With Floating Gate (epo) Patents (Class 257/E29.3)
  • Patent number: 9041092
    Abstract: A semiconductor device includes a pillar-shaped silicon layer including a first diffusion layer, a channel region, and a second diffusion layer formed in that order from the silicon substrate side, floating gates respectively disposed in two symmetrical directions so as to sandwich the pillar-shaped silicon layer, and a control gate line disposed in two symmetrical directions other than the two directions so as to sandwich the pillar-shaped silicon layer. A tunnel insulating film is formed between the pillar-shaped silicon layer and each of the floating gates. The control gate line is disposed so as to surround the floating gates and the pillar-shaped silicon layer with an inter-polysilicon insulating film interposed therebetween.
    Type: Grant
    Filed: September 5, 2013
    Date of Patent: May 26, 2015
    Assignee: Unisantis Electronics Singapore Pte. Ltd.
    Inventors: Fujio Masuoka, Hiroki Nakamura
  • Patent number: 9029256
    Abstract: Methods of fabricating 3D charge-trap memory cells are described, along with apparatus and systems that include them. In a planar stack formed by alternate layers of electrically conductive and insulating material, a substantially vertical opening may be formed. Inside the vertical opening a substantially vertical structure may be formed that comprises a first layer, a charge-trap layer, a tunneling oxide layer, and an epitaxial silicon portion. Additional embodiments are also described.
    Type: Grant
    Filed: August 29, 2012
    Date of Patent: May 12, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Nirmal Ramaswamy, Gurtej S. Sandhu
  • Patent number: 9029934
    Abstract: A nonvolatile semiconductor memory device includes: forming a stacked body by alternately stacking a plurality of interlayer insulating films and a plurality of control gate electrodes; forming a through-hole extending in a stacking direction in the stacked body; etching a portion of the interlayer insulating film facing the through-hole via the through-hole to remove the portion; forming a removed portion; forming a first insulating film on inner faces of the through-hole and the portion in which the interlayer insulating films are removed; forming a floating gate electrode in the portion in which the interlayer insulating films are removed; forming a second insulating film so as to cover a portion of the floating gate electrode facing the through-hole; and burying a semiconductor pillar in the through-hole.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: May 12, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masaru Kito, Masaru Kidoh, Tomoko Fujiwara, Yosuke Komori, Megumi Ishiduki, Hiroyasu Tanaka, Yoshiaki Fukuzumi, Ryota Katsumata, Ryouhei Kirisawa, Junya Matsunami, Hideaki Aochi
  • Patent number: 9029935
    Abstract: A nonvolatile memory device includes a floating gate formed over a semiconductor substrate, an insulator formed on a first sidewall of the floating gate, a dielectric layer formed on a second sidewall and an upper surface of the floating gate, and a control gate formed over the dielectric layer.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: May 12, 2015
    Assignee: SK Hynix Inc.
    Inventor: Nam-Jae Lee
  • Patent number: 9024289
    Abstract: Semiconductor memory apparatus and a method of fabricating the same are provided. The semiconductor memory apparatus includes a semiconductor substrate in which a cell area and a peripheral area are defined, a plurality of pillars formed in the a cell area of the semiconductor substrate to a first depth, a stepped part formed in the peripheral area to a height corresponding to the first depth, a recessed part formed in the stepped part to a second depth, and a core switching device formed in the recessed part.
    Type: Grant
    Filed: October 9, 2013
    Date of Patent: May 5, 2015
    Assignee: SK Hynix Inc.
    Inventors: Dae Ho Rho, Jeong Tae Kim, Hyun Kyu Kim
  • Patent number: 9024372
    Abstract: A nonvolatile memory device includes: a channel layer protruding perpendicular to a surface of a substrate; a tunnel insulation layer formed on a surface of the channel layer; a stack structure, in which a plurality of floating gate electrodes and a plurality of control gate electrodes are alternately formed along the channel layer; and a charge blocking layer interposed between each floating gate electrode, of the plurality of floating gate electrodes, and each control gate electrode of the plurality of control gate electrodes, wherein the floating gate electrode includes a first floating gate electrode between two control gate electrodes and a second floating gate electrode positioned in the lowermost and uppermost parts of the stack structure and having a smaller width in a direction parallel to the substrate than the first floating gate electrode.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: May 5, 2015
    Assignee: SK Hynix Inc.
    Inventors: Young-Soo Ahn, Jeong-Seob Oh
  • Patent number: 9025266
    Abstract: A semiconductor integrated circuit device has a p-type substrate to which a ground voltage is applied and a floating-type NMOSFET which is integrated on the p-type substrate and to which a negative voltage lower than the ground voltage is applied. The floating-type NMOSFET includes an n-type buried layer buried in the p-type substrate, a high voltage n-type well formed on the n-type buried layer and floats electrically, a p-type drift region formed in the n-type well, an n-type drain region and an-type source region formed in the p-type drift region, and a gate electrode formed on a channel region interposed between the n-type drain region and the n-type source region. The high voltage n-type well includes an n-type tunnel region, with a higher impurity concentration than that of the high voltage n-type well, inside a peripheral region formed so as to surround the p-type drift region.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: May 5, 2015
    Assignee: Rohm Co., Ltd.
    Inventor: Yasuhiro Miyagoe
  • Patent number: 9019740
    Abstract: A memory includes an array of memory cells including a plurality of memory cells with a common source, wherein each of the plurality of memory cells with a common source includes two sub-memory cells, each of the sub-memory cells corresponds to a bit line, and the respective bits are electrically independent. Each of the sub-memory cells in the memory according to the disclosure corresponds to a bit line, and the respective bit lines are electrically independent, thereby effectively avoiding interference to other memory cells which will not be programmed during a program operation.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: April 28, 2015
    Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
    Inventors: Hong Jiang, Yi Xu, Jun Xiao, Weiran Kong, Binghan Li
  • Patent number: 8999833
    Abstract: A device comprises a control gate structure over a substrate, a memory gate structure over the substrate, wherein the memory gate structure comprises a memory gate electrode and a memory gate spacer, and wherein the memory gate spacer is over the memory gate electrode, a charge storage layer formed between the control gate structure and the memory gate structure, wherein the charge storage layer is an L-shaped structure, a first spacer along a sidewall of the memory gate structure, a first drain/source region formed in the substrate and adjacent to the memory gate structure and a second drain/source region formed in the substrate and adjacent to the control gate structure.
    Type: Grant
    Filed: October 4, 2013
    Date of Patent: April 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chang-Ming Wu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 8994089
    Abstract: In some embodiments, an interlayer polysilicon dielectric cap disposed atop a substrate having a first floating gate, a second floating gate and an isolation layer disposed between the first floating gate and the second floating gate may include: a first nitrogen containing layer disposed atop an upper portion and sidewalls of the first floating gate and second floating gate; a first oxygen containing layer disposed atop the first nitrogen containing layer and an upper surface of the isolation layer; a second nitrogen containing layer disposed atop an upper portion and sidewalls of the first oxygen containing layer; and a second oxygen containing layer disposed atop the second nitrogen containing layer and an upper surface of the first oxygen containing layer.
    Type: Grant
    Filed: November 11, 2011
    Date of Patent: March 31, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Matthew S. Rogers, Klaus Schuegraf
  • Patent number: 8987801
    Abstract: Various embodiments comprise apparatuses having a number of memory cells. In one such apparatus, each cell has a plurality of control gates. For example, each of two control gates is adjacent a respective side of a charge storage structure. In another apparatus, each cell has a control gate and a shield, such as where the control gate is adjacent one side of a charge storage structure and the shield is adjacent another side of the charge storage structure. Additional apparatuses and methods are described.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: March 24, 2015
    Assignee: Micron Technology, Inc.
    Inventor: Koji Sakui
  • Patent number: 8981453
    Abstract: A nonvolatile memory device includes a unit cell with a transistor and a capacitor. The transistor is disposed on a substrate having a tunneling region and a channel region and includes a floating gate crossing both the tunneling region and the channel region. The capacitor is coupled to the floating gate.
    Type: Grant
    Filed: December 2, 2010
    Date of Patent: March 17, 2015
    Assignee: Magnachip Semiconductor, Ltd.
    Inventor: Jae-han Cha
  • Patent number: 8981455
    Abstract: In accordance with an embodiment, a semiconductor memory device includes a substrate with a semiconductor layer and memory cells on the semiconductor layer. Each memory cell includes a laminated body on the semiconductor layer, a gate insulating film on the laminated body, and a control gate on the gate insulating film. The laminated body includes a tunnel insulating film and a floating gate subsequently laminated in a direction vertical to a front surface of the substrate for N (a natural number equal to or above 2) times. A dimension of a top face of any floating gate in a second or subsequent layer is smaller than a dimension of a bottom surface of the floating gate in the lowermost layer in at least one of a first direction parallel to the front surface of the substrate and a second direction crossing the first direction.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: March 17, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kenji Aoyama
  • Patent number: 8975131
    Abstract: A method of forming a semiconductor memory cell that includes forming the floating and control gates from the same poly layer. Layers of insulation, conductive and second insulation material are formed over a substrate. A trench is formed in the second insulation material extending down to and exposing the conductive layer. Spacers are formed in the trench, separated by a small and defined gap at a bottom of the trench that exposes a portion of the conductive layer. A trench is then formed through the exposed portion of the conductive layer by performing an anisotropic etch through the gap. The trench is filled with third insulation material. Selected portions of the conductive layer are removed, leaving two blocks thereof separated by the third insulation material.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: March 10, 2015
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Nhan Do, Vipin Tiwari, Hieu Van Tran, Xian Liu
  • Patent number: 8975686
    Abstract: A semiconductor device includes a semiconductor layer with a trench dug downward from its surface, a source region formed on a surface layer portion adjacent to a first side of the trench in a prescribed direction, a drain region formed on the surface layer portion, adjacent to a second side of the trench opposite to the first side in the prescribed direction, a first insulating film on the bottom surface and the side surface of the trench, a floating gate stacked on the first insulating film and opposed to the bottom surface and the side surface of the trench through the first insulating film, a second insulating film formed on the floating gate, and a control gate at least partially embedded in the trench so that the portion embedded in the trench is opposed to the floating gate through the second insulating film.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: March 10, 2015
    Assignee: Rohm Co., Ltd.
    Inventor: Naoki Izumi
  • Patent number: 8969942
    Abstract: In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.
    Type: Grant
    Filed: March 6, 2014
    Date of Patent: March 3, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toshitake Yaegashi, Kazuhiro Shimizu, Seiichi Aritome
  • Patent number: 8969940
    Abstract: A process integration is disclosed for fabricating non-volatile memory (NVM) cells having patterned select gates (211, 213), charge storage layers (219), inlaid control gates (223, 224), and inlaid control gate contact regions (228).
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: March 3, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Jane A Yater, Cheong Min Hong, Sung-Taeg Kang, Asanga H Perera
  • Patent number: 8969947
    Abstract: A memory device includes a substrate, a semiconductor column extending perpendicularly from the substrate and a plurality of spaced-apart charge storage cells disposed along a sidewall of the semiconductor column. Each of the storage cells includes a tunneling insulating layer disposed on the sidewall of the semiconductor column, a polymer layer disposed on the tunneling insulating layer, a plurality of quantum dots disposed on or in the polymer layer and a blocking insulating layer disposed on the polymer layer.
    Type: Grant
    Filed: March 7, 2011
    Date of Patent: March 3, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-goo Lee, Jung-dal Choi, Young-woo Park
  • Patent number: 8963228
    Abstract: A structure and method provided for integrating SOI CMOS FETs and NVRAM memory devices. The structure includes a SOI substrate containing a semiconductor substrate, a SOI layer, and a BOX layer formed between the semiconductor substrate and the SOI layer. The SOI substrate includes predefined SOI device and NVRAM device regions. A SOI FET is formed in the SOI device region. The SOI FET includes portions of the BOX layer and SOI layers, an SOI FET gate dielectric layer, and a gate conductor layer. The structure further includes a NVRAM device formed in the NVRAM device region. The NVRAM device includes a tunnel oxide, floating gate, blocking oxide, and control gate layers. The tunnel oxide layer is coplanar with the portion of the BOX layer in the SOI device region. The floating gate layer is coplanar with the portion of the semiconductor layer in the SOI device region.
    Type: Grant
    Filed: April 18, 2013
    Date of Patent: February 24, 2015
    Assignee: International Business Machines Corporation
    Inventors: Anthony I. Chou, Arvind Kumar
  • Patent number: 8952442
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions to separate a first active region and a second active region of a semiconductor substrate from each other, etching a portion of the STI regions that contacts a sidewall of the second active region to form a recess, and implanting a top surface layer and a side surface layer of the second active region to form an implantation region. The side surface layer of the second active region extends from the sidewall of the second active region into the second active region. An upper portion of the top surface layer and an upper portion of the side surface layer are oxidized to form a capacitor insulator. A floating gate is formed to extend over the first active region and the second active region. The floating gate includes a portion extending into the recess.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: February 10, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu
  • Patent number: 8952438
    Abstract: A vertical NAND flash memory device includes a substrate having a face and a string of serially connected flash memory cells on the substrate. A first flash memory cell is adjacent the face, and a last flash memory cell is remote from the face. The flash memory cells include repeating layer patterns that are stacked on the face, and a pillar that extends through the series of repeating layer patterns. The pillar includes at least one oblique wall. At least two of the series of repeating layer patterns in the string are of different thicknesses. Other vertical microelectronic devices and related fabrication methods are also described.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: February 10, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sun-Il Shim, Sung-Hoi Hur, Jin-Ho Kim, Su-Youn Yi
  • Patent number: 8946805
    Abstract: A single poly EEPROM cell in which the read transistor is integrated in either the control gate well or the erase gate well. The lateral separation of the control gate well from erase gate well may be reduced to the width of depletion regions encountered during program and erase operations. A method of forming a single poly EEPROM cell where the read transistor is integrated in either the control gate well or the erase gate well.
    Type: Grant
    Filed: August 6, 2009
    Date of Patent: February 3, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Jozef C. Mitros, Keith Jarreau, Pinghai Hao
  • Patent number: 8933457
    Abstract: A method for manufacturing a memory device includes forming a plurality of active layers alternating with insulating layers on a substrate where the active layers include an active material, etching the active layers and insulating layers to define a plurality of stacks of active strips, and after the etching, causing crystal growth in the active strips. The substrate can have a single crystalline surface with a crystal structure orientation, and the crystal growth in the active material can form crystallized material having the crystal structure orientation of the substrate at least near side surfaces of the active strips. Causing crystal growth includes depositing a seeding layer over the plurality of stacks and the substrate, where the seeding layer is in contact with the side surfaces of the active strips, and in contact with the substrate. The method can include, after causing crystal growth, removing the seeding layer.
    Type: Grant
    Filed: July 3, 2013
    Date of Patent: January 13, 2015
    Assignee: Macronix International Co., Ltd.
    Inventor: Erh-Kun Lai
  • Patent number: 8921914
    Abstract: Devices can be fabricated using a method of growing nanoscale structures on a semiconductor substrate. According to various embodiments, nucleation sites can be created on a surface of the substrate. The creation of the nucleation sites may include implanting ions with an energy and a dose selected to provide a controllable distribution of the nucleation sites across the surface of the substrate. Nanoscale structures may be grown using the controllable distribution of nucleation sites to seed the growth of the nanoscale structures. According to various embodiments, the nanoscale structures may include at least one of nanocrystals, nanowires, or nanotubes. According to various nanocrystal embodiments, the nanocrystals can be positioned within a gate stack and function as a floating gate for a nonvolatile device. Other embodiments are provided herein.
    Type: Grant
    Filed: August 5, 2013
    Date of Patent: December 30, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, D. Mark Durcan
  • Patent number: 8921923
    Abstract: According to one embodiment, a method for manufacturing a semiconductor memory device includes forming a plurality of charge storage layers each including a lower portion and an upper portion provided on the lower portion and having a smaller width than the lower portion, and a plurality of sacrificial films provided between the upper portions of adjacent ones of the charge storage layers. The sacrificial films are projected higher than the upper portions and spaced by first gaps from sidewalls of the upper portions. The method includes forming a plurality of intermediate insulating films on the upper portions and in the first gaps. The method includes removing the sacrificial films and forming second gaps between adjacent ones of the intermediate insulating films. The method includes forming a control electrode on the intermediate insulating films and in the second gaps.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: December 30, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Toshiyuki Sasaki
  • Patent number: 8921913
    Abstract: A floating gate forming process includes the following steps. A substrate containing active areas isolated from each other by isolation structures protruding from the substrate is provided. A first conductive material is formed to conformally cover the active areas and the isolation structure. An etch back process is performed on the first conductive material to respectively form floating gates separated from each other in the active areas.
    Type: Grant
    Filed: June 21, 2013
    Date of Patent: December 30, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Cheng-Yuan Hsu, Zhaobing Li, Chi Ren, Ching-Long Tsai, Wei Cheng
  • Patent number: 8921823
    Abstract: Some embodiments include methods for fabricating memory cell constructions. A memory cell may be formed to have a programmable material directly against a material having a different coefficient of expansion than the programmable material. A retaining shell may be formed adjacent the programmable material. The memory cell may be thermally processed to increase a temperature of the memory cell to at least about 300° C., causing thermally-induced stress within the memory cell. The retaining shell may provide a stress which substantially balances the thermally-induced stress. Some embodiments include memory cell constructions. The constructions may include programmable material directly against silicon nitride that has an internal stress of less than or equal to about 200 megapascals. The constructions may also include a retaining shell silicon nitride that has an internal stress of at least about 500 megapascals.
    Type: Grant
    Filed: April 2, 2014
    Date of Patent: December 30, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Jian Li
  • Patent number: 8921216
    Abstract: A method for fabricating a semiconductor device includes defining a curved active region by forming a plurality of trenches over a semiconductor substrate, forming an insulating layer to fill the plurality of trenches, and forming a pair of gate lines crossing the curved active region, so that it is possible to prevent leaning of an active region by forming a curved active region.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: December 30, 2014
    Assignee: SK Hynix Inc.
    Inventors: Hyo-Seok Lee, Seung-Jin Yeom, Sung-Won Lim
  • Patent number: 8921915
    Abstract: A nonvolatile memory device includes a multi-finger type control gate formed over a substrate, a multi-finger type floating gate formed over the substrate and disposed close to the control gate with gaps defined therebetween, and spacers formed on sidewalls of the control gate and the floating gate, and filling the gaps.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: December 30, 2014
    Assignee: SK Hynix Inc.
    Inventor: Sung-Kun Park
  • Patent number: 8907403
    Abstract: Memory devices are provided, the memory devices include a tunneling insulating layer disposed on a substrate, a charge storage layer disposed on the tunneling insulating layer, a blocking insulating layer disposed on the charge storage layer and a control gate electrode disposed on the blocking insulating layer. The control gate electrode may have an edge portion spaced farther apart from the blocking insulating layer than a central portion of the control gate electrode to concentrate charge density distribution on a central portion of a memory cell.
    Type: Grant
    Filed: February 26, 2014
    Date of Patent: December 9, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kwang-soo Seol
  • Patent number: 8895388
    Abstract: An object is to provide a technique for manufacturing an insulating layer with favorable withstand voltage. Another object is to provide a technique for manufacturing a semiconductor device having an insulating layer with favorable withstand voltage. By subjecting a semiconductor layer or semiconductor substrate mainly containing silicon to a high density plasma treatment, an insulating layer is formed on a surface of the semiconductor layer or a top surface of the semiconductor substrate. At this time, the high density plasma treatment is performed by switching a supply gas in the middle of the treatment from a gas containing a rare gas, oxygen, and hydrogen, to a gas containing a rare gas and oxygen.
    Type: Grant
    Filed: July 13, 2007
    Date of Patent: November 25, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tetsuya Kakehata, Tomokazu Yokoi
  • Patent number: 8896050
    Abstract: An electronic device can include a tunnel structure that includes a first electrode, a second electrode, and tunnel dielectric layer disposed between the electrodes. In a particular embodiment, the tunnel structure may or may not include an intermediate doped region that is at the primary surface, abuts a lightly doped region, and has a second conductivity type opposite from and a dopant concentration greater than the lightly doped region. In another embodiment, the electrodes have opposite conductivity types. In a further embodiment, an electrode can be formed from a portion of a substrate or well region, and the other electrode can be formed over such portion of the substrate or well region.
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: November 25, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Thierry Coffi Herve Yao, Gregory James Scott
  • Patent number: 8890231
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a first memory cell on the first fin-type active area, and a second memory cell on the second fin-type active area. Each of widths of charge storage layers of the first and second memory cells becomes narrower upward from below. Each of inter-electrode insulating layers of the first and second memory cells has a contact portion through which both are in contact with each other.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: November 18, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Ryuji Ohba
  • Patent number: 8890232
    Abstract: Methods and apparatus for non-volatile memory cells with increased programming efficiency. An apparatus is disclosed that includes a control gate formed over a portion of a floating gate formed over a semiconductor substrate. The control gate includes a source side sidewall spacer adjacent a source region in the semiconductor substrate and a drain side sidewall spacer, the floating gate having an upper surface portion adjacent the source region that is not covered by the control gate; an inter-poly dielectric over the source side sidewall spacer and the upper surface of the floating gate adjacent the source region; and an erase gate formed over the source region and overlying the inter-poly dielectric, and adjacent the source side sidewall of the control gate, the erase gate overlying at least a portion of the upper surface of the floating gate adjacent the source region. Methods for forming the apparatus are provided.
    Type: Grant
    Filed: February 10, 2014
    Date of Patent: November 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yong-Shiuan Tsair, Wen-Ting Chu, Po-Wei Liu, Wen-Tuo Huang, Yu-Hsiang Yang, Chieh-Fei Chiu, Yu-Ling Hsu
  • Patent number: 8890229
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a foundation layer; and a stacked body provided on the foundation layer, each of a plurality of electrode layers and each of a plurality of insulating layers being stacked alternately in the stacked body; a select gate electrode provided on the stacked body; and a semiconductor layer extending from an upper end of the select gate electrode to a lower end of the stacked body. The stacked body includes a plurality of staircase regions. The each of the plurality of electrode layers includes an exposed portion. The exposed portion is not covered with the plurality of electrode layers other than the each of the plurality of electrode layers and the plurality of insulating layers. And the exposed portion of each of the plurality of electrode layers is disposed in one of the plurality of staircase regions.
    Type: Grant
    Filed: August 28, 2013
    Date of Patent: November 18, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Nobutaka Watanabe
  • Patent number: 8884354
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a semiconductor substrate; an element isolation insulating film buried in the semiconductor substrate so as to isolate adjacent element; a memory cell having a first insulating film and a charge accumulation film; a second insulating film formed on the charge accumulation films of the memory cells and the element isolation insulating film; and a control electrode film formed on the second insulating film. An upper surface of the element isolation insulating film is lower than an upper surface of the charge accumulation film, the second insulating film is provided with a cell upper portion on the charge accumulation film and an inter-cell portion on the element isolation insulating film, and a dielectric constant of the cell upper portion is lower than a dielectric constant of the inter-cell portion.
    Type: Grant
    Filed: January 19, 2012
    Date of Patent: November 11, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masayuki Tanaka
  • Patent number: 8877627
    Abstract: Non-volatile storage elements having a PN floating gate are disclosed herein. The floating gate may have a P? region near the tunnel oxide, and may have an N+ region near the control gate. In some embodiments, a P? region near the tunnel oxide helps provide good data retention. In some embodiments, an N+ region near the control gate helps to achieve a good coupling ratio between the control gate and floating gate. Therefore, programming of non-volatile storage elements is efficient. Also erasing the non-volatile storage elements may be efficient. In some embodiments, having a P? region near the tunnel oxide (as opposed to a strongly doped p-type semiconductor) may improve erase efficiency relative to P+.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: November 4, 2014
    Assignee: SanDisk Technologies Inc.
    Inventors: Mohan Dunga, Sanghyun Lee, Masaaki Higashitani, Tuan Pham
  • Patent number: 8878257
    Abstract: An ISFET includes a control gate coupled to a floating gate in a CMOS device. The control gate, for example, a poly-to-well capacitor, is configured to receive a bias voltage and effect movement of a trapped charge between the control gate and the floating gate. The threshold voltage of the ISFET can therefore by trimmed to a predetermined value, thereby storing the trim information (the amount of trapped charge in the floating gate) within the ISFET itself.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: November 4, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Patrice M. Parris, Weize Chen, Richard J. De Souza, Md M. Hoque, John M. McKenna
  • Patent number: 8872250
    Abstract: The present invention relates to a semiconductor device including nanodots and a capacitor. A semiconductor device includes a channel layer, a tunnel insulating layer formed on the channel layer, a memory layer formed on the tunnel insulating layer and including first nanodots, a charge blocking layer formed on the memory layer, a gate electrode conductive layer formed on the charge blocking layer, and a buffer layer located, at least one of, inside the tunnel insulating layer, inside the charge blocking layer, at an interface between the tunnel insulating layer and the memory layer and at the interface between the charge blocking layer and the memory layer, wherein the buffer layer includes second nanodots.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: October 28, 2014
    Assignee: SK Hynix Inc.
    Inventor: Kyoung Rok Han
  • Patent number: 8872251
    Abstract: An object is to suppress reading error even in the case where writing and erasing are repeatedly performed. Further, another object is to reduce writing voltage and erasing voltage while increase in the area of a memory transistor is suppressed. A floating gate and a control gate are provided with an insulating film interposed therebetween over a first semiconductor layer for writing operation and erasing operation and a second semiconductor layer for reading operation which are provided over a substrate; injection and release of electrons to and from the floating gate are performed using the first semiconductor layer; and reading is performed using the second semiconductor layer.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: October 28, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yoshinobu Asami
  • Patent number: 8866211
    Abstract: A nonvolatile memory device including a cell array area in which a plurality of unit cells are arranged at least in one direction includes a plurality of memory transistors formed in the respective unit cells. Each memory transistor includes a gate pattern in which a tunnel insulating layer, a floating gate, an inter-gate insulating layer, and a control gate are laminated, and first and second junction areas arranged on opposite sides of the gate pattern, wherein the gate patterns are separated in the one direction by unit cells. The nonvolatile memory device also includes a first conduction interconnection which extends in the one direction and is arranged in a position that overlaps the control gate and a plurality of first contacts, at least one of which is arranged for each of the control gates to connect the control gates and the first conduction interconnection.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: October 21, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Ryul Chang, Myoung-Kyu Park
  • Patent number: 8836005
    Abstract: A memory array includes a charge storage structure and a plurality of conductive materials over the charge storage structure is provided. Each conductive material, serving as a word line, has a substantially arc-sidewall and a substantially straight sidewall.
    Type: Grant
    Filed: August 24, 2010
    Date of Patent: September 16, 2014
    Assignee: MACRONIX International Co., Ltd.
    Inventors: I-Chen Yang, Yao-Wen Chang, Tao-Cheng Lu
  • Patent number: 8829592
    Abstract: A non-volatile storage element and a method of forming the storage element. The non-volatile storage element comprises: a first electrode including a first material having a first work function; a second electrode including a second material having a second work function higher than the first work function; a first dielectric disposed between the first electrode and the second electrode, the first dielectric having a first bandgap; a second dielectric disposed between the first dielectric and the second electrode, the second dielectric having a second bandgap wider than the first bandgap and being disposed such that a quantum well is created in the first dielectric; and a third dielectric disposed between the first electrode and the first dielectric, the third dielectric being thinner than the second dielectric and having a third bandgap wider than the first bandgap.
    Type: Grant
    Filed: December 14, 2010
    Date of Patent: September 9, 2014
    Assignee: Intel Corporation
    Inventors: Walid M. Hafez, Anisur Rahman
  • Patent number: 8829588
    Abstract: Embodiments relate to a nonvolatile memory (“NVM”) bitcell with a replacement metal control gate and an additional floating gate. The bitcell may be created using a standard complementary metal-oxide-semiconductor manufacturing processes (“CMOS processes”) without any additional process steps, thereby reducing the cost and time associated with fabricating a semiconductor device incorporating the NVM bitcell.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: September 9, 2014
    Assignee: Synopsys, Inc.
    Inventor: Andrew E. Horch
  • Patent number: 8829587
    Abstract: A flash memory device includes a semiconductor substrate, a gate stack formed on the semiconductor substrate; a channel region below the gate stack; spacers outside the gate stack; and source/drain regions outside the channel region and in the semiconductor substrate, in which the gate stack includes a first gate dielectric layer on the channel region; a first conductive layer covering an upper surface of the first gate dielectric layer and inner walls of the spacers; a second gate dielectric layer covering a surface of the first conductive layer; and a second conductive layer covering a surface of the second gate dielectric layer. A method for manufacturing a flash memory device disclosed herein.
    Type: Grant
    Filed: September 19, 2010
    Date of Patent: September 9, 2014
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 8823078
    Abstract: Provided are a non-volatile memory devices having a stacked structure, and a memory card and a system including the same. A non-volatile memory device may include a substrate. A stacked NAND cell array may have at least one NAND set and each NAND set may include a plurality of NAND strings vertically stacked on the substrate. At least one signal line may be arranged on the substrate so as to be commonly coupled with the at least one NAND set.
    Type: Grant
    Filed: January 23, 2013
    Date of Patent: September 2, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Woo-joo Kim, Yoon-dong Park, Jung-hun Sung, Yong-Koo Kyoung, Sang-moo Choi, Tae-hee Lee
  • Patent number: 8823075
    Abstract: Methods of fabricating a memory device include forming a tunnel oxide layer over a memory cell area of a semiconductor substrate, forming a floating gate layer over the tunnel oxide layer in the memory cell area, the floating gate layer comprising a plurality of nanodots embedded in a dielectric material, forming a blocking dielectric layer over the floating gate layer in the memory cell area, removing portions of the blocking dielectric layer, the floating gate layer, the tunnel oxide layer, and the semiconductor substrate in the memory cell area to form a first plurality of isolation trenches, and forming isolation material within the first plurality of isolation trenches.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: September 2, 2014
    Assignee: SanDisk Technologies Inc.
    Inventors: Vinod Purayath, James Kai, Yuan Zhang, Donovan Lee, George Matamis
  • Patent number: 8823072
    Abstract: A floating gate type nonvolatile memory device comprises a semiconductor layer, wordlines crossing over the semiconductor layer, and a memory element disposed between the wordlines and facing the semiconductor layer.
    Type: Grant
    Filed: March 29, 2011
    Date of Patent: September 2, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae Ho Kim, Sung-Hwan Jang, Hye-Young Kwon, Sunil Shim, Hyun-Sil Oh
  • Patent number: 8809177
    Abstract: A semiconductor device and a method for manufacturing the same are provided. The semiconductor device includes a gate pattern formed by patterning a tunnel insulating layer, a conductive film for a floating gate, a dielectric film, a conductive film for a control gate, and a gate metal film sequentially formed on a semiconductor substrate; a first barrier film formed on side walls of the gate metal film; and a second barrier film formed on an upper surface of the gate metal film.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: August 19, 2014
    Assignee: SK Hynix Inc.
    Inventor: Jong Man Kim
  • Patent number: 8809934
    Abstract: A lamination pattern having a control gate electrode, a first insulation film thereover, and a second insulation film thereover is formed over a semiconductor substrate. A memory gate electrode is formed adjacent to the lamination pattern. A gate insulation film is formed between the control gate and the semiconductor substrate. A fourth insulation film, including a lamination film of a silicon oxide film, a silicon nitride film, and another silicon oxide film, is formed between the memory gate electrode and the semiconductor substrate and between the lamination pattern and the memory gate electrode. At the sidewall on the side of the lamination pattern adjacent to the memory gate electrode, the first insulation film is retreated from the control gate electrode and the second insulation film, and the upper end corner portion of the control gate electrode is rounded.
    Type: Grant
    Filed: August 4, 2013
    Date of Patent: August 19, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Hiraku Chakihara, Yasushi Ishii