Wafer holder for ion implantation
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The broken lines shown in the drawings represent portions of the wafer holder for ion implantation that form no part of the claimed design.
Claims
The ornamental design for a wafer holder for ion implantation, as shown and described.
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Type: Grant
Filed: Mar 8, 2013
Date of Patent: Apr 22, 2014
Assignee: Sumitomo Electric Industries, Ltd. (Osaka-shi)
Inventor: Ren Kimura (Osaka)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/448,062