Vertical Transistor (epo) Patents (Class 257/E29.262)
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Publication number: 20120306003Abstract: Disclosed is a MOSFET including at least one transistor cell. The at least one transistor cell includes a source region, a drain region, a body region and a drift region. The body region is arranged between the source region and the drift region and the drift region is arranged between the body region and the drain region. The at least one transistor cell further includes a compensation region arranged in the drift region and distant to the body region, a source electrode electrically contacting the source region and the body region, a gate electrode arranged adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a coupling arrangement including a control terminal. The coupling arrangement is configured to electrically couple the compensation region to at least one of the body region, the source region, the source electrode and the gate electrode dependent on a control signal received at the control terminal.Type: ApplicationFiled: May 31, 2011Publication date: December 6, 2012Applicant: INFINEON TECHNOLOGIES AGInventors: Armin Willmeroth, Franz Hirler
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Publication number: 20120306006Abstract: A semiconductor power device includes a substrate, a first semiconductor layer on the substrate, a second semiconductor layer on the first semiconductor layer, and a third semiconductor layer on the second semiconductor layer. At least a recessed epitaxial structure is disposed within a cell region and the recessed epitaxial structure may be formed in a pillar or stripe shape. A first vertical diffusion region is disposed in the third semiconductor layer and the recessed epitaxial structure is surrounded by the first vertical diffusion region. A source conductor is disposed on the recessed epitaxial structure and a trench isolation is disposed within a junction termination region surrounding the cell region. In addition, the trench isolation includes a trench, a first insulating layer on an interior surface of the trench, and a conductive layer filled into the trench, wherein the source conductor connects electrically with the conductive layer.Type: ApplicationFiled: September 7, 2011Publication date: December 6, 2012Inventors: Yung-Fa Lin, Shou-Yi Hsu, Meng-Wei Wu, Main-Gwo Chen, Yi-Chun Shih
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Publication number: 20120306004Abstract: Provided is a semiconductor memory device. The semiconductor memory device may include a local bitline extending in a direction substantially vertical to an upper surface of a semiconductor substrate and a local wordline intersecting the local bitline. The local bitline is electrically connected to a bitline channel pillar penetrating a gate of a bitline transistor, and the local wordline is electrically connected to a wordline channel pillar penetrating a gate of a wordline transistor.Type: ApplicationFiled: August 14, 2012Publication date: December 6, 2012Inventors: Hong Sik Yoon, Jinshi Zhao, Ingyu Baek, Hyun Jun Sim, Minyoung Park
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Publication number: 20120306008Abstract: A method for manufacturing a semiconductor device comprises forming a buried gate after forming an active region to have a line type. The buried gate comprises an operation gate and a non-operation gate. A height of a gate electrode layer (conductive material) of the non-operation gate is formed to be lower than that of a gate electrode layer of the operation gate, thereby increasing a threshold voltage and preventing an overlap of the ion-implanted active region with the non-operation gate. As a result, a Gate Induced Drain Leakage (GIDL) is prevented to improve a refresh characteristic of the semiconductor device.Type: ApplicationFiled: August 10, 2012Publication date: December 6, 2012Applicant: Hynix Semiconductor Inc.Inventor: Kyung Do KIM
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Publication number: 20120306007Abstract: According to one embodiment, a semiconductor device includes a substrate, a gate electrode, source/drain regions, and a gate insulating film. The substrate is made of monocrystalline silicon, an upper surface of the substrate is a (100) plane, and a trench is made in the upper surface. The gate electrode is provided in at least an interior of the trench. The source/drain regions are formed in regions of the substrate having the trench interposed. The gate insulating film is provided between the substrate and the gate electrode. The trench includes a bottom surface made of a (100) plane, a pair of oblique surfaces made of (111) planes contacting the bottom surface, and a pair of side surfaces made of (110) planes contacting the oblique surfaces. The source/drain regions are in contact with the side and oblique surfaces and are apart from a central portion of the bottom surface.Type: ApplicationFiled: January 18, 2012Publication date: December 6, 2012Applicant: Kabushiki Kaisha ToshibaInventor: Hiroyuki YANAGISAWA
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Publication number: 20120306005Abstract: The present invention relates to transistor devices having a trough channel structure through which electrical current flows and methods for making the same. A transistor device having a semiconductor trough structure comprises a semiconductor substrate of a first conductivity type having a top surface; a semiconductor trough protruded from the top surface of the substrate along a first direction and having two top surfaces, two outer lateral surfaces, and an inner surface; a layer of isolation insulator disposed on the substrate and abutting the outer lateral surfaces of the semiconductor trough; a gate dielectric layer lining the inner surface and the top surfaces of the semiconductor trough; and a gate electrode disposed on top of the isolation insulator and extending over and filling the semiconductor trough with the gate dielectric layer interposed therebetween. The gate electrode extends along a second direction not parallel to the first direction provided in the semiconductor trough.Type: ApplicationFiled: July 21, 2011Publication date: December 6, 2012Inventors: Kimihiro Satoh, Jing Zhang, Yiming Huai
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Publication number: 20120307508Abstract: The present invention makes it possible to inhibit an SOA (Safe Operating Area) in a vertical-type bipolar transistor from narrowing. A p-type base layer 150 includes a first peak, a second peak, and a third peak in an impurity profile in the thickness direction. The first peak is located on the topmost surface side of a semiconductor substrate 100. The second peak is located closer to the bottom face side of the semiconductor substrate 100 than the first peak and higher than the first peak. The third peak is located between the first peak and the second peak.Type: ApplicationFiled: June 4, 2012Publication date: December 6, 2012Applicant: Renesas Electronics CorporationInventors: Yuki FUKUI, Hiroaki Katou
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Publication number: 20120305999Abstract: Provided are a semiconductor device capable of increasing an ON current with a reduced channel resistance, and also capable of stably and independently operating respective transistors, and a method of manufacturing the semiconductor device. A semiconductor device includes a fin portion located in a manner that a part of an active region protrudes from a bottom portion of a gate groove, a gate insulating film for covering the gate groove and a surface of the fin portion, a gate electrode which is embedded within a lower portion of the gate groove and formed so as to straddle the fin portion via the gate insulating film, a first diffusion region, a second diffusion region, and a carrier capture region provided in the surface of the fin portion.Type: ApplicationFiled: May 31, 2012Publication date: December 6, 2012Applicant: ELPIDA MEMORY, INC.Inventor: Kensuke OKONOGI
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Publication number: 20120305997Abstract: A semiconductor device includes a substrate, a gate insulation layer, a gate structure, a gate spacer, and first and second impurity regions. The substrate has an active region defined by an isolation layer. The active region has a gate trench thereon. The gate insulation layer is formed on an inner wall of the gate trench. The gate structure is formed on the gate insulation layer to fill the gate trench. The gate structure has a width smaller than that of the gate trench, and has a recess at a first portion thereof. The gate spacer is formed on sidewalls of the gate structure. The first and second impurity regions are formed at upper portions of the active region adjacent to the gate structure. The first impurity region is closer to the recess than the second impurity region. Related methods are also provided.Type: ApplicationFiled: August 15, 2012Publication date: December 6, 2012Inventors: Joo-Young Lee, Dong-Gun Park
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Patent number: 8324683Abstract: An oxide termination semiconductor device may comprise a plurality of gate trenches, a gate runner, and an insulator termination trench. The gate trenches are located in an active region. Each gate trench includes a conductive gate electrode. The insulator termination trench is located in a termination region that surrounds the active region. The insulator termination trench is filled with an insulator material to form an insulator termination for the semiconductor device. The device can be made using a three-mask or four-mask process.Type: GrantFiled: February 7, 2012Date of Patent: December 4, 2012Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Sik Lui, Anup Bhalla
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Patent number: 8324682Abstract: A dynamic random access memory cell having vertical channel transistor includes a semiconductor pillar, a drain layer, an assisted gate, a control gate, a source layer, and a capacitor. The vertical channel transistor has an active region formed by the semiconductor pillar. The drain layer is formed at the bottom of the semiconductor pillar. The assisted gate is formed beside the drain layer, and separated from the drain layer by a first gate dielectric layer. The control gate is formed beside the semiconductor pillar, and separated from the active region by a second gate dielectric layer. The source layer is formed at the top of the semiconductor pillar. The capacitor is formed to electrical connect to the source layer.Type: GrantFiled: February 17, 2011Date of Patent: December 4, 2012Assignee: Powerchip Technology CorporationInventors: Hui-Huang Chen, Chih-Yuan Chen, Sheng-Fu Yang, Chun-Cheng Chen
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Publication number: 20120299073Abstract: A semiconductor device includes a semiconductor substrate having a first gate groove having first and second sides opposite to each other; a first diffusion region underneath the first gate groove; a second diffusion region in the semiconductor substrate, the second diffusion region covering an upper portion of the first side of the first gate groove; and a third diffusion region in the semiconductor substrate. The third diffusion region covers the second side of the first gate groove. The third diffusion region is coupled to the first diffusion region. The third diffusion region has a bottom which is deeper than a bottom of the first gate groove. The bottom of the third diffusion region is different in level from the bottom of the first diffusion region.Type: ApplicationFiled: May 24, 2012Publication date: November 29, 2012Applicant: ELPIDA MEMORY, INC.Inventor: Noriaki MIKASA
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Publication number: 20120299076Abstract: A nonvolatile memory device includes a channel vertically extending from a substrate and comprising a first region that is doped with first impurities and a second region that is disposed under the first region, a plurality of memory cells and a selection transistor stacked over the substrate along the channel, and a diffusion barrier interposed between the first region and the second region, wherein a density of the first impurities is higher than a density of impurities of the second region.Type: ApplicationFiled: November 25, 2011Publication date: November 29, 2012Inventors: Hyun-Seung YOO, Eun-Seok Choi
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Publication number: 20120299090Abstract: A semiconductor device may include a semiconductor substrate with first and second spaced apart source/drain regions defining a channel region therebetween and a control gate structure on the channel region between the first and second spaced apart source/drain regions. More particularly, the control gate structure may include a first gate electrode on the channel region adjacent the first source/drain region, and a second gate electrode on the channel region adjacent the second source/drain region. Moreover, the first and second gate electrodes may be electrically isolated. Related devices, structures, methods of operation, and methods of fabrication are also discussed.Type: ApplicationFiled: November 17, 2011Publication date: November 29, 2012Inventors: Ji-Young Kim, Gyo-Young Jin, Hyeong-Sun Hong, Yong-Chul Oh, Yoo-Sang Hwang, Sung-Kwan Choi, Dong-Soo Woo, Hyun-Woo Chung
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Publication number: 20120299089Abstract: It is disclosed a semiconductor device and a method for manufacturing the same. One method comprises providing a semiconductor layer that is formed on an insulating layer; forming a mask pattern on the semiconductor layer, which exposes a portion of the semiconductor layer; removing the exposed portion of the semiconductor layer of a predetermined thickness, thereby forming a groove; forming a gate stack in the mask pattern and the groove; removing the mask pattern to expose a portion of sidewalls of the gate stack. The method not only meets the requirement for a precise thickness of the SOI, but also increases the thickness of the source/drain regions as compared to a device having a uniform SOI thickness at the gate stack, thereby facilitating a reduction of the parasitic resistance of the source/drain regions.Type: ApplicationFiled: August 9, 2011Publication date: November 29, 2012Inventors: Zhijiong Luo, Haizhou Yin, Huilong Zhu
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Publication number: 20120299005Abstract: A non-volatile memory device includes a channel that extends from a substrate in a vertical direction and includes a first portion including an impurity doped region and a second portion disposed under the first portion; and a plurality of memory cells and a selection transistor that are stacked over the substrate along the channel, where the impurity doped region includes a second impurity doped region that forms a side surface and an upper surface of the first portion and a first impurity doped region that covers the second impurity doped region, and a bandgap energy of the second impurity doped region is lower than a bandgap energy of the first impurity doped region.Type: ApplicationFiled: December 19, 2011Publication date: November 29, 2012Inventor: Byung-In LEE
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Publication number: 20120299088Abstract: Some embodiments include memory arrays. The memory arrays may have digit lines under vertically-oriented transistors, with the digit lines interconnecting transistors along columns of the array. Each individual transistor may be directly over only a single digit line, with the single digit line being entirely composed of one or more metal-containing materials. The digit lines can be over a deck, and electrically insulative regions can be directly between the digit lines and the deck. Some embodiments include methods of forming memory arrays. A plurality of linear segments of silicon-containing material may be formed to extend upwardly from a base of the silicon-containing material. The base may be etched to form silicon-containing footings under the linear segments, and the footings may be converted into metal silicide. The linear segments may be patterned into a plurality of vertically-oriented transistor pedestals that extend upwardly from the metal silicide footings.Type: ApplicationFiled: May 27, 2011Publication date: November 29, 2012Applicant: MICRON TECHNOLOGY, INC.Inventors: Lars P. Heineck, Shyam Surthi, Jaydip Guha
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Publication number: 20120299053Abstract: A semiconductor device includes a source metallization and a semiconductor body. The semiconductor body includes a first field-effect structure including a source region of a first conductivity type electrically coupled to the source metallization. The semiconductor body also includes a second field-effect structure including a source region of the first conductivity type electrically coupled to the source metallization. A voltage tap including a semiconductor region within the semiconductor body is electrically coupled to a first gate electrode of the first field-effect structure by an intermediate inverter structure.Type: ApplicationFiled: May 27, 2011Publication date: November 29, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Anton MAUDER, Franz HIRLER, Joachim WEYERS
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Publication number: 20120299091Abstract: A trenched power semiconductor device on a lightly doped substrate is provided. Firstly, a plurality of trenches including at least a gate trench and a contact window are formed on the lightly doped substrate. Then, at least two trench-bottom heavily doped regions are formed at the bottoms of the trenches. These trench-bottom heavily doped regions are then expanded to connect with each other by using thermal diffusion process so as to form a conductive path. Afterward, the gate structure and the well are formed above the trench-bottom heavily doped regions, and then a conductive structure is formed in the contact window to electrically connect the trench-bottom heavily doped regions to an electrode.Type: ApplicationFiled: May 25, 2011Publication date: November 29, 2012Applicant: GREAT POWER SEMICONDUCTOR CORP.Inventors: YI-YUN TSAI, YUAN-SHUN CHANG, KAO-WAY TU
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Patent number: 8319279Abstract: A semiconductor device includes a transistor with a substrate on which source and drain regions, both of a first conductivity type, and a channel region of a second conductivity type between the source and drain are formed, and a gate electrode formed in the channel region to bury a trench formed so the depth thereof changes intermittently in the width direction of the gate. In the channel region, each on a surface of the substrate and in a bottom portion of the trench, there are formed a second high-concentration region and a first high-concentration region, and the dopant concentration of the second conductivity type is higher than the dopant concentration of the second conductivity type in portions sideward from the trench. The dopant concentration of the second conductivity type in the first high-concentration region is higher than the dopant concentration of the second conductivity type in the second high-concentration region.Type: GrantFiled: June 22, 2010Date of Patent: November 27, 2012Assignee: Renesas Electronics CorporationInventor: Hiroshi Kawaguchi
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Patent number: 8319281Abstract: A semiconductor device capable of inhibiting a fabricating process from complication while inhibiting the dielectric strength voltage of a insulating film from reduction is obtained. This semiconductor device includes a groove portion, an insulating film formed on a surface of the groove portion, a gate electrode and a source impurity region, wherein upper ends of the gate electrode, which are portions in contact with the insulating film, are each located at a position identical with or deeper than the range of an impurity introduced from a surface of a semiconductor substrate with respect to the insulating film in order to form the source impurity region and above a lower surface of the source impurity region.Type: GrantFiled: December 27, 2007Date of Patent: November 27, 2012Assignee: Sanyo Electric, Co., Ltd.Inventors: Yoshikazu Yamaoka, Satoru Shimada, Kazunori Fujita, Kazuhiro Sasada
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Patent number: 8319280Abstract: Semiconductor memory devices having recessed access devices are disclosed. In some embodiments, a method of forming the recessed access device includes forming a device recess in a substrate material that extends to a first depth in the substrate that includes a gate oxide layer in the recess. The device recess may be extended to a second depth that is greater that the first depth to form an extended portion of the device recess. A field oxide layer may be provided within an interior of the device recess that extends inwardly into the interior of the device recess and into the substrate. Active regions may be formed in the substrate that abut the field oxide layer, and a gate material may be deposited into the device recess.Type: GrantFiled: September 13, 2011Date of Patent: November 27, 2012Assignee: Micron Technology, Inc.Inventors: Kurt D. Beigel, Jigish D. Trivedi, Kevin G. Duesman
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Patent number: 8318558Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes vertical pillars formed by etching a semiconductor substrate and junction regions which are located among the neighboring vertical pillars and spaced apart from one another in a zigzag pattern. As a result, the semiconductor device easily guarantees an electrical passage between the semiconductor substrate and the vertical pillars, such that it substantially prevents the floating phenomenon from being generated, resulting in the prevention of deterioration of the semiconductor device.Type: GrantFiled: June 30, 2010Date of Patent: November 27, 2012Assignee: Hynix Semiconductor Inc.Inventor: Seung Hwan Lee
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Publication number: 20120292694Abstract: A shielded gate trench metal oxide semiconductor filed effect transistor (MOSFET) having high switching speed is disclosed. The inventive shielded gate trench MOSFET includes a shielded electrode spreading resistance placed between a shielded gate electrode and a source metal to enhance the performance of the shielded gate trench MOSFET by adjusting doping concentration of poly-silicon in gate trenches to a target value. Furthermore, high cell density is achieved by employing the inventive shielded gate trench MOSFET without requirement of additional cost.Type: ApplicationFiled: May 16, 2011Publication date: November 22, 2012Applicant: FORCE MOS TECHNOLOGY CO. LTD.Inventor: Fu-Yuan HSIEH
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Publication number: 20120292689Abstract: A semiconductor structure and a method for operating the same are provided. The semiconductor structure includes a substrate, a first doped region, a second doped region, a third doped region, a first trench structure and a second gate structure. The first doped region is in the substrate. The first doped region has a first conductivity type. The second doped region is in the first doped region. The second doped region has a second conductivity type opposite to the first conductivity type. The third doped region having the first conductivity type is in the second doped region. The first trench structure has a first gate structure. The first gate structure and the second gate structure are respectively on different sides of the second doped region.Type: ApplicationFiled: May 19, 2011Publication date: November 22, 2012Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Shyi-Yuan Wu, Wing-Chor Chan
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Publication number: 20120292690Abstract: A semiconductor device includes a storage node contact plug, a bit line in communication with to the storage node contact plug, and an expansion unit formed on a sidewall of the bit line. Thermal expansion of the expansion unit serves to increase capacitance by ensuring a distance between the bit line and the storage node contact plug, thereby improving a sensing margin. A cell characteristic such as a record recovery time (tWR) may be enhanced.Type: ApplicationFiled: January 10, 2012Publication date: November 22, 2012Applicant: Hynix Semiconductor Inc.Inventor: Yong Won SEO
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Publication number: 20120292693Abstract: Semiconductor device fabrication method and devices are disclosed. A device may be fabricated by forming in a semiconductor layer; filling the trench with an insulating material; removing selected portions of the insulating material leaving a portion of the insulating material in a bottom portion of the trench; forming one or more spacers on one or more sidewalls of a remaining portion of the trench; anisotropically etching the insulating material in the bottom portion of the trench using the spacers as a mask to form a trench in the insulator; removing the spacers; and filling the trench in the insulator with a conductive material. Alternatively, an oxide-nitride-oxide (ONO) structure may be formed on a sidewall and at a bottom of the trench and one or more conductive structures may be formed in a portion of the trench not occupied by the ONO structure.Type: ApplicationFiled: July 27, 2012Publication date: November 22, 2012Applicant: ALPHA & OMEGA SEMICONDUCTOR INCORPORATEDInventors: Yeeheng LEE, Sung-Shan TAI, Hong CHANG, John CHEN
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Publication number: 20120292681Abstract: A semiconductor device includes a substrate having a groove in a periphery, a gate electrode partially embedded in the groove to sandwich the substrate from opposite directions by side walls of the groove, and a diffusion layer formed over the substrate and surrounded by the gate electrode. A resistance value of the diffusion layer is changed by changing a potential between the gate electrode and the diffusion layer.Type: ApplicationFiled: May 16, 2012Publication date: November 22, 2012Inventors: Yoshinori IKEBUCHI, Yoshihiro TAKAISHI
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Publication number: 20120292691Abstract: A MOSFET power chip includes a first vertical MOSFET and a second vertical MOSFET. The first vertical MOSFET includes a semiconductor body having a first surface defining a source and a second surface defining a drain and a gate structure formed in the semiconductor body near the second surface. A via is formed within the semiconductor body and is substantially perpendicular to the first surface and the second surface. The via has a first end electrically coupled to the first surface and a second end electrically coupled to the gate structure. The second vertical MOSFET includes a semiconductor body having a first surface defining a source, a second surface defining a drain and a gate structure formed in the semiconductor body near the first surface.Type: ApplicationFiled: May 28, 2012Publication date: November 22, 2012Inventor: Ahmad Ashrafzadeh
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Patent number: 8314460Abstract: A semiconductor apparatus according to the present invention includes a first semiconductor layer of a first conductive type, a low concentration base region of a second conductive type formed on the first semiconductor layer, a gate electrode formed in a trench with insulating film on an inner surface of the trench that is formed to reach the first semiconductor layer from a surface of the low concentration base region, a source region of the first conductive type formed, contacting the insulating film, on a surface of the low concentration base region, a first high concentration base region, a second high concentration base region provided below and separated from the first concentration base region, and a third high concentration base region of the second conductive type included inside the low concentration base region, provided below and separated from the second high concentration base region.Type: GrantFiled: September 14, 2009Date of Patent: November 20, 2012Assignee: Renesas Electronics CorporationInventors: Kinya Ohtani, Kenya Kobayashi
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Patent number: 8314471Abstract: In one embodiment, the present invention includes a semiconductor power device. The semiconductor power device comprises a trenched gate and a trenched field region. The trenched gate is disposed vertically within a trench in a semiconductor substrate. The trenched field region is disposed vertically within the trench and below the trenched gate. A lower portion of the trenched field region tapers to disperse an electric field.Type: GrantFiled: November 17, 2009Date of Patent: November 20, 2012Assignee: Diodes IncorporatedInventors: Chiao-Shun Chuang, Tony Huang
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Publication number: 20120286353Abstract: A trench MOS structure is disclosed. The trench MOS structure includes a substrate, an epitaxial layer, a doping well, a doping region and a trench gate. The substrate has a first conductivity type, a first side and a second side opposite to the first side. The epitaxial layer has the first conductivity type and is disposed on the first side. The doping well has a second conductivity type and is disposed on the epitaxial layer. The doping region has the first conductivity type and is disposed on the doping well. The trench gate is partially disposed in the doping region. The trench gate has a bottle shaped profile with a top section smaller than a bottom section, both are partially disposed in the doping well. The bottom section of two adjacent trench gates results in a higher electrical field around the trench MOS structures.Type: ApplicationFiled: May 12, 2011Publication date: November 15, 2012Inventors: Chin-Te Kuo, Yi-Nan Chen, Hsien-Wen Liu
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Publication number: 20120286351Abstract: A semiconductor device includes a plurality of pillars disposed to protrude from a semiconductor substrate, bit lines surrounding perimeters of portions of the plurality of pillars and extending in a first direction, gates spaced apart from the bit lines, surrounding perimeters of portions of the plurality of pillars over the bit lines, and extending to a second direction perpendicular to the first direction, and separation layers separating the gates parallel to the second direction. Therefore, the semiconductor device suitable to the high integration of semiconductor devices can be implemented.Type: ApplicationFiled: July 20, 2011Publication date: November 15, 2012Applicant: Hynix Semiconductor Inc.Inventor: Seung Wan KIM
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Publication number: 20120286352Abstract: A trench MOS structure is provided. The trench MOS structure includes a substrate, an epitaxial layer, a trench, a gate isolation, a trench gate, a guard ring and a reinforcement structure within the guard ring. The substrate has a first conductivity type, a first side and a second side opposite to the first side. The epitaxial layer has the first conductivity type and is disposed on the first side. The trench is disposed in the epitaxial layer. The gate isolation covers the inner wall of the trench. The trench gate is disposed in the trench and has the first conductivity type. The guard ring has a second conductivity type and is disposed within the epitaxial layer. The reinforcement structure has an electrically insulating material and is disposed within the guard ring.Type: ApplicationFiled: May 10, 2011Publication date: November 15, 2012Inventors: Chin-Te Kuo, Yi-Nan Chen, Hsien-Wen Liu
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Publication number: 20120286355Abstract: A power semiconductor device has a semiconductor body which includes an active area and a peripheral area which both define a horizontal main surface of the semiconductor body. The semiconductor body further includes an n-type semiconductor layer, a pn junction and at least one trench. The n-type semiconductor layer is embedded in the semiconductor body and extends to the main surface in the peripheral area. The pn junction is arranged between the n-type semiconductor layer and the main surface in the active area. The at least one trench extends in the peripheral area from the main surface into the n-type semiconductor layer and includes a dielectric layer with fixed negative charges. In the vertical direction, the dielectric layer is arranged both below and above the pn junction. The dielectric layer with fixed negative charges typically has a negative net charge. Further, a method for forming a semiconductor device is provided.Type: ApplicationFiled: July 6, 2012Publication date: November 15, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Anton Mauder, Franz Hirler, Wolfgang Lehnert, Rudolf Berger, Klemens Pruegl, Hans-Joachim Schulze, Helmut Strack
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Publication number: 20120286354Abstract: A semiconductor device having a buried gate is provided. The semiconductor device is formed in a structure in which a plurality of contacts having small step differences are stacked without forming a metal contact applying an operation voltage to the buried gate in a single contact and a contact pad is formed between the contacts so that failure due to misalignment can be prevented without a separate additional process for forming the contacts.Type: ApplicationFiled: January 10, 2012Publication date: November 15, 2012Applicant: Hynix Semiconductor Inc.Inventor: Chul Hwan CHO
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Publication number: 20120286356Abstract: A semiconductor device includes a gate electrode, a top source region disposed next to the gate electrode, a drain region disposed below the bottom of the gate electrode, a oxide disposed on top of the source region and the gate electrode, and a doped polysilicon spacer disposed along a sidewall of the source region and a sidewall of the oxide. Methods for manufacturing such device are also disclosed. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: July 26, 2012Publication date: November 15, 2012Applicant: Alpha and Omega Semiconductor, LTD.Inventors: François Hébert, Anup Bhalla
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Patent number: 8310002Abstract: A semiconductor device includes a semiconductor substrate, a first diffusion region, a gate insulating film, a gate electrode, a second diffusion region and a contact plug. The semiconductor substrate includes a base and at least a pillar. The first diffusion region is disposed in the base. The gate insulating film covers a side surface of the pillar. The gate electrode is separated from the pillar by the gate insulating film. The second diffusion region is disposed in an upper portion of the pillar. The contact plug is connected to the second diffusion region. The contact plug is connected to the entirety of the top surface of the pillar.Type: GrantFiled: April 20, 2009Date of Patent: November 13, 2012Assignee: Elpida Memory, Inc.Inventor: Hiroyuki Fujimoto
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Patent number: 8310005Abstract: A semiconductor device includes a semiconductor layer, a first diffused region formed in the semiconductor layer, a second diffused region formed in the first diffused region, a trench formed in the semiconductor layer, a gate electrode disposed in the trench, a top surface of the gate electrode being lower than a top surface of the semiconductor layer and sagging downwards in a center thereof, a non-doped silicate glass film disposed in the trench and formed over the gate electrode, a top surface of the silicate glass film sagging downwards in a center thereof, an oxide film disposed in the trench and formed over the non-doped silicate glass film, a top surface of the oxide film sagging downwards in a center, and a source electrode formed over the semiconductor layer so that the source electrode contacts the first and second diffusion regions, and the oxide film at the top surface thereof.Type: GrantFiled: October 28, 2011Date of Patent: November 13, 2012Assignee: Renesas Electronics CorporationInventors: Yoshimitsu Murase, Kenya Kobayashi, Hideo Yamamoto, Atsushi Kaneko
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Publication number: 20120280312Abstract: In one embodiment, an apparatus can include a trench extending into a semiconductor region of a first conductivity type, an electrode disposed in the trench, and a source region of the first conductivity type abutting a sidewall of the trench. The apparatus can include a first well region of a second conductivity type disposed in the semiconductor region below the source region and abutting the sidewall of the trench lateral to the electrode where the second conductivity type is opposite the first conductivity type. The apparatus can also include a second well region of the second conductivity type disposed in the semiconductor region and abutting the sidewall of the trench, and a third well region of the first conductivity type disposed between the first well region and the second well region.Type: ApplicationFiled: July 19, 2012Publication date: November 8, 2012Inventor: James Pan
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Publication number: 20120280279Abstract: A field effect transistor device includes a substrate, a silicon germanium (SiGe) layer disposed on the substrate, gate dielectric layer lining a surface of a cavity defined by the substrate and the silicon germanium layer, a metallic gate material on the gate dielectric layer, the metallic gate material filling the cavity, a source region, and a drain region.Type: ApplicationFiled: July 17, 2012Publication date: November 8, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Dechao Guo, Shu-Jen Han, Chung-Hsun Lin
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Publication number: 20120280252Abstract: A semiconductor device includes a drift layer having a first conductivity type, a well region in the drift layer having a second conductivity type opposite the first conductivity type, and a source region in the well region, The source region has the first conductivity type and defines a channel region in the well region. The source region includes a lateral source region adjacent the channel region and a plurality of source contact regions extending away from the lateral source region opposite the channel region. A body contact region having the second conductivity type is between at least two of the plurality of source contact regions and is in contact with the well region. A source ohmic contact overlaps at least one of the source contact regions and the body contact region. A minimum dimension of a source contact area of the semiconductor device is defined by an area of overlap between the source ohmic contact and the at least one source contact region.Type: ApplicationFiled: May 6, 2011Publication date: November 8, 2012Inventors: Sei-Hyung Ryu, Doyle Craig Capell, Lin Cheng, Sarit Dhar, Charlotte Jonas, Anant Agarwal, John Palmour
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Publication number: 20120280310Abstract: A semiconductor device including an isolation layer structure including a doped polysilicon layer pattern doped with first and second impurities of first and second conductivity types at lower and upper portions thereof, the doped polysilicon layer pattern being on an inner wall of a first trench on a substrate including an active region in which the first trench is not formed and a field region including the first trench, and an insulation structure filling a remaining portion of the first trench; a gate structure on the active region; a well region at a portion of the active region adjacent to lower portions of the doped polysilicon layer pattern and being doped with third impurities of the second conductivity type; and a source/drain at a portion of the active region adjacent to upper portions of the doped polysilicon layer pattern and being doped with fourth impurities of the first conductivity type.Type: ApplicationFiled: April 26, 2012Publication date: November 8, 2012Inventors: Seung-Uk HAN, Satoru Yamada
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Publication number: 20120280309Abstract: A MOS transistor suppressing a short channel effect includes a substrate, a first diffusion region and a second diffusion region separated from each other by a channel region in an upper portion of the substrate, a gate insulating layer including a first gate insulating layer disposed on a surface of the substrate in the channel region and a second gate insulating layer having a specified depth from the surface of the substrate to be disposed between the first diffusion region and the channel region, and a gate electrode disposed on the first gate insulating layer.Type: ApplicationFiled: July 17, 2012Publication date: November 8, 2012Applicant: Hynix Semiconductor Inc.Inventor: Kyoung Bong ROUH
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Publication number: 20120280298Abstract: A nonvolatile memory device includes a first channel comprising a pair of first pillars vertically extending from a substrate and a first coupling portion positioned under the pair of first pillars and coupling the pair of first pillars, a second channel adjacent to the first channel comprising a pair of second pillars vertically extending from the substrate and a second coupling portion positioned under the pair of second pillars and coupling the pair of second pillars, a plurality of gate electrode layers and interlayer dielectric layers alternately stacked along the first and second pillar portions, and first and second trenches isolating the plurality of gate electrode layers between the pair of first pillar portions and between the pair of second pillar portions, respectively.Type: ApplicationFiled: December 21, 2011Publication date: November 8, 2012Inventors: Sun-Mi PARK, Byung-Soo PARK, Sang-Hyun OH
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Publication number: 20120280311Abstract: The embodiments of the present disclosure disclose a trench-gate MOSFET device and the method for making the trench-gate MOSFET device. The trench-gate MOSFET device comprises a curving dopant profile formed between the body region and the epitaxial layer so that the portion of the body region under the source metal contact has a smaller vertical thickness than the other portion of the body region. The trench-gate MOSFET device in accordance with the embodiments of the present disclosure has improved UIS capability compared with the traditional trench-gate MOSFET device.Type: ApplicationFiled: May 2, 2012Publication date: November 8, 2012Applicant: Chengdu Monolithic Power Systems Co., Ltd.Inventors: Lei Zhang, Donald R. Disney, Tiesheng Li, Rongyao Ma
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Patent number: 8304829Abstract: Exemplary power semiconductor devices with features providing increased breakdown voltage and other benefits are disclosed.Type: GrantFiled: March 20, 2009Date of Patent: November 6, 2012Assignee: Fairchild Semiconductor CorporationInventors: Joseph A. Yedinak, Ashok Challa
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Publication number: 20120273876Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes a semiconductor substrate that includes a cell region and a peripheral circuit area. The method for forming the semiconductor includes forming a guard pattern of an insulation material. The guard pattern is located at an edge part between the cell region and the peripheral circuit region and is buried in the semiconductor substrate. As a result, the semiconductor device prevents oxidation of the guard pattern, such that a cell gate oxidation integrity (GOI) failure is improved and an IDD failure is prevented from being generated.Type: ApplicationFiled: January 10, 2012Publication date: November 1, 2012Applicant: Hynix Semiconductor Inc.Inventor: Han Nae KIM
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Publication number: 20120273873Abstract: A semiconductor die package is disclosed. It includes a leadframe structure comprising a first die attach pad and a second die attach pad. A plurality of leads extend from the first and second die attach pads. The plurality of leads includes at least a first control lead and a second control lead. A first semiconductor die including a first device is mounted on the first die attach pad, and a second semiconductor die has a second device is mounted on the second die attach pad. A housing is provided in the semiconductor die package and protects the first and second dies. The housing may have an exterior surface and at least partially covers the first semiconductor die and the second semiconductor die. The first control lead and the second control lead are at opposite sides of the semiconductor die package.Type: ApplicationFiled: July 11, 2012Publication date: November 1, 2012Inventor: David Grey
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Publication number: 20120273874Abstract: A method of forming a buried bit line is provided. A substrate is provided and a line-shaped trench region is defined in the substrate. A line-shaped trench is formed in the line-shaped trench region of the substrate. The line-shaped trench includes a sidewall surface and a bottom surface. Then, the bottom surface of the line-shaped trench is widened to form a curved bottom surface. Next, a doping area is formed in the substrate adjacent to the curved bottom surface. Lastly, a buried conductive layer is formed on the doping area such that the doping area and the buried conductive layer together constitute the buried bit line.Type: ApplicationFiled: April 26, 2011Publication date: November 1, 2012Inventors: Tieh-Chiang Wu, Yi-Nan Chen, Hsien-Wen Liu