Collimator for a physical vapor deposition chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top perspective view of collimator for a physical vapor deposition chamber showing our new design.

FIG. 2 is a bottom perspective view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a right side elevation view thereof.

FIG. 6 is a left side elevation view thereof.

FIG. 7 is a front elevation view thereof.

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3.

The broken lines in the drawings illustrate environment of the collimator for a physical vapor deposition chamber that form no part of the claimed design.

Claims

We claim the ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.

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Patent History
Patent number: D1009816
Type: Grant
Filed: Aug 29, 2021
Date of Patent: Jan 2, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Keith A. Miller (Mountain View, CA), Fuhong Zhang (San Jose, CA), Luke Vianney Varkey (Milpitas, CA), Kishor Kumar Kalathiparambil (Santa Clara, CA), Xiangjin Xie (Sunnyvale, CA)
Primary Examiner: Shawn T Gingrich
Assistant Examiner: Caleb M Baker
Application Number: 29/805,681