Abstract: A surface profile measuring apparatus includes a reflection unit to reflect a reference beam diffracted by a first diffraction grating and cause the reflected reference beam to be incident on the first diffraction grating again, a detection unit to receive an interference beam in which the reference beam diffracted again by the first diffraction grating and a measuring beam reflected by a sample surface optically interfere with each other, and detect an interference intensity signal for each, wavelength in the interference beans, a shifting unit to shift the first diffraction grating in a direction perpendicular to a grating groove direction of the first diffraction grating, a calculation unit to calculates a phase on a basis of the interference intensity signal for each wavelength varying with a degree of shift, and a measurement unit to measure the sample surface.

Abstract: In certain embodiments, a device for optical coherence tomography (OCT) includes a signal detection device and a computer arrangement. The signal detection device is designed to detect an interference signal (G(?)) for an object to be imaged in an optical frequency range (?). The computer arrangement is designed to determine intermediate signals (G1(k), G2(k)) in a spatial frequency range (k) from the interference signal (G(?)), whereby each of the intermediate signals (G1(k), G2(k)) is dispersion-compensated for a different depth (z1, z2) of the object. A locally resolved image signal (FFT1, FFT2) is determined for each of the intermediate signals (G1(k), G2(k)) by applying a Fourier transformation to the particular intermediate signal (G1(k), G2(k)). A tomography signal (G(z)) is determined from the image signals (FFT1, FFT2).

Abstract: The present invention relates to a method for measuring a time delay between two output signals measured by two adjacent optical sensors, the time delay resulting from a movement of an object moving in a given direction. The method comprises the steps: carrying out a spatial filtering of the signals Ph1 and Ph2 delivered by a first and a second optical sensor; calculating a first order derivative and carrying out a temporal low-pass filtering of the signals; calculating the second order derivative of the signals; measuring the delay between the signals; and is characterized in that the step of measuring the delay is a feedback loop based on an estimated delay between the temporally filtered signals. Device and set of devices for measuring the angular velocity of a luminance transition zone and steering aid system for fixation and tracking a target comprising at least one such luminance transition zone.

Abstract: A surface roughness value and a sub-surface scattering property of a material are estimated. The material is illuminated with a light beam with controlled coherence properties at multiple incident angles. Multiple speckle patterns are recorded, each speckle pattern being recorded for a respective one of the multiple incident angles. Both of a surface roughness value and a sub-surface scattering property of the material are estimated by calculations using the multiple speckle patterns and the incident angle for each such speckle pattern.

Abstract: A method for measuring errors in the linear feed shafts of a multi-spindle machine tool having two or more rotating feed shafts in addition to three linear feed shafts, wherein: at least first through third reflecting minors are attached to a table of the machine tool; a laser length-measuring machine is attached to the tip of a principal shaft of the machine tool; the linear feed shafts are driven, and the laser length-measuring machine is moved to prescribed measuring points; the two or more rotating feed shafts are driven at each of the measuring points; the coordinates at each measuring point are calculated by measuring the distances between the first through third reflecting minors and the laser length-measuring machine; and errors in the linear feed shafts of the machine tool are obtained by comparing the machine coordinates of the machine tool.

Abstract: An optical measurement apparatus, comprising a reference support on which are mounted a fixed headstock and a movable tailstock opposed to the fixed headstock and movable in order to maintain a piece to be measured between headstock and tailstock, and a mobile carriage movable along the linear axis, the carriage carrying a light source for directing a beam of collimated light across the x axis to be interrupted by the piece under measurement, the carriage further carrying an optical detector aligned with the light source and arranged to receive the residual light of the beam of collimated light that has not been interrupted by the piece under measurement. The measuring apparatus has a automatic measure mode triggered by a button on the apparatus, that is arranged to automatically guess the features of a workpiece and/or recognize workpieces for which a measurement program is available.

Abstract: A novel soft beamsplitter mounting system as part of an interferometer to protect the beamsplitter substrate from external stresses and thus preserve optical flatness is introduced. The soft mounting system enables such protection by being more flexible that the beamsplitter substrate so external forces deforms the mount rather than the beamsplitter. Although the soft beamsplitter mounting configurations disclosed herein protects the beamsplitter, the interferometer itself is less stable because the mounts of the present invention allows the beamsplitter to tilt more easily than other components held in the interferometer. The improved tilt control embodiments of the present invention turns this seemingly deleterious effect into a cost saving benefit by using the inexpensive soft mounting system as a flexure to allow an improved active control system to maintain tilt alignment in a system that is more rugged than conventional interferometers.

Abstract: Methods and systems are provided for suppressing speckle and/or diffraction artifacts in coherent structured illumination sensing systems. A coherent radiation pattern forms an interference pattern at an illumination image plane and illuminates an object. Radiation scattered or otherwise emitted by the object is detected to produce a signal, which is integrated in time. Coherent artifact suppression is attained by using a spatial modulator, such as an acousto-optic device, to vary a phase gradient at the illumination image plane during the signal integration time. Various embodiments are provided for purposes including without limitation: preserving the depth of field of the coherent illumination; using the same acousto-optic device for pattern generation and coherent artifact suppression; electronically controlling the effective spatial coherence of the illumination system; and reducing errors due to coherent artifacts in a laser-based three dimensional imaging system.

Abstract: Four separately polarized beams are simultaneously measured upon diffraction from a substrate (W) to determine properties of the substrate. Linearly, circularly or elliptically polarized radiation is transmitted through a first beam splitter (N-PBS) and split into two polarized beams. These two beams are further split into two further beams using two further beam splitters, the further beam splitters (32,34) being rotated by 45° with respect to each other. The plurality of polarizing beam splitters enables the measurement of the intensity of all four beams and thus the measurement of the phase modulation and amplitude of the combined beams to give the features of the substrate. Algorithms are used to compare the four intensities of each of the polarized angles to give rise to the phase difference between the polarization directions and the ratio between the two main polarization direction amplitudes of the original polarized beam.

Abstract: An active imaging system includes a laser transmitter configured to emit light in a plurality of beamlets. A sensor is configured to receive light from the beamlets. A processor is communicably coupled to the sensor and configured to compute images of objects illuminated by the beamlets.

Abstract: In a tool length measuring method measuring a length of a tool based on a movement amount of the tool from a predetermined position when the tool is moved from the predetermined position in a predetermined direction and interrupts a laser beam, the movement of the tool in a direction in which the tool approaches a main body of a laser device is stopped when a static signal indicating that the tool is interrupting the laser beam is detected.

Abstract: The present invention provides an inexpensive range image sensor and etc. A range image sensor comprises diffractive optical elements and on which are formed diffractive gratings that change a traveling direction of incident parallel light so that in a coordinate space defined by a xyz-axis, the incident parallel light is split into split beams, and angles formed by the x-axis and line segments determined by projected light spots formed by the split beams on a predetermined projection plane intersecting the z-axis become predetermined angles. Furthermore, the range image sensor is provided with a distance determining unit for determining distances to the projected light spots on the basis of the tilting with respect to the x-axis of the line segments determined by the projected light spots formed on the object by the split beams.

Abstract: An optical system and method for characterizing an object is provided. The system includes at least one light source configured to direct photons toward an object and an interferometer configured to receive photons from the object. The system also includes at least one detector system adapted to detect an optical signal at an output of the interferometer and to remove, from the detected optical signal, a signal portion representing first order photon correlations, when present. The system also includes a processor configured to receive data relating to second-order correlated photons from said at least one detector system, each photon or photon pair subject to at least two indistinguishable paths to a photon or photon pair, but differing in at least one of time and length. The processor is configured to characterize the object based on a self interference of the second-order correlated photons from a common location within the object.

Abstract: An optical measuring system determines coordinates of points for distance measurement. The measuring system includes a radiation source for emitting electromagnetic radiation and a receiving unit having a filter unit for extracting electromagnetic radiation in a defined wavelength range and having, a detector, such that the radiation extracted by the filter unit is detectable by the detector. The filter unit includes at least two mirror elements which are at least partly reflective and constructed in a multilayered fashion. The mirror elements are substantially parallel to one another. Two adjacent mirror elements in each case enclose a cavity and are arranged at a specific distance from one another. An optical thickness is defined by a refractive index of the cavity and by the distance between the mirror elements. Optical thickness varying means operate to varying the optical thickness, such that an extractable wavelength range of the filter unit is varied.

Abstract: The invention relates to a method for the measurement of workpiece geometries with a coordinate measuring device (10) and to the device itself. According to the invention, measuring tasks may be optimally carried out without a requirement for devices of differing types, whereby one or more sensors (30), which are of optimal application for the relevant measuring task, are used.

Abstract: The invention provides a measuring instrument, comprising a telescope, a distance measuring unit, an image pickup unit, angle detecting units for detecting a vertical and horizontal angle in the sighting direction, an automatic sighting unit, an arithmetic unit, and a storage unit. The arithmetic unit makes the telescope rotate in horizontal and vertical direction and perform scanning over a predetermined range so that a plurality of objects to be measured are included and makes the image pickup unit acquire digital images during the scanning process. The arithmetic unit detects the objects in the digital images, calculates a vertical and horizontal angle of the objects based on the angle detector and a deviation of each of the objects from sighting axis, associates the calculated angles with each of the objects, and makes the storage unit store the vertical and horizontal angles of the objects as target values for automatic sighting.

Abstract: Determining spatial information about a part includes positioning the part in a fixture having two reference surfaces, where the part is positioned between the two reference surfaces, imaging the two reference surfaces and opposing surfaces of the part to different locations of a multi-element detector, simultaneously acquiring images of the opposing sides of the part and the two reference surfaces using the multi-element detector, and determining spatial information about the part based on the simultaneously acquired images.

Abstract: A surface roughness value and a sub-surface scattering property of a material are estimated. The material is illuminated with a light beam with controlled coherence properties at multiple incident angles. Multiple speckle patterns are recorded, each speckle pattern being recorded for a respective one of the multiple incident angles. Both of a surface roughness value and a sub-surface scattering property of the material are estimated by calculations using the multiple speckle patterns and the incident angle for each such speckle pattern.

Abstract: A measurement system for measuring the position of a work piece (28) includes a stage grating (234) and an encoder head (236). A first measurement beam (38A) is directed at the stage grating (234) at a first angle, the first measurement beam (38A) being at a first wavelength. A second measurement beam (38B) is directed at the stage grating (234) at a second angle that is different than the first angle, the second measurement beam (38B) being at a second wavelength that is different than the first wavelength. At least a portion of the first measurement beam (38A) and at least a portion of the second measurement beam (38B) are interfered with one another to create a measurement signal along a signal axis.

Abstract: Provided are an optical tomographic imaging apparatus and an imaging method for an optical tomographic image, in which high measurement sensitivity and high lateral resolution of a specific portion of an object may be obtained with a simple structure. The optical tomographic imaging apparatus of a Fourier-domain method includes: an optical path length adjustment portion for adjusting an optical path length of the reference beam; a position adjustment portion for adjusting a position of a focusing device for focusing the measuring beam onto the object; and a drive control portion for controlling drive of the optical path length adjustment portion and the position adjustment portion. The drive control portion is controlled based on information from a layer constituting a cross section from cross section information that is obtained in advance for a portion to be imaged of the object.

Abstract: Fluid analyte sensors include a photoelectrocatalytic element that is configured to be exposed to the fluid, if present, and to respond to photoelectrocatalysis of at least one analyte in the fluid that occurs in response to impingement of optical radiation upon the photoelectrocatalytic element. A semiconductor light emitting source is also provided that is configured to impinge the optical radiation upon the photoelectrocatalytic element. Related solid state devices and sensing methods are also described.

Abstract: Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

Abstract: A displacement measurement method, an apparatus thereof, and a probe microscope. which enable stable measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air and mechanical vibration. A pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. An optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.

Abstract: A system for determining at least one characteristic of wood furnish from an upstream source. The system includes: an inclined panel comprising a transparent window having a top surface for the wood furnish to slide down; a lighting means adjacent the transparent window for lighting the wood furnish visible through a bottom surface of the window; an image capturing means adjacent the transparent window for capturing an image of the wood furnish visible through the bottom surface of the window; and a processing means in communication with the image capturing means for deriving from the captured images the at least one characteristic of the wood furnish.

Abstract: A scanning system comprised of a multi-axis drive module comprised of a first linear drive operable along a first axis, a second linear drive joined to the first linear drive and operable along a second axis non-parallel to the first axis, and a first rotary drive mounted on the second linear drive, operable around an axis parallel to the first axis, and comprised of a rotary fixture for holding the object. A first optical probe is provided for scanning the object. The rotary fixture for holding the object may include a central object-receiving port. A first fluid circuit may be provided, which is in communication with the central object-receiving port. In that manner, an internal cavity of the object may be pressurized through a passageway in the portion of the object that is disposed in the central object-receiving port, thereby stabilizing a region of the object to be scanned.

Abstract: A method of constructing a non-imaging beam transformer includes reducing a tailored illumination function from a predetermined light source to a source point response illumination function; calculating a plurality of transformation pairs for the predetermined light source, the transformation pairs identifying the radii of illumination of the light source at given source output angles; determining a desired lighting profile for light output at a region of interest to be illuminated by the beam transformer; determining a surface profile of a surface of the beam transformer such that for given output angles of the light source, the transformation pairs at those output angles are satisfied to correspond to the desired lighting profile; and constructing the beam transformer having the surface profile determined based on the transformation pairs. The method can include characterizing a specific angular output distribution of a light source to calculate the transformation pairs.

Abstract: A system for three dimensional imaging of an object contained within a sample includes an image sensor, a sample holder configured to hold the sample, the sample holder disposed adjacent to the image sensor, and an illumination source comprising partially coherent light. The illumination source is configured to illuminate the sample through at least one of an aperture, fiber-optic cable, or optical waveguide interposed between the illumination source and the sample holder, wherein the illumination source is configured to illuminate the sample through a plurality of different angles.

Abstract: An optical distance-measuring device includes a light source, and an interferometer unit having a measuring retroreflector, stationary reference retroreflector, beam-splitter element, beam-recombiner unit, and detection unit. The beam of rays emitted by the light source swivels about the center of the reference retroreflector. The beam of rays arriving from the light source splits via the beam-splitter element into a measuring beam and reference beam. The measuring beam propagates in the direction of the measuring retroreflector, and the reference beam propagates collinearly with the measuring beam in the direction of the reference retroreflector. The measuring beam is reflected back by the measuring retroreflector and the reference beam is reflected back by the reference retroreflector in the direction of the beam-recombiner unit, the measuring beam traveling symmetrically relative to the reference retroreflector prior to and after reflection at the measuring retroreflector.

Abstract: A method for measuring a via bottom profile is disclosed for obtaining a profile of a bottom of a via in a front side of a substrate. In this method, an infrared (IR) light source is transmitted from the back of the substrate to the bottom of the via through an objective by using an IR-microscope, and lights scattered from the bottom of the via are acquired by an image capturing device to generate an image, where the image displays a diameter (2Ea) of the via bottom profile and a diameter (2Ec) of a maximum receivable base area of the via for the IR-microscope. Thereafter, by using an elliptic equation, a minor axis radius thereof (Eb) is obtained, and thus the via bottom profile is obtained from a radius (Ea) of the via bottom profile and the minor axis radius (Eb) of the elliptic equation.

Abstract: An image of an object can be synthesized either from the Fourier components of the electric field or from the Fourier components of the intensity distribution. Imaging with a lens is equivalent to assembling the Fourier components of the electric field in the image plane. This invention provides a method and a means for lensless imaging by assembling the Fourier components of the intensity distribution and combining them to form the image with the use of amplitude splitting interferometer. The angular spectrum of the electromagnetic radiation consists of wavefronts propagating at different angles. The amplitude of each wavefront is split and interfered with itself to create sinusoidal fringe patterns having different spatial frequencies. The sinusoidal fringe patterns are combined to form an image of the object. This method applies to coherent and incoherent light.

Abstract: A transversal change of the position of a measured sample surface exposed to the influence of visible radiation for example actinic light, is measured interferometrically by a reflecting target, which is in mechanical contact with the measured sample surface, and reflects a measuring beam, generated together with a reference beam by a laser source, and the transversal change of the position of the measured sample surface is detected from the phase difference of harmonic waves in the beam of interfering radiation. The device involves, for example, a special detection connection of photodetectors, a measuring unit and a basic module with a computer, the design of reflecting targets for liquid and solid samples, an optomechanical dimension transmitter and a holder of solid samples.

Abstract: A sample analysis method is provided for analyzing a sample having a permeability to terahertz radiation and accurately measure the composition, physical properties, mass and dimensions of a very small sample or a minute amount of sample by irradiating the sample with terahertz radiation. In the method, a reflective member is provided adjoining a first principal surface of the sample, an entrance member is provided adjoining a second principal surface of the sample, terahertz radiation is delivered from outside of entrance member towards the sample, and the sample is analyzed using an interference wave generated from a first-surface reflected wave at the interface between the first principal surface of the sample and the reflective member and a second-surface reflected wave at the interface between the second principal surface of the sample and the entrance member.

Abstract: The present invention relates to an arrangement for measuring relative movement. The measuring arrangement comprises a light source (110, 210) for emitting a light beam, a moving element (120, 220) having a reflective surface (121, 221) adapted to reflect a first wavefront portion of the light beam, and a reference element (130, 230) having a reflective surface (131, 231) adapted to reflect a second wavefront portion of the light beam. The arrangement further comprises detecting means (140, 240) for detecting changes in a spatial interference pattern produced by the light reflected from the moving element and the reference element, and processing means (150, 160, 250, 260) for calculating the relative movement between the moving element and the reference element from the phase change in the detected spatial interference pattern. The invention also relates to a method for measuring relative movement.

Abstract: The invention relates to a grinding machine for grinding a workpiece, which has been set on a chuck top surface, by moving a rotating grinding wheel in relation to the workpiece. The grinding machine includes: a microscope configured to be vertically movable; a CCD camera configured to take an image viewed through the microscope; and an image processor configured to process the image taken by the CCD camera to measure a vertical distance between a reference plane of the microscope and an object of the microscope. The image processor is adapted to measure the vertical distance between the reference plane of the microscope and the object of the microscope based on sharpness of the image, which corresponds to how clear the microscope is focused.

Abstract: The invention proposes an optical method of measurement and an optical apparatus for determining the spatial position of at least one luminous nanoemitter of a sample, the method comprising: the projection of a sequence of at least two compact luminous distributions of different topological families onto the sample, the detection of the light reemitted by said at least one luminous nanoemitter of the sample; the generation of at least one optical image for each luminous distribution, on the basis of the light detected; and the algorithmic analysis of the optical images to obtain information regarding the location of said at least one luminous nanoemitter.

Abstract: Described are an imaging device and method for determining three-dimensional position information of a surface of an object. The device includes a pair of optical fibers, a phase shifter, a detector array and a processor. The phase shifter is coupled to one of the optical fibers and is used to change a phase of optical radiation emitted from the optical fiber relative to a phase of optical radiation emitted from the other optical fiber. The detector array receives optical radiation scattered by the surface of the object. The processor communicates with the detector array and the phase shifter. Signals generated by the detector array are received by the processor and three-dimensional position information for the surface is calculated in response to the received optical radiation scattered by the surface of the object and the change in the relative phase of optical radiation emitted by the optical fibers.

Abstract: A Scanning Phase Intracavity Nanoscope as a measurement system can be realized with a reference laser cavity and a sample laser cavity superimposed upon each other to operatively propagate two laser beams. The sample laser cavity is operatively formed by the sample to be measured. A measurement of the sample is based on differences in the reference laser cavity and the sample laser cavity determined from difference in the two laser beams.

Abstract: Phase differences associated with a defocused wavefront can be determined from a single color image. The color image, which is a measurement of intensity as a function of wavelength, is used to calculate the change in intensity with respect to wavelength over the image plane. The change in intensity can then be used to estimate a phase difference associated with the defocused wavefront using two-dimensional fast Fourier transform solvers. The phase difference can be used to infer information about objects in the path of the defocused wavefront. For example, it can be used to determine an object's shape, surface profile, or refractive index profile. It can also be used to calculate path length differences for actuating adaptive optical systems. Compared to other techniques, deriving phase from defocused color images is faster, simpler, and can be implemented using standard color filters.

Abstract: A system and method are provided for combining the imaging capabilities of an Optical Coherence Tomography (OCT) device with the calculated results of ray tracing techniques. The combination is then used to derive a predictive refractive outcome for an optical model. The resultant optical model includes diopter power and size information for use in preoperative planning (e.g. a capsulotomy) and/or for the manufacture of an Intraocular Lens (IOL).

Abstract: Systems (200) and methods (300) for measuring geometric changes of a passive material (414) when heat and pressure are applied thereto. The methods involve forming a pad (108, 510) on a passive material panel (410). The pad includes at least one of a layer of a passive material (414) and a layer of a metal (416). The methods also involve coupling an interferometer (810) to the pad. The method also involves forming a multi-layer structure by placing at least one substrate panel (400) on top of the passive material such that an aperture (602) formed in the substrate panel is aligned with the pad. Pressure and heat are applied to the multi-layer structure. Data is collected using the interferometer while the pressure and heat are applied to the multi-layer structure. The interferometer can include, but is not limited to, a Fabry-Perot interferometer, a Michelson interferometer and/or a Mach-Zehnder interferometer.

Abstract: The present invention discloses a system and method for generating a beam of fast ions. The system comprising: a target substrate having a patterned surface, a pattern comprising nanoscale pattern features oriented substantially uniformly along a common axis; and; a beam unit adapted for receiving a high power coherent electromagnetic radiation beam and focusing it onto said patterned surface of the target substrate to cause interaction between said radiation beam and said substrate enabling creation of fast ions.

Abstract: A compound common-path interferometer including first and second measurement arms for measuring a test object is arranged so that a reference optic of the first measurement arm is disconnected from a remainder of the first measurement arm and a coupling between the reference optics of the first and second measurement arms forms a monolithic measurement cavity for maintaining reference surfaces of the reference optics at a fixed spacing and orientation. Separate supports are provided for the monolithic measurement cavity and the remainder of the first measurement arm.

Abstract: An optical tomography system is provided. The optical tomography system includes a light source emitting a light beam. A beamsplitter splits the light beam into a first reference light beam and a first sample light beam. The first reference light beam is incident to an optical delay device, and the first sample light beam is incident to a focusing device, focused to a sample. A second reference light beam reflected from the optical delay device and a second sample light beam reflected from the sample are incident through the beamsplitter to a detection device. Different portions of the second reference light beam along a first dimension have different optical path lengths.

Abstract: An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.

Abstract: Systems and methods for sensing one or more signals include a plurality of pins, wherein the pins are independently movable relative to one another, one or more signal generators coupled to respective pins, one or more signal detectors coupled to respective pins, and a body, wherein the plurality of pins are coupled to the body.

Abstract: Fluid analyte sensors include a photoelectrocatalytic element that is configured to be exposed to the fluid, if present, and to respond to photoelectrocatalysis of at least one analyte in the fluid that occurs in response to impingement of optical radiation upon the photoelectrocatalytic element. A semiconductor light emitting source is also provided that is configured to impinge the optical radiation upon the photoelectrocatalytic element. Related solid state devices and sensing methods are also described.

Abstract: An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

Abstract: An examination method of a unique object including: forming a coherent radiation beam using a coherent source, illuminating the object by the coherent radiation beam, focussed using a focussing mechanism positioned directly in contact with the object or in a very close position to the object, and forming, using a detection mechanism, the optical Fourier transform image of the light diffracted by the object.

Abstract: A method and system for interference based detection of height (H) of a microscopic structure. Wherein N*(Ws/2)>H>(N?1)*(Ws/2); wherein N is a positive integer, w1 is a first wavelength of first light beams used to generate first interference patterns, w2 is a second wavelength of second light beams used to generate second interference patterns, and Ws is a synthetic wavelength and equals a ratio between (i) a product of a multiplication of w1 by w2 and (ii) a difference between w1 and w2.

Abstract: The present invention provides a displacement measurement method, an apparatus thereof, a probe microscope. which make it possible to stably measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air, mechanical vibration. Specifically, with the present invention, a pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. Then, an optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.