Abstract: A semiconductor device and its method of fabrication are described. A trench formed in a semiconductor substrate is partially filling said trench with a semiconductor material that lines a bottom and sides of the trench, leaving a gap in a middle of the trench running lengthwise along the trench. A first portion of the semiconductor material located below the gap is doped with dopants of a first conductivity type. The gap is filled with a dielectric material. Second portions of the semiconductor material located on the sides of the trench on both sides of the dielectric material are doped with dopants of a second conductivity type. The doping forms a P—N—P or N—P—N structure running lengthwise along the trench with differently doped regions located side by side across a width of the trench.

Abstract: A conventional DRAM needs to be refreshed at an interval of several tens of milliseconds to hold data, which results in large power consumption. In addition, a transistor therein is frequently turned on and off; thus, deterioration of the transistor is also a problem. These problems become significant as the memory capacity increases and transistor miniaturization advances. A transistor is provided which includes an oxide semiconductor and has a trench structure including a trench for a gate electrode and a trench for element isolation. Even when the distance between a source electrode and a drain electrode is decreased, the occurrence of a short-channel effect can be suppressed by setting the depth of the trench for the gate electrode as appropriate.

Abstract: A conventional DRAM needs to be refreshed at an interval of several tens of milliseconds to hold data, which results in large power consumption. In addition, a transistor therein is frequently turned on and off; thus, deterioration of the transistor is also a problem. These problems become significant as the memory capacity increases and transistor miniaturization advances. A transistor is provided which includes a wide-gap semiconductor and has a trench structure including a trench for a gate electrode and a trench for element isolation. Even when the distance between a source electrode and a drain electrode is decreased, the occurrence of a short-channel effect can be suppressed by setting the depth of the trench for the gate electrode as appropriate.

Abstract: Trench portions (10) are formed in a well (5) in order to provide unevenness in the well (5). A gate electrode (2) is formed via an insulating film (7) on the upper surface and inside of the trench portions (10). A source region (3) is formed on one side of the gate electrode (2) in a gate length direction while a drain region (4) on another side. Both of the source region (3) and the drain region (4) are formed down to near the bottom portion of the gate electrode (2). By deeply forming the source region (3) and the drain region (4), current uniformly flows through the whole trench portions (10), and the unevenness formed in the well (5) increase the effective gate width to decrease the on-resistance of a semiconductor device 1 and to enhance the drivability thereof.

Abstract: An embodiment of a process for manufacturing a power semiconductor device envisages the steps of: providing a body of semiconductor material having a top surface and having a first conductivity; forming columnar regions having a second type of conductivity within the body of semiconductor material, and surface extensions of the columnar regions above the top surface; and forming doped regions having the second type of conductivity, in the proximity of the top surface and in contact with the columnar regions. The doped regions are formed at least partially within the surface extensions of the columnar regions; the surface extensions and the doped regions have a non-planar surface pattern, in particular with a substantially V-shaped groove.

Abstract: A method for forming a transistor includes providing a patterned gate stack disposed on a III-V substrate and having sidewall spacers formed on sides of the patterned gate stack, the III-V substrate including source/drain regions adjacent to the sidewall spacers and field oxide regions formed adjacent to the source/drain regions. The method includes growing raised source/drain regions on the source/drain regions, the grown raised source/drain regions including III-V semiconductor material, and growing metal contacts on the grown raised source/drain regions. Another method for forming a transistor includes providing a patterned gate stack disposed on a III-V substrate and having sidewall spacers formed on sides of the patterned gate stack, the III-V substrate including source/drain regions adjacent to the sidewall spacers and field oxide regions formed adjacent to the source/drain regions. The method includes growing metal contacts on the source/drain regions.

Abstract: A semiconductor device includes a drift region, a well region extending above the drift region, an active trench including sidewalls and a bottom, the active trench extending through the well region and into the drift region and having at least portions of its sidewalls and bottom lined with dielectric material. The device further includes a shield disposed within the active trench and separated from the sidewalls of the active trench by the dielectric material, a gate disposed within the active trench above the first shield and separated therefrom by inter-electrode dielectric material, and source regions formed in the well region adjacent the active trench. The gate is separated from the sidewalls of the active trench by the dielectric material. The shield and the gate are made of materials having different work functions.

Abstract: An embodiment of a process for manufacturing a power semiconductor device envisages the steps of: providing a body of semiconductor material having a top surface and having a first conductivity; forming columnar regions having a second type of conductivity within the body of semiconductor material, and surface extensions of the columnar regions above the top surface; and forming doped regions having the second type of conductivity, in the proximity of the top surface and in contact with the columnar regions. The doped regions are formed at least partially within the surface extensions of the columnar regions; the surface extensions and the doped regions have a non-planar surface pattern, in particular with a substantially V-shaped groove.

Abstract: A power MOSFET is described. A trench is in a body layer and an epitaxial layer. An isolation structure is on the substrate at one side of the trench. An oxide layer is on the surface of the trench. A first conductive layer fills the trench and extends to the isolation structure. A dielectric layer is on the first conductive layer and isolation structure and has an opening exposing the first conductive layer. At least one source region is in the body layer at the other side of the trench. A second conductive layer is on the dielectric layer and electrically connected to the source region while electrically isolated from the first conductive layer by the dielectric layer. A third conductive layer is on the dielectric layer and electrically connected to the first conductive layer through the opening of the dielectric layer. The second and third conductive layers are separated.

Abstract: A semiconductor device includes a step-type recess pattern formed in a substrate, a gate electrode buried in the recess pattern and having a gap disposed between the gate electrode and upper sidewalls of the recess pattern, an insulation layer filling the gap, and a source and drain region formed in a portion of the substrate at two sides of the recess pattern. The semiconductor device is able to secure a required data retention time by suppressing the increase of leakage current caused by the reduction of a design rule.

Abstract: Disclosed are semiconductor devices with breakdown voltages that are more controlled and stable after repeated exposure to breakdown conditions than prior art devices. The disclosed devices can be used to provide secondary circuit functions not previously contemplated by the prior art.

Abstract: A method for fabricating a vertical channel type non-volatile memory device including forming a source region, alternately forming a plurality of interlayer dielectric layers and a plurality of conductive layers for a gate electrode over a substrate with the source region formed therein, forming a trench exposing the source region by etching the plurality of interlayer dielectric layers and the plurality of conductive layers for a gate electrode, and siliciding the conductive layers for a gate electrode and the source region that are exposed through the trench.

Abstract: A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source/drain region is formed in the fin active region of both sides of a gate electrode.

Abstract: A vertical channel transistor array includes a plurality of embedded bit lines, a plurality of bit line contacts, a plurality of embedded word lines, and a current leakage isolation structure. An active area of a vertical channel transistor is defined by the semiconductor pillars. The embedded bit lines are disposed in parallel in a semiconductor substrate and extended in a column direction. Each of the bit line contacts is respectively disposed at a side of one of the embedded bit lines. The embedded word lines are disposed in parallel above the embedded bit lines and extended in a row direction. Besides, the embedded word lines and the semiconductor pillars in the same row are connected but spaced by a gate dielectric layer. The current leakage isolation structure is disposed at ends of the embedded bit lines to prevent current leakage between the adjacent bit line contacts.

Abstract: A semiconductor apparatus includes a doped semiconductor layer formed on a semiconductor substrate of a first conductivity type and first and second gate trenches formed in the semiconductor layer, the second gate trench being separated from the first gate trench in a first direction. The doped semiconductor layer includes a low concentration base region of a second conductivity typed formed between the first and second gate trenches, a first source region of the first conductivity type, a second source region of the first conductivity type, a first high concentration base region of the second conductivity type, and a second high concentration base region of the second conductivity type formed so that the first and second high concentration base regions are separated by the low concentration base region, and the second high concentration base region is not below both of the first and second source regions.

Abstract: In one embodiment, a transistor includes a pillar of semiconductor material arranged in a racetrack-shaped layout having a substantially linear section that extends in a first lateral direction and rounded sections at each end of the substantially linear section. First and second dielectric regions are disposed on opposite sides of the pillar. First and second field plates are respectively disposed in the first and second dielectric regions. First and second gate members respectively disposed in the first and second dielectric regions are separated from the pillar by a gate oxide having a first thickness in the substantially linear section. The gate oxide being substantially thicker at the rounded sections. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure.

Abstract: An MOS device includes a semiconductor layer of a first conductivity type and first and second source/drain regions of a second conductivity type formed in the semiconductor layer proximate an upper surface of the semiconductor layer. The first and second source/drain regions are spaced apart relative to one another. A gate is formed above and electrically isolated from the semiconductor layer, at least partially between the first and second source/drain regions. At least a given one of the first and second source/drain regions is configured having an effective width that is substantially greater than a width of a junction between the semiconductor layer and the given source/drain region.

Abstract: A semiconductor device which includes a gate electrode electrically connected to a gate portion made of a polysilicon film provided inside of a plurality of grooves formed in a striped form along a direction of a chip region. The gate electrode is formed as a film at the same layer level as a source electrode electrically connected to a source region formed between adjacent stripe-shaped grooves. The gate electrode is constituted of a gate electrode portion formed along a periphery of the chip region and a gate finger portion arranged to divide the chip region into halves. The source electrode is constituted of an upper portion and a lower portion relative to the gate finger portion, and the gate electrode and the source electrode are connected to a lead frame via a bump electrode.

Abstract: A semiconductor device comprising trench MOSFET as MOS rectifier is disclosed. For ESD capability enhancement and reverse recovery charge reduction, a built-in resistor in the semiconductor device is introduced according to the present invention between gate and source. The built-in resistor is formed by a doped poly-silicon layer filled into multiple trenches.

Abstract: A semiconductor device includes a semiconductor substrate including an active area defined by an device isolation region, a buried gate formed on both side walls of a trench formed in the semiconductor substrate, and a storage node contact which is buried between the buried gates, and is connected to the active region of a middle portion of the trench and the device isolation region.

Abstract: A method of forming a semiconductor device comprises providing a semiconductor substrate, providing a semiconductor layer of a first conductivity type over the semiconductor substrate, forming a first region of the first conductivity type in the semiconductor layer, and forming a control region over the semiconductor layer and over part of the first region. A mask layer is formed over the semiconductor layer and outlines a first portion of a surface of the semiconductor layer over part of the first region. Semiconductor material of a second conductivity type is provided to the outlined first portion to provide a second region in the semiconductor layer.

Abstract: A semiconductor power device integrated with a Gate-Source ESD diode for providing an electrostatic discharge (ESD) protection and a Gate-Drain clamp diode for drain-source avalanche protection. The semiconductor power device further includes a Nitride layer underneath the diodes and a thick oxide layer as an etching stopper layer for protecting a thin oxide layer on top surface of body region from over-etching.

Abstract: One aspect of the present subject matter relates to a method for forming a transistor. According to an embodiment of the method, a pillar of amorphous semiconductor material is formed on a crystalline substrate, and a solid phase epitaxy process is performed to crystallize the amorphous semiconductor material using the crystalline substrate to seed the crystalline growth. The pillar has a sublithographic thickness. A transistor body is formed in the crystallized semiconductor pillar between a first source/drain region and a second source/drain region. A surrounding gate insulator is formed around the semiconductor pillar, and a surrounding gate is formed around and separated from the semiconductor pillar by the surrounding gate insulator. Other aspects are provided herein.

Abstract: A method is disclosed of manufacturing a vertical transistor which comprises providing a substrate including a vertical stack of regions including a source region separated from a drain region by a channel region; forming a trench in said substrate, said trench at least partially extending into said vertical stack of regions; lining said trench with a stack comprising a gate dielectric liner, an etch protection layer and a further insulating layer; filling the remainder of the trench with a shield electrode material; exposing a top portion of the shield electrode material by removing the further insulating layer to a first depth in said trench; forming a inter electrode dielectric on the exposed shield electrode material; removing the etch protection layer to the first depth from said trench; and forming a gate electrode in said trench between the inter electrode dielectric liner and the exposed portion of the gate dielectric liner.

Abstract: A field-effect transistor involves a drain electrode, a drift region, a body region, a source region, a gate insulator layer, and a gate electrode. The drift region is disposed above the drain electrode. The body region extends down into the drift region from a first upper semiconductor surface. The source region is ladder-shaped and extends down in the body region from a second upper semiconductor surface. The first and second upper semiconductor surfaces are substantially planar and are not coplanar. A first portion of the body region is surrounded laterally by a second portion of the body region. The second portion of the body region and the drift region meet at a body-to-drift boundary. The body-to-drift boundary has a central portion that is non-planar. A gate insulator layer is disposed over the source region and a gate electrode is disposed over the gate insulator.

Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes a first junction region formed at the bottom of a vertical pillar, a bit line formed below the first junction region, and an insulation film formed below the bit line. As a result, the 4F2-sized semiconductor device is provided and the bit line is configured in the form of a laminated structure of a conductive layer and a polysilicon layer, so that bit line resistance is reduced. In addition, the semiconductor device reduces ohmic contact resistance by forming silicide between the conductive layer and the polysilicon layer, and includes an insulation film at a position between the semiconductor substrate and the bit line, resulting in reduction of bit line capacitance. Therefore, the sensing margin of the semiconductor device is increased and the data retention time is also increased.

Abstract: The invention provides a method for forming a transistor, which includes: providing a substrate, a semiconductor layer being formed on the substrate; forming a dummy gate structure on the semiconductor layer; forming a source region and a drain region in the substrate and the semiconductor layer and at opposite sides of the dummy gate structure; forming an interlayer dielectric layer on the semiconductor layer; removing the dummy gate structure for forming an opening in the interlayer dielectric layer; non-crystallizing the semiconductor layer exposed in the opening for forming a channel layer; annealing the channel layer so that the channel layer and the substrate have same crystal orientation; and forming a metal gate structure in the opening, the metal gate being formed on the channel layer. Saturation current of the transistor is raised, and the performance of a semiconductor device is promoted.

Abstract: A memory structure having a floating body is provided, which includes a substrate including an active area and an isolation structure surrounding the active area, a first source/drain region in the substrate in the active area, a first floating body in the substrate above the first source/drain region, a second floating body on the first floating body, a second source/drain region on the second floating body, and a trench-type gate structure in the substrate and beside the first floating body. A method of fabricating a memory structure having a floating body is also provided.

Abstract: A nonvolatile memory device includes a channel protruding in a vertical direction from a substrate, a plurality of interlayer dielectric layers and gate electrode layers which are alternately stacked over the substrate along the channel, and a memory layer formed between the channel and a stacked structure of the interlayer dielectric layers and gate electrode layers. Two or more gate electrode layers of the plurality of gate electrode layers are coupled to an interconnection line to form a selection transistor.

Abstract: A novel semiconductor power transistor is presented. The semiconductor structure is simple and is based on a multi-gate vertical MOS configuration with multi semiconductor pillars, so that the control on the carrier transport is enhanced and the specific on-resistance per area is reduced. Furthermore, due to its particular geometry, the parasitic resistances due to the source/drain junctions, are also drastically reduced with respect to standard CMOS technologies. It offers the advantage of extremely lower on-resistance for the same silicon area while improving on its dynamic performances. The novel structure does not require Silicon On Insulator technologies and can be built using the standard Bulk CMOS process technology. This characteristic improves the thermal properties of the device which are extremely important in power applications.

Abstract: In a vertical transistor comprising a pillar-shaped semiconductor layer and a gate electrode formed around the pillar-shaped semiconductor layer, it is difficult to form a transistor having a gate length greater than that of the vertical transistor. The present invention provides a semiconductor device which comprises two vertical transistors comprising first and second pillar-shaped semiconductor layers each formed on a first diffusion layer on a substrate. The vertical transistors have a common gate electrode. A first upper diffusion layer formed on a top of the first pillar-shaped semiconductor layer is connected to a source electrode, and a second upper diffusion layer formed on a top of the second pillar-shaped semiconductor layer is connected to a drain electrode. The vertical transistors are connected in series to operate as a composite transistor having a gate length two times greater than that of each of the vertical transistors.

Abstract: A semiconductor device includes a first conductive type semiconductor substrate; a first conductive type semiconductor region provided thereon in which first conductive type first pillar regions and second conductive type second pillar regions alternately arranged; second conductive type second semiconductor regions provided on second pillar regions in an element region to be in contact with first pillar regions therein; gate electrodes each provided on adjacent second semiconductor regions and on one of the first pillar region interposed therebetween; third semiconductor regions functioning as a first conductive type source region provided in parts of the second semiconductor regions located under side portions of the gate electrodes; and a second conductive type resurf region which is a part of a terminal region surrounding the element region and which is provided on first pillar regions and second pillar regions in the part of the terminal regions.

Abstract: A method of forming a vertical field effect transistor includes etching an opening into semiconductor material. Sidewalls and radially outermost portions of the opening base are lined with masking material. A semiconductive material pillar is epitaxially grown to within the opening adjacent the masking material from the semiconductor material at the opening base. At least some of the masking material is removed from the opening. A gate dielectric is formed radially about the pillar. Conductive gate material is formed radially about the gate dielectric. An upper portion of the pillar is formed to comprise one source/drain region of the vertical transistor. Semiconductive material of the pillar received below the upper portion is formed to comprise a channel region of the vertical transistor. Semiconductor material adjacent the opening is formed to comprise another source/drain region of the vertical transistor. Other aspects and implementations are contemplated.

Abstract: Provided is a semiconductor device which can relax the electric field in the junction termination region, and can achieve a high breakdown voltage. The semiconductor device includes an element region (51) and a junction termination region (52). The element region includes: a first semiconductor region (2) of a first conductivity type; a second semiconductor region (4) of a second conductivity type; a third semiconductor region (10) of the first conductivity type; a trench (35) passing through the second semiconductor region and the third semiconductor region and has a bottom surface which reaches the first semiconductor region (2); a gate insulating film (12) formed on the side surface and a bottom surface of the trench; and a gate electrode (8) embedded in the trench.

Abstract: Disclosed herein is a semiconductor device including: a first conductivity type semiconductor base body; a first conductivity type pillar region; second conductivity type pillar regions; element and termination regions provided in the first and second conductivity type pillar regions, transistors being formed in the element region, and no transistors being formed in the termination region; body regions; a gate insulating film; gate electrodes; source regions; and body potential extraction regions, wherein voids are formed in the second conductivity type pillar regions of the termination region.

Abstract: A semiconductor device may include, but is not limited to, a semiconductor substrate, a word line, and an isolation region. The semiconductor substrate has an active region and first and second grooves. Each of the first and second grooves extends across the active region. The first groove is wider in width than the second groove. The word line is disposed in the first groove. The isolation region is disposed in the second groove. The isolation region is narrower in width than the word line.

Abstract: A double-gate vertical channel transistor (DGVC) structure is described which is particularly well suited for Dynamic RAM (DRAM) memory (e.g., capacitorless DRAM) wherein the memory cell occupies a small cell area of 4F2, and provides beneficial retention properties including immunity to disturbances. The vertical transistors are arranged in an alternating gate-facing orientation, with a common source formed on a first end and separate drains on their second ends. Word lines comprise alternating front gates and back gates shared by columns of gate-facing transistors on each side of it. The DGVC cell provides enhanced scalability allowing the continued scaling of DRAM technology and can be fabricated using low-cost semiconductor materials and existing fabrication techniques. Fabrication techniques and array biasing are also described for the DGVC cell arrays.

Abstract: A semiconductor device of one embodiment, including the semiconductor layer including a III-V group nitride semiconductor; a groove portion formed in the semiconductor layer; the gate insulating film formed at least on a bottom surface of the groove portion, the gate insulating film being a stacked film of a first insulating film and a second insulating film of which dielectric constant is higher than that of the first insulating film; the gate electrode formed on the gate insulating film; and a source electrode and a drain electrode formed on the semiconductor layer across the gate electrode, in which the second insulating film is selectively formed only under the gate electrode.

Abstract: A vertical transistor structure includes a substrate, a source, a first gate, a first insulating layer, a second gate, a gate insulating layer, a drain, a second insulating layer, and a semiconductor channel layer. The source is configured on the substrate. The first gate is configured on the source and has at least one first through hole. The first insulating layer is between the first gate and the source. The second gate is configured on the first gate and has at least one second through hole. The gate insulating layer is between the first and second gates and has at least one third through hole. The first, second, and third through holes are communicated with one another. The drain is configured on the second gate. The second insulating layer is configured between the second gate and the drain. The semiconductor channel layer fills the first, second, and third through holes.

Abstract: An SiC semiconductor device includes a substrate, a drift layer, a base region, a source region, a trench, a gate oxide film, a gate electrode, a source electrode and a drain electrode. The substrate has a Si-face as a main surface. The source region has the Si-face. The trench is provided from a surface of the source region to a portion deeper than the base region and extends longitudinally in one direction and has a Si-face bottom. The trench has an inverse tapered shape, which has a smaller width at an entrance portion than at a bottom, at least at a portion that is in contact with the base region.

Abstract: The present invention includes a semiconductor substrate, a gate electrode which is provided on the semiconductor substrate, a source electrode and a drain elect rode which are provided on the semiconductor substrate to sandwich the gate electrode, and a recess provided below edges of the gate electrode at least on a drain electrode side.

Abstract: In a first method for manufacturing a semiconductor device, an opening is formed in a substrate. A tungsten film is formed on the substrate so as to fill up inside the opening, and then the tungsten film is annealed. The tungsten film is etched back so that the tungsten film remains inside the opening. In a second method for manufacturing a semiconductor device, a laminate body comprising a tungsten film and an insulating film on the tungsten film is formed on a substrate. The laminate body is annealed, and then the laminate body is etched back.

Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type and a semiconductor layer of a second conductivity type formed thereon. The semiconductor layer of the second conductivity type is characterized by a first thickness. The semiconductor device includes a set of trenches having a predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining interfacial regions disposed between the semiconductor layer of the second conductivity type and each of the trenches. The trenches comprises a distal portion consisting essentially of a dielectric material disposed therein and a proximal portion comprising the dielectric material and a gate material disposed interior to the dielectric material in the proximal portion of the trench. The semiconductor device further includes a source region coupled to the semiconductor layer of the second conductivity type.

Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device prevents separation between the channel region and the semiconductor substrate to prevent the floating body effect and to guarantee a sufficient overlap between a gate and a junction region. The semiconductor device includes a vertical pillar including a vertical channel, a diffusion control layer contained in the vertical pillar, and a junction region formed close to the diffusion control layer in the vertical pillar.

Abstract: A method for fabricating a semiconductor device includes forming a first trench by etching a substrate, forming first spacers on sidewalls of the first trench, forming a second trench by etching the substrate under the first trench, forming second spacers on sidewalls of the second trench, forming a third trench, which has a wider width than a width between the second spacers, by etching the substrate under the second trench, forming a liner layer on the surface of the third trench, and exposing one of the sidewalls of the second trench by selectively removing the second spacers.

Abstract: A semiconductor device includes a trench extending from a surface of a P-base layer to a surface of a P-well layer. The trench has a trench end portion defined in the surface of the P-well layer and in a direction in which the trench extends. The trench has first and second regions. The first region extends from the trench end portion to get into the surface of the P-base layer near a boundary between the P-base layer and the P-well layer. The second region extends in the surface of the P-base layer from an end portion of the first region. A trench width is greater in the first region than in the second region.

Abstract: A semiconductor device and a method for forming the same are disclosed. A method for forming a semiconductor device includes forming a trench by etching a semiconductor substrate, forming a barrier metal layer having a thickness of 100 ? or less over a surface of the trench, forming a nucleation layer over the barrier metal layer, configured to include a ?-tungsten (?-W) structure, and forming a bulk layer over the nucleation layer so as to bury the bottom of the trench. As a result, resistivity can be reduced and a stable-phase barrier metal layer can be obtained. In addition, productivity is improved so that gate resistance is prevented from increasing.

Abstract: Semiconductor devices with vertical channel transistors, the devices including semiconductor patterns disposed on a substrate, first gate patterns disposed between the semiconductor patterns on the substrate, a second gate pattern spaced apart from the first gate patterns by the semiconductor patterns, and conductive lines crossing the first gate patterns. The second gate pattern includes a first portion extending parallel to the first gate patterns and a second portion extending parallel to the conductive lines.

Abstract: A semiconductor device that secures a contact margin between a storage node contact plug and an active region and a method for fabricating the same. A method for fabricating a semiconductor device includes forming a device isolation layer defining active regions extending in a first direction a substrate, forming a first trench extending across the active regions and the device isolation layer by selectively etching the substrate, forming a second trench under the first trench to isolate the active regions which are adjacent in the first direction by selectively etching the substrate, and forming a gate electrode filling the first and second trenches.

Abstract: A semiconductor device includes buried gates formed over a substrate, storage node contact plugs which are formed over the substrate and include a pillar pattern and a line pattern disposed over the pillar pattern, and a bit line structure which is formed over the substrate and isolates adjacent ones of the storage node contact plugs from each other.