Abstract: An auditing system is disclosed comprising a Policy Validation Mechanism Program (PVMP) that operates in conjunction with a Workflow Engine (WE), and a Policy Validation Server Program (PVSP) that operates on a Policy Validation Server (PVS) connected to the WE by a secure communication link. The PVMP converts a workflow to a workflow representation (WR) and sends the WR to the PVS. The PVSP compares the steps in the WR to a security policy identified for that WR and determines whether the WR is in compliance. In addition, the PVSP validates a checksum for the WR and logs the checksum for subsequent comparisons. The PVSP uses the checksum to determine whether a policy has changed during execution of the workflow. If the WR is not in compliance, if the checksum cannot be validated, or if a policy has changed, then a failure notification is sent to the WE. Otherwise, a success notification is sent to the WR.

Abstract: In polishing a substrate having a layer of GST disposed over an underlying layer, during polishing, a non-polarized light beam is directed onto the layer of GST. The non-polarized light beam reflects from the first substrate to generate a reflected light beam having an infra-red component. A sequence of measurements of intensity of the infra-red component of the reflected light beam are generated, and, in a processor, a time at which the sequence of measurements exhibits a predefined feature is determined.

Abstract: A system and method for monitoring product through a batch manufacturing plant is provided. The system includes, a parallel flow mode when product flows concurrently from at least two units to a single unit; and a serial flow mode where product flows from one unit to another at a given time, wherein the batch manufacturing plant is modeled based on the parallel and serial flow modes. A lot association is built based on product flow and a parent/child record is created for lot association. The system also includes a data collection system that collects phase information for every unit and a procedure identifier is used to create a batch identifier, where a batch identifier is associated with each lot on each unit through which product is flowing to and/or from at a given time.

Abstract: A method for advanced condition monitoring of an asset system includes using a plurality of auto-associative neural networks to determine estimates of actual values sensed by at least one sensor in at least one of the plurality of operating regimes; determining a residual between the estimated sensed values and the actual values sensed by the at least one sensor from each of the plurality of auto-associative neural networks; and combining the residuals by using a fuzzy supervisory model blender; performing a fault diagnostic on the combined residuals; and determining a change of the operation of the asset system by analysis of the combined residuals. An alert is provided if necessary. A smart sensor system includes an on-board processing unit for performing the method of the invention.

Abstract: A method for vibration damping and shape control of a suspended metal strip during continuous transport in a processing facility in a steel rolling line or surface treating line in a steel mill, where the method comprises the steps: measuring distance to the strip by a plurality of non-contact sensors; and generating a strip profile from distance measurements; decomposing the strip profile to a combination of mode shapes; determining coefficients for the contribution from each mode shape to the total strip profile; and controlling the strip profile by a plurality of non-contact actuators based on a combination of mode shapes.

Abstract: System(s) and method(s) are provided to enable phased acceptance of a product as part of an acquisition contract. Phased acceptance establishes a set of one or more phases of product acceptance, each directed to grant approval of a set of specific aspects of the product based at least in part on one of quality of operation or functional performance. Operational and functional performance metrics that determine acceptance thresholds in each acceptance phase are negotiated between a vendor and a client. To protect investment, phased acceptance can include remedies as part of each phase of acceptance based at least on one of product operational or functional failures, or unavailable features vendor committed to during negotiation of performance metrics; the remedies include at least one corrective measures or liquidated damages. A Final acceptance phase is the last approval from client to vendor, and can be employed to close out the acquisition contract.

Abstract: The present invention is a method of optimizing a process recipe of a substrate processing system including: a substrate processing apparatus that performs a film deposition process of a substrate to be processed according to a process recipe; a data processing unit that executes a calculation for optimizing the process recipe; and a host computer; the substrate processing apparatus, the data processing unit, and the host computer being connected to each other through a network.

Abstract: A method includes acquiring metrology data associated with a process. Bias information associated with the process is determined. The metrology data is adjusted based on the bias information to generate bias-adjusted metrology data. The bias-adjusted metrology data is filtered to identify and reject outlier data. The process is controlled based on the metrology data remaining after the rejection of the outlier data.

Abstract: The present invention quickly resolves troubles in an analyzer and performs effective external quality control management. An analyzer (2) and a control device (1) are connected by a network (3). Error data and sample data taken from assay of a quality control substance are transmitted from the control device (1) to the analyzer (2). The analyzer (2) is made to be remotely operable from the control device (1) and when troubles arise repair from the control device (1) is possible. The control device (1) tallies sample data, and provides the tally results to a Web page. The analyzer (2) accesses the Web page using a WWW browser, and can perform external quality control in real time.

Abstract: A system and method for monitoring a semiconductor manufacturing process is disclosed. The system communicates with one or more process tools, and monitors each tool during a predetermined process window time. Errors and warnings are provided to users, allowing corrective action to be taken. Additionally, the system of the present invention can initiate automatic adjustment of the process tools to maintain an efficient manufacturing operation.

Abstract: Certain embodiments disclosed herein relate to compositions, methods, devices, systems, and products regarding frozen particles. In certain embodiments, the frozen particles include materials at low temperatures. In certain embodiments, the frozen particles provide vehicles for delivery of particular agents. In certain embodiments, the frozen particles are administered to at least one biological tissue.

Abstract: A system and method that enables a laboratory to integrate its internal and external quality control programs to thereby control the quality of its laboratory testing services. The system has a storage device and a processor operable to maintain in the storage device a database identifying a plurality of laboratory tests and the corresponding internal laboratory statistical data, group statistical summary data and control rules. The processor is also operable to calculate a control range for a specified laboratory test by applying the group statistical summary data (and, in some cases, the internal laboratory statistical data) to the control rule corresponding to the specified laboratory test. Preferably, the processor is also operable to receive a test result from a laboratory instrument, and determine whether the test result falls within the calculated control range for the specified laboratory test. Various exemplary embodiments of the system and associated method are provided.

Abstract: A computer-based method for controlling product quality is disclosed. The method includes the steps of: detecting whether a quality of raw materials bought from at least one supplier are acceptable; detecting whether a quality of using materials used at a processing procedure are acceptable; detecting whether a quality of products being manufactured at the processing procedure are acceptable; receiving and storing a post-procedure report obtained by sampling the products after the processing procedure; repeating steps of detecting materials used at a processing procedure, detecting products being manufactured at the processing procedure, detecting the sampling products after the processing procedure, and completing the manufacturing if all the products are finished. A related system is also disclosed.

Abstract: An exposure apparatus is equipped with a main controller that decides an operation of the exposure apparatus based on information on maintenance from a C/D. Therefore, the main controller can decide to perform a specific operation, which is necessary for maintaining performance of the exposure apparatus and requires stop of the primary operation of the exposure apparatus, during maintenance of the C/D, that is, when the primary operation of the exposure apparatus has to be stopped by necessity, in parallel with the maintenance of the C/D. As a consequence, downtime of the exposure apparatus necessary for performing the specific operation can be decreased as a whole, which makes it possible to improve the operating rate without lowering apparatus performance of the exposure apparatus that is inline connected to a substrate processing apparatus.

Abstract: A position detecting system and method for an electronic device used an audio signal input module of the electronic device and a signal receiver to connect to the audio signal input module convert an external position signal into an audio signal. A position detecting software running on the electronic device analyzes the audio signal. Accordingly, the current position of the electronic device is obtained. The audio signal input module of the electronic device is employed as an input port for the external position signal, thus saving the construction cost of the system. Besides, the current position of the electronic device with an ever-changing position can be obtained during a test process, such that the electronic device can start or stop a test item accordingly.

Abstract: For monitoring production data, a grouping table in which machines are grouped into machine groups, machine components are grouped into machine component groups, chip manufacturing recipes are grouped into recipe groups or chip manufacturing parameters are grouped into parameter groups is used, whereby a considerable improvement in the comparability of the production data to be monitored is achieved.

Abstract: A computer-implemented method for managing substrate processing data. Substrate process data is acquired while a substrate is processed in a plasma-processing chamber of a cluster tool. The method includes receiving meta-data that identifies at least one of an identification of the substrate and a process. The method further includes receiving from transducers process data streams, each of the process data streams pertaining to a process parameter being monitored. Individual data items in each of the process data streams are being collected in accordance to one of a first methodology and a second methodology. The first methodology represents data collection that is periodic in time. The second methodology represents data collection that happens when predefined events occur. The method also includes storing individual data items associated with process data streams in a single file. The single file stores only data pertaining to a single recipe used to process the substrate.

Abstract: Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.

Abstract: A computer-based measurement monitoring system and method for monitoring multi-stage processes capable of producing multi-orderable data and identifying, at any stage in the monitored process, unacceptable deviations from an expected value at particular stages of the process, and communicating same detected deviation to facilitate corrective action in the process. The system and method consolidate data obtained at various stages of the process, arrange the measurement data in a multi-orderable data framework, compare the multi-orderable framework data with expected parameter values corresponding to the various stages, and detects unacceptable deviations from the expected values. The unacceptable deviations are communicated to responsible personnel, and the system and method provides same personnel with supplemental information useful in diagnosing the root cause of the problem leading to the detected deviations.

Abstract: A method and system are presented for use in controlling the processing of a structure. First measured data is provided being indicative of at least one of the following: a thickness (d2) of at least one layer (L2) of the structure W in at least selected sites of the structure prior to the processing of the structure, and a surface profile of the structure prior to said processing. An optical measurement is applied to at least the selected sites of the structure after said processing and second measured data is generated being indicative of at least one of the following: a thickness of the processed structure (d?) and a surface profile of the processed structure, The second measured data is analyzed by interpreting it using the first measured data to thereby determine a thickness (d?1 or d?2) of at least one layer of the processed structure. This determined thickness is thus indicative of the quality of said processing.

Abstract: Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.

Abstract: In a method for detecting abnormal characteristic values of a plurality of products sequentially manufactured in the same manufacturing line, it is determined whether or not a successive-decrease (or increase) tendency has occurred in a plurality of sequentially-obtained characteristic values of the products. Also, it is determined whether or not at least a last one of the characteristic values is located within a control region narrower than an allowable region and outside a normal region narrower than the control region. Further, when the successive-decrease or increase tendency has occurred and the last characteristic value is located within the control region outside the normal region, an alarm state is detected.

Abstract: Graphical User Interfaces (GUIs) are presented for configuring and setting-up dynamic sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.

Abstract: A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.

Abstract: When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.

Abstract: A server, a system and a method for automatic virtual metrology (AVM) are disclosed. The AVM system comprises a model-creation server and a plurality of AVM servers. The model-creation server is used to construct the first set of virtual metrology (VM) models (of a certain equipment type) including a VM conjecture model, a RI (Reliance Index) model, a GSI (Global Similarity Index) model, a DQIx (Process Data Quality Index) model, and a DQIy (Metrology Data Quality Index) model. In the AVM method, the model-creation server also can fan out or port the first set of VM models generated to other AVM servers of the same process apparatus (equipment) type, and each individual fan-out-acceptor's AVM server can perform automatic model refreshing processes so as to gain and maintain its VM models' accuracy.

Abstract: An apparatus, system, and method are disclosed for dynamically adjusting performance monitoring of storage area network (“SAN”) components. An initial violation module is included to determine that a threshold violation associated with a SAN component is an initial threshold violation. A violation entry module is included to record a component violation entry in response to the initial threshold violation. An entry adjustment module is included to adjust a component violation entry associated with a SAN component in response to a threshold violation related to the SAN component. An analysis module is included to analyze the component violation entry based on analysis criteria. A suspicion adjustment module is included to adjust a suspicion variable associated with the SAN component in response to results of the analysis of the component violation entry.

Abstract: In inspecting for quality of underfill material dispensed in an IC package, a camera image is captured for the IC package having the underfill material dispensed between an IC die and a package substrate. A data processor analyzes the camera image to determine an occurrence of an unacceptable condition of the underfill material. Pre-heating and/or post-heating of the package substrate before and/or after dispensing the underfill material by a contact-less heater ensures uniform spreading of the underfill material.

Abstract: An apparatus and method for collecting and analyzing the effluent stream created by a chemical mechanical planarization (CMP) process performs a continuous measurement of at least one effluent characteristic and integrates the results over time to create a volumetric analysis of the planarization process. The volumetric analysis can be used as feedback/feedforward signals to control the planarization process itself (e.g., endpoint detection based upon an known initial thickness of film material), create alarm signals for out-of-range measurements, and/or waste stream indicators useful in treating the effluent prior to discharge (e.g., determining a pH correction).

Abstract: Automating the process for providing a radiation filter is based on different software programs executed by a computer system. The software programs include customer interface software, tool path generation software and manufacture scheduling software. Each software program performs a specific function for automating the process. The manufacture scheduling software determines available tooling machines to manufacture the radiation filter based on the generated tool path from a plurality of tooling machines, and selects one of the available tooling machines based on availability for manufacture of the radiation filter. The manufactured radiation filter is shipped, and the customer is then invoiced for the order.

Abstract: A method and system for controlling machining processes are provided. The system includes a computer system communicatively coupled to a database. The computer system is configured to receive data relating to manufactured part processes, identify at least one machining process used to manufacture a part and a parameter of the at least one machining process, receive survey data relating to the manufacturing process parameters used during the at least one machining process, and receive identification data for the manufactured part. The computer is further configured to receive data relating to a design of experiment (DOE), determine an low cycle fatigue (LCF) life distribution, identify process parameters that affect the LCF, and determine an allowable range for each identified process parameters for safe operation. The computer system is further configured to output the process window embodied in a specification associated with at least one of the part and the process.

Abstract: A computing system is communicated with a metal fabrication device for analyzing performance of an industrial robot. The metal fabrication device includes the industrial robot, and a plate bender. The computing system is operable to generate an analysis report of the performance of the industrial robot by providing section model creating function, bending point obtainting function, bending operation monitoring function, workpiece modeling function for the metal fabrication device. The quality of a finished workpiece bent by the industrial robot from a metal plate may be analyzed from the analysis report generated by the computing system.

Abstract: A method of controlling a result parameter of an IC manufacturing procedure is described. The value of at least one first variable of a process correlated with the result parameter is acquired, and the difference between the predicted value and the target value of the result parameter is calculated from the same using a correlation equation of the first variable and the result parameter. A correcting action is then performed to a subsequent process including at least one second variable correlated with the result parameter, which is based on a correlation equation of the second variable and the result parameter to control the subsequent process and adjust the second variable such that the difference is reduced due to the affect of the second variable to the result parameter. The at least one first variable and the at least one second variable include two or more different physical quantities.

Abstract: A computer readable medium comprising instructions which when executed by a computer system causes the computer to implement a method for creating a dynamic value network map of a process flow is provided. For a plurality of processed objects, the method identifies corresponding value stream metrics and triggers a state engine to simulate the process flow. The state engine is configured to manage all operations rules related to the value network map. The method dynamically updates the value stream metrics during the simulation of the value network map.

Abstract: The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messages with high statistical relevance.

Abstract: A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

Abstract: Methods and systems for controlling a cement finishing mill, and operating the mill at an optimal point, are disclosed. To determine an optimal point of operation, values of mill power and sound are collected and compared to values predicted by a model to determine if the mill is choking. This choking determination is used in one of two processes to determine an optimal point of operation for the mill. In the first process, as long as the mill is not choking, the amount of fresh feed input to the mill is incrementally increased; when choking occurs, the amount of fresh feed is decreased until choking ceases. In the second process, the amount of fresh feed input to the mill is increased and decreased in an oscillating manner over time, to find the amount of feed that results in the mill approaching, but never reaching, a choking state.

Abstract: A method of performing measurement sampling in a production process includes passing a lot through a manufacturing process, employing a set of combinational logistics to determine if sampling is indicated and, if sampling is indicated, establishing a sampling decision. The method further requires querying a set of lot sampling rules to evaluate the sampling decision, evaluating a statistical quality of the process if no lot sampling rules exist, and automatically determining whether the lot passing through the production process requires sampling based on the combinational logistics, statistical quality and lot sampling rules.

Abstract: In a method for detecting abnormal characteristic values of at least three products sequentially manufactured in the same manufacturing line, it is determined whether or not a successively-alternate increase/decrease tendency has occurred in a plurality of sequentially-obtained characteristic values of the products. Also, it is determined whether or not at least one of the characteristic values is located within a control region narrower than an allowable region and outside a normal region narrower than the control region. Further, when the successively-alternate increase/decrease tendency has occurred and the at least one characteristic value is located within the control region outside the normal region, an alarm state is detected.

Abstract: Provided is system and method for controlling a fabrication cluster using at least one parameter of a structure measured with an optical metrology system designed and configured to meet one or more signal criteria. The design of the optical metrology system is optimized by using collected signal data in comparison to set one or more signal criteria. In one embodiment, the optical metrology system is used for standalone systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing. At least one parameter determined from a signal measured using the optical metrology system is transmitted to a fabrication cluster. The at least one parameter is used to modify at least one process variable or equipment setting of the fabrication cluster.

Abstract: A signaling device, in particular a signal pillar 1, is provided which is able to generate signals even outside the range of the usual optical and acoustic signals, and flexibly create them as needed with little additional effort. This object is achieved by providing a wireless transmitting unit (8) for transferring data to a receiver in addition to the signal elements (2, 3, 4) for generating optical and/or acoustic signals, wherein the transmitting unit (8) is arranged in an exchangeable module.

Abstract: If a blank is mistakenly supplied to a precision machining apparatus corresponding to the wrong model, the missupply can be detected early on by a simple method. A method for manufacturing a base member, which is a method for manufacturing a base member on which a plurality of members are mounted, in which a plurality of kinds of material are machined according to a machining program that differs for each material, said method including the following steps.

Abstract: A method of determining a segment-specific estimate of a parameter associated with a process control loop includes receiving signal data corresponding to a signal from a process control loop, storing the signal data, partitioning the stored signal data into a plurality of data segments and performing a statistical analysis on a first one of the plurality of data segments selected from the plurality of data segments to generate a first segment-specific parameter estimate.

Abstract: A method of adjusting process variables in a processing flow is disclosed. Processed samples are tested to determine sample parameters of the tested samples. The sample parameters are analyzed analyzing in relation to the process variables applied in the processing steps to determine the impact of the process variables on the sample parameters The process variables are modified in an attempt to change the sample parameters towards predetermined target values. And, the sequence of processing steps is repeated with the modified process variables.

Abstract: A system and method for generating a real time electronic quality record of an assembly, test, and repair or maintenance operation. The method involves generating inputs from a plurality of information sources located within a manufacturing environment, the information sources providing information pertaining to at least a tool being used, an individual using the tool, and an operation that the tool is being used by the individual to perform. A locating system is in communication with the information sources to monitor a location and an operation of the tool. A processor is in communication with the locating system to receive the generated inputs, and to generate a real time electronic record upon completion of the operation that the tool is being used to perform. The electronic record shows that the operation has been performed by a given individual using the tool in accordance with a predefined standard.

Abstract: The present invention provides a system and method for measuring physical, chemical and biological properties of a manufacturing system comprising embedding a plurality of RFID sensors in a plurality of corresponding single use components wherein each of the plurality of RFID sensors is configured to provide multi-parameter measurements for at least one single use component from the plurality of single use components, and each of the plurality of RFID sensors is further configured to provide simultaneous digital identification for the single use component and for its respective RFID sensor and further comprises reading the multi-parameter measurements and the digital identification for the plurality of single use components using at least one RFID writer/reader, processing the measurements using a processor, and controlling subsequent process steps by comparing the measurements of at least one parameter to a predetermined value.

Abstract: Systems and methods that configure an embedded historian(s) to a predetermined setting and an automatic propagation thereof to other embedded historians and units on the factory floor. Embedded historian can be automatically configured, and be set up as a default collection for a plant scan, such that when a plant comes on-line, embedded historians announce their presence to such plant, and are discovered thereby and configured thereby.

Abstract: A method of manufacturing an article includes the steps of: establishing a defined location for a tool activity to occur; determining an actual location of the tool; comparing the actual location of the tool with the defined location; ascertaining an occurrence of the tool activity at the actual location; and verifying whether the tool activity occurred at the defined location.

Abstract: A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a respective one of a plurality of metal target blanks to one or more comparable values of at least one desired criterion; selecting one of the metal target blanks from a plurality of metal target blanks as a work-in-progress; assigning a serial route for the work-in-progress; processing the work-in-progress by translating the work-in-progress from note to node with an automated transport, after completion of the events at each node; rejecting or accepting the work-in-progress as a metal target by evaluating a result of at least one event of the one or more respective events to be completed at, at least one of the plurality of nodes.

Abstract: An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on ICs at probe to determine whether any further repairs will be conducted later in the manufacturing process includes storing the data in association with a fuse ID of each of the ICs. The ID codes of the ICs are automatically read, for example, at an opens/shorts test during the manufacturing process. The data stored in association with the ID codes of the ICs is then accessed, and additional repair procedures the ICs may undergo are selected in accordance with the accessed data. Thus, for example, the accessed data may indicate that an IC is unrepairable, so the IC can proceed directly to a scrap bin without having to be queried to determine whether it is repairable, as is necessary in traditional IC manufacturing processes.