Elastic membrane for semiconductor wafer polishing
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Description
The broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for an elastic membrane for semiconductor wafer polishing, as shown and described.
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Patent History
Patent number: D711330
Type: Grant
Filed: Jan 28, 2011
Date of Patent: Aug 19, 2014
Assignee: Ebara Corporation (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Osamu Nabeya (Tokyo), Katsuhide Watanabe (Tokyo), Keisuke Namiki (Tokyo)
Primary Examiner: Selina Sikder
Application Number: 29/384,219
Type: Grant
Filed: Jan 28, 2011
Date of Patent: Aug 19, 2014
Assignee: Ebara Corporation (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Osamu Nabeya (Tokyo), Katsuhide Watanabe (Tokyo), Keisuke Namiki (Tokyo)
Primary Examiner: Selina Sikder
Application Number: 29/384,219
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)