Subsequent Separation Into Plural Bodies (e.g., Delaminating, Dicing, Etc.) Patents (Class 438/458)
  • Patent number: 8803290
    Abstract: The amount of signal propagation and moisture penetration and corresponding reliability problems due to moisture penetration degradation in an IC can be reduced by fabricating two seal rings with non-adjacent gaps. In one embodiment, the same effect can be achieved by fabricating a wide seal ring with a channel having offset ingress and egress portions. Either of these embodiments can also have grounded seal ring segments which further reduce signal propagation.
    Type: Grant
    Filed: October 3, 2008
    Date of Patent: August 12, 2014
    Assignee: QUALCOMM Incorporated
    Inventors: Norman Frederick, Jr., Tom Myers
  • Publication number: 20140220764
    Abstract: A method for wafer transfer includes forming a spreading layer, including graphene, on a single crystalline SiC substrate. A semiconductor layer including one or more layers is formed on and is lattice matched to the crystalline SiC layer. The semiconductor layer is transferred to a handle substrate, and the spreading layer is split to remove the single crystalline SiC substrate.
    Type: Application
    Filed: February 5, 2013
    Publication date: August 7, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: INTERNATIONAL BUSINESS MACHINES CORPORATION
  • Publication number: 20140220765
    Abstract: A method is disclosed for separating a support substrate from a solid-phase bonded wafer which includes a Si wafer and support substrate solid-phase bonded to back surface of the Si wafer. The method includes a step of irradiating the Si wafer with laser light with a wavelength which passes through the Si wafer and is focused on a solid-phase bonding interface between the Si wafer and support substrate to form a breaking layer in at least part of an outer circumferential portion of the solid-phase bonding interface, a step of separating the breaking layer; and a step of separating the solid-phase bonding interface. The method is capable of using a Si thin wafer without substantial wafer cracking at an initial stage where the wafer is inputted to a wafer process, capable of separating a support substrate from the Si thin wafer easily, and capable of reducing the wafer cost.
    Type: Application
    Filed: April 10, 2014
    Publication date: August 7, 2014
    Applicant: FUJI ELECTRIC CO., LTD.
    Inventor: Tsunehiro NAKAJIMA
  • Patent number: 8796056
    Abstract: A method for fabricating a display panel includes the following steps. A surface of a first substrate is adhered to a first supporting substrate with a first adhesive layer. First devices are formed on the other surface of the first substrate. The other surface of the first substrate is adhered to a second supporting substrate with a second adhesive layer. The first adhesive layer and supporting substrate are separated from the first substrate. Second devices are formed on the surface of the first substrate. A second substrate is adhered to a third supporting substrate with a third adhesive layer. The first substrate and the second substrate are assembled, and a display medium layer is interposed between the first substrate and the second substrate. The second adhesive layer and supporting substrate are separated from the first substrate, and the third adhesive layer and supporting substrate are separated from the second substrate.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: August 5, 2014
    Assignee: AU Optronics Corp.
    Inventor: Chi-Ho Chang
  • Patent number: 8796111
    Abstract: According to one embodiment, stacked layers of a nitride semiconductor include a substrate, a single crystal layer and a nitride semiconductor layer. The substrate does not include a nitride semiconductor and has a protrusion on a major surface. The single crystal layer is provided directly on the major surface of the substrate to cover the protrusion, and includes a crack therein. The nitride semiconductor layer is provided on the single crystal layer.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: August 5, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideto Sugawara, Masaaki Onomura
  • Patent number: 8796073
    Abstract: The cost associated with alignment in a stacked IC device can be reduced by aligning multiple die instead of a single die during the alignment step. In one embodiment, the alignment structures are placed in the scribe line instead of within the die itself. Aligning four die instead of one eliminates the need for as many alignment indicators and thus more silicon on the wafer can be used for active areas. In addition, this method allows for yield improvement through binning of dies having the same yield configuration.
    Type: Grant
    Filed: September 24, 2008
    Date of Patent: August 5, 2014
    Assignee: QUALCOMM Incorporated
    Inventors: Shiqun Gu, Thomas R. Toms
  • Patent number: 8796110
    Abstract: An embodiment is a method for bonding. The method comprises bonding a handle substrate to a capping substrate; thinning the capping substrate; etching the capping substrate; and after the thinning and the etching the capping substrate, bonding the capping substrate to an active substrate. The handle substrate has an opening therethrough. The method also comprises removing the handle substrate from the capping substrate. The removing comprises providing an etchant through the opening to separate the handle substrate from the capping substrate. Other embodiments further include forming a bonding material on a surface of at least one of the handle substrate and the capping substrate such that the capping substrate is bonded to the handle substrate by the bonding material. The bonding material may be removed by using a dry etching to remove the handle substrate from the capping substrate.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: August 5, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuei-Sung Chang, Yi Heng Tsai
  • Patent number: 8796145
    Abstract: A method of manufacturing a metal-base substrate having an insulative adhesive layer and a conductor layer on a metal-based material is provided. The method includes the steps of dispersing a disperse phase in an insulative adhesive-dispersing medium that contains a wetting dispersant and constitutes the insulative adhesive layer; laminating step of laminating the insulative adhesive on the conductor foil as feeding the roll-shaped conductor foil; curing the insulative adhesive on the conductor foil under heat into a B stage state and thus forming a composite of the conductor foil and the insulative adhesive layer in the B stage state; laminating the metal-based material on the insulative adhesive layer in the B stage state to give a laminate; and then curing the insulative adhesive layer in the B stage state into a C stage state by heat pressurization of the laminate.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: August 5, 2014
    Assignee: Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Taiki Nishi, Takeshi Miyakawa, Katsunori Yashima, Kensuke Okoshi, Hidenori Ishikura
  • Patent number: 8796076
    Abstract: After formation of an opening by exposing and development of the photosensitive surface protection film and adhesive layer which is formed on the circuit side of the semiconductor wafer, the semiconductor chips having a photosensitive surface protection film and adhesive layer thereon is fabricated by cutting individual chips from the semiconductor wafer. After the second semiconductor chip is placed over the first semiconductor chip up by the suction collet, the second semiconductor chip is bonded with the first semiconductor chip by the first surface protection film and adhesive layer. The suction side of the suction collet has lower adhesion to the second semiconductor chip than that between the now bonded semiconductor chips.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: August 5, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Atsushi Yoshimura, Shoko Omizo
  • Patent number: 8796114
    Abstract: A method for slicing a monocrystalline semiconductor layer (116) from a semiconductor single crystal (100) comprising: providing a semiconductor single crystal (100) having a uniform crystal structure; locally modifying the crystal structure within a separating plane (104) in the semiconductor single crystal (100) into an altered microstructure state by means of irradiation using a laser (106); and removing the modified separating plane (104) by means of selective etching.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: August 5, 2014
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventor: Ralph Wagner
  • Patent number: 8790950
    Abstract: A method of manufacturing an optical sensor includes providing a semiconductor wafer including a plurality of pixel areas, providing a light transmissive substrate including a light transmissive wafer with a plurality of light transmissive members attached thereto, the plurality of light transmissive members being arranged on a first main surface of the light transmissive wafer and each of plurality of light transmissive members emitting ? rays, an amount of the ? rays being smaller than or equal to 0.05 c/cm2·h, fixing the light transmissive substrate onto the semiconductor wafer together by a fixing member, and dividing the semiconductor wafer and the light transmissive substrate that are fixed together into individual pieces.
    Type: Grant
    Filed: August 16, 2011
    Date of Patent: July 29, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takanori Suzuki, Tadashi Kosaka, Koji Tsuduki, Yasuhiro Matsuki, Shin Hasegawa, Akiya Nakayama
  • Patent number: 8790994
    Abstract: It is an object of the present invention to reduce the cost of a wireless chip, further, to reduce the cost of a wireless chip by enabling the mass production of a wireless chip, and furthermore, to provide a downsized and lightweight wireless chip. A wireless chip in which a thin film integrated circuit peeled from a glass substrate or a quartz substrate is formed between a first base material and a second base material is provided according to the invention. As compared with a wireless chip formed from a silicon substrate, the wireless chip according to the invention realizes downsizing, thinness, and lightweight. The thin film integrated circuit included in the wireless chip according to the invention at least has an n-type thin film transistor having an LDD (Lightly Doped Drain) structure, a p-type thin film transistor having a single drain structure, and a conductive layer functioning as an antenna.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: July 29, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Koji Dairiki, Junya Maruyama, Tomoko Tamura, Eiji Sugiyama, Yoshitaka Dozen
  • Publication number: 20140203408
    Abstract: There is provided a method that includes forming a sacrificial layer and the semiconductor crystal layer on a semiconductor crystal layer formation wafer in the stated order, bonding together the semiconductor crystal layer formation wafer and a transfer-destination wafer such that a first surface of the semiconductor crystal layer and a second surface of the transfer-destination wafer face each other, and splitting the transfer-destination wafer from the semiconductor crystal layer formation wafer with the semiconductor crystal layer remaining on the transfer-destination wafer side, by etching away the sacrificial layer by immersing the semiconductor crystal layer formation wafer and the transfer-destination wafer wholly or partially in an etchant. Here, the transfer-destination wafer includes an inflexible wafer and an organic material layer, and a surface of the organic material layer is the second surface.
    Type: Application
    Filed: March 20, 2014
    Publication date: July 24, 2014
    Applicants: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Tomoyuki TAKADA, Hisashi YAMADA, Masahiko HATA, Tatsuro MAEDA, Taro ITATANI, Tetsuji YASUDA
  • Patent number: 8785585
    Abstract: A temporary adhesive for which temporary adhesion and subsequent detachment are simple. The temporary adhesive composition includes: (A) an organopolysiloxane having a weight-average molecular weight of at least 15,000, obtained by a hydrosilylation reaction between (A1) and (A2) described below, and (B) an organic solvent having a boiling point of not more than 220° C., wherein (A1) is an alkenyl group-containing organopolysiloxane having a weight-average molecular weight exceeding 2,000, comprising 35 to 99 mol % of T siloxane units and 1 to 25 mol % of M siloxane units, and in which alkenyl groups bonded to silicon atoms represent at least 2 mol % of all the organic groups bonded to silicon atoms, and (A2) is a specific organohydrogenpolysiloxane having at least two silicon atom-bonded hydrogen atoms or a specific hydrosilyl group-containing compound.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: July 22, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Masahiro Furuya, Shohei Tagami, Hideto Kato, Hideyuki Ito, Masahiro Yoshizawa
  • Patent number: 8785299
    Abstract: An embodiment is a device comprising a semiconductor die, an adhesive layer on a first side of the semiconductor die, and a molding compound surrounding the semiconductor die and the adhesive layer, wherein the molding compound is at a same level as the adhesive layer. The device further comprises a first post-passivation interconnect (PPI) electrically coupled to a second side of the semiconductor die, and a first connector electrically coupled to the first PPI, wherein the first connector is over and aligned to the molding compound.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: July 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chao Mao, Chin-Chuan Chang, Jui-Pin Hung, Jing-Cheng Lin
  • Patent number: 8786056
    Abstract: A method of forming a semiconductor light emitting element. The method can include forming a seed layer on a semiconductor layer assembly including at least one nitride semiconductor layer. An insulating mask can be formed on the seed layer. The insulating mask can include a plurality of element areas separated by cross spaces. Each element area of the plurality of element areas can be connected to at least one of the other element areas of the plurality of element areas. The seed layer can be plated such that a plating substrate is formed in each of the plurality of element areas.
    Type: Grant
    Filed: June 8, 2011
    Date of Patent: July 22, 2014
    Assignee: Nichia Corporation
    Inventors: Kentaro Watanabe, Giichi Marutsuki, Yuya Yamakami
  • Publication number: 20140199823
    Abstract: An SOT substrate (6), in which a silicon layer (5) is provided on a silicon substrate (3) via a silicon oxide film (4), is formed. Next, a plurality of semiconductor elements (8) is formed on a surface of the silicon layer (5). Next, wiring (11) is formed on a surface of an insulating substrate (10). Next, the SOI substrate (6) and the insulating substrate (10) are pasted together so that the plurality of semiconductor elements (8) and the wiring (11) are electrically connected together. Next, at least one of hydrogen ions and rare gas ions are injected into the silicon substrate (3) to form a brittle layer (12). Next, part of the silicon substrate (3) is peeled away from the brittle layer (12) as a boundary.
    Type: Application
    Filed: June 10, 2011
    Publication date: July 17, 2014
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Noritsugu Nomura, Akira Okada, Tatsuo Harada
  • Patent number: 8778775
    Abstract: A method for preparing a thin layer of GaN from a starting substrate in which at least one thick surface area extending along a free face of the starting substrate includes GaN, where the method includes bombarding the free face of the substrate with helium and hydrogen atoms, the helium being implanted first into the thickness of the thick surface area and the hydrogen being implanted thereafter, and where the helium and hydrogen doses each vary between 1.1017 atoms/cm2 and 4.1017 atoms/cm2. The starting substrate is subjected to a rupture process in order to induce the separation, relative to a residue of the starting substrate, of the entire portion of the thick area located between the free face and the helium and hydrogen implantation depth. The helium is advantageously implanted in a dose at least equal to that of hydrogen, and can also be implanted alone.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: July 15, 2014
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Aurélie Tauzin, Jérôme Dechamp, Frédéric Mazen, Florence Madeira
  • Patent number: 8778771
    Abstract: A method of manufacturing a semiconductor device includes steps of providing a substrate including a semiconductor portion, a non-porous semiconductor layer, and a porous semiconductor layer arranged between the semiconductor portion and the non-porous semiconductor layer, forming a porous oxide layer by oxidizing the porous semiconductor layer, forming a bonded substrate by bonding a supporting substrate to a surface, on a side of the non-porous semiconductor layer, of the substrate on which the porous oxide layer is formed, and separating the semiconductor portion from the bonded substrate by utilizing the porous oxide layer.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: July 15, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kazuo Kokumai
  • Patent number: 8779598
    Abstract: Embodiments described herein provide a method of manufacturing integrated circuit (IC) devices. The method includes coupling a first surface of a first intermediate substrate to a first surface of a second intermediate substrate, forming a first plurality of patterned metal layers on a second surface of the first intermediate substrate to form a first substrate and a second plurality of patterned metal layers on a second surface of the second intermediate substrate to form a second substrate, and separating the first and second substrates. Each of the first substrate and the second substrate is configured to facilitate electrical interconnection between a respective IC die and a respective printed circuit board (PCB).
    Type: Grant
    Filed: June 28, 2011
    Date of Patent: July 15, 2014
    Assignee: Broadcom Corporation
    Inventors: Fan Yeung, Raymond (Kwok Cheung) Tsang, Edward Law
  • Patent number: 8778777
    Abstract: A method for manufacturing a heterostructure for applications in the fields of electronics, photovoltaics, optics or optoelectronics, by implanting atomic species in a donor substrate so as to form an embrittlement area therein, assembling a receiver substrate on the donor substrate, wherein the receiver substrate has a larger thermal expansion coefficient than that of the donor substrate, detaching a rear portion of the donor substrate along the embrittlement area so as to transfer a thin layer of interest of the donor substrate onto the receiver substrate, and applying a detachment annealing after assembling and but before detaching, in order to facilitate the detaching. The detachment annealing includes the simultaneous application of a first temperature to the donor substrate and a second temperature different from the first to the receiver substrate; with the first and second temperatures being selected to reduce the tensile stress condition of the donor substrate.
    Type: Grant
    Filed: September 9, 2009
    Date of Patent: July 15, 2014
    Assignee: Soitec
    Inventor: Mark Kennard
  • Patent number: 8778776
    Abstract: Provided is a method of forming a semiconductor package including providing a substrate having a first side and an opposite second side and providing a wafer having a plurality of semiconductor chips, each of the semiconductor chips having a conductive pad, wherein at least one of the substrate and the wafer includes a seed pattern. The first side of the substrate is bonded to the wafer with the conductive pad positioned adjacent to the first side of the substrate and the seed pattern positioned between the conductive pad and the first side of the substrate. A through hole is then formed penetrating the substrate from the second side of the substrate to expose the seed pattern. A through electrode is formed in the through hole using the seed pattern as a seed. Corresponding devices are also provided.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: July 15, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ju-il Choi, Kyu-Ha Lee, Jae-hyun Phee, Jung-Hwan Kim, Tae Hong Min
  • Patent number: 8778736
    Abstract: A structure for a semiconductor component is provided having a bi-layer capping coating integrated and built on supporting layer to be transferred. The bi-layer capping protects the layer to be transferred from possible degradation resulting from the attachment and removal processes of the carrier assembly used for layer transfer. A wafer-level layer transfer process using this structure is enabled to create three-dimensional integrated circuits.
    Type: Grant
    Filed: August 15, 2008
    Date of Patent: July 15, 2014
    Assignee: International Business Machines Corporation
    Inventors: Sampath Purushothaman, Anna W. Topol
  • Publication number: 20140191283
    Abstract: A patterned substrate is provided having at least two mesa surface portions, and a recessed surface located beneath and positioned between the at least two mesa surface portions. A Group III nitride material is grown atop the mesa surface portions of the patterned substrate and atop the recessed surface. Growth of the Group III nitride material is continued merging the Group III nitride material that is grown atop the mesa surface portions. When the Group III nitride material located atop the mesa surface portions merge, the Group III nitride material growth on the recessed surface ceases. The merged Group III nitride material forms a first Group III nitride material structure, and the Group III nitride material formed in the recessed surface forms a second material structure. The first and second material structures are disjoined from each other and are separated by an air gap.
    Type: Application
    Filed: January 4, 2013
    Publication date: July 10, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Can Bayram, Devendra K. Sadana, Kuen-Ting Shiu
  • Patent number: 8772129
    Abstract: A manufacturing method of an SOI substrate which possesses a base substrate having low heat resistance and a very thin semiconductor layer having high planarity is demonstrated. The method includes: implanting hydrogen ions into a semiconductor substrate to form an ion implantation layer; bonding the semiconductor substrate and a base substrate such as a glass substrate, placing a bonding layer therebetween; heating the substrates bonded to each other to separate the semiconductor substrate from the base substrate, leaving a thin semiconductor layer over the base substrate; irradiating the surface of the thin semiconductor layer with laser light to improve the planarity and recover the crystallinity of the thin semiconductor layer; and thinning the thin semiconductor layer. This method allows the formation of an SOI substrate which has a single-crystalline semiconductor layer with a thickness of 100 nm or less over a base substrate.
    Type: Grant
    Filed: September 27, 2010
    Date of Patent: July 8, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hidekazu Miyairi, Akihisa Shimomura, Tatsuya Mizoi, Eiji Higa, Yoji Nagano
  • Patent number: 8772128
    Abstract: A single crystal semiconductor substrate is irradiated with ions that are generated by exciting a hydrogen gas and are accelerated with an ion doping apparatus, thereby forming a damaged region that contains a large amount of hydrogen. After the single crystal semiconductor substrate and a supporting substrate are bonded, the single crystal semiconductor substrate is heated to be separated along the damaged region. While a single crystal semiconductor layer separated from the single crystal semiconductor substrate is heated, this single crystal semiconductor layer is irradiated with a laser beam. The single crystal semiconductor layer undergoes re-single-crystallization by being melted through laser beam irradiation, thereby recovering its crystallinity and planarizing the surface of the single crystal semiconductor layer.
    Type: Grant
    Filed: October 7, 2008
    Date of Patent: July 8, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Junpei Momo, Fumito Isaka, Eiji Higa, Masaki Koyama, Akihisa Shimomura
  • Patent number: 8771442
    Abstract: New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a cycloolefin copolymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened or dissolved to allow the wafers to slide or be pulled apart at the appropriate stage in the fabrication process.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: July 8, 2014
    Assignee: Brewer Science Inc.
    Inventors: Wenbin Hong, Dongshun Bai, Tony D. Flaim, Rama Puligadda
  • Patent number: 8772144
    Abstract: A vertical conduction nitride-based Schottky diode is formed using an insulating substrate which was lifted off after the diode device is encapsulated on the front side with a wafer level molding compound. The wafer level molding compound provides structural support on the front side of the diode device to allow the insulating substrate to be lifted off so that a conductive layer can be formed on the backside of the diode device as the cathode electrode. A vertical conduction nitride-based Schottky diode is thus realized. In another embodiment, a protection circuit for a vertical GaN Schottky diode employs a silicon-based vertical PN junction diode connected in parallel to the GaN Schottky diode to divert reverse bias avalanche current.
    Type: Grant
    Filed: November 11, 2011
    Date of Patent: July 8, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: TingGang Zhu, Anup Bhalla, Ping Huang, Yueh-se Ho
  • Patent number: 8772130
    Abstract: In order to keep the crystallinity of the semiconductor thin film layer high, a temperature of a semiconductor substrate during hydrogen ion addition treatment is suppressed to lower than or equal to 200° C. In addition, the semiconductor substrate is subjected to plasma treatment while the semiconductor substrate is kept at a temperature of higher than or equal to 100° C. and lower than or equal to 400° C. after the hydrogen ion addition treatment, whereby Si—H bonds which have low contribution to separation of the semiconductor thin film layer can be reduced while Si—H bonds which have high contribution to separation of the semiconductor thin film layer, which are generated by the hydrogen ion addition treatment, are kept.
    Type: Grant
    Filed: August 20, 2012
    Date of Patent: July 8, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Hiroshi Ohki
  • Patent number: 8772131
    Abstract: A method is provided for bonding a first substrate carrying a semiconductor device layer on its front surface to a second substrate. The method comprises producing the semiconductor device layer on the front surface of the first substrate, depositing a first metal bonding layer or a stack of metal layers on the first substrate, on top of the semiconductor device layer, depositing a second metal bonding layer or a stack of metal layers on the front surface of the second substrate, depositing a metal stress-compensation layer on the back side of the second substrate, thereafter establishing a metal bond between the first and second substrate, by bringing the first and second metal bonding layers or stacks of layers into mutual contact under conditions of mechanical pressure and temperature suitable for obtaining the metal bond, and removing the first substrate.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: July 8, 2014
    Assignee: IMEC
    Inventors: Nga Phuong Pham, Maarten Rosmeulen, Bart Vandevelde
  • Patent number: 8772067
    Abstract: The purpose of the present invention is to obtain a finer texture for a silicon substrate having a textured surface and thereby obtain a thinner silicon substrate for a solar cell. The invention provides a silicon substrate that has a thickness of 50 [mu]m or less and substrate surface orientation (111), and that has a textured surface on which a texture has been formed. Such a silicon substrate is produced by a process comprising a step (A) for preparing a silicon substrate that preferably has a thickness of 50 [mu]m or less and substrate surface orientation (111), and a step (B) for texturing by blowing etching as comprising a fluorine-containing gas onto the surface of the prepared silicon substrate.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: July 8, 2014
    Assignee: Panasonic Corporation
    Inventors: Ichiro Nakayama, Tsuyoshi Nomura, Tomohiro Okumura, Mitsuo Saitoh, Hiroshi Tanabe, Yukiya Usui
  • Publication number: 20140183636
    Abstract: Film thickness variations are prevented in a plurality of single crystal semiconductor films separated at a fragile layer reliably and transferred to a base substrate.
    Type: Application
    Filed: June 26, 2012
    Publication date: July 3, 2014
    Applicant: Sharp Kabushiki Kaisha
    Inventor: Masahiro Mitani
  • Publication number: 20140183601
    Abstract: A method for transferring a layer of semiconductor by providing a donor substrate that includes a useful layer of a semiconductor material, a confinement structure that includes a confinement layer of a semiconductor material having a chemical composition that is different than that of the useful layer, and two protective layers of semiconductor material that is distinct from the confinement layer with the protective layers being arranged on both sides of the confinement layer; introducing ions into the donor substrate, bonding the donor substrate to a receiver substrate, subjecting the donor and receiver substrates to a heat treatment that provides an increase in temperature during which the confinement layer attracts the ions in order to concentrate them in the confinement layer, and detaching the donor substrate from the receiver substrate by breaking the confinement layer.
    Type: Application
    Filed: June 20, 2012
    Publication date: July 3, 2014
    Applicant: SOITEC
    Inventors: Fabrice Lallement, Christophe Figuet, Daniel Delprat
  • Publication number: 20140187020
    Abstract: A method of preparing a monocrystalline donor substrate, the method comprising (a) implanting helium ions through the front surface of the monocrystalline donor substrate to an average depth D1 as measured from the front surface toward the central plane; (b) implanting hydrogen ions through the front surface of the monocrystalline donor substrate to an average depth D2 as measured from the front surface toward the central plane; and (c) annealing the monocrystalline donor substrate at a temperature sufficient to form a cleave plane in the monocrystalline donor substrate. The average depth D1 and the average depth D2 are within about 1000 angstroms.
    Type: Application
    Filed: December 19, 2013
    Publication date: July 3, 2014
    Inventors: Jeffrey L. Libbert, Michael John Ries
  • Publication number: 20140183442
    Abstract: Engineered substrates having epitaxial templates for forming epitaxial semiconductor materials and associated systems and methods are disclosed herein. In several embodiments, for example, an engineered substrate can be manufactured by forming a first semiconductor material at a front surface of a donor substrate. The first semiconductor material is transferred to first handle substrate to define a first formation structure. A second formation structure is formed to further include a second semiconductor material homoepitaxial to the first formation structure. The method can further include transferring the first portion of the second formation structure to a second handle substrate such that a second portion of the second formation structure remains at the first handle substrate.
    Type: Application
    Filed: January 2, 2013
    Publication date: July 3, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Vladimir Odnoblyudov, Martin F. Schubert
  • Patent number: 8765576
    Abstract: A method of manufacturing a laminated substrate is provided. The method includes: forming an oxide film on at least a surface of a first substrate having a hardness of equal to or more than 150 GPa in Young's modulus, and then smoothing the oxide film; implanting hydrogen ions or rare gas ions, or mixed gas ions thereof from a surface of a second substrate to form an ion-implanted layer inside the substrate, laminating the first substrate and the second substrate through at least the oxide film, and then detaching the second substrate in the ion-implanted layer to form a laminated substrate; heat-treating the laminated substrate and diffusing outwardly the oxide film.
    Type: Grant
    Filed: August 28, 2009
    Date of Patent: July 1, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Shoji Akiyama, Atsuo Ito, Yoshihiro Kubota, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka
  • Patent number: 8765577
    Abstract: A method of forming a strained semiconductor material that in one embodiment includes forming a cleave layer in a host semiconductor substrate, and contacting a strain inducing material layer on a surface of a transfer portion of the host semiconductor substrate. A handle substrate is then contacted to an exposed surface of the stress inducing material layer. The transfer portion of the host semiconductor substrate may then be separated from the host semiconductor substrate along the cleave layer. A dielectric layer is formed directly on the transfer portion of the host semiconductor substrate. The handle substrate and the stress inducing material are then removed, wherein the transferred portion of the host semiconductor substrate provides a strained semiconductor layer that is in direct contact with a dielectric layer.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: July 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Stephen W. Bedell, Bahman Hekmatshoartabari, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 8765578
    Abstract: A method of edge protecting bonded semiconductor wafers. A second semiconductor wafer and a first semiconductor wafer are attached by a bonding layer/interface and the second semiconductor wafer undergoes a thinning process. As a part of the thinning process, a first protective layer is applied to the edges of the second and first semiconductor wafers. A third semiconductor wafer is attached to the second semiconductor wafer by a bonding layer/interface and the third semiconductor wafer undergoes a thinning process. As a part of the thinning process, a second protective layer is applied to the edges of the third semiconductor wafer and over the first protective layer. The first, second and third semiconductor wafers form a wafer stack. The wafer stack is diced into a plurality of 3D chips while maintaining the first and second protective layers.
    Type: Grant
    Filed: June 6, 2012
    Date of Patent: July 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Douglas C. La Tulipe, Jr., Spyridon Skordas, Tuan A. Vo, Kevin R. Winstel
  • Patent number: 8765563
    Abstract: Trench-confined selective epitaxial growth process in which epitaxial growth of a semiconductor device layer proceeds within the confines of a trench. In embodiments, a trench is fabricated to include a pristine, planar semiconductor seeding surface disposed at the bottom of the trench. Semiconductor regions around the seeding surface may be recessed relative to the seeding surface with Isolation dielectric disposed there on to surround the semiconductor seeding layer and form the trench. In embodiments to form the trench, a sacrificial hardmask fin may be covered in dielectric which is then planarized to expose the hardmask fin, which is then removed to expose the seeding surface. A semiconductor device layer is formed from the seeding surface through selective heteroepitaxy. In embodiments, non-planar devices are formed from the semiconductor device layer by recessing a top surface of the isolation dielectric.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: July 1, 2014
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Seung Hoon Sung, Niti Goel, Jack T. Kavalieros, Sansaptak Dasgupta, Van H. Le, Willy Rachmady, Marko Radosavljevic, Gilbert Dewey, Han Wui Then, Niloy Mukherjee, Matthew V. Metz, Robert S. Chau
  • Patent number: 8765535
    Abstract: In the method for manufacturing a semiconductor device of the invention, a bonding layer is formed over a substrate, an insulating film and a storage capacitor portion lower electrode are formed over the bonding layer, a single crystal silicon layer is formed over the insulating film, a storage capacitor portion insulating film is formed over the storage capacitor portion lower electrode, a wiring is formed over the storage capacitor portion insulating film, a channel forming region and a low concentration impurity region are formed over the single crystal silicon layer, and a gate insulating film and a gate electrode are formed over the single crystal silicon layer. The storage capacitor portion insulating film is formed by depositing a YSZ film with a single crystal silicon layer used as a base film, whereby the permittivity increases and thus the leakage current from the storage capacitor portion is suppressed.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: July 1, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Kengo Akimoto
  • Patent number: 8766316
    Abstract: Provided is a semiconductor device. The semiconductor device comprises a support substrate; a bonding layer on the support substrate; and a plurality of semiconductor layers on the bonding layer, wherein the bonding layer includes a first bonding layer between the support substrate and the plurality of semiconductor layers and a second bonding layer between the first bonding layer and the plurality of semiconductor layers, wherein an at least one of the first and second bonding layers includes a multi layers, wherein the first and second bonding layers include a same material from each other, wherein the first and second bonding layers includes a different material from the plurality of semiconductor layers.
    Type: Grant
    Filed: June 21, 2013
    Date of Patent: July 1, 2014
    Assignee: LG Innotek Co., Ltd.
    Inventor: June O Song
  • Patent number: 8765508
    Abstract: Methods of fabricating semiconductor devices or structures include bonding a layer of semiconductor material to another material at a temperature, and subsequently changing the temperature of the layer of semiconductor material. The another material may be selected to exhibit a coefficient of thermal expansion such that, as the temperature of the layer of semiconductor material is changed, a controlled and/or selected lattice parameter is imparted to or retained in the layer of semiconductor material. In some embodiments, the layer of semiconductor material may comprise a III-V type semiconductor material, such as, for example, indium gallium nitride. Novel intermediate structures are formed during such methods. Engineered substrates include a layer of semiconductor material having an average lattice parameter at room temperature proximate an average lattice parameter of the layer of semiconductor material previously attained at an elevated temperature.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: July 1, 2014
    Assignee: Soitec
    Inventor: Chantal Arena
  • Patent number: 8759126
    Abstract: An image display device comprises: a first substrate having flexure property; a first resin layer which is attached to the first substrate and over which thin film transistors are located; a barrier layer which comprises an inorganic film covering a surface of the resin layer; and a first thin film layer and a second thin film layer which are located so as to sandwich the first resin layer with the barrier layer disposed therebetween.
    Type: Grant
    Filed: April 22, 2011
    Date of Patent: June 24, 2014
    Assignees: Japan Display Inc., Panasonic Liquid Crystal Display Co., Ltd.
    Inventors: Takahide Kuranaga, Takashi Hattori, Naoya Okada, Mutsuko Hatano
  • Patent number: 8759196
    Abstract: A method for preparing a substrate for detaching a layer by irradiation of the substrate with a light flux for heating a buried region of the substrate and bringing about decomposition of the material of that region to detach the detachment layer. The method includes fabricating an intermediate substrate including a first buried layer, and a second covering layer that covers all or part of the first layer, with the covering layer being substantially transparent to the light flux and with the buried layer formed by implantation of particles into the substrate, followed by absorbing the flux, and selectively and adiabatically irradiating a treated region of the buried layer until at least partial decomposition of the material constituting it ensues.
    Type: Grant
    Filed: June 8, 2011
    Date of Patent: June 24, 2014
    Assignee: Soitec
    Inventor: Michel Bruel
  • Patent number: 8759195
    Abstract: An optical device layer (ODL) in an optical device wafer is transferred to a transfer substrate. The ODL is formed on the front side of an epitaxy substrate through a buffer layer. The ODL is partitioned by a plurality of crossing streets to define regions where a plurality of optical devices are formed. The transfer substrate is bonded to the front side of the ODL, and the epitaxy substrate is cut along crossing streets into a plurality of blocks. A laser beam is applied to the epitaxy substrate from the back side of the epitaxy substrate to the unit of the optical device wafer and the transfer substrate in the condition where the focal point of the laser beam is set in the buffer layer, thereby decomposing the buffer layer. The epitaxy substrate divided into the plurality of blocks is peeled off from the ODL.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: June 24, 2014
    Assignee: Disco Corporation
    Inventors: Hiroshi Morikazu, Yoko Nishino
  • Patent number: 8753957
    Abstract: This invention relates to a method for producing solar cells, and photovoltaic panels thereof. The method for producing solar panels comprises employing a number of semiconductor wafers and/or semiconductor sheets of films prefabricated to prepare them for back side metallization, which are placed and attached adjacent to each other and with their front side facing downwards onto the back side of the front glass, before subsequent processing that includes depositing at least one metal layer covering the entire front glass including the back side of the attached wafers/sheets of films. The metallic layer is then patterned/divided into electrically isolated contacts for each solar cell and into interconnections between adjacent solar cells.
    Type: Grant
    Filed: April 2, 2009
    Date of Patent: June 17, 2014
    Assignee: Rec Solar Pte. Ltd.
    Inventors: Martin Nese, Erik Sauar, Andreas Bentzen, Paul Alan Basore
  • Patent number: 8754424
    Abstract: Discontinuous bonds for semiconductor devices are disclosed herein. A device in accordance with a particular embodiment includes a first substrate and a second substrate, with at least one of the first substrate and the second substrate having a plurality of solid-state transducers. The second substrate can include a plurality of projections and a plurality of intermediate regions and can be bonded to the first substrate with a discontinuous bond. Individual solid-state transducers can be disposed at least partially within corresponding intermediate regions and the discontinuous bond can include bonding material bonding the individual solid-state transducers to blind ends of corresponding intermediate regions. Associated methods and systems of discontinuous bonds for semiconductor devices are disclosed herein.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: June 17, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Scott D. Schellhammer, Vladimir Odnoblyudov, Jeremy S. Frei
  • Patent number: 8753960
    Abstract: A semiconductor wafer including an electrostatic discharge (ESD) protective device, and methods for fabricating the same. In one aspect, the method includes forming a first semiconductor device in a first semiconductor die region on the semiconductor wafer; forming a second semiconductor device in a second semiconductor die region on the semiconductor wafer; and forming a protective device in a scribe line region between (i) the first semiconductor die region and (ii) the second semiconductor die region.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: June 17, 2014
    Assignee: Marvell International Ltd.
    Inventors: Chuan-Cheng Cheng, Choy Hing Li, Shuhua Yu
  • Patent number: 8753905
    Abstract: A method of manufacturing a display device, the method including forming a first layer on a rigid glass substrate, the first layer having a hydrophobic surface; forming a second layer to be bonded to a rigid thin glass substrate on the first layer to prepare a carrier substrate; bonding the rigid thin glass substrate onto the second layer; forming and encapsulating a display portion on an upper surface of the rigid thin glass substrate; and irradiating a laser beam to delaminate the first layer and detaching the rigid thin glass substrate from the rigid glass substrate.
    Type: Grant
    Filed: January 25, 2013
    Date of Patent: June 17, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dong-Min Lee, Chang-Mo Park, Mu-Gyeom Kim, Young-Sik Yoon
  • Patent number: RE45017
    Abstract: A porous Si layer is formed on a single-crystal Si substrate, and then a p+-type Si layer, p-type Si layer and n+-type Si layer which all make up a solar cell layer. After a protective film is made on the n+-type Si layer, the rear surface of the single-crystal Si substrate is bonded to a tool, and another tool is bonded to the front surface of the protective film. Theo, the tools are pulled in opposite directions to mechanically rupture the porous Si layer and to separate the solar cell layer from the single-crystal substrate. The solar cell layer is subsequently sandwiched between two plastic substrates to make a flexible thin-film solar cell.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: July 15, 2014
    Assignee: Sony Corporation
    Inventors: Takeshi Matsushita, Hiroshi Tayanaka