Subsequent Separation Into Plural Bodies (e.g., Delaminating, Dicing, Etc.) Patents (Class 438/458)
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Publication number: 20140308800Abstract: This invention provides a method for manufacturing composite wafers in which at least two composite wafers can be obtained from one donor wafer, and in which the chamfering step can be omitted. Provided is a method for manufacturing composite wafers comprising: bonding surfaces of at least two handle wafers and a surface of a donor wafer which has a diameter greater than or equal to a sum of diameters of the at least two handle wafers and which has a hydrogen ion implantation layer formed inside thereof by implanting hydrogen ions from the surface of the donor wafer, to obtain a bonded wafer; heating the bonded wafer at 200° C. to 400° C.; and detaching a film from the donor wafer along the hydrogen ion implantation layer of the heated bonded wafer, to obtain the composite wafers having the film transferred onto the at least two handle wafers.Type: ApplicationFiled: September 14, 2012Publication date: October 16, 2014Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Shoji Akiyama, Kazutoshi Nagata
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Patent number: 8859393Abstract: Methods and systems are disclosed for performing a passivation process on a silicon-on-insulator wafer in a chamber in which the wafer is cleaved. A bonded wafer pair is cleaved within the chamber to form the silicon-on-insulator (SOI) wafer. A cleaved surface of the SOI wafer is then passivated in-situ by exposing the cleaved surface to a passivating substance. This exposure to a passivating substance results in the formation of a thin layer of oxide on the cleaved surface. The silicon-on-insulator wafer is then removed from the chamber. In other embodiments, the silicon-on-insulator wafer is first transferred to an adjoining chamber where the wafer is then passivated. The wafer is transferred to the adjoining chamber without exposing the wafer to the atmosphere outside the chambers.Type: GrantFiled: June 16, 2011Date of Patent: October 14, 2014Assignee: SunEdison Semiconductor LimitedInventors: Michael J. Ries, Dale A. Witte, Anca Stefanescu, Andrew M. Jones
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Patent number: 8859304Abstract: A light-emitting device having a curved light-emitting surface is provided. Further, a highly-reliable light-emitting device is provided. A substrate with plasticity is used. A light-emitting element is formed over the substrate in a flat state. The substrate provided with the light-emitting element is curved and put on a surface of a support having a curved surface. Then, a protective layer for protecting the light-emitting element is formed in the same state. Thus, a light-emitting device having a curved light-emitting surface, such as a lighting device or a display device can be manufactured.Type: GrantFiled: December 17, 2012Date of Patent: October 14, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yohei Momma, Tomohiko Suganoya, Saki Obana
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Patent number: 8859394Abstract: A method of fabricating a composite semiconductor structure includes providing an SOI substrate including a plurality of silicon-based devices, providing a compound semiconductor substrate including a plurality of photonic devices, and dicing the compound semiconductor substrate to provide a plurality of photonic dies. Each die includes one or more of the plurality of photonics devices. The method also includes providing an assembly substrate having a base layer and a device layer including a plurality of CMOS devices, mounting the plurality of photonic dies on predetermined portions of the assembly substrate, and aligning the SOI substrate and the assembly substrate. The method further includes joining the SOI substrate and the assembly substrate to form a composite substrate structure and removing at least the base layer of the assembly substrate from the composite substrate structure.Type: GrantFiled: January 18, 2013Date of Patent: October 14, 2014Assignee: Skorpios Technologies, Inc.Inventors: John Dallesasse, Stephen B. Krasulick, Timothy Creazzo, Elton Marchena
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Patent number: 8853005Abstract: When forming a conductive film by a method comprising sputtering after grinding the back surface of a semiconductor substrate, in order to avoid discharge from a part of an adhesive flown out at the outer periphery of the substrate, wherein the adhesive is used to fix the substrate to a support during grinding, at least the substrate end or the adhesive is removed after grinding the semiconductor substrate and before forming the conductive film, so that a gap between the substrate end and the adhesive may have a predetermined size.Type: GrantFiled: September 8, 2011Date of Patent: October 7, 2014Assignee: PS4 Luxco S.a.r.l.Inventor: Seiya Fujii
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Patent number: 8853064Abstract: The present invention is directed to a method of manufacturing a substrate, which includes loading a base substrate into a reaction furnace; forming a buffer layer on the base substrate; forming a separation layer on the buffer layer; forming a semiconductor layer on the separation layer at least two; and separating the semiconductor layer from the base substrate via the separation layer through natural cooling by unloading the base substrate from the reaction furnace.Type: GrantFiled: October 21, 2012Date of Patent: October 7, 2014Assignee: Lumigntech Co., Ltd.Inventors: Hae Yong Lee, Young Jun Choi, Jin Hun Kim, Hyun soo Jang, Hea Kon Oh, Hyun Hee Hwang
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Publication number: 20140295642Abstract: A method of transferring a layer including: a) providing a layer joined to an initial substrate with a binding energy E0; b) bonding a front face of the layer on an intermediate substrate according to an intermediate bonding energy Ei; c) detaching the initial substrate from the layer; e) bonding a rear face onto a final substrate according to a final bonding energy Ef; and f) debonding the intermediate substrate from the layer to transfer the layer onto the final substrate; step b) comprising a step of forming siloxane bonds Si—O—Si, step c) being carried out in a first anhydrous atmosphere and step f) being carried out in a second wet atmosphere such that the intermediate bonding energy Ei takes a first value Ei1 in step c) and a second value Ei2 in step f), with Ei1>E0 and Ei2<Ef.Type: ApplicationFiled: September 20, 2012Publication date: October 2, 2014Inventors: Frank Fournel, Maxime Argoud, Jeremy Da Fonseca, Hubert Moriceau
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Patent number: 8846532Abstract: A method and apparatus for ultra thin wafer backside processing are disclosed. The apparatus includes an outer ring holding a high temperature grinding and/or dicing tape to form a support structure. An ultra thin wafer or diced wafer is adhered to the tape within the ring for wafer backside processing. The wafer backside processing includes ion implantation, annealing, etching, sputtering and evaporation while the wafer is in the support structure. Alternative uses of the support structure are also disclosed including the fabrication of dies having metalized side walls.Type: GrantFiled: September 16, 2012Date of Patent: September 30, 2014Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Tao Feng, Ming Sun
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Patent number: 8846453Abstract: A semiconductor package structure includes a chip unit, a package unit and an electrode unit. The chip unit includes at least one semiconductor chip. The semiconductor chip has an upper surface, a lower surface, and a surrounding peripheral surface connected between the upper and the lower surfaces, and the semiconductor chip has a first conductive pad and a second conductive pad disposed on the lower surface thereof. The package unit includes a package body covering the upper surface and the surrounding peripheral surface of the semiconductor chip. The package body has a first lateral portion and a second lateral portion respectively formed on two opposite lateral sides thereof. The electrode unit includes a first electrode structure covering the first lateral portion and a second electrode structure covering the second lateral portion. The first and the second electrode structures respectively electrically contact the first and the second conductive pads.Type: GrantFiled: March 12, 2013Date of Patent: September 30, 2014Assignee: Inpaq Technology Co., Ltd.Inventors: Chu-Chun Hsu, Wei-Luen Hsu, Hong-Sheng Ke, Yao-Ming Yang, Yu-Chia Chang
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Patent number: 8846496Abstract: To provide a method of obtaining a single crystal semiconductor film by a method that is simple and low-cost. A single crystal semiconductor film 11 having compression stress is formed over a surface of a single crystal semiconductor substrate 10 by a vapor phase epitaxial growth method, a film having tensile stress (for example, a thermo-setting resin film 12) is formed over a surface of the single crystal semiconductor film 11, and the single crystal semiconductor substrate 10 and the single crystal semiconductor film 11 are separated from each other by a separation step in which force is applied to the single crystal semiconductor film 11, thereby obtaining a single crystal semiconductor film. Note that as the thermo-setting resin film 12, an epoxy resin film can be used, for example.Type: GrantFiled: April 22, 2011Date of Patent: September 30, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Sho Kato, Kazutaka Kuriki
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Patent number: 8841139Abstract: A method of fabricating a magnetic memory according to an embodiment includes: forming a separation layer on a first substrate; sequentially forming a first ferromagnetic layer, a first nonmagnetic layer, and a second ferromagnetic layer on the separation layer, at least one of the first and the second ferromagnetic layers having a single crystal structure; forming a first conductive bonding layer on the second ferromagnetic layer; forming a second conductive bonding layer on a second substrate, on which a transistor and a wiring are formed, the second conductive bonding layer electrically connecting to the transistor; arranging the first and second substrate so that the first conductive bonding layer and the second conductive bonding layer are opposed to each other, and bonding the first and the second conductive bonding layers to each other; and separating the first substrate from the first ferromagnetic layer by using the separation layer.Type: GrantFiled: September 20, 2012Date of Patent: September 23, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Chikayoshi Kamata, Minoru Amano, Tadaomi Daibou, Junichi Ito
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Patent number: 8841202Abstract: A method of producing a hybrid substrate includes preparing a monocrystalline first substrate to obtain two surface portions. A temporary substrate is prepared including a mixed layer along which extends one surface portion and is formed of first areas and adjacent different second areas of amorphous material, the second areas forming at least part of the free surface of the first substrate. The first substrate is bonded to the other surface portion with the same crystal orientation as the first surface portion, by molecular bonding over at least the amorphous areas. A solid phase recrystallization of at least part of the amorphous areas according to the crystal orientation of the first substrate is selectively carried and the two surface portions are separated.Type: GrantFiled: February 12, 2010Date of Patent: September 23, 2014Assignee: Commissariat a l'Energie AtomiqueInventors: Franck Fournel, Thomas Signamarcheix, Laurent Clavelier, Chrystel Deguet
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Patent number: 8841203Abstract: The present disclosure provides a method for forming two device wafers starting from a single base substrate. The method includes first providing a structure which includes a base substrate with device layers located on, or within, a topmost surface and a bottommost surface of the base substrate. The base substrate may have double side polished surfaces. The structure including the device layers is spalled in a region within the base substrate that is between the device layers. The spalling provides a first device wafer including a portion of the base substrate and one of the device layers, and a second device wafer including another portion of the base substrate and the other of the device layer.Type: GrantFiled: June 14, 2011Date of Patent: September 23, 2014Assignee: International Business Machines CorporationInventors: Stephen W. Bedell, Keith E. Fogel, Paul A. Lauro, Devendra K. Sadana, Davood Shahrjerdi
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Patent number: 8841145Abstract: System for wafer-level phosphor deposition. A method for phosphor deposition on a semiconductor wafer that has a plurality of LED dies includes the operations of covering the semiconductor wafer with a selected thickness of photo resist material, removing portions of the photo resist material to expose portions of the semiconductor wafer so that electrical contacts associated with the plurality of LED dies remain unexposed, and depositing phosphor on the exposed portions of the semiconductor wafer.Type: GrantFiled: December 8, 2010Date of Patent: September 23, 2014Assignee: Bridgelux, Inc.Inventor: Tao Xu
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Patent number: 8841204Abstract: High yield substrate assembly. In accordance with a first method embodiment, a plurality of piggyback substrates are attached to a carrier substrate. The edges of the plurality of the piggyback substrates are bonded to one another. The plurality of piggyback substrates are removed from the carrier substrate to form a substrate assembly. The substrate assembly is processed to produce a plurality of integrated circuit devices on the substrate assembly. The processing may use manufacturing equipment designed to process wafers larger than individual instances of the plurality of piggyback substrates.Type: GrantFiled: June 3, 2013Date of Patent: September 23, 2014Assignee: Invensas CorporationInventors: Liang Wang, Ilyas Mohammed, Masud Beroz
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Patent number: 8841752Abstract: In one or more embodiments, a semiconductor structure is provided that includes a plurality of interposer dice on an un-singulated segment of a semiconductor wafer. Scribe lanes circumscribing each of the plurality of interposer dice have widths of at least 2.5% of the width of each interposer die. Each interposer die includes a first contact array formed on a first side of the interposer die, a plurality of vias formed through the interposer die, one or more wiring layers formed on the first side of the interposer die and electrically coupling the first contact array to the plurality of vias, and a second contact array formed on a second side of the interposer die and electrically coupled to the plurality of vias.Type: GrantFiled: September 27, 2011Date of Patent: September 23, 2014Assignee: Xilinx, Inc.Inventors: Raghunandan Chaware, Kumar Nagarajan
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Patent number: 8841177Abstract: First and second template epitaxial semiconductor material portions including different semiconductor materials are formed within a dielectric template material layer on a single crystalline substrate. Heteroepitaxy is performed to form first and second epitaxial semiconductor portions on the first and second template epitaxial semiconductor material portions, respectively. At least one dielectric bonding material layer is deposited, and a handle substrate is bonded to the at least one dielectric bonding material layer. The single crystalline substrate, the dielectric template material layer, and the first and second template epitaxial semiconductor material portions are subsequently removed. Elemental semiconductor devices and compound semiconductor devices can be formed on the first and second semiconductor portions, which are embedded within the at least one dielectric bonding material layer on the handle substrate.Type: GrantFiled: November 15, 2012Date of Patent: September 23, 2014Assignee: International Business Machines CorporationInventors: Tze-Chiang Chen, Cheng-Wei Cheng, Devendra K. Sadana, Kuen-Ting Shiu
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Publication number: 20140273400Abstract: The invention provides a reclaiming processing method for a delaminated wafer, by which the delaminated wafer obtained as a by-produce at the time of producing a bonded wafer is subjected to reclaiming polishing and is again available as a bond wafer or a base wafer, wherein, in the reclaiming polishing, the delaminate wafer is polished with use of a double-side polisher in a state that oxide film is not formed on a delaminated surface of the delaminated wafer and oxide film is formed on a back side which is the opposite side of the delaminated surface. As a result, the reclaiming processing method for a delaminated wafer, by which the delaminated wafer obtained as a by-product at the time of manufacturing a bonded wafer based on an ion implantation delamination method is subjected to the reclaiming polishing, which enables sufficiently improving quality.Type: ApplicationFiled: August 29, 2012Publication date: September 18, 2014Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventors: Toru Ishizuka, Yuji Okubo, Takuya Sasaki, Akira Araki, Nobuhiko Noto
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Publication number: 20140264374Abstract: A method for manufacturing a silicon carbide substrate for an electrical silicon carbide device includes providing a silicon carbide dispenser wafer including a silicon face and a carbon face and depositing a silicon carbide epitaxial layer on the silicon face. Further, the method includes implanting ions with a predefined energy characteristic forming an implant zone within the epitaxial layer, so that the ions are implanted with an average depth within the epitaxial layer corresponding to a designated thickness of an epitaxial layer of the silicon carbide substrate to be manufactured. Furthermore, the method comprises bonding an acceptor wafer onto the epitaxial layer so that the epitaxial layer is arranged between the dispenser wafer and the acceptor wafer. Further, the epitaxial layer is split along the implant zone so that a silicon carbide substrate represented by the acceptor wafer with an epitaxial layer with the designated thickness is obtained.Type: ApplicationFiled: March 14, 2013Publication date: September 18, 2014Applicant: Infineon Technologies AGInventors: Christian Hecht, Tobias Hoechbauer, Roland Rupp, Hans-Joachim Schulze
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METHODS OF FABRICATING SILICON-ON-INSULATOR (SOI) SEMICONDUCTOR DEVICES USING BLANKET FUSION BONDING
Publication number: 20140273399Abstract: A method for fabricating silicon-on-insulator (SOI) semiconductor devices, wherein the piezoresistive pattern is defined within a blanket doped layer after fusion bonding. This new method of fabricating SOI semiconductor devices is more suitable for simpler large scale fabrication as it provides the flexibility to select the device pattern/type at the latest stages of fabrication.Type: ApplicationFiled: March 15, 2013Publication date: September 18, 2014Applicant: KULITE SEMICONDUCTOR PRODUCTS, INC.Inventors: ALEXANDER NED, SORIN STEFANESCU, JOE VANDEWEERT -
Patent number: 8836033Abstract: Embodiments of a method and apparatus for removing metallic nanotubes without transferring CNTs from one substrate to another substrate provide two methods of transferring a thin layer of crystalline ST-cut quartz wafer to the surface of a carrier silicon wafer for subsequent CNT growth, without resorting to CNT transfer. In other words, embodiments of a method and apparatus allow CNTs to be grown on the same substrate that metallic nanotube removal is performed, therefore eliminating the costly and messy step of transferring CNTs from one substrate to another. This is achieved through a residual thin layer of crystalline ST-cut quartz layer on a silicon wafer. The ST-cut quartz wafer promotes aligned growth of CNTs, while the underlying silicon wafer allows backgate burnout.Type: GrantFiled: January 25, 2012Date of Patent: September 16, 2014Assignee: Northrop Grumman Systems CorporationInventors: Silai Krishnaswamy, Joseph Payne, Jeffrey Hartman
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Patent number: 8835802Abstract: A method of creating thin wafers of single crystal silicon wherein an ingot of single-crystal silicon with a (111) axis is flattened and polished at one end normal to the axis, and a notch with a vertex in the (111) plane is produced on a side or edge of the ingot, such that the distance between this vertex and said end is the desired thickness of a wafer to be cleaved from the ingot and such this vertex is in the desired plane of cleavage. Light of a wavelength able to penetrate into the silicon crystal without significant absorption, when the intensity of the beam is low, but is efficiently absorbed and converted to heat when the intensity of the beam is high, is focused to an elongated volume with an axis of elongation in the desired cleavage plane, parallel to and a short distance from said notch edge.Type: GrantFiled: January 24, 2007Date of Patent: September 16, 2014Inventor: Stephen C. Baer
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Patent number: 8835281Abstract: An integrated circuit chip is formed with an active layer and a trap rich layer. The active layer is formed with an active device layer and a metal interconnect layer. The trap rich layer is formed above the active layer. In some embodiments, the active layer is included in a semiconductor wafer, and the trap rich layer is included in a handle wafer.Type: GrantFiled: June 17, 2013Date of Patent: September 16, 2014Assignee: Silanna Semiconductor U.S.A., Inc.Inventors: Chris Brindle, Michael A. Stuber, Stuart B. Molin
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Patent number: 8835271Abstract: It is an object of the present invention to provide a semiconductor display device having an interlayer insulating film which can obtain planarity of a surface while controlling film formation time, can control treatment time of heating treatment with an object of removing moisture, and can prevent moisture in the interlayer insulating film from being discharged to a film or an electrode adjacent to the interlayer insulating film. An inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover a TFT. Next, an organic resin film containing photosensitive acrylic resin is applied to the organic insulting film, and the organic resin film is partially exposed to light to be opened. Thereafter, an inorganic insulting film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover the opened organic resin film.Type: GrantFiled: April 5, 2013Date of Patent: September 16, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Satoshi Murakami, Masahiko Hayakawa, Kiyoshi Kato, Mitsuaki Osame
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Patent number: 8835282Abstract: A method for forming a multi-material thin film includes providing a multi-material donor substrate comprising single crystal silicon and an overlying film comprising GaN. Energetic particles are introduced through a surface of the multi-material donor substrate to a selected depth within the single crystal silicon. The method includes providing energy to a selected region of the donor substrate to initiate a controlled cleaving action in the donor substrate. Then, a cleaving action is made using a propagating cleave front to free a multi-material film from a remaining portion of the donor substrate, the multi-material film comprising single crystal silicon and the overlying film.Type: GrantFiled: January 16, 2013Date of Patent: September 16, 2014Assignee: Silicon Genesis CorporationInventors: Francois J. Henley, Nathan Cheung
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Patent number: 8835283Abstract: A fabrication method for producing semiconductor chips with enhanced die strength comprises following steps: forming a semiconductor wafer with enhanced die strength by comprising the substrate, the active layer on the front side of the substrate and the backside metal layer on the backside of the substrate, wherein at least one integrated circuit forms in the active layer; forming a protection layer on a front side of the semiconductor wafer; dicing the semiconductor wafer by at least one laser dicing process and removing the laser dicing residues and removing said protection layer by at least one etching process, whereby plural semiconductor chips with enhanced die strength are produced, and wherein the backside metal layer of said semiconductor chip fully covers the backside of said semiconductor chip after dicing.Type: GrantFiled: August 20, 2013Date of Patent: September 16, 2014Assignee: WIN Semiconductors Corp.Inventor: Chang-Hwang Hua
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Patent number: 8835923Abstract: The semiconductor wafer for a silicon-on-insulator integrated circuit comprises an insulating region located between a first semiconductor substrate intended to receive the integrated circuit and a second semiconductor substrate containing at least one buried layer comprising at least one metal silicide.Type: GrantFiled: September 14, 2012Date of Patent: September 16, 2014Assignee: STMicroelectronics (Rousset) SASInventor: Pascal Fornara
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Publication number: 20140254979Abstract: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.Type: ApplicationFiled: January 8, 2014Publication date: September 11, 2014Applicant: Northrop Grumman Systems CorporationInventors: Chunbo Zhang, Peter Ngo, Gershon Akerling, Kevin M. Leong, Patty Chang-Chien, Kelly J. Hennig, William R. Deal
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Patent number: 8828845Abstract: Provided is a method of fabricating an oxide thin film device using laser lift-off and an oxide thin film device fabricated by the same. The method includes: forming an oxide thin film on a growth substrate; bonding a temporary substrate on the oxide thin film; irradiating laser onto the growth substrate to separate the oxide thin film on which the temporary substrate has been bonded from the growth substrate; bonding a device substrate on the oxide thin film on which the temporary substrate has been bonded; and forming an upper electrode film on the oxide thin film. Therefore, it is possible to overcome problems caused by a defective layer by transferring an oxide thin film transferred on a polymer-based temporary substrate onto a device substrate, without using an interface on which a defective layer formed due to oxygen diffusion upon laser lift-off is formed.Type: GrantFiled: December 13, 2012Date of Patent: September 9, 2014Assignee: Korea Institute of Science and TechnologyInventors: Chong Yun Kang, Seok Jin Yoon, Young Ho Do, Ji Won Choi, Seung Hyub Baek, Hyun Cheol Song, Jin Sang Kim
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Patent number: 8828844Abstract: A damaged region is formed by generation of plasma by excitation of a source gas, and by addition of ion species contained in the plasma from one of surfaces of a single crystal semiconductor substrate; an insulating layer is formed over the other surface of the single crystal semiconductor substrate; a supporting substrate is firmly attached to the single crystal semiconductor substrate so as to face the single crystal semiconductor substrate with the insulating layer interposed therebetween; separation is performed at the damaged region into the supporting substrate to which a single crystal semiconductor layer is attached and part of the single crystal semiconductor substrate by heating of the single crystal semiconductor substrate; dry etching is performed on a surface of the single crystal semiconductor layer attached to the supporting substrate; the single crystal semiconductor layer is recrystallized by irradiation of the single crystal semiconductor layer with a laser beam to melt at least part of theType: GrantFiled: October 8, 2008Date of Patent: September 9, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hideto Ohnuma, Tetsuya Kakehata, Akihisa Shimomura, Shinya Sasagawa, Motomu Kurata
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Patent number: 8830413Abstract: The present invention provides a simplifying method for a peeling process as well as peeling and transcribing to a large-size substrate uniformly. A feature of the present invention is to peel a first adhesive and to cure a second adhesive at the same time in a peeling process, thereby to simplify a manufacturing process. In addition, the present invention is to devise the timing of transcribing a peel-off layer in which up to an electrode of a semiconductor are formed to a predetermined substrate. In particular, a feature is that peeling is performed by using a pressure difference in the case that peeling is performed with a state in which plural semiconductor elements are formed on a large-size substrate.Type: GrantFiled: July 25, 2013Date of Patent: September 9, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yuugo Goto, Yumiko Ohno
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Patent number: 8828891Abstract: For modulating laser light for forming a modified region SD3 at an intermediate position between a position closer to a rear face 21 and a position closer to a front face 3 with respect to an object 1, a quality pattern J having a first brightness region extending in a direction substantially orthogonal to a line 5 and second brightness regions located on both sides of the first brightness region in the extending direction of the line 5 is used. After forming modified regions SD1, SD2 at positions closer to the rear face 21 but before forming modified regions SD4, SD5 at positions closer to the rear face 21 while using the front face 3 as a laser light entrance surface, the modified region SD3 is formed at the intermediate position by irradiation with laser light modulated according to a modulation pattern including the quality pattern J.Type: GrantFiled: January 5, 2011Date of Patent: September 9, 2014Assignee: Hamamatsu Photonics K.K.Inventor: Takeshi Sakamoto
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Patent number: 8828761Abstract: A method for manufacturing a semiconductor light emitting device, includes: forming a light emitting structure having a first conductivity-type semiconductor layer, an active layer, and a second conductivity-type semiconductor layer on a growth substrate. A trench is formed in a portion to divide the light emitting structure into individual light emitting structures. The trench has a depth such that the growth substrate is not exposed. A support substrate is provided on the light emitting structure. The growth substrate is separated from the light emitting structure. The light emitting structure is cut into individual semiconductor light emitting devices.Type: GrantFiled: March 13, 2013Date of Patent: September 9, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Sung Joon Kim, Tae Sung Jang, Jong Gun Woo, Yung Ho Ryu, Tae Hun Kim, Sang Yeob Song
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Patent number: 8828758Abstract: A method of fabricating a liquid crystal display device includes forming a first adhesive pattern on a first auxiliary substrate; forming a first process panel by attaching a first substrate to the first auxiliary substrate using the first adhesive pattern; forming an array element on the first substrate; forming a second adhesive pattern on a second auxiliary substrate; forming a second process panel by attaching a second substrate to the second auxiliary substrate using the second adhesive pattern; forming a color filter element on the second substrate; attaching the first and second process panels with a liquid crystal panel between the first and second process panels; weakening an adhesive strength of the first and second adhesive patterns; and detaching the first and second auxiliary substrates from the first and second substrates, respectively.Type: GrantFiled: December 27, 2011Date of Patent: September 9, 2014Assignee: LG Display Co., Ltd.Inventors: Jae-Young Oh, Woo-Sup Shin, Sung-Ki Kim, Won-Sang Ryu, Kyung-Mo Son, Jae-Won Lee
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Patent number: 8822306Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.Type: GrantFiled: August 9, 2011Date of Patent: September 2, 2014Assignee: Infineon Technologies AGInventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
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Patent number: 8822308Abstract: A method is disclosed which includes: forming at least one layer of material on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; attaching a second substrate to a second surface of the at least one layer of material; forming bubbles at the interface; and applying mechanical force; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate. Related arrangements are also described.Type: GrantFiled: December 6, 2013Date of Patent: September 2, 2014Assignee: Graphene FrontiersInventor: Bruce Ira Willner
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Patent number: 8822309Abstract: Methods and structures for heterogeneous integration of diverse material systems and device technologies onto a single substrate incorporate layer transfer techniques into an epitaxy level packaging process. A planar substrate surface of multiple epitaxial areas of different materials can be heterogeneously integrated with a substrate material. Complex assembly and lattice engineering is significantly reduced. Microsystems of different circuits made from different materials can be built from a single wafer Fab line employing the claimed processes.Type: GrantFiled: December 21, 2012Date of Patent: September 2, 2014Assignee: Athenaeum, LLCInventor: Eric Ting-Shan Pan
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Patent number: 8822310Abstract: Some embodiments discussed relates to an apparatus for holding a substrate, comprising a body with a surface for a semiconductor wafer to rest on, with the surface having a first surface area on which a first area of the semiconductor wafer can rest, and a second surface area on which a second area of the semiconductor wafer can rest, wherein the second surface area protrudes with respect to the first surface area.Type: GrantFiled: February 22, 2013Date of Patent: September 2, 2014Assignee: Infineon Technologies AGInventors: Gerald Lackner, Christian Maier, Francisco Javier Santos Rodriguez
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Patent number: 8822305Abstract: A plurality of single crystal semiconductor substrates having a rectangular shape are disposed on a tray. Depression portions are provided in the tray so that the single crystal semiconductor substrates can fit in. The single crystal semiconductor substrates disposed on the tray are doped with hydrogen ions, so that damaged regions are formed at a desired depth. A bonding layer is formed on surfaces of the single crystal semiconductor substrates. The plurality of single crystal semiconductor substrates in each of which the damaged region is formed and on which the bonding layer is formed are disposed on the tray and bonded to the base substrate. By heat treatment, the single crystal semiconductor substrates are separated at the damaged regions; accordingly, a plurality of single crystal semiconductor layers which are thinned are formed over the base substrate.Type: GrantFiled: September 17, 2008Date of Patent: September 2, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Publication number: 20140242778Abstract: The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.Type: ApplicationFiled: May 5, 2014Publication date: August 28, 2014Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Thomas A. Langdo, Matthew T. Currie, Richard Hammond, Anthony J. Lochtefeld, Eugene A. Fitzgerald
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METHODS, DEVICES, AND SYSTEMS RELATED TO FORMING SEMICONDUCTOR POWER DEVICES WITH A HANDLE SUBSTRATE
Publication number: 20140239348Abstract: Methods of manufacturing device assemblies, as well as associated semiconductor assemblies, devices, systems are disclosed herein. In one embodiment, a method of forming a semiconductor device assembly includes forming a semiconductor device assembly that includes a handle substrate, a semiconductor structure having a first side and a second side opposite the first side, and an intermediary material between the semiconductor structure and the handle substrate. The method also includes removing material from the semiconductor structure to form an opening extending from the first side of the semiconductor structure to at least the intermediary material at the second side of the semiconductor structure. The method further includes removing at least a portion of the intermediary material through the opening in the semiconductor structure to undercut the second side of the semiconductor structure.Type: ApplicationFiled: February 22, 2013Publication date: August 28, 2014Applicant: MICRON TECHNOLOGY, INC.Inventors: Martin F. Schubert, Vladimir Odnoblyudov, Cem Basceri -
Patent number: 8816489Abstract: Methods for fabricating integrated circuit devices on an acceptor substrate devoid of circuitry are disclosed. Integrated circuit devices are formed by sequentially disposing one or more levels of semiconductor material on an acceptor substrate, and fabricating circuitry on each level of semiconductor material before disposition of a next-higher level. After encapsulation of the circuitry, the acceptor substrate is removed and semiconductor dice are singulated. Integrated circuit devices formed by the methods are also disclosed.Type: GrantFiled: May 14, 2012Date of Patent: August 26, 2014Assignee: Micron Technology, Inc.Inventors: Gurtej S. Sandhu, Krishna K. Parat
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Patent number: 8815400Abstract: An epoxy resin composition including (A) an epoxy resin that is solid at room temperature and has a softening point of 40° C. to 110° C., (B) a curing agent that is solid at room temperature and has a softening point of not less than 40° C. to 110° C., (C) a curing accelerator, (D) an inorganic filler having a mass-average particle size of 0.05 to 5 ?m, (E) a diluent, and (F) a specific dimethyl silicone, in which at least one of the component (A) and the component (B) is silicone-modified is provided. The composition can be used in a silicon chip die attach method or to produce a semiconductor device containing a silicon chip, a substrate and a cured product of the composition, in which the silicon chip is bonded to the substrate via the cured product.Type: GrantFiled: January 17, 2012Date of Patent: August 26, 2014Assignee: Shin-Etsu Chemical Co., Ltd.Inventors: Tatsuya Kanamaru, Shinsuke Yamaguchi
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Publication number: 20140235032Abstract: The method for producing a transparent SOI wafer is provided and includes treating a bonded wafer at a first temperature of 150 to 300° C. as a first heat treatment; cutting off an unbonded portion of the bonded wafer by irradiating a visible light laser from a silicon wafer side of the heated bonded wafer to a boundary between the bonded surface and an unbonded circumferential surface, while keeping an angle of 60 to 90° between the incident light and a radial direction of the silicon wafer; subjecting the silicon wafer of the bonded wafer having the unbonded portion cut off to grinding, polishing, or etching to form a silicon film; and heat-treating the bonded wafer having the silicon film formed at a second temperature of 300 to 500° C. as a second heat treatment which is higher than the first temperature.Type: ApplicationFiled: October 11, 2012Publication date: August 21, 2014Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Shoji Akiyama, Kazutoshi Nagata
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Patent number: 8809164Abstract: Methods for detecting the physical layout of an integrated circuit are provided. The methods of the present disclosure allow large area imaging of the circuit layout without requiring tedious sample preparation techniques. The imaging can be performed utilizing low-energy beam techniques such as scanning electron microscopy; however, more sophisticated imaging techniques can also be employed. In the methods of the present disclosure, spalling is used to remove a portion of a semiconductor layer including at least one semiconductor device formed thereon or therein from a base substrate. In some cases, a buried insulator layer that is located beneath a semiconductor layer including the at least one semiconductor device can be completely or partially removed. In some cases, the semiconductor layer including the at least one semiconductor device can be thinned. The methods improve the detection quality that the buried insulator layer and a thick semiconductor layer can reduce.Type: GrantFiled: September 9, 2013Date of Patent: August 19, 2014Assignee: International Business Machines CorporationInventors: Stephen W. Bedell, Bahman Hekmatshoartabari, Ali Khakifirooz, John A. Ott, Ghavam G. Shahidi, Davood Shahrjerdi
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Publication number: 20140225218Abstract: Ion-reduced, ion cut-formed three-dimensional (3D) integrated circuits (IC) (3DICs) are disclosed. Related methods and systems are also disclosed. During an ion-cut process for forming a monolithic 3DIC, extra ions are implanted in the donor wafer to effectuate the ion-cut. Excess, residual implanted ions remain implanted in a top layer of the transfer layer of the 3DIC. However, these residual implanted ions can interfere with operation of electronic components in the 3DIC. In this regard, the 3DIC and methods disclosed herein involve reduction or removal of the residual extra ions before further electronic components are created and layered in a 3DIC. In this manner, the extra charge elements introduced by such extra ions are reduced or removed providing for better functionality in the completed device.Type: ApplicationFiled: February 12, 2013Publication date: August 14, 2014Applicant: QUALCOMM IncorporatedInventor: Yang Du
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Patent number: 8802539Abstract: The present invention relates to a process for preparing semiconductor-on-insulator type structures that include a semiconductor layer of a donor substrate, an insulator layer and a receiver substrate. The process includes bonding of the donor substrate onto the receiver substrate, with at least one of the substrates being coated with an insulator layer, and forming at the bonding interface a so-called trapping interface of electrically active traps suitable for retaining charge carriers. The invention also relates to a semiconductor-on-insulator type structure that includes such a trapping interface.Type: GrantFiled: July 21, 2008Date of Patent: August 12, 2014Assignee: SoitecInventors: Frédéric Allibert, Sébastien Kerdiles
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Patent number: 8802542Abstract: The invention pertains to a combination of a substrate and a wafer, wherein the substrate and the wafer are arranged parallel to one another and bonded together with the aid of an adhesive layer situated between the substrate and the wafer, and wherein the adhesive is chosen such that its adhesive properties are neutralized or at least diminished when a predetermined temperature is exceeded. According to the invention, the adhesive layer is only applied annularly between the substrate and the wafer in the edge region of the wafer.Type: GrantFiled: July 22, 2013Date of Patent: August 12, 2014Inventor: Erich Thallner
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Patent number: 8802477Abstract: A method for forming a heterojunction III-V photovoltaic (PV) cell includes performing layer transfer of a base layer from a wafer of a III-V substrate, the base layer being less than about 20 microns thick; forming an intrinsic layer on the base layer; forming an amorphous silicon layer on the intrinsic layer; and forming a transparent conducting oxide layer on the amorphous silicon layer. A heterojunction III-V photovoltaic (PV) cell includes a base layer comprising a III-V substrate, the base layer being less than about 20 microns thick; an intrinsic layer located on the base layer; an amorphous silicon layer located on the intrinsic layer; and a transparent conducting oxide layer located on the amorphous silicon layer.Type: GrantFiled: February 26, 2010Date of Patent: August 12, 2014Assignee: International Business Machines CorporationInventors: Stephen W. Bedell, Norma Sosa Cortes, Keith E. Fogel, Devendra Sadana, Ghavam Shahidi, Davood Shahrjerdi
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Patent number: 8802462Abstract: To provide an input device including a display screen which has an image display function and a text information input function by using a display portion in which a pixel includes an optical sensor. An optical sensor is provided in each pixel of the display portion in order to detect position information. A transistor of a pixel circuit in the display portion and the optical sensor are formed using a single crystal semiconductor layer. By using the single crystal semiconductor layer, there is no variation in characteristics among pixels, and position detection with high accuracy is realized. Moreover, the display portion is formed using a substrate which is a light-transmitting substrate such as a glass substrate provided with a single crystal semiconductor layer separated from a single crystal semiconductor substrate.Type: GrantFiled: November 21, 2012Date of Patent: August 12, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki