Abstract: A constraint analysis and reliability agent executes a method for analyzing operation of a manufacturing asset, and includes the steps of collecting operation data for a machine over a plurality of predetermined time periods. The operation data includes a plurality of mutually exclusive events that describe operation of the machine. For each of the predetermined time periods, it is determined whether the machine is in an “ON” or an “OFF” state. Data for the “OFF” states is removed from the collected data to generate a filtered data set. Reliability information is then generated based, at least in part, on the filtered data set. This facilitates predictions of future machine operation.

Abstract: A system and method for determining the early life reliability of an electronic component, including classifying the electronic component based on an initial determination of a number of fatal defects, and estimating a probability of latent defects present in the electronic component based on that classification with the aim of optimizing test costs and product quality.

Abstract: A method, a system and a computer program product for evaluating an actual structural element of an electrical circuit. The method includes: detecting an actual structural element contour by processing a scanning electron microscope image of the actual structural element; aligning the actual structural element contour with a simulated contour to provide an aligned actual structural element contour; wherein the simulated contour is obtained by simulating a lithographic process that is responsive to a design contour; and comparing between the aligned actual structural element contour and reference information.

Abstract: A method of forming photo masks having rectangular patterns and a method for forming a semiconductor structure using the photo masks is provided. The method for forming the photo masks includes determining a minimum spacing and identifying vertical conductive feature patterns having a spacing less than the minimum spacing value. The method further includes determining a first direction to expand and a second direction to shrink, and checking against design rules to see if the design rules are violated for each of the vertical conductive feature patterns identified. If designed rules are not violated, the identified vertical conductive feature pattern is replaced with a revised vertical conductive feature pattern having a rectangular shape. The photo masks are then formed. The semiconductor structure can be formed using the photo masks.

Abstract: A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.

Abstract: Presented are methods and apparatus for controlling the processing of a substrate during a process step that is sensitive to one or more process conditions. One embodiment includes a method performed with corresponding apparatus that includes a controller. One step includes constructing a perturbation model relating changes in control parameters for the apparatus to one or more resulting changes in the process. The method also includes the step of using the perturbation model with at least one of a performance objective and a constraint to derive optimized control parameters for the controller. Another step in the method includes operating the controller with the optimized control parameters. Another embodiment includes an apparatus for processing substrates where the apparatus comprises optimized control parameters.

Abstract: A system for reviewing defects includes an analysis module configured to analyze defect information of a plurality of intermediate products, the defect information including information of an amount of defects classified by sizes of the defects existing in each of the intermediate products; a failure magnitude calculation module configured to calculate a systematic failure magnitude of the intermediate products caused by fabrication procedure of the intermediate products; a classification module configured to classify a calculated result of the systematic failure magnitude; and a review target selection module configured to select intermediate products becoming review targets.

Abstract: Method and system for controlling and monitoring the quality of concrete based on the concrete's maturity. Various embodiments of the present invention are discussed. First, Enhanced Maturity involves a maturity calibration method to account for the water-to-cementitious-materials ratio, air content, and gross unit weight of the concrete. Second, Moisture-Loss Maturity is a method for determining the appropriate time to terminate moisture-loss protection of concrete and concrete structures. Third, Improved Maturity is a method and system for determining the strength of curing concrete using improved maturity calculations. Fourth, SPC Maturity is a method that beneficially couples maturity measurements and calculations with Statistical Process Control (SPC) methods to enable rapid recognition of changes to the concrete mix and/or incompatibilities between the various components of the concrete mix.

Abstract: A system for monitoring and controlling a batch process. The system includes a control system that is operable to control the batch process and to receive measured process variables of the batch process. An analyzer analyzes a material sample from the batch process and generates array data representative of the composition of the material sample. An analyzer controller is operable to collect the array data from the analyzer and the measured process variables from the control system. A software data server running on a computer is operable to retrieve the array data and the measured process variables from the analyzer controller. A software information management system running on the computer is operable to receive the measured process variables and the array data from the data server and to store the measured process variables and the array data in a database in an associated manner.

Abstract: Content is generated on a host system based on real-time data from a controlled process collected over an internet from a customer's client machine tool control system. The real-time data is captured from the client machine tool by downloading software that manipulates controller functionality to perform a data capture trace predefined events and triggers. The captured data is retrieved by the host, which may generate content based on the data, or provide selective, authorized access to the data by others.

Abstract: Methods of integrating computer products with pharmaceutical manufacturing hardware systems are described and disclosed herein. Consequently, the methods provide a means to perform validation and quality control on an integrated level whereby a pharmaceutical manufacturer can ensure data and product integrity and minimize cost.

Abstract: A method includes acquiring metrology data associated with a process. Bias information associated with the process is determined. The metrology data is adjusted based on the bias information to generate bias-adjusted metrology data. The bias-adjusted metrology data is filtered to identify and reject outlier data. The process is controlled based on the metrology data remaining after the rejection of the outlier data.

Abstract: A system for managing production of semiconductors that can improve or maximize productivity. In an embodiment, the system comprises: a host computer for outputting control signals to control semiconductor production processes; semiconductor production apparatuses each of which performs a corresponding semiconductor production process using the control signals output from the host computer; a conveyor for conveying a wafer carrier; and a conveyor monitoring apparatus for monitoring the conveyance of the wafer carrier, determining if the conveyor is delayed for more than the predetermined time, and displaying an error status to a remote operator.

Abstract: It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11, by providing a means 21 for detecting aggregation of clustered point defects (LPD) from two-dimensional distribution information 30 for such fine LPD on the surface of a silicon wafer, and an improvement in the inspection efficiency and the precision of judgements of “defective” status can be achieved. Furthermore, the system is devised so that the trend of generation of scratches and staining in a specified process can easily be detected by accumulating wafer surface information such as scratch information, staining information and the like for the wafer surface detected by a wafer surface inspection device 11 (especially as image information or numerical information), and superposing sets of information thus accumulated. Plans for improving processes can be made by both the wafer supplier and wafer consumer by sharing such information with both parties.

Abstract: The disclosed system and method automate the decision making abilities of quality assurance (QA) management tools. The proposed invention manages the decision making processes during runtime of the testing tools of any given QA system and provides a solution for automating this process. According to some embodiments the present invention is a decision management platform which controls the activity and the flows of operation of the QA tools. The decision management platform is a decision driven mechanism which analyzes the decision making process performed by the operators of the QA system and automatically provides a decision whenever similar conditions occur. According to preferred embodiments the solution serves both the automatic testing tools and the knowledge management tools. This solution significantly reduces maintenance over testing scenarios and allows a more effective usage of given resources in QA workflow.

Abstract: A parts-combining method having high quality or yield for a product having a large number of parts. First entering an identification number group of nondefective completed products, a table of a product identification number group and a parts identification number group, a characteristic data group of parts A with respect to identification numbers of the parts A and a characteristic data group of parts B with respect to identification numbers of the parts B, and calculating a nondefective product space. Before a new product is manufactured, entering a characteristic data group of parts A with respect to identification numbers of the parts A and a characteristic data group of parts B with respect to identification numbers of the parts B, and conducting calculations on statistical distances and combinatorial computations between the parts. Finally outputting a combination table having the identification numbers of both the parts A and the parts B.

Abstract: A manufacturing test and programming system (100) is presented including providing a PCB tester (108), providing an in-system programmer (102) electrically attached to the PCB tester (108), mounting a device under test (114) having a programmable device (116) attached thereon and programming the programmable device (116) with the in-system programmer (102).

Abstract: A method is disclosed for collecting and processing raw process data. The method includes processing the raw data through a process model to obtain a prediction of the process quality; processing this prediction through two dynamic transfer functions thus creating two intermediate signals; storing the two intermediate signals as a function of time; retrieving at the time of a real and validated measurement of the process quality from the history the absolute minimum value and maximum value of the two intermediate signals in the time period corresponding to a minimum and maximum specified deadtime, in which the absolute minimum value and maximum values define the minimum and maximum prediction possible; calculating the deviation as being the difference between the real and validated measurement and the uncertainty area encompassed between the minimum and maximum prediction possible; incorporating the deviation into the process model to calibrate the process model; and, repeating.

Abstract: The present invention is a method of optimizing a process recipe of a substrate processing system including: a substrate processing apparatus that performs a film deposition process of a substrate to be processed according to a process recipe; a data processing unit that executes a calculation for optimizing the process recipe; and a host computer; the substrate processing apparatus, the data processing unit, and the host computer being connected to each other through a network.

Abstract: A method and system for monitoring a process in a process plant includes collecting data from a process control system within the process plant, where the data is representative of a normal operation of the process when the process is on-line and operating normally, performing a multivariate statistical analysis to represent the normal operation of the process based on a set of collected on-line process data comprising a measure of the normal operation of the process when the process is on-line and operating normally, and representing a real-time on-line operation of the process using monitored on-line process data comprising a measure of a real-time operation of the process when the process is on-line as an input to the representation of the normal operation of the process.

Abstract: A method and system of monitoring multivariate process data in a process plant, where the multivariate process data comprises a plurality of process variables each having a plurality of observations, includes defining each process variable as a process variable vector comprising a set of observation components, where the set of observation components comprises time dependent process data corresponding to the observations of the process variable, calculation, a multivariable transformation as a function of a plurality of process variable vector transformation each corresponding to one of the process variables, where each process variable vector transformation is a function of a univariate variable unifying the process variables, and representing the operation of the process based on the multivariable transformation, where the representation of the operation of the process designates a multivariate projection of the process data by the univariate variable for each of the process variables.

Abstract: A method, system and medium are provided for enabling improved feedback and feedforward control. An error, or deviation from target result, is observed during manufacture of semi conductor chips. The error within standard deviation is caused by two components: a white noise component and a signal component (such as systematic errors). The white noise component is random noise and therefore is relatively non-controllable. The systematic error, in contrast, may be controlled by changing the control parameters. A ratio between the two components is calculated autoregressively. Based on the ratio and using the observed or measured error, the actual value of the error caused by the signal component is calculated utilizing an autoregressive stochastic sequence. The actual value of the error is then used in determining when and how to change the control parameters.

Abstract: A method for digital video gauging parts comprising obtaining image data of a part to be gauged, identifying at least one of a plurality of features of the image data for inspection, calculating at least one of a plurality of metrics of said at least one of a plurality of features, creating at least one of a plurality of dimension lines and at least one of a plurality of extension lines corresponding to said at least one of a plurality of features, and displaying on a viewing device in mechanical drawing format said at least one of a plurality of dimension lines, said at least one of a plurality of extension lines, and text of said at least one of a plurality of metrics corresponding to said at least one of a plurality of features in combination with said image data.

Abstract: Method, system and program product are disclosed for determining productivity for a tool including a plurality of processing modules. The invention provides an understanding of a relationship between measured variables and overall tool speed by calculating computational components for any empty module, any module speed diversity and any idle tool event, i.e., the potential productivity detractors for the tool. An overall productivity based on each of the computational components may also be determined.

Abstract: A system for manufacturing an electronic device having a processing unit which includes a timer that processes a plurality of lots each having a plurality of work pieces and measuring in units of lots a processing time of the work pieces constituting the respective lots, an environmental information measurement module that measures environmental information corresponding to the processing time of the work pieces measured in units of lots, and a communication module for transmission and reception, and a work information management unit having a storage module which is provided to correspond to each lot, communicates with the communication module of the processing unit, and receives and stores the processing time and the environmental information of the work pieces of the lot.

Abstract: There is provided an information processing apparatus that allows a user to understand what kinds of causes are accumulated stepwise in what kind of order to cause abnormality and due to what kinds of reasons respective causes occur from direct causes of the respective causes.

Abstract: A method includes providing a process controller for controlling a process tool. The process tool is controlled in accordance with a process parameter. Measurements associated with the processing parameter for a plurality of runs of the process tool are accessed. A performance measure for the process controller is generated based on the process parameter and the measurements. A system includes a process tool, a process controller, and a performance monitor. The process controller is configured to control the process tool in accordance with a process parameter. The performance monitor is configured to retrieve measurements associated with the processing parameter for a plurality of runs of the process tool and generate a performance measure for the process controller based on the measured processing parameters.

Abstract: A method for augmenting quality or reliability of semiconductor units, including providing few populations of semiconductor units that are subject to quality or reliability testing. The populations include few quality or reliability fail candidate populations and other population(s). The method includes the step of associating test flows to the populations. Each test flow includes stress testing sequence. The stress testing sequence for the quality or reliability fail candidate population includes a stress test of increased duration compared to duration of a stress test in the test flow of the other population. The stress test sequence for the other population includes a stress test of increased voltage compared to corresponding operating voltage specification for a semiconductor unit. The method further includes the step of applying, within a sort testing stage, the corresponding test flow to the populations and identifying any unit which failed the stress sequence.

Abstract: The present invention provides a method and apparatus for determining a root cause of a fault. The method includes detecting at least one fault associated with at least one first wafer processed according to a first processing context and processing at least one second wafer according to at least one second processing context. The second processing context is different than the first processing context. The method also includes determining a root cause associated with the fault based on the first processed wafer and the second processed wafer.

Abstract: A tool with one or more chambers in a manufacturing system is identified as performing at or below an acceptable level by the following steps. Store process data from tools for each one of a plurality of individual processes for a processed object in a process database. Store tool performance data for each individual process for a processed object in a yield database. Develop statistics for similar tool sets associating data with each of the similar tool units. Generate yield numbers for each group of the similar tool units based upon the statistics. Identify poorly/well performing tool units by using the yield numbers.

Abstract: Where substrates with components are produced through a series of production processes and inspected after each of these production processes, a method is provided for setting an optimum reference value for making judgments in these inspections such that the frequency of occurrence of disagreement between inspection results after an intermediate process and after the final results will come to within a specified range. After an initial value is assigned for a reference value, this value is sequentially varied while repeating specified processes of saving measured and judgment data on inspected portions of components in a memory and setting a reference value by using the data saved in the memory until a specified condition becomes satisfied.

Abstract: A device and technique for monitoring the quality of a manufacturing process, a resulting part or both includes determining a cumulative deviation of an actual process signature from an expected signature. A disclosed example includes determining a quantitative value of a difference between the signatures at each of a plurality of corresponding segments of the signatures. A cumulative deviation based upon deviations of the corresponding segments provides an indication of quality. A disclosed example includes determining a negative cumulative deviation, a positive cumulative deviation and a total cumulative deviation, each of which may be used independently for analysis purposes.

Abstract: A tool with one or more chambers in a manufacturing system is identified as performing at or below an acceptable level by the following steps: Store process data from tools for each one of a plurality of individual processes for a processed object in a process database; Store tool performance data for each individual process for a processed object in a yield database; Develop statistics for similar tool sets associating data with each of the similar tool units; Generate yield numbers for each group of the similar tool units based upon the statistics; and identify poorly/well performing tool units by using the yield numbers.

Abstract: A method of measuring a damaged structure formed on a semiconductor wafer using optical metrology, the method includes obtaining a measured diffraction signal from a damaged periodic structure. A hypothetical profile of the damaged periodic structure is defined. The hypothetical profile having an undamaged portion, which corresponds to an undamaged area of a first material in the damaged periodic structure, and a damaged portion, which corresponds to a damaged area of the first material in the damaged periodic structure. The undamaged portion and the damaged portion have different properties associated with them. A simulated diffraction signal is calculated for the hypothetical damaged periodic structure using the hypothetical profile. The measured diffraction signal is compared to the simulated diffraction signal.

Abstract: Various items of data collected at different process steps are associated on production sites where traceability is hard to conduct. A quality control apparatus controls a manufacturing process in order to manufacture products of predetermined quality, including a data storing part which collects measurement data measured by multiple devices disposed in a manufacturing process and stores the collected measurement data along with measured time or collected time; and a scheduler which associates the measurement data of the devices with each other in consideration of dead time generated between the devices at measured time or collected time.

Abstract: A disposition process involves a part proceeding through a sequence of fabrication steps. The process involves obtaining a specified parameter for the part at an individual fabrication step; measuring the specified parameter of the part at the individual fabrication step; obtaining a final specified parameter for the part upon completion of the sequence of fabrication steps; and disposing the part at the individual fabrication step. Disposing the part uses a calculation of probability of the part meeting the final specified parameter.

Abstract: Methods of analyzing equivalency with respect to split and limited release lots of wafers of integrated circuits. One embodiment of the split-lot method includes: (1) dividing a set of data regarding the split lot into control and experimental subsets, (2) summarizing statistics regarding the set and the subsets to an experimental unit above a site level and (3) performing a two-way analysis of variance with respect to the statistics to determine the equivalency, using the set for one way of the analysis of variance and the subsets for another way of the analysis of variance.

Abstract: A system for empirically diagnosing a condition of a monitored system. Estimates of monitored parameters from a model of the system provide residual values that can be analyzed for failure mode signature recognition. Residual values can also be tested for alert (non-zero) conditions, and patterns of alerts thus generated are analyzed for failure mode signature patterns. The system employs a similarity operator for signature recognition and also for parameter estimation. Failure modes are empirically determined, and precursor data is automatically analyzed to determine differentiable signatures for failure modes.

Abstract: A computer system implements a process for gathering, synthesizing, and analyzing failure and other data relating to a pump, seal or other equipment. Data indicating the current state of the equipment may be gathered and verified prior to a failure occurring so that accurate information is available. After a failure or problem occurs, data about the system and the problem or failure can be methodically gathered to aid in the determination of the root cause of the failure. The data may be synthesized and an analysis performed to determine the cause or causes of the failure or problem. The system may suggest corrective actions and plans for implementing corrective action. Installation instructions, training and safety information can be provided to the user to ensure proper execution of the selected corrective action. A plant reliability manager also may monitor the progress and verify that installation, maintenance and failure correction are performed correctly.

Abstract: Content is generated on a host system based on real-time data from a controlled process collected over the internet from a customer's client automation system, such as a machine tool control system. The client system may request content from a host website. Instructions associated with the requested content, which may be in the form of software to be run on the client, is delivered to the client via download over the internet. The client, executing the software, captures real-time data associated with a controlled process and transmits it to the host, where content based on the data can be generated for the client and/or its owner. Data gathered by the host, and content generated on the basis of the data, may be made accessible to machine tool manufacturers. Also, data received by the host is associated with an identifier defined for each client system. A historical database for given client equipment can thereby be created.

Abstract: A number of methods to support process quality and maintenance during control of an industrial process such as welding are provided. The methods provide, among other things: automatic process limit programming based on runtime data; user-initiated process limit programming based on upcoming data; correlate equipment deterioration based on capability measurement; correlate tip dressers/formers to new; detect electrical deterioration; integrate process data with programmed data for a visual aid; and quantify process variation in welding tools (pareto of stddev of the c-factor).

Abstract: Method for the automatic control of the amount of active ingredient of tablets during the production in a rotary tablet press, which has a die table with die bores, upper and lower punches assigned to the die bores, a filling station, a metering cam for the lower punches in the filling station, at least one pressing station with at least one upper and one lower pressing roller, wherein at least the lower pressing roller is adjustable with respect to the other pressing roller by means of a pressing roller adjustment equipment, a metering cam adjustment equipment for height adjustment of the metering cam, a compression force measuring equipment at the pressing station, a control- and operating computer and an active ingredient measuring equipment, characterised by the following procedural steps: during the tablet production, the amount of active ingredient of tablets is measured and values for the amount of active ingredient are compared with a predetermined desired active ingredient value in the control- an

Abstract: A method is provided for predicting a quality characteristic of a product to be manufactured. The method may integrate one or more of feature and tolerance information associated with the product, manufacturing characteristic information associated with the manufacture of the product, measurement capability characteristic information associated with the manufacture of the product, assembly characteristic information associated with an assembly of the product, and desired quality characteristic information associated with the product. Based on the integrated information, the quality characteristic of the product may be predicted.

Abstract: An aligner evaluation system includes (a) an error calculation module configured to calculate error information on mutual optical system errors among a plurality of aligners; (b) a simulation module configured to simulate device patterns to be delineated by each of the aligners based on the error information; and (c) a evaluation module configured to evaluate whether each of the aligners has appropriate performances for implementing an organization of a product development machine group based on the simulated device pattern.

Abstract: Methods, computer-readable media, and systems for automatically performing Human Factors Process Failure Modes and Effects Analysis for a process are provided. At least one task involved in a process is identified, where the task includes at least one human activity. The human activity is described using at least one verb. A human error potentially resulting from the human activity is automatically identified, the human error is related to the verb used in describing the task. A likelihood of occurrence, detection, and correction of the human error is identified. The severity of the effect of the human error is identified. The likelihood of occurrence, and the severity of the risk of potential harm is identified. The risk of potential harm is compared with a risk threshold to identify the appropriateness of corrective measures.

Abstract: A method of inspecting a workpiece during a production run in which workpieces are supplied to workstations by an autoloader. In accordance with the method, the supply of the workpieces by the autoloader is performed in accordance with a supply control routine. When it is desired to inspect a workpiece in a workstation, the supply control routine is interrupted after its then current cycle and the autoloader is used to move the workpiece to a quality control station. The supply of the workpieces in accordance with the supply control routine is then resumed. While the autoloader is operating in accordance with the supply control routine, the workpiece is inspected. If the workpiece is acceptable, the supply control routine is again interrupted after its then current cycle and the autoloader is used to move the workpiece to an output area. The supply of the workpieces in accordance with the supply control routine is then resumed again.

Abstract: Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generator to generate setup information according to the unpatterned wafer measurement. The system then provides the setup information to a process measurement system for use in measuring production wafers in a semiconductor manufacturing process.

Abstract: The present invention provides a method and apparatus for multivariate fault identification and classification. The method includes accessing data indicative of a plurality of physical parameters associated with a plurality of processed semiconductor wafers and providing at least one summary report including information indicative of at least one univariate representation of the accessed data and at least one multivariate representation of the accessed data.

Abstract: A process for curing a natural or synthetic rubber compound under a plurality of curing conditions by: (1) obtaining time dependent data streams of dielectric or impedance values from a non-bridged impedance sensing circuit and a capacitor having the rubber compound being cured as a dialectric; (2) determining impedance related measurements from the obtained data streams; (3) determining a predictive curing equation by performing a multiple regression between: (a) reheometric data obtained from a plurality of different rubber compound samples cured in a rheometer at various environmental curing conditions, and (b) corresponding samples cured in a production mold at the same environmental conditions; (4) adjusting the curing equation to obtain cured parts having one or more desired properties; and (5) controlling the mass producing cured parts with a controller that uses the curing equation for predicting a cure time for each part, wherein the predictions are effective over variations in the rubber compound, a

Abstract: Architecture that facilitates management of a semiconductor and/or microelectronics manufacturing process. A manufacturing component in communication with the semiconductor and/or microelectronics process operates according to process conditions to output a product, which manufacturing component at least one of monitors and controls the process using modularized code. A rules engine component processes one or more rules in association with the modularized code to control the process conditions in realtime by balancing process efficiency criteria to arrive at an optimal result.