Collimator for a physical vapor deposition chamber
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Description
The broken lines in the drawings illustrate environment of the collimator for a physical vapor deposition chamber that form no part of the claimed design.
Claims
We claim the ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.
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Patent History
Patent number: D1009816
Type: Grant
Filed: Aug 29, 2021
Date of Patent: Jan 2, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Keith A. Miller (Mountain View, CA), Fuhong Zhang (San Jose, CA), Luke Vianney Varkey (Milpitas, CA), Kishor Kumar Kalathiparambil (Santa Clara, CA), Xiangjin Xie (Sunnyvale, CA)
Primary Examiner: Shawn T Gingrich
Assistant Examiner: Caleb M Baker
Application Number: 29/805,681
Type: Grant
Filed: Aug 29, 2021
Date of Patent: Jan 2, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Keith A. Miller (Mountain View, CA), Fuhong Zhang (San Jose, CA), Luke Vianney Varkey (Milpitas, CA), Kishor Kumar Kalathiparambil (Santa Clara, CA), Xiangjin Xie (Sunnyvale, CA)
Primary Examiner: Shawn T Gingrich
Assistant Examiner: Caleb M Baker
Application Number: 29/805,681
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)