stacking a plurality of substructures each including a plurality of layer portions corresponding to the plurality of layer portions of the layered chip package; and fabricating a plurality of layered chip packages by using the layered substructure.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: August 3, 2010
    Assignees: Headway Technologies, Inc., TDK Corporation
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Tatsuya Harada, Nobuyuki Okuzawa, Satoru Sueki
  • Patent number: 7763915
    Abstract: The three-dimensional integrated CMOS circuit is formed in a hybrid substrate. n-MOS type transistors are formed, at a bottom level, in a first semi-conducting layer of silicon having a (100) orientation, which layer may be tension strained. p-MOS transistors are formed, at a top level, in a preferably monocrystalline and compression strained second semi-conducting layer of germanium having a (110) orientation. The second semi-conducting layer is transferred onto a first block in which the n-MOS transistors were previously formed, and the p-MOS transistors are then formed.
    Type: Grant
    Filed: January 18, 2007
    Date of Patent: July 27, 2010
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Jean-Pierre Joly, Olivier Faynot, Laurent Clavelier
  • Publication number: 20100184259
    Abstract: A method for fabricating a 3-D monolithic memory device. Silicon-oxynitride (SixOyNz) on amorphous carbon is used an effective, easily removable hard mask with high selectivity to silicon, oxide, and tungsten. A silicon-oxynitride layer is etched using a photoresist layer, and the resulting etched SixOyNz layer is used to etch an amorphous carbon layer. Silicon, oxide, and/or tungsten layers are etched using the amorphous carbon layer. In one implementation, conductive rails of the 3-D monolithic memory device are formed by etching an oxide layer such as silicon dioxide (SiO2) using the patterned amorphous carbon layer as a hard mask. Memory cell diodes are formed as pillars in polysilicon between the conductive rails by etching a polysilicon layer using another patterned amorphous carbon layer as a hard mask. Additional levels of conductive rails and memory cell diodes are formed similarly to build the 3-D monolithic memory device.
    Type: Application
    Filed: March 30, 2010
    Publication date: July 22, 2010
    Inventors: Steven J. Radigan, Michael W. Konevecki
  • Publication number: 20100176368
    Abstract: A method of manufacturing semiconductor memory device comprises forming a first wiring layer and a memory cell layer above a semiconductor substrate; forming a plurality of first trenches extending in a first direction in the first wiring layer and the memory cell layer, thereby forming first wirings and separating the memory cell layer; burying a first interlayer film in the first trenches to form a stacked body; forming a second wiring layer above the stacked body; forming a plurality of second trenches, extending in a second direction intersecting the first direction and reaching an upper surface of the first interlayer film in depth, in the first stacked body with the second wiring layer formed thereabove, thereby forming second wirings; removing the first interlayer film isotropically; and digging the second trenches down to an upper surface of the first wirings, thereby forming memory cells.
    Type: Application
    Filed: November 19, 2009
    Publication date: July 15, 2010
    Inventors: Nikka KO, Tomoya Satonaka, Katsunori Yahashi
  • Publication number: 20100171162
    Abstract: Each of memory strings comprising: a first semiconductor layer having a pair of columnar portions extending in a vertical direction to a substrate and a joining portion formed to join lower ends of the pair of columnar portions; an electric charge accumulation layer formed to surround a side surface of the first semiconductor layer; and a first conductive layer formed to surround a side surface of the electric charge accumulation layer. The columnar portions are aligned at a first pitch in a first direction orthogonal to the vertical direction, and arranged in a staggered pattern at a second pitch in a second direction orthogonal to the vertical and first directions. The first conductive layers are configured to be arranged at the first pitch in the first direction, and extend to curve in a wave-like fashion in the second direction along the staggered-pattern arrangement.
    Type: Application
    Filed: December 28, 2009
    Publication date: July 8, 2010
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Ryota KATSUMATA, Hideaki AOCHI, Masaru KITO, Hiroyasu TANAKA, Megumi ISHIDUKI, Yosuke KOMORI, Masaru KIDOH, Yoshiaki FUKUZUMI
  • Publication number: 20100173453
    Abstract: A Three-Dimensional Structure (3DS) Memory allows for physical separation of the memory circuits and the control logic circuit onto different layers such that each layer may be separately optimized. One control logic circuit suffices for several memory circuits, reducing cost. Fabrication of 3DS memory involves thinning of the memory circuit to less than 50 ?m in thickness and bonding the circuit to a circuit stack while still in wafer substrate form. Fine-grain high density inter-layer vertical bus connections are used. The 3DS memory manufacturing method enables several performance and physical size efficiencies, and is implemented with established semiconductor processing techniques.
    Type: Application
    Filed: July 4, 2009
    Publication date: July 8, 2010
    Inventor: Glenn J. Leedy
  • Publication number: 20100171195
    Abstract: Provided are a thin film silicon wafer having high gettering capability, a manufacturing method therefor, a multi-layered silicon wafer formed by laminating the thin film silicon wafers, and a manufacturing method therefor. The thin film silicon wafer is manufactured by: forming one or more gettering layers immediately below a device layer which is formed in a vicinity of a front surface of a semiconductor silicon wafer; fabricating a device in the device layer of the semiconductor silicon wafer; and after the device has been fabricated, removing part of the semiconductor silicon wafer from a rear surface thereof to immediately below the gettering layers so as to leave at least one of the gettering layers in place. As a result, the thin film silicon wafer is allowed to have gettering capability even after having been reduced in thickness to be in a thin film form.
    Type: Application
    Filed: June 4, 2008
    Publication date: July 8, 2010
    Applicant: SHIN-ETSU HANDOTAI CO., LTD
    Inventors: Satoshi Tobe, Takao Takenaka
  • Publication number: 20100172113
    Abstract: An apparatus and methods for packaging semiconductor devices are disclosed. The apparatus is applicable to many types of contemporary packaging schemes that utilize a sacrificial metal base strip. Tunnels formed through an encapsulation area surrounding the device and associated bond wires are filled with a metallic conductor by, for example, electroplating, and extend bottom contact pads to an uppermost portion of the encapsulated area. The sacrificial metal base strip serves as a plating bus and is etch-removed after plating. The filled tunnels allow components to be stacked in a three-dimensional configuration.
    Type: Application
    Filed: January 6, 2010
    Publication date: July 8, 2010
    Applicant: Atmel Corporation
    Inventor: Ken M. Lam
  • Publication number: 20100167467
    Abstract: At least three or more plurality of chips are stacked to form a three-dimensional integrated circuit. When the plurality of chips are stacked, at least two or more of three stacking methods are used which are a wafer-to-wafer stacking method that bonds together the mutually corresponding chips each on a wafer level, a chip-to-wafer stacking method that bonds together the mutually corresponding chips including one on a chip level and the other on a wafer level, and a chip-to-chip stacking method that bonds together the mutually corresponding chips each on a chip level.
    Type: Application
    Filed: March 10, 2010
    Publication date: July 1, 2010
    Applicant: PANASONIC CORPORATION
    Inventor: Nobuo AOI
  • Patent number: 7741644
    Abstract: A semiconductor device includes a first semiconductor layer, a first interlayer insulation layer, a second semiconductor layer, and a gate pattern. The first interlayer insulation layer covers the first semiconductor layer. The second semiconductor layer is formed on the first interlayer insulation layer and includes source regions, drain regions, and a channel region interposed between the source region and the drain region. The gate pattern includes a gate insulation layer on the channel region of the second semiconductor layer. At least one of the source regions and the drain regions includes an elevated layer having a top surface higher than that of the channel region.
    Type: Grant
    Filed: February 8, 2007
    Date of Patent: June 22, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gyu-Ho Lyu, Seug-Gyu Kim
  • Publication number: 20100148341
    Abstract: A semiconductor device includes: a sensor including a sensor structure on a first side of the sensor and a periphery element surrounding the sensor structure; and a cap covering the sensor structure and having a second side bonded to the first side of the sensor. The cap includes a first wiring layer on the second side of the cap. The first wiring layer steps over the periphery element. The sensor further includes a sensor side connection portion, and the cap further includes a cap side connection portion. The sensor side connection portion is bonded to the cap side connection portion. At least one of the sensor side connection portion and the cap side connection portion provides an eutectic alloy so that the sensor side connection portion and the cap side connection portion are bonded to each other.
    Type: Application
    Filed: December 10, 2009
    Publication date: June 17, 2010
    Applicant: DENSO CORPORATION
    Inventors: Tetsuo Fuji, Akitoshi Yamanaka, Hisanori Yokura
  • Patent number: 7727835
    Abstract: The present invention is directed to an SOI device with charging protection and methods of making same. In one illustrative embodiment, a device is formed on an SOI substrate including a bulk substrate, a buried insulation layer and an active layer. The device includes a transistor formed in an isolated portion of the active layer, the transistor including a gate electrode and a source region. The device further includes a first conductive bulk substrate contact extending through the active layer and the buried insulation layer, the first conductive bulk substrate contact being conductively coupled to the source region and the bulk substrate, and a second conductive bulk substrate contact extending through the active layer and the buried insulation layer, the second conductive bulk substrate being conductively coupled to the gate electrode and the bulk substrate.
    Type: Grant
    Filed: August 19, 2008
    Date of Patent: June 1, 2010
    Assignee: Advanced Micro Devices, Inc.
    Inventors: David D. Wu, Jingrong Zhou
  • Patent number: 7723836
    Abstract: A chip stack structure having a shielding capability may comprise a wiring substrate, the wiring substrate including a ground layer. The structure may also comprise a first chip attached on an upper surface of the wiring substrate and electrically connected to the ground layer. The structure may also comprise a plurality of first bonding wires which electrically connect the first chip to the wiring substrate. The structure may also comprise a shield plate attached to the first chip and detached from at least one of the plurality of first bonding wires, the shield plate being configured to cover the first chip and at least one of the plurality of first bonding wires. The structure may also comprise a grounding wire which connects the shield plate to the ground layer of the wiring substrate. The structure may also comprise a second chip attached to and supported by the shield plate.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: May 25, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Houng-Kyu Kwon, Jeong-O Ha
  • Patent number: 7713805
    Abstract: A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film and an edge portion of the gate electrode is rounded and oxidized.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: May 11, 2010
    Assignee: DENSO CORPORATION
    Inventors: Hiroki Nakamura, Hiroyuki Ichikawa, Eiichi Okuno
  • Publication number: 20100093131
    Abstract: A bonding apparatus (10) that bonds an electrode of a semiconductor die (12) and an electrode of a circuit board (19) using a metal nano paste includes a bump formation mechanism (20) that forms bump by injecting microdroplets of a metal nano paste on each electrode, a primary bonding mechanism (50) that carries out primary bonding to the electrodes in a non-conductive state by pressing the bump of the semiconductor die (12) against the bump of the circuit board (19), and a secondary bonding mechanism (80) that carries out secondary bonding so that the electrodes become conductive by pressurizing the primary bonded bump in bonding direction and by heating the bump to pressurize and sinter the metal nanoparticles in the bump. With this, it is possible to efficiently bond the electrodes with a simple and easy way while reducing a bonding load.
    Type: Application
    Filed: February 26, 2008
    Publication date: April 15, 2010
    Applicant: SHINKAWA LTD.
    Inventor: Toru Maeda
  • Patent number: 7696616
    Abstract: A stacked type semiconductor device includes semiconductor devices, interposers by which the semiconductor devices are stacked, the interposers having electrodes provided on sides thereof, and a connection substrate connecting the electrodes together. The electrodes provided on the sides of the interposers may be connected to the connection substrate by one of an electrically conductive adhesive or an anisotropically conductive film.
    Type: Grant
    Filed: January 25, 2006
    Date of Patent: April 13, 2010
    Assignee: Spansion LLC
    Inventors: Yasuhiro Shinma, Masanori Onodera, Kouichi Meguro, Koji Taya, Junji Tanaka, Junichi Kasai
  • Publication number: 20100078793
    Abstract: A semiconductor device is formed of two or more dice of similar dimensions and bond pad arrangements, in which bond pads are located in fields along less than three edges of the active surface of each die. A first die is attached to a substrate and subsequent die or dice are attached in a vertical sequence atop the first die, each in an offset configuration from the next lower die to expose the bond pads thereof for conductive bonding to metallization of the substrate. The multiple chip device permits a plurality of dice to be stacked in a high-density low-profile device. A particularly useful application is the formation of stacked mass storage flash memory package.
    Type: Application
    Filed: December 4, 2009
    Publication date: April 1, 2010
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Leonard E. Mess, Jerry M. Brooks, David J. Corisis
  • Patent number: 7683436
    Abstract: A semiconductor device according to an embodiment of the present invention includes: a square pole-shaped channel portion made from a first semiconductor layer formed on a substrate, and surrounded with four side faces; a gate electrode formed on a first side face of the channel portion, and a second side face of the channel portion opposite to the first side face through respective gate insulating films; a source region having a conductivity type different from that of the channel portion and being formed on a third side face of the channel portion, the source region including a second semiconductor layer having a lattice constant different from that of the first semiconductor layer and being formed directly on the substrate; and a drain region having a conductivity type different from that of the channel portion and being formed on a fourth side face of the channel portion opposite to the third side face, the drain region including the second semiconductor layer being formed directly on the substrate.
    Type: Grant
    Filed: April 26, 2007
    Date of Patent: March 23, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Nobuyasu Nishiyama, Katsunori Yahashi
  • Patent number: 7679179
    Abstract: Systems and methods for packaging integrated circuit chips in castellation wafer level packaging are provided. The active circuit areas of the chips are coupled to castellation blocks and, depending on the embodiment, input/output pads. The castellation blocks and input/output pads are encapsulated and held in place by an encapsulant. When the devices are being fabricated, the castellation blocks and input/output pads are sawed through. If necessary, the wafer portion on which the devices are fabricated may be thinned. The packages may be used as a leadless chip carrier package or may be stacked on top of one another. When stacked, the respective contacts of the packages are preferably coupled. Data may be written to, and received from, packaged chips when a chip is activated. Chips may be activated by applying the appropriate signal or signals to the appropriate contact or contacts.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: March 16, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Boon Suan Jeung, Chia Yong Poo, Low Siu Waf, Eng Meow Koon, Chua Swee Kwang, Huang Shuang Wu, Neo Yong Loo, Zhou Wei
  • Publication number: 20100052129
    Abstract: Manufacturing method and a multi-chip package, which comprises a conductor pattern (1) and insulation (2), and, inside the insulation, a first component (3), the contact terminals (4) of which face towards the conductor pattern (1) and are conductively connected to the conductor pattern (1). The multi-chip package also comprises inside the insulation (2) a second semiconductor chip (13), the contact terminals (14) of which face towards the same conductor pattern (1) and are conductively connected through contact elements (15) to this conductor pattern (1). The semiconductor chips are located in such a way that the first semiconductor chip (3) is located between the second semiconductor chip (13) and the conductor pattern (1).
    Type: Application
    Filed: July 21, 2009
    Publication date: March 4, 2010
    Inventors: Antti IIHOLA, Risto TUOMINEN
  • Patent number: 7671459
    Abstract: Stacked microelectronic devices and methods for manufacturing such devices are disclosed herein. In one embodiment, a stacked microelectronic device assembly can include a first known good packaged microelectronic device including a first interposer substrate. A first die and a first through-casing interconnects are electrically coupled to the first interposer substrate. A first casing at least partially encapsulates the first device such that a portion of each first interconnect is accessible at a top portion of the first casing. A second known good packaged microelectronic device is coupled to the first device in a stacked configuration. The second device can include a second interposer substrate having a plurality of second interposer pads and a second die electrically coupled to the second interposer substrate. The exposed portions of the first interconnects are electrically coupled to corresponding second interposer pads.
    Type: Grant
    Filed: May 1, 2006
    Date of Patent: March 2, 2010
    Assignee: Micron Technologies, Inc.
    Inventors: David J. Corisis, Chin Hui Chong, Choon Kuan Lee
  • Publication number: 20100032728
    Abstract: Analog ICs frequently include circuits which operate over a wide current range. At low currents, low noise is important, while IC space efficiency is important at high currents. A vertically integrated transistor made of a JFET in parallel with an MOS transistor, sharing source and drain diffused regions, and with independent gate control, is disclosed. N-channel and p-channel versions may be integrated into common analog IC flows with no extra process steps, on either monolithic substrates or SOI wafers. pinchoff voltage in the JFET is controlled by photolithographically defined spacing of the gate well regions, and hence exhibits low variability.
    Type: Application
    Filed: August 7, 2009
    Publication date: February 11, 2010
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Pinghai HAO, Marie DENISON
  • Patent number: 7626252
    Abstract: A multi-chip electronic package comprised of a plurality of integrated circuit chips secured together in a stack formation. The chip stack is hermetically sealed in an enclosure. The enclosure comprises a pressurized, thermally conductive fluid, which is utilized for cooling the enclosed chip stack. A process and structure is proposed that allows for densely-packed, multi-chip electronic packages to be manufactured with improved heat dissipation efficiency, thus improving the performance and reliability of the multi-chip electronic package.
    Type: Grant
    Filed: December 13, 2005
    Date of Patent: December 1, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Jerome M. Eldridge
  • Patent number: 7615856
    Abstract: An integrated antenna type circuit apparatus which provides excellent circuit characteristics while suppressing an increase in packaging area. The integrated antenna type circuit apparatus includes an insulating base, a semiconductor circuit device, chip parts, a molding resin, an antenna conductor, a ground conductor, and external lead electrodes. The plurality of chip parts are mounted on the insulating base, and are soldered to electrodes of wiring conductors on the top of the insulating base for electric and physical connection. The insulating base has a multilayer structure, being formed by laminating a plurality of insulator layers. The antenna conductor is formed on the bottom of the insulating base. A wiring conductor adjacent to the antenna conductor is provided with the ground conductor so that it overlaps with the antenna conductor.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: November 10, 2009
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Atsushi Sakai, Ryosuke Usui, Yasunori Inoue
  • Publication number: 20090273022
    Abstract: A monolithic three dimensional memory array is formed by a method that includes forming a first memory level above a substrate by i) forming a plurality of first substantially parallel conductors extending in a first direction, ii) forming first pillars above the first conductors, each first pillar comprising a first conductive layer or layerstack above a vertically oriented diode, the first pillars formed in a single photolithography step, iii) depositing a first dielectric layer above the first pillars, and iv) etching a plurality of substantially parallel first trenches in the first dielectric layer, the first trenches extending in a second direction, wherein, after the etching step, the lowest point in the trenches is above the lowest point of the first conductive layer or layerstack, wherein the first conductive layer or layerstack does not comprise a resistivity-switching metal oxide or nitride. The method also includes monolithically forming a second memory level above the first memory level.
    Type: Application
    Filed: July 14, 2009
    Publication date: November 5, 2009
    Applicant: SanDisk 3D LLC
    Inventors: Steven J. Radigan, Usha Raghuram, Samuel V. Dunton, Michael W. Konevecki
  • Patent number: 7608918
    Abstract: A semiconductor device is provided which comprises a heat-radiative support plate 5; and first and second semiconductor elements 1 and 2 mounted and layered on support plate 5 for alternate switching of first and second semiconductor elements 1 and 2. The arrangement of piling and securing first and second semiconductor elements 1 and 2 on support plate 5 improves integration degree of semiconductor elements 1 and 2, and reduces the occupation area on support plate 5. Alternate switching of first and second semiconductor elements 1 and 2 controls heat produced from first and second semiconductor elements 1 and 2 because one of first and second semiconductor elements 1 and 2 is turned on, while the other is turned off.
    Type: Grant
    Filed: May 27, 2004
    Date of Patent: October 27, 2009
    Assignee: Sanken Electric Co., Ltd.
    Inventor: Masaki Kanazawa
  • Publication number: 20090253257
    Abstract: A nonvolatile memory device includes a semiconductor substrate having a first well region of a first conductivity type, and at least one semiconductor layer formed on the semiconductor substrate. A first cell array is formed on the semiconductor substrate, and a second cell array formed on the semiconductor layer. The semiconductor layer includes a second well region of the first conductivity type having a doping concentration greater than a doping concentration of the first well region of the first conductivity type. As the doping concentration of the second well region is increased, a resistance difference may be reduced between the first and second well regions.
    Type: Application
    Filed: June 4, 2009
    Publication date: October 8, 2009
    Inventors: Young-Chul Jang, Ki-Nam Kim, Soon-Moon Jung, Jae-Hoon Jang