With Channel Containing Layer Contacting Drain Drift Region (e.g., Dmos Transistor) (epo) Patents (Class 257/E29.256)
  • Publication number: 20100078708
    Abstract: A MOS transistor having an increased gate-drain capacitance is described. One embodiment provides a drift zone of a first conduction type. At least one transistor cell has a body zone, a source zone separated from the drift zone by the body zone, and a gate electrode, which is arranged adjacent to the body zone and which s dieletrically insulated from the body zone by a gate dielectric. At least one compensation zone of the first conduction type is arranged in the drift zone. At least one feedback electrode is arranged at a distance from the body zone, which is dielectrically insulated from the drift zone by a feedback dielectric and which is electrically conductively connected to the gate electrode.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Michael Treu
  • Patent number: 7687853
    Abstract: A semiconductor device includes one or more LDMOS transistors and one of more SCR-LDMOS transistors. Each LDMOS transistor includes a LDMOS well of a first conductivity type, a LDMOS source region of a second conductivity type formed in the LDMOS well, and a LDMOS drain region of a second conductivity type separated from the LDMOS well by a LDMOS drift region of the second conductivity type. Each SCR-LDMOS transistor comprising a SCR-LDMOS well of the first conductivity type, a SCR-LDMOS source region of the second conductivity type formed in the SCR-LDMOS well, a SCR-LDMOS drain region of a second conductivity type, and a anode region of the first conductivity type between the SCR-LDMOS drain region and the SCR-LDMOS drift region. The anode region is separated from the SCR-LDMOS well by a SCR-LDMOS drift region of the second conductivity type.
    Type: Grant
    Filed: July 15, 2008
    Date of Patent: March 30, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Sameer P Pendharkar, Jonathan S. Brodsky
  • Publication number: 20100072547
    Abstract: Techniques for processing power transistor devices are provided. In one aspect, the curvature of a power transistor device comprising a device film formed on a substrate is controlled by thinning the substrate, the device having an overall residual stress attributable at least in part to the thinning step, and applying a stress compensation layer to a surface of the device film, the stress compensation layer having a tensile stress sufficient to counterbalance at least a portion of the overall residual stress of the device. The resultant power transistor device may be part of an integrated circuit.
    Type: Application
    Filed: November 30, 2009
    Publication date: March 25, 2010
    Applicant: AGERE SYSTEMS INC.
    Inventors: Roger A. Fratti, Warren K. Waskiewicz
  • Publication number: 20100072540
    Abstract: A technique for controlling a power supply with power supply control element with a tap element. An example power supply control element includes a power transistor that has first and second main terminals, a control terminal and a tap terminal. A control circuit is coupled to the control terminal. The tap terminal and the second main terminal of the power transistor are to control switching of the power transistor. The tap terminal is coupled to provide a signal to the control circuit substantially proportional to a voltage between the first and second main terminals when the voltage is less than a pinch off voltage. The tap terminal is coupled to provide a substantially constant voltage that is less than the voltage between the first and second main terminals to the control circuit when the voltage between the first and second main terminals is greater than the pinch-off voltage.
    Type: Application
    Filed: November 25, 2009
    Publication date: March 25, 2010
    Applicant: Power Integrations, Inc.
    Inventor: Donald R. Disney
  • Patent number: 7683427
    Abstract: A laterally diffused metal-oxide-semiconductor (LDMOS) device as well as a method of making the same is disclosed. A gate is formed on a semiconductor substrate between a source region and a drain region with one side laterally extending onto a part of a field oxide layer and the opposite side beside the source region. A gate dielectric layer is formed between the gate and the semiconductor substrate, wherein the gate dielectric layer comprises two or more portions having different thicknesses arranged laterally in a way that the thicknesses of the portions gradually increase from one side beside the source doping region to the opposite side bordering the field oxide layer. With such structure, the hot carrier impact is minimized and the gate length can be scaled down to gain Idlin.
    Type: Grant
    Filed: September 18, 2007
    Date of Patent: March 23, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chin-Lung Chen, Wen-Kuo Li
  • Patent number: 7679143
    Abstract: A semiconductor device includes: a MOS transistor; a protection diode; and a semiconductor substrate. The MOS transistor and the protection diode are disposed in the semiconductor substrate. The drain of the MOS transistor is connected to the cathode of the protection diode. The source of the MOS transistor is connected to the anode of the protection diode. The MOS transistor has a withstand voltage defined as VT. The protection diode has a withstand voltage defined as VD, a parasitic resistance defined as RD, and a maximum current defined as IRmax. They satisfy a relationship of VT>VD+IRmax×RD. The maximum current of IRmax is equal to or larger than 45 Amperes.
    Type: Grant
    Filed: May 2, 2006
    Date of Patent: March 16, 2010
    Assignee: DENSO CORPORATION
    Inventors: Naohiro Suzuki, Hitoshi Yamaguchi
  • Publication number: 20100059817
    Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type and a first doping concentration. A first semiconductor region, used as drain, of the first conductivity type has a lower doping concentration than the semiconductor layer and is over the semiconductor layer. A gate dielectric is over the first semiconductor region. A gate electrode over the gate dielectric has a metal-containing center portion and first and second silicon portions on opposite sides of the center portion. A second semiconductor region, used as a channel, of the second conductivity type has a first portion under the first silicon portion and the gate dielectric. A third semiconductor region, used as a source, of the first conductivity type is laterally adjacent to the first portion of the second semiconductor region. The metal-containing center portion, replacing silicon, increases the source to drain breakdown voltage.
    Type: Application
    Filed: September 5, 2008
    Publication date: March 11, 2010
    Inventors: DANIEL PHAM, Bich-Yen Nguyen
  • Publication number: 20100059818
    Abstract: A semiconductor device includes a first conductive type first semiconductor region, a second semiconductor region, and a second conductive type lateral RESURF region. The first semiconductor region is arranged on a first electrode side. The second semiconductor region includes first conductive type first pillar regions and a terminal part. The second pillar regions are alternately arranged on an element part. The terminal part is formed around the element part along a surface of the first semiconductor region on a second electrode side opposite to the first electrode side of the first semiconductor region. Furthermore, the second conductive type lateral RESURF region is formed in the second semiconductor region on the terminal part.
    Type: Application
    Filed: August 8, 2009
    Publication date: March 11, 2010
    Applicant: Sony Corporation
    Inventor: Yuji SASAKI
  • Patent number: 7675120
    Abstract: A composite integrated circuit incorporating two LDMOSFETs of unlike designs, with the consequent creation of a parasitic transistor. A multipurpose resistor is integrally built into the composite integrated circuit in order to prevent the parasitic transistor from accidentally turning on. In an intended application of the composite integrated circuit to a startup circuit of a switching-mode power supply, the multipurpose resistor serves as startup resistor for limiting the flow of rush current during the startup period of the switching-mode power supply.
    Type: Grant
    Filed: November 10, 2006
    Date of Patent: March 9, 2010
    Assignee: Sanken Electric Co., Ltd.
    Inventors: Keiichi Sekiguchi, Kazuya Aizawa
  • Publication number: 20100044793
    Abstract: In a high frequency amplifying MOSFET having a drain offset region, the size is reduced and the on-resistance is decreased by providing conductor plugs 13 (P1) for leading out electrodes on a source region 10, a drain region 9 and leach-through layers 3 (4), to which a first layer wirings 11a, 11d(M1) are connected and, further, backing second layer wirings 12a to 12d are connected on the conductor plugs 13 (P1) to the first layer wirings 11s, 11d (M1).
    Type: Application
    Filed: October 30, 2009
    Publication date: February 25, 2010
    Applicant: RENESAS TECHNOLOGY CORP.
    Inventors: Yutaka Hoshino, Shuji Ikeda, Isao Yoshida, Shiro Kamohara, Megumi Kawakami, Tomoyuki Miyake, Masatoshi Morikawa
  • Publication number: 20100044790
    Abstract: Provided is a semiconductor device which includes a metal oxide semiconductor (MOS) transistor having high driving performance and high withstanding voltage with a thick gate oxide film. In the local oxidation-of-silicon (LOCOS) offset MOS transistor having high withstanding voltage, in order to prevent a gate oxide film (6) formed on a channel formation region (7) from being etched at a time of removing the gate oxide film (6) with a polycrystalline silicon gate electrode (8) being used as a mask to form a second conductivity type high concentration source region (4) and a second conductivity type high concentration drain region (5), a source field oxide film (14) is formed also on a source side of the channel formation region (7), and in addition, a length of a second conductivity type high concentration source field region (13) is optimized. Accordingly, it is possible to obtain a MOS transistor having high driving performance and high withstanding voltage with a thick gate oxide film.
    Type: Application
    Filed: August 11, 2009
    Publication date: February 25, 2010
    Inventors: Shinjiro Kato, Naoto Saito
  • Publication number: 20100044788
    Abstract: A semiconductor device with a charge carrier compensation structure. In one embodiment, the semiconductor device has a central cell field with a gate and source structure. At least one bond contact area is electrically coupled to the gate structure or the source structure. A capacitance-increasing field plate is electrically coupled to at least one of the near-surface bond contact areas.
    Type: Application
    Filed: August 19, 2008
    Publication date: February 25, 2010
    Applicant: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Armin Willmeroth, Anton Mauder, Gerald Deboy, Holger Kapels, Carolin Tolksdorf, Frank Pfirsch
  • Patent number: 7667268
    Abstract: Various integrated circuit devices, in particular a transistor, are formed inside an isolation structure which includes a floor isolation region and a trench extending from the surface of the substrate to the floor isolation region. The trench may be filled with a dielectric material or may have a conductive material in a central portion with a dielectric layer lining the walls of the trench. Various techniques for terminating the isolation structure by extending the floor isolation region beyond the trench, using a guard ring, and a forming a drift region are described.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: February 23, 2010
    Assignee: Advanced Analogic Technologies, Inc.
    Inventors: Donald R. Disney, Richard K. Williams
  • Publication number: 20100038706
    Abstract: Provided is an ESD protection element, in which: LOCOS oxide films are formed at both ends of a gate electrode, and a conductivity type of a diffusion layer formed below one of the LOCOS oxide films which is not located on a drain side is set to a p-type, to thereby limit an amount of a current flowing in a portion below a source-side n-type high concentration diffusion layer, the current being generated due to surface breakdown of a drain. With this structure, even in a case of protecting a high withstanding voltage element, it is possible to easily satisfy a function required for the ESD protection element, the function of being constantly in an off-state during a steady state, while operating, upon application of a surge or noise to a semiconductor device, so as not to reach a breakage of an internal element, discharging a generated large current, and then returning to the off-state again.
    Type: Application
    Filed: August 12, 2009
    Publication date: February 18, 2010
    Applicant: Seiko Instruments Inc.
    Inventor: Yuichiro KITAJIMA
  • Publication number: 20100038712
    Abstract: A semiconductor device according to an embodiment of the present invention includes a device part and a terminal part.
    Type: Application
    Filed: August 12, 2009
    Publication date: February 18, 2010
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Miho WATANABE, Masaru IZUMISAWA, Yasuto SUMI, Hiroshi OHTA, Wataru SEKINE, Wataru SAITO, Syotaro ONO, Nana HATANO
  • Publication number: 20100038675
    Abstract: A power semiconductor device that realizes high-speed turnoff and soft switching at the same time has an n-type main semiconductor layer that includes lightly doped n-type semiconductor layers and extremely lightly doped n-type semiconductor layers arranged alternately and repeatedly between a p-type channel layer and an n+-type field stop layer, in a direction parallel to the first major surface of the n-type main semiconductor layer. A substrate used for manufacturing the semiconductor device is fabricated by forming trenches in an n-type main semiconductor layer 1 and performing ion implantation and subsequent heat treatment to form an n+-type field stop layer in the bottom of the trenches. The trenches are then filled with a semiconductor doped more lightly than the n-type main semiconductor layer for forming extremely lightly doped n-type semiconductor layers. The manufacturing method is applicable with variations to various power semiconductor devices such as IGBT's, MOSFET's and PIN diodes.
    Type: Application
    Filed: August 11, 2009
    Publication date: February 18, 2010
    Applicant: Fuji Electric Device Technology Co., Ltd.
    Inventor: Koh Yoshikawa
  • Patent number: 7662679
    Abstract: A method of manufacturing a semiconductor device includes forming a mask layer on a first-conductivity-type semiconductor substrate, etching the semiconductor substrate using the mask layer as a mask, thereby forming a projecting semiconductor layer, forming a first insulating layer on the semiconductor substrate to cover a lower portion of the projecting semiconductor layer, doping a first-conductivity-type impurity into the first insulating layer, thereby forming a high-impurity-concentration layer in the lower portion of the projecting semiconductor layer, forming gate insulating films on side surfaces of the projecting semiconductor layer which upwardly extend from an upper surface of the first insulating layer, and forming a gate electrode on the gate insulating films and on the first insulating film.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: February 16, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Izumida, Sanae Ito, Takahisa Kanemura
  • Publication number: 20100032758
    Abstract: A LDMOS device for an ESD protection circuit is provided. The LDMOS device includes a substrate of a first conductivity type, a deep well region of a second conductivity type, a body region of the first conductivity type, first and second doped regions of the second conductivity type, and a gate electrode. The deep well region is disposed in the substrate. The body region and the first doped region are respectively disposed in the deep well region. The second doped region is disposed in the body region. The gate electrode is disposed on the deep well region between the first and second doped regions. It is noted that the body region does not include a doped region of the first conductivity type having a different doped concentration from the body region.
    Type: Application
    Filed: August 6, 2008
    Publication date: February 11, 2010
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chang-Tzu Wang, Tien-Hao Tang
  • Publication number: 20100032754
    Abstract: A semiconductor device includes: a high withstanding voltage transistor (128); a gate electrode (110) formed on a channel region (170); a first conductivity type source region (116a) formed on one side of the channel region (170) and a first conductivity type drain region (116b) formed on another side of the channel region (116a); and a drift region (172) which is provided between the source region (116a) and the drain region (116b) and has a super junction structure in which first conductivity type impurity diffusion regions and second conductivity type impurity diffusion regions are alternately arranged at regular intervals of a constant width in a gate width direction of the gate electrode (110). The gate electrode has a comb-shaped structure in plan view, the comb-shaped structure including comb teeth which cover the second conductivity type impurity diffusion regions of the drift region (172).
    Type: Application
    Filed: August 3, 2009
    Publication date: February 11, 2010
    Applicant: NEC ELECTRONICS CORPORATION
    Inventor: Hiroshi Kawaguchi
  • Publication number: 20100032749
    Abstract: Embodiments relate to a field-effect transistor that includes a body region, a first source/drain region of a first conductivity type, a second source/drain region of the first conductivity type, and a pocket implant region adjacent to the first source/drain region, the pocket implant region being of a second conductivity type, wherein the second conductivity type is different from the first conductivity type. The body region physically contacts the pocket implant region.
    Type: Application
    Filed: August 8, 2008
    Publication date: February 11, 2010
    Inventors: Mayank Shrivastava, Harald Gossner, Ramgopal Rao, Maryam Shojaei Baghini
  • Publication number: 20100032753
    Abstract: A MOS transistor includes a conductive gate insulated from a semiconductor layer by a dielectric layer, first and second lightly-doped diffusion regions formed self-aligned to respective first and second edges of the conductive gate, a first diffusion region formed self-aligned to a first spacer, a second diffusion region formed a first distance away from the edge of a second spacer, a first contact opening and metallization formed above the first diffusion region, and a second contact opening and metallization formed above the second diffusion region. The first lightly-doped diffusion region remains under the first spacer. The second lightly-doped diffusion region remains under the second spacer and extends over the first distance to the second diffusion region. The distance between the first edge of the conductive gate to the first contact opening is the same as the distance between the second edge of the conductive gate to the second contact opening.
    Type: Application
    Filed: October 13, 2009
    Publication date: February 11, 2010
    Applicant: MICREL, INC.
    Inventor: Martin Alter
  • Publication number: 20100032756
    Abstract: A buried layer architecture which includes a floating buried layer structure adjacent to a high voltage buried layer connected to a deep well of the same conductivity type for components in an IC is disclosed. The floating buried layer structure surrounds the high voltage buried layer and extends a depletion region of the buried layer to reduce a peak electric field at lateral edges of the buried layer. When the size and spacing of the floating buried layer structure are optimized, the well connected to the buried layer may be biased to 100 volts without breakdown. Adding a second floating buried layer structure surrounding the first floating buried layer structure allows operation of the buried layer up to 140 volts. The buried layer architecture with the floating buried layer structure may be incorporated into a DEPMOS transistor, an LDMOS transistor, a buried collector npn bipolar transistor and an isolated CMOS circuit.
    Type: Application
    Filed: August 7, 2009
    Publication date: February 11, 2010
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sameer P. PENDHARKAR, Binghua HU, Xinfen CHEN
  • Patent number: 7659579
    Abstract: A FET has a shallow source/drain region, a deep channel region, a gate stack and a back gate that is surrounded by dielectric. The FET structure also includes halo or pocket implants that extend through the entire depth of the channel region. Because a portion of the halo and well doping of the channel is deeper than the source/drain depth, better threshold voltage and process control is achieved. A back-gated FET structure is also provided having a first dielectric layer in this structure that runs under the shallow source/drain region between the channel region and the back gate. This first dielectric layer extends from under the source/drain regions on either side of the back gate and is in contact with a second dielectric such that the back gate is bounded on each side or isolated by dielectric.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: February 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak, Richard Q. Williams
  • Publication number: 20100025726
    Abstract: A lateral device includes a gate region connected to a drain region by a drift layer. An insulation region adjoins the drift layer between the gate region and the drain region. Permanent charges are embedded in the insulation region, sufficient to cause inversion in the insulation region.
    Type: Application
    Filed: April 30, 2009
    Publication date: February 4, 2010
    Applicant: MAXPOWER SEMICONDUCTOR INC.
    Inventors: Amit Paul, Mohamed N. Darwish
  • Publication number: 20100025765
    Abstract: An embodiment of an N-channel device has a lightly doped substrate in which adjacent or spaced-apart P and N wells are provided. A lateral isolation wall surrounds at least a portion of the substrate and is spaced apart from the wells. A first gate overlies the P well or the substrate between the wells or partly both. A second gate, spaced apart from the first gate, overlies the N-well. A body contact to the substrate is spaced apart from the isolation wall by a first distance within the space charge region of the substrate to isolation wall PN junction. When the body contact is connected to the second gate, a predetermined static bias Vg2 is provided to the second gate, depending upon the isolation wall bias (Vbias) and the first distance.
    Type: Application
    Filed: September 16, 2009
    Publication date: February 4, 2010
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Hongning Yang, Veronique C. Macary, Won Gi Min, Jiang-Kai Zuo
  • Publication number: 20100025763
    Abstract: A lateral SOI device may include a semiconductor channel region connected to a drain region by a drift region. An insulation region on the drift layer is positioned between the channel region and the drain region. Permanent charges may be embedded in the insulation region sufficient to cause inversion in the insulation region. The semiconductor layer also overlies a global insulation layer, and permanent charges are preferably embedded in at least selected areas of this insulation layer too.
    Type: Application
    Filed: April 28, 2009
    Publication date: February 4, 2010
    Applicant: MAXPOWER SEMICONDUCTOR INC.
    Inventors: Amit Paul, Mohamed N. Darwish
  • Publication number: 20100025764
    Abstract: Provided is a manufacturing method for an offset MOS transistor capable of operating safely even under a voltage of 50 V or higher. In the offset MOS transistor which includes a LOCOS oxide film, the LOCOS oxide film formed in a periphery of a drain diffusion layer, in which a high withstanding voltage is required, is etched, and the drain diffusion layer is formed so as to spread into a surface region of a semiconductor substrate located below a region in which the LOCOS oxide film is thinned. As a result, end portions of the drain diffusion layer are covered by an offset diffusion layer, whereby electric field concentration occurring in a region of a lower portion of the drain diffusion layer can be relaxed.
    Type: Application
    Filed: July 28, 2009
    Publication date: February 4, 2010
    Inventors: Yuichiro Kitajima, Hideo Yoshino
  • Publication number: 20100025756
    Abstract: A dual current path LDMOSFET transistor (40) is provided which includes a substrate (400), a graded buried layer (401), an epitaxial drift region (404) in which a drain region (416) is formed, a first well region (406) in which a source region (412) is formed, a gate electrode (420) formed adjacent to the source region (412) to define a first channel region (107), and a current routing structure that includes a buried RESURF layer (408) in ohmic contact with a second well region (414) formed in a predetermined upper region of the epitaxial layer (404) so as to be completely covered by the gate electrode (420), the current routing structure being spaced apart from the first well region (406) and from the drain region (416) on at least a side of the drain region to delineate separate current paths from the source region and through the epitaxial layer.
    Type: Application
    Filed: July 30, 2008
    Publication date: February 4, 2010
    Inventors: Yue Fu, Ronghua Zhu, Vishnu K. Khemka, Amitava Bose, Todd C. Roggenbauer
  • Publication number: 20100025762
    Abstract: A semiconductor fabrication process according to the present invention defines an auxiliary structure with a plurality of spaces with a predetermined line-width in the oxide layer to prevent the conductive material in the spaces from being removed by etching or defined an auxiliary structure to rise the conductive structure so as to have the conductive structure being exposed by chemical mechanical polishing. Thus, the transmitting circuit can be defined without requiring an additional mask. Hence, the semiconductor fabrication process can reduce the number of required masks to lower the cost.
    Type: Application
    Filed: March 13, 2009
    Publication date: February 4, 2010
    Applicant: NIKO SEMICONDUCTOR CO., LTD.
    Inventors: Kao-Way Tu, Cheng-Hui Tung
  • Patent number: 7655980
    Abstract: A LDNMOS device for an ESD protection circuit including a P-type substrate and an N-type deep well region is provided. The P-type substrate includes a first area and a second area. The N-type deep well region is in the first and second areas of the P-type substrate. The LDNMOS device further includes a gate electrode disposed on the P-type substrate between the first and second areas, a P-type implanted region disposed in the first area of the P-type substrate, an N-type grade region disposed in the N-type deep well region of the first area, an N-type first doped region disposed in the N-type grade region, a P-type body region disposed in the N-type deep well region of the second area, an N-type second doped region disposed in the P-type body region, and a P-type doped region disposed in the P-type body region and adjacent to the N-type second doped region.
    Type: Grant
    Filed: July 23, 2008
    Date of Patent: February 2, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Mei-Ling Chao, Chia-Yun Chen, Tai-Hsiang Lai, Tien-Hao Tang
  • Publication number: 20100019317
    Abstract: Roughly described, methods and systems for improving integrated circuit layouts and fabrication processes in order to better account for stress effects. Dummy features can be added to a layout either in order to improve uniformity, or to relax known undesirable stress, or to introduce known desirable stress. The dummy features can include dummy diffusion regions added to relax stress, and dummy trenches added either to relax or enhance stress. A trench can relax stress by filling it with a stress-neutral material or a tensile strained material. A trench can increase stress by filling it with a compressive strained material. Preferably dummy diffusion regions and stress relaxation trenches are disposed longitudinally to at least the channel regions of N-channel transistors, and transversely to at least the channel regions of both N-channel and P-channel transistors. Preferably stress enhancement trenches are disposed longitudinally to at least the channel regions of P-channel transistors.
    Type: Application
    Filed: October 5, 2009
    Publication date: January 28, 2010
    Applicant: SYNOPSYS, INC.
    Inventors: Victor Moroz, Dipankar Pramanik, Xi-Wei Lin
  • Publication number: 20100019318
    Abstract: A LDNMOS device for an ESD protection circuit including a P-type substrate and an N-type deep well region is provided. The P-type substrate includes a first area and a second area. The N-type deep well region is in the first and second areas of the P-type substrate. The LDNMOS device further includes a gate electrode disposed on the P-type substrate between the first and second areas, a P-type implanted region disposed in the first area of the P-type substrate, an N-type grade region disposed in the N-type deep well region of the first area, an N-type first doped region disposed in the N-type grade region, a P-type body region disposed in the N-type deep well region of the second area, an N-type second doped region disposed in the P-type body region, and a P-type doped region disposed in the P-type body region and adjacent to the N-type second doped region.
    Type: Application
    Filed: July 23, 2008
    Publication date: January 28, 2010
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Mei-Ling Chao, Chia-Yun Chen, Tai-Hsiang Lai, Tien-Hao Tang
  • Publication number: 20100019250
    Abstract: A semiconductor device and a method of forming thereof has a base body has a field stopping layer, a drift layer, a current spreading layer, a body region, and a source contact region layered in the order on a substrate. A trench that reaches the field stopping layer or the substrate is provided. A gate electrode is provided in the upper half section in the trench. In a section deeper than the position of the gate electrode in the trench, an insulator is buried that has a normal value of insulation breakdown electric field strength equal to or greater than the value of the insulation breakdown electric field strength of the semiconductor material of the base body. This inhibits short circuit between a gate and a drain due to insulation breakdown of an insulator film at the bottom of the trench to realize a high breakdown voltage in a semiconductor device using a semiconductor material such as SiC. The sidewall surfaces of the trench located below the gate electrode is inclined to form a trapezoidal profile.
    Type: Application
    Filed: October 7, 2009
    Publication date: January 28, 2010
    Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.
    Inventors: Shun-Ichi NAKAMURA, Yoshiyuki YONEZAWA
  • Patent number: 7652307
    Abstract: In a semiconductor device of the present invention, a MOS transistor is disposed in an elliptical shape. Linear regions in the elliptical shape are respectively used as the active regions, and round regions in the elliptical shape is used respectively as the inactive regions. In each of the inactive regions, a P type diffusion layer is formed to coincide with a round shape. Another P type diffusion layer is formed in a part of one of the inactive regions. These P type diffusion layers are formed as floating diffusion layers, are capacitively coupled to a metal layer on an insulating layer, and assume a state where predetermined potentials are respectively applied thereto. This structure makes it possible to maintain current performance of the active regions, while improving the withstand voltage characteristics in the inactive regions.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: January 26, 2010
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Shuichi Kikuchi, Kiyofumi Nakaya, Shigeaki Okawa
  • Publication number: 20100013006
    Abstract: A semiconductor device has a semiconductor substrate having a surface layer and a p-type semiconductor region, wherein the surface layer includes a contact region, a channel region and a drift region, the channel region is adjacent to and in contact with the contact region, the drift region is adjacent to and in contact with the channel region and includes n-type impurities at least in part, and the p-type semiconductor region is in contact with the drift region and at least a portion of a rear surface of the channel region, a main electrode disposed on the surface layer and electrically connected to the contact region, a gate electrode disposed on the surface layer and extending from above a portion of the contact region to above at least a portion of the drift region via above the channel region, and an insulating layer covering at least the portion of the contact region and not covering at least the portion of the drift region.
    Type: Application
    Filed: July 14, 2009
    Publication date: January 21, 2010
    Inventors: Masahiro SUGIMOTO, Tsutomu Uesugi, Masakazu Kanechika, Testsu Kachi
  • Patent number: 7649225
    Abstract: An asymmetric heterodoped metal oxide (AH2MOS) semiconductor device includes a substrate and an insulated gate on the top of the substrate disposed between a source region and a drain region. On one side of the gate, heterodoped tub and source regions are formed. The tub region has dopants of a second polarity. A source region is disposed inside each tub region and has dopants of a first polarity opposite to the second polarity. On the other side of the gate, heterodoped buffer and drift regions are formed. The buffer regions comprise dopants of the second polarity. The drift regions are disposed inside the buffer regions and are doped with dopants of the first polarity. A drain n+ tap region is disposed in the drift region.
    Type: Grant
    Filed: October 23, 2006
    Date of Patent: January 19, 2010
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Jun Cai, Michael Harley-Stead, Jim G. Holt
  • Publication number: 20100006935
    Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity type; a pre-high-voltage well (pre-HVW) in the semiconductor substrate, wherein the pre-HVW is of a second conductivity type opposite the first conductivity type; a high-voltage well (HVW) over the pre-HVW, wherein the HVW is of the second conductivity type; a field ring of the first conductivity type occupying a top portion of the HVW, wherein at least one of the pre-HVW, the HVW, and the field ring comprises at least two tunnels; an insulation region over the field ring and a portion of the HVW; a drain region in the HVW and adjacent the insulation region; a gate electrode over a portion the insulation region; and a source region on an opposite side of the gate electrode than the drain region.
    Type: Application
    Filed: July 9, 2008
    Publication date: January 14, 2010
    Inventors: Eric Huang, Tsung-Yi Huang, Fu-Hsin Chen, Chyi-Chyuan Huang, Chung-Yeh Wu
  • Publication number: 20100006934
    Abstract: A semiconductor structure includes a semiconductor substrate; a first high-voltage well (HVW) region of a first conductivity type overlying the semiconductor substrate; a second well region of a second conductivity type opposite the first conductivity type overlying the semiconductor substrate and laterally adjoining the first well region; a gate dielectric extending from over the first well region to over the second well region; a drain region in the second well region; a source region on an opposite side of the gate dielectric than the drain region; and a gate electrode on the gate dielectric. The gate electrode includes a first portion directly over the second well region, and a second portion directly over the first well region. The first portion has a first impurity concentration lower than a second impurity concentration of the second portion.
    Type: Application
    Filed: July 9, 2008
    Publication date: January 14, 2010
    Inventors: Ru-Yi Su, Puo-Yu Chiang, Jeng Gong, Tsung-Yi Huang, Chun-Lin Tsai, Chien-Chih Chou
  • Publication number: 20100001344
    Abstract: A method of forming a semiconductor device having an active area and a termination area surrounding the active area comprises providing a semiconductor substrate, providing a semiconductor layer of a first conductivity type over the semiconductor substrate and forming a mask layer over the semiconductor layer. The mask layer outlines at least two portions of a surface of the semiconductor layer: a first outlined portion outlining a floating region in the active area and a second outlined portion outlining a termination region in the termination area. Semiconductor material of a second conductivity type is provided to the first and second outlined portions so as to provide a floating region of the second conductivity type buried in the semiconductor layer in the active area and a first termination region of the second conductivity type buried in the semiconductor layer in the termination area of the semiconductor device.
    Type: Application
    Filed: January 10, 2007
    Publication date: January 7, 2010
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Evgueniy Stefanov, Ivana Deram, Jean-Michel Reynes
  • Patent number: 7642139
    Abstract: A production method for a semiconductor device, including the steps of: forming a semiconductor layer of the first conductivity on the semiconductor substrate; forming a trench in the semiconductor layer, the trench penetrating through the semiconductor layer to reach the semiconductor substrate; filling a filling material in a predetermined bottom portion of the trench, so that a filling material portion is provided in the bottom portion of the trench up to a predetermined upper surface position which is shallower than an interface between the semiconductor substrate and the semiconductor layer; and, after the filling step, introducing an impurity of the second conductivity into a portion of the semiconductor layer exposed to an interior side wall of the trench.
    Type: Grant
    Filed: December 24, 2004
    Date of Patent: January 5, 2010
    Assignee: Rohm Co., Ltd.
    Inventor: Masaru Takaishi
  • Publication number: 20090321823
    Abstract: A high voltage semiconductor device and a manufacturing method thereof are provided. The high voltage semiconductor device comprises: second conductive type drift regions disposed spaced from each other on a first conductive type well region formed on a first conductive type semiconductor substrate; a gate electrode on a channel region between the second conductive type drift regions with a gate insulating film disposed therebetween; second conductive type high-concentration source and drain each disposed in the second conductive type drift regions, spaced from a side of a gate electrode; a gate spacer having a spacer part covering the side of the gate electrode and a spacer extending part to cover a spaced portion of the second conductive type high-concentration source and drain from the side of the gate electrode; and a silicide formed on the gate electrode and the second conductive type high-concentration source and drain.
    Type: Application
    Filed: September 10, 2009
    Publication date: December 31, 2009
    Inventor: Jin Hyo Jung
  • Publication number: 20090321826
    Abstract: A process for the realization of a high integration density power MOS device includes the following steps of: providing a doped semiconductor substrate with a first type of conductivity; forming, on the substrate, a semiconductor layer with lower conductivity; forming, on the semiconductor layer, a dielectric layer of thickness comprised between 3000 and 13000 A (Angstroms); depositing, on the dielectric layer, a hard mask layer; masking the hard mask layer by means of a masking layer; etching the hard mask layers and the underlying dielectric layer for defining a plurality of hard mask portions to protect said dielectric layer; removing the masking layer; isotropically and laterally etching said dielectric layer forming lateral cavities in said dielectric layer below said hard mask portions; forming a gate oxide of thickness comprised between 150 and 1500 A (Angstroms) depositing a conductor material in said cavities and above the same to form a recess spacer, which is totally aligned with a gate structure c
    Type: Application
    Filed: September 1, 2009
    Publication date: December 31, 2009
    Applicant: STMicroelectronics, S.r.l.
    Inventors: Giuseppe ARENA, Giuseppe Ferla, Marco Camalleri
  • Publication number: 20090325352
    Abstract: A transistor comprises a source region of a first conductivity type and electrically communicating with a first semiconductor region. The transistor also comprises a drain region of the first conductivity type and electrically communicating with a second semiconductor region that differs from the first semiconductor region. An interface exists between the first semiconductor region and the second semiconductor region. The transistor also comprises a voltage tap region comprising at least a portion located in a position that is closer to the interface than the drain region. A mixed technology circuit is also described.
    Type: Application
    Filed: September 2, 2009
    Publication date: December 31, 2009
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Sameer P. Pendharkar
  • Publication number: 20090321818
    Abstract: A semiconductor component with a two-stage body zone. One embodiment provides semiconductor component including a drift zone, and a compensation zone of a second conduction type. The compensation zone is arranged in the drift zone. A source zone and a body zone is provided. The body zone is arranged between the source zone and the drift zone. A gate electrode is arranged adjacent to the body zone. The body zone has a first body zone section and a second body zone section, which are adjacent to one another along the gate dielectric and of which the first body zone section is doped more highly than the second body zone section.
    Type: Application
    Filed: June 30, 2008
    Publication date: December 31, 2009
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Anton Mauder, Winfried Kaindl
  • Publication number: 20090309146
    Abstract: A disclosed semiconductor device includes a MOS transistor that causes no problems concerning the formation of a thick gate insulating film and that is applicable to high withstand voltage devices. A drain region has a double diffusion structure including an N-drain region 3d and an N+ drain region 11d. A gate electrode includes a first gate electrode 9 formed on an insulating film 7 and a second gate electrode 13 formed on the first gate electrode 9 via a gate electrode insulating film 11. Between the gate insulating film 7 and the N+ source region 11s, a field insulating film 15 is disposed, over which an edge of the first gate electrode 9 is disposed. A gate voltage applied to the second gate electrode 13 via a gate wiring 13g is divided between the gate insulating film 7 and the gate electrode insulating film 11.
    Type: Application
    Filed: March 11, 2008
    Publication date: December 17, 2009
    Applicant: RICOH COMPANY, LTD.
    Inventor: Naohiro Ueda
  • Publication number: 20090309157
    Abstract: A MOS type semiconductor device, in which both improvement in radiation resistance and increase in withstand voltage is achieved, includes a nitride film formed on a LOCOS film and a PBSG film formed on the nitride film. The refractive index of the nitride film is set in a range of from 2.0 to 2.1 and the thickness of the nitride film is set in a range of from 0.1 Am to 0.5 ?m to thereby provide the nitride film as a semi-insulative thin film. Of electron-hole pairs produced in the LOCOS film by ?-ray irradiation, holes low in mobility are let away to a source electrode via the nitride film to thereby suppress the amount of plus fixed electric charges stored in the LOCOS film. The provision of such a three-layer structure permits improvement in radiation resistance and increase in withstand voltage.
    Type: Application
    Filed: June 16, 2009
    Publication date: December 17, 2009
    Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.
    Inventor: Yasumasa WATANABE
  • Publication number: 20090302384
    Abstract: A semiconductor device according to an aspect of the present invention includes a semiconductor layer, an insulating film formed on the surface of the semiconductor layer, a first insulator embedded in the semiconductor layer with a thickness larger than the thickness of the insulating film, and a resistive element formed on the first insulator. A semiconductor device according to another aspect of the present invention includes a semiconductor layer, an insulating film formed on the surface of the semiconductor layer, a resistive element formed on the insulating film, and a floating region formed on a portion of the semiconductor layer opposed to the resistive element through the insulating film and electrically floating from a periphery thereof.
    Type: Application
    Filed: June 3, 2009
    Publication date: December 10, 2009
    Applicant: ROHM CO., LTD.
    Inventor: Naoki IZUMI
  • Publication number: 20090302383
    Abstract: In a high-voltage NMOS transistor with low threshold voltage, it is proposed to realize the body doping that defines the channel region in the form of a deep p-well, and to arrange an additional shallow p-doping as a channel stopper on the transistor head, wherein this additional shallow p-doping is produced in the semiconductor substrate at the end of the deep p-well that faces away from the channel region, and extends up to a location underneath a field oxide region that encloses the active window. The leakage current of the parasitic transistor at the transistor head is suppressed with the channel stopper.
    Type: Application
    Filed: November 13, 2006
    Publication date: December 10, 2009
    Inventors: Martin Knaipp, Georg Röhrer
  • Publication number: 20090294848
    Abstract: One embodiment of inventive concepts exemplarily described herein may be generally characterized as a semiconductor device including an isolation region within a substrate. The isolation region may define an active region. The active region may include an edge portion that is adjacent to an interface of the isolation region and the active region and a center region that is surrounded by the edge portion. The semiconductor device may further include a gate electrode on the active region and the isolation region. The gate electrode may include a center gate portion overlapping a center portion of the active region, an edge gate portion overlapping the edge portion of the active region, and a first impurity region of a first conductivity type within the center gate portion and outside the edge portion. The semiconductor device may further include a gate insulating layer disposed between the active region and the gate electrode.
    Type: Application
    Filed: November 10, 2008
    Publication date: December 3, 2009
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Dong-Ryul CHANG
  • Publication number: 20090294849
    Abstract: Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices (40, 60, 80, 80?, 80?), e.g., LDMOS transistors, by careful charge balancing, even when body (44, 44?, 84, 84?) and drift (50, 50?, 90, 90?) region charge balance is not ideal, by: (i) providing a plug or sinker (57) near the drain (52, 92) and of the same conductivity type extending through the drift region (50, 50?, 90, 90?) at least into the underlying body region (44, 44? 84, 84?), and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall (102) coupled to the device buried layer (42, 82), and/or (iii) providing a variable resistance bridge (104) between the isolation wall (102) and the drift region (50, 50?, 90, 90?).
    Type: Application
    Filed: May 30, 2008
    Publication date: December 3, 2009
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Won Gi Min, Zhihong Zhang, Hongzhong Xu, Jiang-Kai Zuo