Abstract: On each of an optical axis of light entering a measurement object and an optical axis of light entering a reference mirror, compound lens whose achromatic condition, beam diameter condition, and color difference reduction condition are optimized using the focal length and/or the Abbe number of a collimator lens are placed. By correcting the wavefront by using the compound lens, the effect of the wavefront aberration is reduced, and the resolution in the shape measurement based on the optical interferometry is increased.

Abstract: A device detects underfill voids and solder ball defects via laser generation and laser detection of an ultrasonic wave at the top surface of flip chips. High resolution is provided by using small laser spot sizes and closely-spaced laser beams of wavelengths that are absorbed near the surface of the semiconductor. Improved spatial resolution and rejection of unwanted scattered waves can be attained by limiting the time frame of the ultrasonic waveform to the time required for the first longitudinal wave reflection from the bottom of the flip chip. The laser beam spacing can be reduced by using probe and detection beams of different wavelengths. Resolution of less than 100 ?m features was demonstrated for silicon flip chips.

Abstract: Provided is a method for measuring multi-point interferometric angle changes beginning with an interferometric device capable of measuring at least one main point and at least one reference point. The method includes recording interferometric intensity changes on two or more spots using the main point and the reference point, and determining a sequence having a plurality of peak, local maximas and a plurality of valley, local minimas. The method includes sampling a first, partial sequence and comparing it to a neighboring, partial sequence using a perturbation analysis and additional calculation(s) to compile all phase angle changes for all measured points. Also provided is a computer implemented method to enable nanometer resolution sensitivity in a noisy signal and for characterization of a material in an interferometric device.

Abstract: An image acquisition apparatus that uses optical coherence tomography includes a scanning unit provided within a light path that guides signal light to be incident on an examination object towards the examination object and configured to scan the signal light in a main scanning direction; and a control unit configured to control the scanning unit such that an integration time of an optical interference signal per pixel in at least one predetermined area other than opposite ends, in the main scanning direction, of an image acquisition region scanned by a plurality of main scan lines is increased relative to that of an area other than the predetermined area.

Abstract: The present invention discloses a device to measure optical properties of a three-dimensional translucent object, and a novel method to use the device to produce a valid, reproducible, and quantitative image of optical properties across the entire volume of the translucent object. The invention provides significant and useful improvements over existing practice. The invention provides a scanning instrument which eliminates the current practice of employing liquid refractive index matching solutions. The invention further provides a new method for reconstructing a three-dimensional image from light transmitted through the entire volume of a three-dimensional translucent object. This is accomplished by accounting explicitly for the bending of the light rays using an alternative method of reconstructing the images known as the Algebraic Reconstruction Technique.

Abstract: An optical coherence analysis system uses a laser swept source that is constrained to operate in a mode locked condition. This is accomplished by synchronously changing the laser cavity's gain and/or phase based on the round trip travel time of light in the cavity. This improves high speed tuning by taking advantage of frequency shifting mechanisms within the cavity and avoids chaotic laser behavior.

Abstract: Laser-Scanning Intersecting Plane Tomography (L-SIPT) can provide a non-contact imaging geometry that can allow high speed volumetric scanning, such as of non-scattering to moderately scattering tissues. The L-SIPT imaging apparatus can include a first lens, located and configured to receive from a sample light received from different depths of the sample. A first light redirector can be located and configured to receive via the first lens and to redirect light received from the different depths of the sample to provide redirected light to a light detector capable of detecting individual measurements of light at different locations along a first direction.

Abstract: An optical system, such as a microlithographic projection exposure apparatus, includes a first optical component, a second optical component, and a measurement arrangement for determining the relative position of the first optical component and the second optical component in six degrees of freedom. The measurement arrangement is adapted to determine the relative position of the first optical component and the second optical component over six different length measurement sections. The length measurement sections extend directly between the first optical component and the second optical component.

Abstract: Systems, methods, and other embodiments associated with gated optical coherence tomography (OCT) are described. One example method includes generating an image control signal to control an OCT apparatus to acquire an image of an embryonic heart at a specified point in time during a cardiac cycle of the embryonic heart. The method may also include controlling the OCT apparatus to acquire the image based on the image control signal. In different examples, the image may be acquired in vivo or from an excised heart that is paced. The OCT apparatus and the embryonic heart may be housed in an environmental chamber having a set of controllable environmental factors. Therefore, the method may include detecting and controlling the set of controllable environmental factors.

Abstract: A novel soft beamsplitter mounting system as part of an interferometer to protect the beamsplitter substrate from external stresses and thus preserve optical flatness is introduced. The soft mounting system enables such protection by being more flexible that the beamsplitter substrate so external forces deforms the mount rather than the beamsplitter. Although the soft beamsplitter mounting configurations disclosed herein protects the beamsplitter, the interferometer itself is less stable because the mounts of the present invention allows the beamsplitter to tilt more easily than other components held in the interferometer. The improved tilt control embodiments of the present invention turns this seemingly deleterious effect into a cost saving benefit by using the inexpensive soft mounting system as a flexure to allow an improved active control system to maintain tilt alignment in a system that is more rugged than conventional interferometers.

Abstract: A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light.

Abstract: The present disclosure includes disclosure of devices, and methods to resolve microscopic structures. In at least one exemplary embodiment, a visualization apparatus comprises a source arm having a light source operable to emit a light beam, wherein the light beam defines a beam pathway, a reference arm comprising a reflecting surface positioned within the beam pathway, a sample arm comprising a wavefront sensor, an adaptive optics wavefront corrector, and a target, each of which are positioned within the beam pathway, wherein the adaptive optics wavefront sensor is operable to compensate for at least one aberration in the light beam, a detector arm comprising a beam detector positioned within the beam pathway, wherein the beam detector is operable to detect the reflected light beam from the reference arm and the target, and wherein the visualization apparatus is operable to minimize at least one aberration of the target.

Abstract: An optical displacement gage includes the phase determining unit includes a relative phase deciding unit to decide a relative phase of the frequency component within a range of 360 degrees, an absolute phase computing unit to compute an absolute phase by combining the relative phase based on the decision result by the relative phase deciding unit and the past decision result by the relative phase, and a phase reference updating unit to update a reference point of the absolute phase based on a reset instruction, and the displacement amount deciding unit decides the displacement amount based on the absolute phase.

Abstract: Provided is a measurement method or apparatus that can reduce the time for measuring the shape of an entire test surface. Each of a plurality of measurement ranges is set so that one measurement range overlaps a portion of at least another measurement range to form an overlap region, each measurement range being a portion of the test surface. Then, the shape of the test surface is measured at a first resolution in a first measurement range among the plurality of measurement ranges, and is measured at a second resolution in a second measurement range. Pieces of data of the shapes of the test surface in the plurality of measurement ranges are stitched together using the resulting measurement data to calculate the shape of the test surface.

Abstract: A spectral interferometry apparatus and method are disclosed, that can be used to monitor or measure an unknown length by following a characteristic of an indicating signal. The measurement is performed by adjusting an optical path difference (OPD) in an interferometer until sound or light or both are obtained with the desired strength and pitch. Embodiments are presented where the unknown length is the eye length. Sound of different pitches are produced by scanning the channeled spectrum output of an interferometer with the object returning at least one of the interferometer optical signals. The scanning is performed by reading the signal of an analogue photodetector array driven by a nonlinear clock or by tuning a low cost swept source using a distorted driving signal.

Abstract: A coherence scanning interferometer carries out: a coherence scanning measurement operation on a surface area using a low numeric aperture objective so that the pitch of the surface structure elements is less that the spread of the point spread function at the surface to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area to obtain non-structure surface intensity data. A frequency transform ratio determiner determines a frequency transform ratio related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider sets that frequency transform ratio equal to an expression representing the electric field at the image plane of the interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio.

Abstract: The present invention includes a camera configured to collect light reflected from the surface of a specimen, a two beam interference optical system including: an illumination source; a reference mirror configured to reflect substantially less light from a center region than from a peripheral region; and a first beam splitter configured to direct a first portion of light from the illumination source along an object path and a second portion of light from the illumination source along a reference path, wherein the camera and reference mirror are arranged such that light reflected from the reference mirror does not impinge on a FOV of the camera; and an autofocusing system disposed along a secondary optical axis, wherein the autofocusing system is configured to analyze one or more interference fringes created by a superposition of light reflected from the specimen surface and the peripheral region of the reference mirror surface.

Abstract: The present invention generally relates to measuring and testing in the area of optics, and more specifically to a plurality of interacting coherent light beams to produce a cancellation or reinforcement of wave energy for measuring or testing. The present invention is directed to an improved interferometer system wherein a measurement is derived from phase measurements, wherein measurements include: distance, angular speed, as well as other physical or metrological properties. The present invention includes an interferometer that uses an illumination source comprised a plurality of simultaneously activated laser beams, each possessing a different wavelength contained in a coherent composite laser beam.

Abstract: An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state.

Abstract: Disclosed herein is a topologically protected ?/8-gate which becomes universal when combined with the gates available through quasi-particle braiding and planar quasi-particle interferometry. A twisted interferometer, and a planar ?/8-gate in CTS, implemented with the help of the twisted interferometer, are disclosed. Embodiments are described in the context of state X (CTS) supported by an ISH, although the concept of a twisted-interferometer is more general and has relevance to all anionic, i.e. quasiparticle systems.

Abstract: A system and method for measuring a height difference between an extremum portion of a microscopic structure and a background element, the method includes detecting, by a sensor, first and second interference patterns by a sensor; wherein the first and second interference patterns are generated by illuminating an area of a sample by a first light beam and directing towards the sensor a first reference light beam of a first wavelength (w1) and light of the first wavelength (w1) that is either reflected from the area or passes through the area; wherein the second interference patterns are generated by illuminating the area of the sample by a second light beam and directing towards the sensor a second reference light beam of a second wavelength (w2) and light of the second wavelength (w2) that is either reflected from the area or passes through the area; wherein w1 differs from w2; wherein H<ws/2, wherein ws=(w1×w2)/?w1?w2?; generating, in response to the first and second interference patterns, first and seco

Abstract: The invention relates to a method for measuring structures on masks (1) for photolithography, wherein firstly the mask (1) is mounted on a spatially movable platform (2). The position of the platform (2) is controlled in this case. The structure on the mask (1) is illuminated with illumination light from an illumination light source which emits coherent light. The light coming from the mask (1) is imaged onto a detection device (6) by an imaging optical unit (4) and detected. The detected signals are evaluated in an evaluation device (7) and the positions and dimensions of the structures are determined. The invention also relates to an apparatus by which these method steps, in particular, can be carried out. In this case, the accuracy of the position and dimension determination is increased by the properties of the illumination light being coordinated with the structure to be measured.

Abstract: An optical tomographic image forming method including: splitting low coherence light emitted from a light source is split into a measuring light and a reference light; forming an optical tomographic image of a measured object by detecting an interference light that is obtained by superposing reflected light, reflected from the measured object when the measuring light is irradiated onto the measured object via a condenser lens, and reflected light, reflected from a reference mirror, which is positioned a predetermined length of optical path away from the splitting position, when the reference light is irradiated onto the reference mirror, wherein the method further includes: inputting a refractive index of the measured object; correcting the tomographic image in accordance with the inputted refractive index of the measured object; and outputting the corrected tomographic image.

Abstract: A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.

Abstract: The observation device 1 is to observe the surface or the inside of an observation object 9, that has light sources 11 and 12, lenses 21 to 25, an aperture 31, an optical multiplexer 41, an optical demultiplexer 42, a half mirror 43, an image pickup unit 51, an analyzing unit 52, a display unit 53, a light receiving unit 61, a displacement detecting unit 62, a piezoelectric actuator 71, a drive unit 72, a mirror 73, a stage 81, a drive unit 82, and a control unit 90. The analyzing unit 52 determines a complex amplitude of an interference light figure taken as an image by the image pickup unit 51 with a phase shift technique after an optical path difference is set to each target value in sequence, and determines an amount of change per certain time of a phase component of a reflected light generated on the surface or the inside of the observation object 9 on the basis of an absolute value of an amount of change per certain time of the determined complex amplitude and an absolute value of the complex amplitude.

Abstract: An image acquisition apparatus that uses optical coherence tomography includes a scanning unit provided within a light path that guides signal light to be incident on an examination object towards the examination object and configured to scan the signal light in a main scanning direction; and a control unit configured to control the scanning unit such that an integration time of an optical interference signal per pixel in at least one predetermined area other than opposite ends, in the main scanning direction, of an image acquisition region scanned by a plurality of main scan lines is increased relative to that of an area other than the predetermined area.

Abstract: In an optical interference measuring method according to the present invention, light emitted from a light source unit is split into measuring light and reference light, coherent light is detected that is obtained by interference of the reference light and the measuring light reflected from or scattered rearward from a measuring object, an optical-path length adjustment mechanism provided in the optical path of the reference light is driven to change the optical path length of the reference light, it is decided whether an image based on the detected coherent light is a normal image or a folded image based on the coherent light having varied with the change of the optical path length of the reference light, and the measuring object is measured from the detected coherent light based on a result of the decision about whether the image is a normal image or a folded image.

Abstract: An optical coherence tomography system and method with integrated pressure measurement. In one embodiment the system includes an interferometer including: a wavelength swept laser; a source arm in communication with the wavelength swept laser; a reference arm in communication with a reference reflector; a first photodetector having a signal output; a detector arm in communication with the first photodetector, a probe interface; a sample arm in communication with a first optical connector of the probe interface; an acquisition and display system comprising: an A/D converter having a signal input in communication with the first photodetector signal output and a signal output; a processor system in communication with the A/D converter signal output; and a display in communication with the processor system; and a probe comprising a pressure sensor and configured for connection to the first optical connector of the probe interface, wherein the pressure transducer comprises an optical pressure transducer.

Abstract: A system that can maintain and track the position of a single nanoparticle in three dimensions for a prolonged period has been disclosed. The system allows for continuously imaging the particle to observe any interactions it may have. The system also enables the acquisition of real-time sequential spectroscopic information from the particle. The apparatus holds great promise in performing single molecule spectroscopy and imaging on a non-stationary target.

Abstract: Systems (200) and methods (300) for measuring geometric changes of a passive material (414) when heat and pressure are applied thereto. The methods involve forming a pad (108, 510) on a passive material panel (410). The pad includes at least one of a layer of a passive material (414) and a layer of a metal (416). The methods also involve coupling an interferometer (810) to the pad. The method also involves forming a multi-layer structure by placing at least one substrate panel (400) on top of the passive material such that an aperture (602) formed in the substrate panel is aligned with the pad. Pressure and heat are applied to the multi-layer structure. Data is collected using the interferometer while the pressure and heat are applied to the multi-layer structure. The interferometer can include, but is not limited to, a Fabry-Perot interferometer, a Michelson interferometer and/or a Mach-Zehnder interferometer.

Abstract: Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern.

Abstract: A system for determining an object distance z includes a plurality of light emitters. A group of at least one of the plurality of light emitters includes an emitter group, and the pattern projected when one emitter group is emitting includes a fringe set. The light pattern of one fringe set exhibits a phase-shift relative to the light patterns of the other fringe sets, and the phase-shift varies as the distance from the origin of the plurality of fringe sets varies. The system further includes a processing unit that is configured to compute a ripple metric value associated with each of a plurality of possible z values. The processing unit is further configured to determine an approximated z value using the computed ripple metric values. A probe system is also provided. The probe system is configured to project a plurality of fringe sets from the probe onto an object.

Abstract: An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

Abstract: An image acquisition apparatus that uses optical coherence tomography includes a scanning unit provided within a light path that guides signal light to be incident on an examination object towards the examination object and configured to scan the signal light in a main scanning direction; and a control unit configured to control the scanning unit such that an integration time of an optical interference signal per pixel in at least one predetermined area other than opposite ends, in the main scanning direction, of an image acquisition region scanned by a plurality of main scan lines is increased relative to that of an area other than the predetermined area.

Abstract: A scanning system comprised of a multi-axis drive module comprised of a first linear drive operable along a first axis, a second linear drive joined to the first linear drive and operable along a second axis non-parallel to the first axis, and a first rotary drive mounted on the second linear drive, operable around an axis parallel to the first axis, and comprised of a rotary fixture for holding the object. A first optical probe is provided for scanning the object. The rotary fixture for holding the object may include a central object-receiving port. A first fluid circuit may be provided, which is in communication with the central object-receiving port. In that manner, an internal cavity of the object may be pressurized through a passageway in the portion of the object that is disposed in the central object-receiving port, thereby stabilizing a region of the object to be scanned.

Abstract: An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an adjusting arrangement for adjusting a path difference between the measuring beams and the reference beams, and a having a detector for recording images of the superposition of the reference beams and the measuring beams reflected by the measured object. According to the present system, a synchronization arrangement is used to control the adjusting arrangement so that the path difference between the measuring beams and the reference beams is adjusted in synchronization with the images recorded by the detector. The present system also relates to a method for adjusting a path difference.

Abstract: A system includes a measuring tool, a fixture, and a rotatable target. The measuring tool includes a light source, an imaging device, and an electronic circuit. The fixture allows the rotatable target to rotate about an axis. The rotatable target includes a surface having microscopic asperities. The imaging device is mounted to provide a sequence of images derived from said microscopic asperities. The electronic circuit is connected to the imaging device for measuring rotation of the rotatable target from the sequence of images.

Abstract: The invention relates to an arrangement for aligning a measured object (2) with a detector (5), said arrangement comprising illumination means (10) producing an illumination beam path (15) and used to illuminate the object (2) to be measured, and adjusting means (8) used to adjust the position of the object (2) to be measured in relation to the detector (5). According to the invention, the illumination means (10) comprise at least two individually controllable partial illumination means (12, 13).

Abstract: An apparatus comprising at least one measuring cell (10) is disclosed. The measuring cell comprises a first cavity (16 and a second cavity (18) perpendicular to the first cavity, the first cavity and the second cavity comprising an overlap at first respective ends and a reflective surface (20) at the opposite respective ends. A beam splitter (15) is located in the overlap and an electromagnetic radiation source (12) is arranged to project a beam of electromagnetic radiation onto the beam splitter (15) such that the beam is projected into each of the cavities. A phase detector (22) for detecting a phase difference between the respective electromagnetic radiation reflected by the first and second cavity (16; 18) is also provided. In addition, the apparatus has a fluid channel (26), at least a part of which runs parallel to the first cavity (16) such that the electromagnetic radiation projected into the first cavity extends into said part of the fluid channel.

Abstract: An optical fringe generation member control apparatus is provided. The control apparatus includes a detection unit that is configured to detect an optical fringe. Further, the control apparatus includes a control unit that is configured to control operation of a member on which the optical fringe is generated. The control unit controls the operation based on a detection result by the detection unit.

Abstract: A method and system for determining an optimized artificial impedance surface is disclosed. An artificial impedance pattern is calculated on an impedance surface using an optical holographic technique given an assumed surface wave profile and a desired far field radiation pattern. Then, an actual surface wave profile produced on the impedance surface from the artificial impedance pattern, and an actual far field radiation pattern produced by the actual surface wave profile are calculated. An optimized artificial impedance pattern is then calculated by iteratively re-calculating the artificial impedance pattern from the actual surface wave profile and the desired far field radiation pattern. An artificial impedance surface is determined by mapping the optimized artificial impedance pattern onto a representation of a physical surface.

Abstract: A transversal change of the position of a measured sample surface exposed to the influence of visible radiation for example actinic light, is measured interferometrically by a reflecting target, which is in mechanical contact with the measured sample surface, and reflects a measuring beam, generated together with a reference beam by a laser source, and the transversal change of the position of the measured sample surface is detected from the phase difference of harmonic waves in the beam of interfering radiation. The device involves, for example, a special detection connection of photodetectors, a measuring unit and a basic module with a computer, the design of reflecting targets for liquid and solid samples, an optomechanical dimension transmitter and a holder of solid samples.

Abstract: A statistically sparse subset of switchable optical sources in a sample is activated, and the activated switchable optical sources are excited such that optical beams are emitted from the activated switchable optical sources along at least two optical paths. A first wavefront modification in a first optical beam emitted from the activated switchable optical sources along a first optical path is introduced and a second wavefront modification in a second optical beam emitted from the activated switchable optical sources along a second optical path is introduced, the second wavefront modification being distinct from the first wavefront modification. The first and second optical beams are interfered with each other to produce a plurality of output beams, and three-dimensional position information of the optical sources is determined based on an intensity of each output beam from the plurality of output beams.

Abstract: A method of measuring properties of particles includes generating a beam of radiation (IW); illuminating with the beam (IW) an observation region (MR) which is transited by a particle (B). A portion of the beam (IW) gives rise to radiation (SW) which is scattered by scattering interaction with the particle (B), and another portion (TW) is transmitted substantially undisturbed through the observation region (MR). In a detection plane (M), a plurality of radiation intensity values are detected which are determined by the interference between the scattered radiation (SW) and the transmitted radiation (TW). The detection of the radiation intensity values in the detection plane (M) is carried out according to a time sequence of acquisitions corresponding to successive transit positions of the particle through the observation region (MR).

Abstract: A system and method for measuring interferences are disclosed. The system is based on the concept of a composite interferometer. The sample is measured while a simultaneous compensation of the phase deviation due to the relative displacement of the optical delay component between the measurements at different pixels of the sample is performed. In the application of profilometry, the information of the surface profile of a material is obtained from the phase shift of the interference signal. By using the proposed compensation mechanism, an axial resolution at nanometer scale can be achieved. For the measurement of a thin film, a polarized probe beam is oblique incident on the sample. The system can perform a simultaneous measurement of the refractive index and the thickness of the thin film. From the ratio of the intensities of the interferograms of TE and TM waves as well as the phase shifts of the interferograms, the refractive index and the thickness of the thin film can then be obtained simultaneously.

Abstract: In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.

Abstract: An interferometric measuring device for measuring a measured object, in particular for thickness measurement of the measured object. A special-purpose objective having a mirror system is provided, which includes at least one first deflection mirror and one second deflection mirror and in which these are situated in such a way that the object beams incident on the first deflection mirror or on the second deflection mirror are directed respectively onto a first side or a second side, which is parallel thereto, of the measured object to be measured in a first beam path or a second beam path, respectively, which are antiparallel to one another. The mirror system additionally has at least one first position mirror for imaging the position of the measured object to be measured in relation to the first deflection mirror and/or the second deflection mirror.

Abstract: An optical sensor device (38) for use in a measuring and/or inspection apparatus comprises an optical sensor head (40) including a white light sensor (44) having a wideband radiation source (50), a wavelength-sensitive receiver (52) and a beam splitting means (60); and an objective (46) for directing a measuring beam onto an object to be measured and detecting a reflection beam reflected from the object to be measured. The optical sensor device (38) further comprises a video sensor (80), wherein the beam path of the video sensor (80) passes through the same objective (46) as that of the white light sensor (44) of the optical sensor head (40).

Abstract: Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples.

Abstract: Positional information of each of wafer stages during exposure and during alignment is measured directly under a projection optical system and directly under a primary alignment system, respectively, by a plurality of encoder heads, Z heads and the like, which a measurement bar placed below surface plates has, using gratings placed on the lower surfaces of fine movement stages. Since a main frame that supports the projection optical system and the measurement bar are separated, deformation of the measurement bar caused by inner stress (including thermal stress) and transmission of vibration or the like from the main frame to the measurement bar, and the like do not occur, which is different from the case where the main frame and the measurement bar are integrated. Consequently, high-precision measurement of the positional information of the wafer stages can be performed.