Upper chamber liner

- Applied Materials, Inc.
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Description

FIG. 1 is a top perspective view of an upper chamber liner showing our new design;

FIG. 2 is another perspective view thereof;

FIG. 3 is a bottom perspective thereof;

FIG. 4 is another perspective view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a side view thereof;

FIG. 8 is another side view thereof;

FIG. 9 is another side view thereof;

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 5;

FIG. 11 is an enlarged portion view taken along lines 11-11 in FIG. 10; and,

FIG. 12 is an enlarged portion view taken along lines 12-12 in FIG. 10.

The broken lines in the figures form no part of the claimed design.

The upper chamber liner is shown broken away in FIGS. 11 and 12 to indicate that no particular length is claimed.

All surfaces not shown, form no part of the claimed design.

Claims

The ornamental design for an upper chamber liner, as shown and described.

Referenced Cited
U.S. Patent Documents
4340462 July 20, 1982 Koch
D404370 January 19, 1999 Kimura
D404372 January 19, 1999 Ishii
6170429 January 9, 2001 Schoepp et al.
6277237 August 21, 2001 Schoepp et al.
6884297 April 26, 2005 Park et al.
7011039 March 14, 2006 Mohn et al.
7234412 June 26, 2007 Carpenter et al.
D556704 December 4, 2007 Nakamura et al.
D557226 December 11, 2007 Uchino et al.
D593969 June 9, 2009 Li
D600221 September 15, 2009 Sato
D600222 September 15, 2009 Sato
7942969 May 17, 2011 Riker et al.
7987814 August 2, 2011 Carducci et al.
8118938 February 21, 2012 Carducci et al.
D658691 May 1, 2012 Suzuki et al.
D658692 May 1, 2012 Suzuki et al.
D658693 May 1, 2012 Suzuki et al.
8282736 October 9, 2012 Carducci et al.
8313578 November 20, 2012 Carducci et al.
D678228 March 19, 2013 Suzuki et al.
D699692 February 18, 2014 Yousif
20020069970 June 13, 2002 Noorbakhsh et al.
20050229849 October 20, 2005 Silvetti et al.
20080041820 February 21, 2008 Tong et al.
20080121620 May 29, 2008 Guo et al.
Patent History
Patent number: D716239
Type: Grant
Filed: Nov 6, 2013
Date of Patent: Oct 28, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Shu-Kwan Lau (Sunnyvale, CA), Mehmet Tugrul Samir (Mountain View, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/471,945