Combination Of Depletion And Enhancement Field-effect Transistors (epo) Patents (Class 257/E27.061)
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Publication number: 20120235209Abstract: According to one exemplary embodiment, a rectifier circuit includes a diode. A first depletion-mode transistor is connected to a cathode of the diode. Also, at least one second depletion-mode transistor is in parallel with the first depletion-mode transistor and is configured to supply a pre-determined current range to a cathode of the diode. A pinch off voltage of the at least one second depletion-mode transistor can be more negative than a pinch off voltage of the first depletion-mode transistor and the at least one second depletion-mode transistor can be configured to supply the pre-determined current range while the first depletion-mode transistor is OFF. Also, the pre-determined current range can be greater than a leakage current of the first depletion-mode transistor.Type: ApplicationFiled: November 3, 2011Publication date: September 20, 2012Applicant: INTERNATIONAL RECTIFIER CORPORATIONInventors: Michael A. Briere, Naresh Thapar
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Publication number: 20120235247Abstract: A method of forming an integrated circuit (IC) includes forming a first and second plurality of spacers on a substrate, wherein the substrate includes a silicon layer, and wherein the first plurality of spacers have a thickness that is different from a thickness of the second plurality of spacers; and etching the silicon layer in the substrate using the first and second plurality of spacers as a mask, wherein the etched silicon layer forms a first plurality and a second plurality of fin field effect transistor (FINFET) channel regions, and wherein the first plurality of FINFET channel regions each have a respective thickness that corresponds to the thickness of the first plurality of spacers, and wherein the second plurality of FINFET channel regions each have a respective thickness that corresponds to the thickness of the second plurality of spacers.Type: ApplicationFiled: March 17, 2011Publication date: September 20, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ming Cai, Dechao Guo, Chung-hsun Lin, Chun-chen Yeh
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Publication number: 20120228721Abstract: In a gate electrode (40) provided on a gate insulating film (30), a depletion layer (42) is formed at a junction surface between a P-type semiconductor layer (41) and a gate insulating film (30). Since a region of the depletion layer (42) inside the gate electrode (40) changes due to temperature change, inducing a change in an effect of a gate voltage to channel formation, a threshold voltage changes to a larger extent than in a case of a typical MOS transistor. This is used to control the MOS transistor to have a desired temperature characteristic. A temperature compensation circuit may be eliminated and the circuit scale may be reduced.Type: ApplicationFiled: March 8, 2012Publication date: September 13, 2012Inventor: Hideo YOSHINO
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Patent number: 8247874Abstract: A depletion transistor includes a source region and a drain region of a first conductivity type, a channel region of the first conductivity type arranged between the source region and the drain region and a first gate electrode arranged adjacent the channel region and dielectrically insulated from the channel region by a gate dielectric. The depletion transistor further includes a first discharge region of a second conductivity type arranged adjacent the gate dielectric and electrically coupled to a terminal for a reference potential. The depletion transistor can be included in a charging circuit.Type: GrantFiled: August 26, 2010Date of Patent: August 21, 2012Assignee: Infineon Technologies Austria AGInventors: Franz Hirler, Anton Mauder, Joachim Weyers, Frank Pfirsch
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Patent number: 8242550Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. A preferred embodiment includes providing a workpiece having a first orientation and at least one second orientation. The semiconductor device is implanted with a dopant species using a first implantation process in the first orientation of the workpiece. The semiconductor device is implanted with the dopant species using a second implantation process in the at least one second orientation of the workpiece, wherein the second implantation process is different than the first implantation process.Type: GrantFiled: July 2, 2010Date of Patent: August 14, 2012Assignee: Infineon Technologies AGInventors: Thomas Schiml, Manfred Eller
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Publication number: 20120199896Abstract: According to one embodiment, a non-volatile semiconductor memory device includes a plurality of memory cells and a transistor. The transistor includes a gate insulating film, a gate electrode on the gate insulating film, a sidewall insulating film on both side surfaces of the gate electrode, a source diffusion layer corresponding to the sidewall insulating film, a first hollow formed in a position at a height less than a bottom surface of the gate insulating film directly below an outer side surface of the sidewall insulating film of another side of the gate electrode, a second hollow formed in the first hollow at a position at a height less than the first hollow, and a drain diffusion layer corresponding to another side of the gate electrode and including a low-concentration drain region formed on a bottom surface of the second hollow and a high-concentration drain region.Type: ApplicationFiled: September 16, 2011Publication date: August 9, 2012Inventors: Mitsuhiro NOGUCHI, Hiroyuki Kutsukake, Masato Endo
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Patent number: 8237219Abstract: A semiconductor device includes a first transistor including a first source/drain region and a first sidewall spacer, and a second transistor including a second source/drain region and a second sidewall spacer, the first sidewall spacer has a first width and the second sidewall spacer has a second width wider than the first width, and the first source/drain region has a first area and the second source/drain region has a second area larger than the first area.Type: GrantFiled: September 8, 2010Date of Patent: August 7, 2012Assignee: Fujitsu Semiconductor LimitedInventors: Akihiro Usujima, Shigeo Satoh
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Patent number: 8237230Abstract: Provided are a semiconductor device and a method of fabricating the semiconductor device. The semiconductor device can include first transistors that include a first gate insulating layer having a first thickness and second transistors include a second gate insulating layer having a second thickness less than the first thickness. At least one of the transistors formed on the first or second gate insulating layers is directly over a dummy well.Type: GrantFiled: December 4, 2009Date of Patent: August 7, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Dongyean Oh, Woon-kyung Lee
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Patent number: 8237231Abstract: A semiconductor structure with a metal gate structure includes a first type field-effect transistor having a first gate including: a high k dielectric material on a substrate, a first metal layer on the high k dielectric material layer and having a first work function, and a first aluminum layer on the first metal layer. The first aluminum layer includes an interfacial layer including aluminum, nitrogen and oxygen. The device also includes a second type field-effect transistor having a second gate including: the high k dielectric material on the substrate, a second metal layer on the high k dielectric material layer and having a second work function different from the first work function, and a second aluminum layer on the second metal layer.Type: GrantFiled: December 16, 2011Date of Patent: August 7, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo Bin Huang, Ssu-Yi Li, Ryan Chia-Jen Chen, Chi-Ming Yang, Chyi Shyuan Chern, Chin-Hsiang Lin
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Publication number: 20120193727Abstract: Sophisticated gate electrode structures may be formed by providing a cap layer including a desired species that may diffuse into the gate dielectric material prior to performing a treatment for stabilizing the sensitive gate dielectric material. In this manner, complex high-k metal gate electrode structures may be formed on the basis of reduced temperatures and doses for a threshold adjusting species compared to conventional strategies. Moreover, a single metal-containing electrode material may be deposited for both types of transistors.Type: ApplicationFiled: April 12, 2012Publication date: August 2, 2012Inventors: Richard Carter, Martin Trentzsch, Sven Beyer, Rohit Pal
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Patent number: 8232608Abstract: A semiconductor device with a high-voltage transistor and a low-voltage transistor includes an isolation insulating film between a first element region of the high-voltage transistor and a second element region of the low-voltage transistor, a first gate insulating film on a semiconductor substrate in the first element region, a first gate electrode on the first gate insulating film, a second gate insulating film on the semiconductor substrate in the second element region, and a second gate electrode on the second gate insulating film. The isolation insulating film includes a first isolation region adjacent to a surrounding area of the first element region and a second isolation region adjacent to a surrounding area of the second element region. A bottom of the second isolation region is lower than a bottom of the first isolation region. The first gate insulating film is thicker than the second gate insulating film.Type: GrantFiled: July 13, 2009Date of Patent: July 31, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Yoshiko Kato, Hiroyuki Kutsukake
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Publication number: 20120161246Abstract: A semiconductor device can output a reference voltage for an arbitrary potential and can detect the voltage of each cell in a battery including multiple cells very precisely. The device includes a depletion-type MOSFET 21 and an enhancement type MOSFET 22, and has a floating structure that isolates depletion-type MOSFET 21 and enhancement type MOSFET 22 from a ground terminal. The depletion-type MOSFET 21 and enhancement type MOSFET 22 are connected in series to each other, wherein the depletion-type MOSFET 21 is connected to high-potential-side terminal and the enhancement type MOSFET 22 is connected to low-potential-side terminal. The semiconductor device having the configuration described above is disposed in a voltage detecting circuit section in a control IC for a battery including multiple cells.Type: ApplicationFiled: February 29, 2012Publication date: June 28, 2012Applicant: FUJI ELECTRIC CO., LTD.Inventors: Masaharu YAMAJI, Akio KITAMURA
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Publication number: 20120139057Abstract: Semiconductors devices and methods of making semiconductor devices are provided. According to one embodiment, a semiconductor device, having more than two types of threshold voltages, can be employed in a logic integrated circuit with an embedded SRAM. The semiconductor device can include at least two transistors. The two transistors can be the same conductivity type (e.g., n-type or p-type). In addition, the two transistors can have disparate voltage thresholds.Type: ApplicationFiled: December 7, 2010Publication date: June 7, 2012Applicant: TOSHIBA AMERICA ELECTRONIC COMPONENTS, INC.Inventor: Masakazu Goto
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Patent number: 8178932Abstract: A semiconductor device includes a first transistor having a threshold voltage (Vth) adjusted to a first Vth by a first dopant having a first peak of concentration at a first depth; and a second transistor having the same channel-type as that of the first transistor and having a Vth adjusted to a second Vth by a second dopant having a second peak of concentration at a second depth equal to the first depth and higher concentration than the first dopant; wherein the first dopant and the second dopant are dopants comprising the same constituent element.Type: GrantFiled: January 26, 2011Date of Patent: May 15, 2012Assignee: Fujitsu Semiconductor LimitedInventor: Yoshihiro Takao
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Publication number: 20120098599Abstract: An enhancement mode (E-mode) HEMT is provided that can be used for analog and digital applications. In a specific embodiment, the HEMT can be an AlN/GaN HEMT. The subject E-mode device can be applied to high power, high voltage, high temperature applications, including but not limited to telecommunications, switches, hybrid electric vehicles, power flow control and remote sensing. According to an embodiment of the present invention, E-mode devices can be fabricated by performing an oxygen plasma treatment with respect to the gate area of the HEMT. The oxygen plasma treatment can be, for example, an O2 plasma treatment. In addition, the threshold voltage of the E-mode HEMT can be controlled by adjusting the oxygen plasma exposure time. By using a masking layer protecting regions for depletion mode (D-mode) devices, D-mode and E-mode devices can be fabricated on a same chip.Type: ApplicationFiled: June 29, 2010Publication date: April 26, 2012Applicant: Univeristy of Florida Research Foundation Inc.Inventors: Chih-Yang Chang, Fan Ren, Stephen John Pearton
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Publication number: 20120086075Abstract: A semiconductor structure with a metal gate structure includes a first type field-effect transistor having a first gate including: a high k dielectric material on a substrate, a first metal layer on the high k dielectric material layer and having a first work function, and a first aluminum layer on the first metal layer. The first aluminum layer includes an interfacial layer including aluminum, nitrogen and oxygen. The device also includes a second type field-effect transistor having a second gate including: the high k dielectric material on the substrate, a second metal layer on the high k dielectric material layer and having a second work function different from the first work function, and a second aluminum layer on the second metal layer.Type: ApplicationFiled: December 16, 2011Publication date: April 12, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo Bin HUANG, Ssu-Yi LI, Ryan Chia-Jen CHEN, Chi-Ming YANG, Chyi Shyuan CHERN, Chin-Hsiang LIN
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Patent number: 8143130Abstract: The present invention discloses a method of manufacturing a depletion metal oxide semiconductor (MOS) device. The method includes: providing a substrate; forming a first conductive type well and an isolation region in the substrate to define a device area; defining a drift region, a source, a drain, and a threshold voltage adjustment region, and implanting second conductive type impurities to form the drift region, the source, the drain, and the threshold voltage adjustment region, respectively; defining a breakdown protection region between the drain and the threshold voltage adjustment region, and implanting first conductive type impurities to form the breakdown protection region; and forming a gate in the device area; wherein a part of the breakdown protection region is below the gate, and the breakdown protection region covers an edge of the threshold voltage adjustment region.Type: GrantFiled: October 22, 2010Date of Patent: March 27, 2012Assignee: Richtek Technology Corporation, R.O.C.Inventor: Tsung-Yi Huang
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Patent number: 8138529Abstract: An electronic component includes a high voltage switching transistor encased in a package. The high voltage switching transistor comprises a source electrode, a gate electrode, and a drain electrode all on a first side of the high voltage switching transistor. The source electrode is electrically connected to a conducting structural portion of the package. Assemblies using the abovementioned transistor with another transistor can be formed, where the source of one transistor can be electrically connected to a conducting structural portion of a package containing the transistor and a drain of the second transistor is electrically connected to the second conductive structural portion of a package that houses the second transistor. Alternatively, the source of the second transistor is electrically isolated from its conductive structural portion, and the drain of the second transistor is electrically isolated from its conductive structural portion.Type: GrantFiled: November 2, 2009Date of Patent: March 20, 2012Assignee: Transphorm Inc.Inventor: Yifeng Wu
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Publication number: 20120061761Abstract: Logic transistors (MOSFETs, MISFETs) in core portions of integrated circuits can be microminiaturized by scaling operating voltage as their generation advances. However, since transistors (MOSFETs, MISFETs) in high-breakdown voltage portions operate on relatively high power supply voltage, it is difficult to reduce their size. Similarly, electrostatic discharge (ESD) protection circuits in power supply cells protect the elements in a semiconductor integrated circuit against static electricity (foreign surge); therefore, they are indispensably required to be high in breakdown voltage and call for a large area for dissipating electric charges. To microminiaturize integrated circuits, therefore, a transistor structure that enables microminiaturization is indispensable.Type: ApplicationFiled: July 19, 2011Publication date: March 15, 2012Inventors: Hideki MAKIYAMA, Toshiaki Iwamatsu
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Publication number: 20120051154Abstract: A fuse circuit includes a program unit and a sensing unit. The program unit is programmed in response to a program signal and outputs a program output signal in response to a sensing enable signal. The sensing unit outputs a sensing output signal based on the program output signal and the sensing output signal indicates whether the program unit is programmed or not. The program unit includes an anti-fuse cell, a selection transistor, a program transistor and a sensing transistor. The anti-fuse cell includes at least two anti-fuse elements which are connected in parallel and are respectively broken down at different levels of a program voltage.Type: ApplicationFiled: August 29, 2011Publication date: March 1, 2012Applicant: Samsung Electronics Co., Ltd.Inventors: Jong-Pil SON, Seong-Jin Jang, Byung-Sik Moon, Hyuck-Chai Jung, Ju-Seop Park
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Publication number: 20120049273Abstract: A depletion transistor includes a source region and a drain region of a first conductivity type, a channel region of the first conductivity type arranged between the source region and the drain region and a first gate electrode arranged adjacent the channel region and dielectrically insulated from the channel region by a gate dielectric. The depletion transistor further includes a first discharge region of a second conductivity type arranged adjacent the gate dielectric and electrically coupled to a terminal for a reference potential. The depletion transistor can be included in a charging circuit.Type: ApplicationFiled: August 26, 2010Publication date: March 1, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Franz Hirler, Anton Mauder, Joachim Weyers, Frank Pfirsch
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Publication number: 20120049293Abstract: Performance and/or uniformity of sophisticated transistors may be enhanced by incorporating a carbon species in the active regions of the transistors prior to forming complex high-k metal gate electrode structures. For example, a carbon species may be incorporated by ion implantation into the active region of a P-channel transistor and an N-channel transistor after selectively forming a threshold adjusted semiconductor material for the P-channel transistor, while the active region of the N-channel transistor is still masked.Type: ApplicationFiled: July 20, 2011Publication date: March 1, 2012Applicant: GLOBALFOUNDRIES INC.Inventors: Thilo SCHEIPER, Jan HOENTSCHEL, Steven LANGDON
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Publication number: 20120025282Abstract: In one exemplary embodiment of the invention, a semiconductor structure includes: a substrate; and a plurality of devices at least partially overlying the substrate, where the plurality of devices include a first device coupled to a second device via a first raised source/drain having a first length, where the first device is further coupled to a second raised source/drain having a second length, where the first device comprises a transistor, where the first raised source/drain and the second raised source/drain at least partially overly the substrate, where the second raised source/drain comprises a terminal electrical contact, where the second length is greater than the first length.Type: ApplicationFiled: August 2, 2010Publication date: February 2, 2012Applicant: International Business Machines CorporationInventors: Bruce B. Doris, Kangguo Cheng, Ali Khakifirooz, Pranita Kulkarni
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Publication number: 20120018813Abstract: A technique for substantially eliminating resist residues from a gate stack that includes, from bottom to top, a high k gate dielectric and a metal gate, e.g., a high k/metal gate stack, is provided. In particular and in one embodiment, a method is disclosed in which a patterned resist and optionally a patterned barrier coating are formed atop a surface of the metal gate electrode of a high k/metal gate stack prior to patterning the metal gate electrode. At least the metal gate electrode not protected by the patterned material is then etched. The presence of the barrier coating eliminates resist residues from the resultant gate stack. The technique provided can be used in fabricating planar semiconductor devices such as, for example, metal oxide semiconductor field effect transistors (MOSFETS) including complementary metal oxide semiconductor (CMOS) field effect transistors, as well as non-planar semiconductor devices such as, for example, finFETs.Type: ApplicationFiled: July 22, 2010Publication date: January 26, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Steven J. Holmes, Hemanth Jagannathan, Hiroshi Sunamura, Junli Wang
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Publication number: 20110309454Abstract: A combined packaged power semiconductor device includes a flipped top source low-side MOSFET electrically connected to a top surface of a die paddle, a first metal interconnection plate connecting between a bottom drain of a high-side MOSFET or a top source of a flipped high-side MOSFET to a bottom drain of the low-side MOSFET, and a second metal interconnection plate stacked on top of the high-side MOSFET chip. The high-side, low-side MOSFET and the IC controller can be packaged three-dimensionally that reduces the overall size of semiconductor devices and can maximize the chip's size within a package of the same size and improves the performance of the semiconductor devices. The top source of flipped low-side MOSFET is connected to the top surface of the die paddle and thus is grounded through the exposed bottom surface of die paddle, which simplifies the shape of exposed bottom surface of the die paddle and maximizes the area to facilitate heat dissipation.Type: ApplicationFiled: March 31, 2011Publication date: December 22, 2011Inventors: Yueh-Se Ho, Hamza Yilmaz, Yan Xun Xue, Jun Lu
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Patent number: 8067807Abstract: In an LCD driver IC, a high-breakdown-voltage MISFET is mounted together with a typical low-breakdown-voltage MISFET. Because the high-breakdown-voltage MISFET has a gate oxide film thicker than that of the typical MISFET, the electrode of the high-breakdown-voltage MISFET is inevitably high in level. Accordingly, the depth of a gate contact is shallow so that process compatibility with the typical portion is necessary. In the present invention, in, e.g., the channel width direction of the high-breakdown-voltage MISFET, the boundary of a thick-film gate oxide region is located inwardly of the end of a gate electrode. At the gate electrode portion thus lowered in level, a gate contact is disposed so that the boundary of the thick film is located inwardly of the end of the gate electrode and between the gate contact and a channel end.Type: GrantFiled: July 23, 2009Date of Patent: November 29, 2011Assignee: Renesas Electronics CorporationInventor: Masatoshi Taya
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Patent number: 8067788Abstract: A semiconductor device includes a substrate common to a first field effect transistor and a second field effect transistor, a channel layer of a first conductivity type formed on the substrate and common to the first and second field effect transistors, a an upper compound semiconductor layer formed on the channel layer and common to the first and second field effect transistors, a compound semiconductor region of a second conductivity type formed in the same layer as the upper compound semiconductor layer, a gate electrode of the first field effect transistor in ohmic contact with the compound semiconductor region, and a gate electrode of the second field effect transistor in Schottky contact with the upper compound semiconductor layer.Type: GrantFiled: April 2, 2008Date of Patent: November 29, 2011Assignee: Renesas Electronics CorporationInventor: Yasunori Bito
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Publication number: 20110266607Abstract: Nonvolatile memory devices include a first NAND-type string of EEPROM cells having a first plurality of string selection transistors therein electrically connected in series within the string. This first plurality of string selection transistors includes a first plurality of depletion-mode transistors and a first enhancement-mode transistor. A second NAND-type string of EEPROM cells is also provided with a second plurality of string selection transistors therein that are electrically connected in series. The second plurality of string selection transistors includes a second plurality of depletion-mode transistors and a second enhancement-mode transistor. According to these embodiments of the invention, the first enhancement-mode transistor is stacked vertically relative to one of the second plurality of depletion-mode transistors and the second enhancement-mode transistor is stacked vertically relative to one of the first plurality of depletion-mode transistors.Type: ApplicationFiled: July 12, 2011Publication date: November 3, 2011Inventors: Jae-Sung Sim, Jung-Dal Choi
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Patent number: 8035101Abstract: A transistor, a semiconductor device including the transistor and methods of manufacturing the same are provided, the transistor including a threshold voltage adjusting layer contacting a channel layer. A source electrode and a drain electrode contacting may be formed opposing ends of the channel layer. A gate electrode separated from the channel layer may be formed. A gate insulating layer may be formed between the channel layer and the gate electrode.Type: GrantFiled: April 17, 2009Date of Patent: October 11, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Sungho Park, Ihun Song, Kiha Hong
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Publication number: 20110227169Abstract: The present invention enhances voltage conversion efficiency of a semiconductor device. In a non-isolated DC-DC converter that includes a high-side switch power MOSFET and a low-side switch power MOSFET, which are series-connected, the high-side switch power MOSFET and driver circuits for driving the high-side and low-side switch power MOSFETs are formed within one semiconductor chip, whereas the low-side switch power MOSFET is formed in another semiconductor chip. The two semiconductor chips are sealed in a single package.Type: ApplicationFiled: June 2, 2011Publication date: September 22, 2011Applicant: RENESAS ELECTRONICS CORPORATIONInventors: Tomoaki UNO, Masaki SHIRAISHI, Nobuyoshi MATSUURA, Yukihiro SATOU
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Publication number: 20110210402Abstract: Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V.Type: ApplicationFiled: May 9, 2011Publication date: September 1, 2011Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Publication number: 20110204451Abstract: Disclosed is a semiconductor device manufacturing method comprising: forming an element isolation region in one principal face of a semiconductor substrate of one conductivity type; forming a gate electrode extending from an element region to the element isolation region at both sides of the element region in a first direction, both end portions of the gate electrode in the first direction being on the element isolation region and respectively including a concave portion and protruding portions at both sides of the concave portion; carrying out ion implantation of impurities of the one conductivity type from a direction tilted from a direction perpendicular to the one principal face toward the first direction so that first and second impurity implantation regions of the one conductivity type are formed in the one principal face in two end regions of the element region in the first direction.Type: ApplicationFiled: February 23, 2011Publication date: August 25, 2011Applicant: OKI SEMICONDUCTOR CO., LTD.Inventor: Eisuke SEO
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Patent number: 7989899Abstract: A transistor, an inverter including the transistor, and methods of manufacturing the inverter and the transistor. A gate insulating layer of the transistor has a charge trap region. A threshold voltage may be moved in a positive (+) direction by trapping charges in the charge trap region. The transistor may be an enhancement mode oxide thin-film transistor (TFT) and may be used as an element of the inverter.Type: GrantFiled: April 29, 2009Date of Patent: August 2, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Huaxiang Yin, Ihun Song, Sunil Kim, Youngsoo Park
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Publication number: 20110156166Abstract: The present disclosure also provides another embodiment of a method for making metal gate stacks. The method includes forming a first dummy gate and a second dummy gate on a substrate; removing a polysilicon layer from the first dummy gate, resulting in a first gate trench; forming a first metal layer and a first aluminum layer in the first gate trench; applying a chemical mechanical polishing (CMP) process to the substrate; performing an annealing process to the first aluminum layer using a nitrogen and oxygen containing gas, forming an interfacial layer of aluminum, nitrogen and oxygen on the first aluminum layer; thereafter removing the polysilicon layer from the second dummy gate, resulting in a second gate trench; and forming a second metal layer and a second aluminum layer on the second metal layer in the second gate trench.Type: ApplicationFiled: December 31, 2009Publication date: June 30, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo Bin Huang, Ssu-Yi Li, Ryan Chia-Jen Chen, Chi-Ming Yang, Chyi Shyuan Chern, Chin-Hsiang Lin
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Patent number: 7968940Abstract: Double gate IGBT having both gates referred to a cathode in which a second gate is for controlling flow of hole current. In on-state, hole current can be largely suppressed. While during switching, hole current is allowed to flow through a second channel. Incorporating a depletion-mode p-channel MOSFET having a pre-formed hole channel that is turned ON when 0V or positive voltages below a specified threshold voltage are applied between second gate and cathode, negative voltages to the gate of p-channel are not used. Providing active control of holes amount that is collected in on-state by lowering base transport factor through increasing doping and width of n well or by reducing injection efficiency through decreasing doping of deep p well. Device includes at least anode, cathode, semiconductor substrate, n? drift region, first & second gates, n+ cathode region; p+ cathode short, deep p well, n well, and pre-formed hole channel.Type: GrantFiled: September 27, 2007Date of Patent: June 28, 2011Assignee: Anpec Electronics CorporationInventor: Florin Udrea
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Patent number: 7964896Abstract: A semiconductor-containing heterostructure including, from bottom to top, a III-V compound semiconductor buffer layer, a III-V compound semiconductor channel layer, a III-V compound semiconductor barrier layer, and an optional, yet preferred, III-V compound semiconductor cap layer is provided. The barrier layer may be doped, or preferably undoped. The III-V compound semiconductor buffer layer and the III-V compound semiconductor barrier layer are comprised of materials that have a wider band gap than that of the III-V compound semiconductor channel layer. Since wide band gap materials are used for the buffer and barrier layer and a narrow band gap material is used for the channel layer, carriers are confined to the channel layer under certain gate bias range. The inventive heterostructure can be employed as a buried channel structure in a field effect transistor.Type: GrantFiled: July 28, 2008Date of Patent: June 21, 2011Assignee: International Business Machines CorporationInventors: Edward W. Kiewra, Steven J. Koester, Devendra K. Sadana, Ghavam Shahidi, Yanning Sun
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Patent number: 7964917Abstract: A semiconductor device includes a plurality of first MIS transistors and a plurality of second MIS transistors formed on a semiconductor substrate and a liner insulating film applying stress along the gate length direction. Each of the first MIS transistors includes first L-shaped sidewalls each having an L-shaped cross-sectional shape, and each of the second MIS transistors includes second L-shaped sidewalls each having an L-shaped cross-sectional shape and outer sidewalls. The minimum thickness of a part of the liner insulating film located on each of second source/drain regions of the second MIS transistor is larger than the minimum thickness of a part thereof located on each of first source/drain regions of the first MIS transistor.Type: GrantFiled: October 18, 2007Date of Patent: June 21, 2011Assignee: Panasonic CorporationInventor: Susumu Akamatsu
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Publication number: 20110115030Abstract: A semiconductor device includes: a partially depleted first transistor formed in a semiconductor layer on an insulating layer; a second transistor formed in the semiconductor layer; and a third transistor formed in the semiconductor layer, wherein the first transistor has a first gate electrode formed above the semiconductor layer via an insulating film and a first source or a first drain of a first conductivity type formed in the semiconductor layer below a side of the first gate electrode, the second transistor has a second gate electrode formed above the semiconductor layer via the insulating film and a second source or a second drain of the first conductivity type formed in the semiconductor layer below a side of the second gate electrode, the third transistor has a third gate electrode formed above the semiconductor layer via the insulating film and a third source or a third drain of a second conductivity type formed in the semiconductor layer below a side of the third gate electrode, one of the first soType: ApplicationFiled: November 15, 2010Publication date: May 19, 2011Applicant: SEIKO EPSON CORPORATIONInventor: Yoji KITANO
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Patent number: 7943969Abstract: A transistor and a method of fabricating the same are provided. The transistor includes a SiGe epitaxial layer formed in a recess region of a substrate at both side of a gate electrode and a SiGe capping layer formed on the SiGe epitaxial layer. The transistor further includes a SiGe seed layer formed under the SiGe epitaxial layer and a silicon capping layer formed on the SiGe capping layer.Type: GrantFiled: October 27, 2008Date of Patent: May 17, 2011Assignee: Jusung Engineering Co. Ltd.Inventors: Cheol Hoon Yang, Yong Han Jeon
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Publication number: 20110101466Abstract: An electronic component includes a high voltage switching transistor encased in a package. The high voltage switching transistor comprises a source electrode, a gate electrode, and a drain electrode all on a first side of the high voltage switching transistor. The source electrode is electrically connected to a conducting structural portion of the package. Assemblies using the abovementioned transistor with another transistor can be formed, where the source of one transistor can be electrically connected to a conducting structural portion of a package containing the transistor and a drain of the second transistor is electrically connected to the second conductive structural portion of a package that houses the second transistor. Alternatively, the source of the second transistor is electrically isolated from its conductive structural portion, and the drain of the second transistor is electrically isolated from its conductive structural portion.Type: ApplicationFiled: November 2, 2009Publication date: May 5, 2011Applicant: TRANSPHORM INC.Inventor: Yifeng Wu
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Patent number: 7928509Abstract: The present invention discloses an integrated junction field effect transistor (JFET) and Schottky diode, comprising a depletion mode JFET which includes a source, a drain and a gate, wherein the drain is not provided with an ohmic contact such that it forms a Schottky diode.Type: GrantFiled: May 21, 2009Date of Patent: April 19, 2011Assignee: Richtek Technology CorporationInventor: Chih-Feng Huang
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Publication number: 20110074498Abstract: A suite of novel structures and methods is provided to reduce power consumption in a wide array of electronic devices and systems. Some of these structures and methods can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. As will be discussed, some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors.Type: ApplicationFiled: February 18, 2010Publication date: March 31, 2011Applicant: SuVolta, Inc.Inventors: Scott E. Thompson, Damodar R. Thummalapally
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Publication number: 20110057253Abstract: A semiconductor device includes a first transistor including a first source/drain region and a first sidewall spacer, and a second transistor including a second source/drain region and a second sidewall spacer, the first sidewall spacer has a first width and the second sidewall spacer has a second width wider than the first width, and the first source/drain region has a first area and the second source/drain region has a second area larger than the first area.Type: ApplicationFiled: September 8, 2010Publication date: March 10, 2011Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventors: Akihiro USUJIMA, Shigeo SATOH
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Publication number: 20110049580Abstract: A hybrid packaged gate controlled semiconductor switching device (HPSD) has an insulated-gate transistor (IGT) made of a first semiconductor die and a rectifying-gate transistor (RGT) made of a second semiconductor die. The RGT gate and source are electrically connected to the IGT source and drain respectively. The HPSD includes a package base with package terminals for interconnecting the HPSD to external environment. The IGT is die bonded atop the package base. The second semiconductor die is formed upon a composite semiconductor epi layer overlaying an electrically insulating substrate (EIS) thus creating a RGT die. The RGT die is stacked and bonded atop the IGT die via the EIS. The IGT, RGT die and package terminals are interconnected with bonding wires. Thus, the HPSD is a stacked package of IGT die and RGT die with reduced package footprint while allowing flexible placements of device terminal electrodes on the IGT.Type: ApplicationFiled: August 28, 2009Publication date: March 3, 2011Inventors: Sik Lui, Anup Bhalla
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Publication number: 20110042756Abstract: A semiconductor device having an MOSFET serving as an element to be protected, and an electrostatic protection MOSFET element mounted on the same substrate is produced with the small number of steps while implementing a high protection ability. Low concentration regions and gate electrodes are formed and then an insulation film is formed on a whole surface. Then, etching is performed using a resist pattern as a mask to leave the insulation film in a region from a part of the gate electrode to a part of the low concentration region in each of regions A1 and A3, and on a side wall of the gate electrode in a region A2. Then, a high concentration ion implantation is performed using the gate electrodes and the insulation films as masks, and then a silicide layer is formed.Type: ApplicationFiled: August 10, 2010Publication date: February 24, 2011Inventor: Satoshi Hikida
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Patent number: 7888747Abstract: A semiconductor device includes a semiconductor substrate; a first impurity diffusion suppression layer and a thicker second impurity diffusion suppression layer formed on the semiconductor substrate in first and second isolated transistor regions; first and second crystal layers formed on the first and second impurity diffusion suppression layers; first and second gate electrodes formed on the first and second crystal layers; first and second p-type channel regions formed in the semiconductor substrate, the first impurity diffusion suppression layer and respective of the first and second crystal layers below the first and second gate electrodes; and first and second source/drain regions formed on both sides of the first and second channel region; wherein the first and second p-type channels have lower impurity concentrations in respective of the first and second crystal layers than in the semiconductor substrate.Type: GrantFiled: April 9, 2009Date of Patent: February 15, 2011Assignee: Kabushiki Kaisha ToshibaInventor: Akira Hokazono
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Publication number: 20110031952Abstract: According to one embodiment, a semiconductor apparatus includes a substrate, a semiconductor layer of a first conductivity type, a first semiconductor region of a second conductivity type, a first main electrode, a second semiconductor layer of the second conductivity type, a third semiconductor layer of the first conductivity type, a second main electrode, a gate insulating film, and a gate electrode. An electron injected from the first semiconductor region into the semiconductor layer is recombined with an electron hole injected from the third semiconductor region into the semiconductor layer in a state of a body diode is biased in a forward direction. The body diode includes the semiconductor layer, the first semiconductor region, and the third semiconductor region.Type: ApplicationFiled: August 5, 2010Publication date: February 10, 2011Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Kazutoshi NAKAMURA
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Publication number: 20100327373Abstract: Sophisticated gate electrode structures for N-channel transistors and P-channel transistors are patterned on the basis of substantially the same configuration while, nevertheless, the work function adjustment may be accomplished in an early manufacturing stage. For this purpose, diffusion layer and cap layer materials are removed after incorporating the desired work function metal species into the high-k dielectric material and subsequently a common gate layer stack is deposited and subsequently patterned.Type: ApplicationFiled: May 26, 2010Publication date: December 30, 2010Inventors: Richard Carter, Falk Graetsch, Martin Trentzsch, Sven Beyer, Berthold Reimer, Robert Binder, Boris Bayha
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Publication number: 20100320545Abstract: A semiconductor structure is provided that includes a first device region including a first threshold voltage adjusting layer located atop a semiconductor substrate, a gate dielectric located atop the first threshold voltage adjusting layer, and a gate conductor located atop the gate dielectric. The structure further includes a second device region including a gate dielectric located atop the semiconductor substrate, and a gate conductor located atop the gate dielectric; and a third device region including a gate dielectric located atop the semiconductor substrate, a second threshold voltage adjusting layer located atop the gate dielectric, and a gate conductor located atop the second threshold voltage adjusting layer.Type: ApplicationFiled: June 18, 2009Publication date: December 23, 2010Applicant: International Business Machines CorporationInventors: Hemanth Jagannathan, Vijay Narayanan, Vamsi K. Paruchuri
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Patent number: 7851825Abstract: Enhancement-mode III-nitride transistors are described that have a large source to drain barrier in the off state, low off state leakage, and low channel resistance in the access regions are described. The devices can include a charge depleting layer under the gate and/or a charge enhancing layer outside of the gate region, that is, in the access region.Type: GrantFiled: November 26, 2008Date of Patent: December 14, 2010Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Ilan Ben-Yaacov, Robert Coffie, Umesh Mishra