Standard Patents (Class 356/243.1)
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Patent number: 7688438Abstract: A device includes a housing, illumination means, a reflective plate, and a detector. The housing defines an aperture. The illumination means is for providing illumination (natural or artificial) along an optical axis that passes through the aperture. The reflective plate is movable, relative to the housing, between a retracted and a deployed position. The positions are defined so that during such movement, the optical axis traces a line across the reflective plate. The detector is aligned to detect illumination from the illumination means after light through the aperture is reflected from the reflective plate. A method is also described. The device is particularly suitable for moving the reflective plate temporarily in front of a pushbroom or whisk broom type sensor for calibration because the line traces across a first portion of the diffusing surface that is subject to sunlight degradation and a second portion that is always shielded from sunlight.Type: GrantFiled: December 20, 2005Date of Patent: March 30, 2010Assignee: Raytheon CompanyInventors: Hansford H. Cutlip, Nelson W. Wallace
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Patent number: 7679739Abstract: There is provided a film measuring device capable of accurately and easily measuring the thickness of a microporous film formed on a battery electrode plate over the entire area of the film. A color CCD sensor 8 shoots the microporous film. A video board 11 converts a color tone of a color image signal obtained by the image pickup into gradation data of respective color components of RGB. After the data conversion, an image processing board 12 extracts line images of the respective color components. A calculator 14 obtains the thickness of the microporous film by referring to pre-measured film thickness reference values corresponding to the gradation data of the green or blue color component, which are stored in a table storage 13 as reference thickness table data, using the gradation data of the line image of the green color component or the blue color component as lookup data.Type: GrantFiled: August 22, 2006Date of Patent: March 16, 2010Assignee: Panasonic CorporationInventors: Tetsuya Hayashi, Masato Fujikawa, Kazutaka Teramoto
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Patent number: 7675623Abstract: A device for origin of light absorbance used in an optical measuring instrument for measuring light absorption characteristics of a light diffusion sample. The device includes a light transmission terminal configured to irradiate a measurement light onto the light diffusion sample at a point of incidence of the light diffusion sample and a light diffusion plate through the interior of which the measurement light can be diffused and transmitted. A light receiving terminal is configured to receive the measurement light from the light diffusion sample for measurement at a point of detection of the light diffusion sample that is separate from the point of incidence. Optionally, the device can include a cleaning unit that cleans the light transmission terminal and light receiving terminal.Type: GrantFiled: August 27, 2008Date of Patent: March 9, 2010Assignee: Shimadzu CorporationInventors: Shoichi Tsuneishi, Satoru Kohno
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Publication number: 20100042348Abstract: The invention provides a method of calibrating an optical analysis system that makes use of multivariate optical signal analysis allowing to realize cost-efficient and robust implementation of a spectral analysis of an optical signal. The calibration method makes use of determining a parameter of a reference sample by means of the optical analysis system and comparing the actually determined parameter with a reference parameter that represents a precise and real property of the reference sample. Based on this comparison a calibration value can be determined that is applicable to perform a calibration of the optical analysis system with respect to at least one compound or analyte of the reference sample. Parameters and reference parameters of a reference sample may refer to a concentration of an analyte dissolved in the sample, or to spectroscopic background signals that have to be taken into account when performing a spectral analysis based on optical signals obtained from the reference sample.Type: ApplicationFiled: December 12, 2005Publication date: February 18, 2010Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.Inventor: Bernardus Leonardus Gerardus BAKKER
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Patent number: 7652761Abstract: The present invention provides methods, systems, and apparatus for calibrating a laser ablation system, such as an excimer laser system for selectively ablating a cornea of a patient's eye. The invention also facilitates alignment of eye tracking cameras that measure a position of the eye during laser eye surgery. A calibration and alignment fixture for a scanning laser beam delivery system having eye tracking cameras may include a structure positionable in a treatment plane. The structure having a feature directing laser energy incident thereon to a calibration energy sensor, at least one reference-edge to determine a characteristic of the laser beam (shape, dimensions, etc.), and an artificial pupil to determine alignment of the eye tracking cameras with the laser system.Type: GrantFiled: August 28, 2008Date of Patent: January 26, 2010Assignee: AMO Manufacturing USA, LLC.Inventors: Seema Somani, Kingman Yee, John S. Shimmick
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Patent number: 7649623Abstract: Apparatus for optical measurement and/or examination of a welding assembly includes a measuring space in which a welding assembly is located. Further disposed in the measuring space is a stationary reference object which is made of a material having a coefficient of thermal expansion ??2.0*10?6/K at 20° C. A plurality of cameras in the measuring space take images of the welding assembly and the reference object, with the image information transmitted to an evaluation device for evaluation.Type: GrantFiled: June 4, 2007Date of Patent: January 19, 2010Assignee: Benteler Automobiltechnik GmbHInventors: Rainer Lübbers, Hermann Relard, Cordt Erfling
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Patent number: 7630072Abstract: A fluorescence reference plate for a fluorescence spectroscopic instrument is arranged with fluorescent layers having different excitation and emission characteristics. The fluorescent layers are ordered in the form of a stack for providing a flat-field calibration standard over multiple bands of wavelengths.Type: GrantFiled: June 20, 2007Date of Patent: December 8, 2009Assignee: Carestream Health, Inc.Inventors: Gilbert Feke, Douglas L. Vizard
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Publication number: 20090299674Abstract: Optical distortion calibration for an Electro-Optical sensor in a chamber eliminates calibration of the mirror controller and allows for calibration while the target is in motion across the FOV thus providing a more efficient and accurate calibration. A target pattern is projected through sensor optics with line of sight motion across the sensor FOV to generate a sequence of frames. Knowing that the true distances between the same targets remain constant with line of sight motion across the sensor's FOV. coefficients of a function F representative of the non-linear distortion in the sensor optics are fit from observed target positions in a subset of frames to true line of sight so that distances between targets are preserved as the pattern moves across the FOV. The coefficients are stored as calibration terms with the sensor.Type: ApplicationFiled: January 15, 2008Publication date: December 3, 2009Inventors: Darin S. Williams, Jodean D. Wendt
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Patent number: 7623230Abstract: An apparatus including: an optical sensor comprising an optical transmitter and an optical receiver; and a calibration system configured to change calibration of the sensor when a measurement taken at the optical receiver, while the optical transmitter is on and the apparatus is in use, passes a test.Type: GrantFiled: October 23, 2007Date of Patent: November 24, 2009Assignee: Nokia CorporationInventor: Niko Santeri Porjo
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Patent number: 7586590Abstract: A calibration strip for use with a package of test strips includes a substrate with and a permutative grey scale calibration pattern disposed on a surface of the substrate with the permutative grey scale calibration pattern including more than one grey scale region. Moreover, the grey scale regions of the calibration strip define a grey scale permutation that uniquely corresponds to a calibration code of test strips in a package associated with the calibration strip.Type: GrantFiled: May 26, 2006Date of Patent: September 8, 2009Assignee: Lifescan, Scotland, Ltd.Inventors: Damian Edward Haydon Baskeyfield, Thomas J. O'Reilly, John McInulty, Grenville Arthur Robinson, Anthony J. Cronshaw
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Patent number: 7586600Abstract: Methods for normalizing output from an instrument employing a reference standard or non-fluorescing substance disposed within at least one of a plurality of reaction chambers. The method comprises collecting and analyzing a signal associated with the reference standard or non-fluorescing substance to determine a normalizing bias. The normalizing bias is then applied to the data signal collected from a remainder of the plurality of reaction chambers.Type: GrantFiled: July 21, 2008Date of Patent: September 8, 2009Assignee: Applied Biosystem, LLCInventors: H. Pin Kao, Ian A. Harding, Achim Karger, Mark F. Oldham, Omead Ostadan, Greg Young
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Patent number: 7576853Abstract: A method and system for calibrating an optical tomographic imaging system that is configured to execute time-series optical measurements of a target's response to incident optical energy is presented. An electro-active device that is configured to be electronically modulated to control the electro-active device's opacity is embedded in a dense scattering medium. A known hemodynamic response pattern is selected and at least one wavelength of optical energy that produces the known hemodynamic response pattern is determined. A wavelength-dependent driving voltage function is then computed. A voltage is then applied to the electro-active device according to the wavelength-dependent driving voltage function. Optical energy is then transmitted to the scattering medium at the at least one wavelength and a hemodynamic response for the target is determined. The known hemodynamic response pattern and the determined hemodynamic response pattern are then compared.Type: GrantFiled: June 12, 2006Date of Patent: August 18, 2009Assignee: The Research Foundation of State University of New YorkInventor: Randall L. Barbour
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Patent number: 7576317Abstract: Calibration of measurements of features made with a system having a micromachining tool and an analytical tool is disclosed. The measurements can be calibrated with a standard having a calibrated feature with one or more known dimensions. The standard may have one or more layers including a single crystal layer. The calibrated feature may include one or more vertical features characterized by one or more known dimensions and formed through the single crystal layer. A trench is formed in a sample with the micromachining tool to reveal a sample feature. The analytical tool measures one or more dimensions of the sample feature corresponding to one or more known dimensions of the calibrated feature. The known dimensions of the calibrated feature are measured with the same analytical tool. The measured dimensions of the sample feature and the calibrated feature can then be compared to the known dimensions of the calibrated feature.Type: GrantFiled: May 7, 2008Date of Patent: August 18, 2009Assignee: KLA-Tencor Technologies CorporationInventors: Marco Tortonese, Mehran Nasser-Ghodsi
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Publication number: 20090198454Abstract: A principal object of the present invention is to provide a standard sample that allows accurate testing and calibration of a circular dichroism spectrometer, and which can also be applied to testing and calibration of a UV-visible spectrophotometer.Type: ApplicationFiled: February 22, 2006Publication date: August 6, 2009Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCYInventors: Yoshihisa Inoue, Victor Borovkov, Akio Wada
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Publication number: 20090190124Abstract: A uniform light generating system for testing an image-sensing device includes a light-generating unit, a light-transmitting unit, a light-diffusing unit, and a lens unit. The light-generating unit has a substrate and a plurality of light-emitting elements electrically disposed on the substrate. The light-transmitting unit has one side communicated with the light-generating unit for receiving and uniformizing light beams projected from the light-emitting elements. The light-diffusing unit has one side disposed on the other side of the light-transmitting unit for receiving and diffusing the light beams that have passed through the light-transmitting unit. The lens unit is disposed on the other side of the light-diffusing unit for transmitting the light beams that have passed through the light-diffusing unit to the image-sensing device.Type: ApplicationFiled: September 30, 2008Publication date: July 30, 2009Inventors: Bily Wang, Kuei-Pao Chen, Chih-Ming Wang
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Publication number: 20090190133Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.Type: ApplicationFiled: April 1, 2009Publication date: July 30, 2009Applicant: VITA ZAHNFABRIK H. RAUTER GMBH & CO. KGInventors: Wayne D. Jung, Russell W. Jung, Walter W. Sloan, Alan R. Loudermilk
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Publication number: 20090168069Abstract: The measuring method for providing a precise determination of a geometry of a concave portion is provided.Type: ApplicationFiled: December 12, 2008Publication date: July 2, 2009Applicant: NEC ELECTRONICS CORPORATIONInventor: Hidetaka Nambu
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Patent number: 7551275Abstract: Disclosed herein is reference component for a sensor. The reference component comprises a calibration surface and an integrated circuit. The integrated circuit often contains a digital representation of calibration surface properties. A corresponding sensing system, printing system, method of communicating calibration data, and sensor calibration method also are disclosed.Type: GrantFiled: June 29, 2007Date of Patent: June 23, 2009Assignee: Xerox CorporationInventors: Paul S. Bonino, Gary W. Skinner
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Publication number: 20090153850Abstract: The invention relates to a device for imaging an interior of a turbid medium and a medical image acquisition device comprising: a) a measurement volume (15) for accommodating the turbid medium (45); b) a light source (5) for irradiating the turbid medium (45); c) a photodetector unit 10 for detecting light emanating from the measurement volume (15). The device for imaging an interior of the turbid medium and the medical image acquisition device are adapted such that the devices further comprise a calibration device (55, 60) arranged to be optically coupled to the measurement volume (15) and comprising a calibration light source (65) arranged to simultaneously generate the excitation light and further light corresponding to the fluorescence light.Type: ApplicationFiled: June 13, 2007Publication date: June 18, 2009Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Tim Nielsen, Thomas Koehler
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Patent number: 7538868Abstract: Calibration of pattern recognition in bright field imaging systems is disclosed. A target pattern on a substrate on the stage is brought into focus of a bright field system. The image is scanned in a first direction while measuring an edge scattering pattern from a feature of the target pattern. The edge scattering pattern is characterized by first and second peaks. A position of the bright field system's illuminator or beam shaping and relay optics is adjusted perpendicular to an optical path until the first and second peaks are approximately equal in height.Type: GrantFiled: December 19, 2005Date of Patent: May 26, 2009Assignee: KLA-Tencor Technologies CorporationInventors: Wei-Ning Shen, Xinkang Tian, Byeong Su Hwang, Tuan Van Tran
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Patent number: 7532319Abstract: Disclosed herein is an apparatus for calibrating the displacement of reflective parts in a diffractive optical modulator. The apparatus includes a diffractive optical modulator, a light intensity measurement unit, a projection unit, and display electronics. The light intensity measurement unit is disposed near one side of the diffractive optical modulator and measures and outputs the intensity of incident linear diffracted light having a predetermined diffraction order.Type: GrantFiled: March 6, 2008Date of Patent: May 12, 2009Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Haeng Seok Yang, Sang Kyeong Yun, Seung Do An
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Publication number: 20090113980Abstract: A method is provided in which with respect to an optical detection apparatus including an optical detection unit and a temperature control unit, whether optical signal detection and temperature control are performed accurately, i.e. the performance thereof, can be verified simply with high reliability. With respect to an optical detection apparatus including an optical detection unit for detecting an optical signal of a sample and a temperature control unit for controlling temperature of the sample, the optical signal detection performance and temperature control performance are verified by the following method. First, a standard sample containing a nucleic acid sequence and a strand complementary thereto that have a known optical signal intensity and Tm value is provided, the temperature of the standard sample is increased or decreased with the temperature control unit, and optical signal intensity of the standard sample is measured with the detection unit.Type: ApplicationFiled: December 25, 2007Publication date: May 7, 2009Applicant: ARKRAY, INC.Inventors: Mitsuharu Hirai, Toshiya Hosomi, Yuki Yoshinaga
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Publication number: 20090103081Abstract: The present invention is directed to a system and method for radiometric calibration of spectroscopy equipment utilized in fault detection and process monitoring. Initially, a reference spectrograph is calibrated to a local primary standard (a calibrated light source with known spectral intensities and traceable to a reference standard). Other spectrographs are then calibrated from the reference spectrograph rather than the local primary calibration standard. This is accomplished by viewing a light source with both the reference spectrograph and the spectrograph to be calibrated. The output from the spectrograph to be calibrated is compared to the output of the reference spectrograph and then adjusted to match that output. The present calibration process can be performed in two stages, the first with the spectrographs calibrated to the reference spectrograph and then are fine tuned to a narrow band light source at the plasma chamber.Type: ApplicationFiled: May 6, 2008Publication date: April 23, 2009Inventors: Mike Whelan, Andrew Weeks Kueny, Kenneth C. Harvey, John Douglas Corless
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Patent number: 7521670Abstract: The invention discloses a standard for referencing luminescence signals, having an optically transparent base material comprising a lanthanum phosphate glass, a fluorophosphate glass, a fluor-crown glass, a lanthanum glass, a glass-ceramic formed therefrom or a lithium aluminosilicate glass-ceramic, the base material including a bulk doping with at least one constituent which is luminescent and comprises at least one rare earth and/or a nonferrous metal, in particular cobalt, chromium or manganese.Type: GrantFiled: February 24, 2006Date of Patent: April 21, 2009Assignees: Schott AG, BAM Bundesanstalt fuer Materialforschung und -pruefungInventors: Axel Engel, Rainer Haspel, Ute Resch-Genger, Katrin Hoffmann, Doris Ehrt, Uwe Kolberg, Joseph S. Hayden, Michael Stelzl
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Publication number: 20090076757Abstract: A measuring device is provided with a laser source, a beam redirection member, a beam receptor, and a system controller. The measuring device is calibrated by providing a set-up piece having at least one known dimension and positioning the beam redirection member in beam transmitting relationship to the known dimension of the set-up piece. A beam is transmitted from the laser source to the set-up piece via the beam redirection member, which beam is reflected back to the beam receptor via the beam redirection member. The return beam is converted into data, which is transmitted to the system controller. The data is used to calculate a measured dimension, and a compensation factor based on the measured dimension and the known dimension of the set-up piece is then calculated.Type: ApplicationFiled: October 7, 2008Publication date: March 19, 2009Inventor: Noel S. Parlour
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Patent number: 7499158Abstract: A structure for calibrating an image sensor or other photosensor includes a baffle for passage of a sheet therethrough. A photosensor is disposed to receive light reflected from a sheet passing through the baffle. A selectably-positionable target member has a target surface associated therewith, and is positionable in one position establishing a width of the baffle suitable for passage of a sheet through the baffle, and another position wherein the first target surface is disposed adjacent to the photosensor.Type: GrantFiled: August 31, 2006Date of Patent: March 3, 2009Assignee: Xerox CorporationInventors: Richard W. Flemming, Timothy D. Turner, Wayne C. Powley
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Publication number: 20090033926Abstract: A device for calibrating an image sensor system in a motor vehicle includes an onboard calibration object situated on engine hood of vehicle. The engine hood is put into a selected position to perform the calibration.Type: ApplicationFiled: August 26, 2005Publication date: February 5, 2009Inventor: Karsten Haug
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Patent number: 7480042Abstract: Systems, and components thereof, for detecting and/or analyzing light. These systems can include, among others, optical reference standards for calibrating, validating, and/or monitoring light-detection systems, before, during, and/or after sample analysis.Type: GrantFiled: June 30, 2005Date of Patent: January 20, 2009Assignee: Applied Biosystems Inc.Inventors: J. Michael Phillips, Aldrich N. K. Lau, Mark F. Oldham, Kevin S. Bodner, Steven J. Boege, Donald R. Sandell, David H. Tracy
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Patent number: 7477375Abstract: An optical reference is disclosed for wet foodstuffs including an optical reference material including a binder and a cereal formed into a matrix to fixedly hold an amount of water. The reference material is constituted with the binder, the cereal and the water present in amounts to provide the reference standard with desired spectral, mechanical and temporal characteristics.Type: GrantFiled: December 7, 2004Date of Patent: January 13, 2009Assignee: Foss Analytical ABInventors: Ian Cowe, Arthur Springsteen
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Patent number: 7474393Abstract: An assembly is provided for the direct measurement of a vertical intensity profile through a plane of focus along an illuminating beam, a determination of a depth of the focal plane and a maximum intensity of the intensity profile. The assembly includes a plurality of focusing indicia fixed relative to a substrate, the focusing indicia being distributed at different locations along the illuminating beam. The focusing indicia are configured to be illuminated with an intensity corresponding to the position relative to the plane of focus along the axis of the illuminating beam. The location of the respective focusing indicia can be predetermined, such as along a given scale at a given inclination of the scale and the path of the illuminating beam, or not initially known and subsequently determined.Type: GrantFiled: July 3, 2007Date of Patent: January 6, 2009Inventor: Joel C. Wojciechowski
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Publication number: 20090002696Abstract: The description relates to a standard for wavelength and intensity for spectrometers, particularly for calibrating and testing measurement heads in spectrometers which are usable primarily in the near infrared region (NIR) of the spectrum. The standard comprises a holder and a plate body arranged in the holder. The plate body is made of transparent plastic with high strength and dimensional stability over a large temperature range. The plastic has distinct absorption bands throughout the entire NIR range and has a chemical structure and composition ensuring an extensive moisture barrier against water absorption and water release in a reliable and stable manner over time. The plate body advantageously comprises an amorphous, transparent copolymer based on cyclic and/or linear olefins.Type: ApplicationFiled: May 19, 2008Publication date: January 1, 2009Inventors: WILHELM SCHEBESTA, Nico Correns, Lutz Freytag, Michael Rode
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Publication number: 20080309929Abstract: Methods and apparatus for standardizing quantitative measurements from a microscope system. The process includes a calibration procedure whereby an image of a calibration slide is obtained through the optics of the microscope system. The calibration slide produces a standard response, which can be used to determine a machine intrinsic factor for the particular system. The machine intrinsic factor can be stored for later reference. In use, images are acquired of a target sample and of the excitation light source. The excitation light source sample is obtained using a calibration instrument configured to sample intensity. The calibration instrument has an associated correction factor to compensate its performance to a universally standardized calibration instrument. The machine intrinsic factor, sampled intensity, and calibration instrument correction factor are usable to compensate a quantitative measurement of the target sample in order to normalize the results for comparison with other microscope systems.Type: ApplicationFiled: June 13, 2008Publication date: December 18, 2008Inventors: Jason Christiansen, Robert Pinard, Maciej P. Zerkowski, Gregory R. Tedeschi
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Patent number: 7460237Abstract: In a method of determining a structure parameter of a target pattern in a lithographic process, a series of calibration spectra are calculated from a reference pattern. Spectral analysis is performed on each calculated spectra, the spectral components and associated weighting being derived and stored in a library or used as the basis of an iterative search method. A spectrum is measured from the target pattern and spectral analysis of the measured spectrum is performed. The derived weighting factors of the principal components are compared with the weighting factors of the measured spectrum to determine the structure parameter.Type: GrantFiled: August 2, 2007Date of Patent: December 2, 2008Assignee: ASML Netherlands B.V.Inventor: Hugo Augustinus Joseph Cramer
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Publication number: 20080292360Abstract: An optical sensor includes a light-emitting element for directing light to an image, a light-receiving element for receiving light reflected by the image, a normal detection optical path for allowing the light emitted by the light-emitting element and the light reflected from the image to follow a normal detection optical path during normal operation, a calibration reflecting plate disposed inside the optical sensor for reflecting light from the light-emitting element when sensitivity is calibrated, a calibration optical path for allowing the light emitted by the light-emitting element to follow a calibration optical path to the light-receiving element when the emitted light is reflected by the calibration reflecting plate, and a first optical function element disposed in the calibration optical path and switchable between a light permeating state, in which the light passes therethrough, and a light intercepting state, in which the light is blocked, when voltage is applied.Type: ApplicationFiled: May 15, 2008Publication date: November 27, 2008Inventor: Shuji HIRAI
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Patent number: 7456949Abstract: The present invention provides methods, systems, and apparatus for calibrating a laser ablation system, such as an excimer laser system for selectively ablating a cornea of a patient's eye. The invention also facilitates alignment of eye tracking cameras that measure a position of the eye during laser eye surgery. A calibration and alignment fixture for a scanning laser beam delivery system having eye tracking cameras may include a structure positionable in a treatment plane. The structure having a feature directing laser energy incident thereon to a calibration energy sensor, at least one reference-edge to determine a characteristic of the laser beam (shape, dimensions, etc.), and an artificial pupil to determine alignment of the eye tracking cameras with the laser system.Type: GrantFiled: May 30, 2007Date of Patent: November 25, 2008Assignee: AMO Manufacturing USA, LLCInventors: Seema Somani, Kingman Yee, John S. Shimmick
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Patent number: 7453571Abstract: A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or substantially non-perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the standard may form a viewing surface of the calibration standard. The standard may include at least one layer disposed between the first and second substrates. The layer, or a feature etched into the first or second substrate or a feature etched into the layer may have a traceably measured thickness or may be oriented at a traceably measured angle with respect to the viewing surface. A thickness or angle of the layer or other feature may be traceably measured using any technique for calibrating a measurement system with a standard reference material traceable to a national testing authority.Type: GrantFiled: November 27, 2007Date of Patent: November 18, 2008Assignee: KLA-Tencor CorporationInventors: Marco Tortonese, Jerry Prochazka, Ellen Laird, Pat Brady, René M. Blanquies
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Patent number: 7428044Abstract: Drift in an optical metrology tool is compensated for by obtaining a first measured diffraction signal and a second measured diffraction signal of a first calibration structure mounted on the optical metrology tool. The first and second measured diffraction signals were measured using the optical metrology tool. The second measured diffraction signal was measured later in time than the first measured diffraction signal. A first drift function is generated based on the difference between the first and second measured diffraction signals. A third measured diffraction signal is obtained of a first structure formed on a first wafer using the optical metrology tool. A first adjusted diffraction signal is generated by adjusting the third measured diffraction signal using the first drift function.Type: GrantFiled: November 16, 2006Date of Patent: September 23, 2008Assignee: Tokyo Electron LimitedInventors: Vi Vuong, Yan Chen, Holger Tuitje
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Patent number: 7417726Abstract: An apparatus for normalizing a PCR instrument, can comprise a microplate comprising at least 6,000 wells and a system of dyes at known concentrations in a plurality of the at least 6,000 wells. A method for normalizing a system can comprise (a) providing a microplate comprising at least 6,000 wells and a system of dyes; (b) exciting at least one dye; (c) detecting an emission output for the at least one dye; (d) determining if the emission output is in an acceptable range; and (e) adjusting the system so that the emission output is in the acceptable range.Type: GrantFiled: March 22, 2005Date of Patent: August 26, 2008Assignee: Applied Biosystems Inc.Inventors: H. Pin Kao, Ian A. Harding, Achim Karger, Mark F. Oldham, Omead Ostadan, Greg Young
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Patent number: 7411665Abstract: An optical measurement system having a spectrophotometer and a ellipsometer is calibrated, the spectrophotometer and the ellipsometer first being calibrated independently of one another. A spectrophotometer layer thickness (dphoto) of a specimen is then determined at an initial angle of incidence (?init) using the spectrophotometer. An ellipsometer layer thickness (delli) of the specimen is then determined using the layer thickness determined with the ellipsometer. The spectrophotometer and the ellipsometer are matched to one another by varying the initial angle of incidence (?init) until the absolute value of the difference between the spectrophotometer layer thickness (dphoto) and the ellipsometer layer thickness (delli) is less than a predefined absolute value.Type: GrantFiled: January 11, 2006Date of Patent: August 12, 2008Assignee: Leica Microsystems CMS GmbHInventor: Thomas Iffland
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Publication number: 20080186499Abstract: Apparatus and methods are disclosed for verifying one or more operational conditions of an optical inspection machine. A row of grooves (1-5) that simulate a reagent pad containing a specific type of analytes at known concentrations can be used for verification of the operation of the machine. Apparatus can include a row of grooves (1-5), each with different geometry, configured on an insertable device (20). The insertable device (20) can be positioned so that the row of grooves (1-5) can be illuminated by the readhead of the machine. If the optical inspection machine provides results corresponding to the known type(s) and concentrations of analyte(s), proper operation of the optical inspection machine is indicated. If the simulated type and concentration of specified reagen is not indicated, improper operation is indicated. Measurement error due to non-machine error is indicated when the known type and concentration of the analyte simulated by the rows (1-5) is indicated.Type: ApplicationFiled: May 17, 2006Publication date: August 7, 2008Applicant: SIEMENS MEDICAL SOLUTIONS DIAGNOSTICSInventor: Gary H. Krauth
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Patent number: 7408634Abstract: The present invention discloses a system and method for providing an automated imaging system comprising an illumination source, a phosphorescent imaging target, and an optical imaging sensor for receiving luminance information emitted from the phosphorescent imaging target.Type: GrantFiled: June 21, 2001Date of Patent: August 5, 2008Assignee: Hewlett-Packard Development Company L.P.Inventors: Richard Lynn Gardner, Jr., Paul C Coffin, Michael J. Chaloner
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Patent number: 7400394Abstract: Apparatus and methods for calibrating an optical detector. In one embodiment an optical reference apparatus includes a body having an outer surface. At least a portion of the outer surface has a reflectance that can vary. The optical reference apparatus is adapted to be deployed with a cloud of optical sensors and has a terminal velocity that is about the same as the terminal velocity of the sensors. Further, the variation of the reflectance can be caused by a rotation of the optical reference apparatus (caused by an aerodynamic member). The sensors may be made from porous silicon and the optical reference apparatus may include a retroreflector. The apparatus also provides a method of referencing an optical signal. The method includes deploying an optical reference apparatus with a cloud of sensors and detecting a variation in its reflectance.Type: GrantFiled: May 17, 2005Date of Patent: July 15, 2008Assignee: The Boeing CompanyInventors: Harold E. Hager, William D. Sherman
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Publication number: 20080117437Abstract: Drift in an optical metrology tool is compensated for by obtaining a first measured diffraction signal and a second measured diffraction signal of a first calibration structure mounted on the optical metrology tool. The first and second measured diffraction signals were measured using the optical metrology tool. The second measured diffraction signal was measured later in time than the first measured diffraction signal. A first drift function is generated based on the difference between the first and second measured diffraction signals. A third measured diffraction signal is obtained of a first structure formed on a first wafer using the optical metrology tool. A first adjusted diffraction signal is generated by adjusting the third measured diffraction signal using the first drift function.Type: ApplicationFiled: November 16, 2006Publication date: May 22, 2008Applicant: Tokyo Electron LimitedInventors: Vi Vuong, Yan Chen, Holger Tuitje
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Publication number: 20080100833Abstract: Various methods and systems for laser calibration are disclosed.Type: ApplicationFiled: October 25, 2006Publication date: May 1, 2008Inventors: Lawrence N. Taugher, Andrew L. Van Brocklin, Neel Banerjee
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Patent number: 7365839Abstract: A method, apparatus, and set of compositions are disclosed for calibrating a bio-photonic scanner. The scanner detects selected molecular structures of tissues, nondestructively, in vivo. The apparatus may include a computer, including processor and memory connecting to the scanner, including an illuminator to direct light nondestructively onto tissue in vivo, a detector to detect an intensity of a radiant response of the tissue to the light, and a probe to direct light onto the subject and receive a radiant response back into the detector. The apparatus is calibrated using a synthetic material to mimic the radiant response of live tissue, correcting for background fluorescence and elastic scattering. Dopants in a matrix of synthetic material mimic selected molecular structures of tissue. Matrix materials include a dilatant compound, and dopants include biological materials as well as K-type polarizing film powdered and mixed.Type: GrantFiled: November 3, 2004Date of Patent: April 29, 2008Assignee: Nu Skin International, Inc.Inventors: Scott Ferguson, Stephen J. Poole
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Patent number: 7361941Abstract: Parameters of a metrology tool may be determined by measuring a dimension of a feature on a calibration standard with the tool and using the measured dimension and a known traceable value of the dimension to determine a value for the parameter. If the dimension of the feature on the standard has a known traceable value, different standards may be used to calibrate different tools.Type: GrantFiled: December 21, 2004Date of Patent: April 22, 2008Assignee: KLA-Tencor Technologies CorporationInventors: Gian F. Lorusso, Christopher F. Bevis, Luca Grella, David L. Adler, Ian Smith
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Patent number: 7359047Abstract: The invention relates to checking or calibrating the angle-dependent alignment of a reference structure on a high-precision test-piece. A device comprises a plinth, and a retainer piece, rotatably mounted about a retainer piece axis, for retaining the test-piece and a measuring piece with a measuring piece bearing unit, to rotationally mount the measuring piece, about a measuring piece axis. An optical unit is mounted on the measuring piece, for receiving at least one test-piece beam, interacting with the reference structure on the test piece, running essentially in a measuring plane. The measuring piece bearing unit is arranged on the measuring plane or to one side thereof. The measuring piece includes a base that is, for example, axially symmetrical with the measuring piece axis encompassing or surrounding the intersection of the measuring piece axis with the retainer piece axis and hence also encompasses or surrounds the test-piece.Type: GrantFiled: July 23, 2004Date of Patent: April 15, 2008Assignee: Leica Geosystems AGInventor: Heinz Lippuner
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Patent number: 7355695Abstract: A wavefront sensor enhances calibration of a laser ablation system, such as a laser eye surgery system, by measuring one or more characteristics of an ablated test surface. Typically, light is passed through the ablated test surface, and the light is analyzed to determine the test surface characteristics. In some embodiments, the ablated test surface is positioned along a treatment plane. In some embodiments, light is passed through a wavefront sensor, such as a Hartmann-Shack sensor, to convert the light into electrical signals. A processor then converts the electrical signals into data, such as surface maps showing high-order aberrations and/or artifacts on the test surface, refractive power measurements, shape measurements, and the like. Generated data may then be used to calibrate a laser surgery system.Type: GrantFiled: March 12, 2004Date of Patent: April 8, 2008Assignee: AMO Manufacturing USA, LLCInventors: Junzhong Liang, Dimitri Chernyak, Kingman Yee, Seema Somani, Jeffrey J. Persoff, Walter Huff, Charles Campbell, Charles R. Munnerlyn, Brian Bliven
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Patent number: 7345773Abstract: In a flatness measurement apparatus, a sensor unit having a flatness-detection sensor is slidable along the linear guide rail. A support system supports the linear guide rail such that the linear guide rail is rotatable in a horizontal plane, whereby a surface of a wafer stage to be measured is scanned all over with the sensor unit having the flatness-detection sensor so as to ensure a flatness measurement of the whole surface of the wafer stage.Type: GrantFiled: October 12, 2005Date of Patent: March 18, 2008Assignee: NEC Electronics CorporationInventor: Katsuhiro Yano
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Patent number: 7339665Abstract: A spectroradiometer is calibrated by a calibration source including a plurality of monochromatic sources for emitting monochromatic rays having different wavelengths from each other, respectively; a reference light emitter for emitting monochromatic reference light by receiving the monochromatic rays emitted from the monochromatic sources; a reference sensor for measuring a reference intensity of the monochromatic reference light emitted from the reference light emitter; and a controller for controlling the emission of the monochromatic rays by the monochromatic sources, and the measurement of the reference intensity of the monochromatic reference light by the reference sensor.Type: GrantFiled: December 16, 2005Date of Patent: March 4, 2008Assignee: Konica Minolta Sensing, Inc.Inventor: Kenji Imura